EP1252445B1 - Turbomolecular pump - Google Patents

Turbomolecular pump Download PDF

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Publication number
EP1252445B1
EP1252445B1 EP01909681A EP01909681A EP1252445B1 EP 1252445 B1 EP1252445 B1 EP 1252445B1 EP 01909681 A EP01909681 A EP 01909681A EP 01909681 A EP01909681 A EP 01909681A EP 1252445 B1 EP1252445 B1 EP 1252445B1
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EP
European Patent Office
Prior art keywords
pump
pump according
blades
radially
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP01909681A
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German (de)
French (fr)
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EP1252445A1 (en
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
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Publication of EP1252445A1 publication Critical patent/EP1252445A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a turbomolecular pump having the features of the preamble of patent claim 1.
  • Turbomolekularvakuumpumpen are for example from the WO 94/00694 known. They are designed in the manner of a turbine with rotor and Statorschaufelschschsch. Stator and rotor extend substantially cylindrical and are arranged coaxially to the axis of rotation of the rotating component. The longitudinal axes of the alternately intermeshing stator and rotor blades extend radially, so that there is a substantially axially directed conveying direction. One or more pairs of a rotor blade row and a stator blade row form a pump stage. The adjustment of the conveying properties of a pumping stage (pumping speed, compression) via the formation of the blades, preferably on the angle of attack.
  • turbomolecular vacuum pumps of the type described, a minimum number of pumping stages can not be undercut. As a result, they build relatively long, especially since the drive motor still increases the axial length.
  • turbomolecular pump with the features of the preamble of claim 1 is known.
  • Your rotor and stator components are designed and arranged such that the gases are conveyed in the radial direction from outside to inside.
  • a turbomolecular pump of this type has the advantages that its axial length (without drive motor) does not significantly exceed the stator and rotor vanes and that the rotor and stator together with their respective vanes can be integrally formed because the intermeshing vanes are no longer radially but extend axially.
  • the present invention has for its object to further improve a turbomolecular pump with the features of the preamble of claim 1 in terms of their efficiency.
  • Vacuum pumps of the type concerned here are preferably operated so that the delivery chamber decreases in the conveying direction of the gases.
  • the decrease in the axial height of the delivery chamber is connected to a further, not only by the flow direction of the gases from the outside inward-related decrease in the delivery volume in the conveying direction, whereby the set goal of improving the efficiency of the pump is achieved.
  • blade disks described can be made by cutting and EDM machines. Both techniques are relatively inexpensive. With the achievable reduction in the variety of parts, the invention is a real alternative to meet today's price pressure.
  • FIG. 1 shows that in the embodiments of a friction pump 1 according to the invention, the longitudinal axes of the blades 2, 3 extend parallel to the axis of rotation 4 of the rotating component. They are arranged in concentric rows about the axis of rotation 4. The rows of rotor blades 2 and the rows of stator blades 3 alternate. They interlock and have in a conventional manner in the flow direction (arrow 16) changing angles of attack.
  • FIGS. 2 to 4 show that the blades 2, 3 are components of rotating or stationary carriers 6 and 7, respectively.
  • the rotating support 6 and the fixed support 7 have the shape of a disc.
  • the blade-side surface of the stator disk 7 is designed conically in such a way that the distance between the two disks 6, 7 decreases from outside to inside. The length of the blades 2, 3 decreases from outside to inside.
  • the fixed support 7 has the shape of a funnel, so that the distance between the supports 6 and 7 decreases from inside to outside.
  • the length of the blades 2, 3 is adapted to this change in distance.
  • FIG. 4 also shows that the stationary carrier 7 is part of a housing 8 of the pump 1. It consists of the carrier 7 with a connecting piece 9 and of a flat, cup-shaped housing part 11, which is flanged with its edge on the carrier 7.
  • the bottom 12 of the housing part 11 extends parallel to the rotor disk 6. It carries the drive motor 13, whose shaft 14 passes through an opening in the bottom 12 and is coupled to the rotor disk 6.
  • a further connection piece 15 is provided on the housing part 12.
  • Vacuum pumps are preferably operated so that the delivery chamber decreases in the conveying direction of the gases.
  • This property have friction pumps 1 according to the invention already when the gases are conveyed from the outside to the inside (compare the arrows 16 shown in FIGS.
  • the formation of the fixed support 7 according to FIG. 3 further enhances this property.
  • the width of the blades 2, 3 can also decrease from the outside to the inside (cf., in particular, FIG.
  • FIG. 4 An example of a friction pump 1 operated in this way is shown in FIG. 4 (arrows 18).
  • the connecting flange 9 forms the inlet, the connecting flange 15, the outlet of the pump.
  • a change in the delivery chamber in the direction of the required gases is influenced by the fact that the distance of the carrier 6, 7 and thus the length of the blades 2, 3 decreases from the inside to the outside.
  • FIGS. 5 and 6 show a dual-flow design of a friction pump 1.
  • An inner group of blade rows conveys the gases radially outwardly (arrows 21), an outer group of blade rows from outside to inside (arrows 22).
  • the connecting pieces 9 and 15 are inlet nozzles.
  • the stator 7 is equipped with a connecting piece 23 which has the function of an outlet.
  • By reversing the direction of rotation results in a further configuration (1 intake manifold, 2 outlet), as it can be used for leak detector with countercurrent principle.
  • a plurality of radially conveying pump stages are located axially one above the other in the housing 8.
  • the rotating system comprises two rotor disks 6, each of which carries rotor blades 2 on both sides.
  • the housing 8 and a housing-fixed carrier 25, which is located between the two rotor disks 6, carry corresponding stator blades 3.
  • Dotted arrows 27 show that the connecting piece 9 has the function of an inlet and that the subsequent, radially compressing stages (four in all) convey alternately from inside to outside and from outside to inside.
  • the outlet is designated 26. It lies inside and surrounds the drive shaft 14, so that in this area sealing means are not required.
  • Figure 8 shows one way in which a radially compressing friction pump 1 can be combined with an axially compressing friction pump 31 of the prior art.
  • the friction pump 31 consists of a suction side arranged Turbomolkularpumpencare 32 and a pressure side arranged Molekularpumptreatment 33, the Holweckpumpe (as shown) or may be designed as Gaede-, Siegbahn-, Engtractors- or side channel pump.
  • the friction pumps 1 and 31 are located in a common, approximately cylindrical housing 35 with lateral inlet 36.
  • a mounted on both ends (bearing 37, 38) shaft 39 carries the respective rotating components of the pump stages (rotor disk 6 of the radially compressing pump 1, rotor 41 of the turbomolecular pumping stage 32, cylinder 42 of the Holweckpumpch 33).
  • the lateral inlet 36 of the combined pump opens between the radially compressing pumping stage 1 and the axially compressing pump 31.
  • the outlet 44 of the combined pump is located on the pressure side of the molecular pumping stage 33.
  • the arrows 45 and 46 show that the radially compressing pumping stage 1 sucks the gases to be delivered in the region of their periphery and the axially compressing pump 31 - as usual - in the region of their high vacuum side.
  • the pumped from the pump stage 1 gases pass through a bypass 47 directly to the suction side of Holweckpumpch 33rd
  • the peculiarity of the solution according to FIG. 8 is that the drive motor 48 is located on the high-vacuum side of the axially conveying pump 31 (and not, as usual, on the pressure side of the Holweck pumping stage 33). Characterized in that the radially compressing pumping stage 1 is located between the inlet 36 and the drive motor 48, a relatively high pressure can be maintained in the engine compartment 49 (eg 1 x 10 -2 mbar). The usage high vacuum suitable materials in the engine compartment 49 is not required. In addition, the radially promoting pumping stage 1 supports the delivery rate of the turbomolecular pumping stage 32, without thereby significantly increasing the overall length of the pump 31.
  • FIGS. 9 to 11 show embodiments of combined friction pumps for use in multi-chamber systems, here two-chamber systems. These are e.g. analyzers with multiple chambers that need to be evacuated to different pressures. As a result, the distance of the intake is predetermined, which often leads in the prior art that relatively long, cantilevered rotor systems are required, requiring complex storage systems.
  • All embodiments according to FIGS. 9 to 11 have two lateral inlets 36, 36 '. They are separated from each other by at least one radially compressing pumping stage 1.
  • the inlet 36 "sees” respectively, as in the embodiment according to FIG. 8, the inlet regions of an axially conveying friction pump 31 and a friction pump 1 which conveys radially from the outside to the inside.
  • the outlet of the radially conveying pump 1 opens into the inlet region of a second turbomolecular pump stage 32 ', to which the second inlet 36' is connected.
  • the pump 1 causes the pressure at the inlet 36 to be lower than at the inlet 36 '.
  • On the pressure side of the turbomolecular pump stage 32 ' is the drive motor 48.
  • This pressure side is connected via the bypass 47 with the suction side of the molecular pumping stage 33.
  • a further axially compressing friction pump 1' can be provided to separate the inlets 36, 36 '(FIG. 10). It promotes a partial flow of the gases entering the inlet 36 '.
  • the outlets of the two friction pumps 1 and 1 ' communicate with the bypass 47.

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung bezieht sich auf eine Turbomolekularpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a turbomolecular pump having the features of the preamble of patent claim 1.

Turbomolekularvakuumpumpen sind beispielsweise aus der WO 94/00694 bekannt. Sie sind nach Art einer Turbine mit Rotor- und Statorschaufelreihen ausgebildet. Stator und Rotor erstrecken sich im wesentlichen zylindrisch und sind koaxial zur Drehachse des rotierenden Bauteils angeordnet. Die Längsachsen der abwechselnd ineinander greifenden Stator- und Rotorschaufeln erstrecken sich radial, so dass sich eine im wesentlichen axial gerichtete Förderrichtung ergibt. Ein oder mehrere Paare einer Rotorschaufelreihe und einer Statorschaufelreihe bilden eine Pumpstufe. Die Einstellung der Fördereigenschaften einer Pumpstufe (Saugvermögen, Kompression) erfolgt über die Ausbildung der Schaufeln, vorzugsweise über deren Anstellwinkel.Turbomolekularvakuumpumpen are for example from the WO 94/00694 known. They are designed in the manner of a turbine with rotor and Statorschaufelreihen. Stator and rotor extend substantially cylindrical and are arranged coaxially to the axis of rotation of the rotating component. The longitudinal axes of the alternately intermeshing stator and rotor blades extend radially, so that there is a substantially axially directed conveying direction. One or more pairs of a rotor blade row and a stator blade row form a pump stage. The adjustment of the conveying properties of a pumping stage (pumping speed, compression) via the formation of the blades, preferably on the angle of attack.

Bei Turbomolekularvakuumpumpen der geschilderten Art kann eine Mindestanzahl von Pumpstufen nicht unterschritten werden. Dadurch bauen sie relativ lang, zumal der Antriebsmotor die axiale Länge noch erhöht. Außerdem kann nur ein Bauteil - üblicherweise der Rotor - einteilig ausgebildet sein, während das andere Bauteil - üblicherweise der Stator - aus einer Mehrzahl von Teilen bestehen muss, um die ineinander greifenden Schaufelreihen montieren zu können.In turbomolecular vacuum pumps of the type described, a minimum number of pumping stages can not be undercut. As a result, they build relatively long, especially since the drive motor still increases the axial length. In addition, only one component - usually the rotor - be formed in one piece, while the other component - usually the stator - must consist of a plurality of parts in order to mount the interlocking blade rows can.

Aus der DD 107 118 A ist eine Turbomolekularpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 bekannt. Ihre Rotor- und Statorbauteile sind derart ausgebildet und angeordnet, dass die Gase in radialer Richtung von außen nach innen gefördert werden. Eine Turbomolekularpumpe dieser Art hat die Vorteile, dass ihre axiale Länge (ohne Antriebsmotor) die Länder der Stator- und Rotorschaufeln nicht wesentlich übersteigt und dass Rotor und Stator zusammen mit ihren jeweiligen Schaufeln einteilig ausgebildet sein können, da sich die ineinander greifenden Schaufeln nicht mehr radial sondern axial erstrecken.From the DD 107 118 A is a turbomolecular pump with the features of the preamble of claim 1 is known. Your rotor and stator components are designed and arranged such that the gases are conveyed in the radial direction from outside to inside. A turbomolecular pump of this type has the advantages that its axial length (without drive motor) does not significantly exceed the stator and rotor vanes and that the rotor and stator together with their respective vanes can be integrally formed because the intermeshing vanes are no longer radially but extend axially.

Die CH 235 192 A sowie die GB 479 425 A aus den Jahren 1944 bzw. 1938 offenbaren Turbomaschinen mit axial gerichteten Schaufeln und radialer Förderrichtung, die im Überdruckbereich arbeiten. Dieses gilt auch für das in der FR-A-25 89 529 beschriebene System, das der Druckerhöhung von Gasen oder Flüssigkeiten dient.The CH 235 192 A as well as the GB 479 425 A from the years 1944 and 1938 disclosed turbomachinery with axially directed blades and radial conveying direction, which operate in the overpressure range. This also applies to the in the FR-A-25 89 529 described system which serves to increase the pressure of gases or liquids.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Turbomolekularpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1 in Bezug auf ihre Effizienz weiterhin zu verbessern.The present invention has for its object to further improve a turbomolecular pump with the features of the preamble of claim 1 in terms of their efficiency.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.According to the invention this object is achieved by the characterizing features of the claims.

Vakuumpumpen der hier betroffenen Art werden vorzugsweise so betrieben, dass der Förderraum in Förderrichtung der Gase abnimmt. Diese Eigenschaft haben Pumpen nach dem Stand der Technik bereits dadurch, dass die Gase von außen nach innen gefördert werden. Bei der erfindungsgemäßen Turbomolekularpumpe (Figur 3) nimmt darüber hinaus die Länge der Stator- und Rotorschaufeln - und damit die axiale Höhe des Förderraumes - von außen nach innen ab. Die Abnahme der axialen Höhe des Förderraumes ist verbunden mit einer weiteren, nicht nur durch die Strömungsrichtung der Gase von außen nach innen bedingte Abnahme des Fördervolumens in Förderrichtung, wodurch das gesetzte Ziel der Effizienz-Verbesserung der Pumpe erreicht wird.Vacuum pumps of the type concerned here are preferably operated so that the delivery chamber decreases in the conveying direction of the gases. This property, pumps according to the prior art already in that the gases are conveyed from outside to inside. In the case of the turbomolecular pump according to the invention (FIG. 3), moreover, the length of the stator and rotor blades-and thus the axial height of the delivery chamber-decreases from the outside to the inside. The decrease in the axial height of the delivery chamber is connected to a further, not only by the flow direction of the gases from the outside inward-related decrease in the delivery volume in the conveying direction, whereby the set goal of improving the efficiency of the pump is achieved.

Ein weiterer Vorteil besteht darin, dass die beschriebenen Flügelscheiben spanend durch Dreh- und Erodiermaschinen hergestellt werden können. Beide Techniken sind relativ preiswert. Mit der erzielbaren Reduzierung der Teilevielfalt ist die Erfindung eine echte Alternative, um dem heutigen Preisdruck zu begegnen.Another advantage is that the blade disks described can be made by cutting and EDM machines. Both techniques are relatively inexpensive. With the achievable reduction in the variety of parts, the invention is a real alternative to meet today's price pressure.

Zweckmäßig ist es weiterhin, bekannte, axial verdichtende Turbomolekularvakuumpumpen mit erfindungsgemäß gestalteten, radial verdichtenden Reibungsvakuumpumpen zu kombinieren. Pumpsysteme dieser Art ermöglichen es, den Antriebsmotor auf der Hochvakuumseite anzuordnen, ohne dass Motor und Lager aus hochvakuumtauglichen Werkstoffen bestehen müssen. Schließlich ergeben sich Vorteile bei der Lagerung des rotierenden Bauteils. Lange Rotoren benötigen insbesondere dann, wenn sie fliegend gelagert werden sollen, einen hohen Lageraufwand, der bei den relativ kurzen Rotoren bei Reibungsvakuumpumpen nach der Erfindung nicht mehr erforderlich ist.It is also expedient to combine known, axially compressing turbomolecular vacuum pumps with radially compressive friction vacuum pumps configured according to the invention. Pumping systems of this type make it possible to arrange the drive motor on the high-vacuum side, without the need for the engine and bearing to be made of highly vacuum-compatible materials. Finally, there are advantages in the storage of the rotating component. Long rotors require, in particular, if they are to be stored on the fly, a high storage costs, which is no longer required in the relatively short rotors in friction vacuum pumps according to the invention.

Weitere Vorteile und Einzelheiten sollen anhand von in den Figuren 1 bis 11 schematisch dargestellten Ausführungsbeispielen erläutert werden. Bei den Beispielen nach den Figuren 1, 3 und 7 handelt es sich um Ausführungen der Erfindung. Die Figuren 2, 4 bis 6 sowie 8 bis 11 zeigen Beispiele, die das Verständnis der Erfindung erleichtern sollen. Es zeigen

  • Figur 1 einen Radialschnitt durch die Flügel einer Reibungsvakuumpumpe nach der Erfindung,
  • Figuren 2 bis 4 Axialschnitte durch unterschiedliche Ausführungen,
  • Figuren 5 und 6 Schnitte durch eine zweiflutige Ausführung,
  • Figur 7 einen Schnitt durch eine mehrstufige Lösung,
  • Figur 8 eine Kombination einer radial fördernden Pumpstufe mit axial fördernden Reibungspumpenstufen sowie
  • Figuren 9 bis 11 kombinierte Reibungspumpen für Mehrkammersysteme.
Further advantages and details will be explained with reference to embodiments schematically illustrated in Figures 1 to 11. In the examples of Figures 1, 3 and 7 are embodiments of the invention. Figures 2, 4 to 6 and 8 to 11 show examples intended to facilitate the understanding of the invention. Show it
  • 1 shows a radial section through the wings of a friction vacuum pump according to the invention,
  • FIGS. 2 to 4 axial sections through different embodiments,
  • FIGS. 5 and 6 sections through a double-flow design,
  • FIG. 7 shows a section through a multi-stage solution,
  • FIG. 8 shows a combination of a radially pumping stage with axially conveying friction pump stages and FIG
  • Figures 9 to 11 combined friction pumps for multi-chamber systems.

Figur 1 zeigt, dass sich in den Ausführungsformen einer Reibungspumpe 1 nach der Erfindung die Längsachsen der Schaufeln 2, 3 parallel zur Drehachse 4 des rotierenden Bauteils erstrecken. Sie sind in konzentrischen Reihen um die Drehachse 4 angeordnet. Die Reihen der Rotorschaufeln 2 und die Reihen der Statorschaufeln 3 wechseln einander ab. Sie greifen ineinander und haben in an sich bekannter Weise in Strömungsrichtung (Pfeil 16) wechselnde Anstellwinkel.FIG. 1 shows that in the embodiments of a friction pump 1 according to the invention, the longitudinal axes of the blades 2, 3 extend parallel to the axis of rotation 4 of the rotating component. They are arranged in concentric rows about the axis of rotation 4. The rows of rotor blades 2 and the rows of stator blades 3 alternate. They interlock and have in a conventional manner in the flow direction (arrow 16) changing angles of attack.

Die Figuren 2 bis 4 zeigen, dass die Schaufeln 2, 3 Bestandteile von rotierenden bzw. feststehenden Trägern 6 bzw. 7 sind. Beim Ausführungsbeispiel nach Figur 2 haben der rotierende Träger 6 und der feststehende Träger 7 die Form einer Scheibe. Bei der Ausführung nach Figur 3 ist die schaufelseitige Oberfläche der Statorscheibe 7 derart konisch ausgebildet, dass der Abstand zwischen den beiden Scheiben 6, 7 von außen nach innen abnimmt. Auch die Länge der Schaufeln 2, 3 nimmt von außen nach innen ab.FIGS. 2 to 4 show that the blades 2, 3 are components of rotating or stationary carriers 6 and 7, respectively. In the embodiment of Figure 2, the rotating support 6 and the fixed support 7 have the shape of a disc. In the embodiment according to FIG. 3, the blade-side surface of the stator disk 7 is designed conically in such a way that the distance between the two disks 6, 7 decreases from outside to inside. The length of the blades 2, 3 decreases from outside to inside.

Bei der Ausführung nach Figur 4 hat der feststehende Träger 7 die Form eines Trichters, so dass der Abstand zwischen den Trägern 6 und 7 von innen nach außen abnimmt. Die Länge der Schaufeln 2, 3 ist dieser Abstandsänderung angepasst.In the embodiment of Figure 4, the fixed support 7 has the shape of a funnel, so that the distance between the supports 6 and 7 decreases from inside to outside. The length of the blades 2, 3 is adapted to this change in distance.

Figur 4 zeigt noch, dass der feststehende Träger 7 Bestandteil eines Gehäuses 8 der Pumpe 1 ist. Es besteht aus dem Träger 7 mit einem Anschlussstutzen 9 sowie aus einem flachen, topfförmig gestalteten Gehäuseteil 11, das mit seinem Rand am Träger 7 angeflanscht ist. Der Boden 12 des Gehäuseteils 11 erstreckt sich parallel zur Rotorscheibe 6. Er trägt den Antriebsmotor 13, dessen Welle 14 durch eine Öffnung im Boden 12 hindurchgreift und mit der Rotorscheibe 6 gekoppelt ist. Außerdem ist am Gehäuseteil 12 ein weiterer Anschlussstutzen 15 vorgesehen.FIG. 4 also shows that the stationary carrier 7 is part of a housing 8 of the pump 1. It consists of the carrier 7 with a connecting piece 9 and of a flat, cup-shaped housing part 11, which is flanged with its edge on the carrier 7. The bottom 12 of the housing part 11 extends parallel to the rotor disk 6. It carries the drive motor 13, whose shaft 14 passes through an opening in the bottom 12 and is coupled to the rotor disk 6. In addition, a further connection piece 15 is provided on the housing part 12.

Vakuumpumpen werden vorzugsweise so betrieben, dass der Förderraum in Förderrichtung der Gase abnimmt. Diese Eigenschaft haben Reibungspumpen 1 nach der Erfindung bereits dann, wenn die Gase von außen nach innen gefördert werden (vgl. die in den Figuren 1 bis 3 eingezeichneten Pfeile 16). Die Ausbildung des feststehenden Trägers 7 nach Figur 3 verstärkt noch diese Eigenschaft. Auch die Breite der Schaufeln 2, 3 kann von außen nach innen abnehmen (vgl. insbesondere Figur 1).Vacuum pumps are preferably operated so that the delivery chamber decreases in the conveying direction of the gases. This property have friction pumps 1 according to the invention already when the gases are conveyed from the outside to the inside (compare the arrows 16 shown in FIGS. The formation of the fixed support 7 according to FIG. 3 further enhances this property. The width of the blades 2, 3 can also decrease from the outside to the inside (cf., in particular, FIG.

Natürlich ist auch ein Betrieb der Reibungspumpen mit entgegengesetzter Förderrichtung möglich. Dazu muss lediglich die Drehrichtung des Rotors 6 umgekehrt werden. Ein Beispiel für eine in dieser Weise betriebene Reibungspumpe 1 zeigt Figur 4 (Pfeile 18). Der Anschlussflansch 9 bildet den Einlass, der Anschlussflansch 15 den Auslass der Pumpe. Auf eine Veränderung des Förderraumes in Richtung der geforderten Gase wird dadurch Einfluss genommen, dass der Abstand der Träger 6, 7 und damit der Länge der Schaufeln 2, 3 von innen nach außen abnimmt.Of course, an operation of the friction pumps with opposite conveying direction is possible. For this purpose, only the direction of rotation of the rotor 6 must be reversed. An example of a friction pump 1 operated in this way is shown in FIG. 4 (arrows 18). The connecting flange 9 forms the inlet, the connecting flange 15, the outlet of the pump. A change in the delivery chamber in the direction of the required gases is influenced by the fact that the distance of the carrier 6, 7 and thus the length of the blades 2, 3 decreases from the inside to the outside.

Die Figuren 5 und 6 zeigen eine zweiflutige Ausführung einer Reibungspumpe 1. Eine innere Gruppe von Schaufelreihen fördert die Gase radial nach außen (Pfeile 21), eine äußere Gruppe von Schaufelreihen von außen nach innen (Pfeile 22). Die Anschlussstutzen 9 und 15 sind Einlassstutzen. Zwischen den beiden Gruppen ist die Statorscheibe 7 mit einem Anschlussstutzen 23 ausgerüstet, der die Funktion eines Auslasses hat. Durch Umkehrung der Drehrichtung ergibt sich eine weitere Konfiguration (1 Ansaugstutzen, 2 Auslassstutzen), wie sie für Lecksucher mit Gegenstromprinzip genutzt werden kann. Schließlich besteht auch die Möglichkeit, die Reibungspumpe 1 nach der Erfindung mehrflutig auszubilden, d. h., mit mehreren Schaufelgruppen, die - verglichen mit ihren jeweils benachbarten Schaufelgruppen - entgegengesetzte Förderrichtung haben.FIGS. 5 and 6 show a dual-flow design of a friction pump 1. An inner group of blade rows conveys the gases radially outwardly (arrows 21), an outer group of blade rows from outside to inside (arrows 22). The connecting pieces 9 and 15 are inlet nozzles. Between the two groups, the stator 7 is equipped with a connecting piece 23 which has the function of an outlet. By reversing the direction of rotation results in a further configuration (1 intake manifold, 2 outlet), as it can be used for leak detector with countercurrent principle. Finally, there is also the possibility of the friction pump 1 according to the invention mehrflutig form, ie, with multiple blade groups, which - compared with their respective adjacent blade groups - have opposite conveying direction.

Beim Ausführungsbeispiel nach Figur 7 befinden sich im Gehäuse 8 mehrere radial fördernde Pumpstufen axial übereinander. Das rotierende System umfasst zwei Rotorscheiben 6, die jeweils auf beiden Seiten Rotorschaufeln 2 tragen. Das Gehäuse 8 und ein gehäusefester Träger 25, der sich zwischen den beiden Rotorscheiben 6 befindet, tragen korrespondierende Statorschaufeln 3.In the embodiment according to FIG. 7, a plurality of radially conveying pump stages are located axially one above the other in the housing 8. The rotating system comprises two rotor disks 6, each of which carries rotor blades 2 on both sides. The housing 8 and a housing-fixed carrier 25, which is located between the two rotor disks 6, carry corresponding stator blades 3.

Eingezeichnete Pfeile 27 zeigen, dass der Anschlussstutzen 9 die Funktion eines Einlasses hat und dass die sich anschließenden, radial komprimierenden Stufen (insgesamt vier) abwechselnd von innen nach außen und von außen nach innen fördern. Der Auslass ist mit 26 bezeichnet. Er liegt innen und umgibt die Antriebswelle 14, so dass in diesem Bereich Dichtmittel nicht erforderlich sind. Durch eine Anspassung der Schaufellängen vom Einlass zum Auslass (Abnahme) kann wieder Einfluss auf das Volumen des Förderraumes genommen werden.Dotted arrows 27 show that the connecting piece 9 has the function of an inlet and that the subsequent, radially compressing stages (four in all) convey alternately from inside to outside and from outside to inside. The outlet is designated 26. It lies inside and surrounds the drive shaft 14, so that in this area sealing means are not required. By adapting the blade lengths from the inlet to the outlet (decrease), it is possible again to influence the volume of the delivery chamber.

Figur 8 zeigt eine Möglichkeit, wie eine radial verdichtende Reibungspumpe 1 mit einer axial verdichtenden Reibungspumpe 31 nach dem Stand der Technik kombiniert werden kann. Die Reibungspumpe 31 besteht aus einer saugseitig angeordneten Turbomolkularpumpenstufe 32 und einer druckseitig angeordneten Molekularpumpstufe 33, die als Holweckpumpe (wie dargestellt) oder auch als Gaede-, Siegbahn-, Engländer- oder Seitenkanalpumpe ausgebildet sein kann.Figure 8 shows one way in which a radially compressing friction pump 1 can be combined with an axially compressing friction pump 31 of the prior art. The friction pump 31 consists of a suction side arranged Turbomolkularpumpenstufe 32 and a pressure side arranged Molekularpumpstufe 33, the Holweckpumpe (as shown) or may be designed as Gaede-, Siegbahn-, Engländer- or side channel pump.

Die Reibungspumpen 1 und 31 befinden sich in einem gemeinsamen, etwa zylindrischen Gehäuse 35 mit seitlichem Einlass 36. Eine auf beiden Stirnseiten gelagerte (Lager 37, 38) Welle 39 trägt die jeweils rotierenden Bauteile der Pumpstufen (Rotorscheibe 6 der radial verdichtenden Pumpe 1, Rotor 41 der Turbomolekularpumpstufe 32, Zylinder 42 der Holweckpumpstufe 33). Der seitliche Einlass 36 der kombinierten Pumpe mündet zwischen der radial verdichtenden Pumpstufe 1 und der axial verdichtenden Pumpe 31. Der Auslass 44 der kombinierten Pumpe befindet sich auf der Druckseite der Molekularpumpstufe 33.The friction pumps 1 and 31 are located in a common, approximately cylindrical housing 35 with lateral inlet 36. A mounted on both ends (bearing 37, 38) shaft 39 carries the respective rotating components of the pump stages (rotor disk 6 of the radially compressing pump 1, rotor 41 of the turbomolecular pumping stage 32, cylinder 42 of the Holweckpumpstufe 33). The lateral inlet 36 of the combined pump opens between the radially compressing pumping stage 1 and the axially compressing pump 31. The outlet 44 of the combined pump is located on the pressure side of the molecular pumping stage 33.

Die eingezeichneten Pfeile 45 und 46 zeigen, dass die radial verdichtende Pumpstufe 1 die zu fördernden Gase im Bereich ihrer Peripherie und die axial verdichtende Pumpe 31 - wie üblich - im Bereich ihrer Hochvakuumseite ansaugt. Die von der Pumpstufe 1 geförderten Gase gelangen über einen Bypass 47 unmittelbar zur Saugseite der Holweckpumpstufe 33.The arrows 45 and 46 show that the radially compressing pumping stage 1 sucks the gases to be delivered in the region of their periphery and the axially compressing pump 31 - as usual - in the region of their high vacuum side. The pumped from the pump stage 1 gases pass through a bypass 47 directly to the suction side of Holweckpumpstufe 33rd

Die Besonderheit der Lösung nach Figur 8 besteht darin, dass sich der Antriebsmotor 48 auf der Hochvakuumseite der axial fördernden Pumpe 31 befindet (und nicht wie üblich auf der Druckseite der Holweckpumpstufe 33). Dadurch, dass sich die radial verdichtende Pumpstufe 1 zwischen dem Einlass 36 und dem Antriebsmotor 48 befindet, kann im Motorraum 49 ein relativ hoher Druck aufrecht erhalten werden (z.B. 1 x 10-2 mbar). Die Verwendung hochvakuumtauglicher Werkstoffe im Motorraum 49 ist nicht erforderlich. Außerdem unterstützt die radial fördernde Pumpstufe 1 die Förderleistung der Turbomolekularpumpstufe 32, ohne dass sich damit die Baulänge der Pumpe 31 wesentlich vergrößert.The peculiarity of the solution according to FIG. 8 is that the drive motor 48 is located on the high-vacuum side of the axially conveying pump 31 (and not, as usual, on the pressure side of the Holweck pumping stage 33). Characterized in that the radially compressing pumping stage 1 is located between the inlet 36 and the drive motor 48, a relatively high pressure can be maintained in the engine compartment 49 (eg 1 x 10 -2 mbar). The usage high vacuum suitable materials in the engine compartment 49 is not required. In addition, the radially promoting pumping stage 1 supports the delivery rate of the turbomolecular pumping stage 32, without thereby significantly increasing the overall length of the pump 31.

Die Figuren 9 bis 11 zeigen Ausführungen von kombinierten Reibungspumpen für den Einsatz bei Mehrkammersystemen, hier Zweikammersystemen. Dabei handelt es sich z.B. um Analysengeräte mit mehreren Kammern, die auf unterschiedliche Drücke evakuiert werden müssen. Dadurch ist der Abstand der Ansaugstutzen vorgegeben, was beim Stand der Technik häufig dazu führt, dass relativ lange, fliegend gelagerte Rotorsysteme nötig sind, die aufwendige Lagersysteme erfordern.FIGS. 9 to 11 show embodiments of combined friction pumps for use in multi-chamber systems, here two-chamber systems. These are e.g. analyzers with multiple chambers that need to be evacuated to different pressures. As a result, the distance of the intake is predetermined, which often leads in the prior art that relatively long, cantilevered rotor systems are required, requiring complex storage systems.

Sämtliche Ausführungen nach den Figuren 9 bis 11 weisen zwei seitliche Einlässe 36, 36' auf. Sie sind durch mindestens eine radial verdichtende Pumpstufe 1 voneinander getrennt. Der Einlass 36 "sieht" jeweils, wie auch bei der Ausführung nach Figur 8, die Eintrittsbereiche einer axial fördernden Reibungspumpe 31 sowie einer radial von außen nach innen fördernden Reibungspumpe 1.All embodiments according to FIGS. 9 to 11 have two lateral inlets 36, 36 '. They are separated from each other by at least one radially compressing pumping stage 1. The inlet 36 "sees" respectively, as in the embodiment according to FIG. 8, the inlet regions of an axially conveying friction pump 31 and a friction pump 1 which conveys radially from the outside to the inside.

Bei der Ausführung nach Figur 9 mündet der Auslass der radial fördernden Pumpe 1 in den Einlassbereich einer zweiten Turbomolekularpumpenstufe 32', an den der zweite Einlass 36' angeschlossen ist. Die Pumpe 1 bewirkt, dass der Druck am Einlass 36 niedriger ist als am Einlass 36'. Auf der Druckseite der Turbomolekularpumpenstufe 32' befindet sich der Antriebsmotor 48.In the embodiment according to FIG. 9, the outlet of the radially conveying pump 1 opens into the inlet region of a second turbomolecular pump stage 32 ', to which the second inlet 36' is connected. The pump 1 causes the pressure at the inlet 36 to be lower than at the inlet 36 '. On the pressure side of the turbomolecular pump stage 32 'is the drive motor 48.

Diese Druckseite ist über den Bypass 47 mit der Saugseite der Molekularpumpstufe 33 verbunden.This pressure side is connected via the bypass 47 with the suction side of the molecular pumping stage 33.

Ist die Förderung eines Teilstromes vom Einlass 36 in den Bereich des Einlasses 36' unerwünscht, kann eine weitere axial verdichtende Reibungspumpe 1' zur Trennung der Einlässe 36, 36' vorgesehen sein (Figur 10). Sie fördert einen Teilstrom der in den Einlass 36' gelangenden Gase. Die Auslässe der beiden Reibungspumpen 1 und 1' stehen mit dem Bypass 47 in Verbindung.If the delivery of a partial flow from the inlet 36 into the region of the inlet 36 'is undesirable, a further axially compressing friction pump 1' can be provided to separate the inlets 36, 36 '(FIG. 10). It promotes a partial flow of the gases entering the inlet 36 '. The outlets of the two friction pumps 1 and 1 'communicate with the bypass 47.

Die Ausführung nach Figur 11 weist anstelle der Turbomolekularpumpstufe 32' eine weitere axial fördernde Reibungspumpe 1" auf. Diese Lösung kann eingesetzt werden, wenn die anfallende Gasmenge nicht hoch ist.11 has, instead of the turbomolecular pumping stage 32 ', a further axially conveying friction pump 1 "This solution can be used if the amount of gas produced is not high.

Bei den Ausführungen nach den Figuren 9 bis 11 sind jeweils zwei Hochvakuumpumpsysteme 32, 32' bzw. 1" mit jeweils einem Einlass 36 bzw. 36' vorgesehen. Die gewählte Anordnung lässt es zu, auch weitere Hochvakuumpumpsysteme auf der gemeinsamen Welle 39 anzuordnen und deren Einlässe jeweils durch radial fördernde Pumpstufen voneinander zu trennen. Über Bypässe können sowohl die jeweiligen Hochvakuumpumpstufen, in der Regel Turbomolekularpumpstufen, als auch die Auslässe der radial fördernden Pumpstufen mit einer gemeinsamen Molekularpumpstufe verbunden werden.9 to 11, two high-vacuum pumping systems 32, 32 'and 1 "are provided, each with an inlet 36 or 36', and the arrangement chosen permits the arrangement of further high-vacuum pumping systems on the common shaft 39 and their Inlets can each be separated from one another by radially pumping stages, and bypasses can be used to connect both the respective high-vacuum pump stages, generally turbomolecular pump stages, and the outlets of the radially pumping stages, to a common molecular pumping stage.

Die angeführten Beispiele zeigen, dass die Kombination und die Reihenfolge der Pumpstufen beliebig ist und den applikationsbedingten Begebenheiten angepasst werden können. Die Anordnung der Pumpstufen erlaubt kompakte Konstruktionen mit Lagern an beiden Wellenenden. Hierdurch lassen sich die wellen beliebig steif machen. Dies führt zu rotordynamisch unproblematischen Konstruktionen, die zu dem auch noch eine gute Wuchtcharakteristik haben. Dadurch, dass nahezu beliebig viele nach Art von Bauteilen eines Baukastensystems ausgebildete Stufen auf einer Welle angebracht werden können, lässt sich eine Hochvakuumpumpe, die gegen Atmosphäre verdichtet, leichter realisieren.The examples given show that the combination and the order of the pump stages are arbitrary and can be adapted to the application-related events. The arrangement of the pump stages allows compact Structures with bearings on both shaft ends. As a result, the waves can be made arbitrarily stiff. This leads to rotor dynamic unproblematic constructions, which also have a good balance of power. Due to the fact that almost any number of steps designed in the manner of components of a modular system can be mounted on a shaft, a high-vacuum pump that compresses against the atmosphere is easier to implement.

Claims (15)

  1. Turbomolecular vacuum pump (1) comprising a fixed element (7) bearing rows of stator blades and a rotating element (6) bearing rows of rotor blades, wherein the rows of stator and rotor blades are disposed concentrically with respect to the axis of rotation (4) of the rotating element (6) and engage with each other; the elements (6, 7) bearing the rows of rotor blades and stator blades extend substantially radially, the longitudinal exes of the blades (2, 3) extend substantially axially, so that the pump (1) has a substantially radial delivery direction; the flow through the pump is directed from the outside inwards; the pump (1) is characterised in that the length of the blades decreases from the outside inwards.
  2. Pump according to Claim 1, characterised in that the width of the blades decreases from the outside inwards.
  3. Pump according to Claim 1 or 2, characterised in that the elements (6, 7) bearing blades (2, 3) are of disc-shaped design.
  4. Pump according to any one of the preceding Claims, characterised in that the fixed element (7) bearing the stator blades (3) is a component part of a casing (8) of the pump (1).
  5. Pump according to any one of Claims 1 to 4, characterised in that a plurality of radially delivering pumping stages are arranged axially one after the other, and that the flow through the pumping stages is directed alternately from the inside outwards and from the outside inwards.
  6. Pump according to Claim 5, characterised in that rotating and/or fixed elements (6 and 7, respectively) bear rotor or stator blades (2 and 3, respectively) on both sides.
  7. Pump according to any one of the preceding Claims, characterised in that its outlet is arranged radially inside and encompasses a drive shaft (14) for the rotating elements (6).
  8. Pump according to any one of the preceding Claims, characterised in that it is combined with at least one further friction pump stage (31, 32, 32', 33).
  9. Pump according to Claim 8, characterised in that the further friction pump is either a molecular pump (33) or an axially delivering friction pump (31, 32, 32') in which the elements bearing rows of rotor and stator blades extend substantially axially and the longitudinal axes of the blades extend substantially radially.
  10. Pump according to Claim 8 or 9, characterised in that the rotating element (6) is arranged together with the rotating elements (41, 42) of the further friction pump stages on a shaft (39).
  11. Pump according to Claim 10, characterised in that it separates the high-vacuum side of a further friction pump (31) from the motor chamber (49) of a common drive motor (48).
  12. Pump according to Claim 9 or 10, characterised in that it has two or more high-vacuum pumping stages (32, 32') each with an inlet (36, 36'), and that the inlets are each separated from one another by at least one radially delivering pumping stage (1, 1') according to Claims 1 to 7.
  13. Pump according to Claim 12, characterised in that two high-vacuum pumping stages (32, 32') each with an inlet (36, 36') are provided, and that the inlet of the radial pumping stage (1) communicates with one (36) of the two inlets and its outlet communicates with the second (36') of the two inlets.
  14. Pump according to Claim 12, characterised in that two radially delivering pumping stages (1, 1') separate the inlets (36, 36') from each other.
  15. Pump according to Claim 12, characterised in that a common downstream molecular pumping stage (33) is provided for the high-vacuum pumping stages (32, 32') and for the radially delivering pumping stages (1, 1', 1").
EP01909681A 2000-02-01 2001-01-24 Turbomolecular pump Expired - Lifetime EP1252445B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10004271 2000-02-01
DE10004271A DE10004271A1 (en) 2000-02-01 2000-02-01 Friction vacuum pump has component parts supporting rotor and stator blade rows extending radially and longitudinal axes of blades extend axially, and medium flows through pump from outside inwards
PCT/EP2001/000726 WO2001057402A1 (en) 2000-02-01 2001-01-24 Friction vacuum pump

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EP1252445A1 EP1252445A1 (en) 2002-10-30
EP1252445B1 true EP1252445B1 (en) 2008-01-23

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EP01909681A Expired - Lifetime EP1252445B1 (en) 2000-02-01 2001-01-24 Turbomolecular pump

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US (1) US7011491B2 (en)
EP (1) EP1252445B1 (en)
JP (1) JP4819277B2 (en)
DE (2) DE10004271A1 (en)
WO (1) WO2001057402A1 (en)

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WO2001057402A1 (en) 2001-08-09
DE50113533D1 (en) 2008-03-13
EP1252445A1 (en) 2002-10-30
DE10004271A1 (en) 2001-08-02
US7011491B2 (en) 2006-03-14
US20040013514A1 (en) 2004-01-22
JP2003525379A (en) 2003-08-26
JP4819277B2 (en) 2011-11-24

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