WO2014010154A1 - スクライブ方法及びスクライブ装置 - Google Patents
スクライブ方法及びスクライブ装置 Download PDFInfo
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- WO2014010154A1 WO2014010154A1 PCT/JP2013/002571 JP2013002571W WO2014010154A1 WO 2014010154 A1 WO2014010154 A1 WO 2014010154A1 JP 2013002571 W JP2013002571 W JP 2013002571W WO 2014010154 A1 WO2014010154 A1 WO 2014010154A1
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- WIPO (PCT)
- Prior art keywords
- coordinate system
- mark
- scribing
- ccd camera
- moving means
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Definitions
- the present invention relates to a scribing method and a scribing apparatus suitable for forming a scribe line on a brittle material substrate such as a glass substrate, a semiconductor substrate, and a solar cell substrate.
- the present invention relates to a scribing method and a scribing apparatus for forming a scribe line on a brittle material substrate such as a glass substrate, a semiconductor substrate, and a solar cell substrate on which an alignment mark is written in accordance with the alignment mark.
- the present invention also provides a scribing method in which an alignment mark of a positioned brittle material substrate is imaged by a CCD camera, image processing is performed, the position of the alignment mark is measured, and after a necessary processing is performed, a scribing operation is performed. It relates to a scribe device.
- Patent Document 1 describes a scribing device that forms a scribe line on a glass substrate on which an alignment mark is written in accordance with the alignment mark.
- the scribing device described in Patent Document 1 positions and fixes the glass substrate on which the alignment mark is marked on the table, and then uses two CCD cameras installed and fixed above the table. Image of the two alignment marks on the left and right on the glass substrate, image processing on the imaged alignment mark, and calculation processing for the result after image processing, and the angle shift amount of the glass substrate Next, for the angle deviation amount, the correction of the rotational position of the table, and for the position deviation amount, the movement correction of the Y-axis position of the table and the X-axis position of the scribe head are measured. After the correction work is completed, a scribing operation is performed, and the correction work and the scribing operation are performed for each new glass substrate. That.
- the conventional scribing apparatus described in Patent Document 1 images an alignment mark written on a glass substrate with a fixed CCD camera, and performs image processing and arithmetic processing based on the image of the alignment mark captured by the CCD camera.
- the angle deviation amount and the positional deviation amount of the glass substrate are measured, and the correction command value corrected from the measured value of the deviation amount is sent to the table rotating means, the table moving means and the scribe head moving means.
- the table rotation position correction, the table position correction, and the scribing head position correction are performed.
- the table rotating means, the table moving means, and the scribe head moving means have thermal expansion and mechanical error, in such a conventional scribe device, the actual rotation amount of the table with respect to the correction command value from the NC device, The actual amount of movement of the table and the scribe head may not match.Therefore, it takes many repetitions of correction work to adjust to the accurate positioning state, which takes time and labor, and is extremely inefficient. is there.
- the present invention can form a scribe line that is aligned with the alignment mark even in a state where the positional deviation and the angular deviation occur in the brittle material substrate positioned on the table, with the positional deviation and the angular deviation maintained. It is another object of the present invention to provide a scribing method and a scribing apparatus capable of forming a scribing line corresponding to an alignment mark even if there is a difference in thermal expansion or mechanical error in the table, the table moving means and the scribe head moving means.
- the present invention is to provide a scribing method and a scribing apparatus capable of forming a scribe line matched to an alignment mark regardless of the thermal expansion difference between the brittle material substrate and the moving means of the scribe head.
- a brittle material substrate with alignment marks is positioned on the table according to the work coordinate system set in the NC apparatus, and the scribe head and the CCD camera are integrated as a common unit.
- a scribe head is moved on a brittle material substrate based on a set program to form a scribe line that matches the alignment mark.
- the scribing device of the present invention has an X direction stopper aligned with the X axis of the workpiece coordinate system set in the NC device at the tip side and a Y axis of the workpiece coordinate system set in the NC device at the tip side.
- a scribe head that is moved in the work coordinate system to form a scribe line on the brittle material substrate, and a CCD camera that is arranged in parallel with the scribe head on the common bracket and is moved in the work coordinate system together with the scribe head; Move the above scribe head and CCD camera together in the work coordinate system.
- Common X-axis moving means and Y-axis moving means an imaging instruction by the CCD camera, an image processing apparatus that performs image processing and arithmetic processing of the captured image, an imaging instruction to the CCD camera by the image processing apparatus, and an image A processing instruction and an arithmetic processing instruction, formation of a scribe line on a brittle material substrate by the scribe head, and an NC apparatus for controlling the operation of the common X-axis moving means and the Y-axis moving means.
- the scribe head and the CCD camera are integrated into a work piece in a state where the brittle material substrate on which the alignment mark is marked is positioned in the work coordinate system in accordance with the tip side of the X direction stopper and the Y side stopper of the work table.
- the camera centers are aligned, the respective alignment marks M1, M2 and M3 are imaged by the CCD camera, and the image processing and arithmetic processing are performed on the captured images by the image processing device.
- the alignment marks M1, M2 and M3 are respectively The coordinate values of the actual positions of the mark centers M1C, M2C, and M3C in the workpiece coordinate system are measured, and the measured coordinate values of the mark centers M1C, M2C, and M3C from the image processing apparatus and the alignment marks M1, M2 are measured.
- the program set in the brittle material substrate in the above-mentioned positioning state in the changed work coordinate system.
- the scribe head and the CCD camera are moved together by a common moving means, the moving amount of the scribe head and the moving amount of the CCD camera are always matched regardless of the thermal expansion and mechanical error of the moving means. Therefore, the CCD camera moves as a unit with the scribe head, and the command value for moving the scribe head and the movement value of the scribe head always match with the command value based on the measurement value measured by the CCD camera. Become.
- the scribe head and the CCD camera are integrally moved by a common moving means in a work coordinate system in which the brittle material substrate is positioned, and at least three points written on the brittle material substrate and orthogonally arranged.
- the changed work coordinate system is a work coordinate system set based on the actual positions of the mark centers M1C, M2C, and M3C, based on the measurement values obtained by the CCD camera.
- a scribe line that matches the alignment mark at the actual position can be formed on the brittle material substrate.
- an accurate scribe line that matches the planned command position can be formed.
- the scribing operation is performed by adjusting the scribe coordinate value on the production drawing as it is to the actual position of the alignment mark.
- a scribe line that matches the alignment mark at the actual position can be formed regardless of the positional deviation or the angular deviation.
- a scribe line that matches the alignment mark of the brittle material substrate can be formed regardless of the difference in thermal expansion between the brittle material substrate and the moving means that moves the scribe head.
- the actual center-to-center distance is 300.5 mm.
- the interval between the two scribe lines is 300.5 mm.
- the scribe head is preferably moved in the X-axis direction and the Y-axis direction.
- the brittle material substrate may be a glass substrate, a semiconductor substrate, a solar cell substrate, or the like. However, it is preferably a glass substrate.
- the scribe line corresponding to the alignment mark is formed while the positional deviation and the angular deviation remain. Further, it is possible to provide a scribing method and a scribing apparatus capable of forming a scribing line according to an alignment mark even if there is a difference in thermal expansion or mechanical error in the table, the table moving means, and the scribe head moving means. it can.
- a scribe line that matches the alignment mark regardless of the difference in thermal expansion between the brittle material substrate such as a glass substrate, a semiconductor substrate, and a solar cell substrate and the moving means of the scribe head.
- a scribing method and a scribing apparatus can be provided.
- FIG. 1 is a plan view of a scribing apparatus showing an embodiment of the present invention.
- FIG. 2 is a side view of the scribing apparatus shown in FIG.
- FIG. 3 is an explanatory diagram in which the work coordinate system is corrected and converted with reference to the center coordinates of three orthogonal alignment marks on the glass substrate.
- FIG. 4 is a flowchart of the scribing method of the present invention.
- the scribing apparatus 1 of this example shown in FIG. 1 and FIG. 2 mounts a glass substrate 5 as a brittle material substrate having alignment marks M1, M2, M3.
- the work table 6, a scribe head 2 that moves in the XY plane coordinate system parallel to the upper surface of the glass substrate 5 above the work table 6, and the scribe head 2 are juxtaposed and integrated with the scribe head 2.
- CCD camera 10, scribe head 2 and CCD camera 10 as a unitary X-axis moving means 3 and Y-axis moving means 4 for moving the XY plane coordinate system, and an imaging instruction by CCD camera 10 and an image of the captured image
- An image processing apparatus (not shown) that performs processing and arithmetic processing, and an NC apparatus that numerically controls the movement of the X-axis moving means 3 and the Y-axis moving means 4 ( Has a Shimese not) and.
- an X-direction stopper 7 and a Y-direction stopper 8 are arranged so as to be orthogonal to the work coordinate system Z 'set in the NC device.
- the tip side 7A of the X direction stopper 7 indicates the X axis 7B aligned with the X axis of the workpiece coordinate system Z ′
- the tip side 8A of the Y direction stopper 8 indicates the Y axis 8B aligned with the Y axis of the workpiece coordinate system Z ′.
- the X axis 7B and the Y axis 8B are orthogonal to each other, and the intersection of the X axis 7B and the Y axis 8B is the origin of the workpiece coordinate system Z '.
- the scribe head 2 and the CCD camera 10 are juxtaposed on the front surface of the head plate 9 as a common bracket.
- the scribing head 2 and the CCD camera 10 arranged in parallel on the head plate 9 are moved in an XY coordinate system by a common moving means 30, and the common moving means 30 is a common X-axis moving means. 3 and Y axis moving means 4.
- the X-axis moving means 3 is composed of an X1-axis moving means 3-1 and an X2-axis moving means 3-2 provided along the X-axis at each of both side positions with the work table 6 interposed therebetween.
- Each of the X1 axis moving means 3-1 and the X2 axis moving means 3-2 includes a guide rail 12 attached to the base 11 along the X axis 7B, and is movable to the guide rail 12 along the X axis 7B.
- a ball screw 15 disposed along the guide rail 12 and connected to the rotation output shaft of the servo electric motor 14 at one end.
- the ball screw 15 is connected to the ball screw 15 via a nut portion 15A.
- the movable body 13 is connected.
- Each of the X1-axis moving means 3-1 and the X2-axis moving means 3-2 moves the moving body 13 in the X direction through rotation of the ball screw 15 by the operation of the servo electric motor 14, and X1
- the servo electric motors 14 of the axis moving means 3-1 and the X2 axis moving means 3-2 are operated synchronously, and the X1 axis moving means 3-1 and the X2 axis moving means 3-2
- Each moving body 13 is configured to move in the X-axis synchronously by the respective synchronous operation of the servo electric motor 14.
- the Y-axis moving means 4 is disposed perpendicular to the X-axis and has a brittle body 16 installed on the moving body 13 of the X1-axis moving means 3-1 and the moving body 13 of the X2-axis moving means 3-2.
- the ball screw 20 is connected to the Y-axis carriage 18 via a nut portion 20A into which the ball screw 20 is screwed.
- the Y-axis moving means 4 moves the Y-axis carriage 18 in the Y-axis through the rotation of the ball screw 20 by the operation of the Y-axis servo electric motor 19.
- a pair of guide rails 21 are disposed on the side surface portion 18B of the Y-axis carriage 18 so as to be perpendicular to the upper surface of the work table 6 and along the vertical direction.
- the guide rails 21 are movable in the vertical direction.
- a head plate 9 is attached to the held slide block 21A, and a nut portion 9B is fixed to the head plate 9.
- a ball screw 9C is screwed to the nut portion 9B, and the ball screw 9C is vertically moved at the upper end.
- the upper and lower servo motors 22 are connected to the output shaft of the servo motor 22 and are fixed to the upper end portion 18 ⁇ / b> A of the Y-axis carriage 18.
- the head plate 9, and thus the scribe head 2 and the CCD camera 10 are integrally moved in the vertical direction H under numerical control.
- the scribe head 2 and the CCD camera 10 are positioned at a required height position with respect to the glass substrate 5 positioned on the upper surface of the work table 6 and further on the upper surface by the vertical servo motor 22. Yes.
- the focus of the CCD camera 10 is adjusted when the CCD camera 10 images the alignment marks M1, M2, and M3, and the scribe line is formed on the glass substrate 5 when the scribe head 2 forms a scribe line.
- the head 2 is set to an appropriate height position.
- the vertical movement means of this example for moving the scribe head 2 attached to the head plate 9 and the CCD camera 10 up and down by numerical control is, as described above, the guide rail 21 attached to the Y-axis carriage 18 having an L-shaped cross section, A slide block 21A held on the guide rail 21 so as to move up and down, a head plate 9 attached to the slide block 21A, a nut portion 9B fixed to the head plate 9, a ball screw 9C and a ball screw 9C screwed to the nut portion 9B
- the vertical servo motor 22 for rotation is provided, the vertical movement means for moving the scribe head 2 and the CCD camera 10 up and down by numerical control may be provided with a linear motor.
- the scribe head 2 raises and lowers the scribe wheel 2a, the scribe wheel 2a, lowers the scribe wheel 2a when forming the scribe line, and presses the scribe wheel 2a with air elasticity against the glass substrate 5, and the scribe wheel.
- 2a is provided with an angle control motor 25 that changes the direction according to the scribe line direction.
- the air cylinder 24 and the angle control motor 25 are attached to the head plate 9, and the scribe wheel 2a is fixed to the piston rod 26. It is attached to the connected connector 28 and is lowered by the air cylinder 24 only when a scribe line is formed.
- the rotation of the output rotation shaft of the angle control motor 25 is provided on the output rotation shaft.
- the pinion 27 is attached to the piston rod 26 of the air cylinder 24, and is connected to the piston rod 26 and supports the scribe wheel 2a. Is transmitted to the scribe wheel 2a, whereby the scribe wheel 2a can be turned in accordance with the scribe line direction, and the scribe wheel 2a is lowered, raised and angle-controlled by the air cylinder 24. The orientation of the scribe wheel 2a in the direction of the scribe line by 24 is performed independently of the vertical movement of the scribe head 2 and the CCD camera 10 when the scribe line is formed.
- the scribing apparatus 1 performs numerical control of the X-axis moving unit 3, the Y-axis moving unit 4, the vertical servo motor 22 and the angle control motor 25, and performs arithmetic processing such as workpiece coordinate system conversion.
- An image processing apparatus that performs imaging by the CCD camera 10 based on instructions of the apparatus (CNC) and the NC apparatus (CNC), image processing of the captured image, and calculation processing of the image processing result is provided.
- the glass substrate 5 is positioned in accordance with the workpiece coordinate system Z ′ set in advance in the NC apparatus, and the orthogonal sides of the glass substrate 5 are set to the X axis and Y of the workpiece coordinate system Z ′. Fit to each of the axes.
- the scribe head 2 and the CCD camera 10 are integrally moved by the common moving means 30 in the work coordinate system Z ′ and written on the glass substrate 5 in a positioning state on the work table 6 and arranged in an orthogonal arrangement.
- the coordinate values of the actual positions in the workpiece coordinate system Z ′ of the mark centers M1C, M2C and M3C are measured.
- the measured coordinate values of the mark centers M1C, M2C, and M3C are sent to the NC device, and the NC device measures the coordinate values of the mark centers M1C, M2C, and M3C and the set coordinate values of the alignment marks M1, M2, and M3.
- the scribe head 2 is moved and operated on the glass substrate 5 positioned on the work table 6 based on a preset NC program to form a scribe line that matches the alignment mark. To do. (Step IV)
- the glass substrate 5 on which the alignment marks are written is positioned on the upper surface of the work table 6 according to the work coordinate system Z ′ set in the NC apparatus.
- the scribe head 2 and the CCD camera 10 are integrally moved in the work coordinate system Z ′ by the common moving means 30 and are written on the glass substrate 5 and at least three alignment marks M1 that are orthogonally arranged.
- the scribe head 2 is moved to the glass substrate 5 positioned on the work table 6 based on a preset NC program to form a scribe line that matches the alignment mark.
- the scribing device 1 has an X-direction stopper 7 aligned with the X axis 7B of the work coordinate system Z ′ set in the NC device at the front end side 7A, and the Y axis 8B of the work coordinate system Z ′ at the front end side 8A.
- the scribe head 2 that forms the scribe lines 32 and 33 on the glass substrate 5
- the CCD camera 10 that is arranged in parallel with the scribe head 2 and moves together with the scribe head 2 and the scribe head 2 And the CCD camera 10 are moved together in the work coordinate system Z ′ and the XY coordinate system of Z.
- Means 3 and Y axis moving means 4 image processing by CCD camera 10, image processing, arithmetic processing, image processing device for outputting data to NC device, imaging instruction by CCD camera 10, image processing by image processing device And an NC device that controls the movement of the image processing result, the formation of the scribe lines 32 and 33 by the scribe head 2, and the movement of the common X-axis moving means 3 and Y-axis moving means 4.
- the camera center 31 of the CCD camera 10 is aligned, the respective alignment marks M1, M2, and M3 are imaged by the CCD camera 10, image processing is performed by the image processing device, and the image processing results are obtained.
- Calculation processing is performed to measure the coordinate values of the actual positions in the workpiece coordinate system Z ′ of the mark centers M1C, M2C and M3C of the alignment marks M1, M2 and M3, and the measured mark centers M1C, M2C and M3C respectively.
- the scribe head 2 is moved by the X-axis moving means 3 and the Y-axis moving means 4, and the X-direction scan passing through the mark center M3C, for example, aligned with the alignment mark. And performs the formation of each of the Y-direction of the scribe line 33 through the live line 32 and the mark center M2C.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
2 スクライブヘッド
3 X軸移動手段
4 Y軸移動手段
5 ガラス基板
6 ワークテーブル
7 X方向ストッパー
8 Y方向ストッパー
9 ヘッドプレート
10 CCDカメラ
11 基台
12、17、21 ガイドレール
13 移動体
13A、17A、21A スライドブロック
14 サーボ電動モータ
9C、15、20 ボールネジ
9B、15A、20A ナット部
16 ブリッチ体
18 Y軸キヤリッジ
19 Y軸サーボモータ
22 上下サーボモータ
24 エアーシリンダ
25 角度制御モータ
26 ピストンロッド
27 ピニオン
28 連結具
Claims (6)
- アライメントマークを記した脆性材料基板を、テーブル上面において、NC装置に設定されたワーク座標系に合わせて位置決めした状態で、スクライブヘッドとCCDカメラとを一体として、共通の移動手段により、上記ワーク座標系において移動させ、上記脆性材料基板に記され、直交配置関係にある少なくとも3点のアライメントマークM1、M2及びM3の上記ワーク座標系における設定座標値M1(X=X1、Y=Y1)、M2(X=X2、Y=Y1)及びM3(X=X1、Y=Y2)に、上記CCDカメラのカメラセンターを合わせ、それぞれのアライメントマークM1、M2及びM3を撮像し、撮像したアライメントマークM1、M2及びM3の画像に対して画像処理を行い、この画像処理の結果に基づいて、上記アライメントマークM1、M2及びM3それぞれのマークセンターM1C、M2C及びM3Cの上記ワーク座標系における実際の位置の座標値を計測し、これらマークセンターM1C、M2C及びM3Cの計測されたそれぞれの座標値と上記アライメントマークM1、M2及びM3の設定座標値M1(X=X1、Y=Y1)、M2(X=X2、Y=Y1)及びM3(X=X1、Y=Y2)とに基づいて演算処理を行い、上記アライメントマークM1のマークセンターM1Cの実際の位置の上記座標値が、指令された座標値(X=0、Y=0)に、上記アライメントマークM2のマークセンターM2Cの実際の位置の上記座標値が、指令された座標値(X=X2-X1、Y=0)に、そして、上記アライメントマークM3のマークセンターM3Cの実際の位置の上記座標値が、指令された座標値(X=0、Y=Y2-Y1)になるワーク座標系に変更し、この変更したワーク座標系において、プログラムに基づき、スクライブヘッドを移動させ、上記位置決め状態にある脆性材料基板に、アライメントマークに合わせたスクライブラインを形成するスクライブ方法。
- スクライブヘッドをX軸移動及びY軸移動させる請求項1に記載のスクライグ方法。
- 脆性材料基板は、ガラス基板である請求項1又は2に記載のスクライブ方法。
- 先端辺において、NC装置に設定されたワーク座標系のX軸に合わせたX方向ストッパー及び先端辺において、NC装置に設定された上記ワーク座標系のY軸に合わせたY方向ストッパーを夫々上面に備えたワークテーブルと、上記ワークテーブルの上記X方向ストッパーの先端辺及びY方向ストッパーの先端辺に合わせて上記ワーク座標系において位置決めされた脆性材料基板の上方において、ワーク座標系で移動されて、上記脆性材料基板にスクライブラインを形成するスクライブヘッドと、共通ブラケットにこのスクライブヘッドと並設され、スクライブヘッドと一体となってワーク座標系で移動されるCCDカメラと、上記クスライブヘッドとCCDカメラとを一体としてワーク座標系で移動させる共通のX軸移動手段及びY軸移動手段と、上記CCDカメラによる撮像指示、撮像した画像の画像処理及び演算処理を行う画像処理装置と、上記画像処理装置でのCCDカメラへの撮像指示、画像処理指示及び演算処理指示、上記スクライブヘッドによる脆性材料基板へのスクライブラインの形成、上記共通のX軸移動手段及びY軸移動手段の作動を制御するNC装置とを備えており、NC装置は、アライメントマークを記した脆性材料基板を上記ワークテーブルの上記X方向ストッパーの先端辺及びY方向ストッパーの先端辺に合わせて上記ワーク座標系に位置決めした状態で、スクライブヘッドとCCDカメラとを一体としてワーク座標系で移動させ、脆性材料基板に記され、直交配置にある少なくとも3点のアライメントマークM1、M2及びM3の上記ワーク座標系における設定座標値M1(X=X1、Y=Y1)、M2(X=X2、Y=Y1)及びM3(X=X1、Y=Y2)に、上記CCDカメラのカメラセンターを合わせ、それぞれのアライメントマークM1、M2及びM3をCCDカメラで撮像させ、撮像された画像に対して画像処理装置で画像処理及び演算処理を行わせ、上記アライメントマークM1、M2及びM3それぞれのマークセンターM1C、M2C及びM3Cの上記ワーク座標系における実際の位置の座標値を計測させ、画像処理装置からの計測されたマークセンターM1C、M2C及びM3Cそれぞれの座標値と上記アライメントマークM1、M2及びM3の設定座標値M1(X=X1、Y=Y1)、M2(X=X2、Y=Y1)及びM3(X=X1、Y=Y2)とに基づいて演算処理を行い、上記アライメントマークM1のマークセンターM1Cの実際の位置の上記座標値が、指令された座標値(X=0、Y=0)に、上記アライメントマークM2のマークセンターM2Cの実際の位置の上記座標値が、指令された座標値(X=X2-X1、Y=0)に、上記アライメントマークM3のマークセンターM3Cの実際の位置の上記座標値が、指令された座標値(X=0、Y=Y2-Y1)になるワーク座標系に変更し、この変更したワーク座標系において、プログラムに基づき、スクライブヘッドを移動させ、上記位置決め状態にある脆性材料基板に、アライメントマークに合わせたスクライブラインをスクライブヘッドで形成させるべく、CCDカメラの撮像指示、共通のX軸移動手段及びY軸移動手段の作動の制御を行うようになっているスクライブ装置。
- スクライブヘッドをX軸移動及びY軸移動させる請求項4に記載のスクライブ装置。
- 脆性材料基板は、ガラス基板である請求項4又は5に記載のスクライブ装置。
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