CN104165684B - Surface plasmon resonance-based supersensitive hydrophone - Google Patents
Surface plasmon resonance-based supersensitive hydrophone Download PDFInfo
- Publication number
- CN104165684B CN104165684B CN201410341327.5A CN201410341327A CN104165684B CN 104165684 B CN104165684 B CN 104165684B CN 201410341327 A CN201410341327 A CN 201410341327A CN 104165684 B CN104165684 B CN 104165684B
- Authority
- CN
- China
- Prior art keywords
- fiber
- air gap
- mode
- spr
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention relates to a surface plasmon resonance-based supersensitive hydrophone comprising a laser light source, an optical isolator, a polarization controller, a 2*1 coupler, a single-mode transmission fiber, a side-polished single-mode fiber, an air gap, a gold film-plated approximate horn-shaped surface plasmon resonance (SPR) sensor, a total reflection film, a photoelectric detector, a data acquisition card (DAC) and a PC computer. The air gap is formed by the side-polished single-mode fiber and the gold film-plated approximate horn-shaped SPR sensor; and the side-polished single-mode fiber, the air gap and the gold film-plated approximate horn-shaped SPR sensor form an optical fiber vibration sensing head. The external environment vibration vibrates to act on the gold film of the approximate horn-shaped SPR sensor, thereby causing the vibration of the gold film; the air gap changes, so that the SPR spectrum is changed; and the strength of the specific wavelength is detected, thereby realizing vibration measurement. The provided surface plasmon resonance-based supersensitive hydrophone has advantages of high practicability, low cost, high sensitivity, and good strength detection.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, listen particularly to the ultra-sensitivity water based on surface plasma body resonant vibration
Device.
Background technology
Surface plasma body resonant vibration (surface plasmon resonance, abbreviation spr) refers to the p sending when light source
Type polarizes polychromatic light when film metal is with the interface of medium, if meeting angle of incidence to be more than the cirtical angle of total reflection, on surface
On define the Gradient distribution of electron concentration, form plasma oscillation, form surface plasma wave, due to surface evanescent wave
And metal complex refractivity index presence, so that the light meeting resonance wavelength is partly absorbed, the phenomenon that the light of its commplementary wave length is reflected.
Nineteen sixty-eight, roentgen otto and kretschmann each adopt (attenuated total reflection, referred to as
Atr method) achieves exciting of the surface plasma of optical frequency wave band in an experiment.1993, jorgenson et al. was in reality
Test the optical fiber chemical industry sensor achieving based on spr, compared to prism spr sensor, it has small volume, responds fast, one-tenth
Basis is low, can be implemented in the advantages such as line real-time monitoring, has bigger Research Prospects and economic worth.
Since from after World War II, underwater acoustic technology has obtained considerable sending out under the surging promotion of military requirement
Exhibition, sound field is the important way collecting, transmit and process bathypelagic information, and fibre optic hydrophone is a kind of foundation in optical fiber, light
Underwater signal vibrating sensor in Fundamentals of Electronic Technology, is mainly used in acoustic propagation in marine acoustics environment, noise, mixed
Sound, the monitoring of submarine acoustic characteristic, target acoustical characteristic etc..Fibre optic hydrophone is broadly divided into intensity type, polarization-type and phase place and does
Relate to type, wherein interference-type is the focus of current research.Interference type optical fiber hydrophone is to light in single mode fiber coil using sound wave
Phase place be modulated so that sensing fiber coil occurs buoyancy effect and strain effect, fiber optic coils produce vibration as passing
Sense unit.Have using cylindrical hollow free overflow type structure in reporting at present, pickup arm Optical Fiber Winding on elastic body outer,
Reference arm optical fiber is wrapped in pops one's head in as acoustic vibration on internal layer elastomer, and this structural sensitivity depends primarily on elastomer
Sensitivity, sensitivity is low and complex structure；Someone combines LPFG as the vibration of hydrophone by the use of simple rack
Sensor, this design frame for movement relative simplicity, but LPFG is handed over by crossover temperature, refractive index, strain etc. easily
The impact of fork parameter is it is therefore desirable to the signal solution system of complexity；Middle ship heavy industry 715 institute joint Zhejiang University has reported for work employing
Metal clips as sensitization structure optical fiber raster vibration sensor as hydrophone probe, michelson interferometer carries out
Demodulation, this structure is compared sensitivity of above reporting for work and be increased, but cost increases.These are as the vibrating sensing of fibre optic hydrophone
Device otherwise complex structure, otherwise demodulated equipment is expensive, otherwise be accomplished by the data handling procedure of complexity, and on the whole each
The sensitivity of structure is not high, and the shortcoming of these vibrating sensors seriously hinders development and the application of fibre optic hydrophone.
For vibration sensing head complex structure, measurement cost height, data processing complex, sensitivity in above-mentioned fibre optic hydrophone
Low problem, the present invention proposes a kind of ultra-sensitivity hydrophone based on surface plasma body resonant vibration.With class " loudspeaker in the present invention
" structural base gold-plated film as acoustic receiver head, the optical fiber spr vibration sensing head that constitutes with Side polishing fiber single-mode fiber, with
Acoustic vibration, the gap between golden film and optical fiber changes, so that spr resonance wavelength changes.Therefore, the present invention
The ultra-sensitivity sensing being capable of microvibration based on the ultra-sensitivity hydrophone of surface plasma body resonant vibration proposing, structure
Simply, low cost, has very strong practical value.
Content of the invention
In order to overcome vibration sensing head complex structure in fibre optic hydrophone, measurement cost height, data processing complex, sensitivity
Low problem, the present invention proposes that a kind of structure is simple, ultra-sensitivity, low cost, practical based on surface plasma
The ultra-sensitivity hydrophone of resonance.
The technical scheme that the present invention is taken by solution technical problem:
Ultra-sensitivity hydrophone based on surface plasma body resonant vibration, comprising: LASER Light Source, optoisolator, Polarization Control
Device, 2 × 1 bonders, single-mode transmission optical fiber, Side polishing fiber single-mode fiber, it is coated with class " loudspeaker " the spr sensor of golden film, is all-trans
Penetrate film, photodetector, data collecting card (dac) and pc machine.
The outfan of LASER Light Source is connected with optoisolator input, the outfan of optoisolator and Polarization Controller phase
Even, one end that 2 × 1 bonders have two-port is connected with photodetector respectively at the outfan of Polarization Controller, data acquisition
Card (dac) is connected with the outfan of photodetector and pc machine respectively, and wherein photodetector has time resolution characteristics；2×1
One end of the Single port of bonder is connected with one end of single-mode transmission optical fiber, the other end of single-mode transmission optical fiber and Side polishing fiber list
The uncoated one end of mode fiber is connected, and the other end of Side polishing fiber single-mode fiber is coated with total reflection film.Side polishing fiber single-mode fiber
Form the air gap with class " loudspeaker " the spr sensor being coated with golden film, the thickness of Side polishing fiber single-mode fiber residue covering exists
Between 50nm～250nm, between 1nm～12nm, between 40nm～70nm, surface is thick for golden film thickness for the width of the air gap
The root-mean-square of rugosity is less than or equal to 5nm, and the metallic film of gold-plated film have good elasticity, pliability and thickness 1mm～
Between 5mm, total reflection film is more than or equal to 90% to the reflectance of resonance wavelength；By Side polishing fiber single-mode fiber, the air gap, plating
Ultra-sensitivity optical fiber vibration sensing head is formed by class " loudspeaker " the spr sensor of golden film.Photodetector data capture card
(dac) as the demodulator of spr sensor.
The invention has the benefit that
The present invention by the use of Side polishing fiber single-mode fiber, the air gap, be coated with class " loudspeaker " the spr sensor of golden film as super
Sensitivity optical fiber vibration sensing head, when external environment occur vibration when, be coated with golden film class " loudspeaker " spr sensor gold-plated thin
Film also vibrates, and the width of the air gap changes with vibration, then so that spr spectrum is changed, and is treated by detection
The intensity of given wavelength, it is possible to achieve supersensitive vibration measurement.
, by the use of total reflection film as reflecting mirror, structure is simple for the present invention, realizes the reflective measurement of highly sensitive vibration.
In the present invention, demodulating system uses photodetector, realize the detection of light intensity, it is to avoid expensive spectrum demodulation
The use of instrument equiwavelength's testing equipment, reduces cost.
Brief description
Fig. 1 is the ultra-sensitivity hydrophone structure schematic diagram based on surface plasma body resonant vibration.
Specific embodiment
Below in conjunction with the accompanying drawings invention is further described.
As shown in figure 1, the ultra-sensitivity hydrophone based on surface plasma body resonant vibration, including LASER Light Source 1, optoisolator
2, Polarization Controller 3,2 × 1 bonders 4, single-mode transmission optical fiber 5, Side polishing fiber single-mode fiber 6, the air gap 7, it is coated with golden film
Class " loudspeaker " spr sensor 8, total reflection film 9, photodetector 10, data collecting card (dac) 11 and pc machine 12.Laser light
The outfan in source 1 is connected with optoisolator 2, and the outfan of optoisolator 2 is connected with Polarization Controller 3, and the two of 2 × 1 bonders 4
One end of port is connected with the outfan of Polarization Controller 3 and photodetector 10 input respectively, one end of 2 × 1 bonders 4
Mouth one end is connected with one end of single-mode transmission optical fiber 5, and the other end of single-mode transmission optical fiber 5 is not plated with Side polishing fiber single-mode fiber 6
One end of film is connected, and is coated with class " loudspeaker " the spr sensor 8 of golden film and Side polishing fiber single-mode fiber 6 constitutes the air gap 7, side
The other end of side rubbing down single-mode fiber 6 is coated with total reflection film 9, and data collecting card (dac) 11 is exported with photodetector 10 respectively
End is connected with pc machine 12.P-polarization light is produced by LASER Light Source 1, optoisolator 2 and Polarization Controller 3 structure；By Side polishing fiber
Single-mode fiber 6, the air gap 7 and class " loudspeaker " the spr sensor 8 composition ultra-sensitivity optical fiber vibration sensing head being coated with golden film,
The thickness of the remaining covering of Side polishing fiber single-mode fiber 6 between 50nm～250nm, the width of the air gap 7 1～12nm it
Between, as spr sensing unit, between 40nm～70nm, surface is thick for golden film thickness for class " loudspeaker " the spr sensor 8 being coated with golden film
The root-mean-square of rugosity is less than or equal to 5nm, be coated with golden film metallic film have good elasticity, pliability and thickness 1mm～
Between 5mm；Total reflection film 9 is more than or equal to 90% to the reflectance of resonance wavelength；Photodetector 10, data collecting card 11 and
Pc machine 12 forms signal demodulation part.
The working method of the present invention is: LASER Light Source 1 produces flashlight, is input to optoisolator 2 by single-mode transmission optical fiber,
The optical signal of optoisolator 2 output controls output to become p-polarization light by Polarization Controller 3, and p-polarization light is by 2 × 1 bonders 4
2_1 port input, from the 1_1 port of 1 × 2 bonder 4 output p-polarization light side is transferred to by single-mode transmission optical fiber 5
Rubbing down optical fiber 6, the thickness due to side-polished fiber covering reduces, some patterns of fibre core and covering coupling in the form of evanescent wave
Close transmission in the air gap 7, in the air gap 7, the light wave of the pattern of transmission is being coated with class " loudspeaker " the spr sensor 8 of golden film
Golden film interface, occur spr effect, produce spr effect light wave presented in surface plasma-wave, remaining light wave continues
Resume and broadcast, be totally reflected through total reflection film 9, again pass by the air gap 7, in the gold of class " loudspeaker " the spr sensor 8 being coated with golden film
There is spr effect in membrane interface, the light producing the resonance wavelength of spr effect is exported by band sometimes by 22 ports of 2 × 1 bonders 4
Between the photodetector 10 of response characteristic receive, the optical signal of gained is changed into the signal of telecommunication by photodetector 10, the electricity obtaining
Signal is gathered by data collecting card (dac) 11 through shaping, filtering, amplification, and the signal by data collecting card (dac) 11 collection is defeated
Enter to pc machine 12 through row data display and analysis.By side-polished fiber, the air gap and class " loudspeaker " the spr biography being coated with golden film
The optical fiber vibration sensing head of sensor composition is very sensitive to the change of the air gap, with the increase of the air gap, produces spr effect
The resonance wavelength answered is drifted about to shortwave, and drift value has the good linearity with the variable quantity of the air gap.When extraneous ring
When border occurs vibration, act on the metallic film of class " loudspeaker " the spr sensor being coated with golden film of optical fiber vibration sensing head, occur
Vibration, leads to the width of the air gap to change with the change of frequency of vibration, and then spr spectrum is changed, pass through
The intensity of given wavelength is treated in detection, it is possible to achieve supersensitive vibration measurement.
This device is capable of the crucial skill of the ionization meter of the ultra-sensitivity hydrophone based on surface plasma body resonant vibration
Art has:
1st, the structure of optical fiber vibration sensing head.By side-polished fiber, the air gap and class " loudspeaker " spr being coated with golden film
The optical fiber vibration sensing head structure that sensor is constituted is to realize the basis of ultra-sensitivity sensing.
2nd, the width of the air gap.The resonance wavelength of spr can be drifted about with the thickness of the air gap, certain when exceeding
During scope, the evanescent wave being coupled to the air gap cannot excite the free charge of metal inside and produce surface plasma-wave, because
This, the width of the air gap that side-polished fiber is formed with class " loudspeaker " the spr sensor being coated with golden film should be strict controlled in
Between 1nm～12nm.
3rd, the thickness of side-polished fiber residue covering.With the reduction of cladding thickness, increasing fibre core can be made
Mode coupling to the air gap, if but covering is too thin, can lead to occur pattern and mismatch so that core mode is revealed completely, loss
Too big；Very little, spr coupling efficiency reduces the too thick pattern leading to be coupled to the air gap, and the thickness of therefore remaining covering should be controlled
System is between 50nm～250nm.
4th, it is coated with the thickness of sensing unit golden film and the roughness of golden film.Golden film thickness can affect the resonance wavelength resonance of spr
The acuity at peak and extinction ratio, the degree of roughness on golden film surface can affect the loss of surface plasma, and then affects spr's
Performance, therefore, the thickness of golden film should strictly control between 40nm～70nm, and the root-mean-square of the roughness on golden film surface should be less than
In 5nm.
5th, the metallic film of gold-plated film is very big on the measurement sensitivity impact of whole sensor, needs to select elasticity and has tough
The good material of property, and thickness is between 1mm～5mm.
6th, the total reflection film of side-polished fiber is more than or equal to 90% to the p-polarization luminous reflectance producing spr effect, simultaneously
This reflectance coating should smooth as far as possible；According to knowable to surface plasma body resonant vibration is theoretical, only p-polarization light could excitating surface plasma
Bulk wave (spw), ensures that hence with Polarization Controller the flashlight of the side-polished fiber of input is complete p-polarization light；Light source
Stability be also spr sensor error important sources, should ensure that the stability of light source works.
In one specific embodiment of the present invention, the optical fiber-coupled laser light source of thorlabs, model s1fc635pm exports
Wavelength 635nm；Optoisolator model io-2d-633-vlpa, operation wavelength be 603-663nm, isolation 35-40db it
Between,；Polarization Controller model fpc022, operation wavelength is 600-800nm；Side-polished fiber core diameter is 9 μm, remaining
The thickness of covering is 100nm, and axial length is 20 μm；Golden film thickness is 50nm, and surface roughness root-mean-square is 3.7nm；Air
The width in gap is 5nm；Fiber selection g.652 single-mode fiber；The reflectance of total reflection film is 95%；Photodetection with tail optical fiber
Device fdsp660, single-mode fiber, operation wavelength is 610-770nm；Simultaneous data-acquisition kpci-1818,8 channel parallel collections
Passage, sample frequency is 500ks/s, and sampling resolution is 12；One multi frequency generator；One speaker.
Shown in the above and in figure is only the preferred embodiment of the present invention.Those of ordinary skill in the art is not
On the premise of departing from the principle of the present invention, some modifications and improvement can also be made, these also should be regarded as belonging to the guarantor of the present invention
Shield scope.
Claims (1)
1. the ultra-sensitivity hydrophone based on surface plasma body resonant vibration, including LASER Light Source, optoisolator, Polarization Controller, 2
× 1 bonder, single-mode transmission optical fiber, Side polishing fiber single-mode fiber, the air gap, it is coated with class " loudspeaker " the spr sensor of golden film,
Total reflection film, photodetector, data collecting card and pc machine it is characterised in that:
The outfan of LASER Light Source is connected with optoisolator, and the outfan of optoisolator is connected with Polarization Controller, 2 × 1 couplings
The two-port end of device is connected with the outfan of Polarization Controller and photodetector input respectively, the Single port of 2 × 1 bonders
One end is connected with one end of single-mode transmission optical fiber, the other end of single-mode transmission optical fiber and Side polishing fiber single-mode fiber uncoated
End is connected, and is coated with class " loudspeaker " the spr sensor of golden film and Side polishing fiber single-mode fiber constitutes the air gap, Side polishing fiber single mode
The other end of optical fiber is coated with total reflection film, and data collecting card is connected with photodetector outfan and pc machine respectively；
P-polarization light is produced by LASER Light Source, optoisolator and Polarization Controller structure；By Side polishing fiber single-mode fiber, air
Gap and class " loudspeaker " the spr sensor composition ultra-sensitivity optical fiber vibration sensing head being coated with golden film, Side polishing fiber single-mode fiber
Between 50nm～250nm, the width of the air gap, between 1～12nm, is coated with the class " loudspeaker of golden film to the thickness of remaining covering
" as spr sensing unit, between 40nm～70nm, the root-mean-square of surface roughness is less than or equal to golden film thickness spr sensor
5nm, the metallic film being coated with golden film has good elasticity, pliability and thickness between 1mm～5mm；Total reflection film is to humorous
The reflectance of vibration wave length is more than or equal to 90%；Photodetector, data collecting card and pc machine composition signal demodulation part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410341327.5A CN104165684B (en) | 2014-07-15 | 2014-07-15 | Surface plasmon resonance-based supersensitive hydrophone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410341327.5A CN104165684B (en) | 2014-07-15 | 2014-07-15 | Surface plasmon resonance-based supersensitive hydrophone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104165684A CN104165684A (en) | 2014-11-26 |
| CN104165684B true CN104165684B (en) | 2017-01-18 |
Family
ID=51909602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410341327.5A Active CN104165684B (en) | 2014-07-15 | 2014-07-15 | Surface plasmon resonance-based supersensitive hydrophone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104165684B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105277513B (en) * | 2015-11-05 | 2023-08-29 | 中国计量大学 | Surface plasma resonance refractive index sensor based on optical fiber micro-ring |
| CN105738325B (en) * | 2016-02-29 | 2019-03-29 | 北京交通大学 | A kind of bilateral abrasive type SPR dual sampling device of multi-clad |
| CN107621274B (en) * | 2016-07-13 | 2020-01-07 | 上海交通大学 | Optical fiber sensor and sound wave detection application method thereof |
| CN108871697B (en) * | 2018-05-07 | 2020-09-25 | 长沙理工大学 | Gas leakage detection device with all-fiber structure |
| CN109142781B (en) * | 2018-10-15 | 2023-07-21 | 辽宁省计量科学研究院 | Wind speed measuring device and method based on surface plasma resonance |
| CN110132396A (en) * | 2019-04-29 | 2019-08-16 | 中国科学院光电技术研究所 | A kind of highly sensitive underwater sound wave detection device and method based on telescopic system |
| CN113466178A (en) * | 2021-06-30 | 2021-10-01 | 南京品傲光电科技有限公司 | Online microcavity optical fiber sensor based on SPW and manufacturing method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8661908B2 (en) * | 2010-06-01 | 2014-03-04 | Drexel University | Fiber optic hydrophone sensors and uses thereof |
| CN102183487B (en) * | 2011-02-11 | 2013-01-23 | 上海理工大学 | Manufacturing method of metal film plated double-humped resonance liquid sensor based on SPR (Surface Plasmon Resonance) |
| CN103398974B (en) * | 2013-07-30 | 2016-08-03 | 深圳大学 | A kind of Fibre Optical Sensor, preparation method and the system of measurement |
| CN203965028U (en) * | 2014-07-15 | 2014-11-26 | 中国计量学院 | Ultra-sensitivity nautical receiving set based on surface plasma body resonant vibration |
-
2014
- 2014-07-15 CN CN201410341327.5A patent/CN104165684B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104165684A (en) | 2014-11-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104165684B (en) | Surface plasmon resonance-based supersensitive hydrophone | |
| CN108036852B (en) | A kind of fibre-optical acoustic sensor and multiple spot acoustic detector | |
| CN104215610B (en) | Plasma resonance chamber-based fiber surface plasma sensor | |
| CN209821048U (en) | Selectable dual-channel optical fiber sensor | |
| CN105277271B (en) | A kind of the phase-shifted fiber grating sensor measuring system and its application of ultrasonic vibration | |
| CN105911025B (en) | A kind of distribution helical-core fiber surface plasma resonance sensor and its measurement method | |
| CN101769857A (en) | Plasma resonant type optical fiber biosensor based on annular core wave guide | |
| CN102809388B (en) | Optical fiber probe sensor | |
| CN109100008B (en) | Broadband and high-sensitivity acoustic sensor with multi-film packaging type waveguide coupling resonant cavity structure | |
| CN104596992A (en) | Maximally tilted fiber bragg grating SPR (Surface Plasmon Resonance) biochemical sensor and manufacture method thereof | |
| CN105277270B (en) | A kind of double mode vibration-detection system based on optical fiber grating sensing | |
| CN107860750B (en) | Sensing device based on tilted fiber bragg grating surface plasma resonance and parameter optimization method thereof | |
| CN203965028U (en) | Ultra-sensitivity nautical receiving set based on surface plasma body resonant vibration | |
| CN111829645B (en) | Acoustic/vibration monitoring system based on optical fiber sensor | |
| CN108663113A (en) | A kind of optic fibre cantilev vibrating sensor and preparation method thereof | |
| CN102095719A (en) | Optical fiber type sensor system based on surface plasma resonance and stimulated Raman scattering | |
| CN105277513B (en) | Surface plasma resonance refractive index sensor based on optical fiber micro-ring | |
| CN104280841A (en) | Electric field sensitive element of full-fiber structure and electric field sensing device | |
| CN201464025U (en) | Fiber grating acoustic sensor | |
| CN101718580B (en) | Sound vibration acquisition device based on optical grating | |
| CN106093715B (en) | A kind of electrical equipment partial discharge source positioning device and localization method | |
| CN209589854U (en) | A kind of coreless fiber hydrogen gas sensor based on fiber annular cavity-type BPM | |
| CN113029217A (en) | Optical fiber acoustic sensing system based on Fabry-Perot etalon and optical microphone | |
| CN109029797A (en) | A kind of high sensitivity optical fiber probe-type diaphragm structure measuring pressure loading | |
| CN205537938U (en) | Fibre optic hydrophone |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |