WO2011125095A1 - 自動倉庫 - Google Patents
自動倉庫 Download PDFInfo
- Publication number
- WO2011125095A1 WO2011125095A1 PCT/JP2010/002442 JP2010002442W WO2011125095A1 WO 2011125095 A1 WO2011125095 A1 WO 2011125095A1 JP 2010002442 W JP2010002442 W JP 2010002442W WO 2011125095 A1 WO2011125095 A1 WO 2011125095A1
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- WO
- WIPO (PCT)
- Prior art keywords
- automatic warehouse
- vertical
- cassette
- uppermost
- warehouse according
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Definitions
- the present invention relates to an automatic warehouse, and more particularly to an automatic warehouse that stores articles in the vicinity of a processing apparatus.
- semiconductor devices and liquid crystal devices are formed on a substrate through various processing configurations such as thin film formation, oxidation, and etching on a substrate such as a silicon wafer and a glass plate.
- a substrate is accommodated in a cassette, and the substrate is transported in units of cassettes by an overhead transport vehicle.
- a buffer called an automatic warehouse in front of the device is provided to adjust the processing time between the ceiling transportation vehicle and the processing device (for example, Patent Document 1).
- the conventional automatic warehouse in front of the apparatus includes a plurality of fixed shelves for storing cassettes arranged at intervals in the vertical direction, and a transfer device capable of delivering articles between the fixed shelves.
- the fixed shelves are arranged at intervals in the vertical direction, and the uppermost fixed shelf is a cassette delivery place with the overhead carriage.
- a cassette delivery port with the processing apparatus is disposed below the lowermost fixed shelf. The processing apparatus takes out the substrate from the cassette placed on the delivery port and processes it.
- the transfer device is arranged facing the side opposite to the processing device side of the fixed shelf, and transfers the cassette between the fixed shelves and between each fixed shelf and the delivery port.
- An object of the present invention is to reduce problems associated with transportation of an automatic warehouse.
- An automatic warehouse includes a shelf and a transfer device.
- the shelf is provided with a plurality of placement parts on the top, left, right, top and bottom where articles are placed.
- the transfer device transfers the article while holding the upper part of the article.
- the transfer device has a vertical rail and a hand member.
- the upper end of the vertical rail is in the vicinity of the uppermost mounting portion.
- the hand member is a member that can be raised and lowered along the vertical rail.
- the hand member has a vertical arm having a length capable of holding the upper portion of the article placed on the uppermost placement portion.
- the height of the upper end of the vertical rail is set to be equal to or lower than the support surface of the uppermost mounting portion, that is, the vertical rail does not protrude greatly upward from the support surface of the uppermost mounting portion. Therefore, the height of the automatic warehouse can be lowered. As a result, the height when transporting the automatic warehouse can be sufficiently reduced with the hand member attached. Moreover, the upper part of the articles
- the “upper end” of the vertical rail refers to a portion at the highest position.
- the upper end of the vertical rail may be below the support surface of the uppermost mounting portion.
- the height of the upper end of the vertical rail is set below the support surface of the uppermost placement unit, that is, the vertical rail does not protrude upward from the support surface of the uppermost placement unit. Therefore, the height of the automatic warehouse can be lowered. Specifically, by lowering the hand member downward, the support surface of the uppermost placement portion can be made the uppermost portion. As a result, the height when transporting the automatic warehouse can be sufficiently reduced with the hand member attached. Moreover, the upper part of the articles
- the vertical arm may be longer than the vertical interval between a pair of placement parts arranged in the vertical direction.
- the vertical arm may be shorter than the vertical interval between a pair of mounting units arranged in the vertical direction with one mounting unit interposed therebetween.
- the hand member may further have an article holding part provided at the upper end of the vertical arm. In this case, there is no portion extending further upward than the article holding portion in the hand member. Therefore, the vertical length of the vertical arm is not particularly long.
- the automatic warehouse may further include a cover that is detachably provided on the shelf.
- the cover can be removed during transportation.
- the cover may cover the periphery of the article placed on the uppermost placement section. In this case, the height of the automated warehouse during transportation can be lowered by removing the cover.
- the upper end of the cover may be positioned above the uppermost surface of the article placed on the uppermost placement section. In this case, the upper end of the cover becomes the highest part of the automatic warehouse in use.
- the lower end of the cover may be in the vicinity of the support surface of the uppermost mounting portion. In this case, when the cover is removed, the vicinity of the support surface of the uppermost mounting portion becomes the highest part of the automatic warehouse.
- the cover may have a plurality of divided covers. In this case, it is easy to remove and attach the cover.
- the height of the automatic warehouse during transportation can be further reduced by removing the wheels.
- the height can be lowered during transportation.
- the perspective view of the automatic warehouse as one Embodiment of this invention The front view of the automatic warehouse except an outer wall panel.
- a side sectional view of an automatic warehouse. The front enlarged view of a transfer apparatus.
- a side sectional view of an automatic warehouse. The perspective view which shows the state which removed the cover and the frame from the apparatus main body for transportation.
- a side sectional view of an automatic warehouse. The block diagram of the control system of an automatic warehouse.
- FIG. 1 is a perspective view of an automatic warehouse as one embodiment of the present invention.
- FIG. 2 is a front view of the automatic warehouse excluding the outer wall panel.
- the automatic warehouse 10 is, for example, a pre-automatic automatic warehouse disposed in front of the semiconductor processing apparatus 12, and functions as a buffer between the overhead conveyance vehicle (not shown) and the semiconductor processing apparatus 12.
- the automatic warehouse 10 stores a cassette C that stores a plurality of substrates before or after processing.
- the semiconductor processing apparatus 12 opens the cassette C, processes the circular substrate stored therein, and stores the processed substrate in the cassette C.
- a delivery port 14 is provided on the outer periphery of the semiconductor processing apparatus 12.
- the delivery port 14 has, for example, four cassette mounting tables 14a.
- the delivery port 14 is arranged so as to enter the inside of the main body of the automatic warehouse 10.
- the automatic warehouse 10 includes a frame 20, an outer wall panel 22 arranged so as to surround the outer surface of the frame 20, a fixed shelf 24, a slide shelf 25, and a transfer device 26.
- the slide shelf 25 is used by an operator to manually carry the cassette C into and out of the automatic warehouse 10.
- the transfer device 26 is controlled by the warehouse control unit 100 shown in FIG.
- the transfer device 26 conveys the cassette C among the plurality of fixed shelves 24, the slide shelves 25, and the plurality of cassette mounting tables 14a.
- the frame 20 includes, for example, four column members 20 a arranged at four corners, and a connecting member 20 b that connects the column members 20 a in the front, rear, left, and right directions.
- the connecting member 20b that connects the left and right is mainly disposed on the back surface on the semiconductor processing apparatus 12 side, and is not disposed on the front surface.
- the column member 20a is composed of a lower first portion 20A and an upper second portion 20B.
- the connecting member 20b described above connects the upper ends of the first portion 20A to each other.
- the second portion 20B is removable from the first portion 20A.
- the outer wall panel 22 is formed so as to cover the front and left and right side surfaces of the automatic warehouse 10 and the upper part of the back surface. In the lower part of the front surface of the outer wall panel 22, an opening for allowing the slide shelf 25 and the cassette C placed thereon to pass therethrough is formed.
- the outer wall panel 22 has a first cover 22A that covers the lower half of the apparatus main body 10a and a second cover 22B that covers the upper half of the apparatus main body 10a.
- the second cover 22B corresponds to the entire second portion 20B of the column member 20a and the upper portion of the first portion 20A.
- the second cover 22B surrounds the circumference of the placed cassette C, and the height thereof is higher than that of the cassette C described above. That is, the upper end 27 of the second cover 22 ⁇ / b> B is positioned above the upper surface 29 of the cassette C placed on the uppermost fixed shelf 24.
- the upper end 27 of the second cover 22 ⁇ / b> B is the highest part of the automatic warehouse 10.
- the lower end 28 of the second cover 22B is in the vicinity of the support surface 24a of the uppermost fixed shelf 24, specifically, the position below the support surface 24a. Therefore, when the second cover 22B is removed, the support surface 24a of the uppermost fixed shelf 24 becomes the highest part of the automatic warehouse 10.
- the second cover 22B can be further divided into a front cover 22C that constitutes the front surface and both side surfaces and a rear cover 22D that constitutes the rear surface, so that the second cover 22B can be removed and attached. Has become easier.
- the wheel 90 is fixed to the lower part of the frame 20.
- the wheel 90 can be removed from the frame 20.
- the fixed shelf 24 is arranged in the vertical direction and the horizontal direction. In this embodiment, a total of 12 columns are provided in four rows on the left and right and three rows on the top and bottom.
- the uppermost fixed shelf 24 is used for delivery of the cassette C to and from a ceiling transport vehicle (not shown).
- the fixed shelf 24 is fixed to the left and right connecting members 20 b of the frame 20.
- the fixed shelf 24 is arranged above the delivery port 14 with a predetermined space.
- the fixed shelf 24 is provided with a cassette reader (not shown) for identifying the cassette C.
- a positioning mechanism (not shown) for positioning the cassette C is provided on the support surface 24 a of the fixed shelf 24.
- a vertical passage 30 a through which the transfer device 26 can pass up and down is provided between the fixed shelves 24.
- the fixed shelves 24 are arranged in the order of the fixed shelf 24, the vertical passage 30a, the fixed shelf 24, the fixed shelf 24, the vertical passage 30a, and the fixed shelf 24 in the left-right direction. Facing the passage 30a.
- the transfer device 26 can transfer the cassette C between all the fixed shelves 24 and the delivery port 14.
- a horizontal passage 30 b is provided between the lowermost fixed shelf 24 and the delivery port 14.
- FIG. 3 is a side sectional view of the automatic warehouse.
- FIG. 4 is an enlarged front view of the transfer device.
- the transfer device 26 is a device having two axes, a horizontal axis and a vertical axis along the left-right direction, and can hold the cassette C.
- the transfer device 26 mainly includes a horizontal rail 32, a vertical rail 34 that moves along the horizontal rail 32, and a transfer head 36 that moves separately along the vertical rail 34.
- the horizontal rail 32 is arranged in the horizontal direction with a gap from the fixed shelf 24 on the front side of the fixed shelf 24.
- the horizontal rail 32 is arranged along the left-right direction.
- the horizontal rail 32 includes an upper rail member 40a and a lower rail member 40b, a horizontal drive motor 44, an upper drive pulley 46a and a lower drive pulley 46b, an upper driven pulley 48a, and a lower driven pulley 48b.
- the horizontal drive motor 44 is a device for driving the vertical rail 34 in the horizontal direction.
- the upper rail member 40a and the lower rail member 40b are connected to each other by connecting members 41 arranged in the vertical direction at both ends.
- the horizontal drive motor 44 is a motor with a speed reducer fixed to the left end of FIG. 4 (the right end of FIG. 2) of the upper rail member 40a, and can output a rotation by bending 90 degrees.
- the output of the horizontal drive motor 44 is transmitted to the upper drive pulley 46 a and is transmitted to the lower drive pulley 46 b via the connecting shaft 54.
- the upper drive pulley 46a and the lower drive pulley 46b are disposed at the right end of FIG. 2 (the left end of FIG. 4) of the upper rail member 40a and the lower rail member 40b.
- the upper driven pulley 48a and the lower driven pulley 48b are disposed at the left end in FIG. 2 (the right end in FIG.
- the upper toothed belt 50a is wound around an upper drive pulley 46a and an upper driven pulley 48a.
- An upper slider 52a guided in the horizontal direction by the upper rail member 40a is fixed to the upper toothed belt 50a.
- a lower slider 52b that is guided in a horizontal direction by the lower rail member 40b is fixed to the lower toothed belt 50b.
- the vertical rail 34 is fixed to the upper slider 52a and the lower slider 52b.
- the vertical rail 34 includes a vertical rail member 60, a vertical drive motor 64 for driving the transfer head 36 in the vertical direction, a drive pulley 66, a driven pulley 68, and a toothed belt 70. And have. These structures are the same as those of the upper rail member 40a of the horizontal rail 32.
- the transfer head 36 is fixed to a slider 72 fixed to the toothed belt 70.
- the transfer head 36 has a vertical arm 36a and an article holding portion 36b provided on an upper end portion 36d of the vertical arm 36a.
- the vertical arm 36 a extends long in the vertical direction and is disposed along the vertical rail 34.
- the article holding portion 36 b is a pair of members that can hold a flange C ⁇ b> 1 that protrudes from the upper surface of the cassette C.
- the pair of article holding portions 36b are disposed so as to be openable and closable in the left-right direction (the orthogonal direction in FIG. 2).
- a cassette identification sensor 36 c for identifying the cassette C is provided at a position where the transfer head 36 can face the cassette C.
- the transfer head 36 further includes a head motor 104 (FIG.
- the transfer head 36 opens and closes the article holder 36b to release and hold the flange C1 when the cassette C is loaded into the fixed shelf 24 and when the cassette C is unloaded from the fixed shelf 24.
- the transfer head 36 is guided by the horizontal rail 32 and the vertical rail 34 and moves in the two vertical passages 30a and 30b.
- the slider 72 is attached to the lower end of the vertical arm 36a. Note that the structure of the article holding portion of the transfer head is not limited to the above openable type.
- the article holding unit may be structured to move from the side and scoop up the flange of the cassette.
- the upper end 34 a of the vertical rail 34 is lower than the support surface 24 a of the uppermost fixed shelf 24. More specifically, the vertical position of the uppermost surface of the vertical rail 34 is slightly lower than the vertical position of the support surface 24 a of the uppermost fixed shelf 24.
- the vertical arm 36a of the transfer head 36 has a length capable of holding the flange C1 of the cassette C placed on the uppermost fixed shelf 24. Specifically, the vertical arm 36a is longer than the distance from the uppermost position of the vertical rail 34 to the flange C1 of the cassette C placed on the uppermost fixed shelf 24.
- the length of the vertical arm 36a is longer than the vertical interval between the pair of fixed shelves 24 arranged in the vertical direction, and is shorter than the vertical interval between the uppermost fixed shelf 24 and the lowermost fixed shelf 24.
- the article holding part 36b is provided at the upper end part 36d of the vertical arm 36a. Therefore, the transfer head 36 has no portion extending further upward than the article holding part 36b. Therefore, the vertical length of the vertical arm 36a is not particularly long.
- the article holding portion 36 b can be connected to the uppermost fixed shelf 24 without the vertical arm 36 a having a particularly long vertical length.
- the placed cassette C can be held.
- the warehouse control unit 100 has, for example, a microcomputer.
- the warehouse control unit 100 controls the horizontal drive motor 44, the vertical drive motor 64, and the head motor 104 of the transfer device 26 by software.
- the warehouse control unit 100 is connected to a horizontal drive motor 44, a vertical drive motor 64, a head motor 104, and another input / output unit 106.
- the other input / output unit 106 is a device that inputs / outputs data to / from other sensors such as the cassette identification sensor 36c and external devices such as the semiconductor processing apparatus 12.
- an overhead conveyance vehicle (not shown) carries the cassette C into one of the uppermost fixed shelves 24.
- the transfer device 26 transfers the loaded cassette C from the vertical passage 30a facing the loaded uppermost fixed shelf 24 to either one of the two lower fixed shelves 24 in two rows below.
- the transfer device 26 transfers the cassette C directly to the cassette mounting table 14 a or the slide shelf 25 of the delivery port 14.
- the transfer head 36 moves above the center of the cassette C to be transferred with the article holding part 36b opened. Specifically, the transfer head 36 moves to the vertical passage 30 a facing the cassette C to be transferred and rises along the vertical rail 34.
- the transfer head 36 moves horizontally along the horizontal rail 32 to the center of the cassette C.
- the transfer head 36 descends, and finally the article holding part 36b is closed to hold the flange C1.
- the flange C1 is held and the cassette C can be transferred.
- the vertical arm 36a of the transfer head 36 moves along the vertical rail 34 when moving up and down.
- the vertical arm 36a is supported at the highest position of the vertical rail 36a, and the upper half of the vertical arm 36a and The article holding part 36b extends to a position higher than the upper end surface of the vertical arm 36a.
- the slider 72 is in the vicinity of the highest position of the portion that can be supported by the vertical arm 36a.
- the vertical arm 36a when holding the cassette C mounted on the cassette mounting table 14a, the vertical arm 36a is supported at the lowest position of the vertical rail 36a, and the lower half of the vertical arm 36a is mounted on the cassette. It extends to a position lower than the mounting table 14a.
- the slider 72 is in the vicinity of the lowest position of the portion that can be supported by the vertical arm 36a.
- FIG. 6 Disassembling work during transport
- the front cover 22C and the rear cover 22D of the second cover 22B are removed from the apparatus body 10a, and the column member 20a
- the second portion 20B is removed from the apparatus main body 10a.
- 7 and 8 show the main body of the automatic warehouse 10 after the above-mentioned members are removed.
- FIG. 7 is a perspective view of the apparatus main body during transportation.
- FIG. 8 is a side sectional view of the automatic warehouse.
- the vertical rail 34 is the uppermost fixed shelf. There is little or no protrusion upward from the 24 support surfaces 24a. Further, as shown in FIG. 8, the transfer head 36 is lowered downward from the uppermost position during transportation, and as a result, the transfer head 36 is disposed below the support surface 24a of the uppermost fixed shelf 24. Has been. For this reason, the highest part of the main body 10a of the automatic warehouse 10 at the time of transportation is the support surface 24a of the uppermost fixed shelf 24. As described above, the height of the automatic warehouse 10 at the time of transportation can be lowered while the vertical rail 34 and the transfer head 36 of the transfer device 26 are mounted.
- the height of the automatic warehouse 10 at the time of transportation can be further reduced by removing the wheel 90 from the apparatus main body 10a.
- the transfer device 26 since the transfer device 26 is not disassembled during transportation, it is not necessary to re-teach the transfer position on the transfer device 26 on site after transportation. Further, in the above-described embodiment, compared with an automatic warehouse that transports the entire apparatus after dividing it into upper and lower parts, the work of disassembly is reduced and the assembly work at the site is also reduced. Moreover, in the above-mentioned embodiment, special facilities, such as an overhead crane, become unnecessary in the field work.
- the structure for holding the cassette in the transfer device is not limited to the above embodiment.
- the holding portion may have a hook shape and may be engaged with the protruding portion of the cassette from the lateral direction.
- the structure of the cover constituting the outer wall panel is not limited to the above embodiment.
- the cover may cover the top surface of the shelf. In that case, the cassette is carried in from the front of the automatic warehouse.
- the present invention can be widely applied to automatic warehouses, in particular, automatic warehouses that store articles in the vicinity of a processing apparatus.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
本発明の目的は、自動倉庫の運搬に伴う不具合を低減することにある。
本発明の一見地に係る自動倉庫は、棚と、移載装置とを備えている。棚は、上面に物品が載置される載置部が左右上下に複数設けられている。移載装置は、物品の上部を保持して物品を移載する。移載装置は、鉛直レールと、ハンド部材とを有している。鉛直レールの上端は、最上段の載置部の近傍にある。ハンド部材は、鉛直レールに沿って昇降可能な部材である。ハンド部材は、最上段の載置部に載置される物品の上部を保持可能な長さを有する鉛直アームを有している。
この自動倉庫では、鉛直レール上端の高さを最上段の載置部の支持面以下にしており、つまり鉛直レールが最上段の載置部の支持面から上方に大きく突出していない。したがって、自動倉庫の高さを低くできる。この結果、ハンド部材を装着したままで、自動倉庫を運搬する際の高さを十分に低くできる。また、使用時には、ハンド部材によって最上段の載置部に載置された物品の上部をつかむことができる。
なお、鉛直レールの「上端」とは、最も高い位置にある部分をいう。
この自動倉庫では、鉛直レール上端の高さを最上段の載置部の支持面以下にしており、つまり鉛直レールが最上段の載置部の支持面から上方に突出していない。したがって、自動倉庫の高さを低くできる。具体的には、ハンド部材を下方に下げることで、最上段の載置部の支持面を最上部とすることができる。この結果、ハンド部材を装着したままで、自動倉庫を運搬する際の高さを十分に低くできる。また、使用時には、ハンド部材によって最上段の載置部に載置された物品の上部をつかむことができる。
図1および図2を用いて、本発明の一実施形態による自動倉庫10を説明する。図1は、本発明の一実施形態としての自動倉庫の斜視図である。図2は、外壁パネルを除いた自動倉庫の正面図である。
半導体処理装置12は、カセットCを開けて、内部に収納された円形の基板に処理を施し、処理済みの基板をカセットCに収納する。半導体処理装置12の外周には、受け渡しポート14が設けられている。受け渡しポート14は、例えば、4個のカセット載置台14aを有している。受け渡しポート14は、自動倉庫10の装置本体内部に入り込むように配置されている。
フレーム20は、図2に示すように、例えば、四隅に配置された4本の柱部材20aと、柱部材20aを前後左右に連結する連結部材20bと、を有している。なお、左右をつなぐ連結部材20bは、主に半導体処理装置12側の背面に配置されており、正面には配置されていない。
図2に示すように、固定棚24は、上下方向および左右方向に配置されている。この実施形態では、左右に4列、上下に3段の合計12個設けられている。最上段の固定棚24は、天井搬送車(図示せず)とのカセットCの受け渡しに使用される。固定棚24は、フレーム20の左右の連結部材20bに固定されている。固定棚24は、受け渡しポート14の上方に所定のスペースを空けて配置されている。
固定棚24には、カセットCを識別するカセット読み取り器(図示せず)が設けられている。固定棚24の支持面24aには、カセットCを位置決めする位置決め機構(図示せず)が設けられている。
最下段の固定棚24と受け渡しポート14との間は、水平通路30bとなっている。
図2~図4を用いて、移載装置26を説明する。図3は、自動倉庫の側面断面図である。図4は、移載装置の正面拡大図である。
スライダ72は、鉛直アーム36aの下端部に装着されている。
なお、移載ヘッドの物品保持部の構造は上記開閉式に限定されない。例えば、物品保持部は側方から移動してカセットのフランジをすくい上げる構造でもよい。
一方、移載ヘッド36の鉛直アーム36aは、最上段の固定棚24に載置されるカセットCのフランジC1を保持可能な長さを有している。具体的には、鉛直アーム36aは、鉛直レール34の最上位位置から最上段の固定棚24に載置されるカセットCのフランジC1までの距離より長い。鉛直アーム36aの長さは、上下方向に並んだ一対の固定棚24同士の上下方向間隔より長くて、しかも最上段の固定棚24と最下段の固定棚24同士の上下方向間隔より短い。
以上の構造により、図4に示すように、移載ヘッド36は、鉛直レール34に対して最も高い位置まで移動して、最上段の固定棚24に載置されるカセットCのフランジC1を保持可能である。さらに、図5に示すように、移載ヘッド36は、鉛直レール34に対して最も低い位置まで移動して、受け渡しポート14に載置されるカセットCのフランジC1を保持可能である。
倉庫制御部100は、例えば、マイクロコンピュータを有するものである。倉庫制御部100は、ソフトウェアにより、移載装置26の水平駆動モータ44、鉛直駆動モータ64およびヘッドモータ104を制御する。また、倉庫制御部100には、水平駆動モータ44と、鉛直駆動モータ64と、ヘッドモータ104と、他の入出力部106と、が接続されている。他の入出力部106とは、カセット識別センサ36c等のその他のセンサおよび半導体処理装置12等の外部装置とのデータの入出力を行う機器である。
このように構成された自動倉庫10では、天井搬送車(図示せず)がカセットCを最上段の固定棚24のいずれかに搬入する。次に、移載装置26が、搬入されたカセットCを、搬入された最上段の固定棚24が面する鉛直通路30aから下方の2列の2段の固定棚24のいずれかに移載する。また、移載命令によっては、移載装置26は、受け渡しポート14のカセット載置台14a又はスライド棚25にカセットCを直接移載する。
以上の移載動作時には、最初に、移載ヘッド36が、物品保持部36bを開けた状態で移載対象のカセットCの中心の上方に移動する。具体的には、移載ヘッド36は、移載対象のカセットCが面する鉛直通路30aに移動して、鉛直レール34に沿って上昇する。そしてカセットCの上方に到達すると、移載ヘッド36は、水平レール32に沿って水平にカセットCの中心に移動する。次に、移載ヘッド36は下降して、最後に物品保持部36bを閉じてフランジC1を保持する。これによりフランジC1が保持され、カセットCを移載することができる。
上記の動作において、移載ヘッド36の鉛直アーム36aは、上下移動する際には、鉛直レール34に沿って移動する。
鉛直アーム36aは、図3に示すように、最上面の固定棚24aに載置されたカセットCを保持する場合は、鉛直レール36aの最も高い位置に支持されて、鉛直アーム36aの上半分および物品保持部36bが鉛直アーム36aの上端面より高い位置に延びている。また、このとき、スライダ72は、鉛直アーム36aによって支持可能な部分の最も高い位置付近にある。
鉛直アーム36aは、図5に示すように、カセット載置台14aに載置されたカセットCを保持する場合は、鉛直レール36aの最も低い位置に支持されて、鉛直アーム36aの下半分がカセット載置台14aより低い位置に延びている。また、このとき、スライダ72は、鉛直アーム36aによって支持可能な部分の最も低い位置付近にある。
自動倉庫10を運搬する際には、図6に示すように、第2カバー22Bの前側カバー22Cおよび後側カバー22Dを装置本体10aから取り外し、さらに柱部材20aの第2部分20Bを装置本体10aから取り外す。図7および図8は、上記部材が取り外された後の自動倉庫10の装置本体を示す。図7は、輸送時の装置本体の斜視図である。図8は、自動倉庫の側面断面図である。
また、上述の実施形態では、装置全体を上下に分割してから運搬する自動倉庫に比べると、分解の作業が少なくなり、また現地での組み立て作業も少なくなる。また、上述の実施形態では、現地での作業において天井クレーン等の特別な設備が不要になる。
以上、本発明の一実施形態について説明したが、本発明は上記実施形態に限定されるものではなく、発明の要旨を逸脱しない範囲で種々の変更が可能である。特に、本明細書に書かれた複数の実施形態および変形例は必要に応じて任意に組合せ可能である。
外壁パネルを構成するカバーの構造は前記実施形態に限定されない。例えば、カバーは棚の上面を覆っていてもよい。その場合、カセットは自動倉庫の前面から搬入されることになる。
10a 装置本体(棚)
12 半導体処理装置
14 受け渡しポート
14a カセット載置台
20 フレーム
20a 柱部材
20b 連結部材
20A 第1部分
20B 第2部分
22 外壁パネル
22A 第1カバー
22B 第2カバー
22C 前側カバー
22D 後側カバー
24 固定棚(載置部)
24a 支持面
25 スライド棚
26 移載装置
27 上端
28 下端
29 上面
30a 鉛直通路
30b 水平通路
32 水平レール
34 鉛直レール
34a 上面
36 移載ヘッド(ハンド部材)
36a 鉛直アーム
36b 物品保持部
36c カセット識別センサ
36d 上端部
40a 上レール部材
40b 下レール部材
41 接続部材
44 水平駆動モータ
46a 上駆動プーリ
46b 下駆動プーリ
48a 上従動プーリ
48b 下従動プーリ
50a 上歯付きベルト
50b 下歯付きベルト
52a 上スライダ
52b 下スライダ
54 連結軸
60 鉛直レール部材
64 鉛直駆動モータ
66 駆動プーリ
68 従動プーリ
70 歯付きベルト
72 スライダ
90 車輪
100 倉庫制御部
104 ヘッドモータ
106 他の入出力部
C カセット
C1 突起部
Claims (14)
- 上面に物品が載置される載置部が左右上下に複数設けられた棚と、
前記物品の上部を保持して前記物品を移載する移載装置とを備えており、
前記移載装置は、
最上段の載置部の支持面近傍にある上端を有する鉛直レールと、前記鉛直レールに沿って昇降可能な部材であって前記最上段の載置部に載置される物品の上部を保持可能な長さを有する鉛直アームを有しているハンド部材とを有している、
自動倉庫。 - 前記鉛直レールの上端は前記最上段の載置部の支持面以下にある、請求項1に記載の自動倉庫。
- 前記鉛直アームは、上下方向に並んだ一対の載置部同士の上下方向間隔より長い、請求項1に記載の自動倉庫。
- 前記鉛直アームは、上下方向に1つの載置部を挟んで並んだ一対の載置部同士の上下方向間隔より短い、請求項3に記載の自動倉庫。
- 前記ハンド部材は、前記鉛直アームの上端部に設けられた物品保持部をさらに有している、請求項1に記載の自動倉庫。
- 前記ハンド部材は、前記鉛直アームの上端部に設けられた物品保持部をさらに有している、請求項3に記載の自動倉庫。
- 前記ハンド部材は、前記鉛直アームの上端部に設けられた物品保持部をさらに有している、請求項4に記載の自動倉庫。
- 前記棚に取り外し可能に設けられたカバーをさらに備えている、請求項1に記載の自動倉庫。
- 前記カバーは、前記最上段の載置部に載置される物品の周囲を覆っている、請求項8に記載の自動倉庫。
- 前記カバーの上端は、前記最上段の載置部に置かれる物品の上面以上の位置にある、請求項9に記載の自動倉庫。
- 前記棚に取り外し可能に設けられたカバーをさらに備えている、請求項3に記載の自動倉庫。
- 前記カバーは、前記最上段の載置部に載置される物品の周囲を覆っている、請求項11に記載の自動倉庫。
- 前記カバーの上端は、前記最上段の載置部に置かれる物品の上面以上の位置にある、請求項12に記載の自動倉庫。
- 前記棚の下部に取り外し可能に設けられた車輪をさらに備えている、請求項1に記載の自動倉庫。
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EP2554495A4 (en) | 2014-09-24 |
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US9165811B2 (en) | 2015-10-20 |
JPWO2011125095A1 (ja) | 2013-07-08 |
US20130022429A1 (en) | 2013-01-24 |
TW201144190A (en) | 2011-12-16 |
EP2554495A1 (en) | 2013-02-06 |
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TWI477426B (zh) | 2015-03-21 |
KR101414772B1 (ko) | 2014-07-03 |
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