JPS6314893U - - Google Patents

Info

Publication number
JPS6314893U
JPS6314893U JP10728586U JP10728586U JPS6314893U JP S6314893 U JPS6314893 U JP S6314893U JP 10728586 U JP10728586 U JP 10728586U JP 10728586 U JP10728586 U JP 10728586U JP S6314893 U JPS6314893 U JP S6314893U
Authority
JP
Japan
Prior art keywords
rotor blade
rotating shaft
turbo
large number
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10728586U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10728586U priority Critical patent/JPS6314893U/ja
Publication of JPS6314893U publication Critical patent/JPS6314893U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の中央縦断面図、第
２図はその要部の拡大断面図である。 ３……回転軸、５ａ……ロータ翼、５１……フ
イン、６……ケーシング、８ａ……ステータ翼、
８１……フイン、９，１１……リング。 FIG. 1 is a central vertical cross-sectional view of an embodiment of the present invention, and FIG. 2 is an enlarged cross-sectional view of the main parts thereof. 3...Rotating shaft, 5a...Rotor blade, 51...Fin, 6...Casing, 8a...Stator blade,
81...Fin, 9,11...Ring.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転軸側より放射状に設けられた多数のフイン
からなるロータ翼と、該ロータ翼を囲繞するケー
シング側から回転軸方向に突設された多数のフイ
ンからなるステータ翼とを備えたターボ分子ポン
プにおいて、前記ロータ翼の各周縁部を、各フイ
ンを相互に連結するリング形状に成したことを特
徴とするターボ分子ポンプ。 In a turbo-molecular pump equipped with a rotor blade consisting of a large number of fins provided radially from a rotating shaft side, and a stator blade consisting of a large number of fins protruding from a casing side surrounding the rotor blade in the rotating shaft direction. . A turbo-molecular pump, characterized in that each peripheral edge of the rotor blade is formed into a ring shape that interconnects each fin.
JP10728586U 1986-07-11 1986-07-11 Pending JPS6314893U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10728586U JPS6314893U (en) 1986-07-11 1986-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10728586U JPS6314893U (en) 1986-07-11 1986-07-11

Publications (1)

Publication Number Publication Date
JPS6314893U true JPS6314893U (en) 1988-01-30

Family

ID=30983426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10728586U Pending JPS6314893U (en) 1986-07-11 1986-07-11

Country Status (1)

Country Link
JP (1) JPS6314893U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007004542A1 (en) * 2005-07-01 2007-01-11 Boc Edwards Japan Limited Turbo molecular pump
JP2011510201A (en) * 2008-01-15 2011-03-31 オーリコン レイボルド バキューム ゲーエムベーハー Turbo molecular pump
EP2863063B1 (en) * 2013-10-15 2019-12-11 Pfeiffer Vacuum Gmbh Vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007004542A1 (en) * 2005-07-01 2007-01-11 Boc Edwards Japan Limited Turbo molecular pump
JP2011510201A (en) * 2008-01-15 2011-03-31 オーリコン レイボルド バキューム ゲーエムベーハー Turbo molecular pump
EP2863063B1 (en) * 2013-10-15 2019-12-11 Pfeiffer Vacuum Gmbh Vacuum pump

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