WO2014162945A1 - 固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法及びそれによって得られた電子材料用基板 - Google Patents
固定砥粒ワイヤーソー用水溶性切断液、それを用いたインゴットの切断方法及びそれによって得られた電子材料用基板 Download PDFInfo
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- WO2014162945A1 WO2014162945A1 PCT/JP2014/058497 JP2014058497W WO2014162945A1 WO 2014162945 A1 WO2014162945 A1 WO 2014162945A1 JP 2014058497 W JP2014058497 W JP 2014058497W WO 2014162945 A1 WO2014162945 A1 WO 2014162945A1
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- WO
- WIPO (PCT)
- Prior art keywords
- fixed abrasive
- cutting
- wire saw
- water
- ingot
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/06—Metal compounds
- C10M2201/062—Oxides; Hydroxides; Carbonates or bicarbonates
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
- C10M2207/046—Hydroxy ethers
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2219/00—Organic non-macromolecular compounds containing sulfur, selenium or tellurium as ingredients in lubricant compositions
- C10M2219/10—Heterocyclic compounds containing sulfur, selenium or tellurium compounds in the ring
- C10M2219/104—Heterocyclic compounds containing sulfur, selenium or tellurium compounds in the ring containing sulfur and carbon with nitrogen or oxygen in the ring
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2219/00—Organic non-macromolecular compounds containing sulfur, selenium or tellurium as ingredients in lubricant compositions
- C10M2219/10—Heterocyclic compounds containing sulfur, selenium or tellurium compounds in the ring
- C10M2219/104—Heterocyclic compounds containing sulfur, selenium or tellurium compounds in the ring containing sulfur and carbon with nitrogen or oxygen in the ring
- C10M2219/106—Thiadiazoles
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/02—Groups 1 or 11
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/06—Oiliness; Film-strength; Anti-wear; Resistance to extreme pressure
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/18—Anti-foaming property
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/32—Wires, ropes or cables lubricants
Definitions
- the present invention relates to a water-soluble cutting solution for a fixed abrasive wire saw used for cutting a silicon ingot, an ingot cutting method using the same, and an electronic material substrate obtained thereby.
- wafers for substrates for electronic materials have been obtained by cutting with a band saw or wire saw using loose abrasive grains.
- a band saw or wire saw using loose abrasive grains.
- slurry adheres to the cut wafer, and the cleaning load in the subsequent process is high.
- the present invention provides a water-soluble cutting solution for a fixed abrasive wire saw with less foaming and high cutting performance, an ingot cutting method using the same, and a substrate for electronic materials obtained thereby.
- the present inventors have conducted extensive research and, as a result, (a) an alkylene adduct of 2,4,7,9-tetramethyl-5-decyne-4,7-diol has been obtained.
- the water-soluble cutting liquid contained it was found that even when used for a fixed abrasive wire saw, it is possible to cut with less foaming and high cutting performance, and the present invention has been achieved.
- the present invention contains an alkylene adduct of (a) 2,4,7,9-tetramethyl-5-decyne-4,7-diol represented by the following chemical formula (1):
- the present invention relates to a water-soluble cutting liquid for abrasive wire saws.
- R represents the same or different alkylene group having 1 to 4 carbon atoms
- m1 + m2 + n1 + n2 represents the total number of added moles of the alkylene adduct and is an integer of 1 or more.
- the present invention provides an ingot cutting method characterized in that a wafer which is a substrate for electronic materials is obtained by cutting an ingot with a fixed abrasive wire saw using the water-soluble cutting liquid for fixed abrasive wire saw, and The present invention relates to an electronic material substrate obtained by the cutting method.
- a water-soluble cutting solution for a fixed abrasive wire saw with low foaming and high cutting performance a method for cutting an ingot using the same, and a substrate for electronic materials obtained thereby. I can do it.
- the alkylene adduct of 2,4,7,9-tetramethyl-5-decyne-4,7-diol as component (a) used in the water-soluble cutting solution for fixed abrasive wire saws according to the present invention has the following chemical formula: It has the structure shown by (1).
- R represents the same or different alkylene group having 1 to 4 carbon atoms
- m1 + m2 + n1 + n2 represents the total number of added moles of the alkylene adduct and is an integer of 1 or more.
- the alkylene oxide added to 2,4,7,9-tetramethyl-5-decyne-4,7-diol may be any alkylene oxide having 1 to 4 carbon atoms. Specifically, ethylene oxide alone or both ethylene oxide and propylene oxide are particularly preferable.
- the four alkylene groups (—OR—) in the chemical formula (1) are the same as long as each is an alkylene group having 1 to 4 carbon atoms. Although it may be present or different, it is preferred that the four alkylene groups are either ethylene alone or both ethylene and propylene, and it is particularly preferred that all four alkylene groups are ethylene.
- the total number of added moles of the alkylene adduct is 1 mole or more, preferably 1 to 20 moles, and more preferably 4 to 12 moles.
- the added alkylene adduct is an ethylene oxide simple substance, 4 to 12 mol of ethylene oxide is preferable, 4 to 8 mol is more preferable, and 4 to 6 mol is particularly preferable.
- the added alkylene adduct is ethylene oxide or propylene oxide, 4 to 8 mol of ethylene oxide and 2 to 4 mol of propylene oxide are preferable.
- the component (a) one type may be used alone, or two or more types may be used in combination.
- the amount of the component (a) to be added is 0.01 to 5.0% by weight with respect to the water-soluble cutting solution. % Is preferable, and 0.05 to 2.0% by weight is more preferable.
- the added amount of (a) is less than 0.01% by weight, the defoaming effect is small, and the dynamic surface tension of the water-soluble cutting liquid is high, so that the water-soluble cutting liquid is difficult to enter the processing point and tends to deteriorate the cutting quality.
- the amount exceeds 5.0% by weight it may be difficult to achieve a blending balance in which the water-soluble cutting liquid exhibits a defoaming effect.
- the water-soluble cutting liquid for fixed abrasive wire saws preferably contains the following components (b), (c) and (d) in addition to the component (a).
- the lubricity between the fixed abrasive wire and the workpiece can be controlled, and the tool life of the fixed abrasive wire is improved.
- the component (b) is preferably at least one of carboxylic acid, mercaptobenzothiazole, benzothiazolylthioacetic acid and benzothiazolylthiopropionic acid.
- the carboxylic acid only needs to have one or more COOH groups.
- a component can be used individually by 1 type and can also use 2 or more types together.
- the component (c) is preferably at least one of amine, sodium hydroxide and potassium hydroxide, more preferably an amine.
- amines include monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine, dicyclohexylamine, trimethylolpropane poly (oxypropylene) triamine, N, N-bis (2hydroxyethyl)- Examples include alkylene adducts of N-cyclohexylamine and metaxylenediamine.
- one type may be used alone, or two or more types may be used in combination.
- the component (b) and the component (c) can be contained in any ratio as long as they are soluble in water.
- the component (c) is neutralized or more than the component (b).
- the total sum of the component (b) and the component (c) is desirably 5% by weight or less.
- the component (d) is preferably at least one of glycol, polyalkylene glycol, glycol ether, polyalkylene glycol ether, glycerin and an alkylene adduct of glycerin.
- the glycol only needs to have two OH groups, and examples include monoethylene glycol, diethylene glycol, triethylene glycol, monopropylene glycol, dipropylene glycol, tripropylene glycol, and hexylene glycol. Examples thereof include polyethylene glycol, polypropylene glycol, polyoxyethylene polyoxypropylene copolymer, and polyoxyethylene polyoxybutylene copolymer.
- glycol ether examples include diethylene glycol monomethyl ether, diethylene glycol monobutyl ether, and diethylene glycol monohexyl ether.
- polyoxyalkylene glycol ether examples include polyoxyethylene monomethyl ether, polyoxypropylene monomethyl ether, and monobutyl ether of a polyoxyethylene polyoxypropylene copolymer.
- alkylene adduct of glycerin examples include ethylene adduct, propylene adduct and ethylene propylene copolymer adduct of glycerin.
- component (d) one type may be used alone, or two or more types may be used in combination. Although content of (d) component should just be soluble in water, Preferably it is 70 weight% or less.
- the water-soluble cutting liquid for fixed abrasive wire saws may contain a rust preventive, preservative, fragrance, dye or the like, if necessary.
- the substrate for electronic materials with good quality can be obtained by cutting the ingot with a fixed abrasive wire saw using the water-soluble cutting solution for fixed abrasive wire saw according to the present invention.
- the wire serving as the bus bar may be made of iron or stainless steel, copper-plated or platinum-plated.
- the abrasive grains fixed to the wire commercially available abrasive grains can be used, but diamond and boron nitride are preferred.
- electrodeposition using a metal such as nickel or resin bonding using a resin is preferable.
- the cutting machine used in the present invention is not particularly limited as long as it is a commercially available multi-wire saw machine, and a multi-wire saw machine dedicated to a fixed abrasive wire saw is preferable.
- the ingot used in the present invention is not particularly limited as long as it is an ingot manufactured for an electronic material substrate.
- silicon, sapphire, crystal, quartz, silicon carbide, lithium tantalate, gallium nitride, and gallium arsenide An ingot having a high purity obtained by crystal growth or the like is preferably used.
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- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Lubricants (AREA)
Abstract
Description
また、付加されるアルキレンオキサイドは、ランダム重合で付加されるため、上記化学式(1)の4つのアルキレン基(-OR-)は、それぞれが炭素数1~4のアルキレン基であれば、同一であっても異なっていてもよいが、4つのアルキレン基がエチレン単体、又はエチレン及びプロピレンの双方のいずれかであることが好ましく、4つのアルキレン基全てがエチレンであることが特に好ましい。
上記化学式(1)において、アルキレン付加物の付加モル数は、総量として1モル以上であるが、1~20モルが好ましく、4~12モルがより好ましい。特に、付加されたアルキレン付加物がエチレンオキサイド単体の場合には、エチレンオキサイド4~12モルが好ましく、4~8モルがより好ましく、4~6モルが特に好ましい。また、付加されたアルキレン付加物がエチレンオキサイド及びプロピレンオキサイドの場合には、エチレンオキサイド4~8モル及びプロピレンオキサイド2~4モルが好ましい。
次に、切断中の泡立ちを想定して、実施例1乃至実施例9に係る固定砥粒ワイヤーソー用水溶性切断液、及び比較例1乃至比較例4に係る固定砥粒ワイヤーソー用水溶性切断液を有栓式100mlメスシリンダーに50ml入れ、有栓した後、激しくシェイクし、その直後の初期泡立ち量及び泡立ちが消えるまでの消泡時間を確認した。その結果を表3に示す。なお、安定性は、25℃で1週間静置し、○:1週間分離・沈殿なし、△:4日以上、1週間未満で分離・沈殿発生、×:4日未満で分離・沈殿発生とした。
次に実施例1乃至実施例9に係る固定砥粒ワイヤーソー用水溶性切断液、並びに比較例1乃至比較例4に係る固定砥粒ワイヤーソー用水溶性切断液を使用し、表4の条件で切断試験を行い、切断したウェハーの断面曲線の最大谷高さ(PV)を測定した。結果を表5に示す。
Claims (7)
- 前記(a)のアルキレン付加物の総付加モル数が、4~12モルであることを特徴とする請求項1記載の固定砥粒ワイヤーソー用水溶性切断液。
- 前記(a)の含有量が、0.01~5.0重量%であることを特徴とする請求項1又は2記載の固定砥粒ワイヤーソー用水溶性切断液。
- さらに、(b)カルボン酸、メルカプトベンゾチアゾール、ベンゾチアゾリルチオ酢酸及びベンゾチアゾリルチオプロピオン酸の少なくとも1種以上と、(c)アミン、水酸化ナトリウム及び水酸化カリウムの少なくとも1種以上とを含有することを特徴とする請求項1乃至3いずれか記載の固定砥粒ワイヤーソー用水溶性切断液。
- さらに、(d)グリコール、ポリアルキレングリコール、グリコールエーテル、ポリアルキレングリコールエーテル、グリセリン及びグリセリンのアルキレン付加物の少なくとも1種以上を含有することを特徴とする請求項1乃至4いずれか記載の固定砥粒ワイヤーソー用水溶性切断液。
- 請求項1乃至5いずれか記載の固定砥粒ワイヤーソー用水溶性切断液を用いて、固定砥粒ワイヤーソーによりインゴットを切断して電子材料用基板を得ることを特徴とするインゴットの切断方法。
- 請求項6記載のインゴットの切断方法によって得られたことを特徴とする電子材料用基板。
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CN201480020233.6A CN105121614B (zh) | 2013-04-05 | 2014-03-26 | 固定研磨粒线锯用水溶性切削液、使用其的铸锭的切削方法及由其所得的电子材料用基板 |
JP2015510027A JP5802863B2 (ja) | 2013-04-05 | 2014-03-26 | 固定砥粒ワイヤーソー用水溶性切断液及びそれを用いたインゴットの切断方法 |
KR1020157030570A KR20160018470A (ko) | 2013-04-05 | 2014-03-26 | 고정 지립 와이어소용 수용성 절단액, 그것을 이용한 잉곳의 절단 방법 및 그것에 의해서 얻어진 전자 재료용 기판 |
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Cited By (1)
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WO2018169008A1 (ja) * | 2017-03-17 | 2018-09-20 | 出光興産株式会社 | 脆性材料加工液 |
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CN109022115A (zh) * | 2017-06-12 | 2018-12-18 | 天津工业大学 | 一种硅晶体多线锯水基切削液 |
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JPS5698294A (en) * | 1980-01-09 | 1981-08-07 | Honda Motor Co Ltd | Water-soluble cutting oil |
JP2011012249A (ja) * | 2009-06-02 | 2011-01-20 | Nisshin Chem Ind Co Ltd | 水性切削液及び水性切削剤 |
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- 2014-03-26 CN CN201480020233.6A patent/CN105121614B/zh active Active
- 2014-03-26 KR KR1020157030570A patent/KR20160018470A/ko not_active Application Discontinuation
- 2014-03-26 MY MYPI2015702982A patent/MY177479A/en unknown
- 2014-04-01 TW TW103112107A patent/TWI613188B/zh active
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JP2011012249A (ja) * | 2009-06-02 | 2011-01-20 | Nisshin Chem Ind Co Ltd | 水性切削液及び水性切削剤 |
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JP2018154762A (ja) * | 2017-03-17 | 2018-10-04 | 出光興産株式会社 | 脆性材料加工液 |
Also Published As
Publication number | Publication date |
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TW201504205A (zh) | 2015-02-01 |
CN105121614A (zh) | 2015-12-02 |
JP5802863B2 (ja) | 2015-11-04 |
JPWO2014162945A1 (ja) | 2017-02-16 |
MY177479A (en) | 2020-09-16 |
TWI613188B (zh) | 2018-02-01 |
KR20160018470A (ko) | 2016-02-17 |
CN105121614B (zh) | 2020-04-17 |
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