WO2016098860A1 - 導体組成物インク、積層配線部材、半導体素子および電子機器、並びに、積層配線部材の製造方法 - Google Patents
導体組成物インク、積層配線部材、半導体素子および電子機器、並びに、積層配線部材の製造方法 Download PDFInfo
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- WO2016098860A1 WO2016098860A1 PCT/JP2015/085392 JP2015085392W WO2016098860A1 WO 2016098860 A1 WO2016098860 A1 WO 2016098860A1 JP 2015085392 W JP2015085392 W JP 2015085392W WO 2016098860 A1 WO2016098860 A1 WO 2016098860A1
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- wiring member
- electrode
- conductive
- insulating layer
- laminated wiring
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
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- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
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- H01L2224/023—Redistribution layers [RDL] for bonding areas
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- H01L2224/023—Redistribution layers [RDL] for bonding areas
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- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
Definitions
- the present invention relates to a conductor composition ink, a laminated wiring member, a semiconductor element and an electronic device, and a method for producing the laminated wiring member.
- a laminated wiring member in which two electrodes are arranged through an insulating layer containing a resin is, for example, a semiconductor element such as a semiconductor transistor, a capacitive touch panel sensor, a printed board such as a flexible printed circuit (FPC), or the like. It is used for various devices.
- a configuration is generally adopted in which a contact hole is provided in an insulating layer, and both electrodes are connected in the contact hole.
- a method of removing a part of the insulating film formed on the entire surface of the substrate by a technique such as a photolithography method or an etching method has been conventionally used.
- a technique such as a photolithography method or an etching method
- the semiconductor layer often has poor resistance to an organic solvent, and an insulating film as a passivation layer on the top is necessary.
- a low molecular organic semiconductor such as pentacene is used, resistance to an organic solvent is particularly poor.
- Patent Document 1 a material serving as a nucleus is disposed on a conductive layer, a film is stacked thereon, and then the nucleus of the film or a portion near the nucleus is removed.
- a through hole forming method for forming a hole has been proposed.
- Patent Document 2 a removable pillar is formed on a base material, an insulating layer is formed on the base material on which the pillar is formed, and then the pillar is removed to form a contact hole in the insulating layer.
- a method has been proposed. However, these methods also require a step of removing nuclei and pillars, and there is a concern that residues such as nuclei and pillars remain in the contact holes.
- Patent Document 3 proposes a method of forming an interlayer insulating film using a screen plate having a non-ejection region slightly larger than the via post head after forming the via post.
- Patent Document 4 proposes a method in which a via is directly formed on a wiring pattern provided on a substrate in a shape in which an end protrudes from a central portion by an ink jet method.
- this method uses the protruding peripheral part of the conductive part, an effective conductive area cannot be obtained as the formed conductive part becomes small, and the via shape can be completely reproduced in all vias. There is a problem that it is difficult.
- An object of the present invention is to provide a method of manufacturing a laminated wiring member capable of forming a via post of an insulating layer by a simple method, and a conductor composition ink, a laminated wiring member, a semiconductor element, and an electronic device. is there.
- a wiring member having a base material and a first electrode formed on the base material, a conductive material and a liquid repellent agent are formed on the first electrode, and the first electrode
- the conductive material that conducts with an electrode and functions as a via post is metal particles
- the liquid repellent is a fluorine-containing compound that forms a self-assembled monolayer, and has a surface energy of more than 30 mN / m and 80 mN / m a conductive convex portion made of a conductor that is less than or equal to m, a resin composition, an insulating layer having the conductive convex portion, and a second conductive layer that is electrically connected to the conductive convex portion and formed on the insulating layer.
- An electrode wherein the height of the conductive protrusion is larger than the thickness of the insulating layer, and at least a part of the conductive protrusion protruding from the insulating layer is electrically connected to the second electrode.
- a wiring member is provided.
- a wiring member having a base material and a first electrode formed on the base material is prepared, and a conductive composition ink containing a conductive material, a liquid repellent, and a solvent is added to the first electrode.
- the conductive material is electrically conductive with the first electrode, has liquid repellency, and functions as a via post.
- the conductive material is metal particles, and the liquid repellant is a self-organized single layer.
- a first step of forming a conductive convex portion which is a fluorine-containing compound that forms a molecular film and has a surface energy greater than 30 mN / m and 80 mN / m or less, and the conductive convex portion is formed
- the insulating layer having the conductive convex portion is formed such that the height of the conductive convex portion is larger than the thickness of the insulating layer.
- a conductive composition ink for use in the method for manufacturing a laminated wiring member according to one aspect of the present invention, comprising a conductive material, a liquid repellent, and a solvent, wherein the conductive material comprises: Metal particles, wherein the liquid repellent is a fluorine-containing thiol compound that forms a self-assembled monolayer, and the surface energy of the solidified film obtained by heating at 180 ° C. for 30 minutes is greater than 30 mN / m and not greater than 80 mN / m A conductor composition ink is provided.
- a semiconductor element including the laminated wiring member according to the above-described aspect of the present invention, wherein the first electrode is a source electrode, a drain electrode, or an intermediate electrode, and the second electrode is A semiconductor device is provided, which is a gate electrode, an intermediate electrode, or an external input / output electrode.
- an electronic device including the laminated wiring member according to one aspect of the present invention described above is provided.
- a method for manufacturing a laminated wiring member capable of forming a via post of an insulating layer by a simple method, a conductor composition ink, a laminated wiring member, a semiconductor element, and an electronic device.
- the manufacturing method of the laminated wiring member of this embodiment includes a first step (conductive projecting portion forming step), a second step (insulating layer forming step), a third step (second electrode forming step) described below,
- a method comprising: 1A to 1E are process diagrams showing a method for manufacturing a laminated wiring member according to the present embodiment.
- the wiring member 2 which has the 1st electrode 22 formed on the base material 21 and the base material 21 first is prepared.
- a conductive composition ink containing a conductive material, a liquid repellent, and a solvent is applied in a pattern on the first electrode 22 and baked, thereby conducting the first electrode 22 and repelling it as shown in FIG. 1B.
- the conductive convex part 3 which has liquid property is formed (conductive convex part formation process).
- a coating film 4A of a resin composition is formed on the wiring member 2 on which the conductive protrusions 3 are formed.
- the conductive convex portion 3 functions as a via post, and the insulating layer 4 is formed in a portion other than the conductive convex portion 3.
- the 2nd electrode 6 is formed on the insulating layer 4 so that it may conduct
- the laminated wiring member 1 can be manufactured.
- an insulating layer having a via post can be easily provided by including a conductive protrusion forming step for forming the conductive protrusion 3 having liquid repellency and an insulating layer forming step for forming the insulating layer 4.
- a conductive protrusion forming step for forming the conductive protrusion 3 having liquid repellency
- an insulating layer forming step for forming the insulating layer 4.
- the resin composition is formed on the wiring member 2 in the insulating layer forming step.
- the resin composition can be repelled on the surface of the conductive protrusion 3. Therefore, the coating film 4A of the resin composition can be formed so that the conductive projections 3 are not covered, and the coating film 4A is cured to have the conductive projections 3 functioning as via posts.
- the insulating layer 4 can be formed. Therefore, in the present embodiment, the insulating layer 4 having the via post can be formed by a simpler method than the conventional method using a photolithography method or the like.
- a method for forming an insulating layer having a via post with a small number of steps for example, a method of printing an insulating layer having a contact hole by a screen printing method is also being studied. It is difficult and miniaturization of the contact hole is difficult.
- examples of the coating method that can pattern the resin composition include an inkjet method and a gravure offset printing method. However, when the surface tension of the resin composition is small, good patterning cannot be performed. On the other hand, in this embodiment, since it is not necessary to pattern the coating film 4A of the resin composition and the resin composition can be applied to the entire surface of the wiring member 2, the insulating layer 4 having good flatness is formed. Can do.
- a wiring member 2 having a base 21 and a first electrode 22 formed on the base 21 is prepared. Then, a conductive composition ink containing a conductive material, a liquid repellent, and a solvent is applied onto the first electrode 22 in a pattern and baked, thereby conducting with the first electrode 22 and having liquid repellency, and Conductive convex portions 3 functioning as via posts are formed (see FIG. 1B).
- the wiring member 2 has a base material 21 and a first electrode 22.
- the base material 21 supports the first electrode 22.
- the base material 21 has heat resistance normally.
- the heat resistance of the base material 21 is not particularly limited as long as it does not cause deformation or the like due to heating in the manufacturing process of the laminated wiring member.
- the base material 21 is not particularly limited as long as it has a predetermined self-supporting property.
- the base material 21 having an arbitrary function is used depending on the use of the laminated wiring member 1 manufactured according to the present embodiment. Can be used.
- Examples of the base material 21 include rigid base materials such as a glass base material and flexible base materials such as a film made of a plastic resin.
- Examples of the plastic resin include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethersulfone (PES), polyimide (PI), polyetheretherketone (PEEK), polycarbonate (PC), polyphenylene sulfide ( PPS) and polyetherimide (PEI).
- the base material 21 may be a single layer or a laminate.
- a flattening layer containing a curable resin formed on the base material 21 may be included.
- the transmittance in the visible light region is preferably 80% or more.
- the transmittance can be measured according to JIS K7361-1 (Testing method for the total light transmittance of plastic-transparent material).
- the first electrode 22 is formed on the base material 21.
- the 1st electrode 22 should just be formed on the base material 21, may be directly formed on the base material 21, and may be formed on the base material 21 through another layer.
- the surface of the wiring member 2 in which the first electrode 22 is formed may be referred to as an insulating layer formation surface.
- the first electrode 22 is usually formed in a pattern on the base material 21.
- the planar view shape of the first electrode 22 can be appropriately selected according to the type of the laminated wiring member 1 manufactured by the manufacturing method of the present embodiment. Examples of the shape of the first electrode 22 in plan view include a line shape and a pad shape used for an electrode pad.
- the material used for the first electrode 22 is not particularly limited as long as it has desired conductivity.
- Conductive inorganic materials such as metal materials such as Cu, Mo-Ta alloy, Ag alloy, Cu alloy, Al alloy, transparent conductive inorganic materials such as ITO (indium tin oxide) and IZO (indium zinc oxide), PEDOT
- a conductive organic material such as / PSS (polyethylenedioxythiophene / polystyrenesulfonic acid) can be used.
- a conductive paste containing conductive fine particles can be used.
- electroconductive fine particles the electroconductive fine particles used with the conductor composition ink mentioned later can be selected suitably, and can be used.
- other components used in the conductive paste can be the same as general components, and for example, a solvent used in a conductor composition ink described later, an arbitrary component, and the like can be appropriately selected and used. .
- the thickness of the first electrode 22 is not particularly limited as long as the first electrode 22 can have desired conductivity.
- the thickness is preferably 30 nm or more and 5000 nm or less, more preferably 50 nm or more and 2000 nm or less, and 200 nm or more and 2000 nm or less. It is particularly preferred that This is because if the thickness of the first electrode 22 is too thick, a step due to the first electrode 22 becomes large, and it may be difficult to form an insulating layer satisfactorily. Moreover, it is because it may become difficult to show favorable electroconductivity, when the thickness of the 1st electrode 22 is too thin.
- thickness refers to a thickness obtained by a general measurement method.
- the thickness is measured by tracing the surface with a stylus to detect unevenness, and using a stylus type method for calculating the thickness, observation with a transmission electron microscope (TEM), a scanning electron microscope (SEM), etc. Examples thereof include a method for measuring an image and an optical method for calculating a thickness based on a spectral reflection spectrum.
- TEM transmission electron microscope
- SEM scanning electron microscope
- thickness the average value of the thickness measurement result in the several location of the structure used as object may be used.
- the wettability of the surface of the first electrode 22 is not particularly limited as long as a desired conductive convex portion can be formed by applying or printing the conductor composition ink in a pattern.
- the contact angle between the surface of the first electrode 22 and water is preferably 1 ° to 95 °, and preferably 1 ° to 90 °. More preferably, it is 20 ° or more and 90 ° or less. This is because if the contact angle is too large, a difference in liquid repellency and wettability of the conductive protrusion 3 to be formed later cannot be formed.
- the “contact angle with water” refers to the contact angle with water at 25 ° C.
- the contact angle is determined by, for example, dropping 1 microliter of liquid onto the measurement target, observing the shape of the dropped liquid droplet from the side, and measuring the angle between the droplet and the measurement target. Can be measured.
- the contact angle in this embodiment can be measured using, for example, a contact angle measuring device manufactured by Imoto Seisakusho. Further, the contact angle in the present invention can be measured using, for example, a contact angle meter DM-901 manufactured by Kyowa Interface Science.
- a method for forming the first electrode 22 may be the same as a general electrode forming method. Specifically, there is a method in which a conductive layer is formed on the entire surface of the base material 21 and then etched into a predetermined pattern using a photolithography method. Examples of a method for forming a conductive layer on the entire surface of the substrate 21 include a PVD method such as a vacuum deposition method, a sputtering method, and an ion plating method, a CVD method, and the like.
- the first electrode 22 can be formed by a printing method using a conductive paste. Examples of the printing method include an inkjet method, a screen printing method, a gravure offset printing method, and a reverse offset printing method.
- the conductive layer formed by the printing method can easily adjust the wettability of the surface of the conductive layer and can easily control the shape of the conductive convex portion 3 as compared with the conductive layer formed by the vapor deposition method or the like.
- the wiring member 2 is not particularly limited as long as it has the base material 21 and the first electrode 22 described above, and a necessary configuration can be appropriately selected and added.
- the wiring member 2 has a wiring member electrode (not shown) formed on the substrate 21 and a wiring member insulating layer (not shown) formed so as to cover the wiring member electrode (not shown). You may do it.
- the first electrode 22 is formed on the wiring member insulating layer. Further, other electrodes than the first electrode 22 may be formed on the same plane as the first electrode 22.
- the shape of the electrode other than the wiring member electrode and the first electrode 22 in plan view can be appropriately selected according to the type of the laminated wiring member 1 manufactured according to the present embodiment.
- the material, thickness, and formation method of the electrodes other than the wiring member electrode and the first electrode 22 are the same as those of the first electrode 22, and thus the description thereof is omitted here.
- the material of the insulating layer for wiring members is not particularly limited as long as it has insulating properties.
- acrylic resin, phenol resin, fluorine resin, epoxy resin, cardo resin, vinyl resin, imide examples thereof include organic materials such as a base resin and a novolac resin, and inorganic materials such as SiO 2 , SiN x , and Al 2 O 3 .
- the material of the insulating layer for wiring members may be one type or two or more types.
- a resin composition used in an insulating layer forming step described later can be used as a material of the insulating layer for wiring members.
- the thickness of the insulating layer for wiring members it can select suitably according to the use etc. of the laminated wiring member 1 manufactured by this embodiment.
- a method for forming the insulating layer for wiring members As a method for forming the insulating layer for wiring members, a method for forming the insulating layer 4 described later can be used. Moreover, when the insulating layer for wiring members is an inorganic material, for example, a CVD method or the like can be employed.
- the conductor composition ink used in this step contains a conductive material, a liquid repellent and a solvent.
- the conductive material is the origin of the conductivity of the conductive protrusion 3.
- desired conductivity can be imparted to the conductive convex portion 3, and specifically, metal particles.
- the conductive material may be a nanocolloid in which metal particles are dispersed in a solvent. Examples of the metal species of the metal particles include silver, copper, mercury, tin, indium, nickel, palladium, platinum, and gold. In addition, these may be used individually by 1 type and may use 2 or more types together. Among these, silver is particularly preferable from the viewpoint of affinity with the above-described liquid repellent.
- the metal particles preferably have an average particle diameter of 10 nm to 1000 nm. Moreover, you may include metal nanowire with a diameter of 50 nm or less.
- the average particle diameter of the metal particles can be measured by observation with a transmission electron microscope (TEM). Specifically, in a visual field including about 50 particles, there is a method of measuring the projected area equivalent circle diameter of all the particles and calculating the average.
- TEM transmission electron microscope
- the content of the conductive material is preferably 15% by mass to 75% by mass and more preferably 20% by mass to 50% by mass with respect to the total amount of the conductor composition ink. If content of an electroconductive material is in the said range, an electroconductive convex part can be formed more efficiently.
- the liquid repellent imparts liquid repellency to the conductive protrusion 3.
- the liquid repellent is a fluorine-containing thiol compound that forms a self-assembled monolayer.
- the fluorine-containing thiol compound that forms the self-assembled monolayer can provide liquid repellency to the metal particles while ensuring conductivity when metal particles are used as the conductive material.
- the conductive protrusions obtained with the conductor composition ink can achieve both conductivity and liquid repellency.
- the liquid repellent is not limited to the fluorine-containing thiol compound, and may be any composition containing fluorine (fluorine-containing compound). Examples of such fluorine-containing compounds include fluorine-containing disulfide compounds.
- Examples of the fluorine-containing thiol compound that forms a self-assembled monolayer include a fluorine-containing thiol compound having an aromatic ring and an alkanethiol having a fluorinated moiety.
- a fluorine-containing thiol compound having an aromatic ring and an alkanethiol having a fluorinated moiety are preferable from the surface modification property of the metal particles.
- fluorine-containing thiol having an aromatic ring and having 6 to 20 carbon atoms include trifluoromethylbenzenethiol (for example, 4-trifluoromethylbenzenethiol, 3-trifluoromethylbenzenethiol), penta Fluorobenzenethiol, 2,3,5,6-tetrafluorobenzenethiol, 2,3,5,6-tetrafluoro-4- (trifluoromethyl) benzenethiol, 2,3,5,6-tetrafluoro-4 -Mercaptobenzoic acid methyl ester, 3,5-bistrifluoromethylbenzenethiol, 4-fluorobenzenethiol and 11- (2,3,4,5,6-pentafluorobenzyloxy) -1-undecanethiol, etc. .
- fluorine-containing disulfide compound examples include a fluorine-containing disulfide compound having an aromatic ring and a disulfide compound having a carbon chain having a fluorinated portion.
- Specific examples of the fluorine-containing disulfide compound having an aromatic ring include compounds obtained by dimerizing the above-mentioned fluorine-containing thiol compound. From the viewpoint of liquid repellency, trifluoromethylbenzenethiol or 2, 3, 5, A compound obtained by dimerizing 6-tetrafluoro-4- (trifluoromethyl) benzenethiol is particularly preferable.
- the content of the lyophobic agent is preferably 10% by mass or less, and more preferably 5% by mass or less, based on the total amount of the conductor composition ink. If content of a liquid repellent is below the said upper limit, the dispersibility of the electroconductive material in conductor composition ink will not be inhibited. Moreover, it is preferable that the minimum of content of a liquid repellent is 0.1 mass% or more from a liquid repellent viewpoint of the electroconductive convex part obtained by conductor composition ink.
- the solvent is for dispersing or dissolving the conductive material and the liquid repellent.
- Solvents include water, alcohol solvents (monoalcohol solvents, diol solvents, polyhydric alcohol solvents, etc.), hydrocarbon solvents, ketone solvents, ester solvents, ether solvents, glyme solvents, halogen solvents. A solvent etc. are mentioned. These solvents may be used alone or in a combination of two or more. Among these, alcohol-based solvents are preferable from the viewpoint of printability.
- alcohol solvents include isopropyl alcohol, hexanol, heptanol, octanol, nonanol, decanol, undecanol, dodecanol, tridecanol, tetradecanol, pentadecanol, hexadecanol, cyclohexanol, and 1-methoxy-2-propanol. It is done.
- the ketone solvent include cyclohexanone and methyl isobutyl ketone.
- the surface tension of a solvent is 40 mN / m or more and 65 mN / m or less in 25 degreeC. When the surface tension of the solvent is within the above range, the conductor composition ink can be sufficiently adhered to the ground. The surface tension can be measured by a pendant drop method.
- Examples of the alcohol solvent having a surface tension of 40 mN / m or more and 65 mN / m or less at 25 ° C. include ethylene glycol, glycerin and 1,3-propanediol. Among these, 1,3-propanediol is particularly preferable.
- the content of the solvent is preferably 25% by mass or more and 85% by mass or less, and more preferably 50% by mass or more and 80% by mass or less with respect to the total amount of the conductor composition ink.
- the conductor composition ink can be appropriately applied.
- the conductor composition ink in the present embodiment may contain an arbitrary component in addition to the components described above.
- various optional components include dispersants. These optional components are preferably 10% by mass or less based on the total amount of the conductor composition ink.
- the surface energy of the solidified film obtained by spin-coating the conductor composition ink on a glass substrate and firing at 180 ° C. for 30 minutes is greater than 30 mN / m and 80 mN / m. It is necessary that:
- the surface energy is analyzed by the geometric mean method based on the extended Fowkes equation of Kitazaki and Hata from the contact angle value measured in each solvent (Nadaaki Kitazaki, Toshio Hata et al., Journal of the Japan Adhesion Association, Vol. 8) (3) This refers to the value obtained on pages 131-141 (1972)).
- Examples of means for adjusting the surface energy of the solidified film obtained by spin-coating and baking the conductor composition ink include adjusting the type and blending amount of the liquid repellent.
- the amount of the liquid repellent increases, the conductive material in the conductor composition ink aggregates, and the ink state cannot be maintained.
- the surface energy of the solidified film is larger than the upper limit value, the liquid repellency is lowered and the insulating layer cannot be opened.
- the surface energy of the solidified film is preferably from 32 mN / m to 70 mN / m, more preferably from 35 mN / m to 60 mN / m, and more preferably from 40 mN / m to 50 mN / m. It is particularly preferred that
- the above-described conductor composition ink is applied in a pattern on the first electrode 22.
- “applying the conductor composition ink in a pattern” means that the conductor composition ink is applied on the first electrode 22 so as to have a predetermined plan view shape, and the first electrode 22 is formed. The case where the conductor composition ink is applied to the entire surface of the formed wiring member 2 is not included.
- FIG. 2A the conductor composition ink is applied only on the first electrode 22 to form the deposit 3A.
- the conductor composition ink may be applied on and in the vicinity of the first electrode 22 to form the deposit 3A.
- the conductor composition ink is usually applied on the first electrode 22 and applied so as not to be electrically connected to the other electrode 22 a adjacent to the first electrode 22.
- 2A and 2B are explanatory diagrams for explaining the application position of the conductor composition ink.
- the method for applying the conductor composition ink is not particularly limited as long as the method can apply the conductor composition ink in a predetermined pattern on the first electrode 22.
- the ink jet method, the dispenser method, and screen printing Method gravure printing method, gravure offset printing method, reverse offset printing method, letterpress printing method and the like.
- the method for firing the conductor composition ink applied on the first electrode 22 is not particularly limited as long as the solvent contained in the conductor composition ink can be removed and the conductor composition ink can be solidified.
- the method can be used. Specifically, it can be fired using a hot plate or the like.
- a treatment for accelerating the transfer of the liquid repellent by irradiating ultrasonic waves or the like before or during firing may be performed.
- the firing temperature and firing time in this step are appropriately adjusted according to the type of solvent, liquid repellent and the like contained in the conductor composition ink.
- the firing temperature in this step is not particularly limited as long as it is a temperature at which the solvent contained in the conductor composition ink can be removed, but is preferably 100 ° C. or higher and 220 ° C. or lower, and is preferably 120 ° C. or higher and 200 ° C. or lower. It is more preferable that This is because if the firing temperature is too high, the conductive material may deteriorate, making it difficult to exhibit desired conductivity. In addition, when the firing temperature is too low, the solvent remains in the conductive protrusions, which may cause impurities to be mixed into the insulating layer in the insulating layer forming step described later.
- the firing time in this step is not particularly limited as long as it is a time that can remove the solvent contained in the conductor composition ink, but it is preferably 10 minutes or more and 60 minutes or less, and preferably 15 minutes or more and 60 minutes or less. It is more preferable that the period is not more than minutes, and it is particularly preferable that the period is 30 minutes or more and 60 minutes or less. If the firing time is too short, it is difficult to sufficiently transfer the liquid repellent of the conductor composition ink, and thus it may be difficult to improve the liquid repellency of the conductive protrusion 3. Because there is. In addition, when the firing time is too long, the conductive material or the like may be deteriorated and it may be difficult to exhibit desired conductivity. Moreover, it is because productivity may fall.
- the conductive convex portion 3 formed by this step is formed on the first electrode 22.
- a plurality of conductive convex portions 3 may be formed.
- the electroconductive convex part 3 has liquid repellency, and functions as a via post.
- the conductive protrusion 3 needs to be a conductor including the conductive material and the liquid repellent and having a surface energy of more than 30 mN / m and 80 mN / m or less. In this conductor, it is preferable that the conductive material and the liquid repellent are exposed on the surface from the viewpoint of surface energy and conductivity.
- the conductive convex portion has liquid repellency means that the contact angle between the surface of the conductive convex portion 3 and water is the contact angle between the surface of the first electrode 22 and water and the substrate 21. It is larger than the contact angle between the surface and water. Specifically, the difference between the contact angle between the surface of the conductive protrusion 3 and water and the contact angle between the surface of the first electrode 22 and water is 5 ° or more, preferably 20 °. That's it. If the difference between the contact angles is small, it is difficult to play the resin composition by utilizing the difference in wettability when the resin composition is applied onto the wiring member 2 on which the conductive protrusions 3 are formed. Because there is a possibility of becoming. Further, the upper limit value of the difference in the contact angle is appropriately determined according to the material of the conductive convex portion 3, the material of the first electrode 22, and the like, and is not particularly limited, but is about 100 °, for example.
- the difference between the contact angle between the surface of the conductive convex portion 3 and water and the contact angle between the surface of the base material 21 and water is 5 ° or more, preferably 20 ° or more.
- the upper limit value of the difference in the contact angle is appropriately determined according to the material of the conductive convex portion 3, the material of the base material 21, and the like, and is not particularly limited, but is about 100 °, for example.
- the liquid repellency of the conductive convex portion 3 is not particularly limited as long as the conductive convex portion 3 can function as a via post by repelling a resin composition used in an insulating layer forming step described later.
- the contact angle between the surface of the conductive protrusion 3 and water is preferably 90 ° or more, and more preferably 100 ° or more and 120 ° or less. This is because if the contact angle is too small, it is difficult to repel the resin composition applied on the conductive protrusions 3 and it may be difficult to form a via post.
- the shape of the conductive protrusion 3 in plan view is not particularly limited as long as a via post can be formed, and examples thereof include a circular shape, an elliptical shape, a rectangular shape, and a polygonal shape. Especially, it is preferable that the planar view shape of the electroconductive convex part 3 is circular shape and elliptical shape.
- Examples of the longitudinal cross-sectional shape of the conductive convex portion 3 include a semicircular shape as shown in FIG. 3A, a semi-elliptical shape as shown in FIG. 3B, a trapezoidal shape, and a quadrangular shape although not shown. Moreover, these shapes may have a flat part or a hollow in the center.
- FIG. 3C shows a shape having a flat portion at the center of the semi-elliptical shape.
- 3A to 3C are explanatory views for explaining the longitudinal sectional shape of the conductive convex portion 3 in the present embodiment.
- the longitudinal sectional shape of the conductive convex portion 3 refers to the sectional shape of the conductive convex portion 3 in the direction perpendicular to the base material 21.
- the size of the conductive convex portion 3 is not particularly limited as long as a via post capable of conducting the first electrode 22 and the second electrode 6 described later through the conductive convex portion 3 can be formed.
- it is preferably 1 ⁇ m or more and 5000 ⁇ m or less, more preferably 5 ⁇ m or more and 1000 ⁇ m or less, and particularly preferably 10 ⁇ m or more and 100 ⁇ m or less. This is because if the conductive convex portion 3 is too large, it may be difficult to achieve high definition and high integration of the multilayer wiring member 1 manufactured according to the present embodiment.
- the “size of the conductive convex portion 3” refers to the size of the conductive convex portion 3 in a plan view shape.
- the planar view shape is a circular shape, it refers to a diameter, and the plan view shape is a square shape. In the case of a shape, it means the width of one side.
- the shape in plan view is a shape having a short side and a long side, such as a rectangle or an ellipse, it means the width of the short side.
- the planar view shape is a polygonal shape, it refers to the diameter of the inscribed circle.
- the size of the conductive protrusion 3 refers to the distance indicated by u in FIG.
- the height of the conductive protrusion 3 is not particularly limited as long as it can be electrically connected to the second electrode 6 described later, but is preferably 10 nm or more and 10000 nm or less, and more preferably 100 nm or more and 8000 nm or less.
- the height of the conductive protrusion 3 is too high, it may be difficult to improve the flatness of the surface of the laminated wiring member 1 manufactured according to this embodiment on the second electrode 6 side. This is because if the height of the conductive convex portion 3 is too low, it may be difficult for the conductive convex portion 3 to exhibit desired conductivity.
- the “height of the conductive convex portion 3” refers to the value of the portion where the distance in the vertical direction from the base material is maximum in the longitudinal sectional shape of the conductive convex portion 3, and in FIGS. 5A and 5B described later. This is the distance indicated by x.
- the aspect ratio (height / size) of the conductive protrusion 3 is not particularly limited as long as a via post can be formed, but is preferably 0.001 or more and 1 or less, and 0.01 or more and 0.0. It is more preferably 8 or less, and particularly preferably 0.01 or more and 0.5 or less.
- the aspect ratio of the conductive convex portion 3 is too large, it may be difficult to form the conductive convex portion 3 itself, or the conductive convex portion 3 may be easily damaged. is there. Moreover, it is because it may become difficult for the electroconductive convex part 3 to show sufficient electroconductivity and liquid repellency when the aspect-ratio of the electroconductive convex part 3 is too small.
- a coating film 4A of a resin composition is formed on the wiring member 2 on which the conductive protrusions 3 are formed, and is cured to function as a via post.
- An insulating layer 4 having conductive protrusions 3 is formed (see FIG. 1D).
- the resin composition used in this step contains at least a resin and, if necessary, other components such as a polymerization initiator.
- the resin is a concept including a polymer in addition to a monomer and an oligomer.
- the resin include ionizing radiation curable resins such as acrylate, epoxy, and polyester, and thermosetting resins such as acrylate, urethane, epoxy, and polysiloxane.
- the ionizing radiation means electromagnetic waves or charged particles having energy that can be cured by polymerizing molecules. For example, all ultraviolet rays (UV-A, UV-B, UV-C), visible rays, gamma rays , X-rays, electron beams and the like.
- thermosetting resin is preferable. This is because the insulating property of the insulating layer 4 can be made better by using the thermosetting resin.
- a fluorine-type resin composition contains at least a fluororesin and, if necessary, other components such as a polymerization initiator.
- the resin constituting the fluorine-based resin composition polyimide added with fluorine, polyparaxylene added with fluorine, polystyrene, Cytop (registered trademark), Teflon (registered trademark), Teflon (registered trademark) AF, Examples include fluoropolyaryl ether.
- a typical example is Cytop (manufactured by Asahi Glass Co., Ltd.), but is not limited thereto.
- a thermosetting resin is preferable. This is because the insulating property of the insulating layer 4 can be made better by using the thermosetting resin.
- the resin composition usually contains a solvent.
- the solvent contained in the resin composition can be appropriately selected according to the liquid repellency of the conductive protrusion 3, the wettability of the base on which the insulating layer 4 is formed, the viscosity, and the like. It can be the same as that used for a thing.
- the resin composition is a fluorine resin composition, it usually contains a fluorine solvent.
- the fluorine-based resin composition is used as a passivation layer, it is necessary to select a fluorine-based solvent that does not damage the underlying layer having low resistance to the solvent, such as the underlying semiconductor layer.
- the resin composition further contains a polymerization initiator, a photosensitizer, an antioxidant, a polymerization inhibitor, a crosslinking agent, an infrared absorber, an antistatic agent, a viscosity modifier, an adhesion improver, and the like as necessary. You can also
- the viscosity of the resin composition is not particularly limited as long as it has a predetermined coatability and can be repelled by the liquid repellency of the conductive protrusion 3.
- the viscosity of the specific resin composition is preferably 1.0 mPa ⁇ s or more and 10,000 mPa ⁇ s or less at 25 ° C., more preferably 5 mPa ⁇ s or more and 1000 mPa ⁇ s or less, and more preferably 20 mPa ⁇ s or more. It is particularly preferably 500 mPa ⁇ s or less.
- the viscosity measurement method is not particularly limited as long as the viscosity can be accurately measured.
- a method using a viscosity measurement device such as a rheometer, a B-type viscometer, or a capillary viscometer is used. Is mentioned.
- a digital viscometer (TV-35, Toki Sangyo Co., Ltd.) can be used.
- the surface tension of the resin composition is not particularly limited as long as it has a predetermined coating property and can be repelled by the liquid repellency of the conductive protrusion 3.
- the specific surface tension of the resin composition is preferably 5 mN / m or more and 70 mN / m or less, more preferably 10 mN / m or more and 50 mN / m or less at 25 ° C.
- the surface tension measurement method is not particularly limited as long as the surface tension can be accurately measured.
- the Wilhelmy method plate method
- the hanging drop method pendant drop method
- Young -Laplace method du Nouy method and the like.
- a high-precision surface tension meter Kelvin DY-700
- the insulating layer 4 is formed by applying the above-described resin composition onto the wiring member 2 on which the conductive protrusions 3 are formed.
- the application method is not particularly limited as long as the insulating layer 4 having a desired thickness can be formed, and a general application method can be used. Specific examples include a slit coating method, a spin coating method, a die coating method, a roll coating method, a bar coating method, an LB method, a dip coating method, a spray coating method, a blade coating method, and a casting method.
- the thickness of the coating film 4A of the resin composition is not particularly limited as long as the insulating layer 4 having the conductive projections 3 functioning as via posts can be formed, and the resin is higher than the height of the conductive projections 3.
- the thickness of the coating film 4A of the composition may be large, equivalent, or small.
- the coating film 4 ⁇ / b> A of the resin composition is larger than the height of the conductive protrusion 3, the coating film 4 ⁇ / b> A may be formed so as to cover the conductive protrusion 3.
- the curing method for the resin composition coating 4A is appropriately selected according to the type of the resin composition. Moreover, since a general hardening method can be used, description here is abbreviate
- the insulating layer 4 is formed to insulate the first electrode 22 from the second electrode 6 described later. Moreover, the insulating layer 4 has the electroconductive convex part 3 which functions as a via post.
- the thickness of the insulating layer 4 will not be specifically limited if the 1st electrode 22 and the 2nd electrode 6 mentioned later can be insulated. As shown in FIGS. 5A and 5B, when the height of the conductive protrusion 3 is x and the thickness of the insulating layer 4 on the first electrode 22 is y, the height of the conductive protrusion 3 is shown. x needs to be larger than the thickness y of the insulating layer 4 on the first electrode 22. In the present embodiment, as shown in FIGS. 5A and 5B, the height x of the conductive protrusion 3 is larger than the thickness y of the insulating layer 4 on the first electrode 22.
- the second electrode 6 described later can be more reliably formed on the conductive convex portion 3 functioning as a via post, the first electrode 22 and the second electrode 6 described later can be conducted well. is there. Moreover, since the surface on which the second electrode 6 of the laminated wiring member 1 manufactured according to the present embodiment is formed can be made flatter, the laminated wiring member 1 is disposed by being laminated well with other configurations. It is because it can be made.
- the “thickness of the insulating layer 4 on the first electrode 22” refers to the distance in the thickness direction of the insulating layer from the surface of the first electrode 22, and refers to the distance indicated by y in FIGS. 5A and 5B. 5A and 5B are explanatory diagrams for explaining the insulating layer 4 in the present embodiment.
- the height x of the conductive convex portion 3 is preferably more than 1 and less than or equal to 10 times the thickness y of the insulating layer 4 on the first electrode 22. This is because by setting the ratio of x and y within the above range, the conductive protrusion 3 and the second electrode 6 to be described later can be made more conductive.
- the thickness y of the insulating layer 4 on the first electrode 22 is not particularly limited as long as it has a role of protecting a base layer such as a semiconductor layer, and the use of the multilayer wiring member 1 manufactured according to the present embodiment. However, it is preferably 0.1 ⁇ m or more and 10 ⁇ m or less, and more preferably 0.5 ⁇ m or more and 5 ⁇ m or less. This is because if the insulating layer 4 is too thick, it may be difficult to make the conductive convex portion 3 function as a via post. Moreover, it is because it may become difficult to show sufficient protection property when the thickness of the insulating layer 4 is too thin.
- the insulating layer 4 formed by this process has the conductive convex part 3 that functions as a via post. In such an insulating layer 4, a part of the conductive convex portion 3 protrudes from the insulating layer 4.
- At least one insulating layer 4 can be formed, and a plurality of insulating layers may be formed.
- the second electrode 6 is formed on the insulating layer 4 so as to be electrically connected to the conductive protrusion 3 functioning as a via post. In this case, at least a part of the conductive protrusion 3 protruding from the insulating layer 4 and the second electrode 6 are in contact with each other and are electrically connected.
- the material used for the second electrode 6 is not particularly limited as long as it has a desired conductivity, and can be appropriately selected from the materials used for the first electrode 22 described above.
- the second electrode 6 is usually formed in a pattern on the insulating layer 4.
- the planar view shape of the second electrode 6 can be appropriately selected according to the type of the laminated wiring member 1 manufactured by the manufacturing method of the present embodiment.
- the method for forming the second electrode 6 can be the same as the method for forming the first electrode 22 described above, and thus the description thereof is omitted here.
- the thickness of the second electrode 6 is not particularly limited as long as electrical conduction between the conductive convex portion 3 and the first electrode 22 can be obtained. This is because it may be difficult to obtain conduction if the thickness is equal to or less than the difference between the thickness of the insulating layer 4 and the height of the conductive protrusion 3. Specifically, it is preferably 30 nm or more and 5000 nm or less, more preferably 50 nm or more and 4000 nm or less, and particularly preferably 200 nm or more and 2000 nm or less.
- the conductive protrusion 3 may be subjected to a hydrophilic treatment before the second electrode 6 is formed.
- the hydrophilization treatment is not particularly limited as long as the decrease in the conductivity of the conductive convex portion 3 can be suppressed and the contact angle between the surface of the conductive convex portion 3 and water can be reduced.
- a hydrophilization treatment using hydrogen plasma can be used.
- the manufacturing method of the multilayer wiring member of this embodiment will not be specifically limited if it has each process mentioned above, A required structure can be selected suitably and can be added. For example, the process etc. which form the wiring member 2 mentioned above are mentioned.
- the method for manufacturing a laminated wiring member according to this embodiment can be applied to a method for manufacturing a device having a laminated structure in which two electrodes are electrically connected via a via post. Specifically, for example, it can be applied to a manufacturing method of a semiconductor element, a touch panel sensor, an RF-ID (Radio Frequency Identification), an organic electroluminescence element, a flexible printed circuit (FPC), and the like.
- the multilayer wiring member 1 of the present embodiment can be manufactured by, for example, the above-described method for manufacturing a multilayer wiring member.
- the laminated wiring member 1 of this embodiment contains the wiring member 2 which has the 1st electrode 22 formed on the base material 21 and the base material 21, and a conductive material and a liquid repellent, and on the 1st electrode 22 Conductive protrusions 3 that are formed in a pattern, are electrically connected to the first electrode 22 and function as via posts, an insulating layer 4 that is made of a resin composition and has the conductive protrusions 3, and conductive protrusions 3. And a second electrode 6 formed on the insulating layer 4.
- the laminated wiring member 1 of this embodiment can be used for electronic devices such as a liquid crystal display, a television, a car navigation system, a mobile phone, a game machine, a digital camera, a personal computer, and a printer.
- semiconductor transistor refers to a structure having a source electrode, a drain electrode, a semiconductor layer, and a gate electrode.
- the manufacturing method of the laminated wiring member of this embodiment includes a first step (conductive conductive portion forming step), a second step (insulating layer forming step), and a third step (electrode forming step) described below. It is a method to prepare.
- 6A to 6D are process diagrams showing a method for manufacturing a semiconductor device of this embodiment. 6A to 6D, an example of manufacturing a semiconductor element having a bottom gate bottom contact type semiconductor transistor will be described. In the method for manufacturing a semiconductor device of this embodiment, first, as shown in FIG. 6A, a base material 31, a gate electrode 32 formed on the base material 31, and a gate insulating layer 33 formed so as to cover the gate electrode 32.
- a wiring member 2 having a source electrode 34 and a drain electrode 35 formed on the gate insulating layer 33 and a semiconductor layer 36 formed in a channel region between the source electrode 34 and the drain electrode 35 is prepared.
- a conductive composition ink containing a conductive material, a liquid repellent, and a solvent is applied onto the drain electrode 35 in a pattern and baked, thereby being electrically connected to the drain electrode 35 as shown in FIG. 6B.
- a coating film of a resin composition is formed and cured so as to cover the source electrode 34, the drain electrode 35, and the semiconductor layer 36, thereby functioning as a via post as shown in FIG. 6C.
- a passivation layer 37 is formed as the insulating layer 4 having the conductive protrusions 3 (insulating layer forming step).
- external input / output electrodes 38 are formed on the passivation layer 37 so as to be electrically connected to the conductive protrusions 3 functioning as via posts (electrode forming step).
- the semiconductor element 30 can be manufactured through the above steps.
- FIG. 7A to 7C are process diagrams showing another example of the method for manufacturing a semiconductor device of this embodiment. 7A to 7C, an example of manufacturing a semiconductor element having a bottom gate top contact type semiconductor transistor will be described.
- the second step (insulating layer forming step) in this embodiment two or more insulating layers may be formed.
- the insulating layer as shown in FIG. 7A, the source electrode 34, the drain electrode 35, and the semiconductor
- the resin composition is applied so as to cover the layer 36 to form a passivation layer 37
- a light shielding resin composition coating film is formed on the passivation layer 37 and cured as shown in FIG. Layer 39 may be formed.
- FIG. 7C shows a process of forming the external input / output electrode 38 on the light shielding layer 39.
- the reference numerals not described in FIGS. 7A to 7C can be the same as the contents described in FIGS. 6A to 6D, and thus description thereof is omitted here.
- FIG. 8A is a process diagram showing another example of the method for manufacturing a semiconductor device of this embodiment. 8A to 8E, an example of manufacturing a semiconductor element having a top gate bottom contact type semiconductor transistor will be described.
- a base material 31 a source electrode 34 and a drain electrode 35a formed on the base material 31, and between the source electrode 34 and the drain electrode 35a.
- the wiring member 2 having the semiconductor layer 36 formed in the channel region is prepared.
- a conductive composition ink containing a conductive material, a liquid repellent, and a solvent is applied in a pattern on the drain electrode 35a and baked to conduct with the drain electrode 35a as shown in FIG.
- the conductive convex portion 3a having the above is formed (conductive convex portion forming step).
- a conductive film functioning as a via post is formed as shown in FIG. 8C by forming and curing a coating film of a resin composition so as to cover the source electrode 34, the drain electrode 35a and the semiconductor layer 36.
- the gate insulating layer 33 is formed as an insulating layer having the conductive protrusion 3a (insulating layer forming step).
- the gate electrode 32 is formed on the gate insulating layer 33.
- an intermediate electrode 35b is formed on the gate insulating layer 33 so as to be electrically connected to the conductive protrusion 3a functioning as a via post simultaneously with the gate electrode 32 (electrode formation step).
- the conductor composition ink is again applied in a pattern on the intermediate electrode 35b and baked, as shown in FIG. 8E.
- Conductive convex portions 3b that are electrically connected to the electrode 35b and have liquid repellency are formed (conductive convex portion forming step).
- a resin composition is applied and cured so as to cover the gate electrode 32 and the intermediate electrode 35b, thereby forming a passivation layer 37 having conductive convex portions 3b functioning as via posts (insulating layer forming step).
- external input / output electrodes 38 are formed on the passivation layer 37 so as to be electrically connected to the conductive protrusions 3b functioning as via posts (electrode formation step).
- the semiconductor element 30 can be manufactured through the above steps.
- FIG. 9 is a schematic cross-sectional view showing an example of the semiconductor element manufactured according to the present embodiment, and shows an example of a semiconductor element having a top gate top contact type semiconductor transistor.
- an insulating layer having a via post can be easily provided by including a conductive protrusion forming step for forming the conductive protrusion 3 having liquid repellency and an insulating layer forming step for forming the insulating layer 4.
- a conductive protrusion forming step for forming the conductive protrusion 3 having liquid repellency
- an insulating layer forming step for forming the insulating layer 4.
- the base electrode 31, the source electrode 34 and the drain electrode 35 formed on the base material 31 (or on the gate insulating layer 33 formed on the base material 31), the source electrode 34 and A wiring member 2 having a semiconductor layer 36 formed in a channel region between the drain electrodes 35 is prepared, and a conductive composition ink containing a conductive material, a liquid repellent, and a solvent is applied onto the drain electrode 35 in a pattern.
- a conductive composition ink containing a conductive material, a liquid repellent, and a solvent is applied onto the drain electrode 35 in a pattern.
- the wiring member 2 differs depending on the structure of the semiconductor transistor, for example, when manufacturing a semiconductor element having a bottom-gate / bottom-contact type semiconductor transistor as shown in FIG. 6A, a base material 31, a gate electrode 32, and a gate insulation The layer 33, the source electrode 34 and the drain electrode 35, and the semiconductor layer 36 are included. Each configuration will be described below.
- the base material 31 since it can be set as the thing used with the manufacturing method of the laminated wiring member mentioned above, description here is abbreviate
- the source electrode 34 and the drain electrode 35 are formed so as to have a desired channel region between the source electrode 34 and the drain electrode 35.
- the source electrode 34 and the drain electrode 35 may be formed directly on the base material 31 or may be formed on the gate insulating layer 33 as will be described later.
- the size of the channel region between the source electrode 34 and the drain electrode 35 is appropriately selected according to the application of the semiconductor element and is not particularly limited.
- the channel length is not particularly limited as long as a semiconductor layer can be formed in the channel region, but is preferably 1 ⁇ m or more and 100 ⁇ m or less, more preferably 3 ⁇ m or more and 50 ⁇ m or less, and 5 ⁇ m or more and 10 ⁇ m or less. It is particularly preferred that The channel length refers to the distance between the source electrode 34 and the drain electrode 35.
- the material for the source electrode 34 and the drain electrode 35 can be appropriately selected from the materials for the first electrode in the above-described method for manufacturing a laminated wiring member. Moreover, since the thickness and the formation method of the source electrode 34 and the drain electrode 35 can be the same as those of the first electrode in the above-described method for manufacturing a laminated wiring member, description thereof is omitted here.
- the semiconductor layer 36 is formed in a region including a channel region between the source electrode 34 and the drain electrode 35. Further, the semiconductor layer 36 imparts semiconductor characteristics to the semiconductor transistor.
- the formation position of the semiconductor layer 36 is appropriately selected according to the structure of the semiconductor transistor, and is usually on the base 31 as shown in FIGS. 8A and 9 or the gate insulating layer 33 as shown in FIGS. 6A and 7A. Formed on top. 6A and 8A, a semiconductor layer 36 may be formed on the source electrode 34 and the drain electrodes 35 and 35a. As shown in FIGS. 7A and 9, the source electrode is formed on the semiconductor layer 36. 34 and the drain electrode 35 may be formed.
- the semiconductor layer 36 is not particularly limited as long as it is formed in the channel region between the source electrode 34 and the drain electrode 35.
- the specific pattern shape and the like are the same as those used for known semiconductor elements. Therefore, the description here is omitted.
- the semiconductor layer 36 may be an organic semiconductor layer or an inorganic semiconductor layer.
- the material, thickness, and formation method of the organic semiconductor layer can be the same as those used for a general organic semiconductor layer.
- the material, thickness, and formation method of the inorganic semiconductor layer can be the same as those used for a general inorganic semiconductor layer.
- the gate electrode 32 and the gate insulation are usually provided between the base material 31 and the source electrode 34 and the drain electrode 35 of the wiring member 2.
- Layer 33 is formed.
- the gate electrode 32 is normally formed on the substrate 31 as shown in FIGS. 6A and 7A.
- As a material of the gate electrode 32 it can select from the material of the 1st electrode in the manufacturing method of the laminated wiring member mentioned above suitably, and can use it.
- the thickness and the formation method of the gate electrode 32 can be the same as the thickness and the formation method of the first electrode in the above-described manufacturing method of the laminated wiring member, and thus description thereof is omitted here.
- the gate insulating layer 33 is formed so as to insulate the gate electrode from the source electrode and the drain electrode, and is usually formed on the gate electrode 32 as shown in FIGS. 6A and 7A.
- the material, thickness, and forming method of the gate insulating layer 33 can be the same as those of the insulating layer for a wiring member in the above-described manufacturing method of the laminated wiring member, and thus description thereof is omitted here.
- the conductor composition ink, the coating method and firing method thereof, and the conductive protrusions can be the same as those in the above-described method for manufacturing a laminated wiring member, and thus description thereof is omitted here.
- Insulating layer forming step In the insulating layer forming step, a coating film of a resin composition is formed so as to cover the source electrode 34, the drain electrode 35, and the semiconductor layer 36, and cured, thereby insulating the conductive protrusion 3 functioning as a via post. A layer (such as a passivation layer 37) is formed.
- the insulating layer forming step can be the same as the insulating layer forming step in the method for manufacturing a laminated wiring member described above, the description thereof is omitted here.
- the insulating layer formed in this step is appropriately selected according to the structure of the semiconductor transistor. For example, when the semiconductor element 30 manufactured according to the present embodiment includes a top gate type semiconductor transistor, at least the gate insulating layer 33 is formed as the insulating layer. On the other hand, when the semiconductor element 30 manufactured according to the present embodiment includes a bottom gate type semiconductor transistor, at least one of the passivation layer 37 and the light shielding layer 39 is formed as the insulating layer.
- the passivation layer 37 is provided in order to prevent the semiconductor layer from being deteriorated by the action of moisture and oxygen present in the air. Further, when a low molecular organic semiconductor is used, the low resistance to a solvent is a problem, but the passivation layer 37 also plays a role of protecting from the solvent when forming the upper layer.
- the light shielding layer 39 is provided to prevent light irradiation to the organic semiconductor layer when the semiconductor layer 36 described above contains an organic semiconductor material. By forming the light shielding layer 39, an increase in off-current and deterioration of the organic semiconductor layer over time can be suppressed.
- the resin composition contains a light shielding material.
- the light-shielding material can be the same as that used for a general organic semiconductor element, and thus description thereof is omitted here.
- each of the gate insulating layer 33, the passivation layer 37, and the light shielding layer 39 can be formed, and two or more layers may be stacked.
- each of the gate insulating layer 33, the passivation layer 37, and the light shielding layer 39 may be formed of a plurality of layers.
- the relationship between the thickness of each layer and the height of the conductive projections can be the same as the relationship between the thickness of the insulating layer and the height of the conductive projections in the method for manufacturing a laminated wiring member described above. Therefore, the description here is omitted.
- the intermediate electrode 35b or the external input / output electrode 38 is formed on the insulating layer (passivation layer 37, gate insulating layer 33, etc.) so as to be electrically connected to the conductive protrusion 3 functioning as a via post.
- the electrode formed by this step is appropriately selected according to the structure of the semiconductor transistor.
- the intermediate electrode 35b may be formed together with the gate electrode 32 as shown in FIG. 8D.
- the intermediate electrode 35 b is used to connect the drain electrode 35 a and the external input / output electrode 38.
- An external input / output electrode 38 may be formed on the passivation layer 37.
- the semiconductor element 30 manufactured according to the present embodiment has a bottom gate type semiconductor transistor, the external input / output electrode 38 is formed on the passivation layer 37.
- the electrode forming step can be the same as the second electrode forming step in the method for manufacturing a laminated wiring member described above, the description thereof is omitted here.
- the external input / output electrode 38 formed by this step can be the same as that used for a general semiconductor element.
- a pixel electrode can be used.
- an input electrode can be mentioned.
- the shape of the external input / output electrode 38 and the intermediate electrode 35b in plan view can be appropriately selected according to the application of the semiconductor element 30 manufactured according to this embodiment.
- the method for manufacturing a semiconductor device of the present embodiment is not particularly limited as long as it includes the above-described steps, and necessary steps can be appropriately selected and added.
- a step of forming a passivation layer 37 on the intermediate electrode 35b is usually performed.
- a step of forming an external input / output electrode 38 on 37 is performed.
- a passivation layer 37 having conductive convex portions 3b functioning as via posts may be formed.
- the semiconductor transistor included in the semiconductor element 30 manufactured according to the present embodiment may be any of a bottom gate top contact type, a bottom gate bottom gate type, a top gate top contact type, or a top gate bottom contact type. .
- the semiconductor element 30 manufactured according to the present embodiment can be used as a TFT array substrate of a display device using a TFT method, for example.
- a display device examples include a liquid crystal display device, an electrophoretic display device, and an organic EL display device.
- the semiconductor element can also be used for a temperature sensor, a pressure sensor, and the like.
- the semiconductor element 30 of the present embodiment can be manufactured by, for example, the above-described method for manufacturing a semiconductor element.
- the semiconductor element 30 of this embodiment is formed in the base region 31, the source electrode 34 and the drain electrodes 35 and 35a formed on the base material 31, and the channel region between the source electrode 34 and the drain electrodes 35 and 35a.
- the wiring member 2 having the semiconductor layer 36, a conductive material and a liquid repellent, are formed in a pattern on the drain electrodes 35 and 35a, are electrically connected to the drain electrodes 35 and 35a, and are conductive protrusions functioning as via posts.
- Insulating layer (such as passivation layer 37) made of resin composition and having conductive protrusions 3 and 3a, and conductive protrusions 3 and 3a, and insulating layer (such as passivation layer 37)
- An intermediate electrode 35b or an external input / output electrode 38 formed thereon is provided.
- the semiconductor element 30 of this embodiment can be used for electronic devices such as a liquid crystal display, a television, a car navigation system, a mobile phone, a game machine, a digital camera, a personal computer, and a printer.
- the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
- the first electrode and the second electrode are electrically connected to each other, and the laminated wiring member having two wiring electrodes is manufactured.
- the present invention is not limited to this. Even if the wiring electrode has three or more layers, the manufacturing method of the laminated wiring member of the embodiment can be applied.
- Example 1 As a base material, glass (Corning Eagle XG, size: 40 mm ⁇ 40 mm, thickness: 0.7 mm) was prepared. A conductive composition ink (silver nanocolloid (average particle size: 40 nm), 2,3,5,6-tetrafluoro-4- (trifluoromethyl) benzenethiol and solvent (spinning) was applied to the surface of the substrate by spin coating.
- a solidified film was formed. When the surface energy of the solidified film was measured, it was 48.3 mN / m.
- Example 2 As a base material, glass (Corning Eagle XG, size: 40 mm ⁇ 40 mm, thickness: 0.7 mm) was prepared. A gold thin film was formed on the surface of the substrate by vacuum deposition. The thickness of the gold thin film was measured with a step gauge (KLA-Tencor P-15), and the result was 50 nm. On the above-mentioned gold electrode, the conductive composition ink used in Example 1 was repeatedly ejected to the same position by the ink jet printing method, and baked at 180 ° C. for 30 minutes, thereby forming the conductive protrusion having liquid repellency. Formed. The conductive convex portion had a diameter of 30 ⁇ m and a height of 5.5 ⁇ m.
- the temperature is increased by 5 on a 130 ° C. hot plate (As One EC-1200NP).
- an insulating layer made of PMMA was formed.
- a gold thin film was formed to a thickness of 50 nm by vacuum deposition so as to be orthogonal to the gold electrode described above.
- conduction was confirmed. From the above, it was confirmed that the insulating protrusion was penetrated and opened by the conductive protrusion, and the conductive protrusion functions as a via post.
- Example 3 As a base material, glass (Corning Eagle XG, size: 40 mm ⁇ 40 mm, thickness: 0.7 mm) was prepared. A conductive composition ink (silver nanocolloid (average particle size: 40 nm), 2,3,5,6-tetrafluoro-4- (trifluoromethyl) benzenethiol and solvent (spinning) was applied to the surface of the substrate by spin coating. A mixed solvent of water, ethylene glycol, 1,3-propanediol and glycerin) in a mass ratio of 39.4: 1.5: 59.1) and baked at 180 ° C. for 30 minutes. A solidified film was formed. When the surface energy of the solidified film was measured, it was 43.8 mN / m.
- Example 4 As a base material, glass (Corning Eagle XG, size: 40 mm ⁇ 40 mm, thickness: 0.7 mm) was prepared. A 50 nm gold thin film was formed on the surface of the substrate by vacuum deposition. On the above-mentioned gold electrode, the conductive composition ink used in Example 3 was repeatedly ejected by an ink jet printing method, and baked at 180 ° C. for 30 minutes, thereby forming conductive protrusions having liquid repellency. The conductive convex portion had a diameter of 26 ⁇ m and a height of 5 ⁇ m. Cytop (CTL-809M, manufactured by Asahi Glass Co., Ltd.) was used as the fluorine resin composition.
- CTL-809M Cytop
- Cytop When the surface tension of Cytop was measured with a high-precision surface tension meter, it was 19 mN / m at 25 ° C.
- the viscosity of the fluororesin composition was measured with a digital viscometer (TV-35, Toki Sangyo Co., Ltd.) and found to be 311 mPa ⁇ s at 25 ° C. Cytop may be appropriately diluted with a fluorine-based solvent.
- the above-mentioned fluororesin composition is applied to the surface of the base material on which the conductive projections are formed using a spin coater (MS-A15 Mikasa Co., Ltd.) for 5 seconds at 500 rpm, followed by application for 30 seconds at 4000 rpm.
- the fluorine-based insulating layer was dried on a hot plate at 180 ° C. for 30 minutes to form a fluorine-based insulating layer by Cytop.
- the fluorine-based insulating layer exhibited an opening having a diameter of 12.5 ⁇ m around the above-described conductive convex portion, and the surface of the conductive convex portion was exposed. It was 400 nm as a result of measuring the film thickness of a fluorine-type insulating layer with the level difference meter.
- the surface of the conductive protrusions is located 4.6 ⁇ m above the surface of the fluorine-based insulating layer, and a step corresponding to the height of both is formed. It had been.
- a gold thin film was formed to a thickness of 50 nm by vacuum deposition so as to be orthogonal to the gold electrode described above. And when electrical connection between the lower gold electrode and the upper gold electrode was confirmed, conduction was confirmed. From the above, it was confirmed that the fluorine-based insulating layer was penetrated and opened by the conductive convex portion, and the conductive convex portion functions as a via post.
- a fluorinated insulating layer by Cytop was formed on the surface of the substrate in the same manner as in Example 1. Evaluation by microscopic observation and level difference measurement was performed, but the surface of the conductive convex portion was covered with a fluorine-based insulating layer, and no opening was confirmed.
- Example 5 A top gate bottom contact type organic thin film transistor was fabricated by the following procedure.
- the glass of Example 1 was prepared as a base material.
- a metal mask having holes in the pattern of the source electrode and the drain electrode was fixed on the surface of the base material, and a gold thin film was formed by vacuum deposition.
- the thickness of the gold thin film was measured in the same manner as in Example 1, it was 100 nm.
- An organic semiconductor ink in which Regioregular poly (3-hexylthiophene-2,5-diyl) (P3HT, Sigma-Aldrich 698989) is dissolved in Decahydronaphthalene (Wako Pure Chemical Industries) at 1 wt% on the source electrode and the drain electrode by an ink jet printing method.
- Example 4 was applied and dried on a hot plate at 150 ° C. for 10 minutes.
- conductive protrusions having liquid repellency were formed in the same manner as in Example 4 at locations not related to the operation of the transistor.
- Cytop was applied and dried in the same manner as in Example 4 to form a gate insulating layer having a thickness of 0.4 ⁇ m. It was confirmed from microscopic observation that a via post was formed on the surface of the gate insulating layer by the effect of the conductive protrusion having liquid repellency.
- a metal mask having a lead line pattern opening on the via post formed on each of the source electrode and the drain electrode is fixed to the substrate, gold is deposited to 100 nm by vacuum deposition, and the source below the gate insulating layer Lead lines from the electrode and drain electrode were formed on the substrate.
- a metal mask having an opening of a gate electrode pattern was fixed on the surface of the above-described base material, and aluminum was deposited to 200 nm by a vacuum deposition method to produce a top gate / bottom contact type organic thin film transistor. Probes for measurement were brought into contact with the lead wires connected to the source electrode and the drain electrode via the via posts, and the transistor characteristics were measured using a semiconductor parameter analyzer (Agilent B1500A).
- the manufactured transistor showed a normal operation in which the current value increased according to the potential difference between the source electrode and the drain electrode, and the gate voltage could control it. From the above, it was confirmed that the fluorine-based insulating layer was penetrated and opened by the conductive convex portion, and interlayer conduction was achieved. That is, it was confirmed that the via post of the fluorine-based insulating layer can be formed by a simple method.
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Abstract
Description
しかしながら、これらの方法においても、核やピラーを除去する工程を必要とし、コンタクトホール内に核やピラーなどの残渣が残ることも懸念される。また、特許文献2の方法では、ピラー形成に静電吸引型液滴吐出法を利用しているため、工程に時間を要し生産性が問題となる可能性がある。
特許文献3には、ヴィアポストを形成した後にヴィアポストの頭部よりも僅かに大きい非吐出領域を有するスクリーン版を用いて層間絶縁膜を形成する方法が提案されている。しかしながら、スクリーン印刷を用いるためヴィアポストの微細化が難しく、また層間絶縁膜の材料もスクリーン印刷が適用できるものに制限されるといった問題がある。
特許文献4には、基板上に設けられた配線パターン上に、インクジェット法により中央部より端部が突出した形状で直接ヴィアを形成する方法が提案されている。しかしながら、本手法では導電部の突出した周縁部を用いるため、形成された導電部が小さくなるにつれ、有効な導電面積が得られなくなることや、全てのヴィアにおいてヴィア形状を完全に再現することが難しいといった問題がある。
本発明の一態様によれば、前述の本発明の一態様に係る積層配線部材を備える半導体素子であって、前記第1電極がソース電極、ドレイン電極または中間電極であり、前記第2電極がゲート電極、中間電極または外部入出力電極であることを特徴とする半導体素子が提供される。
本発明の一態様によれば、前述の本発明の一態様に係る積層配線部材を備える電子機器が提供される。
また、以下に述べる実施の形態は、本発明の好適な具体例であるから、技術的に好ましい種々の限定が付されているが、本発明の範囲は、以下の説明において特に本発明を限定する旨の記載がない限り、これらの態様に限られるものではない。
まず、本実施形態の積層配線部材の製造方法について説明する。
本実施形態の積層配線部材の製造方法は、以下説明する第1工程(導電性凸部形成工程)と、第2工程(絶縁層形成工程)と、第3工程(第2電極形成工程)と、を備える方法である。
図1A~図1Eは、本実施形態の積層配線部材の製造方法を示す工程図である。
本実施形態の積層配線部材の製造方法においては、まず図1Aに示すように、基材21および基材21上に形成された第1電極22を有する配線部材2を準備する。次に、導電性材料、撥液剤および溶媒を含む導体組成物インクを第1電極22上にパターン状に塗布して焼成することにより、図1Bに示すように、第1電極22と導通し撥液性を有する導電性凸部3を形成する(導電性凸部形成工程)。次に、図1Cに示すように、導電性凸部3が形成された配線部材2上に樹脂組成物の塗膜4Aを形成する。次に、樹脂組成物の塗膜4Aを硬化させることにより、図1Dに示すように、導電性凸部3がヴィアポストとして機能し、導電性凸部3以外の部分に絶縁層4を形成する(絶縁層形成工程)。次に、図1Eに示すように、ヴィアポストとして機能する導電性凸部3と導通するように、絶縁層4上に第2電極6を形成する(第2電極形成工程)。以上により積層配線部材1を製造することができる。
よって、本実施形態においては、フォトリソグラフィ法などを用いる従来の方法に比べてより簡便な方法でヴィアポストを有する絶縁層4を形成することができる。
その他に樹脂組成物をパターニング可能な塗布法として、インクジェット法やグラビアオフセット印刷法などが挙げられるが、樹脂組成物の表面張力が小さい場合には、良好なパターニングを行うことができない。
一方で、本実施形態においては、樹脂組成物の塗膜4Aをパターニングする必要がなく、樹脂組成物を配線部材2上の全面に塗布できるため、平坦性が良好な絶縁層4を形成することができる。
導電性凸部形成工程においては、図1Aに示すように、基材21および基材21上に形成された第1電極22を有する配線部材2を準備する。そして、導電性材料、撥液剤および溶媒を含む導体組成物インクを第1電極22上にパターン状に塗布して焼成することにより、第1電極22と導通し、撥液性を有し、かつヴィアポストとして機能する導電性凸部3を形成する(図1B参照)。
配線部材2は、基材21と、第1電極22とを有するものである。
基材21は、第1電極22を支持するものである。また、基材21は、通常、耐熱性を有するものである。基材21の耐熱性としては、積層配線部材の製造工程における加熱に対して変形などを生じない程度であれば特に限定されない。
基材21としては、ガラス基材などの可撓性を有さないリジット基材、および、プラスチック樹脂からなるフィルムなどの可撓性を有するフレキシブル基材が挙げられる。プラスチック樹脂としては、例えば、ポリエチレンテレフタラート(PET)、ポリエチレンナフタレート(PEN)、ポリエーテルサルホン(PES)、ポリイミド(PI)、ポリエーテルエーテルケトン(PEEK)、ポリカーボネート(PC)、ポリフェニレンサルファイド(PPS)およびポリエーテルイミド(PEI)などが挙げられる。
基材21が透明性を有する場合、可視光領域における透過率は80%以上であることが好ましい。ここで、透過率は、JIS K7361-1(プラスチック-透明材料の全光透過率の試験方法)により測定することができる。
第1電極22の厚みが厚すぎると、第1電極22による段差が大きくなるため、絶縁層を良好に形成することが困難となる可能性があるからである。また、第1電極22の厚みが薄すぎると良好な導電性を示すことが困難となる可能性があるからである。
上記接触角が大きすぎると、後から形成する導電性凸部3の撥液性と濡れ性差が形成できなくなるからである。また、上記接触角が小さすぎると導体組成物インクが濡れ広がりやすくなり、第1電極22に隣接する他の電極などに導電性凸部3が形成されて導通不良が生じやすくなる可能性があるからである。
なお、「水との接触角」は、25℃における水との接触角をいう。
本実施形態における上記接触角は、例えば、測定対象上に1マイクロリットルの液体を滴下し、滴下した液滴の形状を側面より観測し、液滴と測定対象とのなす角を計測することにより測定することができる。本実施形態における接触角は、例えば、井元製作所製接触角測定装置を用いて測定することができる。また、本発明における接触角は、例えば、協和界面科学製接触角計 DM-901を用いて測定することができる。
また、第1電極22の形成方法としては、導電性ペーストを用いた印刷方法により形成することができる。印刷法としては、例えば、インクジェット法、スクリーン印刷法、グラビアオフセット印刷法、反転オフセット印刷法などが挙げることができる。
本実施形態においては、第1電極22の形成方法として、印刷法を用いた方法を採用することが好ましい。印刷法により形成された導電層は、蒸着法などにより形成された導電層に比べて導電層の表面の濡れ性を調整しやすく、導電性凸部3の形状を制御しやすいからである。
配線部材用絶縁層の厚みについては、本実施形態により製造される積層配線部材1の用途などに応じて適宜選択することができる。
配線部材用絶縁層の形成方法としては、後述する絶縁層4の形成方法を用いることができる。また、配線部材用絶縁層が無機材料である場合は、例えば、CVD法などを採用することができる。
本工程に用いられる導体組成物インクは、導電性材料、撥液剤および溶媒を含むものである。
導電性材料は、導電性凸部3の導電性発現の起源となるものである。導電性材料としては、導電性凸部3に所望の導電性を付与することができるものであり、具体的には金属粒子である。
導電性材料は、金属粒子が溶媒中に分散したナノコロイドであってもよい。
金属粒子の金属種としては、銀、銅、水銀、スズ、インジウム、ニッケル、パラジウム、白金、および金などが挙げられる。なお、これらは1種を単独で用いてもよく、2種以上を併用してもよい。これらの中でも、上述の撥液剤との親和性の観点から、銀が特に好ましい。
金属粒子は、平均粒子径が10nm以上1000nm以下であることが好ましい。また、直径50nm以下の金属ナノワイヤーを含んでも良い。金属粒子の平均粒子径は、透過型電子顕微鏡(TEM)観察により測定できる。具体的には、50個程度の粒子を含む視野において、全ての粒子の投影面積円相当径を測定し、その平均を算出する方法が挙げられる。
自己組織化単分子膜を形成するフッ素含有チオール化合物は、導電性材料として金属粒子を用いた場合に、導電性を確保しつつ、金属粒子に撥液性をもたらすことができる。その結果、導体組成物インクで得られる導電性凸部は導電性と撥液性を両立できる。
なお、撥液剤は、フッ素含有チオール化合物に限定されるものではなく、フッ素を含む組成物(フッ素含有化合物)であればよい。このようなフッ素含有化合物としては、例えば、フッ素含有ジスルフィド化合物が挙げられる。
ジルオキシ)-1-ウンデカンチオールなどが挙げられる。これらの中でも、撥液性の観点からトリフルオロメチルベンゼンチオール、2,3,5,6-テトラフルオロ-4-(トリフルオロメチル)ベンゼンチオールが特に好ましい。
溶媒としては、水、アルコール系溶媒(モノアルコール系溶媒、ジオール系溶媒、多価アルコール系溶媒など)、炭化水素系溶媒、ケトン系溶媒、エステル系溶媒、エーテル系溶媒、グライム系溶媒、ハロゲン系溶媒などが挙げられる。これらの溶媒は、1種を単独で用いてもよく、2種以上を混合して用いてもよい。これらの中でも、印刷性の観点から、アルコール系溶媒が好ましい。アルコール系溶媒としては、イソプロピルアルコール、ヘキサノール、ヘプタノール、オクタノール、ノナノール、デカノール、ウンデカノール、ドデカノール、トリデカノール、テトラデカノール、ペンタデカノール、ヘキサデカノール、シクロヘキサノール、1-メトキシ-2-プロパノールなどが挙げられる。また、ケトン系溶媒としては、シクロヘキサノン、メチルイソブチルケトンなどが挙げられる。
また、溶媒の表面張力は、25℃において40mN/m以上65mN/m以下であることが好ましい。溶媒の表面張力が上記範囲内であれば、導体組成物インクを下地に十分に付着させることができる。なお、表面張力は、ペンダントドロップ法により測定できる。
各種任意成分としては、分散剤などが挙げられる。
これらの任意成分は、導体組成物インク全量に対して、10質量%以下であることが好ましい。
なお、表面エネルギーは、各溶媒にて測定した接触角の値から、北崎、畑の拡張Fowkes式に基づく幾何学平均法による解析(北崎寧昭、畑敏雄ら、日本接着協会誌、第8巻(3)131-141頁(1972年))で求めた値を言う。
導体組成物インクをスピンコートし焼成した固化膜の表面エネルギーを調整する手段としては、撥液剤の種類や配合量を調整することなどが挙げられる。
固化膜の表面エネルギーが前記下限値よりも小さくなると、撥液剤の量が多くなり、導体組成物インク中の導電性材料が凝集し、インク状態を保持できなくなる。また、固化膜の表面エネルギーが前記上限値よりも大きくなると、撥液性が低下し、絶縁層を開孔することができなくなる。また、同様の観点から、固化膜の表面エネルギーは、32mN/m以上70mN/m以下であることが好ましく、35mN/m以上60mN/m以下であることがより好ましく、40mN/m以上50mN/m以下であることが特に好ましい。
本工程においては、上述した導体組成物インクは第1電極22上にパターン状に塗布される。
ここで、「導体組成物インクをパターン状に塗布する」とは、第1電極22上に所定の平面視形状を有するように導体組成物インクを塗布することをいい、第1電極22が形成された配線部材2上の全面に導体組成物インクを塗布する場合を含まないことをいう。
本工程においては、導体組成物インクを第1電極22上に塗布することができればよく、図2Aに示すように、第1電極22上にのみ導体組成物インクを塗布し、付着物3Aを形成してもよく、図2Bに示すように第1電極22上およびその近傍に導体組成物インクを塗布し、付着物3Aを形成してもよい。この場合、導体組成物インクは、通常、第1電極22上に塗布され、かつ上記第1電極22に隣接する他の電極22aと導通しないように塗布される。本実施形態においては導体組成物インクを第1電極22上にのみ塗布することがより好ましい。第1電極22の表面の濡れ性および導体組成物インクの物性を調整して導電性凸部3の形状を調整しやすくなるからである。
なお、図2A,図2Bは、導体組成物インクの塗布位置について説明する説明図である。
本工程においては、焼成前または焼成中に超音波などを照射して撥液剤の移行を促進させる処理を行なってもよい。
また、本工程における焼成温度および焼成時間については、導体組成物インクに含まれる溶媒、撥液剤などの種類に応じて適宜調整される。
本工程により形成される導電性凸部3は、第1電極22上に形成されるものである。導電性凸部3は、複数形成されていてもよい。また、導電性凸部3は、撥液性を有し、かつヴィアポストとして機能する。この導電性凸部3は、前記導電性材料および前記撥液剤を含み、表面エネルギーが30mN/mより大きく80mN/m以下である導電体であることが必要である。また、この導電体においては、表面エネルギーおよび導電性の観点から、表面に前記導電性材料および前記撥液剤が露出していることが好ましい。
ここで、「導電性凸部が撥液性を有する」とは、導電性凸部3の表面と水との接触角が、第1電極22の表面と水との接触角および基材21の表面と水との接触角よりも大きいことをいう。
具体的には、導電性凸部3の表面と水との接触角と、第1電極22の表面と水との接触角との差が、5°以上であることをいい、好ましくは20°以上であることをいう。両者の接触角の差が小さいと、導電性凸部3が形成された配線部材2上に樹脂組成物を塗布した場合に濡れ性の差を利用して、樹脂組成物を弾くことが困難となる可能性があるからである。
また、上記接触角の差の上限値としては、導電性凸部3の材料、第1電極22の材料などに応じて適宜決定され、特に限定されないが、例えば、100°程度である。
また、上記接触角の差の上限値としては、導電性凸部3の材料、基材21の材料などに応じて適宜決定され、特に限定されないが、例えば、100°程度である。
導電性凸部3の形成位置については、通常は、上述した導体組成物インクの塗布位置と同様である。
なお、図3A~図3Cは、本実施形態における導電性凸部3の縦断面形状について説明する説明図である。導電性凸部3の縦断面形状とは、基材21に対して垂直方向の導電性凸部3の断面形状をいう。
なお、「導電性凸部3の大きさ」とは、導電性凸部3の平面視形状の大きさをいい、例えば、平面視形状が円形状の場合は直径をいい、平面視形状が四角形状の場合は、一辺の幅をいう。また、平面視形状が長方形、楕円形などの短辺および長辺を有する形状の場合は短辺の幅をいう。また、平面視形状が多角形状の場合は、内接円の直径をいう。
具体的に導電性凸部3の大きさとは、図4においてuで示される距離をいう。
なお、「導電性凸部3の高さ」とは、導電性凸部3の縦断面形状において基材と垂直方向の距離が最大となる部分の値をいい、後述する図5A,図5Bにおいてxで示される距離をいう。
絶縁層形成工程においては、図1Cに示すように、導電性凸部3が形成された配線部材2上に樹脂組成物の塗膜4Aを形成して、硬化させることにより、ヴィアポストとして機能する導電性凸部3を有する絶縁層4を形成する(図1D参照)。
本工程に用いられる樹脂組成物は、少なくとも樹脂を含有し、必要に応じて重合開始剤等その他の成分を含有する。ここで、樹脂とは、モノマーやオリゴマーの他、ポリマーを含む概念である。
樹脂としては、例えば、アクリレート系、エポキシ系、ポリエステル系などの電離放射線硬化性樹脂、アクリレート系、ウレタン系、エポキシ系、ポリシロキサン系などの熱硬化性樹脂が挙げられる。なお、電離放射線とは、分子を重合させて硬化させ得るエネルギーを有する電磁波または荷電粒子を意味し、例えば、すべての紫外線(UV-A、UV-B、UV-C)、可視光線、ガンマー線、X線、電子線などが挙げられる。
このような樹脂としては、なかでも、熱硬化性樹脂であることが好ましい。熱硬化性樹脂を用いることにより、絶縁層4の絶縁性をより良好なものとすることができるからである。
また、本工程に用いられる樹脂組成物として、フッ素系樹脂組成物を用いても良い。フッ素系樹脂組成物とは、少なくともフッ素系樹脂を含有し、必要に応じて重合開始剤などのその他の成分を含有する。
フッ素系樹脂組成物を構成する樹脂としては、フッ素が添加されたポリイミド、フッ素が添加されたポリパラキシレン、ポリスチレン、サイトップ(登録商標)、テフロン(登録商標)、テフロン(登録商標)AF、フルオロポリアリールエーテルなどが挙げられる。また、代表的な例としては、サイトップ(旭硝子社製)が挙げられるが、これに限定されるものではない。
このような樹脂としては、なかでも、熱硬化性樹脂であることが好ましい。熱硬化性樹脂を用いることにより、絶縁層4の絶縁性をより良好なものとすることができるからである。
また、樹脂組成物がフッ素系樹脂組成物である場合には、通常、フッ素系溶媒を含有するものである。ただし、フッ素系樹脂組成物をパッシベーション層として用いる場合には、下地の半導体層などの、溶剤への耐性が低い下地層に対して、ダメージを与えないフッ素系溶媒を選択する必要がある。
なお、粘度の測定方法については、粘度を精度良く測定できる方法であれば特に限定されるものではないが、例えば、レオメーター、B型粘度計、キャピラリー式粘度計などの粘度測定装置を用いる方法が挙げられる。また、粘度の測定方法としては、デジタル粘度計(東機産業株式会社 TV-35)を用いることができる。
なお、表面張力の測定方法については、表面張力を精度良く測定できる方法であれば特に限定されるものではないが、例えば、Wilhelmy法(プレート法)、懸滴法(ペンダント・ドロップ法)、Young-Laplace法、du Nouy法などが挙げられる。また、表面張力の測定方法としては、高精度表面張力計(協和界面科学社 DY-700)を用いることができる。
本工程においては、絶縁層4は、上述した樹脂組成物を導電性凸部3が形成された配線部材2上に塗布することにより形成される。
塗布方法としては、所望の厚みを有する絶縁層4を形成することができれば特に限定されず、一般的な塗布法を用いることができる。具体的には、スリットコート法、スピンコート法、ダイコート法、ロールコート法、バーコート法、LB法、ディップコート法、スプレーコート法、ブレードコート法、およびキャスト法などが挙げられる。本実施形態においては、なかでも、スピンコート法、およびスリットコート法を用いることが好ましい。絶縁層4の平坦性を良好なものとすることができるからである。
また、導電性凸部3の高さよりも樹脂組成物の塗膜4Aの厚みが厚い場合、塗膜4Aは導電性凸部3を覆うように形成されていてもよい。樹脂組成物の粘度および表面張力などを調整することにより、導電性凸部3上に塗布された樹脂組成物を時間経過とともに弾くようにすることができる。
絶縁層4は、第1電極22と後述する第2電極6とを絶縁するために形成されるものである。また、絶縁層4は、ヴィアポストとして機能する導電性凸部3を有する。
また、本実施形態により製造される積層配線部材1の第2電極6が形成された面をより平坦なものとすることができるため、積層配線部材1を他の構成と良好に積層させて配置させることができるからである。
「第1電極22上における絶縁層4の厚み」とは、第1電極22の表面からの絶縁層の厚さ方向の距離をいい、図5A,図5Bにおいてyで示される距離をいう。
なお、図5A,図5Bは、本実施形態における絶縁層4について説明する説明図である。
第2電極形成工程においては、図1Eに示すように、ヴィアポストとして機能する導電性凸部3と導通するように、絶縁層4上に第2電極6を形成する。この場合、絶縁層4から突出した導電性凸部3の少なくとも一部と、第2電極6とが接触し、導通する。
第2電極6は、通常、絶縁層4上にパターン状に形成される。第2電極6の平面視形状としては、本実施形態の製造方法により製造される積層配線部材1の種類に応じて適宜選択することができる。
本実施形態の積層配線部材の製造方法は、上述した各工程を有していれば特に限定されず、必要な構成を適宜選択して追加することができる。例えば、上述した配線部材2を形成する工程などが挙げられる。
本実施形態の積層配線部材の製造方法は、ヴィアポストを介して2つの電極が導通する積層構造を有するデバイスの製造方法に適用できる。具体的には、例えば、半導体素子、タッチパネルセンサ、RF-ID(Radio Frequency Identification)、有機エレクトロルミネッセンス素子、フレキシブルプリント基板(FPC)などの製造方法に適用できる。
本実施形態の積層配線部材1は、例えば、上述の積層配線部材の製造方法により製造できるものである。そして、本実施形態の積層配線部材1は、基材21および基材21上に形成された第1電極22を有する配線部材2と、導電性材料および撥液剤を含み、第1電極22上にパターン状に形成され、第1電極22と導通し、ヴィアポストとして機能する導電性凸部3と、樹脂組成物からなり、導電性凸部3を有する絶縁層4と、導電性凸部3と導通し、絶縁層4上に形成された第2電極6と、を備えるものである。
本実施形態の積層配線部材1は、液晶ディスプレイ、テレビ、カーナビゲーション、携帯電話、ゲーム機、デジタルカメラ、パーソナルコンピュータ、プリンタなどの電子機器に使用できる。
次に、本実施形態の半導体素子の製造方法を図面に基づいて説明する。
なお、本実施形態の半導体素子の製造方法における工程の一部は、上述した本実施形態の積層配線部材の製造方法と同様であるから、その詳細な説明の一部は省略または簡略化する。
また、以下の説明において、「半導体トランジスタ」とは、ソース電極、ドレイン電極、半導体層、およびゲート電極を有する構成を指す。
図6A~図6Dは、本実施形態の半導体素子の製造方法を示す工程図である。
図6A~図6Dにおいては、ボトムゲートボトムコンタクト型の半導体トランジスタを有する半導体素子を製造する例について説明する。本実施形態の半導体素子の製造方法においては、まず図6Aに示すように、基材31、基材31上に形成されたゲート電極32、ゲート電極32を覆うように形成されたゲート絶縁層33、ゲート絶縁層33上に形成されたソース電極34およびドレイン電極35、並びにソース電極34およびドレイン電極35の間のチャネル領域に形成された半導体層36を有する配線部材2を準備する。次に、導電性材料、撥液剤および溶媒を含む導体組成物インクをドレイン電極35上にパターン状に塗布して焼成することにより、図6Bに示すように、ドレイン電極35と導通し撥液性を有する導電性凸部3を形成する(導電性凸部形成工程)。次に、図示はしないが、ソース電極34、ドレイン電極35および半導体層36を覆うように樹脂組成物の塗膜を形成して硬化させることにより、図6Cに示すように、ヴィアポストとして機能する導電性凸部3を有する絶縁層4としてパッシベーション層37を形成する(絶縁層形成工程)。次に、図6Dに示すように、ヴィアポストとして機能する導電性凸部3と導通するように、パッシベーション層37上に外部入出力電極38を形成する(電極形成工程)。以上の工程により、半導体素子30を製造することができる。
なお、図7Cについては、遮光層39上に外部入出力電極38を形成する工程を示している。
図7A~図7Cにおいて説明していない符号については、図6A~図6Dにおいて説明した内容と同様とすることができるため、ここでの説明は省略する。
なお、図9は、本実施形態により製造される半導体素子の一例を示す概略断面図であり、トップゲートトップコンタクト型の半導体トランジスタを有する半導体素子の例を示している。
導電性凸部形成工程においては、基材31、基材31上(または基材31上に形成されたゲート絶縁層33上)に形成されたソース電極34およびドレイン電極35、並びにソース電極34およびドレイン電極35の間のチャネル領域に形成された半導体層36を有する配線部材2を準備し、導電性材料、撥液剤および溶媒を含む導体組成物インクをドレイン電極35上にパターン状に塗布して焼成することにより、ドレイン電極35と導通し、撥液性を有し、かつヴィアポストとして機能する導電性凸部3を形成する。
配線部材2は、半導体トランジスタの構造によっても異なるが、例えば図6Aに示すようにボトムゲートボトムコンタクト型の半導体トランジスタを有する半導体素子を製造する場合、基材31と、ゲート電極32と、ゲート絶縁層33と、ソース電極34およびドレイン電極35と、半導体層36とを有するものである。以下、各構成について説明する。なお、基材31については、上述した積層配線部材の製造方法で用いるものと同様とすることができるため、ここでの説明は省略する。
ソース電極34およびドレイン電極35は、基材31上に直接形成されてもよく、後述するようにゲート絶縁層33上に形成されてもよい。
チャネル長さとしては、チャネル領域内に半導体層を形成可能な程度であれば特に限定されないが、1μm以上100μm以下であることが好ましく、3μm以上50μm以下であることがより好ましく、5μm以上10μm以下であることが特に好ましい。チャネル長さとは、ソース電極34およびドレイン電極35の間の距離をいう。
半導体層36の形成位置は、半導体トランジスタの構造に応じて適宜選択され、通常、図8Aおよび図9に示すように基材31上、または、図6Aおよび図7Aに示すようにゲート絶縁層33上に形成される。また、図6Aおよび図8Aに示すように、ソース電極34およびドレイン電極35,35a上に半導体層36が形成されてもよく、図7Aおよび図9に示すように、半導体層36上にソース電極34およびドレイン電極35が形成されてもよい。
半導体層36としては、有機半導体層であってもよく、無機半導体層であってもよい。
有機半導体層の材料、厚みおよび形成方法については、一般的な有機半導体層に用いられるものと同様とすることができる。また、無機半導体層の材料、厚み、形成方法については、一般的な無機半導体層に用いられるものと同様とすることができる。
ゲート電極32の材料としては、上述した積層配線部材の製造方法における第1電極の材料から適宜選択して用いることができる。また、ゲート電極32の厚みおよび形成方法については、上述した積層配線部材の製造方法における第1電極の厚みおよび形成方法と同様とすることができるため、ここでの説明は省略する。
ゲート絶縁層33を構成する材料、厚みおよび形成方法については、上述した積層配線部材の製造方法における配線部材用絶縁層と同様とすることができるため、ここでの説明は省略する。
導体組成物インク、その塗布方法および焼成方法、並びに導電性凸部については、上述した積層配線部材の製造方法におけるものと同様とすることができるため、ここでの説明は省略する。
絶縁層形成工程においては、ソース電極34、ドレイン電極35および半導体層36を覆うように樹脂組成物の塗膜を形成して硬化させることにより、ヴィアポストとして機能する導電性凸部3を有する絶縁層(パッシベーション層37など)を形成する。
本工程により形成される絶縁層としては、半導体トランジスタの構造に応じて適宜選択される。例えば、本実施形態により製造される半導体素子30がトップゲート型の半導体トランジスタを有する場合は、絶縁層としては、少なくともゲート絶縁層33が形成される。
一方、本実施形態により製造される半導体素子30がボトムゲート型の半導体トランジスタを有する場合は、絶縁層としては、パッシベーション層37および遮光層39の少なくともいずれかが形成される。
絶縁層として遮光層39を形成する場合、樹脂組成物には遮光性材料が含有される。遮光性材料については、一般的な有機半導体素子に用いられるものと同様とすることができるため、ここでの説明は省略する。
なお、各層の厚みと導電性凸部の高さとの関係などについては、上述した積層配線部材の製造方法における絶縁層の厚みと導電性凸部の高さとの関係などと同様とすることができるため、ここでの説明は省略する。
電極形成工程においては、ヴィアポストとして機能する導電性凸部3と導通するように、絶縁層(パッシベーション層37、ゲート絶縁層33など)上に中間電極35bまたは外部入出力電極38を形成する。
一方、本実施形態により製造される半導体素子30がボトムゲート型の半導体トランジスタを有する場合は、パッシベーション層37上に外部入出力電極38を形成する。
本工程により形成される外部入出力電極38としては、一般的な半導体素子に用いられるものと同様とすることができる。例えば、本実施形態の半導体素子30を表示装置の駆動に用いる場合は、画素電極を挙げることができる。また、本実施形態の半導体素子30を圧力センサーや温度センサーに用いる場合は、入力電極を挙げることができる。
本実施形態の半導体素子の製造方法は、上述した各工程を有していれば特に限定されず、必要な工程を適宜選択して追加することができる。
また、本実施形態により製造される半導体素子30がトップゲート型の半導体トランジスタを有し、かつ中間電極35bを有する場合は、通常、中間電極35b上にパッシベーション層37を形成する工程、およびパッシベーション層37上に外部入出力電極38を形成する工程が行われる。この際、図8A~図8Eに示すように、ヴィアポストとして機能する導電性凸部3bを有するパッシベーション層37を形成してもよい。
本実施形態により製造される半導体素子30が有する半導体トランジスタとしては、ボトムゲートトップコンタクト型、ボトムゲートボトムゲート型、トップゲートトップコンタクト型、またはトップゲートボトムコンタクト型のいずれの形態であってもよい。
本実施形態により製造される半導体素子30は、例えば、TFT方式を用いる表示装置のTFTアレイ基材として用いることができる。このような表示装置としては、例えば、液晶表示装置、電気泳動表示装置、有機EL表示装置などが挙げられる。また、半導体素子は、温度センサーや圧力センサーなどに用いることもできる。
本実施形態の半導体素子30は、例えば、上述の半導体素子の製造方法により製造できるものである。そして、本実施形態の半導体素子30は、基材31、基材31に形成されたソース電極34およびドレイン電極35,35a、並びにソース電極34およびドレイン電極35,35aの間のチャネル領域に形成された半導体層36を有する配線部材2と、導電性材料および撥液剤を含み、ドレイン電極35,35a上にパターン状に形成され、ドレイン電極35,35aと導通し、ヴィアポストとして機能する導電性凸部3,3aと、樹脂組成物からなり、導電性凸部3,3aを有する絶縁層(パッシベーション層37など)と、導電性凸部3,3aと導通し、絶縁層(パッシベーション層37など)上に形成された中間電極35bまたは外部入出力電極38と、を備えるものである。
本実施形態の半導体素子30は、液晶ディスプレイ、テレビ、カーナビゲーション、携帯電話、ゲーム機、デジタルカメラ、パーソナルコンピュータ、プリンタなどの電子機器に使用できる。
本発明は前述の実施形態に限定されるものではなく、本発明の目的を達成できる範囲での変形、改良などは本発明に含まれるものである。
例えば、前記実施形態の積層配線部材の製造方法では、第1電極と第2電極との導通を図り、2層の配線電極を有する積層配線部材を製造したが、これに限定されない。3層以上の配線電極であっても、前記実施形態の積層配線部材の製造方法を適用できる。
[実施例1]
基材として、ガラス(Corning社製のEagle XG、大きさ:40mm×40mm、厚み:0.7mm)を準備した。上記基材の表面にスピンコート法により、導体組成物インク(銀ナノコロイド(平均粒子径:40nm)と2,3,5,6-テトラフルオロ-4-(トリフルオロメチル)ベンゼンチオールと溶媒(水とエチレングリコールと1,3-プロパンジオールとグリセリンの混合溶媒)を、質量比39.7:0.8:59.5の割合で混ぜたもの)を成膜し、180℃30分間焼成し固化膜を形成した。その固化膜の表面エネルギーを測定したところ、48.3mN/mとなった。
基材として、ガラス(Corning社製のEagle XG、大きさ:40mm×40mm、厚み:0.7mm)を準備した。上記基材の表面に真空蒸着法で金の薄膜を成膜した。金の薄膜の厚みを段差計(KLA-Tencor P-15)で測定した結果50nmであった。
上述の金電極上に、実施例1で用いた導体組成物インクを、インクジェット印刷法により同位置に繰り返し吐出し、180℃で30分間焼成することにより、撥液性を有する導電性凸部を形成した。この導電性凸部は、直径30μmの径で、高さ5.5μmであった。
樹脂組成物の調製のために、Poly(methyl methacrylate)(PMMA、シグマアルドリッチ445746)を、1-Methoxy-2-propyl acetate(関東化学)に5質量%で溶解させた。この樹脂組成物の表面張力を高精度表面張力計(協和界面科学社 DY-700)で測定すると25℃において29.4mN/mであった。また、上記樹脂組成物の粘度をデジタル粘度計(英弘精機株式会社 DV-E)で測定した結果、25℃において113mPa・sであった。
導電性凸部を形成した上記基材の表面に上述の樹脂組成物をアプリケーター(PI-1210自動塗工装置)を用いて塗布した後、130℃のホットプレート(アズワン EC-1200NP)上で5分乾燥させ、PMMAによる絶縁層を形成した。絶縁層表面を顕微鏡(オリンパス社 MX61)で観察すると、上述の導電性凸部上の絶縁層は開孔を示していた。
また、上述した金電極と直交するように、真空蒸着法で金の薄膜を50nmの厚さで成膜した。そして、下部の金電極と、上部の金電極の電気的接続を確認したところ、導通を確認できた。
以上より、導電性凸部により絶縁層が貫かれ、開孔しており、導電性凸部がヴィアポストとして機能することが確認された。
基材として、ガラス(Corning社製のEagle XG、大きさ:40mm×40mm、厚み:0.7mm)を準備した。上記基材の表面にスピンコート法により、導体組成物インク(銀ナノコロイド(平均粒子径:40nm)と2,3,5,6-テトラフルオロ-4-(トリフルオロメチル)ベンゼンチオールと溶媒(水とエチレングリコールと1,3-プロパンジオールとグリセリンの混合溶媒)を、質量比39.4:1.5:59.1の割合で混ぜたもの)を成膜し、180℃30分間焼成し固化膜を形成した。その固化膜の表面エネルギーを測定したところ、43.8mN/mとなった。
基材として、ガラス(Corning社製のEagle XG、大きさ:40mm×40mm、厚み:0.7mm)を準備した。上記基材の表面に真空蒸着法で50nmの金の薄膜を成膜した。上述の金電極上に、実施例3で用いた導体組成物インクを、インクジェット印刷法により繰り返し吐出し、180℃で30分間焼成することにより、撥液性を有する導電性凸部を形成した。この導電性凸部は、直径26μmの径で、高さ5μmであった。
フッ素系樹脂組成物として、サイトップ(CTL-809M、旭硝子社製)を用いた。サイトップの表面張力を高精度表面張力計で測定すると25℃において19mN/mであった。また、上記フッ素系樹脂組成物の粘度をデジタル粘度計(東機産業株式会社 TV-35)で測定した結果、25℃において311mPa・sであった。なお、サイトップは、フッ素系溶媒にて適宜希釈を行ってもよい。
導電性凸部を形成した上記基材の表面に上述のフッ素系樹脂組成物をスピンコーター(MS-A15 ミカサ株式会社)を用いて500rpmで5秒回転させ、続けて4000rpmで30秒回転させ塗布した後、180℃のホットプレート上で30分乾燥させ、サイトップによるフッ素系絶縁層を形成した。フッ素系絶縁層表面を顕微鏡で観察すると、上述の導電性凸部を中心にフッ素系絶縁層は直径12.5μmの開孔を示しており、導電性凸部の表面は露出していた。フッ素系絶縁層の膜厚を段差計で測定した結果400nmであった。また導電性凸部を含む領域を同じく段差計で測定すると、導電性凸部の表面はフッ素系絶縁層の表面から4.6μm上方に位置しており、双方の高さに応じた段差が形成されていた。
また、上述した金電極と直交するように、真空蒸着法で金の薄膜を50nmの厚さで成膜した。そして、下部の金電極と、上部の金電極の電気的接続を確認したところ、導通を確認できた。
以上より、導電性凸部によりフッ素系絶縁層が貫かれ、開孔しており、導電性凸部がヴィアポストとして機能することが確認された。
基材として、ガラス(Corning社製のEagle XG、大きさ:40mm×40mm、厚み:0.7mm)を準備した。上記基材の表面にスピンコート法により、市販の銀ナノインク(シグマアルドリッチ736465-100G)を成膜し、180℃30分間焼成し固化膜を形成した。その固化膜の表面エネルギーを測定したところ、90.9mN/mとなった。
基材として、ガラス(Corning社製のEagle XG、大きさ:40mm×40mm、厚み:0.7mm)を準備した。上記基材の表面に真空蒸着法で金の薄膜を成膜した。金の薄膜の厚みを段差計で測定した結果50nmであった。上述の金電極上に、インクジェット印刷法により、市販の銀ナノインク(シグマアルドリッチ736465-100G)を印刷し、180℃で30分間焼成することにより、導電性凸部を形成した。この導電性凸部は、直径50μmの径で、高さ520nmであった。
上記基材の表面に実施例1と同様にしてサイトップによるフッ素系絶縁層を形成した。顕微鏡観察と段差測定による評価を行ったが導電性凸部の表面はフッ素系絶縁層で被覆されており開孔は確認されなかった。
以下の手順でトップゲートボトムコンタクト型の有機薄膜トランジスタを作製した。
基材として、実施例1のガラスを準備した。上記基材の表面にソース電極およびドレイン電極のパターンで開孔を持つメタルマスクを固定し、真空蒸着法で金の薄膜を成膜した。金の薄膜の厚みを実施例1と同じく測定すると100nmであった。このソース電極およびドレイン電極上にインクジェット印刷法によりRegioregular poly(3-hexylthiophene-2,5-diyl)(P3HT、シグマアルドリッチ698989)をDecahydronaphthalene(和光純薬工業)に1wt%で溶解させた有機半導体インクを塗布し、150℃のホットプレート上で10分間乾燥させた。
上述のソース電極およびドレイン電極においてトランジスタの動作には関わらない箇所に実施例4と同様にして撥液性を有する導電性凸部を形成した。次いで実施例4と同様にしてサイトップを塗布、乾燥することで厚み0.4μmのゲート絶縁層を形成した。ゲート絶縁層の表面には撥液性を有する導電性凸部の効果によってヴィアポストが形成されていることを顕微鏡観察から確認した。ソース電極およびドレイン電極それぞれに形成されたヴィアポストに重なる引き出し線のパターンの開孔を持つメタルマスクを基材に固定し、真空蒸着法で金を100nm蒸着し、ゲート絶縁層の下方にあるソース電極およびドレイン電極からの引き出し線を基材上に形成した。
上述の基材の表面にゲート電極パターンの開孔を持つメタルマスクを固定し、真空蒸着法でアルミニウムを200nm蒸着し、トップゲートボトムコンタクト型の有機薄膜トランジスタを作製した。
ヴィアポストを経由してソース電極およびドレイン電極に接続させた引き出し線に、それぞれ測定用のプローブを接触させ、半導体パラメーターアナライザー(アジレント社B1500A)を用いてトランジスタ特性を測定した。作製したトランジスタはソース電極およびドレイン電極間の電位差に応じて電流値が増大し、ゲート電圧がそれを制御可能な正常の動作を示した。
以上より、導電性凸部によりフッ素系絶縁層が貫かれ、開孔しており、層間導通が図れることが確認された。つまり、フッ素系絶縁層のヴィアポストを簡単な方法で形成することが可能であることが確認された。
2…配線部材
21…基材
22…第1電極
3,3a,3b…導電性凸部
4…絶縁層
4A…樹脂組成物の塗膜
6…第2電極
30…半導体素子
31…基材
32…ゲート電極
33…ゲート絶縁層
34…ソース電極
35,35a…ドレイン電極
35b…中間電極
36…半導体層
37…パッシベーション層
38…外部入出力電極
Claims (21)
- 基材および前記基材上に形成された第1電極を有する配線部材と、
導電性材料および撥液剤を含み、前記第1電極上に形成され、前記第1電極と導通し、ヴィアポストとして機能する、前記導電性材料が金属粒子であり、前記撥液剤が自己組織化単分子膜を形成するフッ素含有化合物であり、表面エネルギーが30mN/mより大きく80mN/m以下である導電体からなる導電性凸部と、
樹脂組成物からなり、前記導電性凸部を有する絶縁層と、
前記導電性凸部と導通し、前記絶縁層上に形成された第2電極と、を備え、
前記導電性凸部の高さが前記絶縁層の厚みよりも大きく、前記絶縁層から突出した前記導電性凸部の少なくとも一部が前記第2電極と導通している
ことを特徴とする積層配線部材。 - 請求項1に記載の積層配線部材において、
前記フッ素含有化合物が、フッ素含有チオール化合物である
ことを特徴とする積層配線部材。 - 請求項1または請求項2に記載の積層配線部材において、
前記導電体の表面に導電性材料および撥液剤が露出した
ことを特徴とする積層配線部材。 - 請求項1から請求項3までのいずれか1項に記載の積層配線部材において、
前記導電性凸部が、複数形成されている
ことを特徴とする積層配線部材。 - 請求項1から請求項4までのいずれか1項に記載の積層配線部材において、
前記導電性凸部の縦断面形状が、半円形状、半楕円形状、四角形状、中央に平坦部もしくは窪みを有している半円形状、中央に平坦部もしくは窪みを有している半楕円形状、および、中央に平坦部もしくは窪みを有している四角形状からなる群から選択される少なくとも1種である
ことを特徴とする積層配線部材。 - 請求項1から請求項5までのいずれか1項に記載の積層配線部材において、
前記樹脂組成物がフッ素系樹脂組成物である
ことを特徴とする積層配線部材。 - 請求項1から請求項6までのいずれか1項に記載の積層配線部材において、
前記導電性凸部の高さが、前記第1電極上における前記絶縁層の厚みに対して1倍を超え10倍以下である
ことを特徴とする積層配線部材。 - 請求項1から請求項7までのいずれか1項に記載の積層配線部材において、
前記導電性凸部の大きさが、10μm以上100μm以下である
ことを特徴とする積層配線部材。 - 請求項1から請求項8までのいずれか1項に記載の積層配線部材において、
前記導電性凸部のアスペクト比(高さ/大きさ)が、0.01以上0.5以下である
ことを特徴とする積層配線部材。 - 基材および前記基材上に形成された第1電極を有する配線部材を準備し、導電性材料、撥液剤および溶媒を含む導体組成物インクを前記第1電極上に塗布して焼成することにより、前記第1電極と導通し、撥液性を有し、かつヴィアポストとして機能する、前記導電性材料が金属粒子であり、前記撥液剤が自己組織化単分子膜を形成するフッ素含有化合物であり、表面エネルギーが30mN/mより大きく80mN/m以下である導電体からなる導電性凸部を形成する第1工程と、
前記導電性凸部が形成された前記配線部材上に樹脂組成物の塗膜を形成して硬化させることにより、前記導電性凸部を有する絶縁層を、前記導電性凸部の高さが前記絶縁層の厚みよりも大きくなるように、形成する第2工程と、
前記絶縁層から突出した前記導電性凸部の少なくとも一部と導通するように、前記絶縁層上に第2電極を形成する第3工程と、を備える
ことを特徴とする積層配線部材の製造方法。 - 請求項10に記載の積層配線部材の製造方法において、
前記フッ素含有化合物が、フッ素含有チオール化合物である
ことを特徴とする積層配線部材の製造方法。 - 請求項10または請求項11に記載の積層配線部材の製造方法において、
前記第1工程における前記導体組成物インクの焼成温度は、120℃以上200℃以下である
ことを特徴とする積層配線部材の製造方法。 - 請求項10から請求項12までのいずれか1項に記載の積層配線部材の製造方法において、
前記樹脂組成物がフッ素系樹脂組成物である
ことを特徴とする積層配線部材の製造方法。 - 請求項10から請求項13までのいずれか1項に記載の積層配線部材の製造方法において、
前記第2工程では、前記導電性凸部の高さが、前記第1電極上における前記絶縁層の厚みに対して1倍を超え10倍以下となるように、前記絶縁層を形成する
ことを特徴とする積層配線部材の製造方法。 - 請求項10から請求項14までのいずれか1項に記載の積層配線部材の製造方法において、
前記第1工程では、前記導電性凸部の大きさが、10μm以上100μm以下となるように、前記導電性凸部を形成する
ことを特徴とする積層配線部材の製造方法。 - 請求項10から請求項15までのいずれか1項に記載の積層配線部材の製造方法において、
前記第1工程では、前記導電性凸部のアスペクト比(高さ/大きさ)が、0.01以上0.5以下となるように、前記導電性凸部を形成する
ことを特徴とする積層配線部材の製造方法。 - 請求項10から請求項16までのいずれか1項に記載の積層配線部材の製造方法において、前記樹脂組成物の粘度が、25℃において、20mPa・s以上500mPa・s以下であることを特徴とする積層配線部材の製造方法。
- 請求項10から請求項17までのいずれか1項に記載の積層配線部材の製造方法において、前記樹脂組成物の表面張力が、20mN/m以上50mN/m以下である
ことを特徴とする積層配線部材の製造方法。 - 請求項10から請求項18までのいずれか1項に記載の積層配線部材の製造方法に用いる導体組成物インクであって、
導電性材料、撥液剤および溶媒を含み、前記導電性材料が金属粒子であり、前記撥液剤が自己組織化単分子膜を形成するフッ素含有チオール化合物であり、180℃で30分間加熱して得られる固化膜の表面エネルギーが30mN/mより大きく80mN/m以下である
ことを特徴とする導体組成物インク。 - 請求項1から請求項9までのいずれか1項に記載の積層配線部材を備える半導体素子であって、
前記第1電極がソース電極、ドレイン電極または中間電極であり、前記第2電極がゲート電極、中間電極または外部入出力電極であることを特徴とする半導体素子。 - 請求項1から請求項9までのいずれか1項に記載の積層配線部材を備えることを特徴とする電子機器。
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CN107004637A (zh) | 2017-08-01 |
KR20170097026A (ko) | 2017-08-25 |
US10026624B2 (en) | 2018-07-17 |
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