WO2009089958A1 - Turbo molecular pump - Google Patents
Turbo molecular pump Download PDFInfo
- Publication number
- WO2009089958A1 WO2009089958A1 PCT/EP2008/066309 EP2008066309W WO2009089958A1 WO 2009089958 A1 WO2009089958 A1 WO 2009089958A1 EP 2008066309 W EP2008066309 W EP 2008066309W WO 2009089958 A1 WO2009089958 A1 WO 2009089958A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- rotor
- stator
- annular groove
- rings
- housing
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Definitions
- the invention relates to a turbomolecular pump
- Turbomolecular pumps have a multi-rotor rotor coupled to a drive shaft.
- Stationary stator disks are arranged between the individual rotor blades. Often, the stator discs are not directly connected to the pump housing, but supported by stator rings.
- a stator ring is provided per rotor blade, wherein the stator rings are slipped over the rotor for mounting. There must be a gap between the rotor blades or rotor rotor tips and the stationary housing or the stator rings. This is required in all operating conditions touching the rotor! on the stationary components, ie the housing or the stator rings to prevent.
- the width of the gap must be so large that in all operating conditions, the thermal expansion of the rotor blades occurring is possible without touching the stationary components. Furthermore, it must be taken into account in the width of the intended gap that skewing of the rotor can occur due to the rotor dynamics. In particular, in magnetgeiagerten drive shafts, the Ausienkung must also be considered due to the game to the backup bearings. Furthermore, strains of the rotor occur in particular in the radial direction by centrifugal forces. Furthermore, if necessary, adding tolerances _ _
- the gap between the rotor blades and the housing or the stator rings is approximately 200 mm - 2 mm in turbomolecular pumps with a rotor diameter of approx. Due to the existing gap, part of the pumped gas flows back. By this backflow, the efficiency of the turbomolecular pump is significantly deteriorated.
- the object of the invention is to provide a turbomolecular pump with which a reduction of the recirculating gas volume and thus an improvement in the efficiency can be achieved.
- the turbomolecular pump according to the invention has a rotor with a plurality of rotor blades.
- the rotor is connected to a drive shaft and surrounded by a stator element.
- the cylindrically shaped stator element may be the housing of the turbomolecular pump itself or one, in particular a plurality of stator rings.
- the stator element has at least one annular groove.
- the circumferential annular groove is associated with a Rotorfiügel and arranged in the corresponding plane of flight of this rotor.
- the annular groove is thus arranged at the level of the associated rotor blade in the operating state. This makes it possible that an expansion of the rotor blade takes place during operation in the radial direction in the annular groove.
- the dimensions of the annular groove are in this case selected such that in all operating conditions, contact of the rotor blade is avoided both on the ground and on the side walls of the annular groove. Since the tip of the rotor blade protrudes into the annular groove during operation of the turbomolecular pump, the gap at the tip of the rotor blade is U-shaped in cross-section. This is significantly reduces the volume of the recirculating gas and thus improves the efficiency of the turbomolecular pump.
- the rotor blades on a radial approach.
- This pointing in the direction of the annular groove approach is particularly annular.
- the annular projection thus surrounds the individual blades of the rotor blades, so that preferably during operation only the annular projection and not the blades are inserted into the annular groove.
- Each rotor blade is preferably assigned an annular groove, wherein each rotor blade preferably has an annular projection.
- annular grooves for a plurality, in particular at least two rotor blades, a further improvement of the tightness can be achieved. Since, in a particularly preferred embodiment, an annular groove is provided per rotor blade, a meander-shaped gap is formed during operation, which serves as a non-contact labyrinth seal, so that a considerable improvement in the efficiency of the turbomolecular pump can be achieved.
- the at least one annular groove may be formed on an inner side of a housing designed as a stator element.
- a plurality of stator rings are provided within a pump housing.
- a stator ring is provided per rotor blade, wherein the stator rings are arranged one behind the other in the axial direction.
- the stator rings are thus arranged one behind the other in the direction of the drive shaft or in the main conveying direction of the gas.
- the annular groove according to the invention is provided in one or more stator rings.
- an annular groove is provided in all stator rings, in particular in the associated with the corresponding rotor blades annular approach in operation penetrates.
- the ring groove height depends on the blade heights decreasing from the inlet side to the outlet side (following the compression).
- the groove depth varies from approx. 0.5 mm for small to approx. 4 mm for large rotors.
- the groove width varies from 2 mm for flat blades of small rotors to 15 mm for steep blades of large rotors.
- FIG. 1 is an enlarged schematic sectional view of part of a part of a turbomolecular pump according to the prior art
- Fig. 2 is a schematic sectional view of an inventive
- FIG. 3 is a schematic enlarged sectional view of the region III in FIG.
- FIG. 1 shows a rotor 12 arranged on a drive shaft 10 (FIG. 2).
- the rotor 12 has radially extending rotor blades 16 with respect to a longitudinal axis 14 and the axis of rotation of the shaft 10, respectively on. Every rotor fly! has rotor blades 18 which are inclined so that in the gas to be transported a main flow direction parallel to the longitudinal axis, i. is generated in Fig. 1 down in the direction of arrow 20.
- the rotor 12 is arranged in a housing 22, wherein the housing for receiving the rotor has a cylindrical, optionally, stepped recess 24.
- stator rings 26 are arranged one behind the other in the longitudinal direction 14 and thus clothe an inner side of the cylindrical recess 24 of the housing 22. Between adjacent stator rings 26 are facing inwardly in the direction of the rotor Stator discs 28 are provided. Each Statorschesbe 28 is thus arranged between two adjacent rotor wings 16.
- a gap a In operation of the turbomolecule suction pump, to prevent the radially outer ends of the rotor ball 16, i. the tips of the rotor vanes 16 which contact the stator rings 26 are between the radial ends of the rotor fins 16 and the inner sides, i. formed in the direction of the rotor blades 16 facing sides 30, a gap a. Through this gap a gas to be delivered during operation flows counter to the conveying direction 20 back into a suction chamber, from which the gas is to be sucked.
- the turbomolecular pump according to the invention also has a drive shaft 10, which carries the rotor 12.
- the rotor 12 also has rotor blades 16 which support rotor blades 18.
- stator rings 26 are also disposed within the housing 22.
- 16 stator discs 28 are arranged in the illustrated embodiment between adjacent rotor blades.
- all the stator rings have an annular groove 32 on their inner side pointing in the direction of the rotor 12.
- the annular groove 32 is self-contained and extends along the entire inner side of each individual stator ring 26.
- the RotorfSugei 16 have at the outer in the direction of the stator 26 facing ends in the illustrated embodiment, in each case an annular projection 34.
- annular projection 33 shifts due to the thermal expansion of the centrifugal forces, etc. in the corresponding annular groove 32nd
- the annular grooves 32 and the annular projections 34 are thus per rotor flights! on a common, in Fig. 3 each horizontally extending plane of flight 36, of which in Fig. 3 for clarity only one is shown.
- the upper rotor wing 16 in FIG. 3 is not surrounded by a stator ring.
- an annular groove 38 is provided in the housing 22.
- a projection 34 of the upper rotor fissure 16 projects into the annular groove 38.
- a mounting gap b is provided between the radial ends of the Rotorflugei 16 and an inner side of the stator 26. This is required to stuipen the stator 26 for mounting on the rotor 12.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010541731A JP5546464B2 (en) | 2008-01-15 | 2008-11-27 | Turbo molecular pump |
EP08870887.0A EP2235377B1 (en) | 2008-01-15 | 2008-11-27 | Turbo molecular pump |
CN2008801248308A CN101952602A (en) | 2008-01-15 | 2008-11-27 | Turbo molecular pump |
US12/812,814 US20100322799A1 (en) | 2008-01-15 | 2008-11-27 | Turbomolecular pump |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008004297.8 | 2008-01-15 | ||
DE102008004297A DE102008004297A1 (en) | 2008-01-15 | 2008-01-15 | Turbo molecular pump |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009089958A1 true WO2009089958A1 (en) | 2009-07-23 |
Family
ID=40405030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/066309 WO2009089958A1 (en) | 2008-01-15 | 2008-11-27 | Turbo molecular pump |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100322799A1 (en) |
EP (1) | EP2235377B1 (en) |
JP (1) | JP5546464B2 (en) |
CN (1) | CN101952602A (en) |
DE (1) | DE102008004297A1 (en) |
TW (1) | TW200934957A (en) |
WO (1) | WO2009089958A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8444127B2 (en) * | 2009-12-14 | 2013-05-21 | The Boeing Company | High temperature composite patch tool |
DE202011002809U1 (en) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Stator element and high vacuum pump |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3842902A (en) * | 1973-07-05 | 1974-10-22 | Hayes Albion Corp | Labyrinthian fan |
US20020164247A1 (en) * | 2001-05-02 | 2002-11-07 | Sylvain Nadeau | Turbomachine with double-faced rotor-shroud seal structure |
EP1498612A2 (en) | 2003-07-15 | 2005-01-19 | Pfeiffer Vacuum GmbH | Turbo molecular pump |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3032967A1 (en) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Turbo-molecular type vacuum pump - has spaces inside and outside rotor bell sealed from each other to increase vacuum obtained |
JPS6314893U (en) * | 1986-07-11 | 1988-01-30 | ||
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
JPH0687691U (en) * | 1993-05-28 | 1994-12-22 | セイコー精機株式会社 | Turbo molecular pump |
US6332752B2 (en) * | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
DE10004263A1 (en) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Seal between stationary and rotating component in vacuum pump consists of blades arranged in herringbone pattern attached to each component |
JP2003129991A (en) * | 2001-10-24 | 2003-05-08 | Boc Edwards Technologies Ltd | Molecular pump |
US20050031710A1 (en) * | 2003-08-08 | 2005-02-10 | D'adamo Peter James | Method of personal care and cosmetic product preparation and composition using human blood type |
US7717684B2 (en) * | 2003-08-21 | 2010-05-18 | Ebara Corporation | Turbo vacuum pump and semiconductor manufacturing apparatus having the same |
-
2008
- 2008-01-15 DE DE102008004297A patent/DE102008004297A1/en not_active Withdrawn
- 2008-11-27 EP EP08870887.0A patent/EP2235377B1/en active Active
- 2008-11-27 JP JP2010541731A patent/JP5546464B2/en active Active
- 2008-11-27 WO PCT/EP2008/066309 patent/WO2009089958A1/en active Application Filing
- 2008-11-27 US US12/812,814 patent/US20100322799A1/en not_active Abandoned
- 2008-11-27 CN CN2008801248308A patent/CN101952602A/en active Pending
-
2009
- 2009-01-07 TW TW098100324A patent/TW200934957A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3842902A (en) * | 1973-07-05 | 1974-10-22 | Hayes Albion Corp | Labyrinthian fan |
US20020164247A1 (en) * | 2001-05-02 | 2002-11-07 | Sylvain Nadeau | Turbomachine with double-faced rotor-shroud seal structure |
EP1498612A2 (en) | 2003-07-15 | 2005-01-19 | Pfeiffer Vacuum GmbH | Turbo molecular pump |
Also Published As
Publication number | Publication date |
---|---|
TW200934957A (en) | 2009-08-16 |
US20100322799A1 (en) | 2010-12-23 |
JP2011510201A (en) | 2011-03-31 |
DE102008004297A1 (en) | 2009-07-16 |
CN101952602A (en) | 2011-01-19 |
EP2235377A1 (en) | 2010-10-06 |
JP5546464B2 (en) | 2014-07-09 |
EP2235377B1 (en) | 2014-12-31 |
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