WO2005009075A1 - 超音波送受波器 - Google Patents
超音波送受波器 Download PDFInfo
- Publication number
- WO2005009075A1 WO2005009075A1 PCT/JP2004/007940 JP2004007940W WO2005009075A1 WO 2005009075 A1 WO2005009075 A1 WO 2005009075A1 JP 2004007940 W JP2004007940 W JP 2004007940W WO 2005009075 A1 WO2005009075 A1 WO 2005009075A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- peripheral wall
- ultrasonic transducer
- outer peripheral
- inner peripheral
- case
- Prior art date
Links
- 230000002093 peripheral effect Effects 0.000 claims abstract description 46
- 238000010276 construction Methods 0.000 abstract 2
- 230000000593 degrading effect Effects 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/18—Details, e.g. bulbs, pumps, pistons, switches or casings
- G10K9/22—Mountings; Casings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only
- H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
- H04R1/2869—Reduction of undesired resonances, i.e. standing waves within enclosure, or of undesired vibrations, i.e. of the enclosure itself
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
- H04R2499/10—General applications
- H04R2499/13—Acoustic transducers and sound field adaptation in vehicles
Definitions
- the present invention relates to an ultrasonic transducer used for an obstacle sensor such as a back sonar or a corner sonar of an automobile.
- Ultrasonic transducers use ultrasonic waves to perform sensing. They transmit piezoelectric force intermittently, and transmit reflected waves from an object to a piezoelectric transducer. To receive. The distance from the object to be detected is measured by the transmitted / received signal.
- the piezoelectric vibrator is fixed to the inside of the bottom, which is the vibration surface of the bottomed case.
- unnecessary vibration force from outside tends to be transmitted from the side wall of the case to the piezoelectric vibrator provided on the bottom of the case and its inner surface.
- the vibration from the vibration surface of the case is also transmitted to the side wall of the case, the above-described vibration may affect the characteristics of the ultrasonic transducer, such as reverberation, depending on the method of holding the case side wall.
- Patent Document 1 proposes the following ultrasonic transducer.
- the ultrasonic transducer described in Patent Literature 1 includes a cylindrical case in which an ultrasonic vibrator is fixed to a bottom part of a diaphragm.
- An outer frame for supporting the cylindrical case is provided outside the cylindrical case. Further, an intervening member that absorbs vibration energy is provided between the outer frame and the cylindrical frame.
- Patent Document 1 JP 2001-16694
- an intervening member is provided outside a cylindrical case having an ultrasonic vibrator to absorb vibration energy.
- the intervening member cannot be directly attached to the vehicle, etc., so an outer frame is provided as a support member outside the intervening member. . Therefore, an intervening member and an outer frame that are not limited to the cylindrical case are required, and the number of components is large, so that the cost has to be increased.
- it when mounted on a vehicle or the like, it has a layered structure including a cylindrical case, an intervening member, and an outer frame, and thus has a problem in that the appearance is impaired.
- An object of the present invention is to solve the above-mentioned problems of the prior art, to reduce the number of components that are not likely to cause deterioration in characteristics due to external vibrations, and to manufacture at low cost. It is an object of the present invention to provide an ultrasonic transducer which is capable of exerting high power, and which is excellent in aesthetics when mounted on a vehicle or the like and also excellent in reliability such as durability.
- An ultrasonic transducer is an ultrasonic transducer having a structure in which a piezoelectric element is attached to the bottom of a bottomed case, and includes a bottom and a direction in which the inner surface of the bottom moves away from the bottom. And an inner peripheral wall integrally connected to the inner surface of the bottom so as to extend away from the bottom and arranged inside the outer peripheral wall.
- a first concave portion is formed by the inner peripheral wall and the bottom portion
- a second concave portion is formed by the outer peripheral wall, the inner peripheral wall, and the bottom portion
- a first concave portion of the bottom portion is provided.
- the cross-sectional shape of the first recessed portion surrounded by the inner peripheral wall along a direction parallel to the bottom portion is anisotropic. It has a shape having. Preferably, the shape having the anisotropy is substantially elliptical.
- the bottom portion in a portion facing the first concave portion, has a relatively thick wall portion and a relatively thick wall portion. A thin portion having a small thickness, and the piezoelectric element is attached to the thick portion.
- a portion surrounded by an inner surface of the outer peripheral wall has a circular cross-sectional shape along a direction parallel to the bottom.
- the thickness of the inner peripheral wall is Is not more than the thickness of the outer peripheral wall.
- the case is formed as a single component in which the inner peripheral wall and the outer peripheral wall are connected to and integrated with the bottom, so that the number of components is reduced.
- an increase in manufacturing cost can be suppressed.
- the ultrasonic transducer since the outermost part of the ultrasonic transducer is formed of a case, the ultrasonic transducer can be directly mounted on a vehicle or the like. Further, since the vibration isolating member is not exposed to the vibrating surface side, that is, outside, it is possible to provide an ultrasonic transducer having high reliability and improved appearance in appearance.
- FIG. 1 is a schematic plan view of an embodiment of the ultrasonic transducer according to the present invention.
- FIG. 2 is a schematic sectional view of an embodiment of the ultrasonic transducer according to the present invention.
- FIG. 3 is a cross-sectional plan view of another embodiment of the ultrasonic transducer according to the present invention.
- FIG. 4 is a schematic sectional view of another embodiment of the ultrasonic transducer according to the present invention.
- FIG. 5 is a schematic sectional view of still another embodiment of the ultrasonic transducer according to the present invention.
- FIG. 6 is a schematic plan view of still another embodiment of the ultrasonic transducer according to the present invention. Explanation of symbols
- FIG. 1 is a schematic plan view of an ultrasonic transducer according to one embodiment of the present invention
- FIG. 2 is a cross-sectional view taken along a line AA in FIG.
- the ultrasonic transducer 50 includes a case 1, an anti-vibration member 2, and a piezoelectric element 3.
- the case 1 includes a bottom part 4, an inner peripheral wall 5, and an outer peripheral wall 6, and the bottom part 4 is formed integrally with the inner peripheral wall 5 and the outer peripheral wall 6. That is, case 1 is configured as one component.
- the inner peripheral wall 5 is connected to the inner surface of the bottom 4 so as to extend in the direction away from the bottom 4, and the outer peripheral wall 6 also moves away from the inner surface of the bottom 4 from the bottom 4. It is linked to extend in the direction of power.
- the inner peripheral wall 5 is arranged inside the outer peripheral wall 6.
- the case 1 is formed of, but not limited to, a metal material.
- the metal material preferably, for example, aluminum, aluminum alloy, or the like, which is lightweight and hardly viscous, is used.
- the first recess 7 is formed by the bottom 4 and the inner peripheral wall 5. Further, the piezoelectric element 3 is fixed to the upper surface of the bottom 4 in the first recess 7. The portion of the bottom 4 facing the first recess 7 constitutes the vibrating surface 14.
- the piezoelectric element 3 has a structure in which element electrodes 9a and 9b are formed on both main surfaces of a piezoelectric substrate.
- One element electrode 9b is joined to the center of the inner surface of the bottom 4 of the first recess by a conductive adhesive.
- a lead wire or the like is attached to the other element electrode 9a of the piezoelectric element 3 housed in the case 1 for electrical connection (not shown).
- the vibrating surface 14 Vibrates, generates a sound wave, and is radiated to the outside B on the outer surface side of the bottom 4. Conversely, by receiving the reflected wave reflected by the detected portion, the vibrating surface 14 vibrates, and the generated distortion is converted into an electric signal by the piezoelectric element 3, and the detected portion is detected.
- the bottom 4, the inner peripheral wall 5, and the outer peripheral wall 6 form a second recess 8.
- the second concave portion 8 is filled with the vibration isolating member 2.
- the vibration isolation member 2 is formed using an elastic material such as an elastic adhesive made of silicon rubber or urethane rubber.
- the vibration isolating member 2 acts to suppress reverberation vibration on the vibration surface 14 to shorten the reverberation time during reception. Therefore, the reverberation characteristics are considered to be good.
- the vibration isolating member 2 is arranged so as not to be in contact with the piezoelectric element 3, it does not affect the excitation of the piezoelectric element 3 and changes the resonance frequency and sensitivity of the ultrasonic transducer 50. Without reverberation vibration. In addition, propagation of unnecessary vibration from outside to the vibration surface 14 and the piezoelectric element 3 can be suppressed.
- case 1 has the above structure, ultrasonic transducer 50 can be directly mounted on vehicle 15. Also, since the portion that is exposed to the outside B when mounted on the vehicle 15 is the outer surface of the bottom 4 of the case 1, the vibration isolating member 2 is not exposed to the outside B. Therefore, durability is also improved.
- the cross-sectional shape along the direction parallel to the bottom 4 of the inner portion 10 of the inner peripheral wall 5 is a substantially elliptical shape in which the diameters orthogonal to each other are different. With this structure, it is possible to have anisotropy in the directivity characteristics.
- the shape in the cross-sectional direction parallel to the bottom 4 of the inner portion 10 of the outer peripheral wall 5 is not limited to an ellipse but has a shape having anisotropy that is not a circle, the directional characteristics also have anisotropy. You can help. Therefore, the cross-sectional shape is not limited to the substantially elliptical shape shown in FIG. 1 and can be a shape having various anisotropies.
- FIG. 3 shows a schematic plan view of another embodiment of the present invention
- FIG. 4 shows a cross-sectional view taken along the line C-C of FIG.
- the ultrasonic transducer 60 shown in FIG. 3 and FIG. 4 the same parts as those shown in FIG. 1 and FIG.
- detailed description of the same portions as those in FIGS. 1 and 2 will be omitted.
- the ultrasonic transducer 60 has a bottom portion at a portion facing the first concave portion 7.
- the piezoelectric element 3 has a thin portion 12 and a thick portion 13.
- the piezoelectric element 3 is fixed on the thick part 13 Further, in the first concave portion 7, the thin portion 12 is formed so that the bottom portion 4 has a larger area in the major axis direction of the substantially elliptical shape having the similar shape as the first concave portion 7 described above. I have. Thereby, the directivity of the ultrasonic transducer 60 in the major axis direction can be narrowed, and the ultrasonic transducer 60 having highly anisotropic directivity can be configured. Further, since the piezoelectric element 3 is provided in the thick portion 13, the impact resistance is also improved.
- FIG. 5 shows a schematic sectional view of still another embodiment of the present invention.
- the thickness of the thick portion 13 of the bottom 4 in the first recess 7 is d, and the thickness of the bottom 4 of the second recess 8 is e, the thickness of the thick portion 13
- the thickness d is equal to or greater than the thickness e of the bottom 4 in the second recess 8.
- FIG. 6 shows a schematic plan view of still another embodiment of the present invention.
- the inner portion 10 and the outer portion 11 of the inner peripheral wall 5 each have an elliptical cross section parallel to the bottom 4, and the two ellipses have the same center. .
- the thickness f of the inner peripheral wall 5 of the case 1 is equal to or less than the thickness g of the outer peripheral wall 6.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005511789A JPWO2005009075A1 (ja) | 2003-07-16 | 2004-06-07 | 超音波送受波器 |
DE112004001315T DE112004001315T5 (de) | 2003-07-16 | 2004-06-07 | Ultraschall-Sende- und Empfangsvorrichtung |
US10/564,672 US20060232165A1 (en) | 2003-07-06 | 2004-06-07 | Ultrasonic transmitter-receiver |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003198039 | 2003-07-16 | ||
JP2003-198039 | 2003-07-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005009075A1 true WO2005009075A1 (ja) | 2005-01-27 |
Family
ID=34074367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/007940 WO2005009075A1 (ja) | 2003-07-06 | 2004-06-07 | 超音波送受波器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20060232165A1 (ja) |
JP (1) | JPWO2005009075A1 (ja) |
KR (1) | KR100789764B1 (ja) |
CN (1) | CN1823550A (ja) |
DE (1) | DE112004001315T5 (ja) |
WO (1) | WO2005009075A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007069609A1 (ja) * | 2005-12-14 | 2007-06-21 | Murata Manufacturing Co., Ltd. | 超音波トランスデューサ |
JP2009055456A (ja) * | 2007-08-28 | 2009-03-12 | Nippon Ceramic Co Ltd | 超音波送受波器 |
JP2011055292A (ja) * | 2009-09-02 | 2011-03-17 | Nippon Ceramic Co Ltd | 超音波送受信器 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101023804B1 (ko) | 2008-10-30 | 2011-03-21 | (주)동일기연 | 압전 초음파 트랜스듀서 |
JP4947115B2 (ja) * | 2009-09-30 | 2012-06-06 | 株式会社村田製作所 | 超音波トランスデューサ |
KR101095848B1 (ko) | 2010-09-30 | 2011-12-21 | 주성대학산학협력단 | 초음파센서의 제조방법 |
CN104025621B (zh) * | 2011-10-31 | 2017-04-05 | 株式会社村田制作所 | 超声波传感器 |
KR101477862B1 (ko) | 2012-08-28 | 2015-01-06 | 주식회사 만도 | 초음파 트랜스듀서 구조 |
JP6249168B2 (ja) * | 2014-04-08 | 2017-12-20 | 株式会社デンソー | 車両用超音波センサ及びそれを備えた車両用距離検出器 |
DE102015107899A1 (de) * | 2015-05-20 | 2016-11-24 | Valeo Schalter Und Sensoren Gmbh | Ultraschallsensor für ein Kraftfahrzeug, Kraftfahrzeug sowie Verfahren zum Herstellen eines Ultraschallsensors |
DE102016221542A1 (de) * | 2016-11-03 | 2018-05-03 | Robert Bosch Gmbh | Membrantopf für einen Ultraschallwandler und Ultraschallwandler |
JP2019054426A (ja) * | 2017-09-15 | 2019-04-04 | 株式会社デンソー | 超音波出力装置 |
FR3125330B1 (fr) * | 2021-07-19 | 2024-01-12 | Commissariat Energie Atomique | Dispositif d'émission et/ou détection d'ondes acoustiques à fréquence de résonnance variable |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01190098A (ja) * | 1988-01-25 | 1989-07-31 | Murata Mfg Co Ltd | 空中超音波トランスジューサ |
JP2000032594A (ja) * | 1998-04-24 | 2000-01-28 | Murata Mfg Co Ltd | 超音波送受波器 |
JP2001013239A (ja) * | 1999-06-30 | 2001-01-19 | Matsushita Electric Works Ltd | 超音波振動子 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NO174309C (no) * | 1987-04-24 | 1994-04-13 | Norske Stats Oljeselskap | Elektroakustisk transducer for anordning i et gassformig fluid, særlig for måling av strömningsghastigheten i et rör under eksplosjonsfarlige forhol |
JPH01232594A (ja) * | 1988-03-10 | 1989-09-18 | Pioneer Electron Corp | 記録媒体再生装置 |
JPH0752569B2 (ja) * | 1988-03-11 | 1995-06-05 | 富士写真フイルム株式会社 | 機能検査装置 |
JPH01313239A (ja) * | 1988-06-08 | 1989-12-18 | Nec Corp | 帳票セット機構 |
US6250162B1 (en) * | 1998-04-24 | 2001-06-26 | Murata Manufacturing Co., Ltd. | Ultrasonic sensor |
KR20030008715A (ko) * | 2001-07-19 | 2003-01-29 | 아이에스텍 주식회사 | 초음파 센서 |
JP3944052B2 (ja) * | 2001-12-27 | 2007-07-11 | 株式会社デンソー | 超音波送受波器及びこれを用いた超音波クリアランスソナー |
WO2005104615A1 (ja) * | 2004-04-26 | 2005-11-03 | Murata Manufacturing Co., Ltd. | 超音波センサ |
-
2004
- 2004-06-07 JP JP2005511789A patent/JPWO2005009075A1/ja active Pending
- 2004-06-07 DE DE112004001315T patent/DE112004001315T5/de not_active Withdrawn
- 2004-06-07 KR KR1020067000905A patent/KR100789764B1/ko active IP Right Grant
- 2004-06-07 US US10/564,672 patent/US20060232165A1/en not_active Abandoned
- 2004-06-07 CN CNA2004800200892A patent/CN1823550A/zh active Pending
- 2004-06-07 WO PCT/JP2004/007940 patent/WO2005009075A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01190098A (ja) * | 1988-01-25 | 1989-07-31 | Murata Mfg Co Ltd | 空中超音波トランスジューサ |
JP2000032594A (ja) * | 1998-04-24 | 2000-01-28 | Murata Mfg Co Ltd | 超音波送受波器 |
JP2001013239A (ja) * | 1999-06-30 | 2001-01-19 | Matsushita Electric Works Ltd | 超音波振動子 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007069609A1 (ja) * | 2005-12-14 | 2007-06-21 | Murata Manufacturing Co., Ltd. | 超音波トランスデューサ |
EP1962552A1 (en) * | 2005-12-14 | 2008-08-27 | Murata Manufacturing Co., Ltd. | Ultrasonic transducer |
US7548014B2 (en) | 2005-12-14 | 2009-06-16 | Murata Manufacturing Co., Ltd. | Ultrasonic transducer |
EP1962552A4 (en) * | 2005-12-14 | 2010-07-21 | Murata Manufacturing Co | ULTRASOUND CONVERTER |
KR100975517B1 (ko) * | 2005-12-14 | 2010-08-11 | 가부시키가이샤 무라타 세이사쿠쇼 | 초음파 트랜스듀서 |
JP2009055456A (ja) * | 2007-08-28 | 2009-03-12 | Nippon Ceramic Co Ltd | 超音波送受波器 |
JP2011055292A (ja) * | 2009-09-02 | 2011-03-17 | Nippon Ceramic Co Ltd | 超音波送受信器 |
Also Published As
Publication number | Publication date |
---|---|
US20060232165A1 (en) | 2006-10-19 |
DE112004001315T5 (de) | 2006-05-11 |
CN1823550A (zh) | 2006-08-23 |
KR20060029187A (ko) | 2006-04-04 |
JPWO2005009075A1 (ja) | 2006-11-24 |
KR100789764B1 (ko) | 2007-12-28 |
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