WO2017014580A1 - 발광 소자 패키지 - Google Patents
발광 소자 패키지 Download PDFInfo
- Publication number
- WO2017014580A1 WO2017014580A1 PCT/KR2016/007957 KR2016007957W WO2017014580A1 WO 2017014580 A1 WO2017014580 A1 WO 2017014580A1 KR 2016007957 W KR2016007957 W KR 2016007957W WO 2017014580 A1 WO2017014580 A1 WO 2017014580A1
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- Prior art keywords
- layer
- light emitting
- disposed
- emitting device
- device package
- Prior art date
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Images
Classifications
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
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- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
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- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/385—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending at least partially onto a side surface of the semiconductor body
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- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
Definitions
- the embodiment relates to a light emitting device package.
- a light emitting diode is a kind of semiconductor device that transmits and receives a signal by converting electricity into infrared light or light using characteristics of a compound semiconductor.
- Group III-V nitride semiconductors are spotlighted as core materials of light emitting devices such as light emitting diodes (LEDs) or laser diodes (LDs) due to their physical and chemical properties. have.
- LEDs light emitting diodes
- LDs laser diodes
- These light emitting diodes do not contain environmentally harmful substances such as mercury (Hg) used in existing lighting equipment such as incandescent lamps and fluorescent lamps, so they have excellent eco-friendliness and have advantages such as long life and low power consumption. It is replacing them.
- Various studies have been conducted to improve the reliability of a conventional light emitting device package including the light emitting diode.
- the embodiment provides a light emitting device package having improved reliability.
- the light emitting device package may include a light emitting structure including an active layer disposed between the first and second conductive semiconductor layers and the first and second conductive semiconductor layers; A transmissive electrode layer disposed on the second conductive semiconductor layer; A passivation layer disposed on the second conductive semiconductor layer and the first conductive semiconductor layer exposed to mesa; A reflective layer disposed in a horizontal direction perpendicular to a thickness direction of the light emitting structure from an upper portion of the light transmitting electrode layer to an upper portion of the passivation layer; And a conductive capping layer disposed on the reflective layer.
- the light emitting device package further includes a first electrode disposed on the first conductive semiconductor layer exposed by the mesa etching, and the passivation layer electrically connects the side of the light emitting structure and the first electrode.
- the conductive capping layer may include the same material as the first electrode.
- each of the conductive capping layer and the first electrode may include at least one of Cr, Al, Ni, Cu, or Ti.
- each of the conductive capping layer and the first electrode may include Cr / Al / Ni / Cu / Ni / Ti or Ti / Al.
- the width of the conductive capping layer in the horizontal direction may be greater than the width of the transparent electrode layer in the horizontal direction.
- the width of the reflective layer in the horizontal direction may be greater than the width of the transmissive electrode layer in the horizontal direction.
- the conductive capping layer may be disposed to surround the upper and side portions of the reflective layer.
- the conductive capped layer may be disposed to surround a side of the transmissive electrode layer on which the reflective layer is disposed.
- the reflective layer may include a first reflective segment overlapping the light emitting structure, the light transmitting electrode layer, and the conductive capping layer in the thickness direction; And a second reflective segment extending in the horizontal direction from the first reflective segment and overlapping the light emitting structure, the conductive capping layer, and the passivation layer in the thickness direction.
- the second reflective segment may further overlap the transmissive electrode layer in the thickness direction.
- the light transmitting electrode layer may include a first light transmitting segment disposed between the reflective layer and the light emitting structure.
- the first light transmitting segment may be disposed in contact with the passivation layer in the horizontal direction.
- the light transmitting electrode layer may further include a second light transmitting segment extending from the first light transmitting segment in the horizontal direction and disposed between the reflective layer and the passivation layer.
- the light transmitting electrode layer may further include a third light transmitting segment extending from the second light transmitting segment in the horizontal direction and disposed between the conductive capping layer and the passivation layer.
- the transmissive electrode layer may further include a fourth transmissive segment extending from the first transmissive segment in the horizontal direction and disposed between the conductive capping layer and the light emitting structure.
- the reflective layer may be disposed on the fourth light transmitting segment.
- the light emitting device package may include an insulating layer disposed between the conductive capping layer and the first electrode; A first pad penetrating the insulating layer and connected to the first electrode; And a second pad spaced apart from the first pad and connected to the conductive capping layer through the insulating layer.
- the light emitting device package may include a first solder part connected to the first pad; And a second solder part connected to the second pad.
- the light emitting device package may include first and second lead frames electrically spaced apart from each other; And an insulation portion disposed between the first and second lead frames, wherein the first solder portion is disposed between the first lead frame and the first pad, and the second solder portion is formed with the second lead frame and the It may be disposed between the second pad.
- the light emitting device package may further include a molding member disposed to surround the light emitting structure.
- the reflective layer can be deposited on the entire surface of the transmissive electrode layer, thereby increasing the deposition area of the reflective layer and solving migration, clogging or peeling of the reflective layer.
- the material forming the first and second solder portions may be eliminated from being diffused into the reflective layer.
- FIG. 1 is a plan view of a light emitting device package according to an embodiment.
- FIG. 2 is a cross-sectional view according to an exemplary embodiment taken along line II ′ of the light emitting device package illustrated in FIG. 1.
- FIG. 3 is a cross-sectional view of another embodiment of the light emitting device package illustrated in FIG. 1 taken along line II ′.
- FIG. 4 is a cross-sectional view of a light emitting device package having a flip chip bonding structure.
- 5A to 5F illustrate a process plan view for describing a method of manufacturing the light emitting device package illustrated in FIG. 2.
- 6A to 6G are cross-sectional views illustrating a method of manufacturing the light emitting device package illustrated in FIG. 2.
- FIG. 7A and 7B show plan views of a light emitting device package according to a comparative example.
- FIGS. 7A and 7B are cross-sectional views taken along the line II-II 'shown in FIGS. 7A and 7B.
- the above (up) or down (down) ( on or under includes both that two elements are in direct contact with one another or one or more other elements are formed indirectly between the two elements.
- relational terms such as “first” and “second,” “upper / upper / up” and “lower / lower / lower”, etc., as used below, may be used to refer to any physical or logical relationship between such entities or elements, or It may be used to distinguish one entity or element from another entity or element without necessarily requiring or implying an order.
- FIG. 1 is a plan view of a light emitting device package 100 according to an embodiment
- FIG. 2 is a cutaway view taken along line II ′ of the light emitting device package 100 shown in FIG. 1. The cross section is shown.
- the light emitting device package 100 shown in FIG. 1 may have a cross-sectional shape different from that shown in FIG. 2, and the light emitting device package 100A shown in FIG. 2 may have a different planar shape than that shown in FIG. 1. have.
- the light emitting device packages 100 and 100A may include an upper substrate 110, a light emitting structure 120, a transparent electrode layer 130A, a passivation layer 140, and a reflective layer. 150A, a conductive capping layer 160A, a first electrode 170, an insulating layer 180, and first and second pads 192 and 194.
- the light emitting structure 120 is disposed on the upper substrate 110.
- the upper substrate 110 may include a conductive material or a non-conductive material.
- the upper substrate 110 may include at least one of sapphire (Al 2 0 3 ), GaN, SiC, ZnO, GaP, InP, Ga 2 0 3 , GaAs, and Si, but the embodiment may include the upper substrate. It is not limited to the substance of 110.
- a buffer layer (or transition layer) (not shown) between them 110 and 120 May be further arranged.
- the buffer layer may include, but is not limited to, at least one material selected from the group consisting of Al, In, N, and Ga, for example.
- the buffer layer may have a single layer or a multilayer structure.
- the light emitting device packages 100 and 100A are assumed to include the upper substrate 110, the upper substrate 110 may be omitted in some cases.
- the light emitting structure 120 may include a first conductive semiconductor layer 122, an active layer 124, and a second conductive semiconductor layer 126.
- the first conductive semiconductor layer 122, the active layer 124, and the second conductive semiconductor layer 126 are sequentially stacked in a direction facing the first and second pads 192 and 194 from the upper substrate 110. Can be arranged.
- the first conductivity type semiconductor layer 122 may be disposed on the upper substrate 110.
- the first conductive semiconductor layer 122 may be implemented as a compound semiconductor such as a group III-V or group II-VI doped with the first conductive dopant.
- the first conductivity-type semiconductor layer 122 is an n-type semiconductor layer
- the first conductivity-type dopant may be an n-type dopant and may include Si, Ge, Sn, Se, Te, but is not limited thereto.
- the first conductivity type semiconductor layer 122 has a composition formula of Al x In y Ga (1-xy) N (0 ⁇ x ⁇ 1, 0 ⁇ y ⁇ 1, 0 ⁇ x + y ⁇ 1). It may include a semiconductor material.
- the first conductive semiconductor layer 122 may include at least one of GaN, InN, AlN, InGaN, AlGaN, InAlGaN, AlInN, AlGaAs, InGaAs, AlInGaAs, GaP, AlGaP, InGaP, AlInGaP, and InP.
- the active layer 124 may be disposed between the first conductive semiconductor layer 122 and the second conductive semiconductor layer 126.
- electrons (or holes) injected through the first conductivity-type semiconductor layer 122 and holes (or electrons) injected through the second conductivity-type semiconductor layer 126 meet each other, thereby forming an active layer ( 124 is a layer that emits light with energy determined by the energy bands inherent in the material making up it.
- the active layer 124 may include at least one of a single well structure, a multi well structure, a single quantum well structure, a multi quantum well structure (MQW), a quantum-wire structure, or a quantum dot structure. It can be formed as one.
- the well layer / barrier layer of the active layer 124 may be formed of one or more pair structures of InGaN / GaN, InGaN / InGaN, GaN / AlGaN, InAlGaN / GaN, GaAs (InGaAs) / AlGaAs, GaP (InGaP) / AlGaP.
- the well layer may be formed of a material having a band gap energy lower than the band gap energy of the barrier layer.
- a conductive clad layer may be formed on or under the active layer 124.
- the conductive clad layer may be formed of a semiconductor having a higher band gap energy than the band gap energy of the barrier layer of the active layer 124.
- the conductive clad layer may include GaN, AlGaN, InAlGaN, or a superlattice structure.
- the conductive clad layer may be doped with n-type or p-type.
- the active layer 124 may emit light in the ultraviolet wavelength band.
- the ultraviolet wavelength band means a wavelength band of 100 nm to 400 nm.
- the active layer 124 may emit light in the wavelength range of 100 nm to 280 nm.
- the embodiment is not limited to the wavelength band of the light emitted from the active layer 124.
- the second conductivity-type semiconductor layer 126 may be disposed on the active layer 124.
- the second conductivity-type semiconductor layer 126 may be formed of a semiconductor compound, and may be implemented as a compound semiconductor such as a III-V group or a II-VI group.
- the second conductivity-type semiconductor layer 126 is a semiconductor material having a composition formula of In x Al y Ga (1-xy) N (0 ⁇ x ⁇ 1, 0 ⁇ y ⁇ 1, 0 ⁇ x + y ⁇ 1). It may include.
- the second conductive semiconductor layer 126 may be doped with a second conductive dopant.
- the second conductivity type dopant may include Mg, Zn, Ca, Sr, Ba, or the like as a p type dopant.
- the first conductive semiconductor layer 122 may be an n-type semiconductor layer, and the second conductive semiconductor layer 126 may be a p-type semiconductor layer.
- the first conductive semiconductor layer 122 may be a p-type semiconductor layer, and the second conductive semiconductor layer 126 may be an n-type semiconductor layer.
- the light emitting structure 120 may be implemented as any one of an n-p junction structure, a p-n junction structure, an n-p-n junction structure, and a p-n-p junction structure.
- FIG. 3 is a cross-sectional view of another embodiment 100B of the light emitting device package 100 illustrated in FIG. 1 taken along line II ′.
- the light emitting device package 100B illustrated in FIG. 3 includes the upper substrate 110, the light emitting structure 120, the light transmitting electrode layer 130B, the passivation layer 140, the reflective layer 150B, the conductive capping layer 160B, The first electrode 170, the insulating layer 180, and the first and second pads 192 and 194 may be included.
- the upper substrate 110, the light emitting structure 120, the first electrode 170, the insulating layer 180, and the first and second pads 192 and 194 illustrated in FIG. 3 may be formed in the upper portion illustrated in FIG. 2.
- the descriptions of the 110, 120, 170, 180, 192, and 194 in the light emitting device package 100B shown in FIG. 3 are the same as those of the light emitting device package 100A shown in FIG. 2. Detailed description thereof will be omitted.
- the light emitting device package 100 shown in FIG. 1 may have a cross-sectional shape different from that shown in FIG. 3, and the light emitting device package 100B shown in FIG. 3 may have a different planar shape than that shown in FIG. 1. have.
- the light emitting electrode layers 130A and 130B are disposed on the second conductivity type semiconductor layer 126.
- the transparent electrode layers 130A and 130B may be transparent conductive oxide (TCO).
- the light emitting electrode layers 130A and 130B may include indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), indium aluminum zinc oxide (IZO), indium gallium zinc oxide (IGZO), Indium gallium tin oxide (IGTO), aluminum zinc oxide (AZO), antimony tin oxide (ATO), gallium zinc oxide (GZO), IrOx, RuOx, RuOx / ITO, Ni / IrOx / Au, and Ni / IrOx / Au / It may include at least one of ITO, but is not limited to such materials.
- the transmissive electrode layers 130A and 130B may include at least one of the first to fourth transmissive segments S11, S12, S13, and S14.
- the light transmitting electrode layer 130A may include all of the first to fourth light emitting segments S11, S12, S13, and S14.
- the first light transmitting segment S11 of the light transmitting electrode layer 130A may be disposed between the reflective layer 150A and the light emitting structure 120.
- the first light transmitting segment S11 may be disposed in direct contact with the reflective layer 150A and in direct contact with the light emitting structure 120.
- the second light transmitting segment S12 may extend in the horizontal direction from the first light transmitting segment S11 and be disposed between the reflective layer 150A and the passivation layer 140.
- the horizontal direction may be a direction crossing the thickness direction of the light emitting structure 120, for example, a direction perpendicular to the thickness direction of the light emitting structure 120.
- the second light transmitting segment S12 may be disposed in direct contact with the reflective layer 150A and in direct contact with the passivation layer 140.
- the third light emitting segment S13 may extend in the horizontal direction from the second light emitting segment S12 and be disposed between the conductive capping layer 160A and the passivation layer 140.
- the width of the third light transmitting segment S13 may be 0 ⁇ m.
- the width of the third light-emitting segment S13 is larger than 10 ⁇ m, the area of the reflective layer 150A may be reduced to cause light loss. Therefore, the width of the third light emitting segment S13 may be 0 ⁇ m to 10 ⁇ m, but embodiments are not limited thereto.
- the fourth light emitting segment S14 may extend in the horizontal direction from the first light emitting segment S11 and be disposed between the conductive capping layer 160A and the light emitting structure 120.
- the reflective layer 150A is disposed above the first and second floodlight segments S11 and S12 and is not shown above the third and fourth floodlight segments S13 and S14, but is implemented. Examples are not limited to this. That is, the reflective layer 150A may be extended to at least one of the third and fourth light emitting segments S13 and S14. That is, the width of the fourth light-emitting segment S14 may be greater than or equal to '0'.
- the light transmitting electrode layer 130B may include only the first and fourth light transmitting segments S11 and S14.
- the first light transmitting segment S11 of the light transmitting electrode layer 130B shown in FIG. 3 is disposed between the reflective layer 150B and the light emitting structure 120.
- the first light transmitting segment S11 and the passivation layer 140 may be disposed in contact with each other on the light emitting structure 120. That is, the side of the first light-emitting segment S11 and the side of the passivation layer 140 may be disposed in contact with each other on the light emitting structure 120.
- the fourth light-emitting segment S14 extends from the first light-emitting segment S11 in a direction crossing the thickness direction of the light emitting structure 120, for example, in a horizontal direction perpendicular to the thickness direction of the light emitting structure 120.
- the capping layer 160B may be disposed between the light emitting structure 120.
- the reflective layers 150A and 150B may cross the thickness direction of the light emitting structure 120 from the top of the light emitting electrode layers 130A and 130B to the top of the passivation layer 140, for example, the thickness of the light emitting structure 120. It may be arranged in a horizontal direction perpendicular to the direction. As described above, according to the exemplary embodiment, the reflective layers 150A and 150B may be extended and disposed on the passivation layer 140 as well as on the transparent electrode layers 130A and 130B.
- the first width W1 in the horizontal direction of the reflective layer 150A may be smaller than the second width W2 in the horizontal direction of the transmissive electrode layer 130A.
- the first width W1 of the reflective layer 150B may be larger than the second width W2 of the light transmitting electrode layer 130B.
- Each of the first and second widths W1 and W2 is a value determined according to the overall size of the light emitting device packages 100A and 100B, and embodiments are limited to specific values of the first and second widths W1 and W2.
- the reflective layers 150A and 150B may include first and second reflective segments S21 and S22.
- the first reflective segment S21 may overlap the light emitting structure 120, the light emitting electrode layers 130A and 130B, and the conductive capping layers 160A and 160B in the thickness direction of the light emitting structure 120.
- the first reflective segment S21 may overlap the first transparent segment S11 of the transparent electrode layers 130A and 130B in the thickness direction.
- the second reflective segment S22 extends in the horizontal direction from the first reflective segment S21 as illustrated in FIG. 2, such that the light emitting structure 120, the passivation layer 140, and the transparent electrode layer ( 130A) and the conductive capping layer 160A may overlap each other in the thickness direction.
- the second reflective segment S22 may overlap the second transparent segment S12 of the transparent electrode layer 130A in the thickness direction of the light emitting structure 120.
- the second reflective segment S22 illustrated in FIG. 3 does not overlap the transmissive electrode layer 130B in the thickness direction of the light emitting structure 120. That is, the second reflective segment S22 illustrated in FIG. 3 may overlap the conductive capping layer 160B, the passivation layer 140, and the light emitting structure 120 in the thickness direction.
- the reflective layers 150A and 150B may be made of any material capable of reflecting light emitted from the active layer 124.
- the reflective layers 150A, 150B may comprise Ag, Al, Ru, Rh, Pt, Pd and optional alloys thereof.
- the passivation layer 140 is disposed from the second conductive semiconductor layer 126 to the first conductive semiconductor layer 122 exposed by mesa etching while surrounding the sidewall of the light emitting structure 120. Can be. Therefore, the first electrode 170 and the light emitting structure 120 may be electrically insulated from each other by the passivation layer 140.
- the passivation layer 140 is also disposed between the transparent electrode layer 130A and the light emitting structure 120, and is disposed below the conductive capping layer 160A.
- the passivation layer 140 may be disposed between the reflective layer 150B and the light emitting structure 120, and may be disposed under the conductive capping layer 160A.
- the passivation layer 140 is not disposed under the light transmitting electrode layer 130B.
- the conductive capping layers 160A and 160B may be disposed on the reflective layers 150A and 150B.
- the conductive capping layers 160A and 160B may be disposed to surround upper and side portions of the reflective layers 150A and 150B.
- the conductive capping layers 160A and 160B may be disposed to surround sides of the translucent electrode layers 130A and 130B on which the reflective layers 150A and 150B are disposed.
- the first-first distance d11 from the left end of the conductive capping layers 160A and 160B to the sidewall of the light emitting structure 120 is smaller, the light transmitting electrode layers 130A and 130B and the reflective layer are formed on the light emitting structure 120.
- 150A and 150B may be disposed more widely.
- a process defect may occur when the first-first distance d11 is smaller than 5 ⁇ m. That is, when considering the process margin, the minimum value of the 1-1st distance d11 may be 5 ⁇ m.
- the value of the second width W2 when the first-first distance d11 is larger than 10 ⁇ m, the thickness of the conductive capping layers 160A and 160B becomes thin, so that the role of capping is not properly performed. Migration of metals such as (Ag) can occur.
- the first-first distance d11 may be 5 ⁇ m to 10 ⁇ m, the embodiment is not limited thereto.
- the first electrode 170 may be disposed on the first conductive semiconductor layer 122 exposed by mesa etching, and may be electrically connected to the first conductive semiconductor layer 122. That is, by mesa etching part of the second conductive semiconductor layer 126, the active layer 124, and the first conductive semiconductor layer 122, the second conductive semiconductor layer 126 and the active layer 124 penetrate through the substrate.
- the first through hole TH1 exposing the first conductive semiconductor layer 122 is formed. In this case, the first electrode 170 is formed on the first conductive semiconductor layer 122 exposed through the first through hole TH1.
- the first through hole TH1 covered by the first pad 192 and the insulating layer 180 is indicated by a dotted line, and the second through hole covered by the second pad 194. (TH2) is indicated by a dotted line.
- the first electrode 170 and the first through hole TH1 are identified and identified in FIG. 1.
- the first through hole TH1 has a shape as shown in FIGS. 5A and 6B to be described later. 1, the number of first through holes TH1 is illustrated as six, but the embodiment is not limited thereto. That is, the number of first through holes TH1 may be more or less than six.
- the conductive capping layers 160A and 160B may include the same material as the first electrode 170. As will be described later, the first electrode 170 and the conductive capping layers 160A and 160B may be simultaneously formed.
- the first electrode 170 may not include a separate ohmic layer (not shown) by performing an ohmic role including a material in ohmic contact, and a separate ohmic layer may be disposed on the first electrode 170. Or may be disposed below.
- the active layer 124 when the light emitting device packages 100, 100A, and 100B illustrated in FIGS. 1, 2, and 3 are implemented in a flip chip bonding structure as illustrated in FIG.
- the emitted light may be emitted through the first electrode 170 as well as the first conductive semiconductor layer 122 and the upper substrate 110.
- the first electrode 170 as well as the first conductive semiconductor layer 122 and the upper substrate 110 may be made of a material having light transmittance.
- the second conductivity-type semiconductor layer 126 may be made of a material having a light transmissive or non-transparent or a material having a reflective property, but the embodiment may not be limited to a specific material.
- each of the first electrode 170 and the conductive capping layers 160A and 160B may reflect or transmit the light emitted from the active layer 124 without absorbing the first and second conductive semiconductor layers.
- 122, 126 may be formed of any material that can be grown in good quality.
- each of the first electrode 170 and the conductive capping layers 160A and 160B may be formed of metal, and Cr, Cu, Ti, Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg It may include at least one of, Zn, Pt, Au or Hf.
- each of the conductive capping layers 160A and 160B and the first electrode 170 may be formed of a plurality of layers.
- the conductive capping layers 160A and 160B may have a structure in which an adhesive layer (not shown), a barrier layer (not shown), and a bonding layer (not shown) are sequentially stacked.
- the adhesive layer may include a material in ohmic contact with the reflective layer 150A and the transparent electrode layer 130A.
- the adhesive layer may be formed of at least one material of Cr, Rd, and Ti, and may be formed in a single layer or a multilayer structure.
- the barrier layer is disposed on the adhesive layer, and may be formed of a material including at least one of Ni, Cr, Ti, and Pt, in a single layer or a multilayer.
- the barrier layer may be made of an alloy of Cr and Pt.
- a reflective layer made of Ag or the like may be interposed between the barrier layer and the adhesive layer, it may be omitted.
- the bonding layer is disposed on the barrier layer and may include Au.
- each of the conductive capping layers 160A and 160B and the first electrode 170 may be sequentially Cr / Al / in a direction facing the first and second pads 192 and 194 from the light emitting structure 120.
- Ni / Cu / Ni / Ti may be implemented in a stacked form, or Ti / Al may be implemented in a stacked form.
- the third width W3 of the conductive capping layers 160A and 160B may be greater than the first width W1 of the reflective layers 150A and 150B or the second width W2 of the light emitting electrode layers 130A and 130B. have.
- the minimum value of each of the first-first and first-second distances d11 and d12 may be 5 ⁇ m.
- the maximum value of the third width W3 may be determined according to the chip sizes of the light emitting device packages 100A and 100B within a range satisfying the minimum values of the first-first distance d11 and the first-second distance d12. Can be.
- the conductive capping layers 160A and 160B may not serve as capping. Therefore, the minimum value of each of the first to third and first to fourth distances d13 and d14 may be 5 ⁇ m.
- the minimum value of the third width W3 may be determined according to the chip sizes of the light emitting device packages 100A and 100B within a range satisfying the minimum values of the first to third distances d13 and the first to fourth distances d14. have.
- the insulating layer 180 is disposed between the conductive capping layers 160A and 160B and the first pad 192 to electrically isolate the 160A, 160B and 192 from each other.
- the insulating layer 180 may be disposed between the second pad 194 and the first electrode 170 to electrically separate them 194 and 170.
- the conductive capping layers 160A and 160B may serve as a second electrode.
- the insulating layer 180 may be implemented as a distributed Bragg reflector (DBR).
- DBR distributed Bragg reflector
- the reflective layers 150A and 150B not only the reflective layers 150A and 150B but also the insulating layer 180 have a reflective function, as shown in FIG. 4 to be described later, when the light emitting device packages 100, 100A and 100B have a flip bonding structure. Since the light emitted from the active layer 124 and then directed to the first and second lead frames 212 and 214 may be more reflected, the light emitting capability of the light emitting device packages 100, 100A, and 100B may be improved.
- DBR distributed Bragg reflector
- the first pad 192 may be electrically connected to the first electrode 170 through the insulating layer 180.
- the second pad 194 may be electrically connected to the conductive capping layers 160A and 160B through the insulating layer 180.
- Each of the first and second pads 192 and 194 may include a metal material having electrical conductivity.
- the first and second pads 192 and 194 may be made of a material that is the same as or different from that of each of the first electrode 170 and the conductive capping layers 160A and 160B. It may include.
- FIG 4 is a cross-sectional view of a light emitting device package 200 having a flip chip bonding structure.
- the light emitting device package 200 shown in FIG. 4 may include the light emitting device package 100A, the first and second lead frames 212 and 214, the insulating part 220, and the first and second solder parts shown in FIG. 2. 232 and 234, the molding member 240 and the package body 250 may be further included. Since the light emitting device package 100A included in the light emitting device package 200 illustrated in FIG. 4 is the same as that of FIG. 2, a redundant description thereof will be omitted.
- the light emitting device package 200 illustrated in FIG. 4 is illustrated as including the light emitting device package 100A illustrated in FIG. 2, the embodiment is not limited thereto. According to another embodiment, the light emitting device package 200 shown in FIG. 4 may include the light emitting device package 100B shown in FIG. 3 instead of the light emitting device package 100A shown in FIG. 2.
- the light emitting device package 100A illustrated in FIG. 2 may be disposed in the cavity C.
- the cavity C may be defined by the first and second lead frames 212 and 214 and the package body 250. That is, the cavity C may be defined by the inner surface of the package body 250 and the upper surfaces of the first and second lead frames 212 and 214.
- the embodiment is not limited thereto.
- the cavity C may be formed using only the package body 250.
- a barrier wall (not shown) may be disposed on the package body 250 having a flat upper surface, and a cavity may be defined by the barrier and the upper surface of the package body 250.
- the package body 250 may be implemented with an epoxy molding compound (EMC), but the embodiment is not limited to the material of the package body 250.
- EMC epoxy molding compound
- the first solder portion 232 is disposed between the first pad 192 and the first lead frame 212 to electrically connect them 192 and 212, and the second solder portion 234 is the second pad. Disposed between 194 and second lead frame 214 to electrically connect them 194, 214.
- Each of the first and second solder portions 232 and 234 may be a solder paste or a solder ball, and may be implemented by including a material such as Sn. 2 is not limited to a specific material of the solder portions 232 and 234.
- the first and second solder parts 232 and 234 described above may pass the first and second conductive semiconductor layers 122 and 126 to the first and second lead frames through the first and second pads 192 and 194. Electrically connected to 212 and 214, respectively, eliminates the need for wires. However, according to another exemplary embodiment, the first and second conductive semiconductor layers 122 and 126 may be connected to the first and second lead frames 212 and 214 using wires, respectively.
- first solder part 232 and the second solder part 234 may be omitted.
- the first pad 192 may serve as the first solder part 232
- the second pad 194 may serve as the second solder part 234.
- the first pad 192 is directly connected to the first lead frame 212
- the second pad 194 is the second lead frame. 214 may be directly connected.
- the first and second lead frames 212 and 214 may be disposed to be electrically spaced apart from each other.
- Each of the first and second lead frames 212 and 214 may be made of a conductive material, for example, metal, and the embodiment is not limited to the type of material of each of the first and second lead frames 212 and 214. .
- the first and second lead frames 212 and 214 may be part of the package body 250. Even in this case, the package bodies 250 forming the first and second lead frames 212 and 214 may be electrically separated from each other by the insulator 220.
- the insulation unit 220 is disposed between the first and second lead frames 212 and 214 to electrically insulate the first and second lead frames 212 and 214.
- Each of the passivation layer 140, the insulating layer 180, and the insulating portion 220 may include at least one of SiO 2 , TiO 2 , ZrO 2 , Si 3 N 4 , Al 2 O 3 , or MgF 2 .
- the embodiment is not limited to the materials of the passivation layer 140, the insulating layer 180, and the insulating portion 220.
- the molding member 240 may be disposed to surround the light emitting structure 120 and the first and second solder portions 232 and 234 so as to surround and protect the light emitting structure 120.
- the molding member 240 may be formed of, for example, silicon (Si), and may include a phosphor to change the wavelength of light emitted from the light emitting device package 100A.
- the phosphor may include a fluorescent material that is any one of wavelength conversion means of YAG, TAG, Silicate, Sulfide, or Nitride, which can convert the light generated from the light emitting device package 100A into white light. Examples are not limited to the type of phosphor.
- YAG and TAG fluorescent materials can be selected from (Y, Tb, Lu, Sc, La, Gd, Sm) 3 (Al, Ga, In, Si, Fe) 5 (O, S) 12: Ce, Silicate fluorescent material may be selected from (Sr, Ba, Ca, Mg) 2 SiO 4: (Eu, F, Cl).
- the sulfide-based fluorescent material can be selected from (Ca, Sr) S: Eu, (Sr, Ca, Ba) (Al, Ga) 2S4: Eu, and the Nitride-based fluorescent material is (Sr, Ca, Si, Al , O) N: Eu (e.g., CaAlSiN4: Eu ⁇ -SiAlON: Eu) or Ca- ⁇ SiAlON: Eu based (Cax, My) (Si, Al) 12 (O, N) 16, where M is Eu, Tb At least one of Yb and Er, and 0.05 ⁇ (x + y) ⁇ 0.3, 0.02 ⁇ x ⁇ 0.27 and 0.03 ⁇ y ⁇ 0.3, and may be selected from phosphor components.
- a nitride phosphor containing N (eg, CaAlSiN 3: Eu) may be used.
- the nitride-based red phosphor is more reliable than the sulfide-based phosphor in the external environment such as heat and water, and has a lower risk of discoloration.
- the light emitting device package 100A illustrated in FIG. 2 may be manufactured by a method different from those shown in FIGS. 5A to 5F and 6A to 6G, of course.
- the light emitting device package 100B illustrated in FIG. 3 may be manufactured by modifying the method illustrated in FIGS. 5A to 5F and 6A to 6G.
- the light emitting electrode layer 130A in the light emitting device package 100A illustrated in FIG. 2 will be described as not including the fourth light transmitting segment S14.
- FIGS. 6A to 6G illustrate a method of manufacturing the light emitting device package 100A illustrated in FIG. 2.
- Process sectional drawing for demonstrating is shown.
- the light emitting structure 120 is formed on the substrate 110. That is, the light emitting structure 120 is formed by sequentially stacking the first conductive semiconductor layer 122, the active layer 124, and the second conductive semiconductor layer 126 on the substrate 110.
- the first conductivity-type semiconductor layer 122 may be formed of a compound semiconductor such as a group III-V or group II-VI doped with the first conductivity type dopant.
- the first conductivity-type semiconductor layer 122 is an n-type semiconductor layer
- the first conductivity-type dopant may be an n-type dopant and may include Si, Ge, Sn, Se, Te, but is not limited thereto.
- the first conductivity type semiconductor layer 122 has a composition formula of Al x In y Ga (1-xy) N (0 ⁇ x ⁇ 1, 0 ⁇ y ⁇ 1, 0 ⁇ x + y ⁇ 1). It can be formed by a semiconductor material.
- the first conductive semiconductor layer 122 may be formed of any one or more of GaN, InN, AlN, InGaN, AlGaN, InAlGaN, AlInN, AlGaAs, InGaAs, AlInGaAs, GaP, AlGaP, InGaP, AlInGaP, InP.
- the active layer 124 may include at least one of a single well structure, a multi well structure, a single quantum well structure, a multi quantum well structure (MQW), a quantum-wire structure, or a quantum dot structure. It can be formed as one.
- a single well structure a multi well structure, a single quantum well structure, a multi quantum well structure (MQW), a quantum-wire structure, or a quantum dot structure. It can be formed as one.
- the well layer / barrier layer of the active layer 124 may be formed of one or more pair structures of InGaN / GaN, InGaN / InGaN, GaN / AlGaN, InAlGaN / GaN, GaAs (InGaAs) / AlGaAs, GaP (InGaP) / AlGaP.
- the well layer may be formed of a material having a band gap energy lower than the band gap energy of the barrier layer.
- a conductive clad layer may be formed on or under the active layer 124.
- the conductive clad layer may be formed of a semiconductor having a higher band gap energy than the band gap energy of the barrier layer of the active layer 124.
- the conductive cladding layer may be formed of GaN, AlGaN, InAlGaN, or a superlattice structure.
- the conductive clad layer may be doped with n-type or p-type.
- the second conductivity-type semiconductor layer 126 may be formed of a semiconductor compound, and may be implemented as a compound semiconductor such as a III-V group or a II-VI group.
- the second conductivity-type semiconductor layer 126 is a semiconductor material having a composition formula of In x Al y Ga (1-xy) N (0 ⁇ x ⁇ 1, 0 ⁇ y ⁇ 1, 0 ⁇ x + y ⁇ 1). It can be formed by.
- the second conductive semiconductor layer 126 may be doped with a second conductive dopant.
- the second conductivity type dopant may include Mg, Zn, Ca, Sr, Ba, or the like as a p type dopant.
- a portion of the second conductive semiconductor layer 126, the active layer 124, and the first conductive semiconductor layer 122 may be mesa-etched to form the first conductive semiconductor layer 122.
- the first through hole TH1 exposing the first through hole TH1 is formed. As illustrated in FIG. 5A, the first through hole TH1 has a circular planar shape and a 1-1 through hole TH11 exposing the first conductive semiconductor layer 122-1 and an elongated stripe.
- the first conductive semiconductor layer 122-1 may expose the first through hole TH12 in a planar shape.
- the passivation layer 140 is formed to the top of 1).
- the passivation layer 140 may include at least one of SiO 2 , TiO 2 , ZrO 2 , Si 3 N 4 , Al 2 O 3 , or MgF 2 , but embodiments are not limited to the material of the passivation layer 140. Do not.
- the passivation layer 140 may be formed in the form of a distributed Bragg reflective layer.
- the light transmitting electrode layer 130A is formed from the top of the second conductivity-type semiconductor layer 126 to the top of the passivation layer 140.
- the transparent electrode layer 130A may be a transparent conductive oxide film (TCO).
- TCO transparent conductive oxide film
- the light emitting electrode layer 130A may be formed of indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), indium aluminum zinc oxide (IZO), indium gallium zinc oxide (IGZO), or IGTO (IGTO).
- ITO indium gallium tin oxide
- AZO aluminum zinc oxide
- ATO antimony tin oxide
- GZO gallium zinc oxide
- the reflective layer 150A is formed on the light transmitting electrode layer 130A.
- the reflective layer 150A may be formed on the first light transmitting segment S11 and the second light transmitting segment S12 of the light transmitting electrode layer 130A.
- the reflective layer 150A may be formed of a reflective material, for example, Ag, Al, Ru, Rh, Pt, Pd, and an optional alloy thereof.
- the conductive capping layer 160A is formed to surround the reflective layer 150A and the first electrode 170 is formed at the same time.
- the conductive capping layer 160A and the first electrode 170 may be formed of the same material.
- Each of the first electrode 170 and the conductive capping layer 160A may be formed of a metal, and may include Cr, Cu, Ti, Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Au , Hf and optional combinations thereof.
- each of the conductive capping layer 160A and the first electrode 170 may be formed of a plurality of layers.
- each of the conductive capping layer 160A and the first electrode 170 may be implemented in the form of Cr / Al / Ni / Cu / Ni / Ti from below or in the form of Ti / Al. .
- the first electrode 170 and the conductive capping layer 160A are simultaneously formed by the same material, a separate process for forming the conductive capping layer 160A is not required. Do not.
- the insulating layer 180 may be formed of at least one of SiO 2 , TiO 2 , ZrO 2 , Si 3 N 4 , Al 2 O 3 , or MgF 2 , but the embodiment is not limited to the material of the insulating layer 180. .
- a cross-sectional view excluding the first and second pads 192 and 194 in the cross-sectional view shown in FIG. 2 corresponds to a cross-sectional view taken along the line II ′ shown in FIG. 5F.
- FIGS. 7A and 7B show a plan view of a light emitting device package according to a comparative example
- FIG. 8 shows a cross-sectional view taken along the line II-II 'shown in FIGS. 7A and 7B.
- the light emitting device package according to the comparative example includes a substrate 10, a light emitting structure 20, an ITO 30, a metal reflection layer 40, and an n-type electrode 50. do.
- the light emitting structure 20 is composed of an n-type semiconductor layer 22, a light emitting layer 24, and a p-type semiconductor layer 26.
- the light emitting device package according to the comparative example illustrated in FIGS. 7A, 7B and 8 does not include the conductive capping layers 160A and 160B illustrated in FIGS. 2 and 3.
- the constituent material of the solder to be connected to the metal reflective layer 40 is diffused to the metal reflective layer 40 (300, 302), so that the reflective function of the metal reflective layer 40 is weakened, so that the light emitting device package according to the comparative example The amount of light can be reduced.
- the constituent material of the second solder portion 234 may be prevented from being diffused into the reflective layers 150A and 150B. That is, the above-described barrier layer of the conductive capping layers 160A and 160B may prevent the constituent material of the second solder portion 234 from diffusing to the reflective layers 150A and 150B. As described above, the barrier layers of the conductive capping layers 160A and 160B serve as diffusion barrier layers to prevent defects, and thus the reduction in the amount of light can be prevented by reducing the reflection function of the reflective layers 150A and 150B. .
- the width of the reflective layer 40 should be smaller than the width of the ITO 30. That is, referring to FIG. 8, the third distance d3 from the left end of the reflective layer 40 to the left end of the ITO 30 should be 20 ⁇ m, and the ITO 30 from the right end of the reflective layer 40. The fourth distance d4 to the right front end of the c) should also be maintained at 20 ⁇ m.
- the reflective layers 150A and 150B are disposed on the entire surface of the transmissive electrode layers 130A and 130B.
- the deposition area of the reflective layers 150A and 150B can be widened.
- the second distance d2 shown in FIGS. 2 and 3 is smaller than the third distance d3 shown in FIG. 8.
- the second distance d2 may be 0 ⁇ m.
- the second distance d2 when the second distance d2 is larger than 10 ⁇ m, the areas of the reflective layers 150A and 150B may be reduced to cause light loss. Therefore, the second distance d2 may be 0 ⁇ m to 10 ⁇ m, but the embodiment is not limited thereto.
- the reflective layer 150A extends to the top of the transmissive electrode layer 130A disposed on the passivation layer 140, or as shown in FIG. 3, the reflective layer 150B is formed of the transmissive electrode layer ( 130B) and over the passivation layer 140, the deposition area of the reflective layers 150A, 150B can be further widened. That is, the fourth distance d4 shown in FIG. 8 may be reduced to 0 ⁇ m.
- the conductive capping layers 160A and 160B are disposed to surround the reflective layers 150A and 150B, the migration, agglomeration or peeling of the reflective layers 150A and 150B may be solved.
- first electrode 170 and the conductive capping layers 160A and 160B are simultaneously formed, a separate process for forming the conductive capping layers 160A and 160B is omitted, thereby simplifying the manufacturing process. Production costs can be reduced.
- a plurality of light emitting device packages according to the embodiment may be arranged on a substrate, and a light guide plate, a prism sheet, a diffusion sheet, or the like, which is an optical member, may be disposed on an optical path of the light emitting device package.
- the light emitting device package, the substrate, and the optical member may function as a backlight unit.
- the display device may include a display device, an indicator device, and a lighting device including a light emitting device package according to an exemplary embodiment.
- the display device may include a bottom cover, a reflector disposed on the bottom cover, a light emitting module for emitting light, a light guide plate disposed in front of the reflector, and guiding light emitted from the light emitting module to the front, and in front of the light guide plate.
- An optical sheet including prism sheets disposed, a display panel disposed in front of the optical sheet, an image signal output circuit connected to the display panel and supplying an image signal to the display panel, and a color filter disposed in front of the display panel. It may include.
- the bottom cover, the reflector, the light emitting module, the light guide plate, and the optical sheet may form a backlight unit.
- the lighting apparatus includes a light source module including a substrate and a light emitting device package according to an embodiment, a heat sink for dissipating heat from the light source module, and a power supply unit for processing or converting an electrical signal provided from the outside and providing the light source module to the light source module.
- a light source module including a substrate and a light emitting device package according to an embodiment, a heat sink for dissipating heat from the light source module, and a power supply unit for processing or converting an electrical signal provided from the outside and providing the light source module to the light source module.
- the lighting device may include a lamp, a head lamp, or a street lamp.
- the head lamp includes a light emitting module including light emitting device packages disposed on a substrate, a reflector for reflecting light emitted from the light emitting module in a predetermined direction, for example, a lens for refracting the light reflected by the reflector forward. And a shade for blocking or reflecting a part of the light reflected by the reflector toward the lens to achieve a light distribution pattern desired by the designer.
- the light emitting device package according to the embodiment may be used in a display device, an indicator device, and a lighting device.
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Abstract
Description
Claims (20)
- 제1 및 제2 도전형 반도체층과 상기 제1 및 제2 도전형 반도체층 사이에 배치된 활성층을 포함하는 발광 구조물;상기 제2 도전형 반도체층 위에 배치된 투광 전극층;상기 제2 도전형 반도체층과 메사 노출된 상기 제1 도전형 반도체층 위에 배치된 패시베이션층;상기 투광 전극층의 상부로부터 상기 패시베이션층의 상부까지 상기 발광 구조물의 두께 방향과 수직한 수평 방향으로 배치된 반사층; 및상기 반사층 위에 배치된 도전형 캡핑층을 포함하는 발광 소자 패키지.
- 제1 항에 있어서, 상기 메사 식각에 의해 노출된 제1 도전형 반도체층 위에 배치된 제1 전극을 더 포함하고,상기 패시베이션층은 상기 발광 구조물의 측부와 상기 제1 전극을 전기적으로 이격시키고,상기 도전형 캡핑층은 상기 제1 전극과 동일한 물질을 포함하는 발광 소자 패키지.
- 제2 항에 있어서, 상기 도전형 캡핑층 및 상기 제1 전극 각각은 Cr, Al, Ni, Cu 또는 Ti 중 적어도 하나를 포함하는 발광 소자 패키지.
- 제3 항에 있어서, 상기 도전형 캡핑층 및 상기 제1 전극 각각은 Cr/Al/Ni/Cu/Ni/Ti 또는 Ti/Al을 포함하는 발광 소자 패키지.
- 제1 항에 있어서, 상기 도전형 캡핑층의 상기 수평 방향으로의 폭은 상기 투광 전극층의 상기 수평 방향으로의 폭보다 큰 발광 소자 패키지.
- 제1 항에 있어서, 상기 반사층의 상기 수평 방향으로의 폭은 상기 투광 전극층의 상기 수평 방향으로의 폭보다 큰 발광 소자 패키지.
- 제1 항에 있어서, 상기 도전형 캡핑층은 상기 반사층의 상부와 측부를 감싸며 배치된 발광 소자 패키지.
- 제7 항에 있어서, 상기 도전형 캡핍층은 상기 반사층이 배치된 상기 투광 전극층의 측부를 감싸며 배치된 발광 소자 패키지.
- 제1 항에 있어서, 상기 반사층은상기 발광 구조물, 상기 투광 전극층 및 상기 도전형 캡핑층과 상기 두께 방향으로 중첩된 제1 반사 세그먼트; 및상기 제1 반사 세그먼트로부터 상기 수평 방향으로 연장되어, 상기 발광 구조물, 상기 도전형 캡핑층 및 상기 패시베이션층과 상기 두께 방향으로 중첩되는 제2 반사 세그먼트를 포함하는 발광 소자 패키지.
- 제9 항에 있어서, 상기 제2 반사 세그먼트는 상기 투광 전극층과 상기 두께 방향으로 더 중첩되는 발광 소자 패키지.
- 제1 항에 있어서, 상기 투광 전극층은상기 반사층과 상기 발광 구조물 사이에 배치된 제1 투광 세그먼트를 포함하는 발광 소자 패키지.
- 제11 항에 있어서, 상기 제1 투광 세그먼트는 상기 수평 방향으로 상기 패시베이션층과 접하여 배치된 발광 소자 패키지.
- 제11 항에 있어서, 상기 투광 전극층은상기 제1 투광 세그먼트로부터 상기 수평 방향으로 연장되어, 상기 반사층과 상기 패시베이션층 사이에 배치된 제2 투광 세그먼트를 더 포함하는 발광 소자 패키지.
- 제13 항에 있어서, 상기 투광 전극층은상기 제2 투광 세그먼트로부터 상기 수평 방향으로 연장되어, 상기 도전형 캡핑층과 상기 패시베이션층 사이에 배치된 제3 투광 세그먼트를 더 포함하는 발광 소자 패키지.
- 제11 항에 있어서, 상기 투광 전극층은상기 제1 투광 세그먼트로부터 상기 수평 방향으로 연장되어, 상기 도전형 캡핑층과 상기 발광 구조물 사이에 배치된 제4 투광 세그먼트를 더 포함하는 발광 소자 패키지.
- 제15 항에 있어서, 상기 반사층은 상기 제4 투광 세그먼트 위에 배치된 발광 소자 패키지.
- 제2 항에 있어서, 상기 발광 소자 패키지는상기 도전형 캡핑층과 상기 제1 전극 사이에 배치되는 절연층;상기 절연층을 관통하여 상기 제1 전극에 연결되는 제1 패드; 및상기 제1 패드와 이격되고 상기 절연층을 관통하여 상기 도전형 캡핑층에 연결되는 제2 패드를 더 포함하는 발광 소자 패키지.
- 제17 항에 있어서, 상기 발광 소자 패키지는상기 제1 패드에 연결된 제1 솔더부; 및상기 제2 패드에 연결된 제2 솔더부를 더 포함하는 발광 소자 패키지.
- 제18 항에 있어서, 상기 발광 소자 패키지는서로 전기적으로 이격된 제1 및 제2 리드 프레임; 및상기 제1 및 제2 리드 프레임 사이에 배치되는 절연부를 포함하고,상기 제1 솔더부는 상기 제1 리드 프레임과 상기 제1 패드 사이에 배치되고,상기 제2 솔더부는 상기 제2 리드 프레임과 상기 제2 패드 사이에 배치된 발광 소자 패키지.
- 제18 항에 있어서, 상기 발광 구조물을 감싸도록 배치된 몰딩 부재를 더 포함하는 발광 소자 패키지.
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KR1020167033905A KR102569249B1 (ko) | 2015-07-22 | 2016-07-21 | 발광 소자 패키지 |
CN201680042933.4A CN107924967A (zh) | 2015-07-22 | 2016-07-21 | 发光元件封装件 |
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US20210288219A1 (en) * | 2018-07-11 | 2021-09-16 | Suzhou Lekin Semiconductor Co., Ltd. | Semiconductor device |
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CN110931619A (zh) * | 2019-11-20 | 2020-03-27 | 厦门士兰明镓化合物半导体有限公司 | 倒装led芯片及其制造方法 |
CN113437197A (zh) * | 2021-06-25 | 2021-09-24 | 厦门乾照光电股份有限公司 | 一种倒装led芯片及其制作方法 |
CN113851566B (zh) * | 2021-12-01 | 2022-02-11 | 山西中科潞安紫外光电科技有限公司 | 一种深紫外led倒装芯片及其制作方法 |
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US20180212111A1 (en) | 2018-07-26 |
CN107924967A (zh) | 2018-04-17 |
KR102569249B1 (ko) | 2023-08-23 |
KR20180023778A (ko) | 2018-03-07 |
US10535804B2 (en) | 2020-01-14 |
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