WO2010029932A1 - Appareil d’examen visuel - Google Patents

Appareil d’examen visuel Download PDF

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Publication number
WO2010029932A1
WO2010029932A1 PCT/JP2009/065711 JP2009065711W WO2010029932A1 WO 2010029932 A1 WO2010029932 A1 WO 2010029932A1 JP 2009065711 W JP2009065711 W JP 2009065711W WO 2010029932 A1 WO2010029932 A1 WO 2010029932A1
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Prior art keywords
rgb
luminance
inspection
pixel
coordinate system
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PCT/JP2009/065711
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English (en)
Japanese (ja)
Inventor
昌年 笹井
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株式会社メガトレード
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Application filed by 株式会社メガトレード filed Critical 株式会社メガトレード
Priority to JP2010528728A priority Critical patent/JP5084911B2/ja
Priority to CN200980134031.3A priority patent/CN102138068B/zh
Publication of WO2010029932A1 publication Critical patent/WO2010029932A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/463—Colour matching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0096—Radiation pyrometry, e.g. infrared or optical thermometry for measuring wires, electrical contacts or electronic systems
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Definitions

  • the present invention relates to an appearance inspection apparatus that acquires a color image from an inspection object and inspects the quality of the inspection object and an inspection method thereof, and more specifically, RGB luminance data of a color image is appropriately obtained.
  • the present invention relates to an appearance inspection apparatus which can be inspected with high accuracy by setting a value.
  • the formation state of printed circuit boards, semiconductor wafers, liquid crystal substrates, etc. is inspected by an appearance inspection apparatus.
  • an image of the surface is acquired by a camera, and the quality of the inspection object is inspected from the acquired image.
  • a color image is acquired from an inspection object, and inspection is performed based on RGB information of the color image (Patent Documents 1 to 3, etc.). .
  • Patent Document 4 JP 2007-101415 A JP 2006-78301 A JP 2006-78300 A JP 2007-309703 A
  • the threshold luminance width is set to a large value such as 20 ⁇ R ( ⁇ x) ⁇ 40, 120 ⁇ G ( ⁇ y) ⁇ 200, 60 ⁇ B ( ⁇ z) ⁇ 150. (See FIG. 9).
  • the threshold luminance width is set to be large in this way, there is a possibility that a portion that should be determined as defective cannot be determined as defective.
  • a portion that should be determined as defective cannot be determined as defective.
  • the luminance width of the reference luminance data is increased, the rectangular parallelepiped area in FIG. 9 is increased, and the luminance value of the exposed portion is included in the luminance width of the reference luminance data and can be determined as defective. Disappear.
  • the threshold value is narrowed so that the exposed portion can be determined as defective, a non-defective product is determined as a defective product, and the subsequent visual inspection takes time.
  • An object of the present invention is to provide an appearance inspection apparatus which can be set to an optimum value and improve the quality of inspection.
  • the present invention obtains a color image from an inspection object in an appearance inspection apparatus that inspects the formation state of the inspection object on the basis of an image acquired from the inspection object.
  • RGB information acquisition means for acquiring RGB luminance data in the inspection portion of the object
  • reference data storage means for storing RGB reference luminance data of each inspection portion in the RGB polar coordinate system with the axial direction as the luminance value
  • the RGB information acquisition Conversion means for converting the RGB luminance data of each inspection part acquired from the means into luminance data of the polar coordinate system, and the RGB reference in the RGB polar coordinate system stored in the reference data storage means and the converted luminance data of the polar coordinate system Compared with the luminance data, depending on whether or not the RGB reference luminance data includes the RGB luminance data of the inspection object. It is obtained so as to provide a judging means for judging quality of ⁇ zone.
  • the overall luminance is maintained while maintaining the RGB luminance ratio (color shade). Only a large value can be set, so that variations in luminance can be absorbed and inspection can be performed with high accuracy.
  • a conversion table for converting the luminance data of the RGB orthogonal coordinate system acquired from the inspection object into the RGB polar coordinate system is stored, and each of the acquired inspection regions is obtained with reference to the conversion table. Convert RGB coordinates.
  • RGB luminance data of a predetermined number of pixels adjacent to the reference inspection object is included.
  • RGB luminance is converted into polar coordinate luminance
  • the luminance value is compressed or expanded so as to fit in one byte.
  • the luminance value of RGB falls within the range of 1 byte of “0 to 255”, but when this is converted into the polar coordinate system, the angle ( ⁇ , ⁇ ) from the axial direction is from 0.
  • the distance (L) from the origin falls within the range of 0 to 255 ⁇ 3 (1/2) and exceeds 1 byte. Therefore, the angle from the axial direction is (255 ⁇ 4 / ⁇ ) times, and the distance from the origin is reduced to 1/3 (1/2) times. In this way, data can be compressed within a range of 1 byte.
  • a color image is acquired from the inspection object, and the RGB luminance in the inspection portion of the inspection object RGB information acquisition means for acquiring data, reference data storage means for storing RGB reference luminance data of each inspection part in an RGB polar coordinate system with the axial direction as a luminance value, and each inspection part acquired from the RGB information acquisition means Converting the RGB luminance data of the RGB coordinate data into luminance data of the polar coordinate system, comparing the converted luminance data of the polar coordinate system with the RGB reference luminance data in the RGB polar coordinate system stored in the reference data storage unit, The quality of the inspection area is determined based on whether or not the RGB reference luminance data includes the RGB luminance data of the inspection object. Since the RGB luminance values in the acquired inspection area vary greatly from product to product, only the overall luminance is increased while maintaining the RGB luminance ratio (color shade). Therefore, it is possible to absorb the variation in luminance and to inspect with high accuracy.
  • FIG. 1 shows an outline of the appearance inspection process in the present embodiment
  • FIG. 2 shows a functional block diagram of the appearance inspection apparatus 1.
  • FIG. 3 shows RGB luminance reference data used in the appearance inspection apparatus 1.
  • the appearance inspection apparatus 1 in this embodiment can inspect a printed circuit board, a semiconductor wafer, other cracks generated in an article, a state printed on the surface of the article, and the like.
  • an example is given. The case where the formation state of the printed circuit board is inspected will be described.
  • the appearance inspection apparatus 1 is acquired by the imaging means 2 that acquires a surface image from the inspection object 11 and the imaging means 2, as in a general appearance inspection apparatus.
  • RGB information processing means for obtaining RGB information of each pixel from the obtained image
  • correction processing means 6 for aligning the image of the inspection object 11 and the image that is the reference data, and the inspection object subjected to the alignment correction in this way
  • determining means 8 for determining the quality of the pixel using the RGB luminance data of each pixel of the object 11.
  • the conversion means 7 for converting the RGB luminance data of each image acquired from the inspection object 11 into the RGB luminance data of the polar coordinate system, and the converted RGB luminance data and stored in the storage means 5 in advance. This is compared with the RGB luminance reference data of the polar coordinate system, and the quality of each pixel is judged, and the result can be outputted via the output means 9.
  • a specific configuration of the appearance inspection apparatus 1 will be described in detail.
  • the imaging means 2 acquires the surface image from the reference object 10 and the inspection object 11 necessary for the inspection, and acquires the surface image by color.
  • This imaging means 2 irradiates light from an oblique direction, and acquires the reflected light by the CCD camera or the like above it.
  • images are acquired using different angles, different colors, and brightness with respect to the reference object 10 and the inspection object 11, and the acquired images are selected and used.
  • the reference object 10 generates reference data as a reference when the inspection object 11 is inspected.
  • the reference object 10 that has been determined to be non-defective by visual inspection or other inspection devices is generally used. To do.
  • the reference data generation means 4 acquires a surface image from a reference object 10 prepared in advance, and generates reference data from the image of the reference object 10.
  • the generated reference data includes data relating to the entire shape of the reference object 10, data relating to a plurality of rectangular areas inside the reference object 10, data relating to each pixel, and the like.
  • data relating to the overall shape includes data relating to the length and width of the printed circuit board
  • data relating to the rectangular area includes data such as pattern images in the rectangular area
  • data relating to each pixel includes data relating to each pixel.
  • Data such as RGB luminance, allowable luminance width, and search distance are used.
  • the “allowable luminance width” indicates the RGB luminance width in a pixel that is determined to be good or bad.
  • a portion having a large luminance change such as a silk edge, a pad edge, or a wiring pattern edge.
  • the “search distance” indicates a distance for searching whether or not there is a pixel corresponding to the reference object 10 with a predetermined pixel position as the center. For example, a silk edge, a pad
  • the search distance is set to a large value such as 3 to 5 pixels for a portion where the luminance change is large such as the edge of the wiring pattern or the edge of the wiring pattern.
  • the allowable luminance width expressed in polar coordinates is ⁇ ⁇ , ⁇ ⁇ , ⁇ ⁇ L are set, and the search distance is set to 3 pixels or the like.
  • the allowable luminance width and the search distance are not limited to these values, and may be set manually.
  • FIG. 3 shows reference data used when determining the quality of each pixel.
  • the luminance values of RGB are set on the respective axes, and the luminance values are set to increase in the direction of the arrows.
  • the RGB hue slightly changes depending on the resist unevenness of the inspection object 11, the change of the lot, and the color composition.
  • the luminance width of the RGB luminance reference data is set to be large as described above, most pixels are included in the range of the reference data. Anything that can be seen is included in the range of the reference data and judged as “good”.
  • the RGB luminance values of the pixels adjacent to the pixel are set to be included. Then, the RGB luminance reference data set in this way is stored in the storage means 5.
  • the correction processing unit 6 performs correction processing for making the image of the inspection object 11 imaged by the imaging unit 2 substantially coincide with the image of the reference object 10.
  • An example of the correction of the entire image in this correction processing is shown in FIG. In FIG. 4, a solid line portion shaded with diagonal lines indicates the reference object 10, and a broken line indicates the inspection object 11.
  • FIG. 4A when the inspection object 11 is smaller than the reference object 10 (FIG. 4A), correction processing is performed to enlarge the entire shape by ⁇ x and ⁇ y .
  • the inspection object 11 is rotated by also [delta] theta than reference object 10 performs correction processing as rotated by that angle.
  • FIG. 5A shows an example of a rectangular area where the reference object 10 is located
  • FIG. 5B shows a rectangular area at the same position of the inspection object 11.
  • the pad or wiring pattern of the inspection object 11 may be displaced in a predetermined direction from the pad or wiring pattern of the reference object 10.
  • a parallel movement correction process is performed so that the image in the rectangular area of the inspection object 11 substantially matches the reference object 10.
  • the RGB information acquisition means 3 acquires RGB luminance data of each pixel from the image of the inspection object 11 that has been corrected in this way.
  • the converted coordinates are converted into coordinates in the RGB polar coordinate system using the conversion means 7.
  • the values (x, y, z) of the orthogonal coordinate system are previously set to the values of the polar coordinate system ( ⁇ , ⁇ , L), a conversion table to be converted is prepared, and converted to RGB luminance data of the polar coordinate system with reference to this conversion table.
  • the relationship between orthogonal coordinates and polar coordinates is as follows.
  • x is the luminance value of R in the Cartesian coordinate system
  • y is the luminance value of G in the Cartesian coordinate system
  • z is the luminance value of B in the Cartesian coordinate system
  • ⁇ is the angle made with the x axis in the polar coordinate system
  • ⁇ is the polar coordinate
  • the angle L formed with the z-axis in the system indicates the overall luminance value in the polar coordinate system.
  • the determination means 8 determines whether or not the inspection object 11 has a pixel corresponding to each pixel of the reference object 10, and the first pixel determination means 81 and the second pixel as described below.
  • a pixel determination unit 80 including a determination unit 82 and a cluster determination unit 83 are provided.
  • the first pixel determination unit 81 specifies the position of the inspection object 11 corresponding to each pixel of the reference object 10 with the reference object 10 as a reference, and within a search distance centered on this position. Then, it is determined whether or not there is a pixel within an allowable luminance width with respect to the luminance of the pixel. In this determination, if even one pixel within the allowable luminance width of the RGB luminance reference data exists within the search distance, it is determined as “good pixel”, and conversely, a pixel within the allowable luminance width within the search distance. Is not determined at all, it is determined as “defective pixel”.
  • the correction processing means 6 can completely match the reference object 10 and the inspection object 11, the pixel at the position of the inspection object 11 corresponding to the pixel position of the reference object 10 may be inspected.
  • the resolution is increased, there is a possibility that the shift is about several pixels. For this reason, if there is an almost identical luminance within the search distance, it is determined as “good pixel” as a primary determination.
  • the determination result by the first pixel determination unit 81 is visually displayed on a display device or the like. For example, in the portion determined as “defective pixel”, an “x” mark or the like is displayed on the image of the reference object 10. Indicates.
  • the second pixel determination means 82 uses the inspection object 11 as a reference, and within the search distance centered on the position of the reference object 10, the allowable luminance width for the luminance of the pixel of the inspection object 11 It is determined whether or not there is a pixel inside. Also in this determination, if there is even one pixel within the allowable luminance width within the search distance, it is determined as “good pixel”, and conversely, there is no pixel within the allowable luminance width within the search distance. Is determined as “defective pixel”. When the comparison process is performed using the inspection object 11 as a reference, an image of the inspection object 11 after the above correction process is used.
  • the position of the reference object 10 corresponding to the position (the center position of the first search distance) of the inspection object 11 after the correction processing is specified, and the allowable luminance width / search distance at the position is stored. It is read out from the means 5 and it is determined whether or not a pixel within the allowable luminance width with respect to the luminance at the position of the inspection object 11 exists on the reference object 10 within the search distance.
  • the first search distance and the second search distance match, and the first allowable luminance width and the second allowable luminance width match.
  • the correction processing means 6 can completely match the reference object 10 and the inspection object 11, the pixel at the position of the inspection object 11 corresponding to the pixel position of the reference object 10 may be inspected.
  • the resolution is increased, there is a possibility that the shift is about several pixels.
  • the second determination result is visually displayed on the display device, overwritten on the determination image by the first pixel determination unit 81, and determined as a “defective pixel”. An “x” mark or the like is shown in the part.
  • the pixel determination unit 80 determines that there is at least one pixel within the allowable luminance width within the search distance of the inspection object 11, and within the allowable luminance width within the search distance of the reference object 10. On the condition that at least one pixel exists, the pixel existing at the position of the reference object 10 is determined as a good pixel. Conversely, when there is no pixel within the allowable luminance width within the search distance of the inspection object 11, or when there are no pixels within the allowable luminance width within the search distance of the reference object 10, A pixel present at the position of the reference object 10 is determined as a defective pixel.
  • the cluster determining means 83 determines whether or not the inspection object 11 is a defective product as a whole. judge. This pass / fail determination is determined to be a defective product when there are a predetermined number or more of adjacent pixels determined to be “defective pixels”.
  • the output unit 9 outputs the determination result by the cluster determination unit 83 in a reportable manner. At this time, since it is necessary to inform the user which part is a defective cluster, the position of the cluster determined to be a defective cluster by the cluster determination means 83 is visually output to the display device.
  • FIG. 7 shows a flowchart for generating reference data when inspecting the inspection object 11.
  • each image is acquired from a plurality of reference objects 10 prepared in advance (step S1).
  • the data relating to the entire area, the data relating to the rectangular area, and the data relating to the pixels are generated for each reference object 10 (step S2).
  • an average value of data relating to the entire area, an average value of data relating to the rectangular area, an average value of RGB data relating to pixels, and a standard deviation value are calculated (step S3).
  • the upper limit value of the allowable luminance width and the upper limit value of the search distance are manually input (step S4). This input is not performed at this stage, but may be performed in advance before step S1.
  • step S3 After the calculation of the average value and the standard deviation value in step S3, for the pixels having a large standard deviation value, the upper limit value of the allowable luminance width and the upper limit value of the search distance that are input previously are set, For pixels having a small standard deviation value, the allowable luminance width and the search distance are set to be small (step S5). Then, RGB luminance reference data is generated with RGB polar coordinates for each pixel and stored in the storage means 5 (step S6).
  • step T1 when inspecting the inspection object 11, the surface image is acquired from the inspection object 11 (step T1). This captured image may be misaligned depending on the image acquisition method, and may be different from the state of the image of the reference object 10 stored in the storage unit 5. Therefore, correction processing is performed to make the image states substantially coincide (step T2).
  • step T2 the entire shape is corrected. Specifically, three corner points on the inspection object 11 are extracted, and the vertical and horizontal lengths, rotation angles, parallel movement distances, and the like of the inspection object 11 are calculated from the three points. Then, based on these vertical and horizontal lengths, rotation angles, parallel movement distances, etc., correction processing is performed so that the entire image of the inspection object 11 substantially matches the entire image of the reference data.
  • the rectangular area is corrected.
  • the image of the inspection object 11 is translated so that the image of the predetermined rectangular area of the reference object 10 and the image of the corresponding rectangular area of the inspection object 11 substantially coincide. .
  • step T3 the position, RGB luminance, allowable luminance width, and search distance for each pixel of the reference object 10 are read from the storage means 5 (step T3). Then, the position of the inspection object 11 corresponding to the read pixel is specified, and within the RGB luminance reference data (allowable luminance width) set in the RGB polar coordinate system within the search distance with the position as the center. It is determined whether or not there is a pixel (step T4).
  • the RGB luminance data of the pixel read from the inspection object 11 is converted into the polar coordinate system with reference to the conversion table, and the RGB luminance data in the polar coordinate system is converted. And compare.
  • the first pixel determining unit 81 determines that no pixel within the allowable luminance width exists within the search distance, the pixel at the position of the reference object 10 is determined as a “defective pixel”. (Step T8).
  • the position of the reference object 10 corresponding to the position of the inspection object 11 is determined based on the image of the inspection object 11 after the correction process. It is determined whether or not there is a pixel within the RGB luminance reference data (allowable luminance width) set by the RGB polar coordinates within the search distance as the center. However, since each pixel of the inspection object 11 does not store data such as an allowable luminance width and a search distance, the allowable luminance width and the search of the position of the reference object 10 corresponding to the position of the inspection object 11 are stored. Use distance.
  • an allowable luminance width and a search distance of the position of the reference object 10 corresponding to the position of the inspection object 11 are read (step T5). Then, based on the read allowable luminance width and the search distance, the tolerance for the RGB luminance data of the inspection object 11 expressed in the polar coordinate system within the search distance with the position of the corresponding reference object 10 as the center. It is determined whether or not there is a pixel within the luminance width (step T6). At this time, the determination is made by converting the RGB luminance data acquired from the inspection object 11 into the RGB luminance data of the polar coordinate system using the conversion table. If it is determined by the second pixel determining means 82 that there is no luminance pixel within the allowable luminance width within the search distance, the pixel at the position of the reference object 10 is determined as a “defective pixel”. (Step T8).
  • step T4 if it is determined as “good pixel” in step T4 and “good pixel” is determined in step T6, the pixel corresponding to the position of the reference object 10 is determined as “good pixel” (step T7). .
  • step T9 If all the pixels have been inspected (step T9; Yes), the number of adjacent defective pixels among the pixels of the reference object 10 determined as “defective pixels” by the pixel determination unit 80 is then determined.
  • the inspection object 11 When there are more than a predetermined number of defective pixels (step T10), the inspection object 11 outputs that it is a defective product (step T11), while the number of all adjacent defective pixels Is less than the predetermined number, an output indicating that the product is non-defective is output (step T12).
  • a color image is acquired from the inspection object 11.
  • RGB information acquisition means 3 for acquiring RGB luminance data in the inspection portion of the inspection object 11, storage means 5 for storing RGB reference luminance data of each inspection portion in the RGB polar coordinate system with the axial direction as the luminance value,
  • the RGB luminance data of each inspection part acquired from the RGB information acquisition unit 3 is compared with the RGB reference luminance data in the RGB polar coordinate system stored in the storage unit 5, and the inspection object 11 is included in the RGB reference luminance data. Since the determination means 8 for determining whether the inspection area is good or not is provided depending on whether or not the RGB luminance data is included. Even if the RGB luminance values in the inspection area vary greatly from product to product, only the luminance can be set large while maintaining the RGB balance, and the luminance variation can be absorbed and high quality inspection can be performed. become able to.
  • a conversion table for converting the luminance data of the RGB orthogonal coordinate system acquired from the inspection object 11 into the RGB polar coordinate system is stored, and the RGB coordinates of each acquired inspection area are converted using this conversion table. Since each pixel is inspected, it is not necessary to perform an operation for coordinate conversion, and the processing speed at the time of inspection can be increased.
  • the RGB luminance data of a predetermined number of pixels adjacent to the reference inspection object 11 is included, so that the reference data and the inspection object 11 are aligned in pixel units. It can be inspected without it, and it can be inspected with fewer false alarms.
  • the luminance value is compressed or expanded to fit within 1 byte, so the converted luminance value is stored within the 1-byte range. Can be compressed.
  • the correction processing unit 6 is used to correct the image of the inspection object 11, but the image of the reference object 10 may be corrected. Alternatively, such a correction process may not be performed when complete alignment is possible.
  • a conversion table for converting to polar coordinates is prepared in advance, and the conversion table is referred to convert from the orthogonal coordinate system to the polar coordinate system.
  • coordinate conversion is performed for each pixel. You may make it calculate.
  • the present invention can also be applied to an inspection object 11 that requires an appearance inspection other than this.
  • each pixel is inspected, but RGB luminance data may be collected and inspected for each predetermined area.
  • one RGB luminance data is calculated for each region, and the calculation result is compared with the RGB reference luminance data expressed in the polar coordinate system.
  • ⁇ and ⁇ are expanded to 255 ⁇ 2 / ⁇ times. However, since they are within the range of 1 byte, the luminance value may be used as it is.
  • the maximum value is set to 255.
  • this is a value of 2 gradation bits raised to ⁇ 1, and this value can be used depending on the gradation bits. it can.
  • summary of the inspection processing method in one embodiment of this invention Functional block diagram of an appearance inspection apparatus in the same form
  • generation flow of the reference data in the form The figure which shows the flow of the inspection process in the same form

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  • Image Processing (AREA)

Abstract

L'invention vise à améliorer la qualité d’examen dans une situation où une image en couleurs est utilisée pour examiner l’état de formation d’un objet à examiner, en établissant des valeurs optimales en tant que valeurs seuils d’examen pour des informations RGB acquises de l’image en couleurs. Un appareil (1) d’examen visuel selon l’invention, destiné à examiner un objet (11), comporte un moyen (3) d’acquisition d’informations RGB qui acquiert une image en couleurs issue de l’objet (11) pour acquérir des données d’intensité RGB de parties examinées de l’objet (11) ; un moyen (5) de stockage dans lequel sont mémorisées des données d’intensité RGB de référence des parties examinées dans un système de coordonnées polaires RGB dont les axes indiquent les valeurs respectives d’intensité ; et un moyen (8) de détermination qui compare les données d’intensité RGB des parties examinées acquises par le moyen (3) d’acquisition d’informations RGB aux données d’intensité RGB de référence du système de coordonnées polaires RGB mémorisées dans le moyen (5) de stockage afin de déterminer si les données d’intensité RGB de l’objet (11) sont incluses dans les données d’intensité RGB de référence, déterminant ainsi la qualité des zones examinées.
PCT/JP2009/065711 2008-09-09 2009-09-09 Appareil d’examen visuel WO2010029932A1 (fr)

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JP2010528728A JP5084911B2 (ja) 2008-09-09 2009-09-09 外観検査装置
CN200980134031.3A CN102138068B (zh) 2008-09-09 2009-09-09 外观检查装置

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JP2016050875A (ja) * 2014-09-01 2016-04-11 明和工業株式会社 表面状態判定プログラム及び表面状態判定装置

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JP2016050875A (ja) * 2014-09-01 2016-04-11 明和工業株式会社 表面状態判定プログラム及び表面状態判定装置

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CN102138068B (zh) 2015-02-11
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JP5084911B2 (ja) 2012-11-28
KR20110040965A (ko) 2011-04-20

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