WO2008047461A1 - Moteur linéaire - Google Patents

Moteur linéaire Download PDF

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Publication number
WO2008047461A1
WO2008047461A1 PCT/JP2006/321445 JP2006321445W WO2008047461A1 WO 2008047461 A1 WO2008047461 A1 WO 2008047461A1 JP 2006321445 W JP2006321445 W JP 2006321445W WO 2008047461 A1 WO2008047461 A1 WO 2008047461A1
Authority
WO
WIPO (PCT)
Prior art keywords
side member
linear motor
scale
primary side
primary
Prior art date
Application number
PCT/JP2006/321445
Other languages
English (en)
Japanese (ja)
Inventor
Houng Joong Kim
Takafumi Koseki
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to PCT/JP2006/321445 priority Critical patent/WO2008047461A1/fr
Priority to JP2008539668A priority patent/JPWO2008047461A1/ja
Publication of WO2008047461A1 publication Critical patent/WO2008047461A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby

Definitions

  • the present invention relates to a linear motor in which a member having a magnetic material and a part having an armature coil : material are moved relative to each other.
  • Background Art '' Conventionally, when a relative gap occurs between the mover and the stator during the operation of the linear motor, the deterioration of the accuracy in detecting the relative position of the mover and the stator is suppressed. Is described in Japanese Patent Application Laid-Open No. 7-79111 (hereinafter referred to as document ⁇ ). "'
  • position detection means that detects the position of the pair of the mover and stator is placed at or around the center of the thrust, and the reading means is scaled even when there is an inclination between the mover and stator. By suppressing the deviation in the positional relationship with the scale, the scale can be read with high accuracy. However, even if the scale is read with high accuracy in the conventional linear motor described in Document 1, if the rigidity of the stator and mover is low, distortion occurs and the mover cannot be positioned with high accuracy. . Disclosure of the invention
  • An object of the present invention is to provide a linear motor capable of positioning a mover with high accuracy by increasing the rigidity of a member having a magnetic body and detecting the relative position of the mover and stator with high accuracy. To do.
  • the present invention comprises a primary member in which a plurality of magnetic bodies are arranged along the traveling direction;
  • a linear motor in which a plurality of electrical structures are arranged along the traveling direction .. and includes a secondary member, and the primary member and the secondary member move relatively, the primary member
  • a relative position detecting and detecting means for detecting a relative position of the primary side member and the secondary side member on the convex portion.
  • a secondary member having a plurality of armatures that constitute a closed magnetic circuit with a structure facing the front and back surfaces of the primary magnet having a number of permanent magnets arranged along the traveling direction and the permanent magnet of the primary member.
  • a linear motor in which the primary side member and the secondary side member move relative to each other.
  • a convex portion provided along the traveling direction on both front and back surfaces of the primary side member;
  • a relative position detecting means for detecting a relative position between the primary side member and the secondary side member.
  • positioned several magnetic bodies along the advancing direction and the secondary side member which has arrange
  • a convex formed on the primary side member along the traveling direction is less affected by a change in the relative angle between the primary side member and the secondary side member.
  • the convex portion is a linear motor formed on both front and back surfaces of the primary side member.
  • FIG. 1 shows a basic configuration diagram of a limouso according to Embodiment 1 of the present invention.
  • FIG. 2 shows a configuration diagram of the secondary member according to Embodiment 1 of the present invention.
  • FIG. 3 shows a first configuration diagram of the primary side member of the linear motor according to the first embodiment of the present invention.
  • FIG. 4 shows a second configuration diagram of the primary side member of the linear motor according to the embodiment 1 of the present invention. '
  • FIG. 5 shows a configuration diagram of the primary member and the scale reading sensor according to the first embodiment of the present invention.
  • 'FIG. 6 shows a second arrangement configuration diagram with the sensor for reading the scale of the side member according to the first embodiment of the present invention. .
  • FIG. 7 shows a third arrangement configuration diagram of the primary side member and the sensor for reading the scale according to the first embodiment of the present invention.
  • FIG. 8 shows a fourth arrangement configuration diagram of the primary side member and the sensor for reading the scale according to the first embodiment of the present invention.
  • FIG. 9 shows an overall configuration diagram of the primary side member and the secondary side member according to Embodiment 1 of the present invention.
  • FIG. 10 shows a block diagram of the primary side member in Embodiment 2 of the present invention.
  • FIG. 11 shows a basic configuration diagram of a linear motor according to Embodiment 3 of the present invention.
  • FIG. 12 shows a configuration diagram of the primary side member of the linear motor according to the third embodiment of the present invention.
  • FIG. 1 shows a basic configuration diagram of an embodiment of the present invention
  • the secondary member is composed of a ring-shaped core 1., an armature winding 3 and armature teeth 4.
  • the armature teeth 4 facing each other form a closed magnetic circuit.
  • the primary member 2 having a plurality of permanent magnets is arranged between the armature teeth 4 facing each other.
  • slit grooves 11 are formed on both of the armature teeth 4 facing each other.
  • Convex portions 2 that can run along the slit grooves 11 on the front and back surfaces of the permanent magnet of the primary member 2 1 is placed. By providing these convex portions on both the front and back surfaces of the primary member, the rigidity of the primary member can be increased. '
  • the convex part 2 1 on both sides of the permanent magnet 2 of the primary side member 2 has a scale for position detection means, 2 2 placed on it, and the sensor that reads this scale 2 2 on the secondary side member 1 2 Is provided.
  • this sensor 1.2 can be arranged between a plurality of armature teeth arranged in the traveling direction of the primary side member, it is not necessary to newly secure a space for the sensor 12.
  • the primary side member 2 includes guide rails 23 along the traveling direction, and a support mechanism 13 is arranged on the ring-shaped core 1 on the stator side in accordance with the guide rails 23.
  • a support method either a non-contact support method such as an air static pressure bearing or an oil hydrostatic bearing or a contact support method using a linear guide rail or the like may be used.
  • FIG. 2 shows a configuration diagram of the secondary side member according to the first embodiment of the present invention. As shown in Fig. 2, it has armature teeth that constitute closed magnetic paths opposite to each other.
  • the secondary side member is arranged so that a ring-shaped core 1a, a ring-shaped core 1a, and a ring-shaped core 1b adjacent to the ring-shaped core 1a have armature teeth that constitute closed magnetic paths opposite to each other. Composed. For this reason, the ring-shaped core is provided with through-holes 5 for fixing multiple ring-shaped cores.
  • the secondary member can be made from the ring-shaped core, improving productivity.
  • FIG. 3 shows a first configuration diagram of the primary side member of the linear motor according to the first embodiment of the present invention.
  • the primary side member 2 includes a plurality of permanent magnets 2 0; arranged in the traveling direction, and includes a protrusion .2 1 along the traveling direction on both sides of the next side member 2. It has a structure. Further, the convex portion 2 1 has a structure having a scale 2 '2 as a position detecting means.
  • the convex portion 21 may be disposed on both the front and back surfaces along the traveling direction through the center of thrust applied to the primary side member or the respect of the primary side member. Alternatively, it may be disposed along the direction of travel on both the front and back surfaces of the primary side member so as to be positioned at the center between the guide rails 23 and the center between the support mechanisms 13.
  • the convex portion having the scale at such a location, the relative position between the scale and the sensor is less likely to change when a relative inclination occurs between the primary member and the secondary member.
  • the center of thrust, the center of gravity, the center between the guide rails 2 and 3 and the center between the support mechanisms 1 and 3 do not mean a point, but a space with a certain three-dimensional extent. means.
  • FIG. 4 is a second configuration diagram of the primary side member of the linear motor according to the first embodiment of the present invention.
  • the primary member shown in Fig. 4 has a scale on the convex part 21 itself.
  • the primary side member may be manufactured by attaching scales and scales to the convex part 21, or the convex part 2 having the function of a scale as shown in IV. . 1 may be used for iron making.
  • FIG. 5 is a first arrangement configuration diagram of the sensor for reading the primary side member and the scale according to the first embodiment of the present invention.
  • the sensor 1 2 ' is fixed to the secondary member via a fixed gap in order to read the scale 2 2 placed on the primary member with high accuracy. It is.
  • the sensor 12 shown in Fig. 5 reads the scale by reading the reflected light of the light striking the scale 2 2.
  • FIG. 6 is a second arrangement configuration diagram of the primary side member and the sensor for reading the scale according to the first embodiment of the present invention.
  • the sensor 1 2 0 shown in FIG. 6 and the sensor 1 2 shown in FIG. 5 differ in the scale reading method.
  • the sensor 1 2 shown in Fig. 5 reads the scale by reading the reflected light of the light hitting the scale.
  • the sensor 1 2 0 shown in Fig. 6 is a scale formed by a fine diffraction grating.
  • the scale is read by detecting the phase change of the diffracted light that changes due to the movement of 2 20 using the interference of light. Therefore, although there is a difference that the sensor 1 2 0 needs to be arranged so as to cover the scale 2 2 0, either the sensor 1 2 0 or the sensor 1 2 may be used in the present invention.
  • FIG. 7 is a third arrangement configuration diagram of the primary side member and the sensor for reading the scale according to the first embodiment of the present invention.
  • Scale 2 2 arranged at the upper part of the primary side member in FIG. 7 has a smaller lattice spacing than scales 2 and 2 arranged at the lower part of the primary side member.
  • speed By reading the scale of the lattice spacing corresponding to, S which can contribute to refinement of speeding throat positioning of the motor '
  • a plurality of scales above is disposed on the convex portion of the front and rear surfaces of the primary member as shown in FIG. 7: may be, disposed on both sides of the convex portion arranged on one surface of the primary member May be.
  • FIG. 8 is a fourth arrangement and configuration diagram of the primary side member and the sensor for reading the scale according to Embodiment 1 of the present invention.
  • FIG. 9 is an overall configuration diagram of a primary side member and a secondary side member according to Embodiment 1 of the present invention.
  • the primary member 2 is configured to pass through each ring-shaped core 1 of the secondary member, and the sensor 12 is connected to the scale. It is fixedly held by the secondary member through a certain gap.
  • the sensor 12 is arranged at the end of the secondary member in FIG. 9, but may be arranged between a plurality of armature teeth constituting the secondary side member.
  • Embodiment 2 In Embodiment 1, the linear motor in which the scale for position detection is arranged on the side surface of the convex portion 21 of the primary member has been described, but in Embodiment 2, the convex portion 21 of the primary member is described. Let ’s talk about Liamamo, which distributes a scale for position detection at the top of the top.
  • FIG. 10 is a block diagram of the primary side member in Embodiment 2 of the present invention.
  • the width of the convex portion 21 is not less than a certain value.
  • the scale 2 2 will move away from the center of thrust, and the scale reading accuracy will be reduced.
  • the convex portion 21 needs to have an appropriate height in consideration of the reading accuracy of the secondary cross section of the primary member: / ⁇ and the scale.
  • the senor reads the scale disposed on the top of the convex portion 21 and is disposed on the secondary member so as to face the scale via the gap. Therefore, compared with Example 1, the sensor is arranged far from the permanent magnet and does not hinder efficient magnetic flux flow.
  • Example 3 Example 1 and Example 2 are embodiments in which one convex portion 21 is provided on each of the front and back surfaces of the primary side member.
  • the primary side member An embodiment in which two protrusions are provided on each of the front and back surfaces of the side member will be described.
  • FIG. 11 shows a basic configuration diagram of a linear motor according to a third embodiment of the present invention. As shown in Fig. 11, implementation [j 3 has almost the same configuration as Example 1, but the structure of armature tooth 4 ⁇ number and position of convex parts 2 ⁇ scale 2 2 and sensor 1 The position of 2 is different. -Binary staggered portions 21 are arranged on both the front and back surfaces of the primary side member 2. The scale 22 is placed between the convex portions, and a sensor for reading the scale is arranged on the secondary side member.
  • FIG. 12 shows a first configuration diagram of the primary side member of the linear motor according to the third embodiment of the present invention.
  • two convex portions 21 are arranged on both the front and back surfaces of the primary side member 2 ′, and the scale 22 is arranged between the convex portions.
  • the scale it is necessary to arrange the scale at the center of thrust acting on the primary side member 2, the center of gravity of the primary side member, the center between the guide rails 23, or the center between the support mechanisms 1 3. ;
  • the rigidity of the primary side member is improved, and the scale is described above for the primary side member. By placing it in a solid place, the reading accuracy of the scale can be further improved. With these effects, it is possible to realize a linear motor that enables highly accurate positioning. Furthermore, a primary side member having higher rigidity than the primary side member 2 of Example 1 or Example 2 can be realized.
  • the configuration using the permanent magnet right 'as the primary side member has been described, but the permanent magnet may be replaced with a magnetic material.
  • each of the above-described embodiments can be applied to a configuration in which either the primary side member or the secondary side member is a stator, and even in this case, it is possible to achieve precise positioning of the motor for the same reason as described above. It has the effect.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)

Abstract

l'invention concerne un moteur linéaire capable de résoudre un problème survenant dans des moteurs linéaires classiques du fait d'une précision insuffisante du positionnement d'un élément mobile. Ce moteur linéaire comprend un élément principal (2) sur lequel des aimants permanents sont placés le long d'une direction de déplacement vers l'avant et un élément auxiliaire sur lequel des induits sont placées le long de la direction de déplacement vers l'avant. L'élément principal (2) et l'élément auxiliaire se déplacent l'un par rapport à l'autre. Une projection (21) est formée sur chacune des surfaces avant et arrière de l'élément principal (2) le long de la direction de déplacement vers l'avant. Un organe de détection de position relative permettant de détecter les positions relatives de l'élément principal et de l'élément auxiliaire est prévu sur la projection (21). Dans ce moteur linéaire, la rigidité de l'élément principal est accrue et une échelle est lue de manière précise, l'élément mobile pouvant être placé de manière précise.
PCT/JP2006/321445 2006-10-20 2006-10-20 Moteur linéaire WO2008047461A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2006/321445 WO2008047461A1 (fr) 2006-10-20 2006-10-20 Moteur linéaire
JP2008539668A JPWO2008047461A1 (ja) 2006-10-20 2006-10-20 リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/321445 WO2008047461A1 (fr) 2006-10-20 2006-10-20 Moteur linéaire

Publications (1)

Publication Number Publication Date
WO2008047461A1 true WO2008047461A1 (fr) 2008-04-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/321445 WO2008047461A1 (fr) 2006-10-20 2006-10-20 Moteur linéaire

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JP (1) JPWO2008047461A1 (fr)
WO (1) WO2008047461A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110109190A1 (en) * 2009-11-09 2011-05-12 Yasuaki Aoyama Rotary electrical machine
US8884473B2 (en) 2008-11-18 2014-11-11 Hitachi Metals, Ltd. Mover, armature, and linear motor
WO2015146874A1 (fr) * 2014-03-28 2015-10-01 日立金属株式会社 Actionneur, élément mobile et induit

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH077911A (ja) * 1993-04-08 1995-01-10 Hitachi Metals Ltd 高精度リニアモータ
JPH08187646A (ja) * 1995-01-10 1996-07-23 Toshiba Mach Co Ltd 工作機械の位置決め装置
JP2001086728A (ja) * 1999-09-13 2001-03-30 Sankyo Seiki Mfg Co Ltd リニアモータ
JP2005337757A (ja) * 2004-05-24 2005-12-08 Fanuc Ltd 光学式エンコーダ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH077911A (ja) * 1993-04-08 1995-01-10 Hitachi Metals Ltd 高精度リニアモータ
JPH08187646A (ja) * 1995-01-10 1996-07-23 Toshiba Mach Co Ltd 工作機械の位置決め装置
JP2001086728A (ja) * 1999-09-13 2001-03-30 Sankyo Seiki Mfg Co Ltd リニアモータ
JP2005337757A (ja) * 2004-05-24 2005-12-08 Fanuc Ltd 光学式エンコーダ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8884473B2 (en) 2008-11-18 2014-11-11 Hitachi Metals, Ltd. Mover, armature, and linear motor
US20110109190A1 (en) * 2009-11-09 2011-05-12 Yasuaki Aoyama Rotary electrical machine
US8680739B2 (en) * 2009-11-09 2014-03-25 Hitachi, Ltd. Rotary electrical machine
WO2015146874A1 (fr) * 2014-03-28 2015-10-01 日立金属株式会社 Actionneur, élément mobile et induit
CN106165273A (zh) * 2014-03-28 2016-11-23 日立金属株式会社 致动器、动子和电枢
GB2539618A (en) * 2014-03-28 2016-12-21 Hitachi Metals Ltd Actuator, moving element, and armature
GB2539618B (en) * 2014-03-28 2021-02-10 Hitachi Metals Ltd Actuator, mover, and armature

Also Published As

Publication number Publication date
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