WO2015045727A1 - 気体制御装置 - Google Patents
気体制御装置 Download PDFInfo
- Publication number
- WO2015045727A1 WO2015045727A1 PCT/JP2014/072677 JP2014072677W WO2015045727A1 WO 2015045727 A1 WO2015045727 A1 WO 2015045727A1 JP 2014072677 W JP2014072677 W JP 2014072677W WO 2015045727 A1 WO2015045727 A1 WO 2015045727A1
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- WO
- WIPO (PCT)
- Prior art keywords
- pump
- gas
- container
- pressure
- hole
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/02—Pumping installations or systems specially adapted for elastic fluids having reservoirs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/02—Stopping, starting, unloading or idling control
- F04B49/022—Stopping, starting, unloading or idling control by means of pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/08—Regulating by delivery pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/01—Pressure before the pump inlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/05—Pressure after the pump outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B51/00—Testing machines, pumps, or pumping installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
- F17C5/06—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
Definitions
- the present invention relates to a gas control device that fills a container with a gas using a pump.
- Patent Literature 1 discloses a piezoelectric micro blower
- Patent Literature 2 discloses a piezoelectric pump
- a container having a characteristic in which the volume changes according to the pressure of the gas flowing into the inside does not require a linear PQ characteristic.
- the container is, for example, a float or a balloon.
- FIG. 22 is a graph showing the relationship between the pressure of the gas flowing into the inside of the floating ring and the volume of the floating ring.
- FIG. 23 is a graph showing the relationship between the pressure of the gas flowing into the balloon and the volume of the balloon.
- an object of the present invention is to provide a gas control device that can quickly fill a container with a characteristic that the volume changes according to the pressure of the gas flowing into the inside.
- the gas control device of the present invention has the following configuration in order to solve the above problems.
- the maximum flow rate of the gas that can be discharged from the first discharge hole by the first pump is larger than the maximum flow rate of the gas that can be discharged from the second discharge hole by the second pump,
- the maximum pressure of the gas that the second pump can discharge from the second discharge hole is higher than the maximum pressure of the gas that the first pump can discharge from the first discharge hole,
- the gas control apparatus according to claim 1, wherein the first discharge hole and the second discharge hole are connected to a container having a characteristic in which a volume changes according to a pressure of the gas flowing into the inside.
- the first pump sends gas to the container at a large discharge flow rate.
- the second pump delivers gas to the container at a high discharge pressure.
- the gas control apparatus of this invention can implement
- the gas control device of the present invention uses a large flow rate characteristic and a high pressure characteristic according to the PQ characteristic required by the container. For example, the gas control device of the present invention drives the first pump after driving the first pump or the first pump after driving the second pump according to the PQ characteristics required by the container. To do. Thereby, the gas control apparatus of the present invention can quickly fill the container with the characteristic that the volume changes according to the pressure of the gas flowing into the inside.
- the gas control apparatus of this structure can prevent gas flowing backward from the inside of the container to the first discharge hole of the first pump.
- the gas control apparatus having this configuration can prevent the gas from flowing back from the inside of the container to the second discharge hole of the second pump even when the second pump is not driven.
- a detector that detects the pressure of the gas in the container; A controller that starts driving one of the first pump and the second pump, and The controller starts driving one of the first pump and the second pump, and then monitors the atmospheric pressure in the container based on the output of the detector, and increases the atmospheric pressure. Accordingly, it is preferable to start driving the other pump.
- control unit instructs each pump to start driving based on the pressure value in the container.
- a third pump having a third suction hole and a third discharge hole for the gas,
- the maximum flow rate of the gas that the first pump can discharge from the first discharge hole is larger than the maximum flow rate of the gas that the third pump can discharge from the third discharge hole,
- the maximum pressure of the gas that the third pump can discharge from the third discharge hole is higher than the maximum pressure of the gas that the first pump can discharge from the first discharge hole,
- the third discharge hole is preferably connected to the second suction hole.
- the first pump sends gas to the container at a large discharge flow rate.
- the second pump delivers gas to the container at a high discharge pressure.
- the 2nd pump and the 3rd pump are connected in series, by driving simultaneously, air is sent to a container with a higher discharge pressure. For this reason, the gas control device having this configuration can also realize both a large flow rate characteristic and a high pressure characteristic.
- the gas control device of this configuration also uses a large flow rate characteristic and a high pressure characteristic according to the PQ characteristic required by the container.
- the gas control device of the present invention drives the first pump according to the PQ characteristics required by the container, and then drives the second pump after driving the second pump.
- the gas control apparatus of this structure can also quickly fill the gas into the container having the characteristic that the volume changes according to the pressure of the gas flowing into the inside.
- a fourth pump having a fourth suction hole and a fourth discharge hole for the gas,
- the maximum flow rate of the gas that the fourth pump can discharge from the fourth discharge hole is larger than the maximum flow rate of the gas that the second pump can discharge from the second discharge hole,
- the maximum pressure of the gas that the second pump can discharge from the second discharge hole is higher than the maximum pressure of the gas that the fourth pump can discharge from the fourth discharge hole,
- the fourth discharge hole is preferably connected to the container.
- the first pump sends gas to the container at a large discharge flow rate.
- the second pump delivers gas to the container at a high discharge pressure.
- a 4th pump sends out gas to a container with a big discharge flow rate.
- the gas control device having this configuration can also realize both a large flow rate characteristic and a high pressure characteristic.
- the gas control device of this configuration also uses a large flow rate characteristic and a high pressure characteristic according to the PQ characteristic required by the container.
- the gas control device of the present invention drives the first and fourth pumps in the order of the second pump and the third pump in accordance with the PQ characteristics required by the container.
- the gas control apparatus of this structure can also quickly fill the gas into the container having the characteristic that the volume changes according to the pressure of the gas flowing into the inside.
- At least one of the first pump or the second pump has a piezoelectric element as an actuator, a vibration plate having a first main surface joined to the piezoelectric element, and bending and vibrates by expansion and contraction of the piezoelectric element; It is preferable to have.
- the first pump is joined to the diaphragm, and forms a pump chamber together with the diaphragm, and the first casing is covered with a space to cover the first casing.
- a second housing that forms a ventilation path between The first casing is provided with a vent hole that allows communication between the inside and the outside of the pump chamber. It is preferable that the discharge hole is provided in a region facing the vent hole in the second casing.
- the vibration plate bends and vibrates due to expansion and contraction of the piezoelectric element. And the volume of a pump chamber changes periodically with the bending vibration of this diaphragm. Thereby, the gas outside the first pump is sucked into the pump chamber from the vent hole, and the gas in the pump chamber is discharged from the vent hole.
- the gas discharged from the pump chamber through the vent hole causes the gas existing outside the first pump to be drawn through the vent path and discharged from the discharge hole. Therefore, the flow rate of the gas discharged from the discharge hole is increased by the flow rate of the drawn gas.
- the second pump A frame that surrounds the diaphragm; A connecting portion that connects the diaphragm and the frame plate and elastically supports the diaphragm with respect to the frame plate; It is preferable to have a plate facing the second main surface of the diaphragm opposite to the first main surface and provided with a vent hole.
- the periphery of the diaphragm is not substantially fixed. Further, in this configuration, when a driving voltage is applied to the piezoelectric element, the vibration plate bends and vibrates due to expansion and contraction of the piezoelectric element, and the plate also vibrates as the vibration plate vibrates. Thereby, gas is attracted
- the gas control device of the present invention has the following configuration.
- a first pump having a gas first suction hole and a first discharge hole
- a second pump having a gas second suction hole and a second discharge hole
- the maximum flow rate of the gas that the first pump can suck from the first suction hole is larger than the maximum flow rate of the gas that the second pump can suck from the second suction hole
- the maximum suction pressure of the gas that can be sucked from the second suction hole by the second pump is larger than the maximum suction pressure of the gas that can be sucked from the first suction hole by the first pump.
- the first suction hole and the second suction hole are connected to a container having a characteristic that the volume changes according to the pressure of the gas remaining inside.
- the first pump sucks gas from the container with a large suction flow rate.
- the second pump sucks gas from the container with high suction pressure.
- the gas control apparatus of this invention can implement
- the gas control device of the present invention uses a large flow rate characteristic and a high pressure characteristic according to the PQ characteristic required by the container.
- the gas control device of the present invention drives the first pump after driving the first pump or the first pump after driving the second pump according to the PQ characteristics required by the container. To do.
- the gas control apparatus of this invention can draw
- the gas control device having this configuration can prevent the gas from flowing backward from the first suction hole to the inside of the container.
- the gas control device having this configuration can prevent the gas from flowing backward from the second suction hole to the inside of the container even when the second pump is not driven.
- (13) a detector that detects the pressure of the gas in the container;
- a control unit that starts driving one of the first pump and the second pump, and The control unit starts driving one of the first pump and the second pump, and then monitors the atmospheric pressure in the container based on the output of the detection unit. It is preferable to start driving.
- control unit instructs each pump to start driving based on the pressure value in the container.
- gas can be rapidly sucked from a container having a characteristic that the volume changes according to the pressure of the gas flowing into the inside.
- FIG. 5 is a cross-sectional view taken along line SS of the first pump 101 shown in FIG. 4.
- FIG. 7 is a cross-sectional view of the SS line of the first pump 101 when the first pump 101 shown in FIG.
- FIG. 7A is a view when the volume of the pump chamber is increased
- FIG. 7B is a view when the volume of the pump chamber is decreased.
- FIG. 9 is a cross-sectional view taken along line TT of the second pump 201 shown in FIG.
- FIG. 1 is a block diagram showing a configuration of a main part of the gas control device 100 according to the first embodiment of the present invention.
- FIG. 2 is a graph showing the PQ characteristic (pressure-flow rate characteristic) of the first pump 101 shown in FIG.
- FIG. 3 is a graph showing the PQ characteristics of the second pump 201 shown in FIG.
- the gas control device 100 includes a first pump 101, a second pump 201, a first check valve 102, a second check valve 202, and a flexible container 9.
- the container 9 has a characteristic that the volume changes according to the pressure of the air flowing into the inside.
- the container 9 is an air bag.
- the gas control device 100 is a massage machine that performs massage for a user by inflating or contracting an air bag.
- the relationship between the pressure of the gas flowing into the air bag and the volume of the air bag is the same as the relationship between the pressure of the gas flowing into the inside of the floating ring and the volume of the floating ring (see FIG. 22).
- the casing 110 of the gas control device 100 has a first vent hole 106 that communicates the inside and the outside of the casing 110, a second vent hole 107 that communicates the inside and the outside of the casing 110, and a flow connecting the holes.
- a road is formed.
- the first pump 101 has an air suction hole 53 and a discharge hole 24.
- the second pump 201 has an air suction hole 197 and a discharge hole 181.
- the first pump 101 is a pump having PQ characteristics shown in FIG. That is, the first pump 101 is a type of pump having a large discharge flow rate and a low discharge pressure.
- the second pump 201 is a pump having PQ characteristics shown in FIG. That is, the second pump 201 is a type of pump that has a small discharge flow rate and a high discharge pressure.
- the maximum flow rate of air that can be discharged from the discharge hole 24 by the first pump 101 is larger than the maximum flow rate of air that can be discharged from the discharge hole 181 by the second pump 201.
- the maximum pressure of air that can be discharged from the discharge hole 181 by the second pump 201 is higher than the maximum pressure of air that can be discharged from the discharge hole 24 by the first pump 101.
- the suction hole 53 of the first pump 101 communicates with the first vent hole 106.
- the suction hole 197 of the second pump 201 communicates with the second vent hole 107.
- the first pump 101 and the second pump 201 are connected in parallel to the container 9 via the first check valve 102 and the second check valve 202. Therefore, the discharge hole 24 of the first pump 101 communicates with the inside of the container 9. Further, the discharge hole 181 of the second pump 201 communicates with the inside of the container 9.
- the first check valve 102 prevents air from flowing from the inside of the container 9 to the discharge hole 24.
- the second check valve 202 prevents air from flowing from the inside of the container 9 to the discharge hole 181.
- the control unit 111 is composed of, for example, a microcomputer, and controls the operation of each unit of the gas control device 100.
- the control unit 111 has a timer circuit that measures time.
- FIG. 4 is an external perspective view of the first pump 101 shown in FIG.
- FIG. 5 is an exploded perspective view of the first pump 101 shown in FIG. 6 is a cross-sectional view taken along line SS of the first pump 101 shown in FIG.
- the first pump 101 includes an outer casing 17, a top plate 37, a side plate 38, a vibration plate 39, a piezoelectric element 40, and a cap 42 in order from the top, and has a structure in which these are stacked in order.
- the top plate 37, the side plate 38, and the diaphragm 39 constitute a pump chamber 36.
- the first pump 101 has a size of width 20 mm ⁇ length 20 mm ⁇ height of the region other than the nozzle 18 1.85 mm.
- the top plate 37 and the side plate 38 constitute the “first housing” of the present invention.
- the outer casing 17 corresponds to the “second casing” of the present invention.
- the top plate 37, the side plate 38, the vibration plate 39, and the piezoelectric element 40 constitute a pump body.
- the outer casing 17 has a nozzle 18 provided with a discharge hole 24 through which air is discharged, for example.
- the nozzle 18 has a size of an outer diameter of 2.0 mm ⁇ an inner shape (that is, a discharge hole 24) of a diameter of 0.8 mm ⁇ a height of 1.6 mm.
- Screw holes 56A to 56D are provided in the square of the outer casing 17.
- the outer casing 17 has a U-shaped cross section (c-shaped) with an opening at the bottom.
- the outer housing 17 houses the top plate 37 of the pump chamber 36, the side plate 38 of the pump chamber 36, the vibration plate 39, and the piezoelectric element 40.
- the outer casing 17 is made of, for example, resin.
- the top plate 37 of the pump chamber 36 has a disk shape and is made of metal, for example.
- the top plate 37 is provided with a central portion 61, a key-shaped protruding portion 62 that protrudes horizontally from the central portion 61 and contacts the inner wall of the outer casing 17, and an external terminal 63 for connecting to an external circuit. It has been.
- the central portion 61 of the top plate 37 is provided with a vent hole 45 that allows the inside and outside of the pump chamber 36 to communicate with each other.
- the vent hole 45 is provided at a position facing the discharge hole 24 of the outer casing 17.
- the top plate 37 is provided on the upper surface of the side plate 38.
- the side plate 38 of the pump chamber 36 has an annular shape, and is made of metal, for example.
- the side plate 38 is provided on the upper surface 39 ⁇ / b> A of the diaphragm 39. Therefore, the thickness of the side plate 38 is the height of the pump chamber 36.
- the diaphragm 39 has a disk shape and is made of metal, for example.
- the diaphragm 39 constitutes a pump chamber 36 together with the side plate 38 and the top plate 37.
- the piezoelectric element 40 has a disk shape and is made of, for example, a lead zirconate titanate ceramic.
- the piezoelectric element 40 expands and contracts according to the applied AC drive voltage.
- the piezoelectric element 40 is provided on the lower surface 39 ⁇ / b> B of the diaphragm 39 on the side opposite to the pump chamber 36.
- the joined body of the top plate 37, the side plate 38, the vibration plate 39, and the piezoelectric element 40 is elastically supported with respect to the outer casing 17 by the four projecting portions 62 provided on the top plate 37. Yes.
- the electrode conduction plate 70 includes an internal terminal 73 connected to the piezoelectric element 40 and an external terminal 72 connected to an external circuit.
- the tip of the internal terminal 73 is joined to the flat plate surface of the piezoelectric element 40 with solder. By setting the position joined by solder to a position corresponding to the bending vibration node of the piezoelectric element 40, the vibration of the internal terminal 73 can be further suppressed.
- the cap 42 is provided with a disk-shaped suction hole 53.
- the diameter of the suction hole 53 is larger than the diameter of the piezoelectric element 40.
- the cap 42 is provided with notches 55A to 55D at positions corresponding to the screw holes 56A to 56D of the outer casing 17.
- the cap 42 has a protruding portion 52 that protrudes toward the top plate 37 on the outer peripheral edge.
- the cap 42 sandwiches the outer casing 17 with the protruding portion 52, and houses the top plate 37 of the pump chamber 36, the side plate 38 of the pump chamber 36, the vibration plate 39, and the piezoelectric element 40 together with the outer casing 17.
- the cap 42 is made of resin, for example.
- a ventilation path 31 is provided between the joined body of the top plate 37, the side plate 38, the vibration plate 39 and the piezoelectric element 40 and the outer casing 17 and the cap 42.
- FIG. 7A and 7B show the SS of the first pump 101 when the first pump 101 shown in FIG. 1 is resonantly driven at the frequency (fundamental wave) of the primary vibration mode of the pump body. It is sectional drawing of a line. Here, the arrows in the figure indicate the flow of air.
- the discharge flow rate per power consumption is significantly increased. Therefore, the first pump 101 can obtain a large discharge flow rate with low power consumption.
- FIG. 8 is an external perspective view of the second pump 201 shown in FIG.
- FIG. 9 is an exploded perspective view of the second pump 201 shown in FIG.
- FIG. 10 is a cross-sectional view taken along line TT of the second pump 201 shown in FIG.
- the second pump 201 includes a cover plate 195, a substrate 191, a flexible plate 151, a spacer 120, a vibration plate unit 160, a piezoelectric element 142, a spacer 135, an electrode conduction plate 170, a spacer 130, and a lid plate 185. It has a stacked structure.
- the flexible plate 151, the spacer 120, the frame plate 161, the spacer 135, the electrode conduction plate 170, the spacer 130 and the lid plate 185 constitute a pump housing 180.
- the space inside the pump housing 180 corresponds to the pump chamber 145.
- the diaphragm 141 has an upper surface facing the cover plate 185 and a lower surface facing the flexible plate 151.
- the upper surface of the diaphragm 141 corresponds to the “first main surface” of the present invention.
- the lower surface of the diaphragm 141 corresponds to the “second main surface” of the present invention.
- the flexible plate 151 corresponds to the “plate” of the present invention.
- the piezoelectric element 142 corresponds to the “driving body” of the present invention.
- the piezoelectric element 142 is fixed to the upper surface of the vibration plate 141 with an adhesive.
- Each of the vibration plate 141 and the piezoelectric element 142 has a disk shape.
- the vibration plate 141 and the piezoelectric element 142 constitute a disk-shaped actuator 140.
- the diaphragm unit 160 including the diaphragm 141 is formed of a metal material having a linear expansion coefficient larger than that of the piezoelectric element 142.
- the diaphragm unit 160 is preferably formed of SUS430 or the like.
- the piezoelectric element 142 is preferably formed of a lead zirconate titanate ceramic.
- the linear expansion coefficient of the piezoelectric element 142 is almost zero, and the linear expansion coefficient of SUS430 is about 10.4 ⁇ 10 ⁇ 6 K ⁇ 1 .
- the thickness of the spacer 135 is preferably the same as or slightly thicker than that of the piezoelectric element 142.
- the diaphragm unit 160 includes a diaphragm 141, a frame plate 161, and a connecting portion 162.
- the diaphragm unit 160 is formed by integrally molding a metal plate by etching.
- a frame plate 161 is provided around the vibration plate 141.
- the diaphragm 141 is connected to the frame plate 161 by a connecting portion 162.
- the connecting portion 162 has an elastic structure having a small spring constant elasticity.
- the frame plate 161 is fixed to the flexible plate 151 via the spacer 120.
- the diaphragm 141 is flexibly elastically supported at three points with respect to the frame plate 161 by the three connecting portions 162. Therefore, the bending vibration of the diaphragm 141 is hardly hindered. That is, the second pump 201 has a structure in which the peripheral portion of the actuator 140 (of course, the central portion) is not substantially fixed.
- a spacer 135 is fixed to the upper surface of the frame plate 161 with an adhesive.
- the spacer 135 is made of resin.
- the thickness of the spacer 135 is the same as or slightly thicker than that of the piezoelectric element 142.
- the spacer 135 constitutes a part of the pump housing 180.
- the spacer 135 electrically insulates the electrode conduction plate 170 and the diaphragm unit 160 described below.
- the electrode conduction plate 170 is fixed to the upper surface of the spacer 135 with an adhesive.
- the electrode conduction plate 170 is made of metal.
- the electrode conduction plate 170 includes a frame portion 171 that is opened in a substantially circular shape, an internal terminal 173 that protrudes into the opening, and an external terminal 172 that protrudes to the outside.
- the tip of the internal terminal 173 is soldered to the surface of the piezoelectric element 142.
- vibration of the internal terminal 173 can be suppressed.
- the spacer 130 is bonded and fixed to the upper surface of the electrode conduction plate 170.
- the spacer 130 is made of resin.
- the spacer 130 is a spacer for preventing the solder portion of the internal terminal 173 from contacting the lid plate 185 when the actuator 140 vibrates. Further, it is also possible to suppress the vibration amplitude from being lowered due to air resistance due to the surface of the piezoelectric element 142 being excessively close to the cover plate 185. Therefore, the thickness of the spacer 130 may be approximately the same as the thickness of the piezoelectric element 142.
- a lid plate 185 in which a discharge hole 181 is formed is joined to the upper surface of the spacer 130.
- the lid plate 185 covers the upper part of the actuator 140. Therefore, air sucked through a vent hole 152 of the flexible plate 151 described later is discharged from the discharge hole 181.
- the discharge hole 181 is a discharge hole for releasing the positive pressure in the pump housing 180 including the cover plate 185. Therefore, the discharge hole 181 is not necessarily provided at the center of the lid plate 185.
- External terminals 153 for electrical connection are formed on the flexible plate 151.
- a vent hole 152 is formed at the center of the flexible plate 151.
- the flexible plate 151 faces the lower surface of the vibration plate 141 and is fixed to the frame plate 161 with the spacer 120 interposed therebetween.
- a substrate 191 is attached to the lower surface of the flexible plate 151 with an adhesive.
- a cylindrical opening 192 is formed in the center of the substrate 191.
- a part of the flexible plate 151 is exposed to the substrate 191 side through the opening 192 of the substrate 191.
- a part of the flexible plate 151 exposed in a circular shape can vibrate at substantially the same frequency as the actuator 140 due to fluctuations in air pressure accompanying vibration of the actuator 140.
- the portion of the flexible plate 151 facing the opening 192 is a circular movable portion 154 capable of bending vibration.
- the movable portion 154 corresponds to the center or the vicinity of the center of the region facing the actuator 140 of the flexible plate 151.
- a portion of the flexible plate 151 located outside the movable portion 154 is a fixed portion 155 fixed to the substrate 191.
- the natural frequency of the movable part 154 is designed to be the same as or slightly lower than the drive frequency of the actuator 140.
- the movable portion 154 of the flexible plate 151 in response to the vibration of the actuator 140, also vibrates with a large amplitude around the vent hole 152. If the vibration phase of the flexible plate 151 is delayed (for example, delayed by 90 °) from the vibration phase of the actuator 140, the thickness variation of the gap space between the flexible plate 151 and the actuator 140 is substantially increased. To do. In addition, it is possible to create a movement in which the variation in the thickness of the gap space transports air from the inside toward the outside. Thereby, the 2nd pump 201 can improve pump capacity (discharge pressure and discharge flow rate) more.
- a cover plate 195 is joined to the lower portion of the substrate 191.
- Three suction holes 197 are provided in the cover plate 195.
- the suction hole 197 communicates with the opening 192 through a flow path 193 formed in the substrate 191.
- the flexible plate 151, the substrate 191, and the cover plate 195 are formed of a material having a linear expansion coefficient larger than that of the diaphragm unit 160.
- the flexible plate 151, the substrate 191 and the cover plate 195 are made of materials having substantially the same linear expansion coefficient.
- the flexible plate 151 is preferably formed of beryllium copper.
- the substrate 191 is preferably formed of phosphor bronze or the like.
- the cover plate 195 is preferably formed of copper or the like.
- These linear expansion coefficients are approximately 17 ⁇ 10 ⁇ 6 K ⁇ 1 .
- the diaphragm unit 160 is preferably formed of SUS430 or the like. The linear expansion coefficient of SUS430 is about 10.4 ⁇ 10 ⁇ 6 K ⁇ 1 .
- the flexible plate 151 is convexly warped toward the piezoelectric element 142 side by being heated and cured at the time of bonding.
- Part 154 is tensioned. Thereby, the tension of the movable part 154 capable of bending vibration is adjusted. Furthermore, the movable part 154 is slack and the vibration of the movable part 154 is not hindered.
- beryllium copper which comprises the flexible plate 151 is a spring material, even if the circular movable part 154 vibrates with a large amplitude, no sag occurs. That is, beryllium copper is excellent in durability.
- the actuator 140 when an AC drive voltage corresponding to the frequency (fundamental wave) of the primary vibration mode of the second pump 201 is applied to the external terminals 153 and 172, the actuator 140 is concentrically formed in the second pump 201. Bends and vibrates. Further, in the second pump 201, the movable portion 154 of the flexible plate 151 vibrates with the vibration of the vibration plate 141.
- the second pump 201 sucks air from the suction hole 197 through the vent hole 152 to the pump chamber 145. Further, the second pump 201 discharges the air in the pump chamber 145 from the discharge hole 181.
- the peripheral edge portion of the diaphragm 141 is not substantially fixed. Therefore, according to the 2nd pump 201, there is little loss accompanying the vibration of the diaphragm 141, and high discharge pressure is obtained although it is small and low-profile.
- a hole 198 may be provided in a region of the flexible plate 151 and the substrate 191 facing the connecting portion 162.
- the 2nd pump 201 can control that diaphragm 141 and connecting part 162, and flexible board 151 adhere. That is, the second pump 201 can suppress the vibration of the vibration plate 141 from being hindered by the adhesive.
- FIG. 11 is an explanatory diagram showing the flow of air when the first pump 101 shown in FIG. 1 is driven.
- FIG. 12 is an explanatory diagram showing the flow of air when the first pump 101 and the second pump 201 shown in FIG. 1 are driven.
- the arrow in a figure has shown the flow of air.
- the control unit 111 applies a driving voltage to the piezoelectric element 40 of the first pump 101 when the container 9 starts to be filled with air, and turns on the first pump 101. As a result, air outside the housing 110 is sucked from the vent hole 106, and air is discharged into the container 9 from the discharge hole 24 of the first pump 101 via the first pump 101 to expand the container 9. To go.
- the gas control apparatus 100 can prevent the air from flowing backward from the inside of the container 9 to the discharge hole 181 of the second pump 201 by the second check valve 202.
- control unit 111 applies a driving voltage to the piezoelectric element 142 of the second pump 201, and turns on the second pump 201.
- the air pressure in the container 9 exceeds the discharge pressure of the first pump 101.
- the first check valve 102 is closed. Therefore, the gas control device 100 can prevent the air from flowing back from the inside of the container 9 to the discharge hole 24 of the first pump 101 by the first check valve 102.
- a high discharge pressure is not required in the period from the most contracted state in which the container 9 is not filled with air to the semi-expanded state in which the floating ring is filled with air to some extent.
- a large discharge flow rate is required.
- the first pump 101 sends air to the container 9 at a large discharge flow rate until the container 9 is free from sagging.
- the second pump 201 fills the container 9 with air at a high discharge pressure.
- the volume changes according to the pressure of the gas flowing into the inside by using the large flow rate characteristic and the high pressure characteristic according to the PQ characteristic required by the container 9.
- the container 9 having the characteristics can be quickly filled with air.
- FIG. 13 is a block diagram showing the configuration of the main part of the gas control device 200 according to the second embodiment of the present invention.
- the gas control device 200 is different from the gas control device 100 of the first embodiment in that a pressure sensor 121 is provided. Since the other points are the same, the description is omitted.
- the pressure sensor 121 detects the pressure (air pressure) in the container 9 and outputs a detection signal to the control unit 111.
- the control unit 111 monitors the pressure (air pressure) in the container 9 based on the detection signal output from the pressure sensor 121.
- the control unit 111 turns off the second pump 201 from the start of driving the first pump 101 until the air pressure in the container 9 exceeds a certain pressure, and when the air pressure in the container 9 exceeds a certain pressure, The second pump 201 is turned on.
- control unit 111 turns on the second pump 201 according to the air pressure in the container 9.
- the gas control device 200 of the second embodiment also has the same effect as the gas control device 100 of the first embodiment.
- FIG. 14 is a block diagram showing a configuration of main parts of a gas control device 300 according to the third embodiment of the present invention.
- the gas control device 300 is different from the gas control device 100 of the first embodiment in that a housing 310, a third pump 301, and a check valve 302 are provided. Since the other points are the same, the description is omitted.
- the housing 310 of the gas control device 300 includes a first ventilation hole 106 that communicates the inside and the outside of the housing 110, a second ventilation hole 107 that communicates the inside and the outside of the housing 110, and a housing.
- a third ventilation hole 108 that communicates the inside and the outside of the body 110 is formed.
- the third pump 301 has the same structure as the second pump 201 and has an air suction hole 197 and a discharge hole 181.
- the third pump 301 is a pump having the PQ characteristic shown in FIG. That is, the third pump 301 is a type of pump having a small discharge flow rate and a high discharge pressure, like the second pump 201.
- the maximum flow rate of air that can be discharged from the discharge hole 24 by the first pump 101 is larger than the maximum flow rate of air that can be discharged from the discharge hole 181 by the third pump 301.
- the maximum pressure of air that can be discharged from the discharge hole 181 by the third pump 301 is higher than the maximum pressure of air that can be discharged from the discharge hole 24 by the first pump 101.
- the suction hole 53 of the first pump 101 communicates with the first vent hole 106.
- One hole of the check valve 302 communicates with the third vent hole 108.
- the suction hole 197 of the second pump 201 communicates with the discharge hole 181 of the third pump 301 and the other hole of the check valve 302.
- the suction hole 197 of the third pump 301 communicates with the second vent hole 107.
- the first pump 101 and the second pump 201 are connected in parallel to the container 9 via the first check valve 102 and the second check valve 202, and the discharge hole 24 of the first pump 101 and the second pump 201 are connected.
- the discharge hole 181 communicates with the inside of the container 9.
- FIG. 15 is an explanatory view showing the flow of air when the first pump 101 shown in FIG. 14 is driven.
- FIG. 16 is an explanatory diagram showing the flow of air when the second pump 201 shown in FIG. 14 is driven.
- FIG. 17 is an explanatory diagram showing the air flow when the second pump 201 and the third pump 301 shown in FIG. 14 are driven.
- the arrow in a figure has shown the flow of air.
- the control unit 111 applies a driving voltage to the piezoelectric element 40 of the first pump 101 when the container 9 starts to be filled with air, and turns on the first pump 101. As a result, air outside the housing 110 is sucked from the vent hole 106, air is discharged from the discharge hole 24 of the first pump 101 to the container 9 through the first pump 101, and the container 9 is expanded. Go.
- the control unit 111 applies a driving voltage to the piezoelectric element 142 of the second pump 201, and turns on the second pump 201. Further, the control unit 111 turns off the first pump 101.
- the check valve 302 When the second pump 201 is driven until the pressure (air pressure) in the container 9 reaches a predetermined pressure, the check valve 302 has a low flow resistance instead of the third pump 301 having a high flow resistance. A sufficient flow rate is generated because the outside air is sucked through the air.
- the gas control device 300 can prevent the air from flowing back from the inside of the container 9 to the discharge hole 24 of the first pump 101 by the first check valve 102.
- the control unit 111 applies a driving voltage to the piezoelectric element 142 of the third pump 301, and turns on the third pump 301.
- the first pump 101 sends air to the container 9 at a large discharge flow rate until there is no sagging of the container 9.
- the second pump 201 fills the container 9 with air at a high discharge pressure.
- the second pump 201 and the third pump 301 fill the container 9 with air at a higher discharge pressure.
- the second pump 201 and the third pump 301 having the same structure are connected in series. Therefore, the maximum discharge pressure of air discharged from the second pump 201 when the second pump 201 and the third pump 301 are driven is discharged from the second pump 201 when the second pump 201 is driven. It reaches twice the maximum discharge pressure of air.
- the container 9 having the characteristic that the volume changes according to the air can be quickly filled with air.
- the third pump 301 has the same structure as the second pump 201, but is not limited thereto. In implementation, the third pump 301 may have a different structure from the second pump 201.
- FIG. 18 is a block diagram showing a configuration of main parts of a gas control device 400 according to the fourth embodiment of the present invention.
- the gas control device 400 is different from the gas control device 300 of the third embodiment in that a pressure sensor 121 is provided. Since the other points are the same, the description is omitted.
- control unit 111 monitors the pressure (air pressure) in the container 9 based on the detection signal output from the pressure sensor 121.
- the control unit 111 keeps the second pump 201 and the third pump 301 off until the air pressure in the container 9 exceeds a certain pressure from the start of driving the first pump 101, and the air pressure in the container 9 remains constant. Is exceeded, the second pump 201 is turned on. Then, when the air pressure in the container 9 exceeds a predetermined pressure higher than a certain pressure, the control unit 111 turns on the third pump 301.
- control unit 111 turns on the second pump 201 and the third pump 301 in order according to the air pressure in the container 9.
- the gas control device 400 of the fourth embodiment also has the same effect as the gas control device 300 of the third embodiment.
- FIG. 19 is a block diagram showing a configuration of main parts of a gas control device 500 according to the fifth embodiment of the present invention.
- This gas control device 500 is different from the gas control device 100 of the first embodiment in that a fourth pump 401 is provided. Since the other points are the same, the description is omitted.
- the fourth pump 401 has the same structure as the first pump 101 and has an air suction hole 53 and a discharge hole 24.
- the fourth pump 401 is a pump having the PQ characteristic shown in FIG. That is, the fourth pump 401 is a type of pump that has a large discharge flow rate and a low discharge pressure, like the first pump 101.
- the maximum flow rate of air that can be discharged from the discharge hole 24 by the fourth pump 401 is larger than the maximum flow rate of air that can be discharged from the discharge hole 181 by the second pump 201.
- the maximum pressure of air that can be discharged from the discharge hole 181 by the second pump 201 is higher than the maximum pressure of air that can be discharged from the discharge hole 24 by the fourth pump 401.
- the suction hole 53 of the first pump 101 communicates with the first vent hole 106.
- the suction hole 53 of the fourth pump 401 communicates with the first vent hole 106.
- the suction hole 197 of the second pump 201 communicates with the second vent hole 107.
- the first pump 101, the fourth pump 401, and the second pump 201 are connected in parallel to the container 9 via the first check valve 102 and the second check valve 202, and the discharge of the first pump 101 is performed.
- the hole 24, the discharge hole 181 of the second pump 201, and the discharge hole 24 of the fourth pump 401 communicate with the inside of the container 9.
- FIG. 20 is an explanatory view showing the flow of air when the first pump 101 and the fourth pump 401 shown in FIG. 19 are driven.
- FIG. 21 is an explanatory diagram showing the flow of air when the second pump 201 shown in FIG. 19 is driven.
- the arrow in a figure has shown the flow of air.
- the control unit 111 applies a driving voltage to the piezoelectric element 40 of the first pump 101 when the container 9 starts to be filled with air, and turns on the first pump 101. Further, the control unit 111 applies a drive voltage to the piezoelectric element 40 of the fourth pump 401 and turns on the fourth pump 401. As a result, air outside the housing 110 is sucked from the vent hole 106, and the air passes through the first pump 101 and the fourth pump 401, and the discharge hole 24 of the first pump 101 and the discharge hole of the fourth pump 401. 24 is discharged into the container 9 and the container 9 is expanded.
- the control unit 111 applies a driving voltage to the piezoelectric element 142 of the second pump 201, and turns on the second pump 201. Furthermore, the control unit 111 turns off the first pump 101 and the fourth pump 401.
- the gas control device 500 can prevent the air from flowing back from the inside of the container 9 into the discharge holes 24 of the first pump 101 and the fourth pump 401 by the first check valve 102.
- the first pump 101 sends air to the container 9 at a large discharge flow rate until the sag of the container 9 disappears.
- the first pump 101 and the fourth pump 401 having the same structure are connected in parallel. Therefore, the maximum discharge flow rate of air discharged from the first pump 101 and the fourth pump 401 reaches twice the maximum discharge flow rate of air discharged from the first pump 101 alone.
- the second pump 201 fills the container 9 with air at a high discharge pressure.
- the gas control device 500 as with the gas control device 100, the pressure of the gas flowing into the inside by using the large flow rate characteristic and the high pressure characteristic according to the PQ characteristic required by the container 9.
- the container 9 having the characteristic that the volume changes according to the air can be quickly filled with air.
- the 4th pump 401 has the same structure as the 1st pump 101, it is not restricted to this. In implementation, the fourth pump 401 may have a different structure from the first pump 101.
- a pressure sensor 121 may be provided as in the gas control device 200 shown in FIG. Even in the gas control device 500, similarly to the gas control device 200, the control unit 111 may turn on the first pump 101, the fourth pump 401, and the second pump 201 in order according to the air pressure in the container 9. good.
- the third pump 301 may be connected in series to the second pump 201, and the check valve 302 may be provided.
- FIG. 24 is a block diagram showing a configuration of main parts of a gas control device 600 according to the sixth embodiment of the present invention.
- the main difference between the gas control device 600 and the gas control device 100 of the first embodiment is that the first pump 101, the second pump 201, the first check valve 102, and the second check valve 202 are reversed.
- the gas control device 600 includes a first pump 101, a second pump 201, a first check valve 102, a second check valve 202, and a flexible container 609.
- the first check valve 102 corresponds to the third check valve of the present invention.
- the second check valve 202 corresponds to the fourth check valve of the present invention.
- the container 609 has a characteristic that the volume changes according to the pressure of the air flowing into the inside.
- the gas control device 600 is, for example, a cupping device that uses a solid hemispherical cup pressed against the skin.
- the cup and the skin constitute the container 609. Although the cup is solid, the skin is sucked up and swollen by the suction pressure inside the cup, and the volume inside the cup is substantially reduced. Therefore, the volume created by the cup and the skin changes depending on the pressure.
- the gas control device 600 is a pack device that wraps food or clothing in a flexible container 609, sucks the internal gas, and compresses it compactly by the differential pressure from the external atmospheric pressure.
- the casing 610 of the gas control device 600 is formed with a first vent 106 that communicates the inside and outside of the casing 610 and a second vent 107 that communicates the inside and outside of the casing 610. .
- the first pump 101 has an air suction hole 53 and a discharge hole 24.
- the second pump 201 has an air suction hole 197 and a discharge hole 181.
- the first pump 101 is a pump having PQ characteristics shown in FIG. That is, the first pump 101 is a type of pump having a large discharge flow rate and a low discharge pressure.
- the second pump 201 is a pump having PQ characteristics shown in FIG. That is, the second pump 201 is a type of pump that has a small discharge flow rate and a high discharge pressure.
- the maximum flow rate of air that can be sucked from the suction hole 53 by the first pump 101 is larger than the maximum flow rate of air that can be sucked from the suction hole 197 by the second pump 201.
- the maximum suction pressure of air that can be sucked from the suction hole 197 by the second pump 201 is larger than the maximum suction pressure of air that can be sucked from the suction hole 53 by the first pump 101.
- the discharge hole 24 of the first pump 101 communicates with the first vent hole 106.
- the discharge hole 181 of the second pump 201 communicates with the second vent hole 107.
- the first pump 101 and the second pump 201 are connected in parallel to the container 609 via the first check valve 102 and the second check valve 202. Therefore, the suction hole 53 of the first pump 101 communicates with the inside of the container 609. Further, the suction hole 197 of the second pump 201 communicates with the inside of the container 609.
- the first check valve 102 prevents air from flowing from the suction hole 53 into the container 609.
- the second check valve 202 prevents air from flowing from the suction hole 197 into the container 609.
- the control unit 111 is configured by a microcomputer, for example, and controls the operation of each unit of the gas control device 600.
- the control unit 111 has a timer circuit that measures time.
- FIG. 25 is an explanatory diagram showing the flow of air when the first pump 101 shown in FIG. 24 is driven.
- FIG. 26 is an explanatory diagram showing the air flow when the first pump 101 and the second pump 201 shown in FIG. 24 are driven.
- the arrow in a figure has shown the flow of air.
- the controller 111 When the controller 111 starts sucking air from the container 609, the controller 111 applies a drive voltage to the piezoelectric element 40 of the first pump 101, and turns on the first pump 101. As a result, the air in the container 609 is sucked from the suction hole 53, and the air is discharged from the discharge hole 24 of the first pump 101 to the outside of the housing 110 through the vent hole 106 through the first pump 101. The container 609 contracts.
- the gas control device 600 can prevent the air from flowing backward from the suction hole 197 of the second pump 201 into the container 609 by the second check valve 202.
- control unit 111 applies a driving voltage to the piezoelectric element 142 of the second pump 201, and turns on the second pump 201.
- the gas control device 600 reduces the pressure (air pressure) in the container 609 to the target pressure.
- the air pressure in the container 609 is lower than the suction pressure of the first pump 101.
- the first check valve 102 is closed. Therefore, the gas control device 600 can prevent the air from flowing backward from the suction hole 53 of the first pump 101 into the container 609 by the first check valve 102.
- the volume changes according to the pressure of the gas remaining inside by using the large flow rate characteristic and the high pressure characteristic according to the PQ characteristic required by the container 609. Air can be quickly sucked from inside the container 609 having characteristics.
- FIG. 27 is a block diagram showing a configuration of main parts of a gas control device 700 according to the seventh embodiment of the present invention.
- This gas control device 700 is different from the gas control device 600 of the sixth embodiment in that a pressure sensor 121 is provided. Since the other points are the same, the description is omitted.
- the pressure sensor 121 detects the pressure (air pressure) in the container 609 and outputs a detection signal to the control unit 111.
- the control unit 111 monitors the pressure (air pressure) in the container 609 based on the detection signal output from the pressure sensor 121.
- the control unit 111 instructs each pump to start driving based on the air pressure value of the container 609.
- the controller 111 turns off the second pump 201 from the start of driving the first pump 101 until the air pressure in the container 609 falls below a predetermined pressure, and the air pressure in the container 609 falls below the predetermined pressure.
- the second pump 201 is turned on.
- control unit 111 turns on the second pump 201 in accordance with the air pressure in the container 609.
- the gas control device 700 of the seventh embodiment also has the same effects as the gas control device 600 of the sixth embodiment.
- air is used as the gas, but the present invention is not limited to this.
- the gas can be applied even if it is a gas other than air.
- an air bag is used as a container and a massage machine is used as a gas control device.
- the present invention is not limited to this.
- the present invention can also be applied to containers other than air bags, such as beach balls, rubber boats, toys and tires such as balloon dolls, and the gas control device can be applied to gas control devices other than massage machines.
- the large flow characteristics and high pressure characteristics of the gas control device are used according to the PQ characteristics required by the container.
- the first pump 101 is turned on and then the second pump 201 is turned on.
- the first pump is turned on after the second pump 201 is turned on. 101 may be turned on.
- the first pump 101 having the structure shown in FIGS. 4 to 6 is used as the first pump
- the second pump 201 having the structure shown in FIGS. 8 to 10 is used as the second pump. This is not a limitation.
- the third pump 301 having the structure shown in FIGS. 8 to 10 is used as the third pump
- the fourth pump 401 having the structure shown in FIGS. 4 to 6 is used as the fourth pump.
- the present invention is not limited to this. is not.
- the present invention can also be applied to pumps other than the first pump 101, the second pump 201, the third pump 301, and the fourth pump 401 (for example, an electromagnetic pump).
- the gas control apparatus 100,200,300,400,500 is provided with the 1st check valve 102 and the 2nd check valve 202, it is not restricted to this.
- the gas control device may not include the first check valve and the second check valve.
- the first pump 101 is kept on even after the second pump 201 is turned on, but after the second pump 201 is turned on, the control unit 111 The first pump 101 may be turned off.
- the control unit 111 turns off the first pump 101, but after the second pump 201 is turned on.
- the first pump 101 may be kept on.
- the control unit 111 turns off the first pump 101 and the fourth pump 401, but the second pump 201 is turned on.
- the first pump 101 and the fourth pump 401 may maintain the on state even after being turned on.
- the piezoelectric element is composed of lead zirconate titanate ceramics, but is not limited thereto.
- it may be made of a non-lead piezoelectric ceramic material such as potassium sodium niobate and alkali niobate ceramics.
- a unimorph type piezoelectric vibrator having a piezoelectric element provided on one surface of the diaphragm is used. It is not limited. You may use the bimorph type piezoelectric vibrator which provided the piezoelectric element on both surfaces of the diaphragm.
- a disk-shaped piezoelectric element a disk-shaped diaphragm, and a disk-shaped top plate are used, but the present invention is not limited to this.
- these shapes may be a rectangular plate shape, a polygonal plate shape, or an elliptical plate shape.
- the piezoelectric pump is driven to resonate at the frequency (fundamental wave) of the primary vibration mode of the pump body, but the present invention is not limited to this.
- resonance driving may be performed at a frequency of an odd-order vibration mode having a plurality of vibration antinodes and higher than the third-order vibration mode.
- the top plate 37 showed the example which bends and vibrates concentrically with the bending vibration of the diaphragm 39, it is not restricted to this. is not. In the implementation, only the diaphragm 39 may be flexibly vibrated, and the top plate 37 may not necessarily be flexibly vibrated with the flexural vibration of the diaphragm 39.
- 3rd ventilation hole 110 ... Case 111 ... Control part 120 ... Spacer 121 ... Pressure sensor 130 ... Spacer 135 ... Spacer 140 ... Actuator 141 ... Diaphragm 142 ... piezoelectric element 145 ... pump chamber 151 ... flexible plate 152 ... ventilation hole 153 ... external terminal 154 ... movable portion 155 ... fixed portion 160 ... vibrating plate unit 161 ... frame plate 162 ... connection 170 ... Electrode conduction plate 171 ... Frame portion 172 ... External terminal 173 ... Internal terminal 180 ... Pump housing 181 ... Discharge hole 185 ... Cover plate 191 ... Substrate 192 ... Opening 193 ... Flow path 195 ... Cover plate 197 ...
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Abstract
Description
前記気体の第2吸引孔および第2吐出孔を有する第2ポンプと、を備え、
前記第1ポンプが前記第1吐出孔から吐出することのできる前記気体の最大流量は、前記第2ポンプが前記第2吐出孔から吐出することのできる前記気体の最大流量より大きく、
前記第2ポンプが前記第2吐出孔から吐出することのできる前記気体の最大圧力は、前記第1ポンプが前記第1吐出孔から吐出することのできる前記気体の最大圧力より高く、
前記第1吐出孔と前記第2吐出孔とは、内部に流入した前記気体の圧力に応じて容積が変化する特性を有する容器に接続する、ことを特徴とする気体制御装置。
前記第1ポンプ及び前記第2ポンプのうちいずれか一方のポンプの駆動を開始する制御部と、を備え、
前記制御部は、前記第1ポンプ及び前記第2ポンプのうちいずれか一方のポンプの駆動を開始した後、前記検知部の出力に基づいて前記容器内の気圧を監視し、前記気圧の上昇に応じて、他方のポンプの駆動を開始することが好ましい。
前記第1ポンプが前記第1吐出孔から吐出することのできる前記気体の最大流量は、前記第3ポンプが前記第3吐出孔から吐出することのできる前記気体の最大流量より大きく、
前記第3ポンプが前記第3吐出孔から吐出することのできる前記気体の最大圧力は、前記第1ポンプが前記第1吐出孔から吐出することのできる前記気体の最大圧力より高く、
前記第3吐出孔は、前記第2吸引孔に接続することが好ましい。
前記第4ポンプが前記第4吐出孔から吐出することのできる前記気体の最大流量は、前記第2ポンプが前記第2吐出孔から吐出することのできる前記気体の最大流量より大きく、
前記第2ポンプが前記第2吐出孔から吐出することのできる前記気体の最大圧力は、前記第4ポンプが前記第4吐出孔から吐出することのできる前記気体の最大圧力より高く、
前記第4吐出孔は、前記容器に接続することが好ましい。
前記第1筐体には、前記ポンプ室の内部と外部とを連通させる通気孔が設けられており、
前記第2筐体における前記通気孔と対向する領域には、前記吐出孔が設けられていることが好ましい。
前記振動板の周囲を囲む枠板と、
前記振動板と前記枠板とを連結し、前記枠板に対して前記振動板を弾性支持する連結部と、
前記第1主面とは逆側の前記振動板の第2主面に対向し、通気孔が設けられている板と、を有することが好ましい。
気体の第2吸引孔および第2吐出孔を有する第2ポンプと、を備え、
第1ポンプが第1吸引孔から吸引可能な気体の最大流量は、第2ポンプが第2吸引孔から吸引可能な気体の最大流量より大きく、
第2ポンプが第2吸引孔から吸引可能な気体の最大吸引圧力の大きさは、第1ポンプが第1吸引孔から吸引可能な気体の最大吸引圧力の大きさより大きく、
第1吸引孔と第2吸引孔とは、内部に残存する気体の圧力に応じて容積が変化する特性を有する容器に接続する。
第1ポンプ及び第2ポンプのうちいずれか一方のポンプの駆動を開始する制御部と、を備え、
制御部は、第1ポンプ及び第2ポンプのうちいずれか一方のポンプの駆動を開始した後、検知部の出力に基づいて容器内の気圧を監視し、気圧の低下に応じて、他方のポンプの駆動を開始することが好ましい。
以下、本発明の第1実施形態に係る気体制御装置100について説明する。
図13は、本発明の第2実施形態に係る気体制御装置200の主要部の構成を示すブロック図である。この気体制御装置200が第1実施形態の気体制御装置100と相違する点は、圧力センサ121を備える点である。その他の点については同じであるため、説明を省略する。
図14は、本発明の第3実施形態に係る気体制御装置300の主要部の構成を示すブロック図である。この気体制御装置300が第1実施形態の気体制御装置100と相違する点は、筐体310、第3ポンプ301、及び逆止弁302を備える点である。その他の点については同じであるため、説明を省略する。
図18は、本発明の第4実施形態に係る気体制御装置400の主要部の構成を示すブロック図である。この気体制御装置400が第3実施形態の気体制御装置300と相違する点は、圧力センサ121を備える点である。その他の点については同じであるため、説明を省略する。
図19は、本発明の第5実施形態に係る気体制御装置500の主要部の構成を示すブロック図である。この気体制御装置500が第1実施形態の気体制御装置100と相違する点は、第4ポンプ401を備える点である。その他の点については同じであるため、説明を省略する。
以下、本発明の第6実施形態に係る気体制御装置600について、図24、図2、図3を用いて説明する。
図24は、本発明の第6実施形態に係る気体制御装置600の主要部の構成を示すブロック図である。気体制御装置600が第1実施形態の気体制御装置100と主に相違する点は、第1ポンプ101、第2ポンプ201、第1逆止弁102、及び第2逆止弁202が逆向きに接続されていることと、容器609と、である。その他の点は同じであるため、説明を省略する。
なお、第1逆止弁102は、本発明の第3逆止弁に相当する。また、第2逆止弁202は、本発明の第4逆止弁に相当する。
図27は、本発明の第7実施形態に係る気体制御装置700の主要部の構成を示すブロック図である。この気体制御装置700が第6実施形態の気体制御装置600と相違する点は、圧力センサ121を備える点である。その他の点については同じであるため、説明を省略する。
前記実施形態では気体として空気を用いているが、これに限るものではない。当該気体が、空気以外の他の気体であっても適用できる。
17…外筐体
18…ノズル
24…吐出孔
31…通気路
36…ポンプ室
37…天板
38…側板
39…振動板
40…圧電素子
42…キャップ
45…通気孔
52…突出部
53…吸引孔
55A…切欠き
56A…ネジ穴
61…中央部
62…突出部
63…外部端子
70…電極導通用板
72…外部端子
73…内部端子
100…気体制御装置
101…第1ポンプ
102…第1逆止弁
106…第1通気孔
107…第2通気孔
108…第3通気孔
110…筐体
111…制御部
120…スペーサ
121…圧力センサ
130…スペーサ
135…スペーサ
140…アクチュエータ
141…振動板
142…圧電素子
145…ポンプ室
151…可撓板
152…通気孔
153…外部端子
154…可動部
155…固定部
160…振動板ユニット
161…枠板
162…連結部
170…電極導通用板
171…枠部位
172…外部端子
173…内部端子
180…ポンプ筺体
181…吐出孔
185…蓋板
191…基板
192…開口部
193…流路
195…カバー板
197…吸引孔
198…孔部
200…気体制御装置
201…第2ポンプ
202…第2逆止弁
300…気体制御装置
301…第3ポンプ
302…逆止弁
310…筐体
400…気体制御装置
401…第4ポンプ
500…気体制御装置
600…気体制御装置
609…容器
610…筐体
700…気体制御装置
Claims (13)
- 気体の第1吸引孔および第1吐出孔を有する第1ポンプと、
前記気体の第2吸引孔および第2吐出孔を有する第2ポンプと、を備え、
前記第1ポンプが前記第1吐出孔から吐出可能な前記気体の最大流量は、前記第2ポンプが前記第2吐出孔から吐出可能な前記気体の最大流量より大きく、
前記第2ポンプが前記第2吐出孔から吐出可能な前記気体の最大圧力は、前記第1ポンプが前記第1吐出孔から吐出可能な前記気体の最大圧力より高く、
前記第1吐出孔と前記第2吐出孔とは、内部に流入した前記気体の圧力に応じて容積が変化する特性を有する容器に接続する、ことを特徴とする気体制御装置。 - 前記容器の内部から前記第1吐出孔へ前記気体が流れることを阻止する第1逆止弁を備えることを特徴とする、請求項1に記載の気体制御装置。
- 前記容器の内部から前記第2吐出孔へ前記気体が流れることを阻止する第2逆止弁を備えることを特徴とする、請求項1又は2に記載の気体制御装置。
- 前記容器内の前記気体の圧力を検知する検知部と、
前記第1ポンプ及び前記第2ポンプのうちいずれか一方のポンプの駆動を開始する制御部と、を備え、
前記制御部は、前記第1ポンプ及び前記第2ポンプのうちいずれか一方のポンプの駆動を開始した後、前記検知部の出力に基づいて前記容器内の気圧を監視し、前記気圧の上昇に応じて、他方のポンプの駆動を開始する、請求項1から3のいずれか1項に記載の気体制御装置。 - 前記気体の第3吸引孔および第3吐出孔を有する第3ポンプと、を備え、
前記第1ポンプが前記第1吐出孔から吐出可能な前記気体の最大流量は、前記第3ポンプが前記第3吐出孔から吐出可能な前記気体の最大流量より大きく、
前記第3ポンプが前記第3吐出孔から吐出可能な前記気体の最大圧力は、前記第1ポンプが前記第1吐出孔から吐出可能な前記気体の最大圧力より高く、
前記第3吐出孔は、前記第2吸引孔に接続する、請求項1から4のいずれか1項に記載の気体制御装置。 - 前記気体の第4吸引孔および第4吐出孔を有する第4ポンプと、を備え、
前記第4ポンプが前記第4吐出孔から吐出可能な前記気体の最大流量は、前記第2ポンプが前記第2吐出孔から吐出可能な前記気体の最大流量より大きく、
前記第2ポンプが前記第2吐出孔から吐出可能な前記気体の最大圧力は、前記第4ポンプが前記第4吐出孔から吐出可能な前記気体の最大圧力より高く、
前記第4吐出孔は、前記容器に接続する、請求項1から5のいずれか1項に記載の気体制御装置。 - 前記第1ポンプ又は前記第2ポンプの少なくとも一方は、アクチュエータとしての圧電素子と、前記圧電素子に接合する第1主面を持ち、前記圧電素子の伸縮により屈曲振動する振動板と、を有する、請求項1から6のいずれか1項に記載の気体制御装置。
- 前記第1ポンプは、前記振動板に接合し、前記振動板とともにポンプ室を構成する第1筐体と、前記第1筐体を間隔を設けて被覆して前記第1筐体との間に通気路を構成する第2筐体と、を有し、
前記第1筐体には、前記ポンプ室の内部と外部とを連通させる通気孔が設けられており、
前記第2筐体における前記通気孔と対向する領域には、前記吐出孔が設けられている、請求項7に記載の気体制御装置。 - 前記第2ポンプは、
前記振動板の周囲を囲む枠板と、
前記振動板と前記枠板とを連結し、前記枠板に対して前記振動板を弾性支持する連結部と、
前記第1主面とは逆側の前記振動板の第2主面に対向し、通気孔が設けられている板と、を有する、請求項7に記載の気体制御装置。 - 気体の第1吸引孔および第1吐出孔を有する第1ポンプと、
前記気体の第2吸引孔および第2吐出孔を有する第2ポンプと、を備え、
前記第1ポンプが前記第1吸引孔から吸引可能な前記気体の最大流量は、前記第2ポンプが前記第2吸引孔から吸引可能な前記気体の最大流量より大きく、
前記第2ポンプが前記第2吸引孔から吸引可能な前記気体の最大吸引圧力の大きさは、前記第1ポンプが前記第1吸引孔から吸引可能な前記気体の最大吸引圧力の大きさより大きく、
前記第1吸引孔と前記第2吸引孔とは、内部に残存する前記気体の圧力に応じて容積が変化する特性を有する容器に接続する、ことを特徴とする気体制御装置。 - 前記第1吸引孔から前記容器の内部へ前記気体が流れることを阻止する第3逆止弁を備えることを特徴とする、請求項10に記載の気体制御装置。
- 前記第2吸引孔から前記容器の内部へ前記気体が流れることを阻止する第4逆止弁を備えることを特徴とする、請求項10又は11に記載の気体制御装置。
- 前記容器内の前記気体の圧力を検知する検知部と、
前記第1ポンプ及び前記第2ポンプのうちいずれか一方のポンプの駆動を開始する制御部と、を備え、
前記制御部は、前記第1ポンプ及び前記第2ポンプのうちいずれか一方のポンプの駆動を開始した後、前記検知部の出力に基づいて前記容器内の気圧を監視し、前記気圧の低下に応じて、他方のポンプの駆動を開始する、請求項10から12のいずれか1項に記載の気体制御装置。
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018135881A (ja) * | 2017-02-20 | 2018-08-30 | 研能科技股▲ふん▼有限公司 | マイクロ気体輸送デバイス |
JP2019065847A (ja) * | 2017-09-29 | 2019-04-25 | 研能科技股▲ふん▼有限公司 | 流体システム |
JP2019082166A (ja) * | 2017-10-27 | 2019-05-30 | 研能科技股▲ふん▼有限公司 | ガス輸送装置 |
CN109854489A (zh) * | 2019-03-03 | 2019-06-07 | 浙江师范大学 | 一种混联腔体驱动的微型压电气体压缩机 |
JP2021176768A (ja) * | 2020-05-08 | 2021-11-11 | Pacraft株式会社 | 気体吹込方法及び気体吹込装置 |
US11454232B2 (en) * | 2019-03-29 | 2022-09-27 | Microjet Technology Co., Ltd. | Micro-electromechanical systems pump |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DK2930363T3 (da) * | 2014-04-10 | 2020-09-07 | Stichting Nationaal Lucht En Ruimtevaart Laboratorium | Piezoelektrisk pumpeindretning og dermed forsynet trykkredsløb |
WO2016006496A1 (ja) * | 2014-07-11 | 2016-01-14 | 株式会社村田製作所 | 吸引装置 |
US10585011B2 (en) * | 2016-07-15 | 2020-03-10 | Sumptracker, Llc | Sump pump tracking device |
WO2024099810A1 (en) * | 2022-11-09 | 2024-05-16 | Koninklijke Philips N.V. | Multi-orientation omnidirectional pump systems for use in magnetic resonance environments |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01100392A (ja) * | 1987-04-30 | 1989-04-18 | Shinko Electric Co Ltd | 圧縮機の台数制御方法 |
JPH0742440U (ja) * | 1993-12-27 | 1995-08-04 | 旭産業株式会社 | 自動充排気装置 |
JPH09184482A (ja) * | 1995-12-28 | 1997-07-15 | Kokusai Electric Co Ltd | 真空排気装置構成 |
WO2009148008A1 (ja) * | 2008-06-03 | 2009-12-10 | 株式会社村田製作所 | 圧電マイクロブロア |
JP4563767B2 (ja) * | 2004-10-12 | 2010-10-13 | 株式会社ブリヂストン | パンク応急処置装置、及び、パンク応急処置用エア回路 |
JP2013068215A (ja) * | 2011-09-06 | 2013-04-18 | Murata Mfg Co Ltd | 流体制御装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19918694C2 (de) * | 1998-04-27 | 2002-03-14 | Matsushita Electric Works Ltd | Verfahren zum Messen des Drucks eines Fluids und Miniaturpumpe zur Durchführung dieses Verfahrens |
US7322803B2 (en) * | 2004-12-30 | 2008-01-29 | Adaptivenergy, Llc. | Pumps with diaphragms bonded as bellows |
EP2055942B1 (en) * | 2007-11-01 | 2012-06-06 | Sauer-Danfoss ApS | Hydraulic system with supplement pump |
US20140094727A1 (en) * | 2012-09-28 | 2014-04-03 | Covidien Lp | Compression device pumping |
-
2014
- 2014-08-29 DE DE112014004368.0T patent/DE112014004368T5/de active Pending
- 2014-08-29 WO PCT/JP2014/072677 patent/WO2015045727A1/ja active Application Filing
- 2014-08-29 JP JP2015539036A patent/JP6156507B2/ja active Active
-
2016
- 2016-03-24 US US15/079,888 patent/US10648463B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01100392A (ja) * | 1987-04-30 | 1989-04-18 | Shinko Electric Co Ltd | 圧縮機の台数制御方法 |
JPH0742440U (ja) * | 1993-12-27 | 1995-08-04 | 旭産業株式会社 | 自動充排気装置 |
JPH09184482A (ja) * | 1995-12-28 | 1997-07-15 | Kokusai Electric Co Ltd | 真空排気装置構成 |
JP4563767B2 (ja) * | 2004-10-12 | 2010-10-13 | 株式会社ブリヂストン | パンク応急処置装置、及び、パンク応急処置用エア回路 |
WO2009148008A1 (ja) * | 2008-06-03 | 2009-12-10 | 株式会社村田製作所 | 圧電マイクロブロア |
JP2013068215A (ja) * | 2011-09-06 | 2013-04-18 | Murata Mfg Co Ltd | 流体制御装置 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018135881A (ja) * | 2017-02-20 | 2018-08-30 | 研能科技股▲ふん▼有限公司 | マイクロ気体輸送デバイス |
JP7013271B2 (ja) | 2017-02-20 | 2022-01-31 | 研能科技股▲ふん▼有限公司 | マイクロ気体輸送デバイス |
JP2019065847A (ja) * | 2017-09-29 | 2019-04-25 | 研能科技股▲ふん▼有限公司 | 流体システム |
JP7177632B2 (ja) | 2017-09-29 | 2022-11-24 | 研能科技股▲ふん▼有限公司 | 流体システム |
JP2019082166A (ja) * | 2017-10-27 | 2019-05-30 | 研能科技股▲ふん▼有限公司 | ガス輸送装置 |
JP7094842B2 (ja) | 2017-10-27 | 2022-07-04 | 研能科技股▲ふん▼有限公司 | ガス輸送装置 |
CN109854489A (zh) * | 2019-03-03 | 2019-06-07 | 浙江师范大学 | 一种混联腔体驱动的微型压电气体压缩机 |
US11454232B2 (en) * | 2019-03-29 | 2022-09-27 | Microjet Technology Co., Ltd. | Micro-electromechanical systems pump |
JP2021176768A (ja) * | 2020-05-08 | 2021-11-11 | Pacraft株式会社 | 気体吹込方法及び気体吹込装置 |
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