WO2005032211A1 - 超音波センサおよびその製造方法 - Google Patents
超音波センサおよびその製造方法 Download PDFInfo
- Publication number
- WO2005032211A1 WO2005032211A1 PCT/JP2004/008866 JP2004008866W WO2005032211A1 WO 2005032211 A1 WO2005032211 A1 WO 2005032211A1 JP 2004008866 W JP2004008866 W JP 2004008866W WO 2005032211 A1 WO2005032211 A1 WO 2005032211A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- metal
- piezoelectric vibrator
- ultrasonic sensor
- cylindrical case
- bottomed cylindrical
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 135
- 239000002184 metal Substances 0.000 claims abstract description 135
- 239000011347 resin Substances 0.000 claims abstract description 24
- 229920005989 resin Polymers 0.000 claims abstract description 24
- 238000005304 joining Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 6
- 238000005476 soldering Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
Definitions
- the present invention relates to an ultrasonic sensor used for an obstacle sensor such as a back sonar or a corner sonar of an automobile, and a method of manufacturing the same.
- An ultrasonic sensor performs sensing using ultrasonic waves.
- an ultrasonic pulse is intermittently transmitted from a piezoelectric vibrator, and a reflected wave from an object to be detected is received by the piezoelectric vibrator. The distance from the object to be detected is measured by the transmitted / received signal.
- Patent Document 1 listed below proposes an ultrasonic sensor having the following structure.
- the ultrasonic sensor has a bottomed cylindrical case, a piezoelectric vibrator disposed on the inner bottom of the bottomed cylindrical case, and is electrically connected to the piezoelectric vibrator. It has an input / output terminal that is drawn out of the bottom cylindrical case, and a cushioning material for suppressing reverberation waves.
- Patent Document 1 Japanese Patent Application Laid-Open No. 11-266498
- the ultrasonic sensor disclosed in Patent Document 1 is manufactured as follows.
- a piezoelectric vibrator is disposed on the inner bottom surface of a bottomed cylindrical case made of metal such as aluminum.
- the first main surface of the piezoelectric vibrator is soldered, conductive adhesive, or insulating It is fixed by an adhesive and is connected to external terminals by solder through a bottomed cylindrical case.
- the piezoelectric vibrator is connected to an external terminal using an electrode formed on the second main surface, a wire, and the like.
- the piezoelectric vibrator When the piezoelectric vibrator is fixed to the bottomed cylindrical case, the piezoelectric vibrator is held by tweezers or the like and adhered to the bottomed cylindrical case. As miniaturization progressed, it was difficult to hold the piezoelectric vibrator. At the time of bonding, a deviation from a predetermined position causes a distortion in the vibration, which tends to cause a characteristic variation such as a disturbance in the output waveform.
- the bottomed cylindrical case is made of metal such as aluminum, it is necessary to use a special solder material for soldering, and it is necessary to perform a pretreatment on the bottomed cylindrical case. Furthermore, it has a structure that is difficult to automate, so that manufacturing costs have to be high.
- a piezoelectric vibrator having electrodes formed on first and second main surfaces, a bottomed cylindrical case for housing the piezoelectric vibrator, and a bottomed cylindrical case for housing the piezoelectric vibrator
- An ultrasonic sensor including a first metal terminal and a second metal terminal electrically connected to the piezoelectric vibrator, wherein the first main surface of the piezoelectric vibrator and a bottomed cylindrical case are provided.
- a metal flat portion is provided between the inner bottom portions of the piezoelectric vibrator, and the metal flat portion is integrated with the first metal terminal and electrically connected to the electrode on the first main surface side of the piezoelectric vibrator.
- An ultrasonic sensor is provided, wherein one end of the second metal terminal is electrically connected to an electrode on the second main surface side of the piezoelectric vibrator.
- the bottomed cylindrical case is filled with a resin.
- the first main surface of the piezoelectric vibrator is connected to the first metal member.
- the plurality of first metal members are connected by the first connection member.
- the plurality of second metal members are connected by a second connection member. Be linked.
- the ultrasonic sensor and the method of manufacturing the same of the present invention the positional accuracy of the piezoelectric vibrator with respect to the bottomed cylindrical case can be improved. Therefore, the ultrasonic sensor can be manufactured by an automatic machine, and an ultrasonic sensor having excellent accuracy can be obtained.
- FIG. 1 is a schematic cross-sectional view of an embodiment of the ultrasonic sensor according to the present invention. (Example 1)
- FIG. 2 is a schematic process flow in one embodiment of a method of manufacturing an ultrasonic sensor according to the present invention. (Example 1)
- FIG. 3 is a graph showing the relationship between the thickness of a metal flat part and the amplitude in one embodiment of the ultrasonic sensor of the present invention. (Example 1)
- FIG. 4 is a schematic plan view of a first metal member of one embodiment of the ultrasonic sensor of the present invention. (Example 1)
- FIG. 5 is a schematic plan view of a second metal member of one embodiment of the ultrasonic sensor of the present invention. (Example 1)
- FIG. 6 is a schematic sectional view of another embodiment of the ultrasonic sensor of the present invention. (Example 2)
- FIG. 7 is a schematic sectional view of still another embodiment of the ultrasonic sensor of the present invention. (Example 3)
- FIG. 1 is a schematic sectional view of an embodiment of the ultrasonic sensor according to the present invention.
- the ultrasonic sensor 50 includes a bottomed cylindrical case 1, a first metal member 2, a piezoelectric vibrator 3, and a second metal member 4. Further, the bottomed cylindrical case 1 is filled with a first elastic resin 5 and a second elastic resin 6.
- the bottomed cylindrical case 1 is formed of a metal material, and is formed of, for example, aluminum or an aluminum alloy that is lightweight and hard to work with, and has low workability. Further, the bottomed cylindrical case 1 has a thin wall shape whose bottom surface can be vibrated.
- the first metal member 2 has a metal flat part 7 on one side and a first metal terminal 8 on the other.
- the piezoelectric vibrator 3 having electrodes formed on the first and second main surfaces (not shown) has the first main surface joined to one surface of the metal flat part 7.
- the metal flat portion 7 is joined to the bottom surface of the bottomed cylindrical case 1 on the other side.
- the second metal member 4 has a second metal terminal 9, one of which is joined to the second main surface of the piezoelectric vibrator 3.
- the metal plate flat part 7 and the bottom part of the bottomed cylindrical case 1 vibrate, and generate a sound wave.
- the detection unit performs detection.
- the filled first elastic resin 5 and second elastic resin 6 suppress reverberation vibration. Therefore, the reverberation time at the time of reception is shortened, and the reverberation characteristics are improved.
- a piezoelectric vibrator 3 having electrode portions formed on first and second main surfaces (not shown) is connected to a first connecting portion 10.
- One side of the metal flat portion 7 of the first metal member 2 is joined using an adhesive.
- the first metal member 2 has a portion that becomes the first metal terminal 8 thereafter.
- the electrode portion formed on the first main surface of the piezoelectric vibrator 3 and the metal flat portion 7 are also electrically connected.
- An epoxy resin, an acrylic resin, or the like can be used as the adhesive.
- the crimping forms an electrical connection and joins.
- the adhesive is not particularly limited, but a conductive adhesive may be used.
- the material forming the first metal member 2 is preferably a Ni alloy or the like, which is preferably a material having a value close to the thermal expansion coefficient of the piezoelectric vibrator 3. Further, it is preferable that the thickness of the metal flat part 7 is set in the range of 0.02 to 0.3 mm.
- FIG. 3 shows that the bottom surface of the bottomed cylindrical case shown in FIG. 1 has a thickness of about 0.5 mm, and the metal flat portion 7 when an IV voltage is applied between the electrodes of the piezoelectric vibrator 3. The relationship between the thickness of the cylinder and the amplitude of the bottomed cylindrical case 1 is shown.
- the amplitude tends to decrease as the metal thickness of the metal plane portion 7 increases.
- the lower limit of the thickness is determined from the relation of handling and the like. Here, this value was set in consideration of mechanical strength.
- the value of the thickness of the metal flat portion 7 may be set based on the required characteristics and the strength, which are not particularly limited.
- FIG. 4 shows a plan view of the first metal members 2 connected by the connecting portion 10 in order to further clarify the state of FIG. 2 (a).
- a plurality of first metal terminal portions 8 constituting the first metal member 2 are connected by a first connection portion 10.
- the first metal member 2 is bent between the metal flat part 7 and the first metal terminal 8. At this time, it is formed in a predetermined shape in consideration of the insertion into the bottomed cylindrical case 1 to be the next step, the final position of the metal terminal 8, and the like. It is preferable to use an automatic machine for bending. Further, the bending may be performed before the piezoelectric vibrator 3 is bonded to the metal flat part 7.
- the first metal member 2 including the metal flat plate portion 7 on which the piezoelectric vibrator 3 is formed and the bent first metal terminal 8 is formed. Insert the bottomed cylindrical case 1. The inner bottom portion of the bottomed cylindrical case 1 and the other surface of the metal flat portion 7 are joined with an adhesive.
- Examples of the adhesive used include an epoxy resin and an acrylic resin.
- the adhesive is not particularly limited, but may be a conductive adhesive.
- the second metal terminal 9 connected to the connecting portion 11 is connected to an electrode (not shown) on the second main surface of the piezoelectric vibrator 3. And one end thereof is joined by soldering (not shown).
- the material of the second metal member 4 is set in consideration of soldering and electrical connection. Further, a predetermined shape is formed at a tip portion connected by soldering.
- the material and thickness are preferably the same as those of the first metal member 2, but the first metal terminal 8 of the first metal member 2 and the second metal member of the second metal member 4 are preferably used. In order to clarify the polarity with the terminal section 9, the thickness at the other end is not limited.
- FIG. 5 shows a plan view of the plurality of second metal members 4 connected to the connecting portion 11.
- a plurality of second metal terminal portions 9 each constituting a second metal member 4 are connected to a connecting portion 11.
- the first metal member 2 and the second metal member 4 are connected to the connecting portions 10 and 11, respectively, they can be supplied using an automatic machine. Furthermore, it is preferable that the bonding of the metal flat portion 7 to the bottomed cylindrical case 1 and the bonding of the second metal terminal 9 to the second main surface of the piezoelectric vibrator 3 are also performed by an automatic machine. Further, before the piezoelectric vibrator 3 is inserted into the bottomed cylindrical case 1, the piezoelectric vibrator 3 is joined to the metal flat portion 7 of the first metal member 2; It is preferred that they are joined in fixed positions. As a result, stable accuracy is maintained for each positioning.
- the bottomed cylindrical case 1 is filled with the first elastic resin 5.
- the first elastic resin 5 is filled with a resin having a void having a specific gravity of 0.01-0.9, for example, foamable silicone.
- the filling amount is such that at least the soldered portion where the piezoelectric vibrator 3 and the second metal member 4 are joined is completely filled.
- a second resin 6, for example, silicone rubber having a hardness of 2080 (JISA) with a rubber-like elastic resin is filled.
- the ultrasonic sensor 50 shown in FIG. 1 is configured.
- FIG. 6 is a schematic sectional view of another embodiment of the ultrasonic sensor of the present invention. 1 will be described using the same reference numerals.
- the ultrasonic sensor 60 includes a bottomed cylindrical case 1, a first metal member 12, a piezoelectric vibrator 3, and a second metal member 13. Further, the bottomed cylindrical case 1 is filled with a first elastic resin 5 and a second elastic resin 6.
- the first metal member 12 has a metal flat part 7 on one side and a first metal terminal 8 on the other.
- the first main surface of the piezoelectric vibrator 3 is joined to one surface of the metal flat part 7.
- the metal flat part 7 is joined to the bottom part of the bottomed cylindrical case 1 in the other direction.
- the second metal member 13 has a second metal terminal 9.
- the second metal terminal 9 is joined to the second main surface of the piezoelectric vibrator 3.
- the first metal terminal 8 and the second metal terminal 9 are connected to lead wires 14 and 15, respectively.
- Leads 14 and 15 may be connected to connector 16.
- the method of manufacturing the ultrasonic sensor 60 is substantially the same as that described with reference to FIG.
- FIG. 7 is a schematic sectional view of still another embodiment of the ultrasonic sensor according to the present invention. 1 will be described using the same reference numerals.
- the ultrasonic sensor 70 includes a bottomed cylindrical case 1, a first metal member 2, a piezoelectric vibrator 3, a second metal member 4, and a foamed elastic body 17. Further, the bottomed cylindrical case 1 is filled with a second elastic resin 6.
- the first metal member 2 has a metal flat part 7 on one side and a first metal terminal 8 on the other.
- the first main surface of the piezoelectric vibrator 3 is joined to one surface of the metal flat part 7.
- the metal flat part 7 is joined to the bottom of the bottomed cylindrical case 1 on the other side.
- the second metal member 6 has a second metal terminal 9.
- the second metal terminal 9 is joined to the second main surface of the piezoelectric vibrator 3.
- a foamed elastic body 17 is formed above the second main surface of the piezoelectric vibrator 3.
- the first metal terminal 8 and the second metal terminal 9 are drawn out through the foamed elastic body 17 and the filled second elastic resin 6.
- the second elastic resin 6 is formed continuously with the inner bottom portion of the bottomed cylindrical case 1 and vibrates integrally with the inner bottom side of the case 1. Therefore, the damping vibration can be further stabilized.
- the entire inside of the bottomed cylindrical case 1 including the space between the piezoelectric vibrator 3 and the foamed elastic body 17 is filled with the second elastic resin 6, but the piezoelectric vibrator 3 and the foamed elastic body 17 are filled.
- the second elastic resin 6 may be filled except between 17. That is, the upper surface of the piezoelectric vibrator 3 may be brought into contact with the foamed elastic body 17.
- the method of manufacturing the ultrasonic sensor 70 is substantially the same as that described with reference to FIG.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003-338070 | 2003-09-29 | ||
JP2003338070A JP2007036301A (ja) | 2003-09-29 | 2003-09-29 | 超音波センサおよびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005032211A1 true WO2005032211A1 (ja) | 2005-04-07 |
Family
ID=34386143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/008866 WO2005032211A1 (ja) | 2003-09-29 | 2004-06-24 | 超音波センサおよびその製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2007036301A (ja) |
TW (1) | TW200512438A (ja) |
WO (1) | WO2005032211A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7461555B2 (en) * | 2004-04-26 | 2008-12-09 | Murata Manufacturing Co., Ltd | Ultrasonic sensor |
CN103256950A (zh) * | 2012-02-21 | 2013-08-21 | 同致电子企业股份有限公司 | 超声波传感器装置 |
TWI454668B (zh) * | 2012-02-21 | 2014-10-01 | Tung Thih Electronic Co Ltd | Ultrasonic sensor device |
GB2521762A (en) * | 2013-12-27 | 2015-07-01 | Furuno Electric Co | Ultrasonic transmitting and/or receiving device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5099175B2 (ja) * | 2010-05-28 | 2012-12-12 | 株式会社村田製作所 | 超音波センサ |
JP2012249066A (ja) * | 2011-05-27 | 2012-12-13 | Panasonic Corp | 超音波センサおよびこれを用いた超音波流量計 |
JP7118041B2 (ja) * | 2019-11-01 | 2022-08-15 | 日本セラミック株式会社 | 超音波送受信器 |
TWI730729B (zh) * | 2020-04-21 | 2021-06-11 | 高昌生醫股份有限公司 | 超音波功率檢測裝置及其方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61185000A (ja) * | 1985-02-12 | 1986-08-18 | Matsushita Electric Ind Co Ltd | 超音波セラミツクマイクロホン |
JPH11266497A (ja) * | 1998-01-13 | 1999-09-28 | Murata Mfg Co Ltd | 超音波センサ |
JP2003151804A (ja) * | 2001-11-15 | 2003-05-23 | Shin Etsu Polymer Co Ltd | Ptc素子の製造方法 |
-
2003
- 2003-09-29 JP JP2003338070A patent/JP2007036301A/ja active Pending
-
2004
- 2004-06-24 WO PCT/JP2004/008866 patent/WO2005032211A1/ja not_active Application Discontinuation
- 2004-07-02 TW TW093119986A patent/TW200512438A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61185000A (ja) * | 1985-02-12 | 1986-08-18 | Matsushita Electric Ind Co Ltd | 超音波セラミツクマイクロホン |
JPH11266497A (ja) * | 1998-01-13 | 1999-09-28 | Murata Mfg Co Ltd | 超音波センサ |
JP2003151804A (ja) * | 2001-11-15 | 2003-05-23 | Shin Etsu Polymer Co Ltd | Ptc素子の製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7461555B2 (en) * | 2004-04-26 | 2008-12-09 | Murata Manufacturing Co., Ltd | Ultrasonic sensor |
CN103256950A (zh) * | 2012-02-21 | 2013-08-21 | 同致电子企业股份有限公司 | 超声波传感器装置 |
TWI454668B (zh) * | 2012-02-21 | 2014-10-01 | Tung Thih Electronic Co Ltd | Ultrasonic sensor device |
GB2521762A (en) * | 2013-12-27 | 2015-07-01 | Furuno Electric Co | Ultrasonic transmitting and/or receiving device |
GB2521762B (en) * | 2013-12-27 | 2020-10-07 | Furuno Electric Co | Ultrasonic Transmitting and/or Receiving Device, Underwater Detection Apparatus, and Method for Manufacturing Ultrasonic Transmitting and/or Receiving Device |
Also Published As
Publication number | Publication date |
---|---|
TW200512438A (en) | 2005-04-01 |
JP2007036301A (ja) | 2007-02-08 |
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