WO2017104769A1 - Fibrous carbon nanostructure dispersion - Google Patents
Fibrous carbon nanostructure dispersion Download PDFInfo
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- WO2017104769A1 WO2017104769A1 PCT/JP2016/087440 JP2016087440W WO2017104769A1 WO 2017104769 A1 WO2017104769 A1 WO 2017104769A1 JP 2016087440 W JP2016087440 W JP 2016087440W WO 2017104769 A1 WO2017104769 A1 WO 2017104769A1
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- B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
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- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/008—Processes for improving the physical properties of a device
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- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
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- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
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- C01B32/168—After-treatment
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- C01B2202/28—Solid content in solvents
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- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/36—Diameter
Definitions
- the fibrous carbon nanostructure dispersion liquid of the present invention does not substantially contain a dispersant.
- a dispersion can form a carbon film with less impurities in the dispersion and more excellent conductivity and strength.
- the obtained dispersion liquid is further excellent in the dispersibility of the fibrous carbon nanostructure.
- the concentration of the fibrous carbon nanostructure in 1 L of the solvent is preferably 1 mg / L or more.
- Such a dispersion can form a carbon film that is more excellent in conductivity and strength.
- the concentration of metal impurities is preferably less than 15 ⁇ 10 10 atoms / cm 3 .
- Such a dispersion can form a carbon film with less impurities in the dispersion and more excellent conductivity and strength.
- a long-life electronic component with stable characteristics can be manufactured.
- the obtained dispersion liquid is further excellent in the dispersibility of the fibrous carbon nanostructure.
- the fibrous carbon nanostructure is not particularly limited, and for example, carbon nanotubes, vapor grown carbon fibers, and the like can be used. These may be used individually by 1 type and may use 2 or more types together. Among these, as the fibrous carbon nanostructure, it is more preferable to use a fibrous carbon nanostructure including carbon nanotubes. If a fibrous carbon nanostructure containing carbon nanotubes is used, a dispersion capable of forming a carbon film with further excellent conductivity and strength can be obtained.
- the “carbon film” refers to a film made of an aggregate of fibrous carbon nanostructures such as carbon nanotubes.
- the fibrous carbon nanostructure containing carbon nanotubes that can be suitably used as a fibrous carbon nanostructure may be composed of only carbon nanotubes, or carbon nanotubes and fibers other than carbon nanotubes. It may be a mixture with a carbon nanostructure.
- the carbon nanotubes in the fibrous carbon nanostructure are not particularly limited, and single-walled carbon nanotubes and / or multi-walled carbon nanotubes can be used. Carbon nanotubes are preferable, and single-walled carbon nanotubes are more preferable.
- a dispersion capable of forming a carbon film having further excellent strength can be obtained.
- Average diameter (Av) of fibrous carbon nanostructure” and “standard deviation of diameter of fibrous carbon nanostructure ( ⁇ : sample standard deviation)” are randomized using a transmission electron microscope, respectively. It can be determined by measuring the diameter (outer diameter) of 100 fibrous carbon nanostructures selected. The average diameter (Av) and standard deviation ( ⁇ ) of the fibrous carbon nanostructure may be adjusted by changing the production method and production conditions of the fibrous carbon nanostructure, or may be obtained by different production methods. You may adjust by combining multiple types of the obtained fibrous carbon nanostructure.
- the average diameter (Av) of the fibrous carbon nanostructure is preferably 0.5 nm or more, more preferably 1 nm or more, further preferably 15 nm or less, and further preferably 10 nm or less. preferable. If the average diameter (Av) of the fibrous carbon nanostructure is 0.5 nm or more, the aggregation of the fibrous carbon nanostructure is suppressed, and the fibrous carbon nanostructure in the fibrous carbon nanostructure dispersion liquid Dispersibility can be improved. Moreover, if the average diameter (Av) of the fibrous carbon nanostructure is 15 nm or less, a dispersion capable of forming a carbon film excellent in in-plane uniformity can be obtained.
- the fibrous carbon nanostructure preferably has an average structure length of 100 ⁇ m or more and 5000 ⁇ m or less at the time of synthesis.
- the average length of the structure at the time of synthesis is 5000 ⁇ m or less. Is preferred.
- BET specific surface area of the fibrous carbon nanostructure is preferably 400 meters 2 / g or more, more preferably 800 m 2 / g or more, is preferably from 2500m 2 / g, 1200m 2 / G or less is more preferable.
- the BET specific surface area of the fibrous carbon nanostructure is 400 m 2 / g or more, the strength and self-supporting property of the carbon film formed using the obtained dispersion can be further increased.
- the BET specific surface area of a fibrous carbon nanostructure is 2500 m ⁇ 2 > / g or less, the dispersibility of the fibrous carbon nanostructure in the obtained dispersion liquid can be improved further.
- the “BET specific surface area” refers to a nitrogen adsorption specific surface area measured using the BET method.
- micropore volume can be adjusted, for example, by appropriately changing the preparation method and preparation conditions of the fibrous carbon nanostructure.
- Vp (V / 22414) ⁇ (M / ⁇ ).
- the growth of the nitrogen gas adsorption layer is classified into the following processes (1) to (3).
- the slope of the t-plot is changed by the following processes (1) to (3).
- the t-plot indicating an upwardly convex shape is located on a straight line passing through the origin in a region where the average thickness t of the nitrogen gas adsorption layer is small, whereas when t is large, the plot is The position will be shifted downward.
- the fibrous carbon nanostructure having such a t-plot shape has a large ratio of the internal specific surface area to the total specific surface area of the fibrous carbon nanostructure, and there are many carbon nanostructures constituting the fibrous carbon nanostructure. It is shown that the opening is formed.
- the above-described fibrous carbon nanostructure is obtained by, for example, supplying a raw material compound and a carrier gas onto a substrate having a catalyst layer for producing carbon nanotubes on the surface, and chemical vapor deposition (CVD).
- CVD chemical vapor deposition
- the catalyst activity of the catalyst layer is drastically improved by the presence of a small amount of an oxidizing agent (catalyst activating substance) in the system (super growth method; International Publication No. 2006/011655). Can be produced efficiently according to the above).
- an oxidizing agent catalyst activating substance
- SGCNT carbon nanotube as the fibrous carbon nanostructure obtained by the super-growth method
- the said fibrous carbon nanostructure may be comprised only from SGCNT, and may be comprised from SGCNT and a non-cylindrical carbon nanostructure.
- the fibrous carbon nanostructure has a single-layer or multi-layer flat cylindrical carbon nanostructure (hereinafter referred to as “graphene nanotape”) having a tape-like portion whose inner walls are close to or bonded to each other over the entire length. (GNT) ”) may be included.
- “graphene nanotape” having a tape-like portion whose inner walls are close to or bonded to each other over the entire length.
- “GNT) ”) may be included.
- “having the tape-like portion over the entire length” means “continuous over 60% or more, preferably 80% or more, more preferably 100% of the length in the longitudinal direction (full length)”. Or intermittently has a tape-like portion.
- the shape of GNT is a shape which has a tape-shaped part in the center part of the width direction, and the shape of the cross section orthogonal to the extending direction (axial direction) is the cross-sectional length in the vicinity of both ends in the cross-sectional longitudinal direction. It is more preferable that the maximum dimension in the direction orthogonal to the direction is larger than the maximum dimension in the direction orthogonal to the longitudinal direction of the cross section in the vicinity of the central portion in the longitudinal direction of the cross section. preferable.
- “near the central portion in the longitudinal direction of the cross section” means the longitudinal width of the cross section from the longitudinal center line of the cross section (a straight line passing through the longitudinal center of the cross section and perpendicular to the longitudinal direction line).
- the “near the end in the longitudinal direction of the cross section” means the area outside the longitudinal direction of “near the center in the longitudinal direction of the cross section”.
- the fibrous carbon nanostructure containing GNT as a non-cylindrical carbon nanostructure has a catalyst layer on the surface when synthesizing CNTs by a super-growth method using a substrate having the catalyst layer on the surface. It can be obtained by forming a substrate (hereinafter sometimes referred to as “catalyst substrate”) by a predetermined method. Specifically, the fibrous carbon nanostructure containing GNT is obtained by applying a coating liquid A containing an aluminum compound onto a substrate, drying the applied coating liquid A, and then forming an aluminum thin film (catalyst) on the substrate.
- the coating liquid B containing the iron compound is applied onto the aluminum thin film, and the applied coating liquid B is dried at a temperature of 50 ° C. or less to form the iron thin film (catalyst layer) on the aluminum thin film.
- the mass reduction rate of the above fibrous carbon nanostructure measured by thermogravimetric analysis in a nitrogen atmosphere when the temperature is increased from 23 ° C. to 200 ° C. at a temperature increase rate of 20 ° C./min is decomposed even under heating. From the viewpoint of being difficult and having excellent dispersibility, it is 3.0% by mass or less, and preferably 2.0% by mass or less.
- the cause of the decrease in mass in the above measurement includes, for example, a decrease in mass due to decomposition of amorphous carbon or the like that is not in a tube shape.
- the mass reduction rate decreased after the temperature was increased from 23 ° C. to 200 ° C.
- the above-mentioned fibrous carbon nanostructure is a metal impurity contained in the fibrous carbon nanostructure from the viewpoint that the amount of impurities in the fibrous carbon nanostructure dispersion is reduced and a long-life electronic component with stable characteristics can be produced.
- the concentration of is preferably less than 5000 ppm, and more preferably less than 1000 ppm.
- the concentration of metal impurities is, for example, a transmission electron microscope (TEM), a scanning electron microscope (SEM), an energy dispersive X-ray analysis (EDAX), a gas phase decomposition apparatus, and an ICP mass spectrometry (VPD, ICP / MS) or the like.
- examples of the metal impurities include metal catalysts used for producing fibrous carbon nanostructures, and examples include metals belonging to alkali metals, alkaline earth metals, Groups 3 to 13, and lanthanoid groups.
- metal elements such as element, Si, Sb, As, Pb, Sn, and Bi, and metal compounds containing these. More specifically, Al, Sb, As, Ba, Be, Bi, B, Cd, Ca, Cr, Co, Cu, Ga, Ge, Fe, Pb, Li, Mg, Mn, Mo, Ni, K, Examples thereof include metal elements such as Na, Sr, Sn, Ti, W, V, Zn, and Zr, and metal compounds containing these.
- the above-mentioned fibrous carbon nanostructure further improves the dispersibility of the fibrous carbon nanostructure in the fibrous carbon nanostructure dispersion liquid, thereby forming a uniform carbon film, and having stable characteristics.
- the concentration of particulate impurities can be measured by applying a fibrous carbon nanostructure dispersion liquid on a substrate and using the product name “surfscan” manufactured by KLA Tencor Corporation or the like.
- the solvent examples include non-halogen solvents and non-aqueous solvents.
- the solvent includes water; methanol, ethanol, n-propanol, isopropanol, n-butanol, isobutanol, t-butanol, pentanol, hexanol, heptanol, octanol, nonanol, decanol, amyl alcohol, methoxy Alcohols such as propanol, propylene glycol, and ethylene glycol; Ketones such as acetone, methyl ethyl ketone, and cyclohexanone; Esters such as ethyl acetate, butyl acetate, ethyl lactate, ⁇ -hydroxycarboxylic acid ester, and benzylbenzoate (benzyl benzoate) Ethers such as diethyl ether, dioxane, tetrahydro
- the concentration of the fibrous carbon nanostructure in the fibrous carbon nanostructure dispersion liquid of this embodiment is preferably 0.005% by mass or more, more preferably 0.01% by mass or more. It is preferably at most mass%, more preferably at most 0.5 mass%.
- concentration of the fibrous carbon nanostructure is 0.005% by mass or more, a carbon film having excellent conductivity and strength can be formed.
- concentration of the fibrous carbon nanostructure is 5% by mass or less, the dispersion of the fibrous carbon nanostructure can be obtained by suppressing aggregation of the fibrous carbon nanostructure. it can.
- the fibrous carbon nanostructure dispersion liquid of the present embodiment is capable of forming a carbon film that is more excellent in conductivity and strength, and a viewpoint that a dispersion liquid that is further excellent in dispersibility of the fibrous carbon nanostructure can be obtained. Therefore, it is preferable that the dispersant is substantially not contained. In the present specification, “substantially free” means that it is not actively blended unless it is inevitably mixed. Specifically, it is contained in the fibrous carbon nanostructure dispersion liquid. The amount is preferably less than 0.05% by mass, more preferably less than 0.01% by mass, and still more preferably less than 0.001% by mass. Examples of the dispersant include surfactants, synthetic polymers, natural polymers, and the like.
- surfactant examples include sodium dodecyl sulfonate, sodium deoxycholate, sodium cholate, sodium dodecylbenzene sulfonate, and the like.
- synthetic polymer examples include polyether diol, polyester diol, polycarbonate diol, polyvinyl alcohol, partially saponified polyvinyl alcohol, acetoacetyl group-modified polyvinyl alcohol, acetal group-modified polyvinyl alcohol, butyral group-modified polyvinyl alcohol, and silanol group-modified.
- Polyvinyl alcohol ethylene-vinyl alcohol copolymer, ethylene-vinyl alcohol-vinyl acetate copolymer resin, dimethylaminoethyl acrylate, dimethylaminoethyl methacrylate, acrylic resin, epoxy resin, modified epoxy resin, phenoxy resin, modified phenoxy system Resin, phenoxy ether resin, phenoxy ester resin, fluorine resin, melamine resin, alkyd resin, phenol resin, Polyacrylamide, polyacrylic acid, polystyrene sulfonic acid, polyethylene glycol, polyvinylpyrrolidone, and the like.
- a particle diameter distribution curve is obtained with the horizontal axis representing the particle diameter and the vertical axis representing the number of fibrous carbon nanostructures, and the particle diameter at the maximum value is defined as the number-based mode diameter of the fibrous carbon nanostructure.
- the mode diameter of the fibrous carbon nanostructure contained in the fibrous carbon nanostructure dispersion is adjusted by adjusting the production conditions of the fibrous carbon nanostructure or the fibrous carbon nanostructure dispersion. Can be changed arbitrarily.
- the fibrous carbon nanostructure dispersion liquid of the present embodiment has a small amount of impurities in the fibrous carbon nanostructure dispersion liquid, and from the viewpoint of producing a long-life electronic component with stable characteristics,
- the concentration of the metal impurity in the structure dispersion liquid is preferably less than 1 ⁇ 10 18 atoms / cm 3 , more preferably less than 15 ⁇ 10 10 atoms / cm 3 .
- the fibrous carbon nanostructure dispersion liquid of the present embodiment further improves the dispersibility of the fibrous carbon nanostructure, and from the viewpoint of forming a uniform carbon film, It is preferable that agglomerates are not substantially contained.
- precipitates and aggregates refer to fibrous nanostructures that precipitate by centrifugation at 10,000 G for 20 minutes.
- the fibrous carbon nanostructure dispersion liquid of this embodiment is further improved in the dispersibility of the fibrous carbon nanostructure, and from the viewpoint of forming a uniform carbon film and producing an electronic component having stable characteristics. It is preferable that particulate impurities having a diameter of more than 300 nm are substantially not contained, more preferably particulate impurities having a particle diameter of more than 100 nm are substantially not contained, and particulate impurities having a particle diameter of more than 45 nm are contained. More preferably, it is not substantially contained.
- the particle size and concentration of particulate impurities are measured by applying a fibrous carbon nanostructure dispersion liquid on a substrate and using a product name “surfscan” manufactured by KLA Tencor Corporation or the like. Can do.
- the absorbance of the fibrous carbon nanostructure dispersion liquid of the present embodiment measured with a spectrophotometer is preferably 0.1 or more at an optical path length of 1 mm and a wavelength of 1000 nm. 0.2 or more is preferable, 5.0 or less is preferable, and 3.0 or less is more preferable.
- the absorbance of the fibrous carbon nanostructure dispersion liquid is 0.1 or more, a sufficient amount of the fibrous carbon nanostructure body in the fibrous carbon nanostructure dispersion liquid can be ensured.
- the said coarse dispersion liquid is not specifically limited, It can obtain by mixing the fibrous carbon nanostructure mentioned above and the solvent mentioned above by a known method.
- the fibrous carbon nanostructure and the solvent can be mixed in any order.
- the dispersion treatment method for preparing the dispersion mixed solution by subjecting the coarse dispersion to dispersion treatment is not particularly limited, and is a known dispersion used for dispersion of a liquid containing fibrous carbon nanostructures. Processing methods can be used. Among these, as the dispersion treatment applied to the coarse dispersion, a dispersion treatment capable of obtaining a cavitation effect or a crushing effect is preferable. If a dispersion treatment that provides a cavitation effect or a crushing effect is used, the fibrous carbon nanostructure can be favorably dispersed, so that the dispersibility of the obtained fibrous carbon nanostructure dispersion can be further improved. it can.
- the dispersion treatment that provides the cavitation effect is a dispersion method that uses a shock wave that is generated when a vacuum bubble generated in water bursts when high energy is applied to the liquid.
- the fibrous carbon nanostructure can be favorably dispersed.
- dispersion treatment that can provide a cavitation effect
- dispersion treatment using ultrasonic waves dispersion treatment using a jet mill
- dispersion treatment using high shear stirring Only one of these distributed processes may be performed, or a plurality of distributed processes may be combined. More specifically, for example, an ultrasonic homogenizer, a jet mill, and a high shear stirring device are preferably used. These devices may be conventionally known devices.
- the coarse dispersion may be irradiated with ultrasonic waves using the ultrasonic homogenizer.
- the irradiation time may be appropriately set depending on the amount of the fibrous carbon nanostructure and the like, for example, preferably 3 minutes or more, more preferably 30 minutes or more, and preferably 5 hours or less, more preferably 2 hours or less.
- the output is preferably 20 W or more and 500 W or less, more preferably 100 W or more and 500 W or less, and the temperature is preferably 15 ° C. or more and 50 ° C. or less.
- the fibrous carbon nanostructure dispersion liquid including the fibrous carbon nanostructure in which the mass reduction rate of Examples 1 and 2 is 3.0% or less aggregation occurs due to the filtration purification treatment.
- the absorbance ratio was 0.5% or more.
- it was high purity and excellent in the dispersibility of the fibrous carbon nanostructure.
- a fibrous carbon nanostructure dispersion having excellent dispersibility of the fibrous carbon nanostructure can be provided.
Abstract
Description
本発明の繊維状炭素ナノ構造体分散液は、熱重量分析により測定される、窒素雰囲気中、昇温速度20℃/分で23℃から200℃まで昇温した時の質量減少率が3.0質量%以下である繊維状炭素ナノ構造体と、溶媒とを含む。 (Fibrous carbon nanostructure dispersion)
The fibrous carbon nanostructure dispersion liquid of the present invention has a mass reduction rate of 3.3 when the temperature is increased from 23 ° C. to 200 ° C. at a temperature increase rate of 20 ° C./min in a nitrogen atmosphere as measured by thermogravimetric analysis. The fibrous carbon nanostructure which is 0 mass% or less and a solvent are included.
上記繊維状炭素ナノ構造体としては、特に限定されることなく、例えば、カーボンナノチューブ、気相成長炭素繊維等を用いることができる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
中でも、繊維状炭素ナノ構造体としては、カーボンナノチューブを含む繊維状炭素ナノ構造体を用いることがより好ましい。カーボンナノチューブを含む繊維状炭素ナノ構造体を使用すれば、導電性や強度に一層優れた炭素膜を形成することができる分散液を得ることができる。
なお、本明細書において、「炭素膜」とは、カーボンナノチューブ等の繊維状炭素ナノ構造体の集合体よりなる膜をいう。 <Fibrous carbon nanostructure>
The fibrous carbon nanostructure is not particularly limited, and for example, carbon nanotubes, vapor grown carbon fibers, and the like can be used. These may be used individually by 1 type and may use 2 or more types together.
Among these, as the fibrous carbon nanostructure, it is more preferable to use a fibrous carbon nanostructure including carbon nanotubes. If a fibrous carbon nanostructure containing carbon nanotubes is used, a dispersion capable of forming a carbon film with further excellent conductivity and strength can be obtained.
In the present specification, the “carbon film” refers to a film made of an aggregate of fibrous carbon nanostructures such as carbon nanotubes.
なお、繊維状炭素ナノ構造体中のカーボンナノチューブとしては、特に限定されることなく、単層カーボンナノチューブ及び/又は多層カーボンナノチューブを用いることができるが、カーボンナノチューブは、単層から5層までのカーボンナノチューブであることが好ましく、単層カーボンナノチューブであることがより好ましい。単層カーボンナノチューブを使用すれば、多層カーボンナノチューブを使用した場合と比較し、得られる分散液中の繊維状炭素ナノ構造体の分散性を一層高めることができ、また、導電性や強度に一層優れた炭素膜を形成することができる分散液が得られる。 Here, the fibrous carbon nanostructure containing carbon nanotubes that can be suitably used as a fibrous carbon nanostructure may be composed of only carbon nanotubes, or carbon nanotubes and fibers other than carbon nanotubes. It may be a mixture with a carbon nanostructure.
The carbon nanotubes in the fibrous carbon nanostructure are not particularly limited, and single-walled carbon nanotubes and / or multi-walled carbon nanotubes can be used. Carbon nanotubes are preferable, and single-walled carbon nanotubes are more preferable. If single-walled carbon nanotubes are used, the dispersibility of the fibrous carbon nanostructures in the resulting dispersion can be further increased compared to the case where multi-walled carbon nanotubes are used, and the conductivity and strength can be further improved. A dispersion capable of forming an excellent carbon film is obtained.
なお、「繊維状炭素ナノ構造体の平均直径(Av)」及び「繊維状炭素ナノ構造体の直径の標準偏差(σ:標本標準偏差)」は、それぞれ、透過型電子顕微鏡を用いて無作為に選択した繊維状炭素ナノ構造体100本の直径(外径)を測定して求めることができる。そして、繊維状炭素ナノ構造体の平均直径(Av)及び標準偏差(σ)は、繊維状炭素ナノ構造体の製造方法や製造条件を変更することにより調整してもよいし、異なる製法で得られた繊維状炭素ナノ構造体を複数種類組み合わせることにより調整してもよい。 Further, as the fibrous carbon nanostructure, the ratio (3σ / Av) of the value (3σ) obtained by multiplying the standard deviation (σ) of the diameter by 3 with respect to the average diameter (Av) is more than 0.20 and less than 0.60 It is preferable to use a fibrous carbon nanostructure of 3σ / Av of more than 0.25, more preferably a fibrous carbon nanostructure of 3σ / Av of more than 0.25. More preferably, is used. If a fibrous carbon nanostructure having a 3σ / Av of more than 0.20 and less than 0.60 is used, the dispersibility of the fibrous carbon nanostructure in the resulting dispersion can be further improved, and the conductivity is improved. In addition, a dispersion capable of forming a carbon film having further excellent strength can be obtained.
“Average diameter (Av) of fibrous carbon nanostructure” and “standard deviation of diameter of fibrous carbon nanostructure (σ: sample standard deviation)” are randomized using a transmission electron microscope, respectively. It can be determined by measuring the diameter (outer diameter) of 100 fibrous carbon nanostructures selected. The average diameter (Av) and standard deviation (σ) of the fibrous carbon nanostructure may be adjusted by changing the production method and production conditions of the fibrous carbon nanostructure, or may be obtained by different production methods. You may adjust by combining multiple types of the obtained fibrous carbon nanostructure.
なお、本発明において、「BET比表面積」とは、BET法を用いて測定した窒素吸着比表面積を指す。 Further, BET specific surface area of the fibrous carbon nanostructure is preferably 400 meters 2 / g or more, more preferably 800 m 2 / g or more, is preferably from 2500m 2 / g, 1200m 2 / G or less is more preferable. When the BET specific surface area of the fibrous carbon nanostructure is 400 m 2 / g or more, the strength and self-supporting property of the carbon film formed using the obtained dispersion can be further increased. Moreover, if the BET specific surface area of a fibrous carbon nanostructure is 2500 m < 2 > / g or less, the dispersibility of the fibrous carbon nanostructure in the obtained dispersion liquid can be improved further.
In the present invention, the “BET specific surface area” refers to a nitrogen adsorption specific surface area measured using the BET method.
ここで、「マイクロ孔容積(Vp)」は、繊維状炭素ナノ構造体の液体窒素温度(77K)での窒素吸脱着等温線を測定し、相対圧P/P0=0.19における窒素吸着量をVとして、式(I):Vp=(V/22414)×(M/ρ)より、算出することができる。なお、Pは吸着平衡時の測定圧力、P0は測定時の液体窒素の飽和蒸気圧であり、式(I)中、Mは吸着質(窒素)の分子量28.010、ρは吸着質(窒素)の77Kにおける密度0.808g/cm3である。マイクロ孔容積は、例えば、「BELSORP(登録商標)-mini」(日本ベル(株)製)を使用して求めることができる。 Furthermore, the fibrous carbon nanostructure preferably has a plurality of micropores. In particular, the fibrous carbon nanostructure preferably has micropores having a pore diameter smaller than 2 nm, and the abundance thereof is a micropore volume determined by the following method, preferably 0.40 mL / g or more. Preferably it is 0.43 mL / g or more, More preferably, it is 0.45 mL / g or more, and as an upper limit, it is about 0.65 mL / g normally. Since the fibrous carbon nanostructure has the above micropores, aggregation of the fibrous carbon nanostructure in the liquid is suppressed, and the dispersibility of the fibrous carbon nanostructure in the obtained dispersion liquid is reduced. It can be further enhanced. The micropore volume can be adjusted, for example, by appropriately changing the preparation method and preparation conditions of the fibrous carbon nanostructure.
Here, the “micropore volume (Vp)” is a nitrogen adsorption / desorption isotherm at a liquid nitrogen temperature (77 K) of the fibrous carbon nanostructure, and a nitrogen adsorption amount at a relative pressure P / P0 = 0.19. Can be calculated from the formula (I): Vp = (V / 22414) × (M / ρ). Here, P is a measurement pressure at the time of adsorption equilibrium, P0 is a saturated vapor pressure of liquid nitrogen at the time of measurement, and in formula (I), M is an adsorbate (nitrogen) molecular weight of 28.010, and ρ is an adsorbate (nitrogen). ) At 77K with a density of 0.808 g / cm 3 . The micropore volume can be determined using, for example, “BELSORP (registered trademark) -mini” (manufactured by Nippon Bell Co., Ltd.).
(1)全表面への窒素分子の単分子吸着層形成過程
(2)多分子吸着層形成とそれに伴う細孔内での毛管凝縮充填過程
(3)細孔が窒素によって満たされた見かけ上の非多孔性表面への多分子吸着層形成過程 Here, in the substance having pores on the surface, the growth of the nitrogen gas adsorption layer is classified into the following processes (1) to (3). The slope of the t-plot is changed by the following processes (1) to (3).
(1) Monomolecular adsorption layer formation process of nitrogen molecules on the entire surface (2) Multimolecular adsorption layer formation and capillary condensation filling process in the pores accompanying it (3) Apparent filling of the pores with nitrogen Formation process of multimolecular adsorption layer on non-porous surface
なお、「屈曲点の位置」は、前述した(1)の過程の近似直線Aと、前述した(3)の過程の近似直線Bとの交点である。 The bending point of the t-plot of the fibrous carbon nanostructure is preferably in a range satisfying 0.2 ≦ t (nm) ≦ 1.5, and 0.45 ≦ t (nm) ≦ 1.5. More preferably, it is in the range of 0.55 ≦ t (nm) ≦ 1.0.
The “position of the bending point” is an intersection of the approximate line A in the process (1) described above and the approximate line B in the process (3) described above.
また、繊維状炭素ナノ構造体の全比表面積S1及び内部比表面積S2は、特に限定されないが、個別には、S1は、400m2/g以上2500m2/g以下であることが好ましく、800m2/g以上1200m2/g以下であることが更に好ましい。一方、S2は、30m2/g以上540m2/g以下であることが好ましい。
ここで、繊維状炭素ナノ構造体の全比表面積S1及び内部比表面積S2は、そのt-プロットから求めることができる。具体的には、まず、(1)の過程の近似直線の傾きから全比表面積S1を、(3)の過程の近似直線の傾きから外部比表面積S3を、それぞれ求めることができる。そして、全比表面積S1から外部比表面積S3を差し引くことにより、内部比表面積S2を算出することができる。 Further, the fibrous carbon nanostructure preferably has a ratio (S2 / S1) of the internal specific surface area S2 to the total specific surface area S1 obtained from the t-plot of 0.05 or more and 0.30 or less.
Further, the total specific surface area S1 and the internal specific surface area S2 of the fibrous carbon nanostructure are not particularly limited, but individually, S1 is preferably 400 m 2 / g or more and 2500 m 2 / g or less, and 800 m 2. / G or more and 1200 m 2 / g or less is more preferable. On the other hand, S2 is preferably 30 m 2 / g or more and 540 m 2 / g or less.
Here, the total specific surface area S1 and the internal specific surface area S2 of the fibrous carbon nanostructure can be obtained from the t-plot. Specifically, first, the total specific surface area S1 can be obtained from the slope of the approximate line in the process (1), and the external specific surface area S3 can be obtained from the slope of the approximate line in the process (3). Then, the internal specific surface area S2 can be calculated by subtracting the external specific surface area S3 from the total specific surface area S1.
なお、本明細書において「テープ状部分を全長に亘って有する」とは、「長手方向の長さ(全長)の60%以上、好ましくは80%以上、より好ましくは100%に亘って連続的にまたは断続的にテープ状部分を有する」ことを指す。 In addition, the said fibrous carbon nanostructure may be comprised only from SGCNT, and may be comprised from SGCNT and a non-cylindrical carbon nanostructure. Specifically, the fibrous carbon nanostructure has a single-layer or multi-layer flat cylindrical carbon nanostructure (hereinafter referred to as “graphene nanotape”) having a tape-like portion whose inner walls are close to or bonded to each other over the entire length. (GNT) ") may be included.
In the present specification, “having the tape-like portion over the entire length” means “continuous over 60% or more, preferably 80% or more, more preferably 100% of the length in the longitudinal direction (full length)”. Or intermittently has a tape-like portion.
ここで、GNTの断面形状において、「断面長手方向の中央部近傍」とは、断面の長手中心線(断面の長手方向中心を通り、長手方向線に直交する直線)から、断面の長手方向幅の30%以内の領域をいい、「断面長手方向の端部近傍」とは、「断面長手方向の中央部近傍」の長手方向外側の領域をいう。 And it is preferable that the shape of GNT is a shape which has a tape-shaped part in the center part of the width direction, and the shape of the cross section orthogonal to the extending direction (axial direction) is the cross-sectional length in the vicinity of both ends in the cross-sectional longitudinal direction. It is more preferable that the maximum dimension in the direction orthogonal to the direction is larger than the maximum dimension in the direction orthogonal to the longitudinal direction of the cross section in the vicinity of the central portion in the longitudinal direction of the cross section. preferable.
Here, in the cross-sectional shape of the GNT, “near the central portion in the longitudinal direction of the cross section” means the longitudinal width of the cross section from the longitudinal center line of the cross section (a straight line passing through the longitudinal center of the cross section and perpendicular to the longitudinal direction line). The “near the end in the longitudinal direction of the cross section” means the area outside the longitudinal direction of “near the center in the longitudinal direction of the cross section”.
なお、質量減少率は、加熱する前の繊維状炭素ナノ構造体の質量(100質量%)に対する、窒素雰囲気中、昇温速度20℃/分で23℃から200℃まで昇温した後に減少した繊維状炭素ナノ構造体の質量の割合であり、後述の評価の「(1)質量減少率」に記載の方法で求められる値をいう。 The mass reduction rate of the above fibrous carbon nanostructure measured by thermogravimetric analysis in a nitrogen atmosphere when the temperature is increased from 23 ° C. to 200 ° C. at a temperature increase rate of 20 ° C./min is decomposed even under heating. From the viewpoint of being difficult and having excellent dispersibility, it is 3.0% by mass or less, and preferably 2.0% by mass or less. The cause of the decrease in mass in the above measurement includes, for example, a decrease in mass due to decomposition of amorphous carbon or the like that is not in a tube shape.
The mass reduction rate decreased after the temperature was increased from 23 ° C. to 200 ° C. at a rate of temperature increase of 20 ° C./min in a nitrogen atmosphere with respect to the mass (100% by mass) of the fibrous carbon nanostructure before heating. It is the ratio of the mass of the fibrous carbon nanostructure, and refers to the value obtained by the method described in “(1) Mass reduction rate” in the evaluation described later.
本明細書において、金属不純物の濃度は、例えば、透過型電子顕微鏡(TEM)、走査型電子顕微鏡(SEM)、エネルギー分散型X線分析(EDAX)、気相分解装置及びICP質量分析(VPD、ICP/MS)等により測定することができる。
ここで、金属不純物とは、繊維状炭素ナノ構造体を製造する際に用いた金属触媒等が挙げられ、例えば、アルカリ金属、アルカリ土類金属、第3~13族、ランタノイド族の各属する金属元素、Si、Sb、As、Pb、Sn、Bi等の金属元素、及びこれらを含む金属化合物等が挙げられる。より具体的には、Al、Sb、As、Ba、Be、Bi、B、Cd、Ca、Cr、Co、Cu、Ga、Ge、Fe、Pb、Li、Mg、Mn、Mo、Ni、K、Na、Sr、Sn、Ti、W、V、Zn、Zr等の金属元素及びこれらを含む金属化合物が挙げられる。 The above-mentioned fibrous carbon nanostructure is a metal impurity contained in the fibrous carbon nanostructure from the viewpoint that the amount of impurities in the fibrous carbon nanostructure dispersion is reduced and a long-life electronic component with stable characteristics can be produced. The concentration of is preferably less than 5000 ppm, and more preferably less than 1000 ppm.
In the present specification, the concentration of metal impurities is, for example, a transmission electron microscope (TEM), a scanning electron microscope (SEM), an energy dispersive X-ray analysis (EDAX), a gas phase decomposition apparatus, and an ICP mass spectrometry (VPD, ICP / MS) or the like.
Here, examples of the metal impurities include metal catalysts used for producing fibrous carbon nanostructures, and examples include metals belonging to alkali metals, alkaline earth metals, Groups 3 to 13, and lanthanoid groups. Examples thereof include metal elements such as element, Si, Sb, As, Pb, Sn, and Bi, and metal compounds containing these. More specifically, Al, Sb, As, Ba, Be, Bi, B, Cd, Ca, Cr, Co, Cu, Ga, Ge, Fe, Pb, Li, Mg, Mn, Mo, Ni, K, Examples thereof include metal elements such as Na, Sr, Sn, Ti, W, V, Zn, and Zr, and metal compounds containing these.
なお、本明細書において、粒子状不純物の濃度は、基板上に繊維状炭素ナノ構造体分散液を塗布し、表面を商品名「surfscan」KLA Tencor Corporation製等を用いて測定することができる。 The above-mentioned fibrous carbon nanostructure further improves the dispersibility of the fibrous carbon nanostructure in the fibrous carbon nanostructure dispersion liquid, thereby forming a uniform carbon film, and having stable characteristics. Is preferably substantially free of particulate impurities having a particle diameter of more than 500 nm, more preferably substantially free of particulate impurities having a particle diameter of more than 300 nm. It is more preferable that particulate impurities exceeding 100 nm are substantially not contained, and it is particularly preferable that particulate impurities having a particle diameter exceeding 45 nm are substantially not contained.
In the present specification, the concentration of particulate impurities can be measured by applying a fibrous carbon nanostructure dispersion liquid on a substrate and using the product name “surfscan” manufactured by KLA Tencor Corporation or the like.
上記溶媒としては、例えば、非ハロゲン系溶媒、非水溶媒等が挙げられる。具体的には、上記溶媒としては、水;メタノール、エタノール、n-プロパノール、イソプロパノール、n-ブタノール、イソブタノール、t-ブタノール、ペンタノール、ヘキサノール、ヘプタノール、オクタノール、ノナノール、デカノール、アミルアルコール、メトキシプロパノール、プロピレングリコール、エチレングリコール等のアルコール類;アセトン、メチルエチルケトン、シクロヘキサノン等のケトン類;酢酸エチル、酢酸ブチル、乳酸エチル、α-ヒドロキシカルボン酸のエステル、ベンジルベンゾエート(安息香酸ベンジル)等のエステル類;ジエチルエーテル、ジオキサン、テトラヒドロフラン、モノメチルエーテル等のエーテル類;N,N-ジメチルホルムアミド、N-メチルピロリドン等のアミド系極性有機溶媒;トルエン、キシレン、クロロベンゼン、オルトジクロロベンゼン、パラジクロロベンゼン、等の芳香族炭化水素類;サリチルアルデヒド、ジメチルスルホキシド、4-メチル-2-ペンタノン、N-メチルピロリドン、γ-ブチロラクトン、テトラメチルアンモニウムヒドロキシド等が挙げられる。中でも、分散性に特に優れる観点から、水、乳酸エチル、イソプロパノール、メチルエチルケトンが好ましい。これらは1種類のみを単独で用いてもよいし、2種類以上を混合して用いてもよい。 <Solvent>
Examples of the solvent include non-halogen solvents and non-aqueous solvents. Specifically, the solvent includes water; methanol, ethanol, n-propanol, isopropanol, n-butanol, isobutanol, t-butanol, pentanol, hexanol, heptanol, octanol, nonanol, decanol, amyl alcohol, methoxy Alcohols such as propanol, propylene glycol, and ethylene glycol; Ketones such as acetone, methyl ethyl ketone, and cyclohexanone; Esters such as ethyl acetate, butyl acetate, ethyl lactate, α-hydroxycarboxylic acid ester, and benzylbenzoate (benzyl benzoate) Ethers such as diethyl ether, dioxane, tetrahydrofuran and monomethyl ether; polar organic solvents such as N, N-dimethylformamide and N-methylpyrrolidone Aromatic hydrocarbons such as toluene, xylene, chlorobenzene, orthodichlorobenzene, paradichlorobenzene; salicylaldehyde, dimethyl sulfoxide, 4-methyl-2-pentanone, N-methylpyrrolidone, γ-butyrolactone, tetramethylammonium hydroxide, etc. Is mentioned. Among these, water, ethyl lactate, isopropanol, and methyl ethyl ketone are preferable from the viewpoint of particularly excellent dispersibility. These may be used alone or in combination of two or more.
なお、上記分散剤としては、界面活性剤、合成高分子、天然高分子等が挙げられる。
また、界面活性剤としては、例えば、ドデシルスルホン酸ナトリウム、デオキシコール酸ナトリウム、コール酸ナトリウム、ドデシルベンゼンスルホン酸ナトリウム等が挙げられる。
また、合成高分子としては、例えば、ポリエーテルジオール、ポリエステルジオール、ポリカーボネートジオール、ポリビニルアルコール、部分けん化ポリビニルアルコール、アセトアセチル基変性ポリビニルアルコール、アセタール基変性ポリビニルアルコール、ブチラール基変性ポリビニルアルコール、シラノール基変性ポリビニルアルコール、エチレン-ビニルアルコール共重合体、エチレン-ビニルアルコール-酢酸ビニル共重合樹脂、ジメチルアミノエチルアクリレート、ジメチルアミノエチルメタクリレート、アクリル系樹脂、エポキシ樹脂、変性エポキシ系樹脂、フェノキシ樹脂、変性フェノキシ系樹脂、フェノキシエーテル樹脂、フェノキシエステル樹脂、フッ素系樹脂、メラミン樹脂、アルキッド樹脂、フェノール樹脂、ポリアクリルアミド、ポリアクリル酸、ポリスチレンスルホン酸、ポリエチレングリコール、ポリビニルピロリドン等が挙げられる。
また、天然高分子としては、例えば、多糖類であるデンプン、プルラン、デキストラン、デキストリン、グアーガム、キサンタンガム、アミロース、アミロペクチン、アルギン酸、アラビアガム、カラギーナン、コンドロイチン硫酸、ヒアルロン酸、カードラン、キチン、キトサン、セルロース、並びに、その塩又は誘導体等が挙げられる。 The fibrous carbon nanostructure dispersion liquid of the present embodiment is capable of forming a carbon film that is more excellent in conductivity and strength, and a viewpoint that a dispersion liquid that is further excellent in dispersibility of the fibrous carbon nanostructure can be obtained. Therefore, it is preferable that the dispersant is substantially not contained. In the present specification, “substantially free” means that it is not actively blended unless it is inevitably mixed. Specifically, it is contained in the fibrous carbon nanostructure dispersion liquid. The amount is preferably less than 0.05% by mass, more preferably less than 0.01% by mass, and still more preferably less than 0.001% by mass.
Examples of the dispersant include surfactants, synthetic polymers, natural polymers, and the like.
Examples of the surfactant include sodium dodecyl sulfonate, sodium deoxycholate, sodium cholate, sodium dodecylbenzene sulfonate, and the like.
Examples of the synthetic polymer include polyether diol, polyester diol, polycarbonate diol, polyvinyl alcohol, partially saponified polyvinyl alcohol, acetoacetyl group-modified polyvinyl alcohol, acetal group-modified polyvinyl alcohol, butyral group-modified polyvinyl alcohol, and silanol group-modified. Polyvinyl alcohol, ethylene-vinyl alcohol copolymer, ethylene-vinyl alcohol-vinyl acetate copolymer resin, dimethylaminoethyl acrylate, dimethylaminoethyl methacrylate, acrylic resin, epoxy resin, modified epoxy resin, phenoxy resin, modified phenoxy system Resin, phenoxy ether resin, phenoxy ester resin, fluorine resin, melamine resin, alkyd resin, phenol resin, Polyacrylamide, polyacrylic acid, polystyrene sulfonic acid, polyethylene glycol, polyvinylpyrrolidone, and the like.
Examples of natural polymers include polysaccharides such as starch, pullulan, dextran, dextrin, guar gum, xanthan gum, amylose, amylopectin, alginic acid, gum arabic, carrageenan, chondroitin sulfate, hyaluronic acid, curdlan, chitin, chitosan, Examples thereof include cellulose and salts or derivatives thereof.
本明細書において、個数基準のモード径とは、以下の方法で求めることができる。
レーザー回折/散乱式粒子径分布測定装置(堀場製作所製、型式「LA-960」等)を用いて、繊維状炭素ナノ構造体分散液中に含まれる繊維状炭素ナノ構造体の粒子径を測定する。そして、横軸を粒子径、縦軸を繊維状炭素ナノ構造体の個数とした粒子径分布曲線を得て、その極大値における粒子径を、繊維状炭素ナノ構造体の個数基準のモード径として求める。
なお、繊維状炭素ナノ構造体分散液中に含有されている繊維状炭素ナノ構造体のモード径は、繊維状炭素ナノ構造体や繊維状炭素ナノ構造体分散液の製造条件を調節することによって、任意に変更することができる。 The fibrous carbon nanostructure dispersion liquid of this embodiment is further improved in the dispersibility of the fibrous carbon nanostructure, whereby a uniform carbon film can be formed, and an electronic component having stable characteristics can be produced. It is preferable that particles having a number-based mode diameter larger than 500 nm are substantially not contained. In particular, it is preferable that particles having a number-based mode diameter larger than 300 nm are not substantially contained.
In this specification, the number-based mode diameter can be determined by the following method.
Measure the particle size of the fibrous carbon nanostructures contained in the fibrous carbon nanostructure dispersion using a laser diffraction / scattering particle size distribution analyzer (Horiba, Model “LA-960”, etc.) To do. Then, a particle diameter distribution curve is obtained with the horizontal axis representing the particle diameter and the vertical axis representing the number of fibrous carbon nanostructures, and the particle diameter at the maximum value is defined as the number-based mode diameter of the fibrous carbon nanostructure. Ask.
The mode diameter of the fibrous carbon nanostructure contained in the fibrous carbon nanostructure dispersion is adjusted by adjusting the production conditions of the fibrous carbon nanostructure or the fibrous carbon nanostructure dispersion. Can be changed arbitrarily.
本明細書において、重金属とは、比重5g/mL以上の金属をいう。 The fibrous carbon nanostructure dispersion liquid of the present embodiment has a small amount of impurities in the fibrous carbon nanostructure dispersion liquid, and from the viewpoint of producing a long-life electronic component with stable characteristics, The concentration of the heavy metal impurity in the structure dispersion liquid is preferably less than 1 × 10 18 atoms / cm 3 , and more preferably less than 1 × 10 11 atoms / cm 3 .
In the present specification, the heavy metal refers to a metal having a specific gravity of 5 g / mL or more.
なお、本明細書において、沈殿物、凝集物とは、10000Gで20分間遠心して沈殿する繊維状ナノ構造体をいう。 The fibrous carbon nanostructure dispersion liquid of the present embodiment further improves the dispersibility of the fibrous carbon nanostructure, and from the viewpoint of forming a uniform carbon film, It is preferable that agglomerates are not substantially contained.
In the present specification, precipitates and aggregates refer to fibrous nanostructures that precipitate by centrifugation at 10,000 G for 20 minutes.
なお、本明細書において、粒子状不純物の粒径及び濃度は、基板上に繊維状炭素ナノ構造体分散液を塗布し、表面を商品名「surfscan」KLA Tencor Corporation製等を用いて測定することができる。 The fibrous carbon nanostructure dispersion liquid of this embodiment is further improved in the dispersibility of the fibrous carbon nanostructure, and from the viewpoint of forming a uniform carbon film and producing an electronic component having stable characteristics. It is preferable that particulate impurities having a diameter of more than 300 nm are substantially not contained, more preferably particulate impurities having a particle diameter of more than 100 nm are substantially not contained, and particulate impurities having a particle diameter of more than 45 nm are contained. More preferably, it is not substantially contained.
In this specification, the particle size and concentration of particulate impurities are measured by applying a fibrous carbon nanostructure dispersion liquid on a substrate and using a product name “surfscan” manufactured by KLA Tencor Corporation or the like. Can do.
本実施形態の繊維状炭素ナノ構造体分散液の粘度は、0.5mPa・s以上であることが好ましく、1mPa・s以上であることがより好ましく、1000mPa・s以下であることが好ましく、100mPa・s以下であることがより好ましい。繊維状炭素ナノ構造体分散液の粘度が0.5mPa・s以上1000mPa・s以下であれば、繊維状炭素ナノ構造体の分散性に優れる。
なお、本発明において、「繊維状炭素ナノ構造体分散液の粘度」は、JIS Z8803に準拠して、温度25℃で測定することができる。 <Physical properties>
The viscosity of the fibrous carbon nanostructure dispersion liquid of this embodiment is preferably 0.5 mPa · s or more, more preferably 1 mPa · s or more, and preferably 1000 mPa · s or less, 100 mPa. -More preferably, it is s or less. If the viscosity of the fibrous carbon nanostructure dispersion liquid is 0.5 mPa · s or more and 1000 mPa · s or less, the dispersibility of the fibrous carbon nanostructure is excellent.
In the present invention, “viscosity of fibrous carbon nanostructure dispersion” can be measured at a temperature of 25 ° C. in accordance with JIS Z8803.
なお、本発明において「吸光度比」は、後述の評価の「(2)吸光度比」に記載の方法で測定することができる。 The absorbance ratio of the fibrous carbon nanostructure dispersion liquid of the present embodiment is preferably 0.5 or more from the viewpoint of high purity with few aggregates and excellent dispersibility of the fibrous carbon nanostructure. 0.7 to 1.0 is more preferable.
In the present invention, the “absorbance ratio” can be measured by the method described in “(2) Absorbance ratio” in the evaluation described later.
本実施形態の繊維状炭素ナノ構造体分散液は、ロジック回路等の電子回路、DRAM、SRAM、NRAM等のメモリ、半導体装置、インターコネクト、相補型MOS、バイポラートランジスタ等の電子部品;微量ガス等の検出器等の化学センサー;DNA、タンパク質等の測定器等のバイオセンサー;太陽電池、タッチパネル等の導電膜;等の電子工学品を製造する際に用いることができ、例えば、電子工学品を製造する際の塗工液や構成材料として用いることができる。中でも、導電性や強度に優れる製品が得られるという観点から、半導体装置の構成材料として好適である。 <Application>
The fibrous carbon nanostructure dispersion liquid of this embodiment is an electronic circuit such as a logic circuit, a memory such as a DRAM, SRAM, or NRAM, an electronic component such as a semiconductor device, an interconnect, a complementary MOS, or a bipolar transistor; It can be used for manufacturing electronic products such as chemical sensors such as detectors, biosensors such as measuring devices for DNA, proteins, etc .; conductive films such as solar cells and touch panels; It can be used as a coating liquid or a constituent material in manufacturing. Especially, it is suitable as a constituent material of a semiconductor device from a viewpoint that the product excellent in electroconductivity and intensity | strength is obtained.
本実施形態の繊維状炭素ナノ構造体分散液の製造方法は、例えば、複数本の繊維状炭素ナノ構造体と、溶媒とを含む分散混合液を遠心分離し、複数本の繊維状炭素ナノ構造体の一部を沈殿させる工程(遠心分離工程)と、遠心分離工程で遠心分離した分散混合液から上澄み液を分取する工程(分取工程)とを含む方法等が挙げられる。また、上記遠心分離工程前に、溶媒中に、複数本の繊維状炭素ナノ構造体を添加してなる粗分散液を分散処理に供して分散混合液を得る工程(分散混合液調製工程)を設けてもよい。
本実施形態の繊維状炭素ナノ構造体分散液の製造方法としては、例えば、多量の繊維状炭素ナノ構造体を溶媒中に添加して粗分散液を形成し、粗分散液を超音波等により撹拌して分散させて分散混合液を得てもよい。また、超音波処理した撹拌後の分散混合液を遠心分離して、繊維状炭素ナノ構造体を含む上澄み液を回収してもよい。また、遠心分離後の沈殿物に、再度溶媒を添加して混合し、超音波処理で分散させた後に、遠心分離をして、繊維状炭素ナノ構造体を含む上澄み液を回収してもよい。また、遠心分離後の沈殿物に溶媒を添加して混合し、超音波処理で分散させた後に、遠心分離をして上澄み液を回収する処理を、複数回繰り返してもよい。 (Method for producing fibrous carbon nanostructure dispersion)
The method for producing a fibrous carbon nanostructure dispersion liquid according to the present embodiment includes, for example, centrifuging a dispersion liquid mixture including a plurality of fibrous carbon nanostructures and a solvent, and thereby a plurality of fibrous carbon nanostructures. Examples include a method including a step of precipitating a part of the body (centrifugation step) and a step of fractionating the supernatant from the dispersion mixture centrifuged in the centrifugation step (sorting step). Moreover, before the said centrifugation process, the process (dispersion liquid mixture preparation process) which obtains a dispersion liquid mixture by using for the dispersion process the coarse dispersion liquid which adds several fibrous carbon nanostructure to a solvent is carried out. It may be provided.
As a method for producing the fibrous carbon nanostructure dispersion liquid of the present embodiment, for example, a large amount of fibrous carbon nanostructure body is added to a solvent to form a coarse dispersion liquid, and the coarse dispersion liquid is ultrasonically or the like. The dispersion mixture may be obtained by stirring and dispersing. Further, the dispersion liquid after stirring which has been subjected to ultrasonic treatment may be centrifuged to recover the supernatant liquid containing the fibrous carbon nanostructure. Moreover, after adding the solvent to the precipitate after centrifugation again, mixing and dispersing by ultrasonication, the supernatant liquid containing the fibrous carbon nanostructure may be recovered by centrifugation. . In addition, the process of adding a solvent to the precipitate after centrifugation, mixing and dispersing by sonication, and then collecting the supernatant by centrifuging may be repeated a plurality of times.
上記分散混合液調製工程では、溶媒中に複数本の繊維状炭素ナノ構造体を添加してなる粗分散液を分散処理に供して、複数本の繊維状炭素ナノ構造体と、溶媒とを含む分散混合液を得ることができる。
なお、上記分散混合液は、分散混合液調製工程を実施することなく、複数本の繊維状炭素ナノ構造体を溶媒に分散させてなる市販の繊維状炭素ナノ構造体の分散混合液を用いて後述する遠心分離工程を実施してもよいが、所望の分散性を有する繊維状炭素ナノ構造体分散液を容易に得る観点からは、分散混合液調製工程を実施して調製した分散混合液を用いることが好ましい。 <Dispersion mixture preparation process>
In the dispersion mixed liquid preparation step, a coarse dispersion formed by adding a plurality of fibrous carbon nanostructures to a solvent is subjected to a dispersion treatment, and includes a plurality of fibrous carbon nanostructures and a solvent. A dispersion mixture can be obtained.
In addition, the said dispersion liquid mixture uses the dispersion liquid mixture of the commercially available fibrous carbon nanostructure formed by disperse | distributing several fibrous carbon nanostructure in a solvent, without implementing a dispersion | distribution liquid mixture preparation process. The centrifugal separation step described later may be carried out, but from the viewpoint of easily obtaining a fibrous carbon nanostructure dispersion having desired dispersibility, the dispersion mixture prepared by carrying out the dispersion mixture preparation step is used. It is preferable to use it.
金属を分離する精製処理としては、例えば、硝酸、塩酸等の酸溶液中に繊維状炭素ナノ構造体を分散させて金属不純物を溶解させる精製処理、磁力精製処理等が挙げられる。中でも、酸溶液中に繊維状炭素ナノ構造体を分散させて金属不純物を溶解させる精製処理が好ましい。
また、粒子状不純物を分離する前処理としては、例えば、超高速遠心機等を用いた高速遠心処理;重力ろ過、クロスフローろ過、真空ろ過等を用いたフィルターろ過処理;非フラーレン炭素材料の選択的酸化;これらの組み合わせ;等の精製処理が挙げられる。 The fibrous carbon nanostructure added to the solvent is pre-treated before the addition to separate particulate impurities such as metals and amorphous carbon and reduce alkali metal ions, halogen ions, oligomers and polymers. You may go.
Examples of the purification treatment for separating metals include a purification treatment in which fibrous carbon nanostructures are dispersed in an acid solution such as nitric acid and hydrochloric acid to dissolve metal impurities, a magnetic purification treatment, and the like. Among these, a purification treatment in which the fibrous carbon nanostructure is dispersed in an acid solution to dissolve metal impurities is preferable.
In addition, as pretreatment for separating particulate impurities, for example, high-speed centrifugation using an ultra-high speed centrifuge, etc .; filter filtration using gravity filtration, cross-flow filtration, vacuum filtration, etc .; selection of non-fullerene carbon material And a purification treatment such as a combination thereof.
上記粗分散液は、特に限定されることなく、上述した繊維状炭素ナノ構造体と、上述した溶媒とを既知の方法で混合することにより得ることができる。なお、繊維状炭素ナノ構造体と、溶媒とは任意の順序で混合することができる。また、粗分散液には、上述した成分以外に、繊維状炭素ナノ構造体分散液の製造に一般に用いられる添加剤を更に添加してもよい。
分散混合液には、界面活性剤や樹脂などの高分子を添加しないことが好ましい。 [Coarse dispersion]
The said coarse dispersion liquid is not specifically limited, It can obtain by mixing the fibrous carbon nanostructure mentioned above and the solvent mentioned above by a known method. The fibrous carbon nanostructure and the solvent can be mixed in any order. Moreover, you may further add the additive generally used for manufacture of a fibrous carbon nanostructure dispersion liquid to a rough dispersion liquid other than the component mentioned above.
It is preferable not to add a polymer such as a surfactant or a resin to the dispersion mixture.
上記粗分散液を分散処理に供して分散混合液を調製する際の分散処理方法としては、特に限定されることなく、繊維状炭素ナノ構造体を含む液の分散に使用されている既知の分散処理方法を用いることができる。中でも、粗分散液に施す分散処理としては、キャビテーション効果又は解砕効果が得られる分散処理が好ましい。キャビテーション効果又は解砕効果が得られる分散処理を使用すれば、繊維状炭素ナノ構造体を良好に分散させることができるので、得られる繊維状炭素ナノ構造体分散液の分散性を更に高めることができる。 [Distributed processing]
The dispersion treatment method for preparing the dispersion mixed solution by subjecting the coarse dispersion to dispersion treatment is not particularly limited, and is a known dispersion used for dispersion of a liquid containing fibrous carbon nanostructures. Processing methods can be used. Among these, as the dispersion treatment applied to the coarse dispersion, a dispersion treatment capable of obtaining a cavitation effect or a crushing effect is preferable. If a dispersion treatment that provides a cavitation effect or a crushing effect is used, the fibrous carbon nanostructure can be favorably dispersed, so that the dispersibility of the obtained fibrous carbon nanostructure dispersion can be further improved. it can.
ここで、キャビテーション効果が得られる分散処理は、液体に高エネルギーを付与した際、水に生じた真空の気泡が破裂することにより生じる衝撃波を利用した分散方法である。この分散方法を用いることにより、繊維状炭素ナノ構造体を良好に分散させることができる。 [[Distributed processing with cavitation effect]]
Here, the dispersion treatment that provides the cavitation effect is a dispersion method that uses a shock wave that is generated when a vacuum bubble generated in water bursts when high energy is applied to the liquid. By using this dispersion method, the fibrous carbon nanostructure can be favorably dispersed.
また、解砕効果が得られる分散処理は、繊維状炭素ナノ構造体を溶媒中に均一に分散できることは勿論、上記したキャビテーション効果が得られる分散処理に比べ、気泡が消滅する際の衝撃波による繊維状炭素ナノ構造体の損傷を抑制することができる点で有利である。 [[Dispersed treatment that can produce a crushing effect]
In addition, the dispersion treatment that provides the crushing effect can uniformly disperse the fibrous carbon nanostructure in the solvent, and, of course, the fiber caused by the shock wave when the bubbles disappear, compared to the dispersion treatment that provides the cavitation effect described above. This is advantageous in that damage to the carbon nanostructure can be suppressed.
なお、粗分散液に背圧を負荷する場合、粗分散液に負荷した背圧は、大気圧まで一気に降圧させてもよいが、多段階で降圧することが好ましい。 In the dispersion treatment that provides this crushing effect, a shear force is applied to the coarse dispersion to break up and disperse the aggregates of the fibrous carbon nanostructures, and the back pressure is applied to the coarse dispersion. Accordingly, by cooling the coarse dispersion, the fibrous carbon nanostructure can be uniformly dispersed in the solvent while suppressing the generation of bubbles.
When a back pressure is applied to the coarse dispersion, the back pressure applied to the coarse dispersion may be reduced to atmospheric pressure all at once, but is preferably reduced in multiple stages.
すなわち、分散器は、粗分散液の流入側から流出側に向かって、内径がd1の分散器オリフィスと、内径がd2の分散空間と、内径がd3の終端部と(但し、d2>d3>d1である。)、を順次備える。
そして、この分散器では、流入する高圧(例えば10~400MPa、好ましくは50~250MPa)の粗分散液が、分散器オリフィスを通過することで、圧力の低下を伴いつつ、高流速の流体となって分散空間に流入する。その後、分散空間に流入した高流速の粗分散液は、分散空間内を高速で流動し、その際にせん断力を受ける。その結果、粗分散液の流速が低下すると共に、繊維状炭素ナノ構造体が良好に分散する。そして、終端部から、流入した粗分散液の圧力よりも低い圧力(背圧)の流体が、繊維状炭素ナノ構造体が分散した液として流出することになる。 Here, in order to further disperse the fibrous carbon nanostructure by applying a shearing force to the coarse dispersion, for example, a dispersion system having a disperser having the following structure may be used.
In other words, the disperser has a disperser orifice having an inner diameter d1, a dispersion space having an inner diameter d2, and a terminal portion having an inner diameter d3 from the inflow side to the outflow side of the coarse dispersion liquid (where d2>d3> d1)).
In this disperser, the inflowing high-pressure (for example, 10 to 400 MPa, preferably 50 to 250 MPa) coarse dispersion passes through the disperser orifice, and becomes a high flow rate fluid with decreasing pressure. Into the dispersed space. Thereafter, the high-velocity coarse dispersion liquid flowing into the dispersion space flows at high speed in the dispersion space and receives a shearing force at that time. As a result, the flow rate of the coarse dispersion decreases, and the fibrous carbon nanostructure is well dispersed. Then, a fluid having a pressure (back pressure) lower than the pressure of the inflowing coarse dispersion liquid flows out from the terminal portion as a liquid in which the fibrous carbon nanostructures are dispersed.
そして、粗分散液の背圧を多段降圧器により多段階で降圧することで、最終的に分散混合液を大気圧に開放した際に、分散混合液中に気泡が発生するのを抑制できる。 Note that the back pressure of the coarse dispersion can be applied to the coarse dispersion by applying a load to the flow of the coarse dispersion. For example, a rough pressure can be obtained by disposing a multistage step-down device downstream of the disperser. A desired back pressure can be applied to the dispersion.
Then, by reducing the back pressure of the coarse dispersion in multiple stages using a multistage pressure reducer, it is possible to suppress the generation of bubbles in the dispersion mixture when the dispersion mixture is finally released to atmospheric pressure.
なお、熱交換器等の配設に替えて、粗分散液を予め冷却しておくことでも、繊維状炭素ナノ構造体を含む液中で気泡が発生することを抑制できる。 Further, the disperser may include a heat exchanger for cooling the coarse dispersion and a cooling liquid supply mechanism. This is because the generation of bubbles in the coarse dispersion can be further suppressed by cooling the coarse dispersion that has been heated to a high temperature by applying a shearing force with the disperser.
In addition, it can suppress that a bubble generate | occur | produces in the liquid containing a fibrous carbon nanostructure also by cooling a rough dispersion liquid beforehand instead of arrangement | positioning of a heat exchanger etc.
遠心分離工程では、複数本の繊維状炭素ナノ構造体と、溶媒とを含む分散混合液を遠心分離し、複数本の繊維状炭素ナノ構造体の一部を沈殿させることができる。そして、遠心分離工程では、凝集性の高い繊維状炭素ナノ構造体が沈殿し、分散性に優れる繊維状炭素ナノ構造体は上澄み液中に残存する。 <Centrifuge separation>
In the centrifugation step, a dispersion liquid mixture containing a plurality of fibrous carbon nanostructures and a solvent can be centrifuged to precipitate a part of the plurality of fibrous carbon nanostructures. In the centrifugation step, the fibrous carbon nanostructure having high cohesion is precipitated, and the fibrous carbon nanostructure having excellent dispersibility remains in the supernatant.
中でも、得られる上澄み液中に分散性に優れる繊維状炭素ナノ構造体を適度に残存させ、分散性に優れる繊維状炭素ナノ構造体分散液を得る観点からは、分散混合液を遠心分離する際の遠心加速度は、2000G以上であることが好ましく、5000G以上であることがより好ましく、20000G以下であることが好ましく、15000G以下であることがより好ましい。
また、得られる上澄み液中に分散性に優れる繊維状炭素ナノ構造体を適度に残存させ、分散性に優れる繊維状炭素ナノ構造体分散液を得る観点からは、分散混合液を遠心分離する際の遠心分離時間は、20分間以上であることが好ましく、30分間以上であることがより好ましく、120分間以下であることが好ましく、90分間以下であることがより好ましい。 Centrifugation of the dispersion liquid mixture is not particularly limited, and can be performed using a known centrifuge.
In particular, from the viewpoint of obtaining a fibrous carbon nanostructure dispersion having excellent dispersibility by appropriately leaving fibrous carbon nanostructures having excellent dispersibility in the resulting supernatant, it is necessary to centrifuge the dispersion mixture. The centrifugal acceleration is preferably 2000 G or more, more preferably 5000 G or more, preferably 20000 G or less, and more preferably 15000 G or less.
In addition, from the viewpoint of obtaining a fibrous carbon nanostructure dispersion having excellent dispersibility by appropriately leaving fibrous carbon nanostructures having excellent dispersibility in the resulting supernatant, it is necessary to centrifuge the dispersion mixture. The centrifugation time is preferably 20 minutes or more, more preferably 30 minutes or more, preferably 120 minutes or less, and more preferably 90 minutes or less.
分取工程では、遠心分離工程で遠心分離した分散混合液から上澄み液を分取することができる。そして、上澄み液の分取は、例えば、デカンテーションやピペッティング等により、沈殿層を残して上澄み液を回収することにより行うことができる。具体的には、例えば、遠心分離後の分散混合液の液面から5/6の深さまでの部分に存在する上澄み液を回収すればよい。 <Preparation process>
In the fractionation step, the supernatant liquid can be fractionated from the dispersion mixture centrifuged in the centrifugation step. The fractionation of the supernatant can be performed, for example, by collecting the supernatant while leaving the precipitate layer by decantation or pipetting. Specifically, for example, the supernatant liquid present in a portion from the liquid surface of the dispersed liquid mixture after centrifugation to a depth of 5/6 may be recovered.
ここで、遠心分離後の分散混合液から分取した上澄み液には、遠心分離により沈殿しなかった繊維状炭素ナノ構造体が含まれている。そして、当該上澄み液を本実施形態の繊維状炭素ナノ構造体分散液として用いることができる。 [Supernatant]
Here, the supernatant liquid separated from the dispersed liquid mixture after centrifugation contains fibrous carbon nanostructures that were not precipitated by centrifugation. And the said supernatant liquid can be used as a fibrous carbon nanostructure dispersion liquid of this embodiment.
<繊維状炭素ナノ構造体の調製>
特許第4621896号公報に記載のスーパーグロース法に従い、以下の条件において、繊維状炭素ナノ構造体としてのSGCNTを合成した。
・原料炭素化合物:エチレン;供給速度50sccm
・雰囲気:ヘリウム/水素混合ガス;供給速度1000sccm
・圧力:1大気圧
・水蒸気添加量:300ppm
・反応温度:750℃
・反応時間:10分
・金属触媒:鉄薄膜(厚さ1nm)
・基材:シリコンウェハー。
得られたSGCNT1gを、7.7MのHNO3250mL中で8時間撹拌し、125℃で12時間還流して、精製をした。その後、脱イオン水1800mLを添加、超音波照射機(本多電子製、製品名「WTC-1200-40」)を用いて40kHzで60分間超音波処理後、0.02μmのセラミック膜を用いてクロスフロー濾過を行った。pH4.0になるまで、セラミック膜に通した。セラミック膜を通過した液体を透過液として廃棄し、フィルターの孔を通過しない液体を保持液として回収した。その後、保持液に0.1%アンモニア水を添加することによって、保持液のpHを7.1に再調整し、超音波照射機で2時間超音波処理を行った。その後、超遠心分離機(日立工機製、製品名「CP-80NX」)を用いて10000Gで20分間遠心して、上澄み液を回収するサイクルを4回繰り返し、繊維状炭素ナノ構造体分散液を得た。得られた繊維状炭素ナノ構造体分散液は100mLであった。 Example 1
<Preparation of fibrous carbon nanostructure>
According to the super-growth method described in Japanese Patent No. 4621896, SGCNT as a fibrous carbon nanostructure was synthesized under the following conditions.
Raw material carbon compound: ethylene; supply rate 50 sccm
・ Atmosphere: Helium / hydrogen mixed gas; supply rate 1000 sccm
・ Pressure: 1 atmospheric pressure ・ Water vapor addition amount: 300 ppm
-Reaction temperature: 750 ° C
-Reaction time: 10 minutes-Metal catalyst: Iron thin film (thickness 1 nm)
-Substrate: silicon wafer.
1 g of the obtained SGCNT was stirred in 250 mL of 7.7 M HNO 3 for 8 hours and refluxed at 125 ° C. for 12 hours for purification. Thereafter, 1800 mL of deionized water was added, and after ultrasonic treatment at 40 kHz for 60 minutes using an ultrasonic irradiator (Honda Electronics, product name “WTC-1200-40”), a 0.02 μm ceramic membrane was used. Cross flow filtration was performed. It was passed through a ceramic membrane until pH 4.0. The liquid that passed through the ceramic membrane was discarded as a permeate, and the liquid that did not pass through the filter holes was recovered as a retentate. Thereafter, the pH of the retentate was readjusted to 7.1 by adding 0.1% aqueous ammonia to the retentate, and sonicated for 2 hours with an ultrasonic irradiator. After that, using a ultracentrifuge (manufactured by Hitachi Koki, product name “CP-80NX”), it is centrifuged at 10,000 G for 20 minutes, and the cycle of collecting the supernatant is repeated four times to obtain a fibrous carbon nanostructure dispersion liquid. It was. The obtained fibrous carbon nanostructure dispersion liquid was 100 mL.
繊維状炭素ナノ構造体SGCNTの合成反応時間を15分にしたこと以外は、実施例1と同様にして繊維状炭素ナノ構造体分散液を得た。得られた繊維状炭素ナノ構造体分散液は、90mLであった。 (Example 2)
A fibrous carbon nanostructure dispersion was obtained in the same manner as in Example 1 except that the synthesis reaction time of the fibrous carbon nanostructure SGCNT was 15 minutes. The obtained fibrous carbon nanostructure dispersion liquid was 90 mL.
繊維状炭素ナノ構造体として、SWCNT「HiPco Super Purified」(ナノインテグリス社製)を用いたこと以外は、実施例1と同様にして繊維状炭素ナノ構造体分散液を調製した。得られた繊維状炭素ナノ構造体分散液は、50mLであった。 (Comparative Example 1)
A fibrous carbon nanostructure dispersion liquid was prepared in the same manner as in Example 1 except that SWCNT “HiPco Super Purified” (manufactured by Nanointellis) was used as the fibrous carbon nanostructure. The obtained fibrous carbon nanostructure dispersion liquid was 50 mL.
(1)質量減少率
実施例及び比較例で得られた繊維状炭素ナノ構造体10mgを、熱重量解析装置(TA Instruments社製、TGA2950型Thermogravimetric Analyzer)により、窒素ガス雰囲気中、昇温速度20℃/分で23℃から200℃まで昇温し、加熱していない繊維状炭素ナノ構造体の質量(100%)に対する、加熱後の繊維状炭素ナノ構造体の質量減少の割合(%)を算出し、質量減少率とした。 [Evaluation]
(1) Mass reduction rate 10 mg of fibrous carbon nanostructures obtained in Examples and Comparative Examples were heated in a nitrogen gas atmosphere with a thermogravimetric analyzer (TA Instruments, TGA2950 type Thermogravimetric Analyzer) in a nitrogen gas atmosphere. The ratio (%) of the mass reduction of the fibrous carbon nanostructure after heating with respect to the mass (100%) of the fibrous carbon nanostructure that was heated from 23 ° C to 200 ° C at a rate of ° C / min. The mass reduction rate was calculated.
実施例及び比較例で調製した繊維状炭素ナノ構造体分散液を0.2μmのシリンジフィルター(ポール社製、製品名「アクロディスクシリンジフィルター」)を用いて、ろ過精製を行った。そして、精製前後の繊維状炭素ナノ構造体分散液を用いて、分光光度計(日本分光社製、商品名「V670」)で、光路長10mm、波長550nmでの吸光度を測定した。
そして、下記式により、吸光度比を求めた。
吸光度比=(精製処理分散液の吸光度)/(未精製処理分散液の吸光度)
なお、併せて、繊維状炭素ナノ構造体分散液につき、ICP質量分析により金属不純物量の測定を行い、また、10000Gで20分間遠心し、沈殿する凝集物の有無を観察した。 (2) Absorbance ratio Filtration purification of the fibrous carbon nanostructure dispersion liquid prepared in Examples and Comparative Examples was performed using a 0.2 μm syringe filter (product name “Acrodisc syringe filter” manufactured by Paul). It was. Then, the absorbance at an optical path length of 10 mm and a wavelength of 550 nm was measured with a spectrophotometer (manufactured by JASCO Corporation, trade name “V670”) using the fibrous carbon nanostructure dispersion liquid before and after purification.
And the absorbance ratio was calculated | required by the following formula.
Absorbance ratio = (absorbance of the purified treatment dispersion) / (absorbance of the unpurified dispersion)
In addition, for the fibrous carbon nanostructure dispersion liquid, the amount of metal impurities was measured by ICP mass spectrometry, and centrifuged at 10,000 G for 20 minutes to observe the presence or absence of precipitated aggregates.
Claims (9)
- 熱重量分析により測定される、窒素雰囲気中、昇温速度20℃/分で23℃から200℃まで昇温した時の質量減少率が3.0質量%以下である繊維状炭素ナノ構造体と、溶媒とを含むことを特徴とする、繊維状炭素ナノ構造体分散液。 A fibrous carbon nanostructure having a mass reduction rate of 3.0% by mass or less when heated from 23 ° C. to 200 ° C. at a temperature rising rate of 20 ° C./min in a nitrogen atmosphere, as measured by thermogravimetric analysis A fibrous carbon nanostructure dispersion liquid comprising: a solvent.
- 分散剤を実質的に含まない、請求項1記載の繊維状炭素ナノ構造体分散液。 The fibrous carbon nanostructure dispersion liquid according to claim 1, substantially free of a dispersant.
- 前記溶媒1L中の前記繊維状炭素ナノ構造体の濃度が、1mg/L以上である、請求項1又は2記載の繊維状炭素ナノ構造体分散液。 The fibrous carbon nanostructure dispersion liquid according to claim 1 or 2, wherein the concentration of the fibrous carbon nanostructure in 1 L of the solvent is 1 mg / L or more.
- 個数基準のモード径が500nmより大きい粒子が実質的に含まれない、請求項1~3いずれか1項に記載の繊維状炭素ナノ構造体分散液。 The fibrous carbon nanostructure dispersion liquid according to any one of claims 1 to 3, which contains substantially no particles having a number-based mode diameter of more than 500 nm.
- 個数基準のモード径が300nmより大きい粒子が実質的に含まれない、請求項4記載の繊維状炭素ナノ構造体分散液。 5. The fibrous carbon nanostructure dispersion liquid according to claim 4, wherein particles having a number-based mode diameter of more than 300 nm are substantially not contained.
- 金属不純物の濃度が1×1018原子/cm3未満である、請求項1~5いずれか1項に記載の繊維状炭素ナノ構造体分散液。 The fibrous carbon nanostructure dispersion liquid according to any one of claims 1 to 5, wherein the concentration of the metal impurity is less than 1 × 10 18 atoms / cm 3 .
- 金属不純物の濃度が15×1010原子/cm3未満である、請求項6記載の繊維状炭素ナノ構造体分散液。 The fibrous carbon nanostructure dispersion liquid according to claim 6, wherein the concentration of metal impurities is less than 15 × 10 10 atoms / cm 3 .
- 前記繊維状炭素ナノ構造体の沈殿物及び凝集物を実質的に含まない、請求項1~7いずれか1項に記載の繊維状炭素ナノ構造体分散液。 The fibrous carbon nanostructure dispersion liquid according to any one of claims 1 to 7, which is substantially free of precipitates and aggregates of the fibrous carbon nanostructure.
- 半導体装置の構成材料として用いられる、請求項1~8いずれか1項に記載の繊維状炭素ナノ構造体分散液。 The fibrous carbon nanostructure dispersion liquid according to any one of claims 1 to 8, which is used as a constituent material of a semiconductor device.
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