CN113624722A - Flexible resonance type optical chip and sensor using same - Google Patents
Flexible resonance type optical chip and sensor using same Download PDFInfo
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- CN113624722A CN113624722A CN202111008649.4A CN202111008649A CN113624722A CN 113624722 A CN113624722 A CN 113624722A CN 202111008649 A CN202111008649 A CN 202111008649A CN 113624722 A CN113624722 A CN 113624722A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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Abstract
The invention discloses a flexible resonance type optical chip, which comprises a bearing part, a flexible substrate, a flexible optical transparent polymer material and a flexible optical transparent polymer material, wherein the bearing part is a flexible substrate; the low-refractive-index buffer layer is formed on one surface of the bearing piece. The invention also discloses a sensor applying the flexible resonance type optical chip. According to the invention, the flexible polymer material is adopted to replace the rigid substrates such as glass, silicon and the like which are adopted in the past, so that the mechanical flexibility is greatly improved, the rigid substrates are not easy to damage, and experimental tests show that the optical characteristics of the flexible polymer material are not influenced by the change of the substrate material. The flexible resonance type chip can be applied to prism coupling, grating coupling, optical waveguide coupling and other modes, and has high flexibility and strong applicability.
Description
Technical Field
The invention belongs to the technical field of optical sensors, and particularly relates to a flexible resonance type optical chip and a sensor using the chip.
Background
The Surface Plasma Resonance (SPR) sensor is a biochemical detection and analysis instrument based on Surface evanescent wave sensitivity, has the advantages of electromagnetic interference resistance, no marking, in-situ real-time performance and the like, and has wide application requirements in the fields of environmental monitoring, food safety and public safety detection, clinical medicine, biological and life science, Surface and interface science and the like. However, the substrate is made of rigid materials such as silicon and glass, and the mechanical flexibility is seriously insufficient, so that the substrate cannot be applied to numerous emerging fields such as wearable equipment and foldable display equipment. At present, a flexible resonant chip which is simple to manufacture and low in cost is also lacking.
Disclosure of Invention
The invention aims to provide a flexible resonance type optical chip, which solves the problem that the mechanical flexibility of the existing substrate is seriously insufficient.
Another object of the present invention is to provide a sensor using a flexible resonance type optical chip.
The first technical scheme adopted by the invention is as follows: a flexible resonant-type optical chip, comprising:
a carrier, which is a flexible substrate, using a flexible optically transparent polymer material;
the low-refractive-index buffer layer is formed on one surface of the bearing piece.
The first technical solution of the present invention is also characterized in that,
the material of the carrier is not limited to one of Polymethylmethacrylate (PMMA), polyethylene terephthalate (PET), or Polydimethylsiloxane (PDMS).
The material of the low refractive index buffer layer is not limited to gold, silver or gold-silver alloy and other low refractive index metal and nonmetal materials.
The high-refractive-index dielectric layer is formed on the other surface, which is not in contact with the bearing piece, of the low-refractive-index buffer layer, and can be used as a flexible leaky-mode waveguide resonant chip and a sensor by using an optical transparent material; when the flexible resonance type optical chip is used as a flexible surface plasmon resonance chip or a sensor, the high refractive index medium layer may not exist.
High refractive index dielectric layer is not limited to TiO2Film, SiO2Film or Al2O3One of the films may also be another optically transparent material with a high refractive index, and may be porous or made ofDense form.
The surface molecule modification layer is formed on the surface of the low-refractive-index buffer layer or the surface of the high-refractive-index medium layer and used for realizing the identification of specific biochemical molecules such as glucose molecules, antigen molecules and the like.
The buffer layer is formed between the bearing piece and the low refractive index buffer layer, and is used for enhancing the bonding force between the bearing piece and the low refractive index buffer layer.
The transition film is made of one of chromium, titanium, nickel or tantalum and has a thickness of 1-5 nm.
The second technical scheme adopted by the invention is as follows: a sensor employing a flexible resonance type optical chip, comprising:
the prism coupler is positioned on the other surface of the bearing piece, which is not in contact with the low-refractive-index buffer layer, and the bearing piece is in close contact with the bottom surface of the prism coupler through coupling liquid;
a light source located at a first side of the prism coupler;
a linear polarizer located between the light source and the prism coupler;
a photodetector positioned at the second side of the prism coupler;
light emitted by the light source is linearly polarized through the linear polarizer and enters the first side face of the prism coupler at a preset incidence angle, total reflection occurs at the interface of the bearing piece and the low-refractive-index buffer layer, and reflected light is output from the second side face of the prism coupler and then received by the photoelectric detector.
The second technical solution of the present invention is also characterized in that,
the prism coupler is a right-angle prism, a semi-cylindrical prism or a hemispherical prism;
when the prism coupler is a right-angle prism, the first side surface and the second side surface of the prism coupler are respectively two right-angle surfaces, the bottom surface of the prism coupler is an inclined surface, and the right-angle prism is an isosceles right-angle prism;
when the prism coupler is a semi-cylindrical prism or a hemispherical prism, the first side surface and the second side surface of the prism coupler are respectively two symmetrical arc surfaces, and the bottom surface of the prism coupler is a plane of the semi-cylindrical prism or the hemispherical prism.
The invention has the beneficial effects that:
1) according to the invention, the flexible polymer material is adopted to replace the rigid substrates such as glass, silicon and the like which are adopted in the past, so that the mechanical flexibility is greatly improved, the rigid substrates are not easy to damage, and experimental tests show that the optical characteristics of the flexible polymer material are not influenced by the change of the substrate material.
2) The flexible resonance type chip can be applied to prism coupling, grating coupling, optical waveguide coupling and other modes, and has high flexibility and strong applicability.
Drawings
FIG. 1 is a schematic structural diagram of a flexible resonance type optical chip of the present invention used as a flexible surface plasmon resonance chip;
FIG. 2 is a schematic structural diagram of a flexible resonance-type optical chip of the present invention used as a flexible leaky-mode waveguide resonance chip;
FIG. 3 is a schematic diagram of a sensor using a flexible resonance type optical chip according to the present invention;
FIG. 4 is an experimentally measured reflectance spectrum of an embodiment of the present invention using a flexible surface plasmon resonance chip at a visible light band and an incident angle of 12 °;
FIG. 5 shows the reflection spectrum of the leaky-mode waveguide resonant chip in the visible light band at an incident angle of 12 ° according to the embodiment of the present invention;
FIG. 6 is a graph of experimentally measured reflectance spectra of an embodiment of the present invention using a flexible surface plasmon resonance chip at visible light bands with increasing incident angles;
fig. 7 shows experimentally measured reflection spectra of leaky-mode waveguide resonant chips according to the embodiment of the invention at visible light bands with gradually increasing incident angles.
In the figure, 1, a bearing part, 2, a low-refractive-index buffer layer, 3, a high-refractive-index medium layer, 4, a prism coupler, 5, a light source, 6, a linear polarizer and 7, a photoelectric detector are arranged.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
In one exemplary embodiment of the present invention, a flexible surface plasmon resonance chip (SPR chip) is presented. FIG. 1 is a schematic diagram of the structure of an SPR chip according to the embodiment of the present invention. As shown in fig. 1, the SPR chip includes: the bearing part 1 is made of flexible polymer PDMS; the low-refractive-index buffer layer 2 is formed on one surface of the bearing piece 1, is made of a gold film and is formed by directly sputtering magnetron sputtering ions, and the manufacturing method is simple.
In another exemplary embodiment of the present invention, a flexible leaky film waveguide resonant chip is provided. Fig. 2 is a schematic structural diagram of a leaky-mode waveguide resonant chip according to an embodiment of the invention. As shown in fig. 2, the flexible leaky film waveguide resonant chip includes: the bearing part 1 is made of flexible polymer PDMS; the low-refractive-index buffer layer 2 is formed on one surface of the bearing piece 1 and is made of a gold film; preparing a layer of TiO on the other side of the buffer layer with low refractive index2And the colloid film layer 3 is used for generating leaky-mode waveguide resonance.
Fig. 3 is a schematic structural diagram of a leaky-mode waveguide resonant sensor based on a prism coupling mode according to an embodiment of the present invention, in which a prism is an isosceles right-angle prism. The light source 5 is arranged on one side of the prism coupler 4, the linear polarizer 6 is arranged between the light source 5 and the prism coupler 4, light emitted by the light source 5 vertically penetrates through the linear polarizer 6 to become TM polarized light, the TM polarized light irradiates one mirror surface of the prism coupler 4 to be refracted and enter the prism coupler 4, and total reflection occurs at the interface of the flexible substrate 1 of the sensor and the low-refractive-index buffer layer gold film 2; at a specific incident angle or a specific wavelength, an evanescent field generated by total reflection can be formed between the low-refractive-index buffer layer gold film 2 and the TiO2Surface plasmon waves are excited at the interface of the thin film layer 3, resulting in a large attenuation of the reflected light energy. The photodetector 7 is disposed on the other side of the prism coupler 4 opposite to the light source 5, the reflected light emitted from the prism coupler 4 is received by the photodetector 7, and the sensor can acquire relevant information by monitoring the change of the reflected light in real time.
FIG. 4 shows the reflection spectrum of the SPR chip of the present invention in the visible light band, wherein the incident angle θ is 12 °. Experimental results show that the resonance peak wavelength of the SPR chip is within the range of 550-600nm, and the resonance peak is obvious.
Fig. 5 is an experimentally measured reflection spectrum of the leaky-mode waveguide resonant chip according to the embodiment of the invention in the visible light band, where an incident angle θ is 12 °. Experimental results show that when a beam of light enters the prism, total reflection of the light occurs at the PDMS-Au interface, and an evanescent field generated by the total reflection of the light occurs at TiO2Guided modes are excited in the thin film layer, and resonance causes a resonance peak to appear in a partial wavelength range in a reflection spectrum of incident light. As can be clearly seen from FIG. 5, the resonance peak of the sensor of the embodiment of the present invention has a wavelength in the range of 600-650nm, and the resonance peak is obvious.
FIG. 6 shows the reflection spectrum of a flexible SPR chip according to the present invention measured experimentally in visible light bands at increasing incidence angles. In the figure, when the incident angle theta is gradually increased from 12 degrees to 16 degrees, a clear resonance peak is still visible in the reflection spectrum of the SPR chip, and the wavelength of the resonance peak is gradually shifted to the infrared spectrum region along with the increase of the incident angle theta, namely, the resonance peak is subjected to red shift.
Fig. 7 is an experimentally measured reflection spectrum of the leaky-mode waveguide resonant chip according to the embodiment of the invention in the visible light band when the incident angle is gradually increased. When the incident angle theta is 9-14 degrees, as is apparent from fig. 7, the resonance peak in the reflection spectrum of the leaky film waveguide resonant sensor is obvious, which proves that under a plurality of different angles, the guided mode is excited at the guided wave layer, energy leaks, and the wavelength of the resonance peak gradually shifts to the infrared spectrum region with longer wavelength along with the increase of the incident angle theta, namely the resonance wavelength is red-shifted.
Claims (10)
1. A flexible resonant-type optical chip, comprising:
a carrier (1) being a flexible substrate, using a flexible optically transparent polymer material;
and the low-refractive-index buffer layer (2) is formed on one surface of the bearing piece.
2. A flexible resonance-type optical chip according to claim 1, wherein the material of the carrier (1) is one of polymethylmethacrylate, polyethylene terephthalate or polydimethylsiloxane.
3. A flexible resonance-type optical chip according to claim 1, wherein the material of the low refractive index buffer layer (2) is gold, silver or a gold-silver alloy.
4. A flexible resonance type optical chip according to claim 1, further comprising a high refractive index dielectric layer (3) formed on the other surface of the low refractive index buffer layer (2) not in contact with the carrier (1), using an optically transparent material.
5. The flexible resonant optical chip of claim 4, wherein said high index dielectric layer is TiO2Film, SiO2Film or Al2O3One of the thin films.
6. The flexible resonance-type optical chip according to claim 4, further comprising a surface molecule modification layer formed on the surface of the low refractive index buffer layer (2) or the surface of the high refractive index dielectric layer (3).
7. A flexible resonance type optical chip according to claim 1, further comprising a transition film formed between said carrier (1) and said low refractive index buffer layer (2).
8. The flexible resonance-type optical chip according to claim 7, wherein the transition film is made of one of Cr, Ti, Ni or Ta and has a thickness of 1-5 nm.
9. A sensor using a flexible resonance type optical chip according to any one of claims 1 to 8, comprising:
a prism coupler (4) located on the other surface of the carrier (1) not in contact with the low refractive index buffer layer (2);
a light source (5) located at a first side of the prism coupler (4);
a linear polarizer (6) located between the light source (5) and the prism coupler (4);
a photodetector (7) located at a second side of the prism coupler (4);
the light emitted by the light source (5) is linearly polarized through the linear polarizer (6) and enters the first side face of the prism coupler (4) at a preset incidence angle, total reflection occurs at the interface of the bearing piece (1) and the low-refractive-index buffer layer (2), and the reflected light is output from the second side face of the prism coupler (4) and then received by the photoelectric detector (7).
10. The sensor using the flexible resonance type optical chip according to claim 9, wherein the prism coupler (4) is a right-angle prism, a semi-cylindrical prism or a hemispherical prism;
when the prism coupler (4) is a right-angle prism, the first side surface and the second side surface of the prism coupler are two right-angle surfaces respectively, the bottom surface of the prism coupler is an inclined surface, and the right-angle prism is an isosceles right-angle prism;
when the prism coupler (4) is a semi-cylindrical prism or a hemispherical prism, the first side surface and the second side surface of the prism coupler are respectively two symmetrical arc surfaces, and the bottom surface of the prism coupler is the plane of the semi-cylindrical prism or the hemispherical prism.
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| CN202111008649.4A CN113624722A (en) | 2021-08-30 | 2021-08-30 | Flexible resonance type optical chip and sensor using same |
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| CN202111008649.4A CN113624722A (en) | 2021-08-30 | 2021-08-30 | Flexible resonance type optical chip and sensor using same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114720429A (en) * | 2022-04-12 | 2022-07-08 | 无锡简测生物科技有限公司 | Optical measurement system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114720429A (en) * | 2022-04-12 | 2022-07-08 | 无锡简测生物科技有限公司 | Optical measurement system |
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