EP1498612B1 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

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Publication number
EP1498612B1
EP1498612B1 EP04014174.9A EP04014174A EP1498612B1 EP 1498612 B1 EP1498612 B1 EP 1498612B1 EP 04014174 A EP04014174 A EP 04014174A EP 1498612 B1 EP1498612 B1 EP 1498612B1
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
distance rings
stator
firm connection
created
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04014174.9A
Other languages
German (de)
French (fr)
Other versions
EP1498612A2 (en
EP1498612A3 (en
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1498612A2 publication Critical patent/EP1498612A2/en
Publication of EP1498612A3 publication Critical patent/EP1498612A3/en
Application granted granted Critical
Publication of EP1498612B1 publication Critical patent/EP1498612B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a turbomolecular pump according to the preamble of the first protection claim.
  • the active pumping elements of a turbomolecular pump consist of blade-equipped rotor and stator disks, which are arranged alternately one behind the other.
  • the rotor and stator disks generally each have an inner support ring which is equipped on the outside with the blades.
  • the blades of the rotor disks which revolve at high speed, produce the pumping effect in cooperation with the stator blades.
  • spacer rings which lie on the outer circumference between the stator, they are kept at a distance, that the rotor discs can rotate between them without contact.
  • Stator discs and spacer rings together form the stator. This is centered by the inner wall of the pump housing.
  • this conventional type of construction of turbomolecular pumps has the disadvantage that, due to the many components, it is quite complicated. In addition, it represents a fairly rigid structure, making it difficult to adapt to different applications.
  • DE PS 37 22 164 Such a structure with stator disks, spacers and housing is described.
  • FIG DE OS 199 51 954 A turbomolecular pump in which the number of components is reduced by integrally forming a stator disk, a spacer ring and a part of the housing is shown in FIG DE OS 199 51 954 ,
  • this design has the disadvantage that additional elements for fixing and holding together the stator components must be present. As a result, the assembly is complicated and requires a lot of space.
  • the prior art ( US 2001/0016160 A1 ) includes a turbomolecular pump with stator elements and arranged therebetween Statorschaufelabstands instituten, wherein the Statorschaufelabstands comprise are connected to each other by means of shear pins.
  • This belonging to the prior art turbomolecular pump has a relatively complicated structure, since in the housing of the turbomolecular pump cutouts must be created, in which the blade spacers can slip in case of damage to the turbomolecular pump.
  • JP 4 330397 A a turbomolecular pump having spacer rings between the stator vane elements.
  • the spacer rings are formed of different materials, with projections of the spacer rings, which are made of harder material, penetrate into the spacer rings, which are made of soft material.
  • turbomolecular pump Furthermore belongs to the state of the art ( DE 25 23 390 B1 ) a stator support for turbomolecular pumps, which also has spacer rings that keep stators at a distance.
  • This pump is relatively complex.
  • the invention has for its object to develop a turbomolecular pump, in which the number of components compared to conventional designs is reduced. With reduced production costs, a simple assembly should be possible. The integration into application systems should be facilitated and thus a variable and application-oriented application should be achieved.
  • the inventive arrangement the number of components compared to conventional structures is reduced. At reduced production costs, a simple assembly is possible.
  • the spacers are connected to each other so that they fulfill the essential tasks of a housing, namely the fixation and centering of the stator discs.
  • the remaining function of the housing is taken over by parts of the recipient to be pumped out.
  • an optimal adjustment of pump and recipient is achieved.
  • This also makes it possible that the pump-active components can be brought in the immediate vicinity of the evacuating sphere.
  • the spacer rings in their entirety assume the function of a pump housing, this is unnecessary.
  • the housing 1 of the turbomolecular pump which according to the invention is formed from spacer rings 18, is provided with a suction opening 2 and a gas outlet opening 4.
  • the rotor shaft 6 is fixed in bearings 8 and 9 and is driven by the motor 11.
  • On the rotor shaft the rotor disks 14 are attached.
  • the spacer rings 18 are assembled and connected so that they take over the function of the housing of the pump. They also serve to fix and center the stator discs.
  • FIG. 2 two spacer rings 18a and 19a are shown, which fix a stator 16.
  • the two spacers are firmly connected together at the point 20 by thread.
  • Fig. 3 shows two spacer rings 18b and 19b with stator 16, wherein the spacers are connected by a clip closure, consisting of a web 22 and a groove 23 firmly together.
  • Fig. 4 shows two spacers 18c and 19c with stator 16. The spacers are connected by pins 24 firmly together.
  • FIG. 5 two spacer rings 18d and 19d are shown with the stator 16.
  • the spacers are here via a fit at the point 26 by pressing firmly connected to each other firmly.
  • a seal between the individual spacers and between spacers and other components is not shown here. It can by known arrangements, such as those in the DE-OS 199 51 954 are shown done.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des ersten Schutzanspruches.The invention relates to a turbomolecular pump according to the preamble of the first protection claim.

Die aktiven Pumpelemente einer Turbomolekularpumpe bestehen aus mit Schaufeln versehenen Rotor- und Statorscheiben, die abwechselnd hinter einander angeordnet sind. Die Rotor- und Statorscheiben weisen im Allgemeinen jeweils einen inneren Tragring auf, der auf der Außenseite mit den Schaufeln bestückt ist. Die Schaufeln der Rotorscheiben, welche mit hoher Geschwindigkeit umlaufen, ergeben im Zusammenwirken mit den Statorschaufeln den Pumpeffekt. Durch Distanzringe, welche am äußeren Umfang zwischen den Statorscheiben liegen, werden diese so auf Abstand gehalten, dass die Rotorscheiben zwischen ihnen berührungsfrei rotieren können. Statorscheiben und Distanzringe bilden so gemeinsam den Stator. Dieser wird durch die Innenwand des Pumpengehäuses zentriert. Diese herkömmliche Art einer Konstruktion von Turbomolekularpumpen hat jedoch den Nachteil, dass sie, bedingt durch die vielen Bauteile, recht kompliziert ist. Außerdem stellt sie einen ziemlich starren Aufbau dar, wodurch eine Anpassung an unterschiedliche Anwendungsfälle erschwert wird. In der DE PS 37 22 164 ist ein solcher Aufbau mit Statorscheiben, Distanzringen und Gehäuse beschrieben.The active pumping elements of a turbomolecular pump consist of blade-equipped rotor and stator disks, which are arranged alternately one behind the other. The rotor and stator disks generally each have an inner support ring which is equipped on the outside with the blades. The blades of the rotor disks, which revolve at high speed, produce the pumping effect in cooperation with the stator blades. By spacer rings, which lie on the outer circumference between the stator, they are kept at a distance, that the rotor discs can rotate between them without contact. Stator discs and spacer rings together form the stator. This is centered by the inner wall of the pump housing. However, this conventional type of construction of turbomolecular pumps has the disadvantage that, due to the many components, it is quite complicated. In addition, it represents a fairly rigid structure, making it difficult to adapt to different applications. In the DE PS 37 22 164 Such a structure with stator disks, spacers and housing is described.

Eine Turbomolekularpumpe, bei der die Anzahl der Bauteile reduziert ist, indem jeweils eine Statorscheibe, ein Distanzring und ein Teil des Gehäuses einstückig ausgebildet sind, zeigt die DE OS 199 51 954 . Diese Konstruktion hat jedoch den Nachteil, dass zusätzliche Elemente zum Fixieren und Zusammenhalten der Statorbauteile vorhanden sein müssen. Dadurch wird der Zusammenbau kompliziert und benötigt viel Platz.A turbomolecular pump in which the number of components is reduced by integrally forming a stator disk, a spacer ring and a part of the housing is shown in FIG DE OS 199 51 954 , However, this design has the disadvantage that additional elements for fixing and holding together the stator components must be present. As a result, the assembly is complicated and requires a lot of space.

Zum Stand der Technik ( US 2001/0016160 A1 ) gehört eine Turbomolekularpumpe mit Statorelementen und dazwischen angeordneten Statorschaufelabstandselementen, bei der die Statorschaufelabstandselemente mittels Scherbolzen miteinander verbunden sind. Diese zum Stand der Technik gehörende Turbomolekularpumpe weist einen relativ komplizierten Aufbau auf, da in dem Gehäuse der Turbomolekularpumpe Ausschnitte geschaffen werden müssen, in die die Schaufelabstandselemente im Falle eines Schadens der Turbomolekularpumpe hineinrutschen können.The prior art ( US 2001/0016160 A1 ) includes a turbomolecular pump with stator elements and arranged therebetween Statorschaufelabstandselementen, wherein the Statorschaufelabstandselemente are connected to each other by means of shear pins. This belonging to the prior art turbomolecular pump has a relatively complicated structure, since in the housing of the turbomolecular pump cutouts must be created, in which the blade spacers can slip in case of damage to the turbomolecular pump.

Weiterhin gehört zum Stand der Technik ( JP 4 330397 A ) eine Turbomolekularpumpe, welche Abstandsringe zwischen den Statorschaufelelementen aufweist. Die Abstandsringe sind aus unterschiedlichen Materialien gebildet, wobei Vorsprünge der Abstandsringe, die aus härterem Material bestehen, in die Abstandsringe, die aus weichem Material bestehen, eindringen. Auch diese zum Stand der Technik gehörende Pumpe ist relativ aufwändig aufgebaut.Furthermore belongs to the state of the art ( JP 4 330397 A ) a turbomolecular pump having spacer rings between the stator vane elements. The spacer rings are formed of different materials, with projections of the spacer rings, which are made of harder material, penetrate into the spacer rings, which are made of soft material. These belonging to the prior art pump is relatively complex.

Weiterhin gehört zum Stand der Technik ( DE 25 23 390 B1 ) eine Statorhalterung für Turbomolekularpumpen, die ebenfalls Distanzringe aufweist, die Statoren auf Abstand halten. Auch diese Pumpe ist relativ aufwändig aufgebaut. Der Erfindung liegt die Aufgabe zugrunde, eine Turbomolekularpumpe zu entwickeln, bei der die Anzahl der Bauteile gegenüber herkömmlichen Konstruktionen reduziert ist. Bei verminderten Herstellkosten soll eine einfache Montage möglich sein. Die Integration in Anwendungssysteme soll erleichtert und somit ein variabler und anwendungsorientierter Einsatz erreicht werden.Furthermore belongs to the state of the art ( DE 25 23 390 B1 ) a stator support for turbomolecular pumps, which also has spacer rings that keep stators at a distance. This pump is relatively complex. The invention has for its object to develop a turbomolecular pump, in which the number of components compared to conventional designs is reduced. With reduced production costs, a simple assembly should be possible. The integration into application systems should be facilitated and thus a variable and application-oriented application should be achieved.

Die Aufgabe wird durch die kennzeichnenden Merkmale des ersten Schutzanspruches gelöst. Die Ansprüche 2 bis 5 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is solved by the characterizing features of the first protection claim. The claims 2 to 5 represent further embodiments of the invention.

Durch die erfindungsgemäße Anordnung wird die Anzahl der Bauteile gegenüber herkömmlichen Konstruktionen reduziert. Bei verminderten Herstellkosten ist eine einfache Montage möglich. Die Distanzringe sind so miteinander verbunden, dass sie die wesentlichen Aufgaben eines Gehäuses, nämlich die Fixierung und Zentrierung der Statorscheiben, erfüllen. Die restliche Funktion des Gehäuses wird von Teilen des auszupumpenden Rezipienten übernommen. Somit wird eine optimale Anpassung von Pumpe und Rezipient erreicht. Dadurch wird es auch möglich, dass die pumpaktiven Bauelemente in unmittelbarer Nähe der evakuierenden Sphäre gebracht werden können. Durch die Tatsache, dass die Distanzringe in ihrer Gesamtheit die Funktion eines Pumpengehäuses übernehmen, wird dieses entbehrlich.The inventive arrangement, the number of components compared to conventional structures is reduced. At reduced production costs, a simple assembly is possible. The spacers are connected to each other so that they fulfill the essential tasks of a housing, namely the fixation and centering of the stator discs. The remaining function of the housing is taken over by parts of the recipient to be pumped out. Thus, an optimal adjustment of pump and recipient is achieved. This also makes it possible that the pump-active components can be brought in the immediate vicinity of the evacuating sphere. By the The fact that the spacer rings in their entirety assume the function of a pump housing, this is unnecessary.

Anhand der Figuren 1 bis 5 soll die Erfindung näher erläutert werden.

  • Fig. 1 zeigt eine Turbomolekularpumpe der erfindungsgemäßen Gattung.
  • Fig. 2 bis 5 zeigen jeweils in Ausschnitten aus Fig. 1 verschiedene Möglichkeiten der Verbindung von Distanzringen untereinander.
Based on FIGS. 1 to 5 the invention will be explained in more detail.
  • Fig. 1 shows a turbomolecular pump of the genus of the invention.
  • Fig. 2 to 5 show each in excerpts Fig. 1 different ways of connecting spacers with each other.

Das Gehäuse 1 der Turbomolekularpumpe, welches erfindungsgemäß aus Distanzringen 18 gebildet wird, ist mit einer Ansaugöffnung 2 und einer Gasaustrittsöffnung 4 versehen. Die Rotorwelle 6 ist in Lagern 8 und 9 fixiert und wird durch den Motor 11 angetrieben. Auf der Rotorwelle sind die Rotorscheiben 14 befestigt. Die Statorscheiben 16, welche durch Distanzringe 18 auf Abstand gehalten werden, sind zwischen den Rotorscheiben angebracht. Rotorscheiben und Statorscheiben sind jeweils mit pumpaktiven Strukturen versehen und erzeugen durch ihr Zusammenwirken den Pumpeffekt.The housing 1 of the turbomolecular pump, which according to the invention is formed from spacer rings 18, is provided with a suction opening 2 and a gas outlet opening 4. The rotor shaft 6 is fixed in bearings 8 and 9 and is driven by the motor 11. On the rotor shaft, the rotor disks 14 are attached. The stator disks 16, which are held by spacers 18 at a distance, are mounted between the rotor disks. Rotor disks and stator disks are each provided with pump-active structures and, by their interaction, produce the pumping effect.

Erfindungsgemäß werden die Distanzringe 18 so zusammengefügt und verbunden, dass sie die Funktion des Gehäuses der Pumpe übernehmen. Sie dienen so auch zur Fixierung und Zentrierung der Statorscheiben.According to the invention, the spacer rings 18 are assembled and connected so that they take over the function of the housing of the pump. They also serve to fix and center the stator discs.

In Fig. 2 sind zwei Distanzringe 18a und 19a gezeigt, welche eine Statorscheibe 16 fixieren. Die beiden Distanzringe sind an der Stelle 20 durch Gewinde fest miteinander verbunden.In Fig. 2 two spacer rings 18a and 19a are shown, which fix a stator 16. The two spacers are firmly connected together at the point 20 by thread.

Fig. 3 zeigt zwei Distanzringe 18b und 19b mit Statorscheibe 16, wobei die Distanzringe durch einen Clipverschluss, bestehend aus einem Steg 22 und einer Nut 23 fest miteinander verbunden sind. Fig. 3 shows two spacer rings 18b and 19b with stator 16, wherein the spacers are connected by a clip closure, consisting of a web 22 and a groove 23 firmly together.

Fig. 4 zeigt zwei Distanzringe 18c und 19c mit Statorscheibe 16. Die Distanzringe sind durch Stifte 24 fest miteinander verbunden. Fig. 4 shows two spacers 18c and 19c with stator 16. The spacers are connected by pins 24 firmly together.

In Fig. 5 sind zwei Distanzringe 18d und 19d mit der Statorscheibe 16 dargestellt. Die Distanzringe sind hier über eine Passung an der Stelle 26 durch Verpressen kraftschlüssig fest miteinander verbunden.In Fig. 5 two spacer rings 18d and 19d are shown with the stator 16. The spacers are here via a fit at the point 26 by pressing firmly connected to each other firmly.

Eine Abdichtung zwischen den einzelnen Distanzringen und zwischen Distanzringen und anderen Bauteilen ist hier nicht dargestellt. Sie kann durch an sich bekannte Anordnungen, wie sie zum Beispiel in der DE-OS 199 51 954 dargestellt sind, erfolgen.A seal between the individual spacers and between spacers and other components is not shown here. It can by known arrangements, such as those in the DE-OS 199 51 954 are shown done.

Claims (5)

  1. Turbomolecular pump (1) having rotor (14) and stator disks (16) which are arranged in alternating manner one after the other, the interaction of said disks creating a pumping effect, wherein the stator disks (16) are held spaced apart by distance rings (18, 19), said distance rings (18, 19, 18a, 19a, 18b, 19b, 18c, 19c, 18d, 19d) being configured so that they each form a firm connection to the respective adjacent ring, so that altogether they assume the fixing and centring of the stator disks, characterised in that the distance rings (18, 19, 18a, 19a, 18b, 19b, 18c, 19c, 18d, 19d) altogether assume the function of the pump housing and thereby render the housing superfluous.
  2. Turbomolecular pump according to claim 1, characterised in that the firm connection between the distance rings (18a, 19a) is created by screw fastening by means of a thread (20).
  3. Turbomolecular pump according to claim 1, characterised in that the firm connection between the distance rings (18b, 19b) is created by means of a clip lock comprising a land (22) and a groove (23).
  4. Turbomolecular pump according to claim 1, characterised in that the firm connection between the distance rings (18c, 19c) is created by means of pinning (24) in the radial direction.
  5. Turbomolecular pump according to claim 1, characterised in that the firm connection between the distance rings (18d, 19d) is created by means of a fit (26) by pressing in force-locking manner.
EP04014174.9A 2003-07-15 2004-06-17 Turbo molecular pump Expired - Lifetime EP1498612B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10331932 2003-07-15
DE10331932.8A DE10331932B4 (en) 2003-07-15 2003-07-15 Turbo molecular pump

Publications (3)

Publication Number Publication Date
EP1498612A2 EP1498612A2 (en) 2005-01-19
EP1498612A3 EP1498612A3 (en) 2011-09-14
EP1498612B1 true EP1498612B1 (en) 2015-07-29

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP04014174.9A Expired - Lifetime EP1498612B1 (en) 2003-07-15 2004-06-17 Turbo molecular pump

Country Status (4)

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US (1) US7278822B2 (en)
EP (1) EP1498612B1 (en)
JP (1) JP2005036798A (en)
DE (1) DE10331932B4 (en)

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Publication number Priority date Publication date Assignee Title
DE102005045283B4 (en) 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vacuum pumping system
DE102006050565A1 (en) * 2006-10-26 2008-04-30 Pfeiffer Vacuum Gmbh Stator disk for turbo-molecular pump, has plate at outer ring side, so that plate fulfills spacer ring function, and support ring connected with plate, where plate is turned away from plane, and side is turned outwards in radial direction
DE102007048703A1 (en) 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
DE102008004297A1 (en) 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
CN101981321B (en) * 2008-03-31 2014-05-28 株式会社岛津制作所 Turbomolecular pump
ATE513132T1 (en) * 2008-07-10 2011-07-15 Grundfos Management As PUMP UNIT
DE102008056352A1 (en) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh vacuum pump rotor
DE102008058149A1 (en) * 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump, has rotor element arranged in pump housing, and stator rings surrounding rotor element, where rings exhibit attachment piece extending in longitudinal direction such that adjacent stator ring is arranged within piece
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
CN114593075B (en) * 2022-03-15 2023-03-24 北京中科科仪股份有限公司 Molecular pump

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Also Published As

Publication number Publication date
EP1498612A2 (en) 2005-01-19
EP1498612A3 (en) 2011-09-14
US20050013710A1 (en) 2005-01-20
JP2005036798A (en) 2005-02-10
US7278822B2 (en) 2007-10-09
DE10331932B4 (en) 2017-08-24
DE10331932A1 (en) 2005-02-03

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