WO2016170443A1 - 半導体装置および電子機器 - Google Patents
半導体装置および電子機器 Download PDFInfo
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- WO2016170443A1 WO2016170443A1 PCT/IB2016/052033 IB2016052033W WO2016170443A1 WO 2016170443 A1 WO2016170443 A1 WO 2016170443A1 IB 2016052033 W IB2016052033 W IB 2016052033W WO 2016170443 A1 WO2016170443 A1 WO 2016170443A1
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- Prior art keywords
- film
- wiring
- insulating film
- transistor
- oxide semiconductor
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- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
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- H—ELECTRICITY
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
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- H10K59/10—OLED displays
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Definitions
- One embodiment of the present invention relates to a semiconductor device.
- the technical field of one embodiment of the invention disclosed in this specification and the like relates to an object, a method, or a manufacturing method.
- one embodiment of the present invention relates to a process, a machine, a manufacture, or a composition (composition of matter). Therefore, the technical field of one embodiment of the present invention disclosed in this specification more specifically includes a semiconductor device, a display device, a liquid crystal display device, a light-emitting device, a power storage device, an imaging device, a memory device, and a driving method thereof, Alternatively, the production method thereof can be given as an example.
- a display device such as a flat panel display, in a pixel arranged in a row direction and a column direction, a transistor which is a switching element, a liquid crystal element electrically connected to the transistor, and a liquid crystal element in parallel A connected capacitive element is provided.
- a silicon semiconductor such as amorphous (amorphous) silicon or polysilicon is widely used.
- a metal oxide exhibiting semiconductor characteristics is a semiconductor material that can be used for a semiconductor film of a transistor.
- an oxide semiconductor For example, a technique for manufacturing a transistor using zinc oxide or an In—Ga—Zn-based oxide semiconductor is disclosed (see Patent Documents 1 and 2).
- oxide semiconductors are used in various devices such as a memory and a CPU (see Patent Document 3).
- An object of one embodiment of the present invention is to provide a display device including a pixel portion with a high aperture ratio. Another object is to provide a high-definition display device. Another object is to provide a highly integrated semiconductor device. Another object is to provide a semiconductor device with low power consumption. Another object is to provide a semiconductor device including a transistor with high on-state current. Another object is to provide a semiconductor device that operates at high speed.
- Another object is to provide a novel semiconductor device. Another object is to provide a module including the semiconductor device. Another object is to provide an electronic device including the semiconductor device or the module. Another object is to provide a method for manufacturing the semiconductor device.
- One embodiment of the present invention is a semiconductor device including a first wiring, a second wiring, a third wiring, a first driver circuit, a second driver circuit, and a cell array.
- the cell array includes a plurality of cells including transistors and storage capacitors.
- the transistor includes a first insulating film, an oxide semiconductor film, and a second insulating film.
- the oxide semiconductor film includes a region overlapping with the second wiring through the first insulating film and a region overlapping with the third wiring through the second insulating film.
- the first wiring is electrically connected to the first drive circuit, and the second wiring is electrically connected to the second drive circuit.
- the transistor is disposed above the second wiring, and the second wiring has a region functioning as the first gate electrode of the transistor in a region overlapping with the transistor.
- the third wiring is disposed above the transistor and has a region functioning as a second gate electrode of the transistor in a region overlapping with the transistor. Further, the third wiring has a region overlapping with the second wiring, and the second wiring and the third wiring are electrically connected in a region other than the cell array.
- the second wiring and the third wiring may be electrically connected in at least one of the cells.
- One embodiment of the present invention includes a first wiring, a second wiring, a third wiring, a first driver circuit, a second driver circuit, a third driver circuit, and a cell array. It is a semiconductor device having.
- a cell array is arranged between the second drive circuit and the third drive circuit.
- the cell array includes a plurality of cells including transistors and storage capacitors.
- the transistor includes a first insulating film, an oxide semiconductor film, and a second insulating film.
- the oxide semiconductor film includes a region overlapping with the second wiring through the first insulating film and a region overlapping with the fourth wiring through the second insulating film.
- the first wiring is electrically connected to the first driving circuit
- the second wiring is electrically connected to the second driving circuit or the third driving circuit.
- the transistor is disposed above the second wiring, and the second wiring has a region functioning as the first gate electrode of the transistor in a region overlapping with the transistor.
- the third wiring is disposed above the transistor and has a region functioning as a second gate electrode of the transistor in a region overlapping with the transistor. Further, the third wiring has a region overlapping with the second wiring, and the second wiring and the third wiring are electrically connected in a region other than the cell array.
- the second wiring and the third wiring may be electrically connected.
- the width of the second wiring in the connection portion between the second wiring and the third wiring may be wider than the width of the second wiring in the region overlapping with the cell.
- the electrical resistance of the third wiring may be equal to or lower than the electrical resistance of the second wiring.
- the third wiring may include a copper element.
- a cell may be a pixel and a cell array may be a pixel portion.
- One embodiment of the present invention is an electronic device including the above semiconductor device.
- a display device including a pixel portion with a high aperture ratio can be provided.
- a high-definition display device can be provided.
- a highly integrated semiconductor device can be provided.
- a semiconductor device with low power consumption can be provided.
- a semiconductor device including a transistor with high on-state current can be provided.
- a semiconductor device that operates at high speed can be provided.
- a novel semiconductor device can be provided.
- a module including the semiconductor device can be provided.
- an electronic device including the semiconductor device or the module can be provided.
- a method for manufacturing the semiconductor device can be provided.
- FIG. 14 is a top view illustrating one embodiment of a display device.
- FIG. 14 is a top view illustrating one embodiment of a display device.
- FIG. 14 is a top view illustrating one embodiment of a display device.
- 4A and 4B are a top view and a cross-sectional view illustrating one embodiment of a semiconductor device.
- 4A and 4B are a top view and a cross-sectional view illustrating one embodiment of a semiconductor device.
- 4A and 4B are a top view and a cross-sectional view illustrating one embodiment of a semiconductor device.
- 4A and 4B are a top view and a cross-sectional view illustrating one embodiment of a semiconductor device.
- FIGS. 4A and 4B are a top view and a cross-sectional view illustrating one embodiment of a semiconductor device. The figure explaining a band structure.
- FIGS. 4A to 4C illustrate structural analysis by XRD of a CAAC-OS and a single crystal oxide semiconductor, and FIGS. Sectional TEM image of CAAC-OS, planar TEM image and image analysis image thereof. The figure which shows the electron diffraction pattern of nc-OS, and the cross-sectional TEM image of nc-OS. Cross-sectional TEM image of a-like OS.
- FIG. 6 shows changes in crystal parts of an In—Ga—Zn oxide due to electron irradiation.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- FIG. 14 is a cross-sectional view illustrating one embodiment of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- FIG. 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- 8A and 8B are a top view and cross-sectional views illustrating an example of a manufacturing process of a semiconductor device.
- FIG. 14 is a cross-sectional view illustrating one embodiment of a display device.
- FIG. 10 is a circuit diagram illustrating one embodiment of a memory device.
- FIG. 10 is a circuit diagram illustrating one embodiment of a memory device.
- FIG. 10 is a circuit diagram illustrating one embodiment of a memory device.
- FIG. 14 is a cross-sectional view illustrating one embodiment of a memory device.
- FIG. 14 is a cross-sectional view illustrating one embodiment of a memory device.
- FIG. 14 is a cross-sectional view illustrating one embodiment of a memory device.
- the figure explaining a display module. 10A and 10B each illustrate an electronic device.
- a transistor is an element having at least three terminals including a gate, a drain, and a source.
- a channel region is provided between the drain (drain terminal, drain region or drain electrode) and the source (source terminal, source region or source electrode), and a current flows through the drain, channel region, and source. It is something that can be done.
- a channel region refers to a region through which a current mainly flows.
- the functions of the source and drain may be switched when transistors having different polarities are employed or when the direction of current changes during circuit operation. Therefore, in this specification and the like, the terms source and drain can be used interchangeably.
- the term “electrically connected” includes a case where they are connected via “things having some electrical action”.
- the “thing having some electric action” is not particularly limited as long as it can exchange electric signals between connection targets.
- “thing having some electric action” includes electrodes, wiring, switching elements such as transistors, resistance elements, inductors, capacitors, and other elements having various functions.
- film and “layer” can be interchanged with each other depending on circumstances or circumstances.
- conductive layer may be changed to the term “conductive film”.
- insulating film may be changed to the term “insulating layer” in some cases.
- an oxide conductive film can be referred to as an oxide semiconductor film with high carrier density and low resistance, an oxide semiconductor film with conductivity, an oxide semiconductor film with high conductivity, or the like.
- the pixel portion is a region including a scan line, a signal line, a transistor functioning as a selection switch, a storage capacitor, a pixel electrode, and a counter electrode, and refers to a region for optically modulating an RGB image.
- pixel and “pixel portion” can be interchanged with each other depending on circumstances or circumstances.
- the “pixel” can be a “cell” and the “cell” can be a “pixel” depending on circumstances or circumstances.
- the “pixel portion” can be a “cell array”, and the “cell array” can be a “pixel portion” depending on circumstances or circumstances.
- FIG. 1A is a top view illustrating an example of a semiconductor device.
- a semiconductor device 700 illustrated in FIG. 1A includes a first substrate 701, a pixel portion 702, a source driver 704, a second substrate 705, a gate driver 706, and an FPC terminal portion 708 (FPC: Flexible Printed). Circuit), a wiring 710, a sealant 712, an FPC 716, a scanning line 717, a wiring 718, a contact hole 719, and a signal line 720.
- FPC Flexible Printed
- the pixel portion 702, the source driver 704, the gate driver 706, the FPC terminal portion 708, the wiring 710, the FPC 716, the scanning line 717, and the signal line 720 are provided over the first substrate 701.
- the second substrate 705 is provided so as to face the first substrate 701.
- a display element is provided between the first substrate 701 and the second substrate 705.
- the first substrate 701 and the second substrate 705 are sealed with a sealant 712. That is, the pixel portion 702, the source driver 704, and the gate driver 706 are sealed with the first substrate 701, the sealant 712, and the second substrate 705.
- the pixel portion 702 includes a plurality of pixels 703 arranged in a matrix of p rows and q columns (p and q are integers of 2 or more). Although not illustrated, a transistor that functions as a selection switch of the pixel 703 performs scanning. Arranged on line 717. The wiring 718 is provided so as to overlap with the scanning line 717.
- the FPC terminal portion 708 is electrically connected to the pixel portion 702, the source driver 704, and the gate driver 706.
- An FPC 716 is connected to the FPC terminal portion 708, and various signals and the like are supplied to the pixel portion 702, the source driver 704, and the gate driver 706 by the FPC 716.
- a wiring 710 is connected to each of the pixel portion 702, the source driver 704, the gate driver 706, and the FPC terminal portion 708.
- Various signals and the like supplied by the FPC 716 are supplied to the pixel portion 702, the source driver 704, the gate driver 706, and the FPC terminal portion 708 through the wiring 710.
- the scanning line 717 is connected to the gate driver 706, and the signal line 720 is connected to the source driver 704.
- the scan line 717 and the wiring 718 are electrically connected to each other through a contact hole 719 provided in a region other than the pixel portion 702. Accordingly, there is no need to provide a contact hole for electrically connecting the scan line 717 and the wiring 718 to the pixel 703, and the aperture ratio of the pixel portion 702 can be improved.
- contact hole 719 is provided in the region 722 between the pixel portion 702 and the wiring 710, the invention is not limited to this.
- a contact hole 719 can be provided in a region 721 between the pixel portion 702 and the gate driver 706.
- FIG. 1B shows an enlarged view of the region 730 shown in FIG.
- FIG. 1C shows an enlarged view of the region 730 in the case where the position of the contact hole 719 is different from those in FIGS.
- the pixel 703 and the contact hole 719 are separated from each other; however, the pixel 703 and the contact hole 719 may be in contact with each other as illustrated in FIG.
- the scan line 717 functions as a first gate electrode of a transistor which functions as a selection switch provided in the pixel 703, and the wiring 718 functions as a second gate electrode.
- the second gate electrode by forming the second gate electrode, the current driving capability of the transistor is improved and high on-current characteristics can be obtained. In addition, since the on-state current can be increased, the transistor can be miniaturized.
- the scan line 717 and the wiring 718 include chromium (Cr), copper (Cu), aluminum (Al), gold (Au), silver (Ag), zinc (Zn), molybdenum (Mo), tantalum (Ta), titanium ( A metal element selected from Ti), tungsten (W), manganese (Mn), nickel (Ni), iron (Fe), cobalt (Co), or an alloy containing the above-described metal element as a component, or the above-described metal element Each can be formed using an alloy or the like in combination.
- the scan line 717 and the wiring 718 may have a single-layer structure or a stacked structure including two or more layers.
- a Cu—X alloy film (X is Mn, Ni, Cr, Fe, Co, Mo, Ta, or Ti) may be applied. By using the Cu—X alloy film, the wiring resistance can be reduced.
- conductive materials having translucency such as indium tin oxide, indium tungsten oxide, indium zinc tungsten oxide, indium titanium oxide, indium tin titanium oxide, indium zinc oxide, and indium tin silicon oxide are used. It can also be applied. In particular, translucency of indium tungsten oxide, indium zinc tungsten oxide, indium titanium oxide, indium tin titanium oxide, indium tin oxide (ITO), indium zinc oxide, indium tin silicon oxide (ITSO), etc. A conductive material having the following can be used.
- an oxide semiconductor film with reduced resistance may be used.
- the oxide semiconductor film zinc oxide or an In—Ga—Zn-based oxide semiconductor film can be used.
- the same material as the oxide semiconductor film described later in Embodiment 2 can be used.
- an insulating film containing a large amount of hydrogen can be formed so as to be in contact with an oxide semiconductor film. Since the oxide semiconductor film can function as a transparent electrode, the aperture ratio does not decrease even when the oxide semiconductor film is used for the wiring 718.
- the scan line 717 and the wiring 718 may be formed using the same material or different materials. However, if the resistances of the scanning line 717 and the wiring 718 are different, a signal delay occurs. Therefore, it is desirable to adjust the widths of the scanning line 717 and the wiring 718 to have the same resistance. Further, the resistance of the wiring 718 may be lower than that of the scanning line 717.
- signal delay can be reduced by providing a plurality of contact holes 719 for electrically connecting the scan lines 717 and the wirings 718.
- a contact hole 719a and a contact hole 719b can be provided, the contact hole 719a can be provided in the region 721, and the contact hole 719b can be provided in the region 722.
- FIG. 2B is a top view of the semiconductor device 700 in the case where the contact hole 719c is provided in the pixel 703 [2, n] in the pixel portion 702 in addition to the contact hole 719a and the contact hole 719b.
- the contact hole 719c can be provided at any position as long as the scan line 717 and the wiring 718 overlap with each other.
- the pixel 703 in the m-th row (m is a natural number of p or less) and the n-th column (n is a natural number of q or less) is described as a pixel 703 [m, n].
- a contact hole can be provided every other plurality of pixels.
- a contact hole can be provided in a pixel 703 [m, n] in an arbitrary m-th row.
- contact holes are provided in all odd-numbered pixels 703 [(odd numbers such as 1, 3, 5), n] or all even-numbered pixels 703 [(even numbers such as 2, 4, 6), n]. You can also. Further, for example, contact holes may be provided in the pixels 703 [(multiples of 3, such as 3, 6, 9, etc.), n] of all three multiple rows.
- contact holes can be provided in the pixels 703 [(multiples of 4, such as 4, 8, 12, etc.), n] in all the multiples of 4 rows. Further, for example, contact holes can be provided in pixels 703 [(multiple of x such as x, 2x, 3x), n] in a row of all multiples of x (x is a natural number equal to or less than p). It is also possible to provide a contact hole in the pixel 703 [(x + y, 2x + y, 3x + y, etc.), n] in the row of “multiple of x + y” (x is a natural number of p or less and y is a natural number of x or less).
- contact holes may be provided in pixels 703 [(3, 4, 6, 8, 9, 12, etc., multiples of 3 or multiples of 4), n] of all multiples of 3 and multiples of 4. it can.
- the signal delay can be reduced as the distance between the contact holes is shorter, by providing a contact hole in the pixel portion 702 in addition to the contact hole 719a and the contact hole 719b, a scanning line is provided than in a case where no contact hole is provided in the pixel portion 702.
- Signal delay between the signal 717 and the wiring 718 can be reduced. Since the distance between contact holes can be shortened as the number of contact holes increases, signal delay can be reduced.
- the distances between the contact holes are preferably as equal as possible, but may not be equal.
- a contact hole for electrically connecting the scan line 717 and the wiring 718 is not provided in all the pixels 703; therefore, even if the contact hole is provided in the pixel portion 702, all the pixels The aperture ratio of the pixel portion 702 can be increased as compared with the case where a contact hole is provided in 703.
- a plurality of gate drivers may be provided in the semiconductor device 700.
- a gate driver 706a and a gate driver 706b are provided.
- a scanning line 717a connected to an odd-numbered row of pixels 703 [(odd number of 1, 3, 5, etc.), n] is connected to the gate driver 706a and an even-numbered row of pixels 703.
- the scanning lines 717b connected to [(even numbers such as 2, 4, 6), n] to the gate driver 706b, the area of the contact hole 719 can be increased.
- a plurality of contact holes 719 may be provided as in the case of FIG.
- the widths of the scanning lines 717 and the wirings 718 around the contact hole 719 are larger than those around the contact hole 719.
- the width around the contact hole 719 can be increased only for the scanning line 717, and the width of the wiring 718 around the contact hole 719 can be the same as the width of the wiring 718 around the contact hole 719.
- the present invention is not limited to this structure.
- only the gate driver 706 may be formed on the first substrate 701.
- only the source driver 704 may be formed on the first substrate 701.
- a substrate on which a source driver circuit, a gate driver circuit, or the like is formed (for example, a driver circuit substrate formed of a single crystal semiconductor film or a polycrystalline semiconductor film) may be mounted on the first substrate 701. .
- a connection method of a separately formed drive circuit board is not particularly limited, and a COG (Chip On Glass) method, a wire bonding method, or the like can be used.
- the pixel portion 702, the source driver 704, and the gate driver 706 included in the semiconductor device 700 each include a plurality of transistors, and the transistors that are semiconductor devices of one embodiment of the present invention can be used.
- Display elements include, for example, liquid crystal elements, EL (electroluminescence) elements including LEDs (white LEDs, red LEDs, green LEDs, blue LEDs, etc.) (EL elements including organic substances and inorganic substances, organic EL elements, inorganic EL elements).
- EL electroluminescence
- LEDs white LEDs, red LEDs, green LEDs, blue LEDs, etc.
- EL elements including organic substances and inorganic substances, organic EL elements, inorganic EL elements).
- Transistors Transistors that emit light in response to current
- electron-emitting devices electrophoretic devices
- electrophoretic devices grating light valves (GLV), digital micromirror devices (DMD), DMS (digital micro shutter) devices
- MIRASOL registered trademark
- Examples thereof include a display, an IMOD (interference modulation) element, a display element using a micro electro mechanical system (MEMS) such as a piezoelectric ceramic display, and an electrowetting element.
- MEMS micro electro mechanical system
- quantum dots may be used as the display element.
- a display device using a liquid crystal element there is a liquid crystal display (a transmissive liquid crystal display, a transflective liquid crystal display, a reflective liquid crystal display, a direct view liquid crystal display, a projection liquid crystal display) and the like.
- An example of a display device using an EL element is an EL display.
- a display device using an electron-emitting device there is a field emission display (FED), a SED type flat display (SED: Surface-conduction Electron-emitter Display), or the like.
- FED field emission display
- SED SED type flat display
- An example of a display device using quantum dots is a quantum dot display.
- An example of a display device using electronic ink or an electrophoretic element is electronic paper.
- part or all of the pixel electrode may have a function as a reflective electrode.
- part or all of the pixel electrode may have aluminum, silver, or the like.
- a memory circuit such as an SRAM can be provided under the reflective electrode. Thereby, power consumption can be further reduced.
- the color elements controlled by the pixels when performing color display are not limited to three colors of RGB (R represents red, G represents green, and B represents blue).
- RGB red
- G represents green
- B represents blue
- it may be composed of four pixels: an R pixel, a G pixel, a B pixel, and a W (white) pixel.
- one color element may be configured by two colors of RGB, and two different colors may be selected and configured depending on the color element.
- one or more colors such as yellow, cyan, and magenta may be added to RGB.
- the size of the display area may be different for each dot of the color element.
- the disclosed invention is not limited to a display device for color display, and can be applied to a display device for monochrome display.
- a colored layer (also referred to as a color filter) may be used to display a full color display device using white light (W) in a backlight (organic EL element, inorganic EL element, LED, fluorescent lamp, or the like).
- white light W
- a backlight organic EL element, inorganic EL element, LED, fluorescent lamp, or the like.
- red (R), green (G), blue (B), yellow (Y), and the like can be used in appropriate combination for the colored layer.
- the colored layer the color reproducibility can be increased as compared with the case where the colored layer is not used.
- white light in the region having no colored layer may be directly used for display.
- a decrease in luminance due to the colored layer can be reduced during bright display, and power consumption can be reduced by about 20% to 30%.
- a self-luminous element such as an organic EL element or an inorganic EL element
- R, G, B, Y, and white (W) may be emitted from elements having respective emission colors.
- W white
- power consumption may be further reduced as compared with the case where a colored layer is used.
- FIG. 4A is a top view of a transistor 500 which is a semiconductor device of one embodiment of the present invention
- FIG. 4B is a cross-sectional view of a cross-sectional surface taken along dashed-dotted line X1-X2 in FIG.
- FIG. 4C corresponds to a cross-sectional view of the cut surface between the alternate long and short dash line Y1-Y2.
- FIG. 4A some components (such as an insulating film functioning as a gate insulating film) are not illustrated in order to avoid complexity.
- the direction of the alternate long and short dash line X1-X2 may be referred to as a channel length direction, and the direction of the alternate long and short dash line Y1-Y2 may be referred to as a channel width direction.
- some components may be omitted in the following drawings as in FIG. 4A.
- the transistor 500 includes a substrate 502, a conductive film 504, an insulating film 506, an insulating film 507, an oxide semiconductor film 508, a conductive film 512a, a conductive film 512b, an insulating film 514, an insulating film 516, An insulating film 518, a conductive film 520a, and a conductive film 520b are included.
- the oxide semiconductor film 508 includes an oxide semiconductor film 508a on the conductive film 504 side and an oxide semiconductor film 508b over the oxide semiconductor film 508a.
- the conductive film 504 is over the substrate 502, the insulating film 506 is over the substrate 502 and the conductive film 504, the insulating film 507 is over the insulating film 506, the oxide semiconductor film 508 is over the insulating film 507, and the conductive film 512a is over the insulating film. 507 and the oxide semiconductor film 508, the conductive film 512b is formed over the insulating film 507 and the oxide semiconductor film 508, the insulating film 514 is formed over the oxide semiconductor film 508, the conductive films 512a and the conductive film 512b, and the insulating film 516 is formed.
- the insulating film 518 is disposed over the insulating film 516, and the conductive film 520 b is disposed over the insulating film 518 over the insulating film 514.
- the conductive film 520a is provided over the conductive film 512b and the insulating film 518 through the contact hole 542c provided in the insulating film 514, the insulating film 516, and the insulating film 518 and reaching the conductive film 512b.
- the oxide semiconductor film 508 is electrically connected to the conductive films 512a and 512b.
- the conductive film 520a is electrically connected to the conductive film 512b.
- the conductive film 504 functions as a first gate electrode
- the conductive film 520b functions as a second gate electrode (also referred to as a back gate electrode).
- the conductive film 512a functions as one of a source electrode and a drain electrode
- the conductive film 512b functions as the other of the source electrode and the drain electrode.
- the conductive film 520a functions as a pixel electrode used for a display device, for example.
- the conductive film 504 is a part of the scan line 717 illustrated in FIGS. 1 to 3
- the conductive film 520b is a part of the wiring 718 illustrated in FIGS. .
- FIG. 5 illustrates a transistor 570 in which a contact opening is provided for each pixel and the first gate electrode and the second gate electrode are electrically connected.
- the conductive films 504 and 520b are set to the same potential by being electrically connected to each other in a region other than the pixel portion.
- the conductive film 504 and the conductive film 520b are electrically connected to each other through the contact hole 542a and the contact hole 542b, and the conductive film 504 and the conductive film 520b have the same potential. Since only the transistor 500 does not have the contact hole 542a and the contact hole 542b, the opening ratio of the transistor 500 is higher than that of the transistor 570.
- the oxide semiconductor film 508 included in the transistors 500 and 570 is located so as to face each of the conductive films 504 and 520b and is sandwiched between conductive films functioning as two gate electrodes.
- the length in the channel length direction and the length in the channel width direction of the conductive film 520b are longer than the length in the channel length direction and the length in the channel width direction of the oxide semiconductor film 508, respectively.
- the conductive film 520b is covered with the insulating film 514, the insulating film 516, and the insulating film 518 interposed therebetween.
- the oxide semiconductor film 508 included in the transistors 500 and 570 can be electrically surrounded by the electric fields of the conductive films 504 and 520b.
- a device structure of a transistor that surrounds an oxide semiconductor film in which a channel region is formed by an electric field of the first gate electrode and the second gate electrode is formed as a surrounded channel (s-channel). ) Structure can be called.
- the transistor 500 and the transistor 570 have an s-channel structure, an electric field for inducing a channel by the conductive film 504 can be effectively applied to the oxide semiconductor film 508; thus, as described in Embodiment 1, In this manner, the current driving capability of the transistor 500 and the transistor 570 is improved as compared with the case where the conductive film 520b is not provided, and high on-current characteristics can be obtained. Further, since the on-state current can be increased, the transistor 500 and the transistor 570 can be miniaturized.
- FIG. 6 shows a transistor 600 which is a modified example of this embodiment.
- the transistor 600 includes a substrate 602, a conductive film 604, an insulating film 606, an oxide semiconductor film 608, a conductive film 612a, a conductive film 612b, an insulating film 614, a conductive film 616, an insulating film 618,
- the oxide semiconductor film 608 includes an oxide semiconductor film 608a on the conductive film 604 side and an oxide semiconductor film 608b over the oxide semiconductor film 608a.
- the conductive film 604 is over the substrate 602, the insulating film 606 is over the substrate 602 and the conductive film 604, the oxide semiconductor film 608 is over the insulating film 606, and the conductive film 612a is over the insulating film 606 and the oxide semiconductor film 608.
- the conductive film 612b is over the insulating film 606 and the oxide semiconductor film 608, the insulating film 614 is over the oxide semiconductor film 608, the conductive films 612a and 612b, the conductive film 616 is over the insulating film 614, and the insulating film 618 is over Disposed over the insulating film 606, the conductive film 612a, and the conductive film 612b.
- the oxide semiconductor film 608 is electrically connected to the conductive films 612a and 612b, the conductive film 612a functions as one of a source electrode and a drain electrode, and the conductive film 612b functions as the other of the source electrode and the drain electrode. Respectively.
- the transistor 600 has a top-gate structure in which a conductive film 604 functioning as a second gate electrode (also referred to as a back gate electrode) is formed below the conductive film 616 functioning as a first gate electrode. .
- the oxide semiconductor film 608 is located so as to face the conductive films 616 and 604 and is sandwiched between the conductive films 616 and 604. That is, the transistor 600 has the above-described s-channel structure. For this reason, high on-current characteristics can be obtained.
- the conductive film 616 is part of the scan line 717 illustrated in FIGS. 1 to 3
- the conductive film 604 is part of the wiring 718 illustrated in FIGS. That is, the wiring 718 is formed below the scanning line 717.
- the transistor 600 may have a structure illustrated in FIG. This structure is a self-aligned structure in which the conductive film 616 does not have a region where the conductive films 612a and 612b overlap.
- a self-aligned transistor is suitable for high-speed operation because the parasitic capacitance between the conductive film functioning as the source or drain electrode and the conductive film functioning as the first gate electrode is extremely small.
- the transistor 600 may have a structure illustrated in FIG. In this structure, the insulating film 614 and the conductive film 616 are provided in the contact hole reaching the oxide semiconductor film 608 b and the insulating film 606 provided in the insulating film 618.
- the transistor 600 illustrated in FIGS. 8A and 8B a region in which a conductive film functioning as a source electrode or a drain electrode and a conductive film functioning as a first gate electrode overlap with each other in the structure of the other transistors described above. Since there are few, parasitic capacitance can be made small. Therefore, the transistor is suitable as an element of a circuit that requires high-speed operation.
- the top surface of the transistor is preferably planarized by a CMP (Chemical Mechanical Polishing) method or the like as illustrated in FIGS. 8B and 8C, but may be configured so as not to be planarized.
- the conductive film 504 and the conductive film 520 b can be formed using a material similar to that of the scan line 717 and the wiring 718 described in Embodiment 1, respectively.
- a glass substrate, a ceramic substrate, a quartz substrate, a sapphire substrate, or the like which has heat resistance enough to withstand heat treatment performed later is preferably used.
- a single crystal semiconductor substrate made of silicon or silicon carbide, a polycrystalline semiconductor substrate, a compound semiconductor substrate such as silicon germanium, an SOI substrate, or the like can be applied, and a semiconductor element is provided over these substrates.
- the substrate 502 may be used. Note that in the case where a glass substrate is used as the substrate 502, a large display device can be manufactured by using a large-area substrate such as a sixth generation, a seventh generation, an eighth generation, a ninth generation, or a tenth generation. it can. It is preferable to use such a large-area substrate because manufacturing costs can be reduced. Further, a flexible substrate may be used as the substrate 502.
- a silicon oxide film, a silicon oxynitride film, or the like is formed by a plasma enhanced chemical vapor deposition (PECVD) method, a sputtering method, or the like.
- PECVD plasma enhanced chemical vapor deposition
- An insulating film containing one or more of each can be used. Note that a single-layer insulating film selected from the above materials or an insulating film having three or more layers may be used instead of the stacked structure of the insulating films 506 and 507.
- the insulating film 506 functions as a blocking film that suppresses permeation of oxygen.
- the insulating film 506 can suppress permeation of oxygen.
- the insulating film 507 in contact with the oxide semiconductor film 508 functioning as the channel region of the transistor 500 is preferably an oxide insulating film, and includes a region containing oxygen in excess of the stoichiometric composition (oxygen-excess region). ) Is more preferable.
- the insulating film 507 is an insulating film capable of releasing oxygen.
- hafnium oxide has a higher dielectric constant than silicon oxide or silicon oxynitride. Accordingly, the thickness of the insulating film 507 can be increased as compared with the case where silicon oxide is used, so that the leakage current due to the tunnel current can be reduced. That is, a transistor with a small off-state current can be realized.
- hafnium oxide having a crystal structure has a higher relative dielectric constant than hafnium oxide having an amorphous structure. Therefore, in order to obtain a transistor with low off-state current, it is preferable to use hafnium oxide having a crystal structure. Examples of the crystal structure include a monoclinic system and a cubic system. Note that one embodiment of the present invention is not limited thereto.
- a silicon nitride film is formed as the insulating film 506 and a silicon oxide film is formed as the insulating film 507. Since the silicon nitride film has a relative dielectric constant higher than that of the silicon oxide film and has a large film thickness necessary for obtaining a capacitance equivalent to that of the silicon oxide film, a silicon nitride film is used as a gate insulating film of the transistor 500. Insulating film can be physically thickened. Therefore, a decrease in the withstand voltage of the transistor 500 can be suppressed, and further, the withstand voltage can be improved, so that electrostatic breakdown of the transistor 500 can be suppressed.
- the oxide semiconductor film 508 any of the above materials can be used.
- the oxide semiconductor film 508 is an In-M-Zn oxide
- the atomic ratio of the metal element of the sputtering target used for forming the In-M-Zn oxide is In ⁇ M (the number of In atoms is It is preferable that Zn ⁇ M (the number of Zn atoms is equal to or greater than the number of M atoms), which satisfies the above.
- the oxide semiconductor film 508 is an In-M-Zn oxide
- a target including a polycrystalline In-M-Zn oxide is preferably used as the sputtering target.
- the atomic ratio of the oxide semiconductor film 508 to be formed includes a variation of plus or minus 40% of the atomic ratio of the metal element contained in the sputtering target as an error.
- the sputtering target may be used.
- the atomic ratio of the metal elements of the sputtering target used for the oxide semiconductor film 508b is In ⁇ M (the number of In atoms is equal to or larger than the number of M atoms), Zn ⁇ M (the number of Zn atoms is the number of M atoms)
- the oxide semiconductor film 508 has an energy gap of 2 eV or more, preferably 2.5 eV or more, more preferably 3 eV or more. In this manner, off-state current of the transistor 500 can be reduced by using an oxide semiconductor with a wide energy gap.
- an oxide semiconductor film with an energy gap of 2.0 eV or more, preferably 2.0 eV or more and 3.0 eV or less is used for the oxide semiconductor film 508a, and an energy gap of 2.5 eV is used for the oxide semiconductor film 508b.
- An oxide semiconductor film of 3.5 eV or less is preferably used.
- the oxide semiconductor film 508b preferably has a larger energy gap than the oxide semiconductor film 508a.
- the thicknesses of the oxide semiconductor film 508a and the oxide semiconductor film 508b are each 3 nm to 200 nm, preferably 3 nm to 100 nm, more preferably 3 nm to 50 nm.
- the oxide semiconductor film 508a an oxide semiconductor film with low carrier density is used.
- the oxide semiconductor film 508a has a carrier density of less than 8 ⁇ 10 11 / cm 3 , preferably less than 1 ⁇ 10 11 / cm 3 , more preferably less than 1 ⁇ 10 10 / cm 3 , and 1 ⁇ 10 ⁇ It may be 9 / cm 3 or more.
- the oxide semiconductor film 508b an oxide semiconductor film with low carrier density is used.
- the oxide semiconductor film 508b has a carrier density of 1 ⁇ 10 17 / cm 3 or less, preferably 1 ⁇ 10 15 / cm 3 or less, more preferably 1 ⁇ 10 13 / cm 3 or less, more preferably 1 ⁇ 10. It may be 11 / cm 3 or less.
- the composition is not limited thereto, and a transistor having an appropriate composition may be used depending on required semiconductor characteristics and electrical characteristics (such as field-effect mobility and threshold voltage) of the transistor.
- the carrier density, impurity concentration, defect density, atomic ratio of metal element to oxygen, interatomic distance, density of the oxide semiconductor film 508a and the oxide semiconductor film 508b Etc. are preferable.
- an oxide semiconductor film with a low impurity concentration and a low density of defect states can be used to manufacture a transistor with more excellent electrical characteristics. This is preferable.
- low impurity concentration and low defect level density are referred to as high purity intrinsic or substantially high purity intrinsic.
- a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor film has few carrier generation sources, and thus can have a low carrier density. Therefore, a transistor in which a channel region is formed in the oxide semiconductor film rarely has electrical characteristics (also referred to as normally-on) in which the threshold voltage is negative.
- a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor film has a low density of defect states, and thus may have a low density of trap states. Further, a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor film has an extremely small off-state current, a channel width of 1 ⁇ 10 6 ⁇ m, and a channel length L of 10 ⁇ m. When the voltage between the drain electrodes (drain voltage) is in the range of 1V to 10V, it is possible to obtain a characteristic that the off-current is less than the measurement limit of the semiconductor parameter analyzer, that is, 1 ⁇ 10 ⁇ 13 A or less.
- a transistor in which a channel region is formed in the high-purity intrinsic or substantially high-purity intrinsic oxide semiconductor film can have a small variation in electrical characteristics and can be a highly reliable transistor.
- the charge trapped in the trap level of the oxide semiconductor film takes a long time to disappear, and may behave as if it were a fixed charge. Therefore, a transistor in which a channel region is formed in an oxide semiconductor film with a high trap state density may have unstable electrical characteristics.
- impurities include hydrogen, nitrogen, alkali metals, and alkaline earth metals.
- Hydrogen contained in the oxide semiconductor film reacts with oxygen bonded to metal atoms to become water, and forms oxygen vacancies in a lattice from which oxygen is released (or a portion from which oxygen is released). When hydrogen enters the oxygen vacancies, electrons serving as carriers may be generated. In addition, a part of hydrogen may be combined with oxygen bonded to a metal atom to generate electrons as carriers. Therefore, a transistor including an oxide semiconductor film containing hydrogen is likely to be normally on. Therefore, it is preferable that hydrogen be reduced in the oxide semiconductor film 508 as much as possible.
- the hydrogen concentration obtained by SIMS analysis is 2 ⁇ 10 20 atoms / cm 3 or less, preferably 5 ⁇ 10 19 atoms / cm 3 or less, more preferably 1 ⁇ 10 19. atoms / cm 3 or less, 5 ⁇ 10 18 atoms / cm 3 or less, preferably 1 ⁇ 10 18 atoms / cm 3 or less, more preferably 5 ⁇ 10 17 atoms / cm 3 or less, more preferably 1 ⁇ 10 16 atoms / cm 3 or less. cm 3 or less.
- the oxide semiconductor film 508a preferably includes a portion with a lower hydrogen concentration than the oxide semiconductor film 508b. Since the oxide semiconductor film 508a has a portion with a lower hydrogen concentration than the oxide semiconductor film 508b, a highly reliable semiconductor device can be obtained.
- the concentration of silicon or carbon in the oxide semiconductor film 508a and the concentration of silicon or carbon in the vicinity of the interface with the oxide semiconductor film 508a are 2 ⁇ 10 18 atoms / cm 3 or less. Preferably, it is 2 ⁇ 10 17 atoms / cm 3 or less.
- the concentration of alkali metal or alkaline earth metal obtained by SIMS analysis is set to 1 ⁇ 10 18 atoms / cm 3 or lower, preferably 2 ⁇ 10 16 atoms / cm 3 or lower.
- concentration of alkali metal or alkaline earth metal in the oxide semiconductor film 508a is set to 1 ⁇ 10 18 atoms / cm 3 or lower, preferably 2 ⁇ 10 16 atoms / cm 3 or lower.
- the nitrogen concentration obtained by SIMS analysis is preferably 5 ⁇ 10 18 atoms / cm 3 or less.
- the oxide semiconductor film 508a and the oxide semiconductor film 508b may each have a non-single-crystal structure.
- the non-single crystal structure includes, for example, a CAAC-OS (C Axis Crystalline Oxide Semiconductor), a polycrystalline structure, a microcrystalline structure, or an amorphous structure, which will be described later.
- CAAC-OS C Axis Crystalline Oxide Semiconductor
- the amorphous structure has the highest density of defect states
- the CAAC-OS has the lowest density of defect states.
- FIG. 9 illustrates an example of a band structure in the film thickness direction of a stacked structure including the insulating film 507, the oxide semiconductor film 508a, the oxide semiconductor film 508b, and the insulating film 514.
- the band structure indicates the energy level (Ec) at the lower end of the conduction band of the insulating film 507, the oxide semiconductor film 508a, the oxide semiconductor film 508b, and the insulating film 514 for easy understanding.
- the energy level at the lower end of the conduction band changes gently. In other words, it can be said that it is continuously changed or continuously joined.
- a defect level such as a trap center or a recombination center at the interface between the oxide semiconductor film 508a and the oxide semiconductor film 508b.
- each film is exposed to the air using a multi-chamber film formation apparatus (sputtering apparatus) including a load-lock chamber. It suffices to laminate them continuously.
- the oxide semiconductor film 508a becomes a well, and it is found that a channel region is formed in the oxide semiconductor film 508a in the transistor using the above stacked structure.
- a trap level can be formed in the oxide semiconductor film 508a.
- the trap level can be formed in the oxide semiconductor film 508b. Accordingly, the trap level can be separated from the oxide semiconductor film 508a.
- the trap level may be farther to the vacuum level than the energy level (Ec) at the lower end of the conduction band of the oxide semiconductor film 508a functioning as a channel region, and electrons are likely to accumulate in the trap level. . Accumulation of electrons at the trap level results in a negative fixed charge, and the threshold voltage of the transistor shifts in the positive direction. Therefore, a structure in which the trap level is closer to the vacuum level than the energy level (Ec) at the lower end of the conduction band of the oxide semiconductor film 508a is preferable. By doing so, electrons are unlikely to accumulate in the trap level, the on-state current of the transistor can be increased, and field effect mobility can be increased.
- the energy level of the lower end of the conduction band of the oxide semiconductor film 508b is closer to the vacuum level than the oxide semiconductor film 508a, and typically the energy of the lower end of the conduction band of the oxide semiconductor film 508a.
- the difference between the level and the energy level at the lower end of the conduction band of the oxide semiconductor film 508b is 0.15 eV or more, 0.5 eV or more, 2 eV or less, or 1 eV or less. That is, the difference between the electron affinity of the oxide semiconductor film 508b and the electron affinity of the oxide semiconductor film 508a is 0.15 eV or more, 0.5 eV or more, and 2 eV or less, or 1 eV or less.
- the oxide semiconductor film 508a serves as a main current path and functions as a channel region.
- the oxide semiconductor film 508b is an oxide semiconductor film including one or more metal elements included in the oxide semiconductor film 508a in which a channel region is formed, the oxide semiconductor film 508a and the oxide semiconductor film Interface scattering hardly occurs at the interface with 508b. Accordingly, the movement of carriers is not inhibited at the interface, so that the field effect mobility of the transistor is increased.
- the oxide semiconductor film 508b is formed using a material with sufficiently low conductivity in order to prevent the oxide semiconductor film 508b from functioning as part of the channel region.
- the oxide semiconductor film 508b has an electron affinity (difference between the vacuum level and the energy level at the bottom of the conduction band) smaller than that of the oxide semiconductor film 508a, and the energy level at the bottom of the conduction band is the oxide semiconductor film.
- a material having a difference (band offset) from the lower energy level of the conduction band 508a is used.
- the energy level at the lower end of the conduction band of the oxide semiconductor film 508b is lower than the lower end of the conduction band of the oxide semiconductor film 508a. It is preferable to apply a material closer to the vacuum level by 0.2 eV or more than the energy level, preferably 0.5 eV or more and closer to the vacuum level.
- the oxide semiconductor film 508b preferably does not include a spinel crystal structure in the film.
- the constituent elements of the conductive film 512a and the conductive film 512b are transferred to the oxide semiconductor film 508a at the interface between the spinel crystal structure and another region. May diffuse.
- the oxide semiconductor film 508b is a CAAC-OS which will be described later, a constituent element of the conductive films 512a and 512b, for example, a copper element is preferably blocked.
- the thickness of the oxide semiconductor film 508b is equal to or greater than the thickness at which the constituent elements of the conductive film 512a and the conductive film 512b can be prevented from diffusing into the oxide semiconductor film 508b, and from the insulating film 514 to the oxide semiconductor.
- the thickness is less than the thickness at which the supply of oxygen to the film 508b is suppressed.
- the thickness of the oxide semiconductor film 508b is 10 nm or more, the constituent elements of the conductive films 512a and 512b can be prevented from diffusing into the oxide semiconductor film 508a.
- the thickness of the oxide semiconductor film 508b is 100 nm or less, oxygen can be effectively supplied from the insulating film 514 and the insulating film 516 to the oxide semiconductor film 508a.
- parallel refers to a state in which two straight lines are arranged at an angle of ⁇ 10 ° to 10 °. Therefore, the case of ⁇ 5 ° to 5 ° is also included.
- substantially parallel means a state in which two straight lines are arranged at an angle of ⁇ 30 ° to 30 °.
- Vertical refers to a state in which two straight lines are arranged at an angle of 80 ° to 100 °. Therefore, the case of 85 ° to 95 ° is also included.
- substantially vertical means a state in which two straight lines are arranged at an angle of 60 ° to 120 °.
- An oxide semiconductor is classified into a single crystal oxide semiconductor and a non-single-crystal oxide semiconductor.
- a non-single-crystal oxide semiconductor a CAAC-OS (c-axis-aligned crystal oxide semiconductor), a polycrystalline oxide semiconductor, an nc-OS (nanocrystalline oxide semiconductor), a pseudo-amorphous oxide semiconductor (a-like oxide OS) : Amorphous-like oxide semiconductor) and amorphous oxide semiconductor.
- oxide semiconductors are classified into amorphous oxide semiconductors and other crystalline oxide semiconductors.
- a crystalline oxide semiconductor include a single crystal oxide semiconductor, a CAAC-OS, a polycrystalline oxide semiconductor, and an nc-OS.
- Amorphous structures are generally isotropic, have no heterogeneous structure, are metastable, have no fixed atomic arrangement, have a flexible bond angle, have short-range order, but long-range order It is said that it does not have.
- a stable oxide semiconductor cannot be called a complete amorphous oxide semiconductor.
- an oxide semiconductor that is not isotropic (for example, has a periodic structure in a minute region) cannot be called a complete amorphous oxide semiconductor.
- an a-like OS is not isotropic but has an unstable structure having a void (also referred to as a void). In terms of being unstable, a-like OS is physically similar to an amorphous oxide semiconductor.
- CAAC-OS First, the CAAC-OS will be described.
- a CAAC-OS is a kind of oxide semiconductor having a plurality of c-axis aligned crystal parts (also referred to as pellets).
- CAAC-OS is analyzed by X-ray diffraction (XRD: X-Ray Diffraction)
- XRD X-ray Diffraction
- CAAC-OS having an InGaZnO 4 crystal classified into the space group R-3m is subjected to structural analysis by an out-of-plane method
- a diffraction angle (2 ⁇ ) as illustrated in FIG. Shows a peak near 31 °. Since this peak is attributed to the (009) plane of the InGaZnO 4 crystal, in CAAC-OS, the crystal has a c-axis orientation, and the plane on which the c-axis forms a CAAC-OS film (formation target) It can also be confirmed that it faces a direction substantially perpendicular to the upper surface.
- a peak may also appear when 2 ⁇ is around 36 °.
- the peak where 2 ⁇ is around 36 ° is attributed to the crystal structure classified into the space group Fd-3m. Therefore, the CAAC-OS preferably does not show the peak.
- FIG. 10E shows a diffraction pattern obtained when an electron beam with a probe diameter of 300 nm is incident on the same sample in a direction perpendicular to the sample surface. From FIG. 10E, a ring-shaped diffraction pattern is confirmed. Therefore, it can be seen that the a-axis and the b-axis of the pellet included in the CAAC-OS have no orientation even by electron diffraction using an electron beam with a probe diameter of 300 nm. Note that the first ring in FIG. 10E is considered to originate from the (010) plane and the (100) plane of InGaZnO 4 crystal. Further, the second ring in FIG. 10E is considered to be due to the (110) plane or the like.
- FIG. 11A shows a high-resolution TEM image of a cross section of the CAAC-OS observed from a direction substantially parallel to the sample surface.
- a spherical aberration correction function was used for observation of the high-resolution TEM image.
- a high-resolution TEM image using the spherical aberration correction function is particularly referred to as a Cs-corrected high-resolution TEM image.
- the Cs-corrected high resolution TEM image can be observed, for example, with an atomic resolution analytical electron microscope JEM-ARM200F manufactured by JEOL Ltd.
- a pellet which is a region where metal atoms are arranged in layers can be confirmed. It can be seen that the size of one pellet is 1 nm or more and 3 nm or more. Therefore, the pellet can also be referred to as a nanocrystal (nc).
- the CAAC-OS can also be referred to as an oxide semiconductor including CANC (C-Axis aligned nanocrystals).
- CANC C-Axis aligned nanocrystals.
- the pellet reflects the unevenness of the surface or top surface of the CAAC-OS film, and is parallel to the surface or top surface of the CAAC-OS.
- FIGS. 11B and 11C show Cs-corrected high-resolution TEM images of the plane of the CAAC-OS observed from a direction substantially perpendicular to the sample surface.
- FIGS. 11D and 11E are images obtained by performing image processing on FIGS. 11B and 11C, respectively.
- an image processing method will be described.
- an FFT image is acquired by performing a Fast Fourier Transform (FFT) process on FIG.
- FFT-processed mask image is subjected to an inverse fast Fourier transform (IFFT) process to obtain an image-processed image.
- IFFT inverse fast Fourier transform
- the image acquired in this way is called an FFT filtered image.
- the FFT filtered image is an image obtained by extracting periodic components from the Cs-corrected high-resolution TEM image, and shows a lattice arrangement.
- FIG. 11D the portion where the lattice arrangement is disturbed is indicated by a broken line.
- a region surrounded by a broken line is one pellet.
- the location shown with the broken line is the connection part of a pellet and a pellet. Since the broken line has a hexagonal shape, it can be seen that the pellet has a hexagonal shape.
- the shape of a pellet is not necessarily a regular hexagonal shape, and is often a non-regular hexagonal shape.
- FIG. 11 (E) a portion where the orientation of the lattice arrangement changes between a region where the lattice arrangement is aligned and a region where another lattice arrangement is aligned is indicated by a dotted line, and the change in the orientation of the lattice arrangement is shown. It is indicated by a broken line.
- a clear crystal grain boundary cannot be confirmed even in the vicinity of the dotted line.
- the CAAC-OS has a c-axis alignment and a crystal structure in which a plurality of pellets (nanocrystals) are connected in the ab plane direction to have a strain. Therefore, the CAAC-OS can also be referred to as CAAcrystal (c-axis-aligned ab-plane-anchored crystal).
- the CAAC-OS is an oxide semiconductor with high crystallinity. Since the crystallinity of an oxide semiconductor may be deteriorated by entry of impurities, generation of defects, or the like, the CAAC-OS can be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies).
- the impurity means an element other than the main components of the oxide semiconductor, such as hydrogen, carbon, silicon, or a transition metal element.
- an element such as silicon which has a stronger bonding force with oxygen than a metal element included in an oxide semiconductor, disturbs the atomic arrangement of the oxide semiconductor by depriving the oxide semiconductor of oxygen, thereby reducing crystallinity. It becomes a factor.
- heavy metals such as iron and nickel, argon, carbon dioxide, and the like have large atomic radii (or molecular radii), which disturbs the atomic arrangement of the oxide semiconductor and decreases crystallinity.
- nc-OS is analyzed by XRD.
- XRD X-ray diffraction
- FIG. 12B shows a diffraction pattern (nanobeam electron diffraction pattern) when an electron beam having a probe diameter of 1 nm is incident on the same sample. From FIG. 12B, a plurality of spots are observed in the ring-shaped region. Therefore, nc-OS does not confirm order when an electron beam with a probe diameter of 50 nm is incident, but confirms order when an electron beam with a probe diameter of 1 nm is incident.
- the nc-OS has a highly ordered region, that is, a crystal in a thickness range of less than 10 nm. Note that there are some regions where a regular electron diffraction pattern is not observed because the crystal faces in various directions.
- FIG. 12D illustrates a Cs-corrected high-resolution TEM image of a cross section of the nc-OS observed from a direction substantially parallel to the formation surface.
- the nc-OS has a region in which a crystal part can be confirmed, such as a portion indicated by an auxiliary line, and a region in which a clear crystal part cannot be confirmed in a high-resolution TEM image.
- a crystal part included in the nc-OS has a size of 1 nm to 10 nm, particularly a size of 1 nm to 3 nm in many cases. Note that an oxide semiconductor in which the size of a crystal part is greater than 10 nm and less than or equal to 100 nm is sometimes referred to as a microcrystalline oxide semiconductor.
- the nc-OS may not be able to clearly confirm a crystal grain boundary in a high-resolution TEM image.
- the nanocrystal may have the same origin as the pellet in the CAAC-OS. Therefore, the crystal part of nc-OS is sometimes referred to as a pellet below.
- the nc-OS has a periodicity in atomic arrangement in a minute region (for example, a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm).
- the nc-OS has no regularity in crystal orientation between different pellets. Therefore, orientation is not seen in the whole film. Therefore, the nc-OS may not be distinguished from an a-like OS or an amorphous oxide semiconductor depending on an analysis method.
- nc-OS is an oxide semiconductor having RANC (Random Aligned nanocrystals), or an oxide having NANC (Non-Aligned nanocrystals). It can also be called a semiconductor.
- the nc-OS is an oxide semiconductor that has higher regularity than an amorphous oxide semiconductor. Therefore, the nc-OS has a lower density of defect states than an a-like OS or an amorphous oxide semiconductor. Note that the nc-OS does not have regularity in crystal orientation between different pellets. Therefore, the nc-OS has a higher density of defect states than the CAAC-OS.
- the a-like OS is an oxide semiconductor having a structure between the nc-OS and an amorphous oxide semiconductor.
- FIG. 13 shows a high-resolution cross-sectional TEM image of the a-like OS.
- FIG. 13A is a high-resolution cross-sectional TEM image of the a-like OS at the start of electron irradiation.
- FIG. 13B is a high-resolution cross-sectional TEM image of the a-like OS after irradiation with electrons (e ⁇ ) of 4.3 ⁇ 10 8 e ⁇ / nm 2 .
- electrons (e ⁇ ) of 4.3 ⁇ 10 8 e ⁇ / nm 2 .
- the a-like OS Since it has a void, the a-like OS has an unstable structure.
- the a-like OS has an unstable structure as compared with the CAAC-OS and the nc-OS, a change in structure due to electron irradiation is shown.
- a-like OS, nc-OS, and CAAC-OS are prepared. Each sample is an In—Ga—Zn oxide.
- a high-resolution cross-sectional TEM image of each sample is acquired.
- Each sample has a crystal part by a high-resolution cross-sectional TEM image.
- a unit cell of an InGaZnO 4 crystal has a structure in which three In—O layers and six Ga—Zn—O layers have a total of nine layers stacked in the c-axis direction.
- the spacing between these adjacent layers is about the same as the lattice spacing (also referred to as d value) of the (009) plane, and the value is determined to be 0.29 nm from crystal structure analysis. Therefore, in the following, a portion where the interval between lattice fringes is 0.28 nm or more and 0.30 nm or less is regarded as a crystal part of InGaZnO 4 .
- the lattice fringes correspond to the ab plane of the InGaZnO 4 crystal.
- FIG. 14 is an example in which the average size of the crystal parts (22 to 30 locations) of each sample was investigated. Note that the length of the lattice stripes described above is the size of the crystal part. From FIG. 14, it can be seen that in the a-like OS, the crystal part becomes larger according to the cumulative dose of electrons related to the acquisition of the TEM image and the like. From FIG. 14, the crystal part (also referred to as the initial nucleus), which was about 1.2 nm in the initial observation by TEM, has a cumulative electron (e ⁇ ) irradiation dose of 4.2 ⁇ 10 8 e ⁇ / nm. In FIG. 2 , it can be seen that the crystal has grown to a size of about 1.9 nm.
- FIG. 14 indicates that the crystal part sizes of the nc-OS and the CAAC-OS are approximately 1.3 nm and 1.8 nm, respectively, regardless of the cumulative electron dose.
- a Hitachi transmission electron microscope H-9000NAR was used for electron beam irradiation and TEM observation.
- the electron beam irradiation conditions were an acceleration voltage of 300 kV, a current density of 6.7 ⁇ 10 5 e ⁇ / (nm 2 ⁇ s), and an irradiation region diameter of 230 nm.
- the crystal part may be grown by electron irradiation.
- the crystal part is hardly grown by electron irradiation. That is, it can be seen that the a-like OS has an unstable structure as compared with the nc-OS and the CAAC-OS.
- the a-like OS has a lower density than the nc-OS and the CAAC-OS.
- the density of the a-like OS is 78.6% or more and less than 92.3% of the density of the single crystal having the same composition.
- the density of the nc-OS and the density of the CAAC-OS are 92.3% or more and less than 100% of the density of the single crystal having the same composition.
- An oxide semiconductor having a density of less than 78% of the single crystal is difficult to form.
- the density of single crystal InGaZnO 4 having a rhombohedral structure is 6.357 g / cm 3 .
- the density of a-like OS is 5.0 g / cm 3 or more and less than 5.9 g / cm 3.
- the density of the nc-OS and the density of the CAAC-OS is 5.9 g / cm 3 or more and 6.3 g / less than cm 3 .
- oxide semiconductors have various structures and various properties.
- the oxide semiconductor may be a stacked film including two or more of an amorphous oxide semiconductor, an a-like OS, an nc-OS, and a CAAC-OS, for example.
- oxygen vacancies (Vo) in the oxide semiconductor, impurities in the oxide semiconductor, and the like can be given.
- the density of defect states is increased when hydrogen is bonded to the oxygen vacancies (this state is also referred to as VoH).
- the density of defect states is increased due to the impurities. Therefore, the carrier density of an oxide semiconductor can be controlled by controlling the density of defect states in the oxide semiconductor.
- the object is to suppress a negative shift in the threshold voltage of the transistor or to reduce the off-state current of the transistor, it is preferable to reduce the carrier density of the oxide semiconductor.
- the impurity concentration in the oxide semiconductor may be reduced and the defect state density may be reduced.
- a low impurity concentration and a low density of defect states are referred to as high purity intrinsic or substantially high purity intrinsic.
- the carrier density of the high-purity intrinsic oxide semiconductor is less than 8 ⁇ 10 15 cm ⁇ 3 , preferably less than 1 ⁇ 10 11 cm ⁇ 3 , more preferably less than 1 ⁇ 10 10 cm ⁇ 3 , and 1 ⁇ 10 What is necessary is just to be -9 cm ⁇ -3 > or more.
- the carrier density of the oxide semiconductor for the purpose of improving the on-state current of the transistor or improving the field-effect mobility of the transistor, it is preferable to increase the carrier density of the oxide semiconductor.
- the impurity concentration of the oxide semiconductor may be slightly increased or the defect state density of the oxide semiconductor may be slightly increased.
- the band gap of the oxide semiconductor is preferably made smaller.
- an oxide semiconductor with a slightly high impurity concentration or a slightly high defect state density can be regarded as intrinsic in the range where the on / off ratio of the Id-Vg characteristics of the transistor can be obtained.
- an oxide semiconductor having a high electron affinity and a reduced band gap and, as a result, an increased density of thermally excited electrons (carriers) can be regarded as substantially intrinsic. Note that in the case where an oxide semiconductor having higher electron affinity is used, the threshold voltage of the transistor becomes lower.
- the oxide semiconductor whose carrier density is increased is slightly n-type. Therefore, an oxide semiconductor with an increased carrier density may be referred to as “Slightly-n”.
- the carrier density of the substantially intrinsic oxide semiconductor is preferably 1 ⁇ 10 5 cm ⁇ 3 or more and less than 1 ⁇ 10 18 cm ⁇ 3, more preferably 1 ⁇ 10 7 cm ⁇ 3 or more and 1 ⁇ 10 17 cm ⁇ 3 or less.
- 1 ⁇ 10 9 cm ⁇ 3 or more and 5 ⁇ 10 16 cm ⁇ 3 or less are more preferable, 1 ⁇ 10 10 cm ⁇ 3 or more and 1 ⁇ 10 16 cm ⁇ 3 or less are more preferable, and 1 ⁇ 10 11 cm ⁇ 3 or more.
- 1 ⁇ 10 15 cm ⁇ 3 or less is more preferable.
- the insulating film 514 and the insulating film 516 have a function of supplying oxygen to the oxide semiconductor film 508.
- the insulating film 518 functions as a protective insulating film and a second gate insulating film of the transistor 500.
- the insulating film 514 and the insulating film 516 contain oxygen.
- the insulating film 514 is an insulating film that can transmit oxygen. Note that the insulating film 514 also functions as a damage reducing film for the oxide semiconductor film 508 when an insulating film 516 to be formed later is formed.
- silicon oxide, silicon oxynitride, or the like with a thickness of 5 nm to 150 nm, preferably 5 nm to 50 nm can be used.
- the insulating film 514 preferably has a small amount of defects.
- the insulating film 514 can be formed using an oxide insulating film having a low level density due to nitrogen oxides. Note that the level density caused by the nitrogen oxide is formed between the energy at the upper end of the valence band (E V_OS ) of the oxide semiconductor film and the energy at the lower end of the conduction band of the oxide semiconductor film (E C_OS ). There are cases where it can be done.
- the oxide insulating film a silicon oxynitride film with a low emission amount of nitrogen oxide, an aluminum oxynitride film with a low emission amount of nitrogen oxide, or the like can be used.
- a silicon oxynitride film that emits less nitrogen oxide is a film that releases more ammonia than nitrogen oxide in a temperature programmed desorption gas analysis method, and typically releases ammonia molecules.
- the amount is 1 ⁇ 10 18 molecules / cm 3 or more and 5 ⁇ 10 19 molecules / cm 3 or less.
- the amount of ammonia released is the amount released by heat treatment at a film surface temperature of 50 ° C. to 650 ° C., preferably 50 ° C. to 550 ° C.
- Nitrogen oxide typically NO 2 or NO forms a level in the insulating film 514 or the like.
- the level is located in the energy gap of the oxide semiconductor film 508. Therefore, when nitrogen oxide diffuses to the interface between the insulating film 514 and the oxide semiconductor film 508, the level may trap electrons on the insulating film 514 side. As a result, trapped electrons remain in the vicinity of the interface between the insulating film 514 and the oxide semiconductor film 508, so that the threshold voltage of the transistor is shifted in the positive direction.
- Nitrogen oxide reacts with ammonia and oxygen in heat treatment. Since nitrogen oxide contained in the insulating film 514 reacts with ammonia contained in the insulating film 516 in the heat treatment, nitrogen oxide contained in the insulating film 514 is reduced. Therefore, electrons are hardly trapped at the interface between the insulating film 514 and the oxide semiconductor film 508.
- the insulating film 514 is measured with an ESR of 100 K or less by heat treatment in a transistor manufacturing process, typically less than 400 ° C. or less than 375 ° C. (preferably, 340 ° C. to 360 ° C.).
- a first signal having a g value of 2.037 to 2.039, a second signal having a g value of 2.001 to 2.003, and a g value of 1.964 to 1.966 The following third signal is observed.
- the split width of the first signal and the second signal and the split width of the second signal and the third signal are about 5 mT in the X-band ESR measurement.
- a first signal having a g value of 2.037 or more and 2.039 or less a second signal having a g value of 2.001 or more and 2.003 or less, and a first signal having a g value of 1.964 or more and 1.966 or less.
- the total density of the spins of the three signals is less than 1 ⁇ 10 18 spins / cm 3 , typically 1 ⁇ 10 17 spins / cm 3 or more and less than 1 ⁇ 10 18 spins / cm 3 .
- a third signal of .966 or less corresponds to a signal caused by nitrogen oxides (NO x , x is 0 or more and 2 or less, preferably 1 or more and 2 or less).
- nitrogen oxides include nitrogen monoxide and nitrogen dioxide. That is, a first signal having a g value of 2.037 or more and 2.039 or less, a second signal having a g value of 2.001 or more and 2.003 or less, and a first signal having a g value of 1.964 or more and 1.966 or less. It can be said that the smaller the total density of the signal spins of 3, the smaller the content of nitrogen oxide contained in the oxide insulating film.
- the oxide insulating film has a nitrogen concentration measured by SIMS of 6 ⁇ 10 20 atoms / cm 3 or less.
- oxide insulating film By forming the oxide insulating film using a PECVD method using silane and dinitrogen monoxide with a substrate temperature of 220 ° C. or higher and 350 ° C. or lower, a dense and high hardness film is formed. be able to.
- the insulating film 516 is formed using an oxide insulating film containing more oxygen than that in the stoichiometric composition. Part of oxygen is released by heating from the oxide insulating film containing oxygen in excess of that in the stoichiometric composition.
- An oxide insulating film containing oxygen in excess of the stoichiometric composition has an oxygen release amount of 1.0 ⁇ 10 19 atoms / cm 3 or more in terms of oxygen atoms in TDS analysis.
- the oxide insulating film is preferably 3.0 ⁇ 10 20 atoms / cm 3 or more.
- the surface temperature of the film at the time of the TDS analysis is preferably in the range of 100 ° C. to 700 ° C., or 100 ° C. to 500 ° C.
- silicon oxide, silicon oxynitride, or the like with a thickness of 30 nm to 500 nm, preferably 50 nm to 400 nm can be used.
- the insulating film 516 preferably has a small amount of defects.
- the insulating film 514 and the insulating film 516 can be formed using the same kind of insulating film; therefore, the interface between the insulating film 514 and the insulating film 516 cannot be clearly confirmed in some cases. Therefore, in this embodiment, the interface between the insulating film 514 and the insulating film 516 is illustrated by a broken line. Note that although a two-layer structure of the insulating film 514 and the insulating film 516 has been described in this embodiment mode, the present invention is not limited thereto, and for example, a single-layer structure of the insulating film 514 or the insulating film 516 may be employed.
- the insulating film 518 has a function of blocking oxygen, hydrogen, water, alkali metal, alkaline earth metal, or the like. By providing the insulating film 518, diffusion of oxygen from the oxide semiconductor film 508 to the outside, diffusion of oxygen contained in the insulating film 514 and the insulating film 516, and diffusion from the outside to the oxide semiconductor film 508 are performed. Intrusion of hydrogen, water, etc. can be prevented.
- a nitride insulating film can be used as the insulating film 518.
- the nitride insulating film include silicon nitride, silicon nitride oxide, aluminum nitride, and aluminum nitride oxide. In particular, it is preferable to use a silicon nitride oxide film or a silicon nitride film as the insulating film 518 because diffusion of oxygen to the outside can be suppressed.
- An oxide insulating film having a blocking effect of oxygen, hydrogen, water, or the like is provided as the insulating film 518 instead of the nitride insulating film having a blocking effect of oxygen, hydrogen, water, alkali metal, alkaline earth metal, or the like. Also good.
- the oxide insulating film having a blocking effect of oxygen, hydrogen, water, and the like include aluminum oxide, aluminum oxynitride, gallium oxide, gallium oxynitride, yttrium oxide, yttrium oxynitride, hafnium oxide, and hafnium oxynitride.
- an oxide insulating film having a blocking effect of oxygen, hydrogen, water, or the like is particularly preferably aluminum oxide, hafnium oxide, or yttrium oxide.
- a conductive film is formed over the substrate 502, and the conductive film is processed by a lithography process and an etching process, so that a conductive film 504 functioning as a gate electrode is formed.
- an insulating film 506 and an insulating film 507 functioning as gate insulating films are formed over the conductive film 504 (see FIG. 15).
- the oxide semiconductor film 509 is formed over the insulating film 507 at a first temperature by a sputtering method, for example. Note that as the oxide semiconductor film 509, an insulating film 509a is formed, and then an oxide semiconductor film 509b is formed (see FIG. 16).
- the first temperature at which the oxide semiconductor film 509 is formed is from room temperature to less than 340 ° C., preferably from room temperature to 300 ° C., more preferably from 100 ° C. to 250 ° C., and even more preferably from 100 ° C. to 200 ° C. is there.
- the crystallinity of the oxide semiconductor film 509 can be increased.
- the base 502 may be distorted when the first temperature is set to 150 ° C. or higher and lower than 340 ° C. Therefore, when a large glass substrate is used, distortion of the glass substrate can be suppressed by setting the first temperature to 100 ° C. or higher and lower than 150 ° C.
- the substrate temperatures at the time of forming the insulating film 509 a and the oxide semiconductor film 509 b may be the same or different. Note that it is preferable to set the substrate temperatures of the insulating film 509a and the oxide semiconductor film 509b to be the same because the manufacturing cost can be reduced.
- the oxide semiconductor film 509 is formed by a sputtering method
- a rare gas typically argon
- oxygen, a rare gas, and a mixed gas of oxygen are used as the sputtering gas as appropriate.
- a mixed gas it is preferable to increase the oxygen gas ratio relative to the rare gas. It is also necessary to increase the purity of the sputtering gas.
- oxygen gas or argon gas used as a sputtering gas is a gas having a dew point of ⁇ 40 ° C. or lower, preferably ⁇ 80 ° C. or lower, more preferably ⁇ 100 ° C. or lower, more preferably ⁇ 120 ° C. or lower.
- the chamber in the sputtering apparatus is subjected to high vacuum (5 ⁇ 10 ⁇ 7 Pa or more) using an adsorption-type vacuum exhaust pump such as a cryopump so as to remove water or the like which is an impurity for the oxide semiconductor film 509 as much as possible. It is preferable to exhaust the air (up to about 1 ⁇ 10 ⁇ 4 Pa or less). Alternatively, it is preferable to combine a turbo molecular pump and a cold trap so that a gas, particularly a gas containing carbon or hydrogen, does not flow backward from the exhaust system into the chamber.
- the oxide semiconductor film 509 is processed to form an island-shaped oxide semiconductor film 508.
- the insulating film 509a is an island-shaped oxide semiconductor film 508a
- the oxide semiconductor film 509b is an island-shaped oxide semiconductor film 508b (see FIG. 17).
- a conductive film 512 to be a source electrode and a drain electrode is formed over the insulating film 507 and the oxide semiconductor film 508 without performing a step performed at a temperature higher than the first temperature (see FIG. 18). ).
- a mask 536a and a mask 536b are formed in desired regions over the conductive film 512 (see FIG. 19).
- a photosensitive resin film is applied over the conductive film 512, and the mask 536a and the mask 536b are formed by patterning the photosensitive resin film by a lithography process.
- the conductive film 512 is processed using the etchant 538 from above the conductive film 512 and the masks 536a and 536b, thereby forming the conductive films 512a and 512b separated from each other (see FIG. 20). .
- the conductive film 512 is processed using a dry etching apparatus.
- the method for forming the conductive film 512 is not limited to this, and the conductive film 512 and the oxide semiconductor film 508b may be processed using a wet etching apparatus by using a chemical solution for the etchant 538, for example. .
- a finer pattern can be formed by processing the conductive film 512 by using a dry etching apparatus than by processing the conductive film 512 by using a wet etching apparatus.
- the manufacturing cost can be reduced by processing the conductive film 512 using a wet etching apparatus rather than processing the conductive film 512 using a dry etching apparatus.
- the surface of the oxide semiconductor film 508b is cleaned using the etchant 539 over the oxide semiconductor film 508b, the conductive films 512a and 512b, and the masks 536a and 536b (see FIG. 21).
- Examples of the above-described cleaning method include cleaning using a chemical solution such as phosphoric acid.
- a chemical solution such as phosphoric acid
- impurities attached to the surface of the oxide semiconductor film 508b eg, elements contained in the conductive films 512a and 512b
- the cleaning is not necessarily performed, and in some cases, the cleaning may not be performed.
- a region of the oxide semiconductor film 508b exposed from the conductive film 512a and the conductive film 512b is thinner than the oxide semiconductor film 508a.
- FIG. 22 is a cross-sectional view illustrating an example of a semiconductor device.
- 22A and 22B illustrate an example of the case where the oxide semiconductor film 508b of the transistor 500 illustrated in FIGS. 22C and 22D, the oxide semiconductor film 508b is formed to be thinner than the oxide semiconductor film 508a in advance, and is a film in a region exposed from the conductive films 512a and 512b.
- the thickness may be the same as that of the transistor 500 illustrated in FIG.
- the oxide semiconductor film 508b is formed to be thinner than the oxide semiconductor film 508a in advance, and further insulated over the oxide semiconductor film 508b and the insulating film 507.
- a film 519 may be formed.
- a contact hole for electrically connecting the oxide semiconductor film 508b to the conductive film 512a and the conductive film 512b is formed in the insulating film 519.
- the insulating film 519 can be formed using a material and a formation method similar to those of the insulating film 514.
- the oxide semiconductor film 508 has a stacked structure of the oxide semiconductor film 508a and the oxide semiconductor film 508b (see FIG. 23).
- a barrier film 531 is formed (see FIG. 24).
- the insulating film 516 is preferably formed continuously without being exposed to the air.
- the insulating film 514 and the insulating film are formed by continuously forming the insulating film 516 by adjusting one or more of the flow rate, pressure, high frequency power, and substrate temperature of the source gas without opening to the atmosphere.
- the concentration of impurities derived from atmospheric components can be reduced at the interface of 516, and oxygen contained in the insulating film 514 and the insulating film 516 can be moved to the oxide semiconductor film 508, so that oxygen in the oxide semiconductor film 508 can be reduced. It is possible to reduce the amount of defects.
- a silicon oxynitride film can be formed by a PECVD method.
- a deposition gas and an oxidation gas containing silicon as the source gas.
- the deposition gas containing silicon include silane, disilane, trisilane, and fluorinated silane.
- the oxidizing gas include dinitrogen monoxide and nitrogen dioxide.
- the flow rate of the oxidizing gas is more than 20 times and less than 100 times, preferably 40 times or more and 80 times or less, and the pressure in the processing chamber is less than 100 Pa, preferably 50 Pa or less with respect to the flow rate of the deposition gas.
- the insulating film 514 includes nitrogen and has a small amount of defects.
- a substrate placed in a processing chamber evacuated by a PECVD apparatus is held at 180 ° C. or higher and 350 ° C. or lower, and a source gas is introduced into the processing chamber so that the pressure in the processing chamber is 100 Pa or higher. 250Pa or less, more preferably not more than 200Pa above 100 Pa, the processing to electrodes provided in the indoor 0.17 W / cm 2 or more 0.5 W / cm 2 or less, more preferably 0.25 W / cm 2 or more 0.35 W / cm 2
- a silicon oxide film or a silicon oxynitride film is formed under the following conditions for supplying high-frequency power.
- the decomposition efficiency of the source gas in plasma is increased, oxygen radicals are increased, and the source gas is oxidized. Therefore, the oxygen content in the insulating film 516 is higher than the stoichiometric composition.
- the bonding force between silicon and oxygen is weak, part of oxygen in the film is released by heat treatment in a later step. As a result, an oxide insulating film containing more oxygen than that in the stoichiometric composition and from which part of oxygen is released by heating can be formed.
- the insulating film 514 serves as a protective film of the oxide semiconductor film 508. Therefore, the insulating film 516 can be formed using high-frequency power with high power density while reducing damage to the oxide semiconductor film 508.
- the amount of defects in the insulating film 516 can be reduced by increasing the flow rate of the deposition gas containing silicon with respect to the oxidizing gas under the deposition conditions of the insulating film 516.
- An oxide insulating film with a small amount of defects that is preferably 1.5 ⁇ 10 17 spins / cm 3 or less can be formed. As a result, the reliability of the transistor can be improved.
- heat treatment may be performed after the insulating film 514 and the insulating film 516 are formed (in other words, after the insulating film 516 is formed and before the barrier film 531 is formed).
- nitrogen oxides contained in the insulating films 514 and 516 can be reduced.
- part of oxygen contained in the insulating films 514 and 516 can be moved to the oxide semiconductor film 508, so that the amount of oxygen vacancies contained in the oxide semiconductor film 508 can be reduced.
- the temperature of the heat treatment for the insulating film 514 and the insulating film 516 is typically up to 400 ° C., preferably less than 375 ° C., more preferably 150 ° C. or more and less than 360 ° C., more preferably 350 ° C. or more and 360 ° C.
- the heat treatment may be performed in an atmosphere of nitrogen, oxygen, ultra-dry air (air with a water content of 20 ppm or less, preferably 1 ppm or less, preferably 10 ppb or less), or a rare gas (such as argon or helium). Note that it is preferable that hydrogen, water, and the like be not contained in the nitrogen, oxygen, ultra-dry air, or the rare gas.
- An electric furnace, an RTA apparatus, or the like can be used for the heat treatment.
- the barrier film 531 includes oxygen and a metal (at least one selected from indium, zinc, titanium, aluminum, tungsten, tantalum, molybdenum, hafnium, and yttrium).
- a metal at least one selected from indium, zinc, titanium, aluminum, tungsten, tantalum, molybdenum, hafnium, and yttrium.
- indium tin oxide also referred to as ITO: Indium Tin Oxide
- ITSO indium tin silicon oxide
- indium oxide is preferable because coverage with unevenness is favorable.
- the barrier film 531 can be formed using, for example, a sputtering method.
- the thickness of the barrier film 531 is preferably 1 nm to 20 nm, more preferably 2 nm to 10 nm.
- ITSO with a thickness of 5 nm is formed as the barrier film 531.
- oxygen 540 is added to the insulating film 516 through the barrier film 531.
- oxygen added to the insulating film 516 is schematically represented as oxygen 540a. (See FIG. 25).
- oxygen 540 may be added to the insulating film 514.
- the oxygen 540 As a method for adding oxygen 540 to the insulating film 516 through the barrier film 531, there are an ion doping method, an ion implantation method, a plasma treatment method, and the like.
- the oxygen 540 include excess oxygen or oxygen radicals.
- the oxygen 540 can be effectively added to the insulating film 516 by applying a bias to the substrate side.
- the bias for example, the power density may be 1 W / cm 2 or more and 5 W / cm 2 or less.
- the barrier film 531 or part of the barrier film 531 and part of the insulating film 516 are removed by the etchant 542 (see FIG. 26).
- a dry etching method, a wet etching method, a method in which the dry etching method and the wet etching method are combined, or the like can be given.
- the etchant 542 is an etching gas in the case of the dry etching method and a chemical solution in the case of the wet etching method.
- the barrier film 531 is removed using a wet etching method.
- an insulating film 518 is formed over the insulating film 516 (see FIG. 27).
- the substrate temperature is up to 400 ° C., preferably less than 375 ° C., more preferably 340 ° C. to 360 ° C.
- the substrate temperature in the formation of the insulating film 518 is in the above range, the above excess oxygen or the above oxygen radical can be diffused into the oxide semiconductor film 508.
- a silicon nitride film is formed as the insulating film 518 by a PECVD method
- a deposition gas containing silicon, nitrogen, and ammonia as a source gas.
- ammonia is dissociated in the plasma and active species are generated.
- the active species breaks the bond between silicon and hydrogen contained in the deposition gas containing silicon and the triple bond of nitrogen. As a result, the bonding between silicon and nitrogen is promoted, the bonding between silicon and hydrogen is small, the number of defects is small, and a dense silicon nitride film can be formed.
- the flow rate ratio of nitrogen to ammonia is preferably 5 to 50 times and 10 to 50 times.
- heat treatment may be performed after the insulating film 518 is formed.
- excess oxygen or oxygen radicals contained in the insulating film 516 can be diffused into the oxide semiconductor film 508 so that oxygen vacancies in the oxide semiconductor film 508 can be filled.
- excess oxygen or oxygen radicals contained in the insulating film 516 are diffused into the oxide semiconductor film 508 so that oxygen vacancies in the oxide semiconductor film 508 are filled. Can do.
- a mask is formed over the insulating film 518 by a lithography process, and a contact hole 542c is formed in a desired region of the insulating film 514, the insulating film 516, and the insulating film 518 so as to reach the conductive film 512b (see FIG. 28). ).
- a conductive film 520 is formed over the insulating film 518 so as to cover the contact hole 542c (see FIG. 29).
- a mask is formed over the conductive film 520 by a lithography process, and the conductive film 520 is processed into a desired shape, so that a conductive film 520a and a conductive film 520b are formed (see FIG. 30).
- a method for forming the conductive films 520a and 520b a dry etching method, a wet etching method, a method in which the dry etching method and the wet etching method are combined, or the like can be given.
- various films such as the conductive film, the insulating film, and the oxide semiconductor film described above are not limited to the above-described methods, but other methods such as a thermal CVD method or atomic layer deposition (ALD: Atomic Layer). You may form by the Deposition method.
- An example of the thermal CVD method is a MOCVD (Metal Organic Chemical Vapor Deposition) method.
- the thermal CVD method has an advantage that defects due to plasma damage are not generated because it is a film forming method that does not use plasma.
- film formation may be performed by sending a source gas and an oxidant into the chamber at the same time, making the inside of the chamber under atmospheric pressure or reduced pressure, reacting in the vicinity of the substrate or on the substrate and depositing on the substrate. .
- film formation may be performed by setting the inside of the chamber to atmospheric pressure or reduced pressure, sequentially introducing source gases for reaction into the chamber, and repeating the order of introducing the gases.
- each switching valve also referred to as a high-speed valve
- An active gas such as argon or nitrogen
- a second source gas is introduced.
- the inert gas becomes a carrier gas, and the inert gas may be introduced at the same time when the second raw material gas is introduced.
- the second raw material gas may be introduced after the first raw material gas is exhausted by evacuation.
- the first source gas is adsorbed on the surface of the substrate to form a first layer, reacts with a second source gas introduced later, and the second layer is stacked on the first layer.
- a thin film is formed.
- the thermal CVD method such as the MOCVD method can form various films such as the conductive film, the insulating film, the oxide semiconductor film, and the metal oxide film of the above embodiment.
- an In—Ga—ZnO film is formed.
- trimethylindium, trimethylgallium, and dimethylzinc are used.
- the chemical formula of trimethylindium is In (CH 3 ) 3 .
- the chemical formula of trimethylgallium is Ga (CH 3 ) 3 .
- the chemical formula of dimethylzinc is Zn (CH 3 ) 2 .
- Triethylgallium (chemical formula Ga (C 2 H 5 ) 3 ) can be used instead of trimethylgallium, and diethylzinc (chemical formula Zn (C 2 H 5 ) is used instead of dimethylzinc. 2 ) can also be used.
- hafnium oxide film when a hafnium oxide film is formed by a film forming apparatus using ALD, a raw material obtained by vaporizing a liquid (hafnium amide such as hafnium alkoxide or tetrakisdimethylamide hafnium (TDMAH)) containing a solvent and a hafnium precursor compound.
- hafnium amide such as hafnium alkoxide or tetrakisdimethylamide hafnium (TDMAH)
- TDMAH tetrakisdimethylamide hafnium
- Two types of gas, ozone and ozone (O 3 ) are used as an oxidizing agent.
- the chemical formula of tetrakisdimethylamide hafnium is Hf [N (CH 3 ) 2 ] 4 .
- Other material liquids include tetrakis (ethylmethylamide) hafnium.
- a source gas obtained by vaporizing a liquid such as trimethylaluminum (TMA)
- TMA trimethylaluminum
- H 2 a solvent and an aluminum precursor compound
- gases of O Two kinds of gases of O are used.
- trimethylaluminum is Al (CH 3 ) 3 .
- Other material liquids include tris (dimethylamido) aluminum, triisobutylaluminum, aluminum tris (2,2,6,6-tetramethyl-3,5-heptanedionate) and the like.
- hexachlorodisilane is adsorbed on the film formation surface, chlorine contained in the adsorbate is removed, and an oxidizing gas (O 2 , monoxide) Dinitrogen) radicals are supplied to react with the adsorbate.
- oxidizing gas O 2 , monoxide
- tungsten film is formed by a film forming apparatus using ALD
- an initial tungsten film is formed by repeatedly introducing WF 6 gas and B 2 H 6 gas successively, and then WF 6 gas and H 2.
- a tungsten film is formed using a gas.
- SiH 4 gas may be used instead of B 2 H 6 gas.
- an oxide semiconductor film such as an In—Ga—ZnO film is formed by a film formation apparatus using ALD
- In (CH 3 ) 3 gas and O 3 gas are sequentially introduced and In—O is sequentially introduced.
- a GaO layer is formed using Ga (CH 3 ) 3 gas and O 3 gas
- a ZnO layer is formed using Zn (CH 3 ) 2 gas and O 3 gas. Note that the order of these layers is not limited to this example.
- a mixed compound layer such as an In—Ga—O layer, an In—Zn—O layer, or a Ga—Zn—O layer may be formed by mixing these gases.
- the H 2 O gas obtained by bubbling with an inert gas such as Ar may be used instead of the O 3 gas obtained by bubbling with an inert gas such as Ar, but better to use an O 3 gas containing no H are preferred.
- In (C 2 H 5 ) 3 gas may be used instead of In (CH 3 ) 3 gas.
- Ga (C 2 H 5 ) 3 gas may be used instead of Ga (CH 3 ) 3 gas.
- Zn (CH 3 ) 2 gas may be used.
- the transistor 500 illustrated in FIG. 4 can be manufactured.
- a metal oxide film as the barrier film 531, and to form aluminum oxide, hafnium oxide, or yttrium oxide as the metal oxide film.
- the barrier film 531 In the case where aluminum oxide, hafnium oxide, or yttrium oxide is formed as the barrier film 531 by a sputtering method, it is preferable that at least oxygen be included as a sputtering gas.
- the oxygen becomes oxygen radicals in the plasma, and either or both of the oxygen and the oxygen radicals are added to the insulating film 516 in some cases. is there. Therefore, the step of adding oxygen 540 illustrated in FIG. 25 is not necessarily performed. In other words, when the barrier film 531 is formed, the oxygen addition treatment and the barrier film 531 can be simultaneously formed.
- the barrier film 531 has a function of adding oxygen when the first barrier film is formed (particularly at the initial stage of film formation), but has a function of blocking oxygen after the barrier film 531 is formed. .
- the barrier film 531 for example, when aluminum oxide is formed by a sputtering method, a mixed layer may be formed in the vicinity of the interface between the insulating film 516 and the barrier film 531.
- the insulating film 516 is a silicon oxynitride film
- Al x Si y O z can be formed as the mixed layer.
- the barrier film 531 In the case where aluminum oxide, hafnium oxide, or yttrium oxide is used for the barrier film 531, aluminum oxide, hafnium oxide, and yttrium oxide have high insulating properties and high oxygen barrier properties. Therefore, the step of removing the barrier film 531 shown in FIG. 26 and the step of forming the insulating film 518 shown in FIG. Therefore, the barrier film 531 has a function similar to that of the insulating film 518.
- the substrate temperature at the time of forming the barrier film 531 is up to 400 ° C., preferably less than 375 ° C., more preferably 340 ° C. or more and 360 ° C. or less, so that excess added to the insulating film 516 is added. Oxygen or oxygen radicals can be diffused into the oxide semiconductor film 508. Alternatively, when heat treatment is performed up to 400 ° C., preferably less than 375 ° C., more preferably 340 ° C. to 360 ° C. after the barrier film 531 is formed, excess oxygen or oxygen radicals added to the insulating film 516 Can be diffused into the oxide semiconductor film 508.
- the manufacturing process of the semiconductor device can be shortened, and the manufacturing cost can be suppressed.
- a semiconductor device 700 illustrated in FIG. 31 includes a lead wiring portion 711, a region 722, a pixel portion 702, a source driver 704, and an FPC terminal portion 708.
- the lead wiring portion 711 includes a wiring 710.
- the pixel portion 702 includes a transistor 750 and a capacitor 790.
- the source driver 704 includes a transistor 752.
- the FPC terminal portion 708 includes a connection electrode 760, an anisotropic conductive film 780, and an FPC 716.
- the transistor 750 and the transistor 752 the transistor described in Embodiment 2 can be used.
- the transistor 750 is provided over the scan line 717 illustrated in FIGS. A part of the scan line 717 functions as a first gate electrode of the transistor 750. In addition, part of the wiring 718 provided so as to overlap with the scan line 717 functions as a second gate electrode of the transistor 750.
- the scan line 717 and the wiring 718 are electrically connected to each other through a contact hole 719 formed in the region 722.
- the transistor used in this embodiment includes an oxide semiconductor film which is highly purified and suppresses formation of oxygen vacancies.
- the transistor can reduce a current value in an off state (off-state current value). Therefore, the holding time of an electric signal such as an image signal can be increased, and the writing interval can be set longer in the power-on state. Therefore, since the frequency of the refresh operation can be reduced, there is an effect of suppressing power consumption.
- the transistor used in this embodiment can be driven at high speed because high field-effect mobility can be obtained.
- the transistor in the pixel portion and the transistor in the driver circuit portion can be formed over the same substrate. That is, since it is not necessary to use a semiconductor device formed of a silicon wafer or the like as a separate drive circuit, the number of parts of the semiconductor device can be reduced.
- a high-quality image can be provided by using a transistor that can be driven at high speed.
- the capacitor 790 has a structure having a dielectric between a pair of electrodes. More specifically, a conductive film formed in the same step as the scan line 717 is used as one electrode of the capacitor 790, and the other electrode of the capacitor 790 functions as a source electrode and a drain electrode of the transistor 750. A conductive film is used. As the dielectric sandwiched between the pair of electrodes, an insulating film functioning as a gate insulating film of the transistor 750 is used.
- an insulating film 764, an insulating film 766, an insulating film 768, and a planarization insulating film 770 are provided over the transistor 750, the transistor 752, and the capacitor 790.
- the insulating film 764, the insulating film 766, and the insulating film 768 can be formed using a material and a manufacturing method similar to those of the insulating film 514, the insulating film 516, and the insulating film 518 described in Embodiment 2, respectively.
- the planarization insulating film 770 an organic material having heat resistance such as polyimide resin, acrylic resin, polyimide amide resin, benzocyclobutene resin, polyamide resin, or epoxy resin can be used. Note that the planarization insulating film 770 may be formed by stacking a plurality of insulating films formed using these materials. Further, the planarization insulating film 770 may be omitted.
- the wiring 710 is formed in the same step as the conductive film functioning as the source electrode and the drain electrode of the transistor 750 and the transistor 752. For example, when a material containing a copper element is used as the wiring 710, the wiring resistance can be reduced.
- connection electrode 760 is formed in the same step as the conductive film functioning as the source electrode and the drain electrode of the transistor 750 and the transistor 752.
- the connection electrode 760 is electrically connected to a terminal included in the FPC 716 through an anisotropic conductive film 780.
- a structure body 778 is provided between the first substrate 701 and the second substrate 705.
- the structure body 778 is a columnar spacer obtained by selectively etching an insulating film, and is provided to control the distance (cell gap) between the first substrate 701 and the second substrate 705. Note that a spherical spacer may be used as the structure body 778.
- the structure body 778 is provided on the first substrate 701 side; however, the present invention is not limited to this.
- the structure 778 may be provided on the second substrate 705 side, or the structure 778 may be provided on both the first substrate 701 and the second substrate 705.
- a light-blocking film 738 functioning as a black matrix, a colored layer 736 functioning as a color filter, and an insulating film 734 in contact with the light-blocking film 738 and the colored layer 736 are provided on the second substrate 705 side.
- the semiconductor device 700 includes a liquid crystal element 775.
- the liquid crystal element 775 includes a conductive film 772, a conductive film 774, and a liquid crystal layer 776.
- the conductive film 774 is provided on the second substrate 705 side and functions as a counter electrode.
- the semiconductor device 700 can display an image by controlling transmission and non-transmission of light by changing the alignment state of the liquid crystal layer 776 depending on voltages applied to the conductive films 772 and 774.
- a protrusion 744 is provided over the conductive film 774.
- the conductive film 772 is connected to a conductive film functioning as a source electrode and a drain electrode of the transistor 750.
- the conductive film 772 is formed over the planarization insulating film 770 and functions as a pixel electrode, that is, one electrode of a display element.
- the conductive film 772 functions as a reflective electrode.
- the semiconductor device 700 is a so-called reflective color liquid crystal display device that displays light through a colored layer 736 by reflecting light with a conductive film 772 using external light.
- a conductive film that transmits visible light or a conductive film that reflects visible light can be used.
- a material containing one kind selected from indium (In), zinc (Zn), and tin (Sn) may be used.
- a material containing aluminum or silver is preferably used.
- a conductive film that reflects visible light is used as the conductive film 772.
- the conductive film may have a stacked structure.
- an aluminum film having a thickness of 100 nm is formed in the lower layer, and a silver alloy film (for example, an alloy film containing silver, palladium, and copper) is formed in the upper layer.
- the adhesion between the base film and the conductive film 772 can be improved.
- (3) The cross-sectional shape of the conductive film 772 can be a favorable shape (for example, a tapered shape).
- the reason for (3) is that the aluminum film is slower than the silver alloy film, or is lower than the silver alloy film when the lower aluminum film is exposed after the upper silver alloy film is etched. This is because electrons are extracted from aluminum, which is a metal having a high ionization tendency, in other words, etching of the silver alloy film is suppressed, and etching of the lower aluminum film is accelerated.
- the semiconductor device 700 illustrated in FIG. 31 is illustrated as a reflective color liquid crystal display device, the present invention is not limited thereto.
- the conductive film 772 may be a transmissive color liquid crystal display device by using a light-transmitting conductive film in visible light.
- a pair of electrodes included in the capacitor 790 is provided in a position not overlapping with the conductive film 772.
- each layer provided in the path of light that enters from the substrate 701 and exits through the liquid crystal element 775 and the colored layer 736 is preferably a layer that transmits visible light.
- an optical member such as a polarizing member, a retardation member, or an antireflection member may be provided as appropriate.
- a polarizing member such as a polarizing member, a retardation member, or an antireflection member
- circularly polarized light using a polarizing substrate and a retardation substrate may be used.
- a backlight, a sidelight, or the like may be used as the light source.
- FIG. 32A includes a transistor 1200, a transistor 600, and a capacitor 1400, which are circuit diagrams of a cell 1000 included in the memory device in this embodiment.
- the transistor 600 uses an oxide semiconductor, off-state current is small. For this reason, it is possible to retain the stored contents for a long time in a specific notebook of the semiconductor device. That is, a refresh operation is not required or the frequency of the refresh operation can be extremely low, so that the semiconductor device with low power consumption is obtained.
- the first wiring 1001 is electrically connected to one of a source electrode and a drain electrode of the transistor 1200
- the second wiring 1002 is electrically connected to the other of the source electrode and the drain electrode of the transistor 1200.
- the third wiring 1003 is electrically connected to one of a source electrode and a drain electrode of the transistor 600
- the fourth wiring 1004 is electrically connected to the first gate electrode of the transistor 600.
- the other of the gate electrode of the transistor 1200 and the source or drain electrode of the transistor 600 is electrically connected to one of the electrodes of the capacitor 1400
- the fifth wiring 1005 is electrically connected to the other of the electrodes of the capacitor 1400. It is connected to the.
- the sixth wiring 1006 is electrically connected to the second gate electrode (also referred to as a back gate electrode) of the transistor 600.
- the memory device including the cell 1000 has a characteristic that the potential of the gate of the transistor 1200 can be held, information can be written, held, and read as described below.
- the potential of the fourth wiring 1004 is set to a potential at which the transistor 600 is turned on, so that the transistor 600 is turned on. Accordingly, the potential of the third wiring 1003 is supplied to the node FG electrically connected to one of the gate of the transistor 1200 and the electrode of the capacitor 1400. That is, predetermined charge is supplied to the gate of the transistor 1200 (writing).
- predetermined charge is supplied to the gate of the transistor 1200 (writing).
- the potential of the fourth wiring 1004 is set to a potential at which the transistor 600 is turned off and the transistor 600 is turned off, so that charge is held at the node FG (holding).
- the second wiring 1002 has a charge held in the node FG. Take a potential according to the amount.
- the apparent threshold voltage V th_H in the case where a high level charge is applied to the gate of the transistor 1200 is a low level charge applied to the gate of the transistor 1200.
- the apparent threshold voltage refers to the potential of the fifth wiring 1005 necessary for bringing the transistor 1200 into a “conducting state”.
- the potential of the fifth wiring 1005 can be set to a potential V 0 between V th_H and V th_L .
- the transistor 1200 is turned “on” when the potential of the fifth wiring 1005 is V 0 (> V th_H ).
- the transistor 1200 remains “non-conductive” even when the potential of the fifth wiring 1005 is V 0 ( ⁇ V th_L ). Therefore, by determining the potential of the second wiring 1002, information held in the node FG can be read.
- a potential that causes the transistor 1200 to be “non-conductive” regardless of the charge applied to the node FG, that is, a potential lower than V th_H may be supplied to the fifth wiring 1005.
- the fifth wiring 1005 may be supplied with a potential at which the transistor 1200 is turned “on” regardless of the charge supplied to the node FG, that is, a potential higher than V th_L .
- a cell 1100 illustrated in FIG. 32B is different from the cell 1000 in that the transistor 1200 is not provided. In this case, information can be written and held by the same operation as that of the cell 1000.
- the potential of one electrode of the capacitor 1400 is V
- the capacitance of the capacitor 1400 is C
- the capacitance component of the third wiring 1003 is CB
- the potential of the third wiring 1003 before the charge is redistributed is (CB ⁇ VB0 + CV) / (CB + C). Accordingly, when the potential of one of the electrodes of the capacitor 1400 assumes two states of V1 and V0 (V1> V0) as the cell state, the potential of the third wiring 1003 in the case where the potential V1 is held.
- information can be read by comparing the potential of the third wiring 1003 with a predetermined potential.
- the memory device is a semiconductor device in which the number of rewritable times, which is a problem in the conventional nonvolatile memory, is not limited and the reliability is dramatically improved. Further, since data is written depending on the conductive state and non-conductive state of the transistor, high-speed operation is possible.
- a cell array 1010 in which the cells 1000 shown in FIG. 32A are arranged in a matrix is shown in FIG.
- the wiring 1001 and the wiring 1003 are connected to the wiring 1011, the wiring 1002 is connected to the wiring 1012, the wiring 1004 is connected to the wiring 1014, the wiring 1005 is connected to the wiring 1015, and the wiring 1006 is connected to the wiring 1016. That is, the wiring 1014 is electrically connected to the first gate electrode of the transistor 600, and the wiring 1016 is electrically connected to the second gate electrode of the transistor 600.
- a contact hole for electrically connecting the wiring 1014 and the wiring 1015 to the cell 1000 is formed by electrically connecting the wiring 1014 and the wiring 1015 by a wiring 1017 in a region other than the cell array 1010. There is no need to provide this, so that the density of the cell 1000 can be increased.
- a contact hole may be provided in some of the cells 1000 so that the wiring 1014 and the wiring 1015 are electrically connected.
- a contact hole may be provided in the cell 1000 for each chip.
- the density of the cells 1000 can be increased as compared with the case where contact holes are provided in all the cells 1000.
- FIG. 34 is a cross-sectional view of the cell 1000 corresponding to FIG. Note that FIG. 34A, FIG. 34B, and FIG. 34C are cross-sectional views of different locations.
- the semiconductor device illustrated in FIG. 34 includes a transistor 1200, a transistor 600, and a capacitor 1400.
- the transistor 600 and the capacitor 1400 are provided above the transistor 1200.
- the transistor 1200 is a transistor using the semiconductor substrate 450.
- the transistor 1200 includes a region 472a in the semiconductor substrate 450, a region 472b in the semiconductor substrate 450, an insulating film 462, and a conductive film 454.
- the region 472a and the region 472b function as a source region and a drain region.
- the insulating film 462 functions as a gate insulating film.
- the conductive film 454 functions as a gate electrode. Therefore, the resistance of the channel formation region can be controlled by the potential applied to the conductive film 454. That is, conduction / non-conduction between the region 472a and the region 472b can be controlled by a potential applied to the conductive film 454.
- a single semiconductor substrate such as silicon or germanium, or a compound semiconductor substrate made of silicon carbide, silicon germanium, gallium arsenide, indium phosphide, zinc oxide, or gallium oxide may be used.
- a single crystal silicon substrate is preferably used as the semiconductor substrate 450.
- a semiconductor substrate having an impurity imparting n-type conductivity As the semiconductor substrate 450, a semiconductor substrate having an impurity imparting n-type conductivity is used. However, as the semiconductor substrate 450, a semiconductor substrate having an impurity imparting p-type conductivity may be used. In that case, a well having an impurity imparting n-type conductivity may be provided in a region to be the transistor 1200. Alternatively, the semiconductor substrate 450 may be i-type.
- the upper surface of the semiconductor substrate 450 preferably has a (110) plane. Thus, the on characteristics of the transistor 1200 can be improved.
- the region 472a and the region 472b are regions having an impurity imparting p-type conductivity. In this way, the transistor 1200 constitutes a p-channel transistor.
- the transistor 1200 is separated from an adjacent transistor by the region 460 or the like.
- the region 460 is a region having an insulating property.
- conductive film 34 includes an insulating film 464, an insulating film 466, an insulating film 468, an insulating film 422, a conductive film 480a, a conductive film 480b, a conductive film 480c, a conductive film 478a, and a conductive film.
- the insulating film 422, the insulating film 428, and the insulating film 409 are insulating films having a barrier property. That is, the semiconductor device illustrated in FIG. 34 has a structure in which the transistor 600 is surrounded by an insulating film having a barrier property. Note that one or more of the insulating film 422, the insulating film 428, and the insulating film 409 are not necessarily provided.
- the insulating film 464 is disposed over the transistor 1200.
- the insulating film 466 is disposed over the insulating film 464.
- the insulating film 468 is disposed over the insulating film 466.
- the insulating film 490 is disposed over the insulating film 468.
- the transistor 600 is provided over the insulating film 490.
- the insulating film 492 is provided over the transistor 600.
- the insulating film 494 is disposed over the insulating film 492.
- the insulating film 464 includes a contact hole reaching the region 472a, a contact hole reaching the region 472b, and a contact hole reaching the conductive film 454.
- a conductive film 480a, a conductive film 480b, or a conductive film 480c is embedded in each contact hole.
- the insulating film 466 includes a contact hole reaching the conductive film 480a, a contact hole reaching the conductive film 480b, and a contact hole reaching the conductive film 480c.
- conductive films 478a, 478b, and 478c are embedded in the contact holes, respectively.
- the insulating film 468 and the insulating film 422 include a contact hole reaching the conductive film 478b and a contact hole reaching the conductive film 478c.
- a conductive film 476a or a conductive film 476b is embedded in each contact hole.
- the insulating film 490 includes a contact hole overlapping with a channel formation region of the transistor 600, a contact hole reaching the conductive film 476a, and a contact hole reaching the conductive film 476b.
- a conductive film 474a, a conductive film 474b, or a conductive film 474c is embedded in each contact hole.
- the conductive film 474a functions as a second gate electrode (also referred to as a back gate electrode) of the transistor 600. That is, the transistor 600 has the s-channel structure described in Embodiment 2. Accordingly, the on-state current of the transistor 600 can be increased. In addition, since the punch-through phenomenon can be suppressed, the electric characteristics in the saturation region of the transistor 600 can be stabilized.
- the insulating films 409 and 492 include a contact hole reaching the conductive film 617 which overlaps with the conductive film 612a functioning as one of the source electrode and the drain electrode of the transistor 600 through the insulating film 615, and the gate of the transistor 600.
- a contact hole reaching the conductive film 616 functioning as an electrode a contact hole reaching the conductive film 474b through the conductive film 612b functioning as the other of the source electrode and the drain electrode of the transistor 600, and a source of the transistor 600
- conductive films 496a, 496b, 496c, and 496d are embedded in the contact holes, respectively. However, each contact hole may further pass through a contact hole included in any of the components such as the transistor 600.
- the insulating film 494 includes a contact hole reaching the conductive film 496a, a contact hole reaching the conductive film 496b, a contact hole reaching the conductive film 496c, and a contact hole reaching the conductive film 496d.
- conductive films 498a, 498b, 498c, and 498d are embedded in the contact holes, respectively.
- insulating film 464, the insulating film 466, the insulating film 468, the insulating film 490, the insulating film 492, and the insulating film 494 for example, boron, carbon, nitrogen, oxygen, fluorine, magnesium, aluminum, silicon, phosphorus, chlorine, argon,
- An insulating film containing gallium, germanium, yttrium, zirconium, lanthanum, neodymium, hafnium, or tantalum may be used as a single layer or a stacked layer.
- the insulating film 401 aluminum oxide, magnesium oxide, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, or oxide Tantalum may be used.
- One or more of the insulating film 464, the insulating film 466, the insulating film 468, the insulating film 490, the insulating film 492, or the insulating film 494 preferably includes an insulating film having a barrier property.
- Examples of insulating films having a function of blocking impurities such as hydrogen and oxygen include boron, carbon, nitrogen, oxygen, fluorine, magnesium, aluminum, silicon, phosphorus, chlorine, argon, gallium, germanium, yttrium, zirconium, and lanthanum.
- An insulating film containing neodymium, hafnium, or tantalum may be used as a single layer or a stacked layer.
- the conductive film 480a, the conductive film 480b, the conductive film 480c, the conductive film 478a, the conductive film 478b, the conductive film 478c, the conductive film 476a, the conductive film 476b, the conductive film 474a, the conductive film 474b, the conductive film 474c, the conductive film 496a, and the conductive film 496b, conductive film 496c, conductive film 496d, conductive film 498a, conductive film 498b, conductive film 498c, and conductive film 498d include, for example, boron, nitrogen, oxygen, fluorine, silicon, phosphorus, aluminum, titanium, chromium, manganese, A conductive film containing one or more kinds of cobalt, nickel, copper, zinc, gallium, yttrium, zirconium, molybdenum, ruthenium, silver, indium, tin, tantalum, and tungsten may be used as a single layer
- it may be an alloy or a compound, and a conductive film containing aluminum, a conductive film containing copper and titanium, a conductive film containing copper and manganese, a conductive film containing indium, tin and oxygen, a conductive film containing titanium and nitrogen Etc. may be used.
- One or more of 496b, the conductive film 496c, the conductive film 496d, the conductive film 498a, the conductive film 498b, the conductive film 498c, and the conductive film 498d preferably include a conductive film having a barrier property.
- the source electrode or the drain electrode of the transistor 1200 serves as the other of the source electrode and the drain electrode of the transistor 600 through the conductive film 480b, the conductive film 478b, the conductive film 476a, the conductive film 474b, and the conductive film 496c. It is electrically connected to the conductive film 612b having a function.
- the conductive film 454 functioning as the gate electrode of the transistor 1200 includes the conductive film 480c, the conductive film 478c, the conductive film 476b, the conductive film 474c, and the conductive film 496d. It is electrically connected to the conductive film 612a having one function.
- the capacitor 1400 includes an insulating film 615 and a conductive film 617.
- the insulating film 615 can be formed through the same process as the insulating film 614 functioning as the gate insulating film of the transistor 600, productivity may be improved, which may be preferable.
- the conductive film 617 be formed using the same process as the conductive film 616 functioning as the gate electrode of the transistor 600 because productivity can be improved. However, they may be formed in separate steps.
- FIG. 35 illustrates the case where the transistor 1200 is a Fin type.
- the transistor 1200 is a Fin type.
- FIGS. 35A, 35B, and 35C are cross-sectional views of different locations.
- a cell 1000 illustrated in FIG. 36 is different only in the structure of the transistor 1200 of the cell 1000 illustrated in FIG. Therefore, for the cell 1000 illustrated in FIG. 36, the description of the cell 1000 illustrated in FIG. 34 is referred to.
- the cell 1000 illustrated in FIG. 36 illustrates the case where the transistor 1200 is provided over an SOI substrate.
- FIG. 36 illustrates a structure in which the region 456 is separated from the semiconductor substrate 450 by the insulating film 452.
- the insulating film 452 can be formed by insulating a part of the semiconductor substrate 450.
- silicon oxide can be used as the insulating film 452, silicon oxide can be used.
- FIGS. 36A, 36B, and 36C are cross-sectional views of different locations.
- a p-channel transistor is manufactured using a semiconductor substrate, and an n-channel transistor is formed thereabove, so that the area occupied by the element can be reduced. That is, the degree of integration of the semiconductor device can be increased. Further, since the process can be simplified as compared with the case where an n-channel transistor and a p-channel transistor are formed using the same semiconductor substrate, the productivity of the semiconductor device can be increased. In addition, the yield of the semiconductor device can be increased. In addition, a p-channel transistor can sometimes omit complicated processes such as an LDD (Lightly Doped Drain) region, a shallow trench structure, and a strain design. Therefore, productivity and yield may be increased as compared with the case where an n-channel transistor is manufactured using a semiconductor substrate.
- LDD Lightly Doped Drain
- the transistor 1200 may be an n-channel transistor.
- the transistor 600 in this embodiment may be the transistor 500.
- a display module 8000 shown in FIG. 37 includes a touch panel 8004 connected to the FPC 8003, a display panel 8006 connected to the FPC 8005, a backlight 8007, a frame 8009, a printed circuit board 8010, a battery, between the upper cover 8001 and the lower cover 8002. 8011.
- the semiconductor device of one embodiment of the present invention can be used for the display panel 8006, for example.
- the shapes and dimensions of the upper cover 8001 and the lower cover 8002 can be changed as appropriate in accordance with the sizes of the touch panel 8004 and the display panel 8006.
- a resistive touch panel or a capacitive touch panel can be used by being superimposed on the display panel 8006.
- the counter substrate (sealing substrate) of the display panel 8006 can have a touch panel function.
- an optical sensor can be provided in each pixel of the display panel 8006 to provide an optical touch panel.
- the backlight 8007 has a light source 8008.
- FIG. 37 illustrates the configuration in which the light source 8008 is provided over the backlight 8007, the present invention is not limited to this.
- a light source 8008 may be provided at the end of the backlight 8007 and a light diffusing plate may be used.
- the backlight 8007 may not be provided.
- the frame 8009 has a function as an electromagnetic shield for blocking electromagnetic waves generated by the operation of the printed board 8010 in addition to a protective function of the display panel 8006.
- the frame 8009 may have a function as a heat sink.
- the printed circuit board 8010 includes a power supply circuit, a signal processing circuit for outputting a video signal and a clock signal.
- a power supply for supplying power to the power supply circuit an external commercial power supply may be used, or a power supply using a battery 8011 provided separately may be used.
- the battery 8011 can be omitted when a commercial power source is used.
- the display module 8000 may be additionally provided with a member such as a polarizing plate, a retardation plate, or a prism sheet.
- FIGS. 38A to 38G illustrate electronic devices. These electronic devices include a housing 5000, a display portion 5001, a speaker 5003, an LED lamp 5004, operation keys 5005 (including a power switch or operation switch), a connection terminal 5006, and a sensor 5007 (force, displacement, position, speed, Measure acceleration, angular velocity, number of revolutions, distance, light, liquid, magnetism, temperature, chemical, voice, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, smell or infrared A microphone 5008, and the like.
- operation keys 5005 including a power switch or operation switch
- connection terminal 5006 includes a connection terminal 5006
- a sensor 5007 force, displacement, position, speed, Measure acceleration, angular velocity, number of revolutions, distance, light, liquid, magnetism, temperature, chemical, voice, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, smell or infrared
- a microphone 5008 and the like.
- FIG. 38A illustrates a mobile computer which can include a switch 5009, an infrared port 5010, and the like in addition to the above components.
- FIG. 38B illustrates a portable image reproducing device (eg, a DVD reproducing device) including a recording medium, which includes a second display portion 5002, a recording medium reading portion 5011, and the like in addition to the above components. it can.
- FIG. 38C illustrates a goggle type display which can include a second display portion 5002, a support portion 5012, an earphone 5013, and the like in addition to the above components.
- FIG. 38D illustrates a portable game machine that can include the memory medium reading portion 5011 and the like in addition to the above objects.
- FIG. 38B illustrates a portable image reproducing device (eg, a DVD reproducing device) including a recording medium, which includes a second display portion 5002, a recording medium reading portion 5011, and the like in addition to the above components. it can.
- FIG. 38C illustrates
- FIG. 38E illustrates a digital camera with a television receiving function, which can include an antenna 5014, a shutter button 5015, an image receiving portion 5016, and the like in addition to the above objects.
- FIG. 38F illustrates a portable game machine that can include the second display portion 5002, the recording medium reading portion 5011, and the like in addition to the above objects.
- FIG. 38G illustrates a portable television receiver that can include a charger 5017 that can transmit and receive signals in addition to the above components.
- the electronic devices illustrated in FIGS. 38A to 38G can have a variety of functions. For example, a function for displaying various information (still images, moving images, text images, etc.) on the display unit, a touch panel function, a function for displaying a calendar, date or time, a function for controlling processing by various software (programs), Wireless communication function, function for connecting to various computer networks using the wireless communication function, function for transmitting or receiving various data using the wireless communication function, and reading and displaying the program or data recorded on the recording medium It can have a function of displaying on the section. Further, in an electronic device having a plurality of display units, one display unit mainly displays image information and another one display unit mainly displays character information, or the plurality of display units consider parallax.
- a function of displaying a three-dimensional image, etc. by displaying the obtained image. Furthermore, in an electronic device having an image receiving unit, a function for capturing a still image, a function for capturing a moving image, a function for automatically or manually correcting a captured image, and a captured image on a recording medium (externally or incorporated in a camera) A function of saving, a function of displaying a photographed image on a display portion, and the like can be provided. Note that the functions of the electronic devices illustrated in FIGS. 38A to 38G are not limited to these, and can have various functions.
- the semiconductor device described in any of Embodiments 1 to 4 can be applied to the electronic devices described in this embodiment.
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Abstract
Description
本実施の形態においては、トランジスタを有する半導体装置の一例について、図1乃至図3を用いて以下説明を行う。
本実施の形態では、本発明の一態様の半導体装置および半導体装置の作製方法について、図4乃至図30を参照して説明する。
図4(A)は、本発明の一態様の半導体装置であるトランジスタ500の上面図であり、図4(B)は、図4(A)に示す一点鎖線X1−X2間における切断面の断面図、図4(C)は一点鎖線Y1−Y2間における切断面の断面図に相当する。
基板502としては、例えばガラス基板、セラミック基板、石英基板、サファイア基板等、少なくとも後の熱処理に耐えうる程度の耐熱性を有している基板を用いるとよい。また、シリコンや炭化シリコンを材料とした単結晶半導体基板、多結晶半導体基板、シリコンゲルマニウム等の化合物半導体基板、SOI基板等を適用することも可能であり、これらの基板上に半導体素子が設けられたものを、基板502として用いてもよい。なお、基板502として、ガラス基板を用いる場合、第6世代、第7世代、第8世代、第9世代、第10世代等の大面積基板を用いることで、大型の表示装置を作製することができる。このような大面積基板を用いることで製造コストを低減させることができるため好ましい。また、基板502として可撓性基板を用いてもよい。
トランジスタ500の第1のゲート絶縁膜として機能する絶縁膜506および絶縁膜507としては、プラズマ化学気相堆積(PECVD:Plasma Enhanced Chemical Vapor Deposition)法、スパッタリング法等により、酸化シリコン膜、酸化窒化シリコン膜、窒化酸化シリコン膜、窒化シリコン膜、酸化アルミニウム膜、酸化ハフニウム膜、酸化イットリウム膜、酸化ジルコニウム膜、酸化ガリウム膜、酸化タンタル膜、酸化マグネシウム膜、酸化ランタン膜、酸化セリウム膜および酸化ネオジム膜を一種以上含む絶縁膜を、それぞれ用いることができる。なお、絶縁膜506および絶縁膜507の積層構造とせずに、上述の材料から選択された単層の絶縁膜、または3層以上の絶縁膜を用いてもよい。
酸化物半導体膜508としては、先に示す材料を用いることができる。酸化物半導体膜508がIn−M−Zn酸化物の場合、In−M−Zn酸化物を成膜するために用いるスパッタリングターゲットの金属元素の原子数比は、In≧M(Inの原子数はMの原子数以上)、Zn≧M(Znの原子数はMの原子数以上)を満たすことが好ましい。このようなスパッタリングターゲットの金属元素の原子数比として、In:M:Zn=1:1:1、In:M:Zn=1:1:1.2、In:M:Zn=2:1:3、In:M:Zn=3:1:2、In:M:Zn=4:2:4.1が好ましい。また、酸化物半導体膜508がIn−M−Zn酸化物の場合、スパッタリングターゲットとしては、多結晶のIn−M−Zn酸化物を含むターゲットを用いると好ましい。多結晶のIn−M−Zn酸化物を含むターゲットを用いることで、結晶性を有する酸化物半導体膜508を形成しやすくなる。なお、成膜される酸化物半導体膜508の原子数比はそれぞれ、誤差として上記のスパッタリングターゲットに含まれる金属元素の原子数比のプラスマイナス40%の変動を含む。例えば、スパッタリングターゲットとして、原子数比がIn:Ga:Zn=4:2:4.1を用いる場合、成膜される酸化物半導体膜508の原子数比は、In:Ga:Zn=4:2:3近傍となる場合がある。
以下では、酸化物半導体の構造について説明する。
まずは、CAAC−OSについて説明する。
次に、nc−OSについて説明する。
a−like OSは、nc−OSと非晶質酸化物半導体との間の構造を有する酸化物半導体である。
次に、酸化物半導体のキャリア密度について、以下に説明を行う。
絶縁膜514および絶縁膜516は、酸化物半導体膜508に酸素を供給する機能を有する。また、絶縁膜518は、トランジスタ500の保護絶縁膜および第2のゲート絶縁膜としての機能を有する。また、絶縁膜514および絶縁膜516は、酸素を有する。また、絶縁膜514は、酸素を透過することのできる絶縁膜である。なお、絶縁膜514は、後に形成する絶縁膜516を形成する際の、酸化物半導体膜508へのダメージ緩和膜としても機能する。
次に、本発明の一態様の半導体装置であるトランジスタ500の作製方法について、図15乃至図30を用いて詳細に説明する。
次に、図15乃至図30に示すトランジスタ500の作製方法とは異なる作製方法について、以下説明する。
本実施の形態では、表示素子として液晶素子を用いる表示装置の構成について説明する。
本実施の形態では、本発明の一態様の半導体装置を有する記憶装置について、図32乃至図36を用いて説明を行う。
本実施の形態では、本発明の一態様の半導体装置を有する表示モジュールおよび電子機器について、図37および図38を用いて説明を行う。
409 絶縁膜
422 絶縁膜
428 絶縁膜
450 半導体基板
452 絶縁膜
454 導電膜
456 領域
460 領域
462 絶縁膜
464 絶縁膜
466 絶縁膜
468 絶縁膜
472a 領域
472b 領域
474a 導電膜
474b 導電膜
474c 導電膜
476a 導電膜
476b 導電膜
478a 導電膜
478b 導電膜
478c 導電膜
480a 導電膜
480b 導電膜
480c 導電膜
490 絶縁膜
492 絶縁膜
494 絶縁膜
496a 導電膜
496b 導電膜
496c 導電膜
496d 導電膜
498a 導電膜
498b 導電膜
498c 導電膜
498d 導電膜
500 トランジスタ
502 基板
504 導電膜
506 絶縁膜
507 絶縁膜
508 酸化物半導体膜
508a 酸化物半導体膜
508b 酸化物半導体膜
509 酸化物半導体膜
509a 絶縁膜
509b 酸化物半導体膜
512 導電膜
512a 導電膜
512b 導電膜
514 絶縁膜
516 絶縁膜
518 絶縁膜
519 絶縁膜
520 導電膜
520a 導電膜
520b 導電膜
531 バリア膜
536a マスク
536b マスク
538 エッチャント
539 エッチャント
540 酸素
540a 酸素
542 エッチャント
542a コンタクトホール
542b コンタクトホール
542c コンタクトホール
570 トランジスタ
600 トランジスタ
602 基板
604 導電膜
606 絶縁膜
608 酸化物半導体膜
608a 酸化物半導体膜
608b 酸化物半導体膜
612a 導電膜
612b 導電膜
614 絶縁膜
615 絶縁膜
616 導電膜
617 導電膜
618 絶縁膜
700 半導体装置
701 基板
702 画素部
703 画素
704 ソースドライバ
705 基板
706 ゲートドライバ
706a ゲートドライバ
706b ゲートドライバ
708 FPC端子部
710 配線
711 配線部
712 シール材
716 FPC
717 走査線
717a 走査線
717b 走査線
718 配線
719 コンタクトホール
719a コンタクトホール
719b コンタクトホール
719c コンタクトホール
720 信号線
721 領域
722 領域
730 領域
734 絶縁膜
736 着色層
738 遮光膜
744 突起
750 トランジスタ
752 トランジスタ
760 接続電極
764 絶縁膜
766 絶縁膜
768 絶縁膜
770 平坦化絶縁膜
772 導電膜
774 導電膜
775 液晶素子
776 液晶層
778 構造体
780 異方性導電膜
790 容量素子
1000 セル
1001 配線
1002 配線
1003 配線
1004 配線
1005 配線
1006 配線
1010 セルアレイ
1011 配線
1012 配線
1014 配線
1015 配線
1016 配線
1017 配線
1100 セル
1200 トランジスタ
1400 容量素子
5000 筐体
5001 表示部
5002 表示部
5003 スピーカ
5004 LEDランプ
5005 操作キー
5006 接続端子
5007 センサ
5008 マイクロフォン
5009 スイッチ
5010 赤外線ポート
5011 記録媒体読込部
5012 支持部
5013 イヤホン
5014 アンテナ
5015 シャッターボタン
5016 受像部
5017 充電器
8000 表示モジュール
8001 上部カバー
8002 下部カバー
8003 FPC
8004 タッチパネル
8005 FPC
8006 表示パネル
8007 バックライト
8008 光源
8009 フレーム
8010 プリント基板
8011 バッテリ
Claims (9)
- 第1の配線と、第2の配線と、第3の配線と、第1の駆動回路と、第2の駆動回路と、セルアレイと、を有し、
前記セルアレイは、トランジスタと、保持容量と、を含むセルを複数有し、
前記トランジスタは、第1の絶縁膜と、酸化物半導体膜と、第2の絶縁膜と、を有し、
前記酸化物半導体膜は、前記第1の絶縁膜を介して前記第2の配線と重なる領域と、前記第2の絶縁膜を介して前記第3の配線と重なる領域と、を有し、
前記第1の配線は、前記第1の駆動回路に電気的に接続され、
前記第2の配線は、前記第2の駆動回路に電気的に接続され、
前記トランジスタは、前記第2の配線の上方に配置され、
前記第2の配線は、前記トランジスタと重なる領域に、前記トランジスタの第1のゲート電極として機能する領域を有し、
前記第3の配線は、前記トランジスタの上方に配置され、
前記第3の配線は、前記トランジスタと重なる領域に、前記トランジスタの第2のゲート電極として機能する領域を有し、
前記第3の配線は、前記第2の配線と重なる領域を有し、
前記第2の配線が、前記セルアレイ以外の領域で前記第3の配線と電気的に接続されることを特徴とする半導体装置。 - 前記第2の配線および前記第3の配線は、前記セルのうち少なくとも1つにおいて電気的に接続されることを特徴とする、
請求項1に記載の半導体装置。 - 第1の配線と、第2の配線と、第3の配線と、第1の駆動回路と、第2の駆動回路と、第3の駆動回路と、セルアレイと、を有し、
前記第2の駆動回路と前記第3の駆動回路の間に前記セルアレイが配置され、
前記セルアレイは、トランジスタと、保持容量と、を含むセルを複数有し、
前記トランジスタは、第1の絶縁膜と、酸化物半導体膜と、第2の絶縁膜と、を有し、
前記酸化物半導体膜は、前記第1の絶縁膜を介して前記第2の配線と重なる領域と、前記第2の絶縁膜を介して前記第3の配線と重なる領域と、を有し、
前記第1の配線は、前記第1の駆動回路に電気的に接続され、
前記第2の配線は、前記第2の駆動回路または前記第3の駆動回路に電気的に接続され、
前記トランジスタは、前記第2の配線の上方に配置され、
前記第2の配線は、前記トランジスタと重なる領域に、前記トランジスタの第1のゲート電極として機能する領域を有し、
前記第3の配線は、前記トランジスタの上方に配置され、
前記第3の配線は、前記トランジスタと重なる領域に、前記トランジスタの第2のゲート電極として機能する領域を有し、
前記第3の配線は、前記第2の配線と重なる領域を有し、
前記第2の配線が、前記セルアレイ以外の領域で前記第3の配線と電気的に接続されることを特徴とする半導体装置。 - 前記セルアレイと前記第2の駆動回路の間の領域において、前記第2の配線と前記第3の配線とが電気的に接続される、
請求項1又は請求項3に記載の半導体装置。 - 前記第2の配線と前記第3の配線との接続部における、前記第2の配線の幅は、前記セルと重なる領域における前記第2の配線の幅よりも広いことを特徴とする、
請求項1又は請求項3に記載の半導体装置。 - 前記第3の配線の電気抵抗は、前記第2の配線の電気抵抗以下であることを特徴とする、
請求項1又は請求項3に記載の半導体装置。 - 前記第3の配線は、銅元素を有することを特徴とする、
請求項1又は請求項3に記載の半導体装置。 - 前記セルは画素であり、前記セルアレイは画素部であることを特徴とする、
請求項1又は請求項3に記載の半導体装置。 - 請求項1又は請求項3に記載の半導体装置を有する電子機器。
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KR1020227037954A KR20220151034A (ko) | 2015-04-20 | 2016-04-11 | 반도체 장치 및 전자 기기 |
KR1020177032558A KR102462475B1 (ko) | 2015-04-20 | 2016-04-11 | 반도체 장치 및 전자 기기 |
US15/563,663 US10591791B2 (en) | 2015-04-20 | 2016-04-11 | Semiconductor device and electronic device |
CN201680023158.8A CN107534057B (zh) | 2015-04-20 | 2016-04-11 | 半导体装置及电子设备 |
JP2017513382A JP6723225B2 (ja) | 2015-04-20 | 2016-04-11 | 半導体装置および電子機器 |
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JP (1) | JP6723225B2 (ja) |
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US11024725B2 (en) * | 2015-07-24 | 2021-06-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including metal oxide film |
JP7209692B2 (ja) * | 2018-03-06 | 2023-01-20 | 株式会社半導体エネルギー研究所 | 半導体装置 |
TWI740516B (zh) | 2020-05-28 | 2021-09-21 | 元太科技工業股份有限公司 | 顯示面板 |
CN112925142A (zh) * | 2021-03-16 | 2021-06-08 | 京东方科技集团股份有限公司 | 一种基板和显示装置 |
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- 2016-04-11 WO PCT/IB2016/052033 patent/WO2016170443A1/ja active Application Filing
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KR102462475B1 (ko) | 2022-11-01 |
JPWO2016170443A1 (ja) | 2018-03-29 |
US10591791B2 (en) | 2020-03-17 |
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