EP3032106A1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP3032106A1
EP3032106A1 EP15177253.0A EP15177253A EP3032106A1 EP 3032106 A1 EP3032106 A1 EP 3032106A1 EP 15177253 A EP15177253 A EP 15177253A EP 3032106 A1 EP3032106 A1 EP 3032106A1
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EP
European Patent Office
Prior art keywords
rotor
stator
vacuum pump
pump
pure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15177253.0A
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German (de)
French (fr)
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EP3032106B1 (en
Inventor
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Filing date
Publication date
Priority claimed from DE102014118083.6A external-priority patent/DE102014118083A1/en
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15177253.0A priority Critical patent/EP3032106B1/en
Priority to JP2015238692A priority patent/JP6138897B2/en
Publication of EP3032106A1 publication Critical patent/EP3032106A1/en
Application granted granted Critical
Publication of EP3032106B1 publication Critical patent/EP3032106B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Definitions

  • the present invention relates to a vacuum pump, in particular turbomolecular pump.
  • An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft, on which a plurality of rotor disks are arranged offset axially.
  • a respective rotor disk has a plurality of circumferentially distributed rotor blades.
  • the exemplary turbomolecular pump comprises a stator with a plurality of stator disks, each of which comprises a plurality of circumferentially distributed stator blades.
  • the rotor disks and the stator disks are alternately arranged in the axial direction.
  • the exemplary turbomolecular pump has certain vacuum performance values, such as e.g. Suction and compression ratio, which are set at a target speed of the rotor.
  • vacuum performance values such as e.g. Suction and compression ratio
  • customer requirements in terms of vacuum performance can vary greatly. In practice, therefore, many different vacuum pump models are maintained for different requirements, or a vacuum pump is elaborately designed to meet specific requirements or even specifically developed accordingly.
  • a vacuum pump according to claim 1 in an axial region of the rotor, in the no at least one pure rotor region is provided, in which at least two rotor sections succeed each other without an intermediate stator section, and / or at least one pure stator section is provided in which at least two stator sections follow one another without an intervening rotor section.
  • stator or rotor sections are intentionally omitted in relation to a pump structure not according to the invention.
  • the rotor and stator sections are, in particular, so-called rotor or stator disks, each of which has a plurality of rotor blades or stator blades distributed in the circumferential direction and insofar have a disk shape in that they have a height measured in the axial direction, which is smaller and in particular much smaller than their diameter.
  • the rotor and stator sections are in particular stacked one above the other, alternating in the prior art, i. a rotor disk follows a stator disk and vice versa.
  • an exemplary turbomolecular pump with alternately arranged rotor and stator sections is used, as is known per se in the prior art.
  • This turbomolecular pump has certain vacuum technical performance values. If requirements now apply to the turbomolecular pump, which deviate from the vacuum-related performance values of the pump, for example are lower, only individual or several rotor and / or stator sections are removed or omitted during assembly. As a result, the power values of the pump which are possible within the framework of the design of the turbomolecular pump are indeed changed, for example reduced. However, this allows the requirements to be met in a very simple manner, while the pump does not have to be changed constructively.
  • stator section in the vacuum pump also fulfills structural tasks in addition to its vacuum-related function
  • stator section may be replaced by a replacement part for the structural tasks, such as e.g. a spacer, are replaced in the pure rotor area.
  • a replacement part for the structural tasks such as e.g. a spacer
  • an axial spacing can therefore be provided between the two rotor sections of the pure rotor region.
  • the vacuum pump has at least one lateral tap.
  • the side tap is different from an inlet and an outlet of the vacuum pump.
  • the invention can be used selectively in this embodiment in order to individually set the vacuum-related performance values of pump areas in front of and behind the tap.
  • the achievable pressure in a chamber connected to the lateral tap in which e.g. a larger amount of residual gas is allowed or desired, can be adjusted.
  • a complex design change of the vacuum pump is not necessary.
  • the lateral tap may be provided in at least a portion of the rotor.
  • the lateral tap may be arranged between an inlet and an outlet of the vacuum pump.
  • the pure rotor region can be arranged in the axial direction immediately before or behind the lateral tap or near a lateral tap.
  • the vacuum pump can also have no lateral tap.
  • a stator section is arranged in the axial direction between the first rotor section in the pumping direction and the second rotor section in the pumping direction.
  • the rotor sections are each formed by a rotor disk produced separately from the rotor shaft and fastened to the rotor shaft. In other words, it can therefore be a disk rotor.
  • a solid rotor may be provided, in which the rotor sections are integrally connected to the rotor shaft.
  • the vacuum pump shown as a turbomolecular pump 10 comprises an inlet 30 surrounded by an inlet flange 31 and a plurality of pumping stages for conveying the gas present at the inlet 30 to an outlet.
  • the outlet is in Fig. 1 not shown (but see, for example, the outlet 32 of in Fig. 2 illustrated pump).
  • the turbomolecular pump 10 has no lateral tap.
  • the turbomolecular pump 10 comprises a stator with a static housing 36 and a rotor 12 arranged in the housing 36 with a rotor shaft 14 rotatably mounted about a rotation axis R.
  • the turbomolecular pump 10 comprises a plurality of pump-connected with each other in series turbomolecular pumping stages with a plurality of connected to the rotor shaft 14, formed as a turbomolecular rotor disks 16 rotor sections and a plurality of axially between the rotor disks 16 and arranged in the housing 36, designed as a turbomolecular stator 22 stator sections by spacer rings 40 in a desired axial distance are held each other.
  • the rotor disks 16 and stator disks 22 provide an axial pumping action directed in the pumping direction P in a scooping region.
  • the turbomolecular pump 10 also comprises three Holweck pump stages, which are arranged one inside the other in the radial direction and pump-connected with one another in series.
  • the rotor-side part of the Holweck pump stages comprises two cylinder jacket-shaped Holweck rotor sleeves 46, 48 fastened to and carried by the rotor shaft 14, which are oriented coaxially with the axis of rotation R and are nested one inside the other.
  • two cylindrical jacket-shaped Holweck stator sleeves 50, 52 are provided, which are also oriented coaxially to the rotation axis R and nested in one another.
  • the pump-active surfaces of the Holweck pump stages are in each case formed by the radial lateral surfaces which lie opposite one another with the formation of a narrow radial Holweck gap, namely in each case a Holweck rotor sleeve 46, 48 and a Holweck stator sleeve 50, 52.
  • one of the pump-active surfaces is smooth, in the present case, for example, the Holweck rotor sleeve 46 and 48, wherein the opposite pump-active surface of the respective Holweck stator 50 and 52 structuring with helical about the axis of rotation R around in the axial direction extending grooves, in which the gas is driven by the rotation of the rotor 12 and thereby pumped.
  • the rotatable mounting of the rotor shaft 14 is effected by a rolling bearing 54 in the region of the outlet and a permanent magnet bearing 56 in the region of the inlet 30.
  • the permanent magnet bearing 56 comprises a rotor-side bearing half 60 and a stator-side bearing half 58, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings, wherein the magnetic rings facing each other with formation of a radial bearing gap.
  • an emergency or catch bearing 62 is provided, which is designed as an unlubricated rolling and idle in normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor 12 with respect to the stator engages to a radial stop for the rotor 12, which prevents a collision of the rotor-side structures with the stator-side structures.
  • a conical injection nut 64 is provided on the rotor shaft 14 with an outer diameter increasing towards the rolling bearing 54, which is provided with a scraper of a plurality with a working medium, such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact.
  • a working medium such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact.
  • the resource is transferred by capillary action from the resource reservoir via the scraper to the rotating spray nut 64 and due to the centrifugal force along the spray nut 64 in the direction of increasing outer diameter of the spray nut 64 to the rolling bearing 54 promoted where it is e.g. fulfills a lubricating function.
  • the turbomolecular pump 10 includes a drive motor 68 for rotatably driving the rotor whose rotor is formed by the rotor shaft 14.
  • a control unit not shown, controls the drive motor 68.
  • the turbomolecular group 10 of Fig. 1 comprises a pure rotor region 28 and a pure stator region 29.
  • the pure rotor region 28 two rotor disks 16 follow each other without an intervening stator disk 22.
  • a stator disk 22 is missing between the rotor disks 16.
  • two stator disks 22 follow without an intervening rotor disk 16 on each other. Accordingly, here a rotor disk 16 between the stator disks 22 is missing.
  • the two rotor disks 16 in the pure rotor region 28 and the two stator disks 22 in the pure stator region 29 are each arranged at an axial distance from one another.
  • a respective stator disk 22 is designed in the form of two half-rings, which can be placed between the rotor disks 16 from the side, that is to say in the radial direction.
  • the stator discs 22 are placed on the spacers 40 and supported by them. Individual stator disks 22 can thereby be removed or omitted particularly simply in order to adapt the turbomolecular pump 10 to specific requirements in terms of its vacuum-related performance.
  • FIG. 2 another turbomolecular pump 10 is shown, however, which has a lateral tap 26.
  • the lateral tap 26 is provided for connection to an additional, not shown, vacuum chamber in which a vacuum of a different quality is to be set than is the case in a chamber connected to the inlet 30.
  • the lateral tap 26 defines a tapping portion 34 of the rotor 12, in which the lateral tap 26 opens.
  • no stator disks 22 are arranged in the tapping region 34.
  • a large axial distance is provided, which corresponds essentially to the axial extent of the tapping region 34.
  • the tapping region 34 is therefore kept free of pump-active elements.
  • Gas entering the pump via the lateral tap 26 is pumped in the pumping direction P - in Fig. 2 So down - pumped further and finally reaches an outlet 32.
  • a pure rotor region 28 is provided in an axial region of the rotor 12 into which no lateral tapping opens.
  • the pure rotor region 28 here comprises three successive rotor disks 16 without intermediate stator disks 22.
  • the pure rotor region 28 is arranged in the pumping direction P immediately before the tapping region 34.
  • a stator disk 22 is arranged between the first rotor disk 16 and the second rotor disk 16.
  • the turbomolecular pump 10 has alternately arranged rotor disks 16 and stator disks 22 in the axial direction.
  • FIG. 3 another turbomolecular pump 10 is shown with a lateral tap.
  • the lateral tap defines a tap region 34 in which no stator disks 22 are arranged.
  • a pure rotor region 28 is provided, in which likewise no stator disks 22 are arranged.
  • a stator disk 22 is arranged between the first pair of rotor disks 16 in the pumping direction.
  • rotor disks 16 and stator disks 22 are provided in the alternating arrangement known per se.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Vakuumpumpe, insbesondere Turbomolekularpumpe, mit zumindest einem Rotor, der eine Rotorwelle und zumindest einen an der Rotorwelle angeordneten Rotorabschnitt aufweist, welcher eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Rotorschaufeln umfasst, und wenigstens einem dem Rotor zugeordneten Stator, der zumindest einen in axialer Richtung auf einen Rotorabschnitt folgenden Statorabschnitt mit einer Mehrzahl von in Umfangsrichtung verteilt angeordneten Statorschaufeln aufweist, wobei in einem axialen Bereich des Rotors, in den keine seitliche Anzapfung mündet, zumindest ein reiner Rotorbereich vorgesehen ist, in welchem wenigstens zwei Rotorabschnitte ohne dazwischenliegenden Statorabschnitt aufeinanderfolgen, und/oder zumindest ein reiner Statorbereich vorgesehen ist, in welchem wenigstens zwei Statorabschnitte ohne dazwischenliegenden Rotorabschnitt aufeinanderfolgen.Vacuum pump, in particular turbomolecular pump, having at least one rotor having a rotor shaft and at least one arranged on the rotor shaft rotor portion which comprises a plurality of circumferentially distributed rotor blades, and at least one stator associated with the rotor, at least one in the axial direction of a Rotor section following stator having a plurality of circumferentially distributed stator blades, wherein in an axial region of the rotor, in which no lateral tap opens, at least a pure rotor portion is provided in which at least two rotor sections follow each other without intervening stator, and / or at least a pure stator region is provided, in which at least two stator sections follow one another without an intermediate rotor section.

Description

Die vorliegende Erfindung betrifft eine Vakuumpumpe, insbesondere Turbomolekularpumpe.The present invention relates to a vacuum pump, in particular turbomolecular pump.

Eine beispielhafte Turbomolekular-Vakuumpumpe umfasst einen Rotor mit einer Rotorwelle, auf der mehrere Rotorscheiben axial versetzt angeordnet sind. Eine jeweilige Rotorscheibe weist eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Rotorschaufeln auf. Daneben umfasst die beispielhafte Turbomolekularpumpe einen Stator mit einer Mehrzahl von Statorscheiben, welche jeweils eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Statorschaufeln umfassen. Bei dieser beispielhaften Turbomolekular-Vakuumpumpe sind in axialer Richtung die Rotorscheiben und die Statorscheiben abwechselnd angeordnet.An exemplary turbomolecular vacuum pump comprises a rotor with a rotor shaft, on which a plurality of rotor disks are arranged offset axially. A respective rotor disk has a plurality of circumferentially distributed rotor blades. In addition, the exemplary turbomolecular pump comprises a stator with a plurality of stator disks, each of which comprises a plurality of circumferentially distributed stator blades. In this exemplary turbomolecular vacuum pump, the rotor disks and the stator disks are alternately arranged in the axial direction.

Die beispielhafte Turbomolekularpumpe besitzt bestimmte vakuumtechnische Leistungswerte, wie z.B. Saugvermögen und Kompressionsverhältnis, welche sich bei einer Solldrehzahl des Rotors einstellen. Kundenanforderungen bezüglich der vakuumtechnischen Leistungswerte können jedoch höchst unterschiedlich sein. In der Praxis werden daher für unterschiedliche Anforderungen viele verschiedene Vakuumpumpenmodelle vorgehalten oder eine Vakuumpumpe wird aufwändig konstruktiv an besondere Anforderungen angepasst oder sogar gezielt entsprechend entwickelt.The exemplary turbomolecular pump has certain vacuum performance values, such as e.g. Suction and compression ratio, which are set at a target speed of the rotor. However, customer requirements in terms of vacuum performance can vary greatly. In practice, therefore, many different vacuum pump models are maintained for different requirements, or a vacuum pump is elaborately designed to meet specific requirements or even specifically developed accordingly.

Es ist eine Aufgabe der Erfindung, unterschiedliche Anforderungen an eine Vakuumpumpe auf einfachem Wege zu erfüllen.It is an object of the invention to meet different requirements for a vacuum pump in a simple way.

Diese Aufgabe wird durch eine Vakuumpumpe gemäß Anspruch 1 gelöst, und insbesondere dadurch, dass in einem axialen Bereich des Rotors, in den keine seitliche Anzapfung mündet, zumindest ein reiner Rotorbereich vorgesehen ist, in welchem wenigstens zwei Rotorabschnitte ohne dazwischenliegenden Statorabschnitt aufeinanderfolgen, und/oder zumindest ein reiner Statorbereich vorgesehen ist, in welchem wenigstens zwei Statorabschnitte ohne dazwischenliegenden Rotorabschnitt aufeinanderfolgen.This object is achieved by a vacuum pump according to claim 1, and in particular by the fact that in an axial region of the rotor, in the no at least one pure rotor region is provided, in which at least two rotor sections succeed each other without an intermediate stator section, and / or at least one pure stator section is provided in which at least two stator sections follow one another without an intervening rotor section.

Jeweils einzelne oder mehrere Rotorabschnitte und/oder Statorabschnitte fehlen also gegenüber dem gewöhnlichen Aufbau einer Vakuumpumpe, bei dem Rotor-und Statorabschnitte in axialer Richtung abwechselnd angeordnet sind.In each case individual or multiple rotor sections and / or stator sections are thus lacking compared to the usual construction of a vacuum pump, in which rotor and stator sections are arranged alternately in the axial direction.

Mit anderen Worten können also erfindungsgemäß z.B. gegenüber einem nicht erfindungsgemäßen Pumpenaufbau jeweils ein oder mehrere Stator- bzw. Rotorabschnitte gezielt weggelassen werden.In other words, according to the invention, e.g. In each case one or more stator or rotor sections are intentionally omitted in relation to a pump structure not according to the invention.

Bei den Rotor- und Statorabschnitten handelt es sich insbesondere um so genannte Rotor- bzw. Statorscheiben, die jeweils eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Rotor- bzw. Statorschaufeln aufweisen und insofern eine Scheibenform aufweisen, als sie eine in axialer Richtung gemessene Höhe aufweisen, die kleiner und insbesondere wesentlich kleiner ist als deren Durchmesser. Die Rotor- und Statorabschnitte sind insbesondere stapelartig übereinander angeordnet, im Stand der Technik abwechselnd, d.h. auf eine Statorscheibe folgt eine Rotorscheibe und umgekehrt. In einer erfindungsgemäßen Ausführungsform dagegen kann also vorgesehen sein, dass in einem reinen Rotorbereich wenigstens zwei Rotorscheiben ohne dazwischenliegende Statorscheibe aufeinanderfolgen, während bei einem reinen Statorbereich wenigstens zwei Statorscheiben ohne dazwischenliegende Rotorscheibe aufeinanderfolgen.The rotor and stator sections are, in particular, so-called rotor or stator disks, each of which has a plurality of rotor blades or stator blades distributed in the circumferential direction and insofar have a disk shape in that they have a height measured in the axial direction, which is smaller and in particular much smaller than their diameter. The rotor and stator sections are in particular stacked one above the other, alternating in the prior art, i. a rotor disk follows a stator disk and vice versa. In an embodiment according to the invention, however, it can therefore be provided that in a pure rotor region at least two rotor disks follow one another without an intervening stator disk, while with a pure stator region at least two stator disks follow one another without an intervening rotor disk.

Zur weiteren Verdeutlichung wird von einer beispielhaften Turbomolekularpumpe mit abwechselnd angeordneten Rotor- und Statorabschnitten ausgegangen, wie sie für sich im Stand der Technik bekannt ist. Diese Turbomolekularpumpe besitzt bestimmte vakuumtechnische Leistungswerte. Stellen sich nun Anforderungen an die Turbomolekularpumpe, welche von den vakuumtechnischen Leistungswerten der Pumpe abweichen, beispielsweise geringer sind, werden lediglich einzelne oder mehrere Rotor- und/oder Statorabschnitte entfernt oder bei der Montage weggelassen. Dadurch werden die im Rahmen der Konstruktion der Turbomolekularpumpe möglichen Leistungswerte der Pumpe zwar verändert, z.B. verringert. Allerdings lassen sich dadurch auf sehr einfache Weise die Anforderungen erfüllen, während die Pumpe nicht konstruktiv verändert werden muss. Dies ermöglicht es, mit einem einzigen Pumpenmodell nicht nur eine bestimmte Leistungscharakteristik anzubieten, sondern auch eine Vielzahl unterschiedlicher Leistungscharakteristika mit demselben Pumpenmodell zu verwirklichen. In der Folge müssen weniger unterschiedliche Pumpenmodelle vorgehalten werden und weniger konstruktive Anpassungen der Pumpen an Kundenanforderungen durchgeführt werden, während unterschiedlichste Kundenanforderungen dennoch bedient werden können.For further clarification, an exemplary turbomolecular pump with alternately arranged rotor and stator sections is used, as is known per se in the prior art. This turbomolecular pump has certain vacuum technical performance values. If requirements now apply to the turbomolecular pump, which deviate from the vacuum-related performance values of the pump, for example are lower, only individual or several rotor and / or stator sections are removed or omitted during assembly. As a result, the power values of the pump which are possible within the framework of the design of the turbomolecular pump are indeed changed, for example reduced. However, this allows the requirements to be met in a very simple manner, while the pump does not have to be changed constructively. This makes it possible not only to offer a certain performance with a single pump model, but also to realize a variety of different performance characteristics with the same pump model. As a result, fewer different pump models need to be maintained and fewer structural adjustments of the pumps to customer requirements can be made, while still be able to serve a wide variety of customer requirements.

Sofern ein Statorabschnitt in der Vakuumpumpe neben seiner vakuumtechnischen Funktion auch strukturelle Aufgaben erfüllt, kann der Statorabschnitt durch ein Ersatzstück für die strukturellen Aufgaben, wie z.B. ein Abstandsstück, in dem reinen Rotorbereich ersetzt werden. Generell und insbesondere unabhängig von dem Vorhandensein oder Nichtvorhandensein eines Ersatzstücks kann zwischen den zwei Rotorabschnitten des reinen Rotorbereichs also ein axialer Abstand vorgesehen sein.If a stator section in the vacuum pump also fulfills structural tasks in addition to its vacuum-related function, the stator section may be replaced by a replacement part for the structural tasks, such as e.g. a spacer, are replaced in the pure rotor area. Generally and in particular independently of the presence or absence of a replacement piece, an axial spacing can therefore be provided between the two rotor sections of the pure rotor region.

Es versteht sich, dass die vorstehende wie auch die folgenden Weiterbildungen, welche lediglich für einen oder mehrere reine Rotorbereiche beschrieben sind, entsprechend für reine Statorbereiche anwendbar sind. Hierdurch wird die Variationsvielfalt weiter verbessert.It is understood that the above as well as the following further developments, which are described only for one or more pure rotor areas, are correspondingly applicable to pure stator areas. As a result, the variety of variations is further improved.

Die Vakuumpumpe weist bei einer Ausführungsform zumindest eine seitliche Anzapfung auf. Die seitliche Anzapfung ist von einem Einlass und einem Auslass der Vakuumpumpe verschieden. Die Erfindung kann bei dieser Ausführungsform gezielt eingesetzt werden, um die vakuumtechnischen Leistungswerte von Pumpenbereichen vor und hinter der Anzapfung individuell einzustellen. Insbesondere kann dadurch der erreichbare Druck in einer an die seitliche Anzapfung angeschlossenen Kammer, in welcher z.B. eine größere Restgasmenge zulässig oder erwünscht ist, gezielt eingestellt werden. Eine aufwändige konstruktive Änderung der Vakuumpumpe ist dabei nicht notwendig.In one embodiment, the vacuum pump has at least one lateral tap. The side tap is different from an inlet and an outlet of the vacuum pump. The invention can be used selectively in this embodiment in order to individually set the vacuum-related performance values of pump areas in front of and behind the tap. In particular, the achievable pressure in a chamber connected to the lateral tap, in which e.g. a larger amount of residual gas is allowed or desired, can be adjusted. A complex design change of the vacuum pump is not necessary.

Die seitliche Anzapfung kann in zumindest einem Bereich des Rotors vorgesehen sein. Alternativ oder zusätzlich kann die seitliche Anzapfung zwischen einem Einlass und einem Auslass der Vakuumpumpe angeordnet sein. Alternativ oder zusätzlich kann der reine Rotorbereich in axialer Richtung unmittelbar vor oder hinter der seitlichen Anzapfung oder nahe einer seitlichen Anzapfung angeordnet sein. Alternativ kann die Vakuumpumpe aber auch keine seitliche Anzapfung aufweisen.The lateral tap may be provided in at least a portion of the rotor. Alternatively or additionally, the lateral tap may be arranged between an inlet and an outlet of the vacuum pump. Alternatively or additionally, the pure rotor region can be arranged in the axial direction immediately before or behind the lateral tap or near a lateral tap. Alternatively, however, the vacuum pump can also have no lateral tap.

Bei einer Ausführungsform ist in axialer Richtung zwischen dem in Pumprichtung ersten und dem in Pumprichtung zweiten Rotorabschnitt ein Statorabschnitt angeordnet. Dadurch werden weiterhin gute vakuumtechnische Leistungswerte erreicht, während die Pumpe an unterschiedliche Anforderungen angepasst werden kann.In one embodiment, a stator section is arranged in the axial direction between the first rotor section in the pumping direction and the second rotor section in the pumping direction. As a result, good vacuum performance values are still achieved, while the pump can be adapted to different requirements.

Bei einer weiteren Ausführungsform sind die Rotorabschnitte jeweils durch eine separat von der Rotorwelle hergestellte und an der Rotorwelle befestigte Rotorscheibe gebildet. Mit anderen Worten kann es sich also um einen Scheibenrotor handeln. Alternativ kann ein Vollrotor vorgesehen sein, bei dem die Rotorabschnitte einstückig mit der Rotorwelle verbunden sind.In a further embodiment, the rotor sections are each formed by a rotor disk produced separately from the rotor shaft and fastened to the rotor shaft. In other words, it can therefore be a disk rotor. Alternatively, a solid rotor may be provided, in which the rotor sections are integrally connected to the rotor shaft.

Weitere Ausführungsformen sind in den abhängigen Ansprüchen, der Beschreibung und den Figuren angegeben.Further embodiments are given in the dependent claims, the description and the figures.

Die Erfindung wird nachfolgend lediglich beispielhaft unter Bezugnahme auf die Zeichnung erläutert.

Fig. 1
zeigt eine Turbomolekularpumpe mit einem reinen Rotorbereich und einem reinen Statorbereich.
Fig. 2
zeigt eine Turbomolekularpumpe mit einer seitlichen Anzapfung und einem reinen Rotorbereich.
Fig. 3
zeigt eine weitere Turbomolekularpumpe mit einer seitlichen Anzapfung und einem reinen Rotorbereich.
The invention will now be described by way of example only with reference to the drawings.
Fig. 1
shows a turbomolecular pump with a pure rotor area and a pure stator area.
Fig. 2
shows a turbomolecular pump with a side tap and a pure rotor area.
Fig. 3
shows another turbomolecular pump with a side tap and a pure rotor area.

Die in Fig. 1 gezeigte, als Turbomolekularpumpe 10 ausgebildete Vakuumpumpe umfasst einen von einem Einlassflansch 31 umgebenen Einlass 30 sowie mehrere Pumpstufen zur Förderung des an dem Einlass 30 anstehenden Gases zu einem Auslass. Der Auslass ist in Fig. 1 nicht dargestellt (vgl. aber z.B. den Auslass 32 der in Fig. 2 dargestellten Pumpe). Die Turbomolekularpumpe 10 weist keine seitliche Anzapfung auf. Die Turbomolekularpumpe 10 umfasst einen Stator mit einem statischen Gehäuse 36 und einen in dem Gehäuse 36 angeordneten Rotor 12 mit einer um eine Rotationsachse R drehbar gelagerten Rotorwelle 14.In the Fig. 1 The vacuum pump shown as a turbomolecular pump 10 comprises an inlet 30 surrounded by an inlet flange 31 and a plurality of pumping stages for conveying the gas present at the inlet 30 to an outlet. The outlet is in Fig. 1 not shown (but see, for example, the outlet 32 of in Fig. 2 illustrated pump). The turbomolecular pump 10 has no lateral tap. The turbomolecular pump 10 comprises a stator with a static housing 36 and a rotor 12 arranged in the housing 36 with a rotor shaft 14 rotatably mounted about a rotation axis R.

Die Turbomolekularpumpe 10 umfasst mehrere pumpwirksam miteinander in Serie geschaltete turbomolekulare Pumpstufen mit mehreren mit der Rotorwelle 14 verbundenen, als turbomolekulare Rotorscheiben 16 ausgebildeten Rotorabschnitten und mit mehreren in axialer Richtung zwischen den Rotorscheiben 16 angeordneten und in dem Gehäuse 36 festgelegten, als turbomolekulare Statorscheiben 22 ausgebildeten Statorabschnitten, die durch Distanzringe 40 in einem gewünschten axialen Abstand zueinander gehalten sind. Die Rotorscheiben 16 und Statorscheiben 22 stellen in einem Schöpfbereich eine in Pumprichtung P gerichtete axiale Pumpwirkung bereit.The turbomolecular pump 10 comprises a plurality of pump-connected with each other in series turbomolecular pumping stages with a plurality of connected to the rotor shaft 14, formed as a turbomolecular rotor disks 16 rotor sections and a plurality of axially between the rotor disks 16 and arranged in the housing 36, designed as a turbomolecular stator 22 stator sections by spacer rings 40 in a desired axial distance are held each other. The rotor disks 16 and stator disks 22 provide an axial pumping action directed in the pumping direction P in a scooping region.

Die Turbomolekularpumpe 10 umfasst zudem drei in radialer Richtung ineinander angeordnete und pumpwirksam miteinander in Serie geschaltete Holweck-Pumpstufen. Der rotorseitige Teil der Holweck-Pumpstufen umfasst zwei an der Rotorwelle 14 befestigte und von dieser getragene zylindermantelförmige Holweck-Rotorhülsen 46, 48, die koaxial zu der Rotationsachse R orientiert und ineinander geschachtelt sind. Ferner sind zwei zylindermantelförmige Holweck-Statorhülsen 50, 52 vorgesehen, die ebenfalls koaxial zu der Rotationsachse R orientiert und ineinander geschachtelt sind. Die pumpaktiven Oberflächen der Holweck-Pumpstufen sind jeweils durch die einander unter Ausbildung eines engen radialen HolweckSpalts gegenüberliegenden radialen Mantelflächen, nämlich jeweils einer Holweck-Rotorhülse 46, 48 und einer Holweck-Statorhülse 50, 52, gebildet. Dabei ist jeweils eine der pumpaktiven Oberflächen glatt ausgebildet, im vorliegenden Fall beispielsweise die der Holweck-Rotorhülse 46 bzw. 48, wobei die gegenüberliegende pumpaktive Oberfläche der jeweiligen Holweck-Statorhülse 50 bzw. 52 eine Strukturierung mit schraubenlinienförmig um die Rotationsachse R herum in axialer Richtung verlaufenden Nuten aufweist, in denen durch die Rotation des Rotors 12 das Gas vorangetrieben und dadurch gepumpt wird.The turbomolecular pump 10 also comprises three Holweck pump stages, which are arranged one inside the other in the radial direction and pump-connected with one another in series. The rotor-side part of the Holweck pump stages comprises two cylinder jacket-shaped Holweck rotor sleeves 46, 48 fastened to and carried by the rotor shaft 14, which are oriented coaxially with the axis of rotation R and are nested one inside the other. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 50, 52 are provided, which are also oriented coaxially to the rotation axis R and nested in one another. The pump-active surfaces of the Holweck pump stages are in each case formed by the radial lateral surfaces which lie opposite one another with the formation of a narrow radial Holweck gap, namely in each case a Holweck rotor sleeve 46, 48 and a Holweck stator sleeve 50, 52. In each case, one of the pump-active surfaces is smooth, in the present case, for example, the Holweck rotor sleeve 46 and 48, wherein the opposite pump-active surface of the respective Holweck stator 50 and 52 structuring with helical about the axis of rotation R around in the axial direction extending grooves, in which the gas is driven by the rotation of the rotor 12 and thereby pumped.

Die drehbare Lagerung der Rotorwelle 14 wird durch ein Wälzlager 54 im Bereich des Auslasses und ein Permanentmagnetlager 56 im Bereich des Einlasses 30 bewirkt.The rotatable mounting of the rotor shaft 14 is effected by a rolling bearing 54 in the region of the outlet and a permanent magnet bearing 56 in the region of the inlet 30.

Das Permanentmagnetlager 56 umfasst eine rotorseitige Lagerhälfte 60 und eine statorseitige Lagerhälfte 58, die jeweils einen Ringstapel aus mehreren in axialer Richtung aufeinander gestapelten permanentmagnetischen Ringen umfassen, wobei die Magnetringe unter Ausbildung eines radialen Lagerspalts einander gegenüberliegen.The permanent magnet bearing 56 comprises a rotor-side bearing half 60 and a stator-side bearing half 58, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings, wherein the magnetic rings facing each other with formation of a radial bearing gap.

Innerhalb des Permanentmagnetlagers 56 ist ein Not- oder Fanglager 62 vorgesehen, das als ungeschmiertes Wälzlager ausgebildet ist und im normalen Betrieb der Vakuumpumpe ohne Berührung leer läuft und erst bei einer übermäßigen radialen Auslenkung des Rotors 12 gegenüber dem Stator in Eingriff gelangt, um einen radialen Anschlag für den Rotor 12 zu bilden, der eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen verhindert.Within the permanent magnet bearing 56, an emergency or catch bearing 62 is provided, which is designed as an unlubricated rolling and idle in normal operation of the vacuum pump without touching and only with an excessive radial deflection of the rotor 12 with respect to the stator engages to a radial stop for the rotor 12, which prevents a collision of the rotor-side structures with the stator-side structures.

Im Bereich des Wälzlagers 54 ist an der Rotorwelle 14 eine konische Spritzmutter 64 mit einem zu dem Wälzlager 54 hin zunehmenden Außendurchmesser vorgesehen, die mit einem Abstreifer eines mehrere mit einem Betriebsmittel, wie z.B. einem Schmiermittel, getränkte saugfähige Scheiben 66 umfassenden Betriebsmittelspeichers in gleitendem Kontakt steht. Im Betrieb wird das Betriebsmittel durch kapillare Wirkung von dem Betriebsmittelspeicher über den Abstreifer auf die rotierende Spritzmutter 64 übertragen und infolge der Zentrifugalkraft entlang der Spritzmutter 64 in Richtung des größer werdenden Außendurchmessers der Spritzmutter 64 zu dem Wälzlager 54 hin gefördert, wo es z.B. eine schmierende Funktion erfüllt.In the region of the rolling bearing 54, a conical injection nut 64 is provided on the rotor shaft 14 with an outer diameter increasing towards the rolling bearing 54, which is provided with a scraper of a plurality with a working medium, such as e.g. a lubricant, soaked absorbent disks 66 in operative resource storage is in sliding contact. In operation, the resource is transferred by capillary action from the resource reservoir via the scraper to the rotating spray nut 64 and due to the centrifugal force along the spray nut 64 in the direction of increasing outer diameter of the spray nut 64 to the rolling bearing 54 promoted where it is e.g. fulfills a lubricating function.

Die Turbomolekularpumpe 10 umfasst einen Antriebsmotor 68 zum drehenden Antreiben des Rotors, dessen Läufer durch die Rotorwelle 14 gebildet ist. Eine nicht dargestellte Steuereinheit steuert den Antriebsmotor 68 an.The turbomolecular pump 10 includes a drive motor 68 for rotatably driving the rotor whose rotor is formed by the rotor shaft 14. A control unit, not shown, controls the drive motor 68.

Die Turbomolekulargruppe 10 der Fig. 1 umfasst einen reinen Rotorbereich 28 und einen reinen Statorbereich 29. In dem reinen Rotorbereich 28 folgen zwei Rotorscheiben 16 ohne dazwischenliegende Statorscheibe 22 aufeinander. Zwischen den Rotorscheiben 16 fehlt also eine Statorscheibe 22. Im reinen Statorbereich 29 folgen zwei Statorscheiben 22 ohne dazwischenliegende Rotorscheibe 16 aufeinander. Hier fehlt also entsprechend eine Rotorscheibe 16 zwischen den Statorscheiben 22. Die beiden Rotorscheiben 16 im reinen Rotorbereich 28 und die beiden Statorscheiben 22 im reinen Statorbereich 29 sind jeweils mit einem axialen Abstand voneinander angeordnet.The turbomolecular group 10 of Fig. 1 comprises a pure rotor region 28 and a pure stator region 29. In the pure rotor region 28, two rotor disks 16 follow each other without an intervening stator disk 22. Thus, a stator disk 22 is missing between the rotor disks 16. In the pure stator region 29, two stator disks 22 follow without an intervening rotor disk 16 on each other. Accordingly, here a rotor disk 16 between the stator disks 22 is missing. The two rotor disks 16 in the pure rotor region 28 and the two stator disks 22 in the pure stator region 29 are each arranged at an axial distance from one another.

Eine jeweilige Statorscheibe 22 ist in Form von zwei Halbringen ausgeführt, die von der Seite, also in radialer Richtung, zwischen die Rotorscheiben 16 gelegt werden können. Dabei werden die Statorscheiben 22 auf die Distanzringe 40 aufgelegt und durch diese getragen. Einzelne Statorscheiben 22 lassen sich dadurch besonders einfach entfernen oder weglassen, um die Turbomolekularpumpe 10 in ihren vakuumtechnischen Leistungswerten an bestimmte Anforderungen anzupassen.A respective stator disk 22 is designed in the form of two half-rings, which can be placed between the rotor disks 16 from the side, that is to say in the radial direction. The stator discs 22 are placed on the spacers 40 and supported by them. Individual stator disks 22 can thereby be removed or omitted particularly simply in order to adapt the turbomolecular pump 10 to specific requirements in terms of its vacuum-related performance.

In Fig. 2 ist eine weitere Turbomolekularpumpe 10 gezeigt, die jedoch eine seitliche Anzapfung 26 aufweist. Die seitliche Anzapfung 26 ist zum Anschluss einer zusätzlichen, nicht gezeigten Vakuumkammer vorgesehen, in der ein Vakuum von einer anderen Qualität eingestellt werden soll, als es in einer am Einlass 30 angeschlossenen Kammer der Fall ist. Die seitliche Anzapfung 26 definiert einen Anzapfungsbereich 34 des Rotors 12, in den die seitliche Anzapfung 26 mündet. In dem Anzapfungsbereich 34 sind keine Statorscheiben 22 angeordnet. Zwischen den Rotorscheiben 16, welche den Anzapfungsbereich begrenzen, ist ein großer axialer Abstand vorgesehen, der im Wesentlichen der axialen Erstreckung des Anzapfungsbereichs 34 entspricht. Der Anzapfungsbereich 34 ist also von pumpaktiven Elementen freigehalten.In Fig. 2 another turbomolecular pump 10 is shown, however, which has a lateral tap 26. The lateral tap 26 is provided for connection to an additional, not shown, vacuum chamber in which a vacuum of a different quality is to be set than is the case in a chamber connected to the inlet 30. The lateral tap 26 defines a tapping portion 34 of the rotor 12, in which the lateral tap 26 opens. In the tapping region 34, no stator disks 22 are arranged. Between the rotor disks 16, which delimit the tapping region, a large axial distance is provided, which corresponds essentially to the axial extent of the tapping region 34. The tapping region 34 is therefore kept free of pump-active elements.

Über die seitliche Anzapfung 26 in die Pumpe gelangendes Gas wird in Pumprichtung P - in Fig. 2 also nach unten - weitergepumpt und gelangt schließlich zu einem Auslass 32.Gas entering the pump via the lateral tap 26 is pumped in the pumping direction P - in Fig. 2 So down - pumped further and finally reaches an outlet 32.

Außerhalb des Anzapfungsbereichs 34 ist ein reiner Rotorbereich 28 in einem axialen Bereich des Rotors 12 vorgesehen, in den keine seitliche Anzapfung mündet. Der reine Rotorbereich 28 umfasst hier drei aufeinanderfolgende Rotorscheiben 16 ohne dazwischenliegende Statorscheiben 22. Der reine Rotorbereich 28 ist in Pumprichtung P unmittelbar vor dem Anzapfungsbereich 34 angeordnet. Außerdem ist in Pumprichtung P zwischen der ersten Rotorscheibe 16 und der zweiten Rotorscheibe 16 eine Statorscheibe 22 angeordnet. In Pumprichtung P unmittelbar hinter dem Anzapfungsbereich 34 weist die Turbomolekularpumpe 10 in axialer Richtung abwechselnd angeordnete Rotorscheiben 16 und Statorscheiben 22 auf.Outside the tapping region 34, a pure rotor region 28 is provided in an axial region of the rotor 12 into which no lateral tapping opens. The pure rotor region 28 here comprises three successive rotor disks 16 without intermediate stator disks 22. The pure rotor region 28 is arranged in the pumping direction P immediately before the tapping region 34. In addition, in the pumping direction P, a stator disk 22 is arranged between the first rotor disk 16 and the second rotor disk 16. In the pumping direction P immediately behind the tapping region 34, the turbomolecular pump 10 has alternately arranged rotor disks 16 and stator disks 22 in the axial direction.

In Fig. 3 ist eine weitere Turbomolekularpumpe 10 mit einer seitlichen Anzapfung gezeigt. Die seitliche Anzapfung ist jedoch in der dargestellten Ansicht nicht sichtbar. Die seitliche Anzapfung definiert einen Anzapfungsbereich 34, in welchem keine Statorscheiben 22 angeordnet sind. In Pumprichtung unmittelbar vor dem Anzapfungsbereich 34 ist ein reiner Rotorbereich 28 vorgesehen, in dem ebenfalls keine Statorscheiben 22 angeordnet sind. Zwischen dem in Pumprichtung ersten Paar von Rotorscheiben 16 ist dagegen eine Statorscheibe 22 angeordnet. Unmittelbar hinter dem Anzapfungsbereich 34 sind Rotorscheiben 16 und Statorscheiben 22 in der an sich bekannten alternierenden Anordnung vorgesehen.In Fig. 3 another turbomolecular pump 10 is shown with a lateral tap. However, the lateral tap is not visible in the view shown. The lateral tap defines a tap region 34 in which no stator disks 22 are arranged. In the pumping direction immediately before the tapping region 34, a pure rotor region 28 is provided, in which likewise no stator disks 22 are arranged. In contrast, a stator disk 22 is arranged between the first pair of rotor disks 16 in the pumping direction. Immediately behind the tapping region 34, rotor disks 16 and stator disks 22 are provided in the alternating arrangement known per se.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

1010
TurbomolekularpumpeTurbo molecular pump
1212
Rotorrotor
1414
Rotorwellerotor shaft
1616
Rotorscheiberotor disc
1818
Rotorschaufelrotor blade
2222
Statorscheibestator
2424
Statorschaufelstator
2626
seitliche Anzapfunglateral tap
2828
reiner Rotorbereichpure rotor area
2929
reiner Statorbereichpure stator area
3030
Einlassinlet
3131
Einlassflanschinlet flange
3232
Auslassoutlet
3434
Anzapfungsbereichtapping range
3636
Gehäusecasing
4040
Distanzringspacer
4646
Holweck-RotorhülseHolweck rotor sleeve
4848
Holweck-RotorhülseHolweck rotor sleeve
5050
Holweck-StatorhülseHolweck stator
5252
Holweck-StatorhülseHolweck stator
5454
Wälzlagerroller bearing
5656
PermanentmagnetlagerPermanent magnetic bearings
5858
statorseitige Permanentmagnetlagerhälftestator-side permanent magnet half bearing
6060
rotorseitige PermanentmagnetlagerhälfteRotor-side permanent magnet half bearing
6262
Fanglagersafety bearing
6464
Spritzmutterspray mother
6666
saugfähige Scheibeabsorbent disc
6868
Antriebsmotordrive motor
PP
Pumprichtungpumping direction
RR
Rotationsachseaxis of rotation

Claims (8)

Vakuumpumpe (10), insbesondere Turbomolekularpumpe, mit
zumindest einem Rotor (12), der eine Rotorwelle (14) und zumindest einen an der Rotorwelle (14) angeordneten Rotorabschnitt (16) aufweist, welcher eine Mehrzahl von in Umfangsrichtung verteilt angeordneten Rotorschaufeln (18) umfasst, und
wenigstens einem dem Rotor (12) zugeordneten Stator, der zumindest einen in axialer Richtung auf einen Rotorabschnitt (16) folgenden Statorabschnitt (22) mit einer Mehrzahl von in Umfangsrichtung verteilt angeordneten Statorschaufeln (24) aufweist,
wobei in einem axialen Bereich des Rotors (12), in den keine seitliche Anzapfung (26) mündet, zumindest ein reiner Rotorbereich (28) vorgesehen ist, in welchem wenigstens zwei Rotorabschnitte (16) ohne dazwischenliegenden Statorabschnitt (22) aufeinanderfolgen, und/oder zumindest ein reiner Statorbereich (29) vorgesehen ist, in welchem wenigstens zwei Statorabschnitte (22) ohne dazwischenliegenden Rotorabschnitt (16) aufeinanderfolgen.Vacuum pump (10), in particular turbomolecular pump, with
at least one rotor (12) having a rotor shaft (14) and at least one rotor section (16) arranged on the rotor shaft (14) and comprising a plurality of circumferentially distributed rotor blades (18), and
at least one stator associated with the rotor (12), which has at least one stator section (22) following in the axial direction on a rotor section (16) with a plurality of stator blades (24) distributed in the circumferential direction,
wherein in an axial region of the rotor (12), in which no lateral tap (26) opens, at least one pure rotor portion (28) is provided, in which at least two rotor sections (16) without successive stator section (22) follow one another, and / or at least one pure stator region (29) is provided, in which at least two stator sections (22) follow one another without an intermediate rotor section (16). Vakuumpumpe (10) nach Anspruch 1,
dadurch gekennzeichnet, dass
zwischen den zwei Rotorabschnitten (16) des reinen Rotorbereichs (28) ein axialer Abstand vorgesehen ist.Vacuum pump (10) according to claim 1,
characterized in that
an axial distance is provided between the two rotor sections (16) of the pure rotor section (28). Vakuumpumpe (10) nach Anspruch 1 oder 2,
dadurch gekennzeichnet, dass
eine seitliche Anzapfung (26) in zumindest einem Bereich des Rotors vorgesehen ist.Vacuum pump (10) according to claim 1 or 2,
characterized in that
a lateral tap (26) is provided in at least a portion of the rotor. Vakuumpumpe (10) nach zumindest einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass
eine seitliche Anzapfung (26) zwischen einem Einlass (30) und einem Auslass (32) der Vakuumpumpe (10) angeordnet ist.Vacuum pump (10) according to at least one of the preceding claims,
characterized in that
a lateral tap (26) is disposed between an inlet (30) and an outlet (32) of the vacuum pump (10). Vakuumpumpe (10) nach zumindest einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass
der reine Rotorbereich (28) in axialer Richtung unmittelbar vor oder hinter einer seitlichen Anzapfung (26) oder nahe einer seitlichen Anzapfung (26) angeordnet ist.Vacuum pump (10) according to at least one of the preceding claims,
characterized in that
the pure rotor region (28) is arranged in the axial direction immediately before or behind a lateral tap (26) or near a lateral tap (26). Vakuumpumpe (10) nach Anspruch 1 oder 2,
dadurch gekennzeichnet, dass
die Vakuumpumpe (10) keine seitliche Anzapfung aufweist.Vacuum pump (10) according to claim 1 or 2,
characterized in that
the vacuum pump (10) has no lateral tap. Vakuumpumpe (10) nach zumindest einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass
in axialer Richtung zwischen dem in Pumprichtung (P) ersten und dem in Pumprichtung (P) zweiten Rotorabschnitt (16) ein Statorabschnitt (22) angeordnet ist.Vacuum pump (10) according to at least one of the preceding claims,
characterized in that
A stator section (22) is arranged in the axial direction between the first rotor section (16) in the pumping direction (P) and the second pump section (P) in the pumping direction (P). Vakuumpumpe (10) nach zumindest einem der vorstehenden Ansprüche,
dadurch gekennzeichnet, dass
die Rotorabschnitte (16) jeweils durch eine separat von der Rotorwelle (14) hergestellte und an der Rotorwelle (14) befestigte Rotorscheibe gebildet sind.Vacuum pump (10) according to at least one of the preceding claims,
characterized in that
the rotor sections (16) are each formed by a rotor disk produced separately from the rotor shaft (14) and fastened to the rotor shaft (14).
EP15177253.0A 2014-12-08 2015-07-17 Vacuum pump Active EP3032106B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP15177253.0A EP3032106B1 (en) 2014-12-08 2015-07-17 Vacuum pump
JP2015238692A JP6138897B2 (en) 2014-12-08 2015-12-07 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014118083.6A DE102014118083A1 (en) 2014-12-08 2014-12-08 TURBO MOLECULAR PUMP
EP15177253.0A EP3032106B1 (en) 2014-12-08 2015-07-17 Vacuum pump

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EP3032106B1 EP3032106B1 (en) 2020-02-12

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4293232A1 (en) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pump

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (en) * 1959-12-17
JPH09303288A (en) * 1996-05-16 1997-11-25 Daikin Ind Ltd Turbo-molecular pump blade
EP1201928A2 (en) * 2000-10-24 2002-05-02 Pfeiffer Vacuum GmbH Disks for a turbo molecular pump
WO2005033521A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump
EP1850011A2 (en) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor or stator disc for a molecular pump
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03237295A (en) * 1990-02-09 1991-10-23 Shimadzu Corp Turbo-molecular pump
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (en) * 1959-12-17
JPH09303288A (en) * 1996-05-16 1997-11-25 Daikin Ind Ltd Turbo-molecular pump blade
EP1201928A2 (en) * 2000-10-24 2002-05-02 Pfeiffer Vacuum GmbH Disks for a turbo molecular pump
WO2005033521A1 (en) * 2003-09-30 2005-04-14 The Boc Group Plc Vacuum pump
EP1850011A2 (en) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor or stator disc for a molecular pump
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4293232A1 (en) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pump

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JP6138897B2 (en) 2017-05-31
EP3032106B1 (en) 2020-02-12

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