WO2011070856A1 - Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant - Google Patents

Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant Download PDF

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Publication number
WO2011070856A1
WO2011070856A1 PCT/JP2010/068313 JP2010068313W WO2011070856A1 WO 2011070856 A1 WO2011070856 A1 WO 2011070856A1 JP 2010068313 W JP2010068313 W JP 2010068313W WO 2011070856 A1 WO2011070856 A1 WO 2011070856A1
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WO
WIPO (PCT)
Prior art keywords
thread groove
fixing member
cylindrical fixing
groove exhaust
divided
Prior art date
Application number
PCT/JP2010/068313
Other languages
English (en)
Japanese (ja)
Inventor
透 三輪田
祐幸 坂口
好伸 大立
靖 前島
勉 高阿田
Original Assignee
エドワーズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ株式会社 filed Critical エドワーズ株式会社
Priority to CN201080053910.6A priority Critical patent/CN102667169B/zh
Priority to JP2011545140A priority patent/JP5758303B2/ja
Priority to KR1020127003659A priority patent/KR101773632B1/ko
Publication of WO2011070856A1 publication Critical patent/WO2011070856A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/422—Discharge tongues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a cylindrical fixing member of a thread groove exhaust portion constituting a vacuum pump and a vacuum pump using the same, and in particular, torque generated when a rotor in the vacuum pump is broken (hereinafter referred to as “breaking torque”).
  • breaking torque While maintaining the strength of the vacuum pump, the screw groove with a complicated shape whose width, depth change, lead angle, etc. vary in the direction of the rotation axis of the rotating member of the screw groove exhaust part It can be easily manufactured on the cylindrical fixing member side of the thread groove exhaust portion, and is suitable for improving exhaust performance and compression performance of the entire vacuum pump by employing such a thread groove.
  • vacuum pumps used in the equipment are required to exhaust large flow gases, to achieve low ultimate pressure, and to have high exhaust performance.
  • the blade exhaust section has a structure in which rotor blades and stationary blades are alternately arranged in multiple stages.
  • the rotor blades that rotate at high speeds give the gas molecules downward momentum and are given the downward momentum.
  • the operation in which the gas molecules are sent to the rotor blade of the next stage by the fixed blade is repeatedly performed in multiple stages, so that the upstream gas molecules are transferred and exhausted to the downstream thread groove exhaust section.
  • the screw groove exhaust portion has a rotating member and a cylindrical fixing member arranged so as to surround the outer periphery of the rotating member, and is provided with a screw groove on the inner peripheral surface of the cylindrical fixing member to fix the cylindrical shape.
  • a spiral thread groove exhaust passage is formed between the member and the rotating member. And the gas molecules transferred from the blade exhaust part as described above enter the thread groove exhaust passage, and the gas molecules are compressed and exhausted by the drag effect on the outer surface of the thread groove and the rotating member. .
  • the thread groove exhaust portion since the thread groove is provided on the inner peripheral surface of the cylindrical fixing member, the width, depth, lead angle, etc. vary in the direction of the rotation axis of the rotating member. It is difficult to form a thread groove having a shape, and the exhaust performance and compression performance of the entire vacuum pump cannot be improved by employing the thread groove having such a shape.
  • the above-described conventional cylindrical fixing member of the thread groove exhaust portion also plays a role of reducing the breaking torque by receiving the broken pieces when the breaking occurs inside the vacuum pump. For this reason, the whole cylindrical fixing member of a thread groove exhaust part cannot be produced only with a casting with low strength.
  • this kind of cylindrical fixing member is made of a high-strength material, for example, an expensive machined product that has been cut out from a material made by forging or extrusion / drawing.
  • the cylindrical fixing member of the thread groove exhaust part is a factor that increases the overall cost of the vacuum pump.
  • the present invention has been made in order to solve the above-mentioned problems, and its purpose is to reduce the cost while maintaining the strength of the vacuum pump against the breaking torque, or to rotate the rotating shaft of the rotating member of the thread groove exhaust portion.
  • Thread grooves with complex shapes that vary in width, depth, lead angle, etc. in the center direction can be easily produced on the cylindrical fixing member side of the thread groove exhaust section. It is an object of the present invention to provide a cylindrical fixing member of a thread groove exhaust pump part suitable for improving exhaust performance and compression performance, and a vacuum pump using the same.
  • the present invention provides a cylindrical fixing member disposed so as to surround an outer periphery of a rotating member of a screw groove exhaust portion, and a gas is interposed between the cylindrical fixing member and the rotating member.
  • the cylindrical fixing member is divided into two or more divided pieces in the direction of the rotation axis of the rotating member.
  • the divided pieces of the cylindrical fixing member may be formed of different materials.
  • a screw groove for forming the screw groove exhaust passage is provided in the cylindrical fixing member, and the lead angle of the screw groove is different between one divided piece of the cylindrical fixing member and the other divided piece.
  • a configuration can also be adopted.
  • a thread groove for forming the thread groove exhaust passage is provided in the cylindrical fixing member, and the number of threads of the thread groove is different between one divided piece of the cylindrical fixing member and the other divided piece.
  • a configuration can also be adopted.
  • a thread groove for forming the thread groove exhaust passage is provided in the cylindrical fixing member, and the width of the thread groove is different between one divided piece of the cylindrical fixing member and the other divided piece. Can also be adopted.
  • a thread groove for forming the thread groove exhaust passage is provided in the cylindrical fixing member, and the amount of change in the depth of the thread groove in one divided piece and the other divided piece of the cylindrical fixing member is Different configurations may be employed.
  • a screw groove for forming the screw groove exhaust passage is provided in the cylindrical fixing member, and in one divided piece and the other divided piece of the cylindrical fixing member, from the upper end of the screw groove to the rotating member. It is also possible to adopt a configuration in which the gap between the cylindrical fixing member and the rotating member is different by changing the distance.
  • the above-mentioned cylindrical fixing member can employ a configuration having a groove formed on the upper surface in the direction of the rotation axis.
  • a thread groove for forming the thread groove exhaust passage is provided in each of the divided pieces, and the cylindrical fixing member is configured such that the thread groove of one divided piece and the thread groove of the other divided piece are continuous. You may comprise so that the thread groove alignment means connected with may be provided.
  • the thread groove alignment means includes an engagement pin erected on the division surface of one division piece, and an engagement hole formed in the division surface of another division piece joined to the division surface. You may comprise so that the said engagement pin may be inserted and fitted in an engagement hole.
  • the engagement hole is a through hole that penetrates the upper and lower end surfaces of the divided piece, and the engagement pin is inserted and fitted into one end of the through hole, while the other end of the through hole is the position of the engagement pin. You may comprise so that it may function as a confirmation window which confirms.
  • the thread groove alignment means includes a first step portion formed on a split surface of one split piece and a second step portion formed on a split surface of another split piece joined to the split surface.
  • the two step portions can be configured to be joined to each other.
  • the thread groove alignment means includes an engaging recess formed on the split surface of one split piece and an engaging convex portion formed on the split face of another split piece joined to the split surface.
  • the engaging convex portion may be configured to engage with the engaging concave portion.
  • the lower end of the cylindrical fixing member is supported by a pump base, and the divided piece positioned at the lowermost of the two or more divided pieces is provided integrally with the pump base by processing the pump base.
  • You may comprise as follows.
  • cylindrical fixing member is provided at the uppermost part of the two or more divided pieces as a product mixing preventing means for preventing the product from entering the gap between the divided pieces and the member located outside the divided pieces.
  • the structure which equips the upper-end outer peripheral part of the division piece located with a cover part is employable.
  • a configuration in which a reinforcing member is attached to the outer peripheral portion of the divided piece may be employed.
  • the cylindrical fixing member of the screw groove exhaust portion is divided into two or more divided pieces in the direction of the rotation axis of the rotating member of the screw groove exhaust portion. Therefore, the following effects (1) or (2) can be obtained.
  • Each divided piece is formed of a different material according to the required strength.
  • a divided piece of a part requiring particularly high strength is cut out from a material made by forging or extrusion / drawing.
  • the A section enlarged view in FIG. The top view of a thread groove exhaust stator (cylindrical fixing member of a thread groove exhaust part).
  • EE sectional drawing of FIG. Sectional drawing of other embodiment (The type from which the lead angle of a thread groove differs for every division
  • Sectional drawing of other embodiment The type in which the number of thread grooves differs for every division
  • Sectional drawing of other embodiment The type from which the width
  • Sectional drawing of other embodiment The type in which the variation
  • Sectional drawing of other embodiment a type with a different gap with a rotor for every division
  • Sectional drawing of other embodiment type provided with the groove
  • Sectional drawing of other embodiment The type provided with the thread groove alignment means by an engagement pin and an engagement hole (closed hole)) of a thread groove exhaust part.
  • Sectional drawing of other embodiment The type provided with the thread groove alignment means by an engagement pin and an engagement hole (through-hole)) of a thread groove exhaust part.
  • the side view of other embodiment (The type provided with the screw groove alignment means by a level
  • the side view of other embodiment (The type provided with the thread groove alignment means by an engagement convex part and an engagement recessed part) of the thread groove exhaust part seen from the arrow B direction of FIG.
  • the side view of other embodiment (The type which employ
  • adopted other embodiment (The type which provided the lower part piece integrally with the pump base) of the thread groove exhaust part.
  • Sectional drawing of other embodiment (The type which employ
  • FIG. 1 is a cross-sectional view of a vacuum pump to which a cylindrical fixing member of a thread groove exhaust portion according to an embodiment of the present invention is applied
  • FIG. 2 is an enlarged view of portion A in FIG. 1
  • FIG. FIG. 4 is a cross-sectional view taken along the line EE of FIG. 3.
  • a vacuum apparatus in a semiconductor manufacturing apparatus or a liquid crystal display panel manufacturing apparatus, and makes the pressure in the vacuum chamber a predetermined degree of vacuum.
  • the vacuum pump P shown in FIG. 1 includes a blade exhaust part Pt that exhausts gas through the rotary blade 13 and the fixed blade 14 and a screw groove exhaust part Ps that exhausts gas through a spiral thread groove exhaust passage S. And a drive system for driving them.
  • the exterior case 1 has a bottomed cylindrical shape in which a cylindrical pump case 1A and a bottomed cylindrical pump base 1B are integrally connected with bolts in the cylinder axis direction.
  • the upper end portion side of the pump case 1A is opened as a gas intake port 2, and a gas exhaust port 3 is provided on the side surface of the lower end portion of the pump base 1B.
  • the gas inlet 2 is connected to a vacuum container (not shown) that is high vacuum, such as a process chamber of a semiconductor manufacturing apparatus, by a bolt (not shown) provided on the flange 1C on the upper edge of the pump case 1A.
  • the gas exhaust port 3 is connected so as to communicate with an auxiliary pump (not shown).
  • a cylindrical stator column 4 containing various electrical components is provided in the center of the pump case 1A, and the stator column 4 is erected in such a manner that its lower end is screwed and fixed onto the pump base 1B. is there.
  • a rotor shaft 5 is provided inside the stator column 4, and the rotor shaft 5 is arranged such that its upper end portion faces the gas inlet 2 and its lower end portion faces the pump base 1B. is there. Further, the upper end portion of the rotor shaft 5 is provided so as to protrude upward from the cylindrical upper end surface of the stator column 4.
  • a rotor 6 is provided outside the stator column 4.
  • the rotor 6 is housed in the pump case 1 ⁇ / b> A and has a cylindrical shape surrounding the outer periphery of the stator column 4.
  • the rotor 6 is integrated with the rotor shaft 5 described above.
  • a flange 8 with a boss hole 7 is provided inside the upper end portion of the rotor 6, and a step portion 9 is provided on the outer periphery of the upper end portion of the rotor shaft 5. Is forming.
  • the rotating body composed of the rotor shaft 5 and the rotor 6 is supported by a radial magnetic bearing 10 and an axial magnetic bearing 11 so as to be rotatable in the radial direction and the axial direction. In this state, the rotating body is rotated by a drive motor 12 with the rotor shaft 5 as an axis. Driven.
  • the drive motor 12 has a structure including a stator 12A and a rotor 12B, and is provided near the center of the rotor shaft 5.
  • the stator 12 ⁇ / b> A of the drive motor 12 is installed inside the stator column 4, and the rotor 12 ⁇ / b> B of the drive motor 12 is integrally mounted on the outer peripheral surface side of the rotor shaft 5.
  • Two sets of radial magnetic bearings 10 are arranged one by one above and below the drive motor 12, and one set of axial magnetic bearings 11 is arranged on the lower end side of the rotor shaft 5.
  • the two sets of radial magnetic bearings 10 and 10 each have a radial electromagnet target 10A attached to the outer peripheral surface of the rotor shaft 5, a plurality of radial electromagnets 10B and a radial direction displacement sensor 10C installed on the inner side surface of the stator column 4 facing this. have.
  • the radial electromagnet target 10A is made of a laminated steel plate in which steel plates of high permeability material are laminated, and the radial electromagnet 10B attracts the rotor shaft 5 with a magnetic force in the radial direction through the radial electromagnet target 10A.
  • the radial direction displacement sensor 10 ⁇ / b> C detects the radial displacement of the rotor shaft 5.
  • the rotating body composed of the rotor shaft 5 and the rotor 6 has a magnetic force at a predetermined position in the radial direction. Is supported by levitation.
  • the axial magnetic bearing 11 includes a disk-shaped armature disk 11A attached to the outer periphery of the lower end portion of the rotor shaft 5, an axial electromagnet 11B facing up and down across the armature disk 11A, and a position slightly away from the lower end surface of the rotor shaft 5. And an axial direction displacement sensor 11C.
  • the armature disk 11A is made of a material having a high magnetic permeability, and the upper and lower axial electromagnets 11B attract the armature disk 11A from the vertical direction with a magnetic force.
  • the axial direction displacement sensor 11 ⁇ / b> C detects the axial displacement of the rotor shaft 5. Then, by controlling the exciting current of the upper and lower axial electromagnets 11B based on the detection value (axial displacement of the rotor shaft) detected by the axial direction displacement sensor 11C, the rotating body composed of the rotor shaft 5 and the rotor 6 is positioned at a predetermined position in the axial direction. Is supported by levitation by magnetic force.
  • blade exhaust part Pt In the vacuum pump P of FIG. 1, substantially the upper half of the rotor 6 functions as a blade exhaust part Pt.
  • the blade exhaust part Pt will be described in detail.
  • a plurality of rotor blades 13 are integrally provided on the outer peripheral surface of the substantially upper half of the rotor 6. These rotor blades 13 are arranged radially about the rotation axis of the rotor 6 or the axis of the outer case 1 (hereinafter referred to as “pump axis”).
  • a plurality of fixed wings 14 are provided on the inner peripheral surface side of the pump case 1A, and these fixed wings 14 are arranged radially around the pump axis.
  • the rotor blades 13 and the stationary blades 14 are alternately arranged in multiple stages along the pump axis, thereby forming the blade exhaust part Pt.
  • Each of the rotor blades 13 is a blade-like cut product that is cut and formed integrally with the outer diameter processed portion of the rotor 6 and is inclined at an angle that is optimal for exhausting gas molecules. All the fixed blades 14 are also inclined at an angle optimal for exhaust of gas molecules.
  • a substantially lower half of the rotor 6 is a portion that rotates as a rotating member of the screw groove exhaust portion Ps, and is accommodated in a cylindrical screw groove exhaust portion stator 18 that is a cylindrical fixing member of the screw groove exhaust portion Ps.
  • a cylindrical screw groove exhaust portion stator 18 that is a cylindrical fixing member of the screw groove exhaust portion Ps.
  • the gap G is about 0.7 mm.
  • the thread groove exhaust portion stator 18 (cylindrical fixing member of the thread groove exhaust portion Ps) is formed with a thread groove 19 which changes in a tapered cone shape whose depth is reduced in the downward direction at the inner peripheral portion thereof, and its lower end.
  • the part is supported by the pump base 1B.
  • a screw groove 19 is formed on the inner peripheral surface of the thread groove exhaust portion stator 18 so that the screw groove 19 and a substantially lower half outer peripheral surface of the rotor 6 opposed thereto spiral.
  • a thread groove exhaust passage S is formed.
  • the screw groove exhaust portion stator 18 of the main screw groove exhaust portion Ps is divided into two divided pieces 18A and 18B in the direction of the rotation axis of the rotor 6 (rotating member of the screw groove exhaust portion Ps).
  • the divided pieces 18A and 18B are integrally connected by fastening means such as bolts or joining means such as shrink fitting. Due to the division of the screw groove exhaust portion stator 18, the screw groove 19 formed on the inner peripheral surface thereof is also divided in the same direction, and the divided screw groove 19 is provided in each of the divided pieces 18A and 18B.
  • the thread groove exhaust part stator 18 is not limited to 2 division of this example, It can divide
  • the two divided pieces 18A and 18B constituting the thread groove exhaust part stator 18 are respectively formed of different materials (see FIG. 4).
  • the upper divided piece 18A that is close to the center of gravity of the rotor 6 and is easily affected when the rotor 6 breaks is made of a high-strength material, specifically forging or extrusion / drawing.
  • the lower divided piece 18B which is less susceptible to such influence, is made as an inexpensive cast article, thereby reducing the cost while maintaining the strength of the vacuum pump. planned.
  • the screw groove 19 is formed on the inner peripheral surface of the above-described screw groove exhaust portion stator 18, while the substantially lower half outer peripheral surface of the rotor 6 facing the screw groove 19 is formed on a smooth cylindrical surface.
  • a spiral thread groove exhaust passage S is formed between the thread groove exhaust portion stator 18 (cylindrical fixing member) and the rotor 6 (rotating member).
  • five thread grooves 19 are provided as shown in FIG. 3, but the number of the thread grooves 19 can be appropriately changed as necessary.
  • the thread groove exhaust passage S is spirally provided from the upper end to the lower end of the thread groove exhaust portion stator 18.
  • the upstream inlet 19A of the thread groove exhaust passage S communicates with a minute gap between the lowermost rotary blade 13 and the fixed blade 14, and the downstream outlet 19B side of the thread groove exhaust passage S is connected to the gas exhaust port 3. It is configured to communicate with the side.
  • the gas groove is transported while being compressed by a drag effect on the outer peripheral surface of the thread groove 19 and the rotor 6. It is set so as to be deepest on the side and shallowest on the downstream outlet 19B side.
  • the thread groove exhaust part Ps in FIG. 5 divides the thread groove exhaust part stator 18 (cylindrical fixing member of the thread groove exhaust part Ps) into two divided pieces 18A and 18B as in the embodiment of FIG. A thread groove 19 is provided in each of the divided pieces 18A and 18B.
  • the upper divided piece 18A and the lower divided piece 18B employ different configurations such that the lead angle ⁇ of the screw groove 19 is 30 degrees and 15 degrees. Note that the lead angle ⁇ of the screw groove 19 is not limited to the above example, and can be changed as needed.
  • the thread groove exhaust part Ps in FIG. 6 divides the thread groove exhaust part stator 18 (cylindrical fixing member of the thread groove exhaust part Ps) into two divided pieces 18A and 18B as in the embodiment of FIG. A screw groove 19 is provided in each of the divided pieces 18A and 18B, and the upper divided piece 18A and the lower divided piece 18B are configured such that the number of the thread grooves 19 is different.
  • the thread groove exhaust part Ps in FIG. 7 divides the thread groove exhaust part stator 18 (cylindrical fixing member of the thread groove exhaust part Ps) into two divided pieces 18A and 18B as in the embodiment of FIG.
  • the screw pieces 19 are provided in the divided pieces 18A and 18B, and the upper divided piece 18A and the lower divided piece 18B adopt different configurations such that the width of the screw groove 19 is L1 and L2.
  • the thread groove exhaust part Ps in FIG. 8 divides the thread groove exhaust part stator 18 (cylindrical fixing member of the thread groove exhaust part Ps) into two divided pieces 18A and 18B as in the embodiment of FIG. Screw grooves 190 and 191 are provided in the divided pieces 18A and 18B, and the amount of change in the depth of the screw groove 19 is different between the upper divided piece 18A and the lower divided piece 18B.
  • the upper divided piece 18 ⁇ / b> A changes so that the screw groove 190 becomes shallow with the same gradient
  • change amount 0
  • the thread groove exhaust part Ps in FIG. 9 divides the thread groove exhaust part stator 18 (cylindrical fixing member of the thread groove exhaust part Ps) into two divided pieces 18A and 18B as in the embodiment of FIG. A screw groove 19 is provided in each of the divided pieces 18A and 18B.
  • the gap between 18 (cylindrical fixing member of the thread groove exhaust part Ps) and the rotor 6 (rotary member of the thread groove exhaust part Ps) is different, such as G1 and G2.
  • the gap is set to G1 ⁇ G2.
  • the gap G1 is about 0.7 mm
  • the gap G2 is about 1 mm.
  • the thread groove exhaust part Ps in FIG. 10 is provided with a groove 20 formed in the direction of the rotational axis on the upper surface of the thread groove exhaust part stator 18 (a cylindrical fixing member of the thread groove exhaust part Ps).
  • a groove 20 formed in the direction of the rotational axis on the upper surface of the thread groove exhaust part stator 18 (a cylindrical fixing member of the thread groove exhaust part Ps).
  • each of these screw groove alignment means 21 is means for arranging the screw groove 19 of the upper divided piece 18A and the screw groove 19 of the lower divided piece 18B so as to be continuous, and has a specific configuration thereof. Is as follows.
  • the thread groove alignment means 21 in FIG. 11 is formed in the engaging pin 21A formed of a taper pin standing on the dividing surface of the lower dividing piece 18B and the dividing surface of the upper dividing piece 18A joined to the dividing surface.
  • the engagement pin 21A is inserted and fitted into the engagement hole 21B so that the screw grooves 19 of the two split pieces 18A and 18B are aligned.
  • the edge of the engagement hole 21B is chamfered so that the engagement pin 21A can be easily inserted into the engagement hole 21B.
  • the engaging pin 21A is erected on the divided surface of the upper divided piece 18A, and the engaging hole 21B is drilled in the lower divided piece 18B joined to the divided surface.
  • a configuration to be provided can also be adopted.
  • a plurality of sets of the engagement pin 21A and the engagement hole 21B as described above may be provided. When two sets of them are provided, the radial positions of the upper and lower divided pieces 18A and 18B are also determined, so that the fitting D described above can be omitted.
  • the form of the engagement hole 21B may be a closed hole as shown in FIG. 11 described above, but may be a through-hole penetrating the upper and lower end surfaces of the upper divided piece 18A as shown in FIG. In this case, the engagement pin 21A is inserted and fitted into the lower end of the through hole, while the upper end of the through hole functions as a confirmation window 21C for confirming the position of the engagement pin 21A.
  • the through hole as shown in FIG. 12 is employed as an example of the engagement hole 21B
  • the upper divided piece 18A and the lower division are formed by inserting and fitting the engagement pin 21A into the engagement hole 21B.
  • the operator can confirm the position of the engagement pin 21A from the confirmation window 21C, so that the alignment operation becomes easy.
  • the screw groove alignment means 21 in FIG. 13 includes a first step portion 21D formed on the divided surface of the upper divided piece 18A and a first divided portion formed on the divided surface of the lower divided piece 18B joined to the divided surface.
  • the two stepped portions 21E and the two stepped portions 21D, 21E are at least in two places and are engaged with each other so that the screw grooves 19 of the divided pieces 18A, 18B are aligned. It is a thing. Although illustration is omitted, the step portions 21D and 21E may be inclined.
  • the thread groove alignment means 21 in FIG. 14 includes an engagement convex portion 21F formed on the divided surface of the upper divided piece 18A and an engagement formed on the divided surface of the lower divided piece 18B joined to the divided surface.
  • the recesses 21G and the engagement protrusions 21F and the engagement recesses 21G are at least at one place and mesh with each other to engage with each other, thereby aligning the screw grooves 19 of the divided pieces 18A and 18B. It is what was done.
  • the handle 22 has a form (eyebolt shape) in which a ring-shaped gripping portion 22B is provided on the head of the bolt 22A.
  • a screw hole (not shown) is formed on the upper surface of the upper divided piece 18A, and the handle 22 is removably attached to the upper divided piece 18A by screwing the bolt 22A of the handle 22 into the screw hole. It is done. After the installation work as described above is completed, the main handle 22 is removed from the upper divided piece 18A and reused in the next installation work.
  • means for attaching the handle 22 to the upper divided piece 18A means other than the bolt 22A may be adopted.
  • Each of the screw groove exhaust portions Ps described above has a screw groove exhaust portion stator 18 (a cylindrical fixing member of the screw groove exhaust portion Ps) divided into two divided pieces 18A and 18B.
  • 18B is supported by the pump base 1B (see FIG. 1 and the like).
  • the lower divided piece 18B can be provided integrally with the pump base 1B as shown in FIG. 16 by processing the pump base 1B.
  • illustration is abbreviate
  • the number of parts can be reduced. Further, since the pump base 1B and the lower divided piece 18B do not have a joint surface that hinders heat transfer, the entire thread groove exhaust portion stator 18 is efficiently cooled by a water cooling pipe (not shown) built in the pump base 1B. It becomes possible.
  • the screw groove exhaust portion Ps described above may be configured so that the upper divided piece 18A is easily bent and deformed by the breaking torque by cutting out the outer peripheral portion of the upper divided piece 18A as shown in FIG. it can.
  • the product may enter the gap 30 formed between the divided piece 18A and the member located outside thereof (pump base 1B in the example of FIG. 17), and the gap 30 may be buried. Then, when the gap 30 is filled, the divided piece 18A is not easily deformed. The gap 30 is generated by cutting out the outer peripheral portion of the divided piece 18A.
  • the upper outer peripheral portion of the upper divided piece 18 ⁇ / b> A as a product mixing preventing means for preventing the product from entering the gap 30.
  • a lid 40 is provided. Although illustration is omitted, when the thread groove exhaust portion stator 18 is divided into three or more divided pieces, at least the outer peripheral portion of the divided piece located at the uppermost part is cut out and bent and deformed.
  • the lid 40 is provided on the outer periphery of the upper end of the split piece located at the uppermost part while being configured to be easy.
  • the lid portion 40 is preferably configured to have a low strength by reducing its thickness as much as possible.
  • the specific configuration of the lid 40 is different from the upper divided piece 18A, for example, as shown in FIG. 17, in which a thin plate is attached and fixed to the upper end surface of the upper divided piece 18A with a fixing member 40A such as a screw. It may be a part. Further, as described above, when the outer peripheral portion of the upper divided piece 18A is cut out, a portion that should become the lid portion 40 is left as shown in FIG. 18, so that the lid portion 40 is separated from the upper divided piece 18A. You may comprise as an integral component.
  • FIG. 17 shows an example in which the lid 40 is employed in a structure in which the lower divided piece 18B is integrated with the pump base 1B. However, the lower divided piece 18B is integrated with the pump base 1B. It is possible to adopt even a structural example that is not (see FIG. 1 etc.).
  • the upper split piece 18A is easily bent and deformed by the gap 30 as described above, and at the same time, is easily broken by a relatively weak force. If it breaks easily with a weak force, the effect of bending deformation of the upper divided piece 18A cannot be sufficiently exhibited. For this reason, in the thread groove exhaust portion Ps of FIG. 18, a high-strength member such as CFRP is attached as a reinforcing member 50 to the outer peripheral portion of the upper divided piece 18 ⁇ / b> A, specifically, the portion where the gap 30 is formed.
  • FIG. 18 shows an example in which the reinforcing member 50 is adopted in the structural example in which the lower divided piece 18B is integrated with the pump base 1B. However, the lower divided piece 18B is integrated with the pump base 1B. An unstructured structure (see FIG. 1 etc.) can also be adopted.
  • the divided pieces 18A and 18B may be formed of different materials as shown in FIG. Further, a screw groove having a more complicated shape can be adopted by appropriately combining the screw grooves 19, 190 and 191 having complicated shapes as shown in FIGS.
  • the thread groove exhaust portion stator 18 fixing member for the thread groove exhaust portion Ps
  • the thread groove exhaust portion stator 18 is provided with the rotor 6 (rotation of the thread groove exhaust portion Ps). Since the structure in which the member is divided into two or more divided pieces 18A and 18B in the direction of the rotation axis is employed, the following effects (1) or (2) can be obtained.
  • Each divided piece is formed of a different material according to the required strength.
  • a divided piece of a part requiring particularly high strength is cut out from a material made by forging or extrusion / drawing.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne un organe cylindrique fixe d'un module d'évacuation à gorges de filetage d'une pompe à vide permettant une réduction du coût de la pompe sans incidence sur sa résistance au couple de rupture, et la réalisation aisée de gorges de filetage présentant des formes complexes dont la largeur, la profondeur, l'angle d'attaque et autres caractéristiques similaires varient dans la direction de l'axe de rotation d'un organe rotatif du module d'évacuation à gorges de filetage. Ces gorges de filetage permettent d'améliorer les caractéristiques d'évacuation et de compression de la pompe à vide. Un organe cylindrique fixe (stator (18)) d'un module d'évacuation à gorges de filetage (Ps), placé de manière à envelopper la circonférence extérieure d'un organe rotatif (essentiellement la moitié inférieure d'un rotor (6)) du module d'évacuation à gorges de filetage (Ps), forme un trajet d'évacuation à gorges de filetage hélicoïdal (S) permettant l'évacuation des gaz entre l'organe rotatif et l'organe cylindrique fixe. Cet organe cylindrique fixe comprend au moins deux pièces séparables (18A, 18B) susceptibles d'être dissociées dans la direction de l'axe de rotation de l'organe rotatif, les pièces séparables étant jointes par un moyen de fixation notamment des boulons, ou par un moyen de jonction, notamment un emmanchement à chaud.
PCT/JP2010/068313 2009-12-11 2010-10-19 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant WO2011070856A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201080053910.6A CN102667169B (zh) 2009-12-11 2010-10-19 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵
JP2011545140A JP5758303B2 (ja) 2009-12-11 2010-10-19 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ
KR1020127003659A KR101773632B1 (ko) 2009-12-11 2010-10-19 나사 홈 배기부의 통형 고정 부재와 이것을 사용한 진공 펌프

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-281985 2009-12-11
JP2009281985 2009-12-11

Publications (1)

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WO2011070856A1 true WO2011070856A1 (fr) 2011-06-16

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PCT/JP2010/068313 WO2011070856A1 (fr) 2009-12-11 2010-10-19 Organe cylindrique fixe de module d'évacuation à gorges de filetage et pompe à vide l'utilisant

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JP (1) JP5758303B2 (fr)
KR (1) KR101773632B1 (fr)
CN (1) CN102667169B (fr)
WO (1) WO2011070856A1 (fr)

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WO2012077411A1 (fr) * 2010-12-10 2012-06-14 エドワーズ株式会社 Pompe à vide
WO2012172851A1 (fr) * 2011-06-17 2012-12-20 エドワーズ株式会社 Pompe à vide et son rotor
EP2594803A1 (fr) * 2011-11-16 2013-05-22 Pfeiffer Vacuum Gmbh Pompe à vide à friction
EP2796726A1 (fr) * 2013-04-22 2014-10-29 Pfeiffer Vacuum Gmbh Élément de stator pour un étage de pompe Holweck, pompe à vide dotée d'un étage de pompe Holweck et procédé de fabrication d'un élément de stator pour un étage de pompe de Holweck
JP2016217248A (ja) * 2015-05-20 2016-12-22 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3018354A4 (fr) * 2013-07-05 2017-03-15 Edwards Japan Limited Pompe à vide
JP2018178733A (ja) * 2017-04-03 2018-11-15 株式会社島津製作所 真空ポンプ
EP3657021A1 (fr) * 2018-11-21 2020-05-27 Pfeiffer Vacuum Gmbh Pompe à vide
EP3670924A1 (fr) * 2019-11-19 2020-06-24 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de fabrication d'une telle pompe à vide
US10704555B2 (en) 2012-09-06 2020-07-07 Edwards Japan Limited Stator-side member and vacuum pump
WO2020230799A1 (fr) * 2019-05-15 2020-11-19 エドワーズ株式会社 Pompe à vide, et composant fixe d'ensemble pompe à rainures hélicoïdales associé
EP4194700A1 (fr) * 2023-04-18 2023-06-14 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable
EP4273405A1 (fr) * 2023-09-20 2023-11-08 Pfeiffer Vacuum Technology AG Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

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WO2015045748A1 (fr) * 2013-09-30 2015-04-02 エドワーズ株式会社 Mécanisme de pompe cannelé fileté, pompe à vide utilisant ledit mécanisme de pompe cannelé fileté, et rotor, stator circonférentiel extérieur et stator circonférentiel intérieur utilisés dans ledit mécanisme de pompe à vis filetée
JP6331491B2 (ja) * 2013-12-27 2018-05-30 株式会社島津製作所 真空ポンプ
JP2016166594A (ja) * 2015-03-10 2016-09-15 株式会社島津製作所 真空ポンプ
JP6390479B2 (ja) * 2015-03-18 2018-09-19 株式会社島津製作所 ターボ分子ポンプ
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
CN105909538B (zh) * 2016-06-28 2018-06-26 东北大学 一种采用分段式结构牵引级的复合分子泵
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵

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JPH0673395U (ja) * 1993-03-19 1994-10-18 セイコー精機株式会社 排気ポンプ
JPH08511071A (ja) * 1993-05-03 1996-11-19 ライボルト アクチエンゲゼルシヤフト 異なる構成のポンプ区分を備えた摩擦真空ポンプ
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Cited By (29)

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Publication number Priority date Publication date Assignee Title
US9453510B2 (en) 2010-12-10 2016-09-27 Edwards Japan Limited Vacuum pump
WO2012077411A1 (fr) * 2010-12-10 2012-06-14 エドワーズ株式会社 Pompe à vide
EP2650544A4 (fr) * 2010-12-10 2018-04-11 Edwards Japan Limited Pompe à vide
JPWO2012172851A1 (ja) * 2011-06-17 2015-02-23 エドワーズ株式会社 真空ポンプとそのロータ
EP2722527A1 (fr) * 2011-06-17 2014-04-23 Edwards Japan Limited Pompe à vide et son rotor
US10190597B2 (en) 2011-06-17 2019-01-29 Edwards Japan Limited Vacuum pump and rotor thereof
WO2012172851A1 (fr) * 2011-06-17 2012-12-20 エドワーズ株式会社 Pompe à vide et son rotor
EP2722527A4 (fr) * 2011-06-17 2014-12-17 Edwards Japan Ltd Pompe à vide et son rotor
EP2594803A1 (fr) * 2011-11-16 2013-05-22 Pfeiffer Vacuum Gmbh Pompe à vide à friction
JP2013104430A (ja) * 2011-11-16 2013-05-30 Pfeiffer Vacuum Gmbh 摩擦真空ポンプ
US10704555B2 (en) 2012-09-06 2020-07-07 Edwards Japan Limited Stator-side member and vacuum pump
EP2894347B1 (fr) * 2012-09-06 2022-03-09 Edwards Japan Limited Élément statorique et pompe à vide
US9784284B2 (en) 2013-04-22 2017-10-10 Pfeiffer Vaccum Gmbh Stator element for a holweck pump stage, vacuum pump having a holweck pump stage and method of manufacturing a stator element for a holweck pump stage
JP2014214745A (ja) * 2013-04-22 2014-11-17 プファイファー・ヴァキューム・ゲーエムベーハー ホルベックポンプ段用のステータ要素、ホルベックポンプ段を有する真空ポンプ、及び、ホルベックポンプ段用のステータ要素を製造するための方法
EP2796726A1 (fr) * 2013-04-22 2014-10-29 Pfeiffer Vacuum Gmbh Élément de stator pour un étage de pompe Holweck, pompe à vide dotée d'un étage de pompe Holweck et procédé de fabrication d'un élément de stator pour un étage de pompe de Holweck
EP3018354A4 (fr) * 2013-07-05 2017-03-15 Edwards Japan Limited Pompe à vide
US10260509B2 (en) 2013-07-05 2019-04-16 Edwards Japan Limited Vacuum pump
JP2016217248A (ja) * 2015-05-20 2016-12-22 株式会社島津製作所 真空ポンプおよび質量分析装置
JP2018178733A (ja) * 2017-04-03 2018-11-15 株式会社島津製作所 真空ポンプ
JP7098882B2 (ja) 2017-04-03 2022-07-12 株式会社島津製作所 真空ポンプ
JP2020094582A (ja) * 2018-11-21 2020-06-18 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
EP3657021A1 (fr) * 2018-11-21 2020-05-27 Pfeiffer Vacuum Gmbh Pompe à vide
WO2020230799A1 (fr) * 2019-05-15 2020-11-19 エドワーズ株式会社 Pompe à vide, et composant fixe d'ensemble pompe à rainures hélicoïdales associé
JP2020186687A (ja) * 2019-05-15 2020-11-19 エドワーズ株式会社 真空ポンプとそのネジ溝ポンプ部の固定部品
EP3670924A1 (fr) * 2019-11-19 2020-06-24 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de fabrication d'une telle pompe à vide
JP2021080917A (ja) * 2019-11-19 2021-05-27 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ及びそのような真空ポンプを製造する方法
JP7032500B2 (ja) 2019-11-19 2022-03-08 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ及びそのような真空ポンプを製造する方法
EP4194700A1 (fr) * 2023-04-18 2023-06-14 Pfeiffer Vacuum Technology AG Pompe à vide avec étage de pompe de holweck à géométrie de holweck variable
EP4273405A1 (fr) * 2023-09-20 2023-11-08 Pfeiffer Vacuum Technology AG Pompe à vide avec un étage de pompage de type holweck avec une géométrie holweck variable

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Publication number Publication date
CN102667169B (zh) 2016-03-02
JPWO2011070856A1 (ja) 2013-04-22
KR20120115204A (ko) 2012-10-17
KR101773632B1 (ko) 2017-08-31
CN102667169A (zh) 2012-09-12
JP5758303B2 (ja) 2015-08-05

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