WO2017149713A1 - 光偏向装置 - Google Patents
光偏向装置 Download PDFInfo
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- WO2017149713A1 WO2017149713A1 PCT/JP2016/056523 JP2016056523W WO2017149713A1 WO 2017149713 A1 WO2017149713 A1 WO 2017149713A1 JP 2016056523 W JP2016056523 W JP 2016056523W WO 2017149713 A1 WO2017149713 A1 WO 2017149713A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Definitions
- the present invention relates to an optical deflecting device, and more specifically, an optical deflecting portion in which a pair of beam portions are provided on both sides of a movable portion having a light reflecting portion and a coil, and the light deflecting portion can swing via the beam portions. And a fixed part provided with a magnetic field forming part. The electromagnetic part generated by the current flowing through the coil and the magnetic field formed by the magnetic field forming part twists the beam part and swings the movable part about the rotation axis.
- the present invention relates to an optical deflection apparatus.
- the above-described optical deflecting device is a micro mechanical device manufactured by using MEMS (Micro Electro Mechanical Systems) technology or the like, and is used in a distance measuring device, a laser beam printer, or the like.
- MEMS Micro Electro Mechanical Systems
- Patent Document 1 for the purpose of providing a resonance type vibration motor for light deflection having excellent vibration isolation, a balancer in which a permanent magnet and a yoke forming a magnetic gap are disposed, and a magnetic gap
- a resonance type oscillating motor including an operation object to which a coil for generating a magnetic field is fixed and a support base, and the operation object and a balancer are connected to the support base so as to be able to resonate.
- a balancer and an operating object are connected to a support base using, for example, a leaf spring, and when a drive current flows through the coil, the magnetic field of the coil and the magnetic field of the permanent magnet Due to this interaction, a driving force having an equal size and an opposite direction is generated between the moving object and the balancer.
- the moving object and the balancer reach a resonance state having their respective amplitudes, and are held in this resonance state, so that vibrations to the parts related to writing and reading of the light beam through the member connected to the support base are performed. Transmission is prevented, and a vibration motor suitable for highly accurate positioning can be obtained.
- Patent Document 2 even when the reaction of the drive torque is periodically applied from the swing actuator device, the mirror vibration is suppressed and the machining accuracy is increased when the mirror angle is controlled to follow the command value.
- a mirror device is supported on the rotation shaft of the swing actuator device, and the mirror is positioned around the axis of the rotation shaft.
- the scanner device supports the swing actuator device and the resonance frequency of the support.
- a scanner device that includes a dynamic vibration absorber having equal natural frequencies, and the dynamic vibration absorber is fixed to a support.
- the light deflector provided with a pair of beams on both sides of the above-described light reflector and the movable part provided with the coil, and the light deflector is swingably fixed via the beam, and the magnetic field forming unit.
- a light deflection apparatus that includes a fixed portion provided with a beam portion and twists the movable portion with the beam portion as a rotation axis, the light deflection portion is fixed to the fixed portion provided with the magnetic field forming portion via the beam portion so as to be able to swing. Therefore, the vibration-proof structure disclosed in Patent Document 1 cannot be adopted.
- the scanner device disclosed in Patent Document 2 increases the responsiveness when the mirror is stopped by suppressing the vibration of the mirror due to the inertial force with the reaction force of the dynamic vibration absorber when the swing actuator device is stopped. For example, it is not a structure that suppresses vibrations exerted on other structural members by a mirror driven to swing.
- an object of the present invention is to provide an optical deflecting device that suppresses vibration transmitted to a fixed portion caused by swinging of the light deflecting portion and does not generate noise in a housing to which the fixed portion is attached.
- the first characteristic configuration of the optical deflecting device is as described in claim 1 of the claims, on both sides of the movable part including the light reflecting part and the coil.
- a drive current that flows in the coil comprising: an optical deflection unit provided with a pair of beam units; and a fixed unit having a magnetic field forming unit and the optical deflection unit fixed to be swingable through the beam units And an optical force generated by the magnetic field generated by the magnetic field forming unit, and the beam deflecting unit is twisted to rotate the movable unit about the rotation axis, which is opposite to the oscillation phase of the optical deflecting unit.
- a counter oscillating body that oscillates in phase is provided in the fixed portion so as to face the light deflecting portion.
- the light deflector is fixed to the fixed part so as to be swingable via the beam part, and the counter swinging body is disposed on the fixed part so as to face the light deflector. Then, the counter oscillating body is oscillated in the opposite phase to the oscillating phase of the light deflecting unit, so that the excitation force acting on the fixed part by the light deflecting unit is canceled by the excitation force of the counter oscillating body. Become.
- the counter oscillating body has a winding direction set to be opposite to the coil of the movable portion.
- a counter movable part provided with a counter coil and a pair of counter beam parts provided on both sides of the counter movable part, and the drive current to the counter coil in a direction opposite to the direction of the drive current applied to the coil Is configured to be applied.
- the drive currents flowing in the coil provided in the movable part and the counter oscillating body coil opposed to the light deflecting part are in opposite directions so that the light deflecting part and the counter oscillating body are oscillated and driven in opposite phases.
- the excitation force acting on the fixed portion by the light deflection unit is canceled by the excitation force of the counter oscillating body.
- the optical deflection unit and the counter oscillating body can be oscillated and driven in opposite phases with a common driving current, and if the optical deflection unit and the counter oscillating body have the same resonance frequency, both Is driven to swing completely in reverse phase.
- the resonance frequency of the light deflection unit and the resonance frequency of the counter oscillator are matched or close to each other. It is in the set point.
- the frequency of the drive current is set to the resonance frequency, that is, the natural frequency of the optical deflection unit
- the drive efficiency is maximized, but the resonance frequency of such a mechanical system varies greatly due to the influence of the ambient temperature.
- the amplitude of the light deflection unit In order to control the amplitude of the light deflection unit to be constant regardless of the temperature fluctuation, it is necessary to always grasp the fluctuation of the resonance frequency, otherwise the controllability is deteriorated. Therefore, by shifting the frequency of the drive current and the resonance frequency of the optical deflection unit and driving with a drive current in a frequency range where the drive efficiency is lower than the maximum efficiency, for example, the frequency of the drive current and the current Adjusting the value enables easy and stable amplitude control.
- the oscillation amplitude of the optical deflection unit becomes maximum, and the oscillation phase of the optical deflection unit is delayed by 90 degrees with respect to the drive current.
- the frequency of the drive current is higher than the resonance frequency of the light deflection unit, the oscillation amplitude becomes small and the phase delay becomes larger than 90 degrees.
- the frequency of the drive current is lower than the resonance frequency of the optical deflection unit, the oscillation amplitude becomes smaller and the phase delay becomes smaller than 90 degrees.
- the counter oscillating body When the counter oscillating body is driven with the same drive current as that of the optical deflection unit, if the resonance characteristic is the same as that of the optical deflection unit, the winding direction of the counter coil is opposite to the coil of the movable unit, so the oscillation direction is Except for the point of inversion (phase difference 180 degrees) with the optical deflection unit, the amplitude characteristic and the phase shift are the same as those of the optical deflection unit. That is, when the resonance characteristics of the optical deflection unit and the counter oscillating body are the same and the resonance frequencies match, the optical deflection unit and the counter oscillating body are always oscillated in the opposite phase and with the same amplitude.
- the counter oscillating body is always driven in a reverse phase with respect to the light deflecting unit, and the excitation force acting on the light deflecting unit and the fixed part of the counter oscillating body is stably offset. Further, even if the resonance characteristics of the optical deflecting unit and the counter oscillating body are not the same, the oscillating phase is kept almost opposite if it is sufficiently close, so the excitation force acting on the fixed part is almost canceled out.
- the counter swing body in addition to the first feature configuration described above, includes a pair of counter movable portions and a pair of counter movable portions provided on both sides of the counter movable portion.
- the counter beam portion is configured to receive a stress acting on the fixed portion due to the swinging of the light deflecting portion and swing in a phase substantially opposite to the swinging phase of the light deflecting portion. is there.
- the beam deflection unit When a drive current flows through the coil of the movable part provided in the light deflection unit, the beam deflection unit is twisted and the light deflection unit is driven to swing around the rotation axis. At this time, the counter oscillating body oscillates at the oscillating frequency of the light deflecting unit in response to the stress acting on the fixed part by the oscillation of the light deflecting unit.
- the relationship between the resonance frequency of the counter oscillating body and the oscillation frequency is set appropriately, the oscillating phase of the optical deflecting unit and the oscillating phase of the counter oscillating unit oscillate in substantially opposite phases, and the light deflecting unit is fixed.
- the excitation force acting on the fixed portion of the counter oscillating body cancels the excitation force acting on the portion.
- the frequency of the drive current is set in the vicinity of the resonance frequency of the optical deflection unit, and
- the resonance frequency of the counter oscillator is set to be lower than the frequency of the driving current.
- the drive current frequency By setting the drive current frequency to a high or low range near the resonance frequency of the optical deflection unit, for example, variable frequency control with a constant current value of the drive current or variable current value under a constant frequency
- the light deflection unit is stably controlled to have a constant amplitude.
- the fixed portion vibrates due to the excitation force of the optical deflection portion that oscillates according to the frequency of the drive current, and the counter oscillating body oscillates in response to the reaction force of the vibration of the fixed portion.
- the resonance frequency of the counter oscillating body When the resonance frequency of the counter oscillating body is the same as the drive current frequency, that is, the oscillating frequency of the optical deflection unit, the amplitude of the counter oscillating body becomes maximum, and the counter oscillating body is delayed by 90 degrees from the oscillation phase of the optical deflection unit. Rocks.
- the resonance frequency of the counter oscillating body When the resonance frequency of the counter oscillating body is lower than the oscillating frequency, the amplitude becomes small, but the delay from the oscillating phase of the optical deflection unit becomes larger than 90 degrees, and the resonance frequency of the counter oscillating body is higher than the oscillating frequency. In this case, the delay from the oscillating phase of the light deflection unit is smaller than 90 degrees.
- the phase delay from the oscillating phase of the optical deflecting unit is 90 degrees or more, and the excitation force by the counter oscillating body cancels the excitation force of the optical deflecting unit. It acts in the direction to do.
- the resonance frequency of the counter oscillating body is higher than the oscillating frequency, the phase lag from the oscillating phase of the optical deflection unit is smaller than 90 degrees, and the excitation force of the counter oscillation unit cancels the excitation force of the optical deflection unit. It does not work in the direction to do.
- an opening portion that faces the movable portion is formed in the counter movable portion,
- the configuration is such that the oscillation period of the light deflection unit can be measured across the opening.
- the oscillation period of the light deflection unit can be measured from the back surface of the light deflection unit through the opening formed in the counter movable unit.
- the resonance frequency is adjusted to the movable portion and / or the counter movable portion.
- the mass adjustment unit is provided.
- the resonance frequency of the optical deflector and / or the counter oscillating body varies during manufacturing, it becomes difficult to oscillate the optical deflector and / or the counter oscillating body at a desired frequency with respect to the frequency of the drive current.
- the same problem occurs when the resonance frequency of the optical deflector and / or the counter oscillating body fluctuates due to a temperature rise during driving.
- the movable portion and / or the counter movable portion is provided with a mass adjusting portion, the variation in the resonance frequency during manufacturing and the variation due to the temperature change are suppressed, and the frequency of the drive current set in advance is suppressed.
- the optical deflector and / or the counter oscillating body can be appropriately driven at the desired frequency.
- the eighth feature configuration is configured to be swingable integrally with the movable portion or the counter movable portion. And a mass adjusting part that can be adjusted from the outside with the movable part or the counter movable part interposed therebetween.
- the mass adjustment unit By constructing the mass adjustment unit so that it can swing integrally with the movable unit or counter movable unit and adjustable from the outside across the movable unit or counter movable unit, After that, the mass can be adjusted.
- the mass adjusting unit in addition to the seventh or eighth feature configuration described above, the mass adjusting unit roughly adjusts the resonance frequency by increasing the mass to reduce the mass. Thus, the resonance frequency is finely adjusted.
- the adjustment operation of the resonance frequency can be performed quickly and accurately.
- the beam portion and the counter beam portion were rolled by a tension annealing method.
- a cross-sectional area is formed to be 1 mm 2 or less by any one of a focused ion beam method, an etching method, and a plating method using any one of stainless steel, carbon tool steel, and polished steel.
- the beam part and the counter beam part are processed by any of the focused ion beam method, the etching method, and the plating method, the probability that a flaw that grows into a crack due to the stress amplitude is formed on the surface becomes very small. The possibility that the fatigue strength is reduced is extremely low. And when it is formed to have a cross-sectional area of 1 mm 2 or less, it becomes possible to configure a beam portion that exhibits a good effective proof stress, and any one of stainless steel, carbon tool steel, or polished steel that has been rolled by a tension annealing method. If a metal elastic member is comprised using a metal, the beam part which can operate
- an optical deflecting device that suppresses vibration transmitted to the fixed part due to the swinging of the light deflecting part and does not generate noise in the housing to which the fixed part is attached. I was able to do that.
- FIG. 1 is a perspective view of a distance measuring device in which an optical deflecting device of the present invention is incorporated.
- FIG. 2 is a perspective view showing the basic structure of the optical deflection apparatus.
- 3A is a plan view of the light deflection unit
- FIG. 3B is a cross-sectional view thereof
- FIG. 3C is a cross-sectional view showing another embodiment of the light deflection unit.
- FIG. 4A to FIG. 4E are explanatory views of the beam part manufacturing process.
- FIG. 5A, FIG. 5B, and FIG. 5C are explanatory diagrams of the assembly procedure of the optical deflection apparatus.
- 6A is an explanatory diagram of the light deflection unit and the counter oscillating body (counter light deflection unit), and FIG.
- FIG. 6B is a cross section of the light deflection unit and the counter oscillating body (counter light deflection unit) attached to the fixed unit.
- FIG. 6 (c) is an explanatory diagram of a mass adjusting unit for adjusting the resonance frequency of the light deflecting unit or counter oscillator (counter light deflecting unit).
- FIG. 7A is an explanatory diagram of the light deflection unit and the counter oscillating body
- FIG. 7B is a cross-sectional view of the light deflection unit and the counter oscillating body attached to the fixed portion
- FIG. It is explanatory drawing of the mass adjustment part for adjusting a resonant frequency.
- FIG. 8 is an explanatory view of the swing angle detection structure of the light deflection unit.
- FIG. 9A shows another embodiment, and is an explanatory view of the light deflection section or the counter swing body.
- FIG. 9B shows another embodiment, and a cross section of the light deflection section and the counter swing body attached to the fixed section.
- FIG. 9 and FIG. 9C show another embodiment, and are explanatory diagrams of the mass adjusting unit for adjusting the resonance frequency of the light deflection unit or the counter oscillator.
- FIG. 10A is an explanatory diagram of the relationship between the drive frequency and the resonance frequency of the optical deflection unit and the counter oscillating body when both the optical deflection unit and the counter oscillating body mainly oscillate, and FIG.
- FIG. 11A is a fluctuation characteristic diagram of the frequency adjustment pattern and the resonance frequency
- FIG. 11B is a variation characteristic diagram of the beam width and the resonance frequency.
- FIG. 12A to FIG. 12E show another embodiment, and are explanatory diagrams of the manufacturing process of the beam portion.
- FIG. 1 shows a distance measuring device 1 in which an optical deflecting device 10 is incorporated.
- the distance measuring device 100 includes a rectangular parallelepiped main body casing 20 in which a power supply circuit and a signal processing circuit are accommodated, and a translucent optical equipment casing which is disposed on one side surface of the main body casing 20 and in which the light deflection device 10 is rotatably accommodated. 30.
- the apparatus 10 includes a light source that uses a laser diode or the like that projects measurement light toward the optical deflection apparatus 10, and a light receiving unit that uses a phototransistor or the like that receives reflected light reflected by the optical deflection apparatus 10.
- the light projecting / receiving unit 60 and the like are accommodated.
- the optical deflection apparatus 10 includes an optical deflection unit 5 and a fixing unit 2.
- the light deflection unit 5 includes a deflection mirror 3 a serving as a light reflection unit on the upper surface side, a movable unit 3 including a coil on the rear surface side, and a pair of beam portions 4 and 4 fixed on both sides of the movable unit 3. It is configured.
- the fixed portion 2 has a rectangular parallelepiped shape made of a resin such as polycarbonate, and an opening space that is hollowed out in the thickness direction is formed so as to have a rectangular shape with a slightly larger area than the movable portion 3 in plan view.
- the light deflection unit 5 is fixed to the pair of opposing edge portions with the opening space interposed therebetween so as to be swingable around the axis P through the beam portions 4 and 4.
- a magnetic field forming portion 6 is arranged on the fixed portion 2 so as to sandwich the movable portion 3 from both sides.
- the magnetic field forming unit 6 includes a pair of permanent magnets 6a and 6b arranged so that one is an N pole and the other 6 is an S pole.
- the permanent magnets 6a and 6b are each a magnetic material holding unit 7 having a high permeability. Is held in.
- the movable part 3 includes a deflection mirror 3a in which gold or aluminum is vapor-deposited on a glass substrate or a silicon substrate, a copper coil C and an electrode pad E on a glass epoxy substrate. Is provided with a coil substrate 3c formed by printing, and a spacer 3b made of glass epoxy disposed between them.
- the beam portions 4 and 4 are made of a metal elastic member, and have a predetermined length of a metal rod-shaped portion 4a, a fixed-side pad 4b that is formed on one end side of the metal rod-shaped portion 4a and is fixed to the fixed portion 2, and the metal rod-shaped portion 4a.
- a movable side pad 4c formed on the end side and fixed to the movable portion 3 is provided.
- the movable pad 4c of the pair of beam portions 4 and 4 is positioned so as to contact the electrode pad E, and is bonded and fixed between the deflection mirror 3a and the coil substrate 3c using a conductive adhesive.
- the coil substrate 3c may be formed of a multilayer substrate in which a coil pattern is formed on each substrate layer using an epoxy resin or the like, and the coils of each substrate layer are connected by vias.
- the spacer 3b is formed of an insulating member 33 at the center and metal members 34 at both ends.
- the electrode pads E, E and the movable pads 4c, 4c are electrically connected through the metal members 34, 34.
- the movable pad 4c is fixed in the vicinity of the edge of the deflection mirror 3a made of the upper glass substrate and the coil substrate 3c made of the lower glass epoxy substrate, and the metal bar 4a is deflected. If it is arranged so as not to be covered with the mirror 3a and the coil substrate 3c, it is only necessary to form a recess for accommodating the movable pad 4c at the edge of the upper deflection mirror 3a, and it is necessary to provide the spacer 3b. No.
- the positioning pin 2P provided on the fixed portion 2 is made of metal and serves as an electrode pin for applying an alternating current to the coil C formed on the coil substrate 3c via the beam portions 4 and 4.
- the Lorentz force is applied to the coil C by the alternating current flowing through the coil C and the magnetic field formed by the permanent magnets 6a and 6b provided in the fixed portion 2. Due to the Lorentz force, the movable portion 3 is repeatedly swung with the beam portion twisted about the rotation axis. In this embodiment, the movable part 3 is swung ⁇ 11.25 °.
- the measurement light emitted from the light source provided in the light projecting / receiving unit 60 is deflected by the deflection mirror 3a and measured from the optical window 30a. Rotation scanning is performed toward the target section. Then, the reflected light from the object existing in the measurement target section enters the deflecting mirror 3a from the optical window 30a, is deflected by the deflecting mirror 3a, and is received by the light receiving unit provided in the light projecting / receiving unit 60.
- the measuring light is swung in the vertical direction by ⁇ 22.5 ° by the deflection mirror 3a swung around the beam portions 4 and 4 while being rotated and scanned around the vertical axis by the rotation scanning unit 50.
- the rotation scanning unit 50 is rotated and scanned around the vertical axis by the rotation scanning unit 50.
- the distance from the distance measuring device 1 to the object existing in the measurement target space is determined based on the time difference between the emission timing of the measurement light from the light source and the detection timing of the reflected light at the light receiving unit. A distance is calculated.
- FIGS. 4 (a) to 4 (e) show a manufacturing process using an etching method of the metal elastic members constituting the beam portions 4 and 4.
- FIG. In this embodiment, a SUS304CSP-H tension annealing material is used as a base material.
- Photoresist 43 is uniformly applied to the surface of a thin stainless steel plate 42 (see FIG. 4A) having a predetermined thickness (0.2 mm in this embodiment) (see FIG. 4B), and the metal bar 4a is fixed. Light exposure is performed through a photomask (not shown) formed so that the regions corresponding to the side pads 4b, the movable side pads 4c, the frame body 40, and the support portion 41 are shielded from light (see FIG. 4C). .
- a photoresist 43 layer is formed only in a region corresponding to the frame body 40 and the beam portion 4 on the surface of the stainless steel thin plate 42 (FIG. 4 ( d)).
- an etching solution for dissolving stainless steel is sprayed on the surface of the stainless steel thin plate 42 to gradually advance the etching process.
- the photoresist 43 is removed with a solvent.
- the metal elastic member When the metal elastic member is manufactured by using the plating method, a mold having a predetermined depth in which the shape of the photoresist 43 shown in FIG. 2D is a recess is created, and a mold release material is applied to the mold. Later, it can be manufactured by filling an electrolytic solution containing metal ions and electrodepositing a metal in the electrolytic solution.
- the metal rod-like portion 4a constituting the beam portion 4 is formed by a mechanical processing method such as press working or grinding, stress concentration due to stress amplitude occurs in a plurality of minute scratches formed on the surface at the time of processing. Since a flaw starts as a starting point and grows into a crack and the fatigue strength decreases, the movable part 3 cannot be stably swung over a long period of time.
- the beam portions 4 and 4 that can swing stably over a long period of time can be realized.
- any metal of stainless steel, carbon tool steel, or polished steel that is rolled by a tension annealing method can be used as the material of the beam portions 4 and 4.
- the metal rod-shaped part By forming the metal rod-shaped part to have a cross-sectional area of 1 mm 2 or less, it becomes possible to configure a beam part exhibiting good effective proof stress, and the movable part 3 can be oscillated stably over a long period of time in the frequency range of 150 Hz to 500 Hz. Will be able to.
- the swing angle of the deflecting mirror 3a constituting the movable portion 3 is not limited to ⁇ 11.25 °, and is a value set as appropriate according to the application of the micromechanical device 1.
- the metal rod-like portion 4a constituting the beam portions 4 and 4 shown in FIG. 4 (e) only needs to have a cross-sectional area of 1 mm 2 or less, and is formed in the range of 0.001 mm 2 to 1 mm 2 . Is preferred.
- the metal bar 4a has a width W of 1.0 mm, a thickness T of 0.2 mm, a length L of 5 mm, and a cross-sectional area S of 0.20 mm 2 .
- size of each part of the micro mechanical apparatus 1 is as follows.
- the fixed portion 2 is formed with a width of 23 mm, a depth of 26 mm, and a thickness of 5.5 mm
- the movable portion 3 is formed with a width of 12.0 mm, a depth of 12.0 mm, and a thickness of 2.0 mm.
- the frequency for swinging and driving the movable part 3, that is, the frequency of the alternating current applied to the coil C is preferably set to a frequency slightly shifted from the mechanical resonance frequency of the beam parts 4 and 4 including the movable part 3. It can be set in the range of 50 Hz to about 1 kHz depending on the size of the movable part 3, the cross-sectional area and length of the metal rod-like part 4 a and its physical characteristics.
- a frequency range of 10 Hz to 1800 Hz, particularly a frequency range of 150 Hz to 500 Hz is preferable.
- FIG. 5 (a) A procedure for assembling the light deflection apparatus 10 using the metal elastic member described above will be described. As shown in FIG. 5 (a), a pair of positioning pins 2P provided on the fixing portion 2 are fitted into a pair of positioning holes formed in each fixing-side pad 4b and are fixedly bonded.
- a pair of positioning pins formed on the back surface of the deflection mirror 3a is fitted from above the pair of positioning holes formed in the movable pad 4c.
- the spacer 3b is applied through the open space from the lower side of the movable pad 4c, and the positioning pins of the deflection mirror 3a are fitted into a pair of positioning holes formed in the coil substrate 3c, and each is bonded and fixed with an adhesive.
- each support portion 41 is cut, the frame body 40 is detached, and the fixed pad 4b is securely fixed.
- the movable part 3 can be supported in a state where the linearity of the torsional rotating shaft constituted by the pair of metal rod-like parts 4a is maintained with high accuracy, and the assembly work can be simplified. Thereafter, the magnetic field forming unit 6 is inserted and fixed from below.
- the vibration of the light deflecting unit 5 (3, 4) is transmitted through the rotation scanning unit 50 to which the fixing unit 2 is attached via the fixing unit 2.
- noise is generated when the main body casing 20 and the optical equipment casing 30 resonate with the vibrations transmitted to the casing 20 and the optical equipment casing 30.
- the counter oscillating body 15 that oscillates in a phase opposite to the oscillating phase of the light deflecting unit 5 is provided with the optical deflecting unit. 5 is arranged so as to be able to swing on the fixed portion 2 so as to face 5.
- FIG. 6A shows only a state where the light deflecting unit 5 and both the light deflecting unit 5 and the counter-oscillating body 15 having a symmetrical shape are arranged to face each other.
- the deflection mirror 3a and the coil substrate 3c are formed in a rectangular shape having the same size, but the optical deflection shown in FIGS. 6 (a) and 6 (b).
- the part 5 is composed of a deflecting mirror 3a formed in a substantially square shape, and a rectangular shape in which the side in the direction along the beam part 4 is longer than the side perpendicular to the beam part 4, beam parts 4 and 4 Is different in that it is longer than the length of the beam portions 4 and 4 described with reference to FIGS. 2, 3 and 5, but the basic structure is the same.
- the counter oscillating body 15 has the same structure as that of the light deflecting unit 5 and is disposed symmetrically so that the coil substrates 3c and 13c face each other.
- the magnetic field forming unit 6 is disposed so as to sandwich the coil substrates 3c and 13c.
- the excitation force acting on the fixed portion 2 by the light deflecting portion 5 is offset by the excitation force acting on the fixed portion 2 of the counter oscillating body 15, and vibration transmitted to the main body casing 20 and the optical device casing 30 is generated. Attenuation and noise generation are suppressed.
- the counter oscillating body 15 includes a counter movable portion 13 having a counter coil and a pair of counter beam portions 14 provided on both sides of the counter movable portion 13.
- the same drive current as the drive current applied from the positioning pin 2P to the coil C of the light deflector 5 via the beam 4 is applied to the counter coil of the counter light deflector 15 via the counter beam 14 from the positioning pin 2P.
- the drive currents applied to the coil C and the counter coil are applied in opposite directions, and the light deflecting unit 5 and the counter light deflecting unit 15 are out of phase with each other. Is driven to swing.
- FIG. 10A shows the relationship between the resonance frequency f of the light deflector 5 and the frequency fi of the drive current.
- the resonance frequency f of the optical deflection unit 5 matches the frequency fi of the drive current
- the optical deflection unit is 90 degrees out of phase with the drive current and oscillates with the maximum amplitude.
- the frequency fi of the drive current is higher than the resonance frequency f of the optical deflection unit 5, the amplitude is small, and the phase delay of the optical deflection unit 5 is greater than 90 degrees.
- the drive current frequency fi is lower than the resonance frequency f of the optical deflecting unit 5, the amplitude is similarly small, and the phase delay of the optical deflecting unit 5 is smaller than 90 degrees.
- the frequency fi of the drive current (this frequency becomes the oscillation frequency) is set to a value different from the resonance frequency f of the optical deflection unit 5 and is slightly smaller than the maximum amplitude.
- Driving with small target amplitude When the resonance frequency fluctuates due to a temperature change or the like, the swing amplitude changes.
- the swing angle of the light deflection unit 5 is monitored by an optical sensor or the like, and is maintained at the target swing angle, that is, the control angle, for example.
- Frequency variable control is performed under a constant current value of the drive current
- current value variable control is performed under a constant frequency
- both frequency and current value variable control are performed.
- the coils c are oscillated with the same amplitude that reverses the oscillating direction. That is, ideally, the counter oscillating body 15 and the light deflecting unit 5 are oscillated and driven symmetrically including the temperature characteristics, and the excitation force to the fixed unit 2 works in the direction to cancel out equally.
- the resonance frequency is monitored from the outside, and the oscillation amplitude is adjusted to be equal by making the resonance frequency equal.
- the excitation force is equal, and the canceling effect can be maximized.
- the amplitude can be controlled to cancel the excitation force more flexibly.
- the counter oscillating body 15 includes a counter movable portion 13 and a pair of counter beam portions 14 and 14 provided on both sides of the counter movable portion 13, and stress acting on the fixed portion 2 by the oscillation of the light deflecting portion 5. In response, it is configured to passively oscillate in a phase substantially opposite to the oscillating phase of the light deflecting unit 5.
- the counter movable portion 13 and the counter beam portions 14 and 14 are both made of the same material as the beam portion 4 and are integrally formed by the etching method described with reference to FIG.
- the light deflecting unit 5 When a drive current flows through the coil of the movable unit 3 provided in the light deflecting unit 5, the light deflecting unit 5 is driven to swing with the beam unit 4 being twisted. At this time, if the resonance characteristic of the counter oscillating body 15 is appropriately set, the counter movable unit 15 is in a phase opposite to the oscillating phase of the light deflecting unit 5 due to the stress acting on the fixed unit 2 due to the oscillation of the light deflecting unit 5. Oscillating force is applied, and the excitation force acting on the fixed portion of the light deflecting unit 5 and the counter oscillating body 15 is canceled or attenuated.
- the frequency fi of the drive current is set in the vicinity of the resonance frequency f of the light deflector 5 (in this embodiment, higher than the resonance frequency f), and the resonance frequency fc of the counter oscillator 15 is set. It is set larger.
- the swing amplitude of the light deflecting unit 5 can be stably controlled with a little lower than the maximum amplitude.
- the resonance frequency fc of the counter oscillating body 15 is the same as the driving current frequency fi, that is, the oscillating frequency of the light deflecting unit 5, the amplitude of the counter oscillating body 15 is maximized and is 90 degrees from the oscillating phase of the light deflecting unit 5. Swing with delay.
- the resonance frequency of the counter oscillating body 15 is lower than the frequency of the drive current, the amplitude becomes small, but the delay from the oscillating phase of the optical deflecting unit 5 becomes larger than 90 degrees, and the resonance frequency of the counter oscillating body 15 is driven.
- the delay from the oscillation phase of the light deflecting unit 5 is smaller than 90 degrees.
- the resonance frequency fc of the counter oscillating body 15 is set to be smaller than the oscillation frequency fi of the optical deflecting unit 5, that is, a value closer to the drive current frequency fi below the drive current frequency fi,
- the oscillation of the counter oscillating body 15 has a phase delay of 90 degrees or more from the light deflection unit 5 and works in a direction in which the excitation force by the light deflection unit 5 can be offset.
- the frequency fi of the drive current is set to be lower than the resonance frequency fc of the counter oscillating body 15
- the phase delay from the optical deflection unit of the counter oscillating body 15 becomes smaller than 90 degrees, and the excitation of the optical deflection unit 5 is performed. It does not work in the direction of canceling out power.
- the resonance frequency fc of the counter oscillating body 15 is as low as possible so as to have a phase lag of 90 degrees or more from the oscillating phase of the optical deflector 5 and lower than the frequency fi of the driving current and the oscillation amplitude as large as possible. It is desirable to be close. That is, it is desirable to set the deviation between the frequency fi of the drive current and the resonance frequency fc of the counter oscillator 15 to 1 Hz or less, preferably 0.2 Hz or less.
- the counter oscillator be provided with a mass adjusting unit that adjusts the resonance frequency.
- the counter movable portion 13 provided in the counter oscillating body 15 is formed with an opening 13a facing the movable portion 3 of the light deflection portion 5, and the light deflection portion sandwiching the opening 13a. 5 is preferably configured to be able to measure the oscillation period.
- a monitor light is irradiated from below onto a coil substrate 3c formed on a mirror surface by depositing aluminum or the like on the upper surface of a glass epoxy substrate having a copper coil C printed on the surface, and reflected from the coil substrate 3c.
- the oscillation period can be measured by detecting light with a photo sensor.
- a sensor PS, and the oscillation period of the optical deflection unit 5 can be detected by calculating the period of the monitor light detected by the photosensor PS as the optical deflection unit 5 swings.
- the LED may be installed so that the monitor light is perpendicularly incident on the central portion of the coil substrate 3c when stationary, and the photosensor PS may be installed at a position inclined by a predetermined angle ⁇ .
- the counter oscillating body can be designed by appropriately designing the shape of the coil substrate.
- An opening for measuring the oscillation period of the light deflection unit can be provided in the moving body 15.
- the resonance frequency of the light deflecting unit 5 and the counter oscillating body 15 is set to a target value at the time of manufacture.
- the movable part 3 is used to adjust the resonance frequency after manufacture.
- / or the mass adjustment part 18 is provided in the counter movable part 13.
- FIG. 6C shows an example in which the mass adjusting unit 18 is provided on the coil substrate 3 c that becomes the movable unit 3.
- a mass adjusting portion 18 is provided at an edge portion facing the fixed side pad 4b.
- the resonance frequency is adjusted to the target value by adjusting the mass by laser trimming the edge portions of the coil substrates 3c and 13c, for example.
- FIG. 6C shows an example in which a laser trimming process is performed with a size of 0.2 mm square at symmetrical positions 18a and 18b separated from each other by a predetermined distance L with the beam 4 as the central axis.
- the size of the coil substrates 3c and 13c of the light deflection unit 5 and / or the counter oscillating body 15 is configured to be larger than that of the deflection mirror 3a, and the coil substrates 3c and 13c can be laser trimmed from above or below the fixed unit. It is configured as follows.
- FIG. 11A shows a position at a predetermined distance from the central axis with respect to a rectangular six-layer coil substrate 3c made of glass epoxy resin having a length (long side) of 13 mm ⁇ width (short side) of 6 mm ⁇ thickness of 0.5 mm.
- the adjustment characteristic of the resonance frequency is shown in the case of punching out with a size of 0.2 mm square, for example, with a laser processing machine or the like with high accuracy.
- the resonance frequency can be adjusted with a linear characteristic by punching out any of the range from 1.6 mm to 2.4 mm from the center axis of oscillation rotation. Therefore, the machining position for adjusting to the target value can be grasped in advance. Even deeper adjustments can be made by deep drilling without punching out the coil substrate 3c.
- the resonance frequency is increased by decreasing the mass, but conversely, the resonance frequency can be decreased by increasing the mass.
- a weight may be added to the mass adjusting unit 18.
- Binder resin can be used as a weight.
- the resonance frequency can be adjusted by applying the binder resin measured by the dispenser to a predetermined position with high accuracy using, for example, an ink jet dispenser.
- the resonance frequency is roughly adjusted by increasing the mass by adding a weight, and the resonance frequency is finely adjusted by reducing the mass by laser processing or the like. It is configured.
- the adjustment operation of the resonance frequency can be performed quickly and accurately.
- FIG. 11B shows the relationship between the width of the beam portion 14 and the resonance frequency. It can be seen that when the beam width varies from 0.98 mm to 0.99 mm, the resonance frequency fluctuates by about ⁇ 10 Hz around 1100 Hz. In such a case, the resonance frequency may be roughly adjusted downward by increasing the mass by adding a weight, and then finely adjusted by reducing the mass by laser processing or the like.
- the mass adjustment part 18 is provided in the opposing edge part which forms the opening part 13a among the counter movable parts 13.
- FIG. 7C shows an example in which a small rectangle is deeply drilled with a size of 0.2 mm square.
- the counter beam portion 14 and the counter movable portion 13 are made of the same material. However, if the mass adjusting portion 18 is provided on the counter beam portion 14 that functions as a torsion rotating shaft, the swing characteristics may fluctuate.
- the mass adjusting unit 18 is preferably provided exclusively on the counter movable unit 13.
- the movable part and / or the counter movable part is provided with a mass adjusting part that adjusts the resonance frequency, and after the optical deflecting device is assembled, the mass adjusting part 18 from above or below.
- the operation for increasing or decreasing the mass is performed.
- the deflecting mirror 3a blocks the optical deflecting device. It becomes difficult to process the mass adjusting unit 18 for mass adjustment after assembling.
- FIGS. 9A, 9B, and 9C show another embodiment for such a case.
- a member 9 that swings integrally with the movable portion and / or the counter movable portion is added so as to be exposed at a position that does not overlap the deflection mirror 3a, and mass adjustment is performed on the member 9
- the part 18 may be provided.
- the material of the member 9 the same resin or glass material as that of the movable part can be used, and other resins can also be used.
- FIG. 9C shows a punched portion 18h having a predetermined size formed by laser processing, with a binder resin weighed in a predetermined amount added to the mass adjusting portion 18 as a weight 18w.
- the mass adjustment unit By constructing the mass adjustment unit so that it can swing integrally with the movable unit or counter movable unit and adjustable from the outside across the movable unit or counter movable unit, After that, the mass can be adjusted.
- the mass adjusting unit 18 is used to adjust the resonance frequency f of the optical deflection unit 5 and the resonance frequency fc of the counter oscillator 15 after assembling with respect to a preset frequency fi of the driving current. It has.
- a plurality of protrusions may be formed in the beam portion 14 so as to extend in a direction intersecting the rotation axis.
- the protrusion 4d has a width of 0.5 mm, The length is 0.5 mm and the thickness is 0.2 mm.
- Micromachine device 2 Fixed portion 3: Movable portion 4: Beam portion 4a: Metal rod-like portion 4b: Fixed side pad 4c: Movable side pad 5: Light deflection portion 6: Magnetic field forming portions 6a, 6b: Permanent magnet 7: Magnetic body holding part 10: Light deflecting device 13: Counter movable part 14: Counter beam part 15: Counter oscillating body
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
Description
図1には、光偏向装置10が組み込まれた測距装置1が示されている。測距装置100は、電源回路や信号処理回路が収容された直方体の本体ケーシング20と、本体ケーシング20の一側面に配置され、光偏向装置10が回転可能に収容された半透明の光学機器ケーシング30を備えている。
図5(a)に示すように、固定部2に設けられた一対の位置決めピン2Pが各固定側パッド4bに形成された一対の位置決め用の孔部に嵌め込まれて接着固定される。
カウンター揺動体15は、カウンター可動部13とカウンター可動部13の両側に備えた一対のカウンター梁部14,14とを備えて構成され、光偏向部5の揺動により固定部2に作用する応力を受けて受動的に光偏向部5の揺動位相と略逆相で揺動するように構成されている。
2:固定部
3:可動部
4:梁部
4a:金属棒状部
4b:固定側パッド
4c:可動側パッド
5:光偏向部
6:磁界形成部
6a,6b:永久磁石
7:磁性体保持部
10:光偏向装置
13:カウンター可動部
14:カウンター梁部
15:カウンター揺動体
Claims (10)
- 光反射部とコイルを備えた可動部の両側に一対の梁部が設けられた光偏向部と、前記梁部を介して前記光偏向部が揺動可能に固定されるとともに磁界形成部を備えた固定部とを備え、前記コイルに流れる駆動電流と前記磁界形成部で形成される磁界とで発生する電磁力により、前記梁部を捻り回転軸として前記可動部を揺動する光偏向装置であって、
前記光偏向部の揺動位相と逆相で揺動するカウンター揺動体を、前記光偏向部と対向するように前記固定部に備えている光偏向装置。 - 前記カウンター揺動体は、巻回方向が前記可動部のコイルと逆向きに設定されたカウンターコイルを備えたカウンター可動部と、前記カウンター可動部の両側に設けられた一対のカウンター梁部で構成され、前記コイルに印加される駆動電流の向きと逆向きに前記カウンターコイルに前記駆動電流が印加されるように構成されている請求項1記載の光偏向装置。
- 前記光偏向部の共振周波数と前記カウンター揺動体の共振周波数が一致または近接するように設定されている請求項2記載の光偏向装置。
- 前記カウンター揺動体は、カウンター可動部と前記カウンター可動部の両側に設けられた一対のカウンター梁部とで構成され、前記光偏向部の揺動により前記固定部に作用する応力を受けて前記光偏向部の揺動位相と略逆相で揺動するように構成されている請求項1記載の光偏向装置。
- 前記駆動電流の周波数は前記光偏向部の共振周波数の近傍に設定されるとともに、前記カウンター揺動体の共振周波数は前記駆動電流の周波数より小に設定されている請求項4記載の光偏向装置。
- 前記カウンター可動部に前記可動部を臨む開口部が形成され、前記開口部を挟んで前記光偏向部の揺動周期を計測可能に構成されている請求項1から5の何れかに記載の光偏向装置。
- 前記可動部及び/または前記カウンター可動部に共振周波数を調整する質量調整部を備えている請求項1から6の何れかに記載の光偏向装置。
- 前記可動部または前記カウンター可動部と一体に揺動可能に構成され、前記可動部または前記カウンター可動部を挟んで外方から調整可能な質量調整部を備えている請求項1から6の何れかに記載の光偏向装置。
- 前記質量調整部は質量の増量により共振周波数を粗調整し、質量の減量により共振周波数を微調整するように構成されている請求項7または8記載の光偏向装置。
- 前記梁部及びカウンター梁部は、テンションアニール法で圧延されたステンレス材、炭素工具鋼材、またはみがき鋼材の何れかの金属を用いて、集束イオンビーム法、エッチング法、及びメッキ法の何れかにより断面積が1mm2以下に成形されている請求項1から9の何れかに記載の光偏向装置。
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JP2018502952A JP6771132B2 (ja) | 2016-03-03 | 2016-03-03 | 光偏向装置 |
US15/505,492 US9983404B2 (en) | 2016-03-03 | 2016-03-03 | Light deflecting device |
EP16836194.7A EP3425440B1 (en) | 2016-03-03 | 2016-03-03 | Light deflection device |
PCT/JP2016/056523 WO2017149713A1 (ja) | 2016-03-03 | 2016-03-03 | 光偏向装置 |
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PCT/JP2016/056523 WO2017149713A1 (ja) | 2016-03-03 | 2016-03-03 | 光偏向装置 |
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WO2023190068A1 (ja) * | 2022-03-29 | 2023-10-05 | 京セラ株式会社 | 電磁波偏向装置及び電磁波走査装置 |
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US9983404B2 (en) | 2018-05-29 |
US20170343794A1 (en) | 2017-11-30 |
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JPWO2017149713A1 (ja) | 2019-02-07 |
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EP3425440B1 (en) | 2021-10-20 |
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