WO2010010774A1 - 結露量の制御可能な環境試験装置およびその制御方法 - Google Patents
結露量の制御可能な環境試験装置およびその制御方法 Download PDFInfo
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- WO2010010774A1 WO2010010774A1 PCT/JP2009/061320 JP2009061320W WO2010010774A1 WO 2010010774 A1 WO2010010774 A1 WO 2010010774A1 JP 2009061320 W JP2009061320 W JP 2009061320W WO 2010010774 A1 WO2010010774 A1 WO 2010010774A1
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- temperature
- condensation
- amount
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- cooling
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
- G01N17/002—Test chambers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2881—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to environmental aspects other than temperature, e.g. humidity or vibrations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/22—Means for preventing condensation or evacuating condensate
- F24F2013/221—Means for preventing condensation or evacuating condensate to avoid the formation of condensate, e.g. dew
Definitions
- the present invention relates to an environmental test apparatus capable of controlling the amount of dew condensation on a test object.
- This environmental test apparatus is used in particular for an electrical insulation test of a test object such as an electronic component or an electronic material.
- Patent Documents 1 and 2 As an apparatus for performing the dew condensation test, for example, there are apparatuses described in Patent Documents 1 and 2.
- the mounting table In the apparatus described in Patent Document 1, the mounting table is cooled so that the temperature of the sample mounting table is constant near the dew point temperature in the test chamber, and the dew condensation state of the sample is maintained for a long time.
- the amount of condensation is determined from the image of the surface of the test object photographed by the television photographing apparatus, and a signal related to the amount of condensation is input to the cooler control unit. Then, the device under test is cooled by a cooler so that the surface of the device under test has a set amount of condensation.
- the cooling control of the DUT is performed by utilizing the cooling capacity of the cooler to the maximum.
- the amount of dew condensation on the surface of the test object is measured using a television photographing apparatus.
- the amount of condensation on the surface of the test object is controlled by utilizing the cooling capacity of the cooler to the maximum.
- the condensation amount is difficult to converge to the set condensation value. That is, it is difficult to obtain a stable dew condensation state with a small change in dew amount.
- the present invention has been made in view of the above circumstances, and an object of the present invention is to provide an environmental test apparatus capable of obtaining a stable dew condensation state in which the change in dew amount is smaller than before on the surface of a test object. That is.
- the present inventors set a certain limit on the temperature control range of the cooling heater that cools and heats the DUT. That is, the upper limit value of the temperature control range was a value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb, and the lower limit value was a value obtained by adding a deviation to the dew point temperature in the test chamber. Then, within the temperature control range, by controlling the temperature of the cooling heater based on the signal from the condensation sensor and controlling the condensation amount on the surface of the specimen, the condensation on the surface of the specimen can be compared with the conventional technology. The present inventors have found that the change in the amount can be suppressed and thereby the above-mentioned problems can be solved, and the present invention has been completed based on this finding.
- the present invention relates to a test chamber in which a DUT is placed, a wet bulb and a dry bulb that are arranged in the test chamber and detects the temperature and humidity of the air in the test chamber, and a signal from the wet bulb and the dry bulb.
- Air conditioning means for adjusting the air in the test chamber to a predetermined temperature and humidity, a cooling heater that is housed in the test chamber and the test object is disposed on the upper surface, and cools and heats the test object, Condensation sensor placed on the object to be tested, and a deviation from the wet bulb temperature detected by the wet bulb based on the signal from the condensation sensor and the dew point temperature in the test chamber And a control means for controlling the amount of dew condensation on the surface of the object to be tested by changing a temperature command value to the cooling heater between the value to which the value is added.
- control means switches the temperature command value to any one of a value obtained by adding a deviation to the wet bulb temperature, a value of the wet bulb temperature, and a value obtained by adding a deviation to the dew point temperature. It is preferable to control the amount of condensation on the surface of the test object.
- control means switches the temperature command value to any one of a value obtained by adding a deviation to the wet bulb temperature and a value obtained by adding a deviation to the dew point temperature, and the surface of the DUT It is preferable to control the amount of condensation.
- a test chamber in which a test object is placed, a wet bulb and a dry bulb that are arranged in the test chamber and detect the temperature and humidity of the air in the test chamber, and the humidity Air conditioning means that adjusts the air in the test chamber to a predetermined temperature and humidity based on signals from the sphere and dry bulb, and the test object that is housed in the test chamber and disposed on the upper surface, cools the test object
- a control method for an environmental test apparatus comprising: a cooling heater for heating; and a dew condensation amount sensor placed on the object to be tested, wherein the air conditioning means is operated to set predetermined air in the test chamber A constant temperature and humidity step for adjusting the temperature and humidity of the test object; a condensation amount measurement step for measuring the amount of condensation on the surface of the test object based on a signal from the condensation amount sensor; and the wet bulb based on the measured amount of condensation Add a deviation to the wet bulb temperature detected by A condensation amount control step of changing a temperature command value
- the cooling heater is between a value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb and a value obtained by adding a deviation to the dew point temperature in the test chamber.
- FIG. 2 is a detailed view of the dew condensation amount sensor shown in FIG. 1. It is a block diagram which shows the detail of the control part of the regulator shown in FIG. It is a block diagram of the environmental test apparatus with which the fixing jig was attached to the cooling and heating plate. It is a flowchart which shows the control method of the environmental test apparatus shown in FIG. It is a figure which shows the change of the temperature command value to a cooling heating plate. It is a figure which shows the change of the dew amount on the surface of a to-be-tested object at the time of using a prior art, and the temperature change of a cooling heating plate. It is a figure which shows the change of the dew amount on the surface of a to-be-tested object at the time of using the environmental test apparatus which concerns on one Embodiment of this invention, and the temperature change of a cooling heating plate.
- FIG. 1 is a configuration diagram of an environmental test apparatus 100 according to an embodiment of the present invention.
- the environmental test apparatus 100 includes a test chamber 1 in which a DUT W is placed, an air-conditioning chamber 2 that is partitioned from the test chamber 1, and a regulator 4 (control means). ing.
- the test chamber 1 and the air conditioning chamber 2 have a structure that is partitioned except for the communication portion 5 and the blower 34 that circulate the air between the test chamber 1 and the air conditioning chamber 2.
- a dry bulb 10 and a wet bulb 11 which are temperature and humidity sensors are arranged.
- the air conditioning chamber 2 accommodates a temperature / humidity generator 3 (air conditioning means) for adjusting the air in the test chamber 1 to a predetermined temperature / humidity based on signals from the wet bulb 11 and the dry bulb 10.
- a temperature / humidity generator 3 air conditioning means for adjusting the air in the test chamber 1 to a predetermined temperature / humidity based on signals from the wet bulb 11 and the dry bulb 10.
- the temperature / humidity generator 3 includes a humidifier 31 that gives moisture to the air supplied into the test chamber 1, a cooler 32 that cools the air supplied into the test chamber 1, and air supplied into the test chamber 1. It consists of a heater 33 that heats and a blower 34 that circulates air between both the test chamber 1 and the air conditioning chamber 2.
- the upper space of the test chamber 1 and the air conditioning chamber 2 are communicated by a blower 34, and the lower space of the test chamber 1 and the air conditioning chamber 2 are communicated by a communication portion 5.
- the temperature / humidity generator 3 supplies the air whose temperature and humidity are adjusted by the humidifier 31, the cooler 32, and the heater 33 into the test chamber 1 by the blower 34, and the air in the test chamber 1 is supplied to the predetermined temperature and humidity. For example, the temperature is adjusted to 25 ° C. and 50% RH (Relative Humidity).
- the temperature / humidity generator 3 is not accommodated in the air conditioning chamber 2 formed by dividing one housing into the test chamber 1 and the air conditioning chamber 2 as in the present embodiment, but the air conditioning chamber 2 is used as the test chamber. 1 may be provided as a completely separate body, and air conditioning means may be disposed there.
- a cooling heating plate 6 (cooling heater) for cooling and heating the DUT W is accommodated in the test chamber 1.
- the cooling and heating plate 6 is a surface contact type cooling heater having a cooling heating surface that directly cools and heats the DUT W by heat conduction (in addition, the DUT W is in direct contact as in this embodiment). It is also possible to cool and heat the object to be tested W by heat conduction by making indirect contact through the heat transfer sheet 12 without doing so).
- the cooling and heating plate 6 includes a refrigerant cooling type using a refrigerant such as cold water and an electronic cooling type combining a thermoelectric element using a Peltier effect and a cooling fan.
- the cooling / heating plate 6 also serves as a mounting table for the test object W, and the test object W is mounted on the upper surface of the cooling / heating plate 6 via the heat transfer sheet 12.
- a first temperature sensor 7 for measuring the temperature of the cooling and heating plate 6 is built in the cooling and heating plate 6.
- the heat transfer sheet 12 is sandwiched between the cooling and heating surface of the cooling and heating plate 6 and the test object W, and the test object W is heated and cooled via the heat transfer sheet 12.
- the adhesion between the cooling heating surface and the DUT W is increased, and the thermal conductivity to the DUT W is improved.
- a dew amount sensor 9 is placed on the upper surface of the DUT so as to be in close contact with the DUT through the heat transfer sheet 12.
- the heat transfer sheet 12 is a sheet having excellent thermal conductivity and adhesion, and examples of the heat transfer sheet 12 include a silicone rubber sheet and an acrylic rubber sheet.
- silicone gel GR-b (trade name: Sarcon, manufacturing company: Fuji Polymer Industries Co., Ltd.) was used as the heat transfer sheet 12.
- FIG. 2 is a detailed view of the dew condensation amount sensor 9 shown in FIG.
- the dew condensation amount sensor 9 includes a dew condensation detection unit 92 and a second temperature sensor 91 disposed on the silicon wafer, an F / V conversion unit 93 connected to the dew condensation detection unit 92, AMP 94 connected to the two temperature sensor 91.
- the dew condensation detection unit 92 takes the form of a comb-shaped electrode, and detects the dew condensation amount on the dew condensation detection unit 92 based on a change in oscillation frequency according to a change in capacitance value between the electrodes.
- the electrode width L1 and the interval L2 are both 30 ⁇ m, and the dew condensation detection unit 92 is a fine wiring.
- the F / V converter 93 converts the frequency into a voltage, and a signal corresponding to the amount of condensation is output as a voltage signal of 0 to 1 V, for example.
- the second temperature sensor 91 detects the temperature of the sensor portion of the dew condensation amount sensor 9, and a diode, a thermistor, or the like is used.
- a non-contact type temperature sensor such as an infrared type may be used instead of a diode or a thermistor.
- the AMP 94 is an amplifier that amplifies the signal from the second temperature sensor 91.
- the second temperature sensor 91 can be used for measuring the temperature of the DUT W.
- a signal from the second temperature sensor 91 is preferably incorporated into the control.
- the condensation amount sensor 9 performs heat transfer. It turns out that it has remove
- the signal from the second temperature sensor 91 hunts, it can be seen that the dew condensation amount sensor 9 is about to come off the heat transfer sheet 12 (or the DUT W).
- the abnormality of the first temperature sensor 7 can be determined.
- the temperature command value for the cooling and heating plate 6 does not match the temperature value obtained by the first temperature sensor 7, the temperature command value for the cooling and heating plate 6 and the temperature obtained by the second temperature sensor 91 are substantially the same. Then, it can be determined that an abnormality has occurred in the first temperature sensor 7.
- the environmental test apparatus 100 includes a regulator 4 (control means) that controls the temperature and humidity of the air in the test chamber 1 and the temperature of the cooling and heating plate 6.
- the adjuster 4 includes an input unit 41, a control unit 42, a storage unit 43, and an output unit 44.
- the adjuster 4 is electrically connected to the dry bulb 10 and wet bulb 11, the dew amount sensor 9, the temperature / humidity generator 3, the cooling / heating plate 6, and the first temperature sensor 7.
- the adjuster 4 takes in the signals from the dry bulb 10 and the wet bulb 11 into the input unit 41, and based on the taken-in signal, outputs from the output unit 44 so that the air in the test chamber 1 becomes the set temperature and humidity.
- a temperature / humidity generator 3 is controlled by issuing a command.
- the regulator 4 takes in signals from the first temperature sensor 7 incorporated in the dry bulb 10 / wet bulb 11, the dew condensation amount sensor 9, and the cooling / heating plate 6 into the input unit 41, and also receives the taken-in signal.
- the cooling heating plate 6 is controlled by issuing a command from the output unit 44 so that the amount of condensation on the surface of the test object W becomes the set amount of condensation.
- the controller 4 is electrically connected to a setting / display device 13.
- the setting / display unit 13 sets the temperature / humidity of the air in the test chamber 1 and the condensation amount on the surface of the test object W, the set value and measurement value of the temperature / humidity of the air in the test chamber 1, and the test object W. It displays the set value and measured value of the amount of condensation on the surface.
- FIG. 3 is a block diagram showing details of the control unit 42 of the regulator 4 shown in FIG. The arrows in FIG. 3 indicate the signal flow.
- the control unit 42 includes a temperature / humidity adjustment unit 401, a dew condensation amount adjustment unit 402, and a cooling heater adjustment unit 403.
- the temperature / humidity adjustment unit 401 is an adjustment unit that determines a command value to the temperature / humidity generator 3 based on signals from the dry bulb 10 and the wet bulb 11. A command value is output from the temperature / humidity adjustment unit 401 to the humidity generator 3 via the storage unit 43 and the output unit 44.
- the dew condensation amount adjustment unit 402 is an adjustment unit that determines a temperature command value for the cooling and heating plate 6 based on signals from the dry bulb 10, the wet bulb 11, and the dew condensation amount sensor 9.
- the cooling heater adjustment unit 403 compares the signal from the first temperature sensor 7 (actual temperature of the cooling / heating plate 6) with the temperature command value from the condensation amount adjustment unit 402, and then the condensation amount adjustment unit 402 This is an adjustment unit that outputs the temperature command value to the cooling and heating plate 6 via the storage unit 43 and the output unit 44.
- FIG. 4 is a configuration diagram of the environmental test apparatus 100 in which the fixing jig 8 is attached to the cooling and heating plate 6.
- the fixing jig 8 includes a screw 81, a spring 82, and a fixing plate 83.
- screw holes 6a for attaching screws 81 by screwing are formed.
- a female screw is cut in the screw hole 6a.
- the fixing plate 83 has a hole through which the screw 81 is inserted.
- the fixed plate 83 is, for example, a rectangular plate.
- the fixing plates 83 are respectively placed on both ends of the DUT W placed on the upper surface of the cooling and heating plate 6 via the heat transfer sheet 12. From above, the test object W is fixed to the cooling and heating plate 6 with a screw 81 and a spring 82 while applying a predetermined load to the test object W.
- the temperature difference between the cooling and heating plate 6 and the test object W can be suppressed to within 0.7 ° C. That is, the cooling and heating plate 6 and the DUT W can be set to substantially the same temperature.
- FIG. 5 is a flowchart showing a control method of the environmental test apparatus 100 shown in FIG.
- Step 1 A set value of the amount of condensation on the surface of the test object W and a set value of the temperature and humidity in the test chamber 1 are input to the setting / display unit 13.
- a test object W is placed on the upper surface of the cooling and heating plate 6 via the heat transfer sheet 12. This process is shown in FIG. 5 as step 1 (denoted as S1 and other steps are the same).
- the set value of the condensation amount is the condensation amount per unit area ( ⁇ g / mm 2 ). Specifically, for example, the set values are 3 ⁇ g / mm 2 , 5 ⁇ g / mm 2 , and 10 ⁇ g / mm 2 .
- the set value of temperature and humidity is, for example, 25 ° C. and 50% RH (the dew point temperature at this time is about 13.8 ° C.).
- the temperature and humidity generator 3 is operated to adjust the air in the test chamber 1 to a predetermined temperature and humidity (for example, 25 ° C. and 50% RH) (S2).
- the adjuster 4 takes signals from the dry bulb 10 and the wet bulb 11 into the input unit 41. Based on the acquired signal, the controller 42 determines each command value to the temperature / humidity generator 3 (humidifier 31, cooler 32, heater 33, and blower 34). Then, a command is issued from the output unit 44 to control the temperature / humidity generator 3.
- the air in the test chamber 1 is circulated between the test chamber 1 and the air conditioning chamber 2 by the blower 34.
- the temperature in the test chamber 1 When the temperature in the test chamber 1 is low and the test object W is cold (eg, when the surface temperature of the test object W is lower than the dew point temperature) in winter, etc., cool it before the constant temperature and humidity process. It is preferable to operate the heating plate 6 (cooling heater) so that the temperature of the surface of the test object W is higher than the dew point temperature at the set temperature (warming-up process). If the temperature in the test chamber 1 is low and the object under test W is cold, such as in winter, unexpected condensation may occur when the air in the test chamber 1 is adjusted to a predetermined temperature and humidity (for example, 25 ° C. and 50% RH). This is because it occurs on the surface of the DUT W.
- a predetermined temperature and humidity for example, 25 ° C. and 50% RH
- the dew point temperature in the test chamber 1 is determined by the control unit 42 based on signals from the dry bulb 10 and the wet bulb 11.
- the temperature detected by the first temperature sensor 7 may be the temperature of the surface of the test object W
- the temperature detected by the second temperature sensor 91 may be the temperature of the surface of the test object W.
- the relationship (correlation) between the output (signal) of the dew amount sensor 9 and the dew amount ( ⁇ g / mm 2 ) on the surface of the test object W is obtained in advance as follows and input to the storage unit 43.
- the dew condensation state on the surface of the test object W is photographed by a photographing device such as a microscope.
- the amount of condensation ( ⁇ g / mm 2 ) on the surface of the test object W is obtained from the photographed image.
- a correspondence relationship between the obtained amount of condensation ( ⁇ g / mm 2 ) and the output (signal) of the condensation amount sensor 9 at this time is input to the storage unit 43.
- the temperature command value from the controller 4 to the cooling and heating plate 6 is set to, for example, 0 ° C., and the cooling and heating plate 6 is cooled (S4).
- the temperature command value to the cooling and heating plate 6 is set to 0 ° C. until condensation occurs (S5).
- S4 and S5 may be omitted.
- the regulator 4 adds a deviation to the value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb 11 and the dew point temperature in the test chamber 1 based on the condensation amount measured by the condensation sensor 9.
- the temperature command value to the cooling / heating plate 6 is changed between the values, and the cooling / heating plate 6 is controlled so that the amount of dew condensation on the surface of the test object W approaches a predetermined amount.
- the regulator 4 controls the cooling and heating plate 6 so that the amount of dew condensation on the surface of the test object W becomes, for example, a set value ⁇ 0.2 ⁇ g / mm 2 .
- the regulator 4 sets the upper limit value of the temperature control range of the cooling and heating plate 6 to a value proportional to the wet bulb temperature detected by the wet bulb 11, and sets the lower limit value of the temperature control range in the test chamber 1.
- the dew amount on the surface of the test object W is controlled by changing the temperature command value to the cooling and heating plate 6 between the upper limit value and the lower limit value.
- the value obtained by adding a deviation to the wet bulb temperature changes in proportion to the wet bulb temperature as the wet bulb temperature changes.
- the value obtained by adding a deviation to the dew point temperature in the test chamber 1 changes in proportion to the dew point temperature as the dew point temperature changes (temperature and humidity change).
- the adjuster 4 changes the temperature command value to the cooling and heating plate 6 in accordance with the actual temperature and humidity that slightly changes in the test chamber 1. Therefore, even if the temperature and humidity in the test chamber 1 are disturbed to some extent, the temperature control of the cooling and heating plate 6 can be performed in response to the disturbance. As a result, it is possible to obtain a stable dew condensation state in which the amount of dew condensation is smaller than the conventional one on the surface of the test object W. Further, it is possible to prevent the temperature of the DUT from being increased or decreased.
- the temperature of the cooling and heating plate 6 can be prevented from rising and falling rapidly, wasteful energy consumption can be suppressed, energy saving effects can be obtained, and the life of the cooling and heating plate 6 having relatively low durability can be extended. be able to.
- a cooling and heating plate between a value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb 11 and a value obtained by adding a deviation to the dew point temperature in the test chamber 1 based on the amount of condensation measured by the condensation amount sensor 9.
- the control of changing the temperature command value to 6 will be specifically described with reference to FIG. 5 and FIG.
- the value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb 11 is a wet bulb temperature + A (° C.) obtained by adding A (deviation) to the wet bulb temperature detected by the wet bulb 11.
- a (deviation) the wet bulb temperature detected by the wet bulb 11.
- the wet bulb temperature becomes 20.9 ° C. obtained by adding 3 ° C., for example, as A (deviation) to 17.9 ° C.
- the wet bulb temperature changes by 17.9 ° C., and therefore, the value obtained by adding 3 ° C. as the A (deviation) to the wet bulb temperature. Changes in proportion to the wet bulb temperature.
- the value obtained by adding a deviation to the dew point temperature in the test chamber 1 is the dew point temperature ⁇ B (° C.) obtained by adding ⁇ B (deviation) to the dew point temperature in the test chamber 1.
- the dew point temperature is 13.9 ° C., for example, ⁇ 3 ° C. added to ⁇ B (deviation).
- a value obtained by adding ⁇ 3 ° C. as ⁇ B (deviation) to the dew point temperature Varies in proportion to the dew point temperature.
- the values of A and B are determined according to the heat capacity, cooling and heating characteristics of the DUT W, and values corresponding to the DUT and the cooling / heating plate 6 are input to the storage unit 43 in advance. Keep it.
- the regulator 4 is a value obtained by adding, for example, 3 ° C. (deviation) to the wet bulb temperature detected by the wet bulb 11 based on the condensation amount measured by the condensation sensor 9 ( Cooling heating to one of an upper limit temperature (for example, 20.9 ° C.) and a value obtained by adding, for example, ⁇ 3 ° C. (deviation) to the dew point temperature in the test chamber 1 (lower limit temperature, for example, 10.9 ° C.) The temperature command value to the plate 6 is switched. In this way, the adjuster 4 controls the cooling and heating plate 6 so that the amount of dew condensation on the surface of the DUT W becomes the set value ⁇ 0.2 ⁇ g / mm 2 .
- FIG. 6A mainly shows that the temperature command value to the cooling and heating plate 6 is switched in two stages.
- the regulator 4 determines whether or not the condensation amount measured by the condensation amount sensor 9 is equal to or greater than the set value (S6).
- the controller 4 controls the heating and cooling of the cooling and heating plate 6 with the temperature command value for the cooling and heating plate 6 set to the upper limit temperature (for example, 20.9 ° C.) (S7).
- the regulator 4 controls the cooling and heating plate 6 to cool by setting the temperature command value to the cooling and heating plate 6 to the lower limit temperature (for example, 10.9 ° C.) (S10).
- the controller 4 determines whether or not the temperature of the cooling and heating plate 6 is equal to or higher than the upper limit temperature (S8).
- the temperature of the cooling and heating plate 6 is obtained from a signal from the first temperature sensor 7.
- the process returns to S6.
- the process returns to S6 under the condition (S9) that the upper limit timer starts counting and the time is not up.
- the controller 4 determines that the sensor is abnormal (S13).
- the regulator 4 judges whether the temperature of the cooling heating plate 6 is below a minimum temperature (S11). When the temperature of the cooling and heating plate 6 is higher than the lower limit temperature, the process returns to S6. When the temperature of the cooling and heating plate 6 is equal to or lower than the lower limit temperature, the process returns to S6 under the condition (S12) that the lower limit timer starts counting and the time is not up. When the time is up, the controller 4 determines that the sensor is abnormal (S13).
- the sensor abnormality is an abnormality of at least one of the dew condensation amount sensor 9, the first temperature sensor 7, and the dry bulb 10 and the wet bulb 11.
- the abnormality of the condensation amount sensor 9 includes a failure of the condensation amount sensor 9 itself, the fact that the condensation amount sensor 9 is about to come off the heat transfer sheet 12 (or the DUT W), and the like.
- the abnormality of the first temperature sensor 7 and the dry bulb 10 / wet bulb 11 is a failure of each sensor itself.
- the test completion judgment step (SE in FIG. 5) will be described. Whether or not the test has ended is (1) whether or not the test time has been reached (by the timer), (2) whether or not the test cycle has been reached (by the program), and (3) whether or not there is a manual termination instruction (4) Whether or not an abnormality (including sensor abnormality) has occurred is determined.
- a value obtained by adding a deviation (A (° C.)) to the wet bulb temperature and a deviation ( ⁇ B (° C.)) were added to the dew point temperature.
- Time to heat the DUT at a temperature obtained by adding a deviation (A (° C)) to the wet bulb temperature, and a time to cool the DUT at a temperature obtained by adding a deviation (-B (° C)) to the dew point temperature. Will be controlled.
- a value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb 11 (upper limit temperature value) and the test chamber
- the dew point on the surface of the test object W is varied by changing the temperature command value to the cooling / heating plate 6 arbitrarily between the values obtained by adding a deviation to the dew point temperature in 1 (the lower limit temperature value). It is also preferable to control the cooling and heating plate 6 so as to approach a predetermined amount. Thus, by finely controlling the temperature command value to the cooling and heating plate 6, it is possible to further suppress the change in the amount of condensation.
- a value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb 11, the wet bulb temperature value based on the dew amount measured by the dew amount sensor 9, a value obtained by adding a deviation to the wet bulb temperature detected by the wet bulb 11, the wet bulb temperature value, and It is also preferable to control the dew amount on the surface of the test object W by switching the temperature command value to the cooling and heating plate 6 to any one of the values obtained by adding a deviation to the dew point temperature in the test chamber 1. In other words, it is also preferable to control the dew amount on the surface of the test object W by switching the temperature command value to the cooling and heating plate 6 in three stages.
- the time to heat the test object W at a temperature obtained by adding a deviation (A (° C.)) to the wet bulb temperature, the time for the condensation of the test object W to evaporate at the wet bulb temperature, and the dew point temperature ( ⁇ B) is controlled. Thereby, the change in the amount of condensation can be further suppressed and the control of the amount of condensation can be simplified.
- FIG. 7 is a diagram showing a change in the amount of dew condensation on the surface of the test object and a change in the temperature of the cooling and heating plate when the conventional technique is used.
- FIG. 8 is a diagram showing a change in the amount of condensation on the surface of the test object W and a change in the temperature of the cooling and heating plate 6 when the environmental test apparatus 100 according to the embodiment of the present invention is used. 7 and 8, all the dew condensation tests showed the same conditions, assuming that the temperature and humidity setting in the test room is 25 ° C. and 50% RH, and the dew condensation on the surface of the test object is 3 ⁇ g / mm 2 . The test was conducted.
- the temperature is controlled by utilizing the cooling heating capacity of the cooling heating plate to the maximum in order to bring the condensation amount close to the set value. Specifically, the temperature of the cooling and heating plate was lowered using the cooling capacity to the maximum so that the amount of condensation approached 3 ⁇ g / mm 2 . In addition, the temperature of the cooling and heating plate was raised by making the best use of the heating capacity so that the amount of condensation approached 3 ⁇ g / mm 2 .
- the temperature value obtained by adding 3 ° C. to the wet bulb temperature is set as the upper limit value of the temperature control range of the cooling and heating plate 6, and the temperature obtained by subtracting 3 ° C. from the dew point temperature.
- the value was the lower limit value of the temperature control range of the cooling and heating plate 6.
- the temperature command value for the cooling and heating plate 6 was switched between the upper limit value and the lower limit value in two steps so that the amount of condensation approached 3 ⁇ g / mm 2 , thereby controlling the temperature of the cooling and heating plate. Refer to FIG. 5 for the detailed control flow. Note that steps S4 and S5 shown in FIG. 5 are omitted.
- the temperature control range of the cooling and heating plate 6 is determined based on the temperature and humidity obtained from the dry bulb 10 and the wet bulb 11 in the test chamber 1, and the cooling heating is performed.
- the temperature of the plate 6 not only when the temperature and humidity in the test chamber 1 is constant, but also when the temperature and humidity in the test chamber 1 is disturbed to some extent, stable condensation amount control is possible and reproduced. A highly condensing state can be generated.
- the second temperature sensor 91 may not be provided. Further, instead of the above-described condensation amount sensor 9, another type of condensation amount sensor may be used.
- Test room 2 Air conditioning room 3
- Temperature / humidity generator (air conditioning means) 4
- controller (control means) 6
- Cooling heating plate (cooling heater) 9
- Dew condensation sensor 12
- Heat transfer sheet 100
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Abstract
Description
図1は、本発明の一実施形態に係る環境試験装置100の構成図である。図1に示すように、環境試験装置100は、被試験物Wが入れられる試験室1と、試験室1から仕切られて形成された空調室2と、調節器4(制御手段)とを備えている。試験室1と空調室2とは、試験室1と空調室2との間の空気を循環させる連通部5および送風機34部を除き仕切られた構造となっている。また、試験室1内には、温湿度センサである乾球10および湿球11が配置されている。
空調室2には、湿球11および乾球10からの信号に基づき試験室1内の空気を所定の温湿度に調節するための温湿度発生器3(空調手段)が収容されている。
試験室1内には、被試験物Wを冷却および加熱する冷却加熱プレート6(冷却加熱器)が収容されている。冷却加熱プレート6は、被試験物Wを接触させて熱伝導により直接冷却加熱する冷却加熱面を有する表面接触式冷却加熱器である(なお、本実施形態のように被試験物Wを直接接触させずに伝熱シート12を介して間接接触させて、被試験物Wを熱伝導により冷却加熱することも当然可能である)。冷却加熱プレート6は、冷水などの冷媒を用いる冷媒冷却式のものや、ペルチェ効果を利用する熱電素子と冷却ファンとを組み合わせた電子冷却式のものがある。
図2は、図1に示す結露量センサ9の詳細図である。図2に示したように、結露量センサ9は、シリコンウエハ上に配置された結露検出部92および第2温度センサ91と、結露検出部92に接続されるF/V変換部93と、第2温度センサ91に接続されるAMP94とを有している。結露検出部92は、くし型電極の形態をとるものであり、電極間の静電容量値の変化に応じた発振周波数の変化により当該結露検出部92上の結露量を検出している。ここで、電極の幅L1および間隔L2はいずれも30μmと結露検出部92は微小配線にされている。F/V変換部93は、周波数を電圧に変換するものであり、結露量に応じた信号が、例えば0~1Vの電圧信号として出力される。また、第2温度センサ91は、結露量センサ9のセンサ部温度を検出するものであり、ダイオードやサーミスタなどが用いられる。なお、ダイオードやサーミスタではなく赤外線方式などの非接触式の温度センサを用いてもよい。AMP94は、第2温度センサ91からの信号を増幅する増幅器である。
環境試験装置100は、試験室1内の空気の温湿度および冷却加熱プレート6の温度を制御する調節器4(制御手段)を備えている。調節器4は、入力部41と、制御部42と、記憶部43と、出力部44とを有する。また、調節器4は、乾球10・湿球11、結露量センサ9、温湿度発生器3、冷却加熱プレート6、および第1温度センサ7に電気的に接続されている。調節器4は、乾球10および湿球11からの信号を入力部41に取り込み、取り込んだ信号をもとに、試験室1内の空気が設定された温湿度となるように出力部44から指令を出して温湿度発生器3を制御する。また、調節器4は、乾球10・湿球11、結露量センサ9、および冷却加熱プレート6に内蔵されている第1温度センサ7からの信号を入力部41に取り込み、取り込んだ信号をもとに、被試験物W表面の結露量が設定された結露量となるように出力部44から指令を出して冷却加熱プレート6を制御する。
図4は、固定治具8が冷却加熱プレート6に取り付けられた環境試験装置100の構成図である。図4に示したように、固定治具8により、冷却加熱プレート6に対して被試験物Wを押圧して固定してもよい。固定治具8は、ネジ81と、バネ82と、固定板83とを有している。冷却加熱プレート6の上面の4隅近傍には、ネジ81を螺合により取り付けるためのネジ穴6aが形成される。このネジ穴6aには雌ネジが切られている。また、固定板83には、ネジ81を挿通させるための孔が形成されている。固定板83は、例えば長方形の板である。
次に、環境試験装置100の制御方法について説明する。図5は、図1に示す環境試験装置100の制御方法を示すフローチャートである。
被試験物W表面の結露量の設定値および試験室1内の温湿度の設定値を設定・表示器13に入力する。冷却加熱プレート6の上面に伝熱シート12を介して被試験物Wを載置する。この工程をステップ1(S1と記載、他のステップも同様)として図5に示している。
温湿度発生器3を動作させて試験室1内の空気を所定の温湿度(例えば25℃50%RH)に調節する(S2)。調節器4は、乾球10および湿球11からの信号を入力部41に取り込む。取り込んだ信号をもとに、制御部42で温湿度発生器3(加湿器31、冷却器32、加熱器33、および送風機34)への各指令値を決定する。そして、出力部44から指令を出して温湿度発生器3を制御する。試験室1内の空気は、送風機34により試験室1と空調室2との間を循環する。
結露量センサ9からの信号に基づき被試験物W表面の結露量を測定する(S3)。調節器4は、結露量センサ9からの信号を入力部41に取り込む。取り込んだ結露量センサ9からの信号をもとに制御部42で被試験物W表面の結露量を求める。
まず、調節器4から冷却加熱プレート6への温度指令値を例えば0℃とし、冷却加熱プレート6を冷やす(S4)。結露が発生するまで冷却加熱プレート6への温度指令値を0℃とする(S5)。これにより、被試験物W表面に素早く結露を発生させることができる。すなわち、結露試験の立ち上がり時間を短縮できる。なお、S4およびS5は省略してもよい。
図7は、従来技術を用いた場合の被試験物表面の結露量の変化および冷却加熱プレートの温度変化を示す図である。図8は、本発明の一実施形態に係る環境試験装置100を用いた場合の被試験物W表面の結露量の変化および冷却加熱プレート6の温度変化を示す図である。図7、8に結果を示したいずれの結露試験も、試験室内の温湿度の設定値を25℃50%RH、被試験物表面の結露量の設定値を3μg/mm2、として共通の条件で試験をおこなった。
図7に示すように、従来技術を用いての結露量制御では、被試験物W表面の結露状態が安定せず結露量の変化が大きかった。一方、図8に示すように、本発明に係る結露量制御では、被試験物W表面に結露する結露量の変化を小さく抑えることができた。なお、従来技術を用いての結露量制御に比して、冷却加熱プレート6の温度変化も小さく抑えられていた。
2 空調室
3 温湿度発生器(空調手段)
4 調節器(制御手段)
6 冷却加熱プレート(冷却加熱器)
9 結露量センサ
12 伝熱シート
100 環境試験装置
W 被試験物
Claims (4)
- 被試験物が入れられる試験室と、
前記試験室内に配置され当該試験室内の空気の温湿度を検出する湿球および乾球と、
前記湿球および乾球からの信号に基づき前記試験室内の空気を所定の温湿度に調節する空調手段と、
前記試験室内に収容されるとともに前記被試験物が上面に配置され、当該被試験物を冷却加熱する冷却加熱器と、
前記被試験物の上に載置される結露量センサと、
前記結露量センサからの信号に基づき、前記湿球により検出される湿球温度に偏差を加えた値と前記試験室内の露点温度に偏差を加えた値との間で前記冷却加熱器への温度指令値を変化させて、前記被試験物表面の結露量を制御する制御手段と、
を備える環境試験装置。 - 前記制御手段は、前記湿球温度に偏差を加えた値、前記湿球温度の値、および前記露点温度に偏差を加えた値のうちのいずれかに前記温度指令値を切り替えて、前記被試験物表面の結露量を制御することを特徴とする請求項1に記載の環境試験装置。
- 前記制御手段は、前記湿球温度に偏差を加えた値、および前記露点温度に偏差を加えた値のうちのいずれかに前記温度指令値を切り替えて、前記被試験物表面の結露量を制御することを特徴とする請求項1に記載の環境試験装置。
- 被試験物が入れられる試験室と、
前記試験室内に配置され当該試験室内の空気の温湿度を検出する湿球および乾球と、
前記湿球および乾球からの信号に基づき前記試験室内の空気を所定の温湿度に調節する空調手段と、
前記試験室内に収容されるとともに前記被試験物が上面に配置され、当該被試験物を冷却加熱する冷却加熱器と、
前記被試験物の上に載置される結露量センサと、
を具備する環境試験装置の制御方法であって、
前記空調手段を動作させて前記試験室内の空気を所定の温湿度に調節する恒温恒湿工程と、
前記結露量センサからの信号に基づき前記被試験物表面の結露量を測定する結露量測定工程と、
測定された前記結露量に基づき、前記湿球により検出される湿球温度に偏差を加えた値と前記試験室内の露点温度に偏差を加えた値との間で前記冷却加熱器への温度指令値を変化させて、前記被試験物表面の結露量を所定量に近づける結露量制御工程と、
を備えることを特徴とする環境試験装置の制御方法。
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JP2016061678A (ja) * | 2014-09-18 | 2016-04-25 | 新日鐵住金株式会社 | 耐食性試験装置及び耐食性試験方法 |
JP2016102688A (ja) * | 2014-11-27 | 2016-06-02 | セイコーエプソン株式会社 | 電子部品搬送装置、電子部品検査装置および電子部品押圧装置 |
JP2020112468A (ja) * | 2019-01-15 | 2020-07-27 | 株式会社 Synax | コンタクタおよびハンドラ |
WO2020218015A1 (ja) * | 2019-04-26 | 2020-10-29 | 株式会社日立プラントサービス | 環境試験室、及び、空気調和システム |
JP2020180937A (ja) * | 2019-04-26 | 2020-11-05 | 株式会社日立プラントサービス | 環境試験室、及び、空気調和システム |
JP7139023B2 (ja) | 2019-04-26 | 2022-09-20 | 株式会社日立プラントサービス | 環境試験室、及び、空気調和システム |
Also Published As
Publication number | Publication date |
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EP2309247A1 (en) | 2011-04-13 |
EP2309247B1 (en) | 2014-06-11 |
JPWO2010010774A1 (ja) | 2012-01-05 |
CN102099669A (zh) | 2011-06-15 |
US8359906B2 (en) | 2013-01-29 |
KR101672910B1 (ko) | 2016-11-04 |
KR20110033845A (ko) | 2011-03-31 |
US20110126616A1 (en) | 2011-06-02 |
JP4963740B2 (ja) | 2012-06-27 |
EP2309247A4 (en) | 2013-07-31 |
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