US20090056764A1 - Liquid processing apparatus, liquid processing method, and storage medium - Google Patents
Liquid processing apparatus, liquid processing method, and storage medium Download PDFInfo
- Publication number
- US20090056764A1 US20090056764A1 US12/222,871 US22287108A US2009056764A1 US 20090056764 A1 US20090056764 A1 US 20090056764A1 US 22287108 A US22287108 A US 22287108A US 2009056764 A1 US2009056764 A1 US 2009056764A1
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- United States
- Prior art keywords
- liquid
- substrate
- draining
- casing
- cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 366
- 238000003672 processing method Methods 0.000 title claims description 34
- 239000000758 substrate Substances 0.000 claims abstract description 138
- 238000000034 method Methods 0.000 claims abstract description 104
- 238000004140 cleaning Methods 0.000 claims abstract description 60
- 239000003960 organic solvent Substances 0.000 claims abstract description 29
- 238000001035 drying Methods 0.000 claims abstract description 16
- 230000009545 invasion Effects 0.000 claims description 43
- 230000000903 blocking effect Effects 0.000 claims description 28
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 238000004590 computer program Methods 0.000 claims description 6
- 230000001965 increasing effect Effects 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 64
- 229910021529 ammonia Inorganic materials 0.000 description 40
- 239000008367 deionised water Substances 0.000 description 36
- 229910021641 deionized water Inorganic materials 0.000 description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 36
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 30
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 26
- 239000007789 gas Substances 0.000 description 22
- 239000000203 mixture Substances 0.000 description 19
- -1 ammonia peroxide Chemical class 0.000 description 16
- 239000000126 substance Substances 0.000 description 9
- 230000003028 elevating effect Effects 0.000 description 7
- 239000002904 solvent Substances 0.000 description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
Definitions
- the present invention relates to: a liquid processing apparatus; a liquid processing method; and a storage medium storing a computer program executable by a computer for performing the liquid processing method; the apparatus and the method employing a method including a drying step by means of an organic solvent, the drying step after a processing step by means of a hydrofluoric process liquid.
- the inventors have found that the use of an organic solvent for drying the wafer may generate marks such as watermarks on the wafer. Namely, after the wafer is processed by a process liquid containing an ammonia component (alkaline component) and by hydrofluoric acid, and then the wafer is dried by using an organic solvent, there is a possibility that the wafer has some marks.
- the present invention has been made in view of the above circumstances.
- the object of the present invention is to provide a liquid processing apparatus and a liquid processing method in which, even when a substrate to be processed is processed by a hydrofluoric process liquid and is then dried by an organic solvent, generation of marks on the substrate to be processed can be prevented.
- the further object of the present invention is to provide a storage medium storing a computer program for performing the liquid processing method.
- a liquid processing apparatus of the present invention a liquid processing apparatus comprising: a casing; a substrate holding mechanism disposed in the casing, the substrate holding mechanism being configured to hold a substrate to be processed; a process-liquid supplying mechanism configured to supply a process liquid to the substrate to be processed held by the substrate holding mechanism; a draining cup configured to cover the substrate to be processed held by the substrate holding mechanism in the casing from an outer peripheral side, the draining cup being configured to receive a process liquid that has been used for cleaning the substrate to be processed; and a draining pipe connected to the draining cup, the draining pipe being configured to discharge outside the process liquid having passed through the draining cup; wherein: the process-liquid supplying mechanism has a first chemical-liquid supplying mechanism configured to supply a hydrofluoric process liquid, and a drying-liquid supplying mechanism configured to supply an organic solvent for drying the substrate to be processed; there is provided a removing mechanism configured to remove an alkaline component in the casing, or an invasion preventing mechanism configured to prevent invasion of an alkaline component
- the alkaline component in the casing can be removed by the removing mechanism, or the invasion of an alkaline component into the casing can be prevented by the invasion preventing mechanism, before the organic solvent is supplied by the drying-liquid supplying mechanism. Therefore, the generation of marks on the substrate to be processed can be prevented.
- the control part causes the first chemical-liquid supplying mechanism to supply a hydrofluoric process liquid, the control part causes the removing mechanism to remove an alkaline component in the casing.
- the invasion preventing mechanism is formed of a pressurizing mechanism that increases an air pressure in the casing.
- the removing mechanism is formed of a cleaning mechanism that supplies a cleaning liquid to the draining cup so as to remove the alkaline component adhering to the draining cup.
- the process-liquid supplying mechanism has a second chemical-liquid supplying mechanism controlled by the control part, the second chemical-liquid supplying mechanism being configured to supply an alkaline process liquid; and that the control part causes the cleaning mechanism to supply a cleaning liquid to the draining cup so as to remove the alkaline component adhering to the draining cup, after the control part causes the second chemical-liquid supplying mechanism to supply an alkaline process liquid, and before the control part causes the first chemical-liquid supplying mechanism to supply a hydrofluoric process liquid.
- the liquid processing apparatus further comprises a blocking mechanism disposed in the draining pipe, the blocking mechanism being configured to stop a flow of a process liquid passing through the draining pipe, wherein: the process-liquid supplying mechanism has a cleaning-liquid supplying mechanism configured to supply a cleaning liquid to the substrate to be processed held on the substrate holding mechanism; the cleaning mechanism is composed of the cleaning-liquid supplying mechanism, the draining pipe, and the blocking mechanism; and the control part causes the blocking mechanism to block the draining pipe to store a cleaning liquid in the draining pipe and the draining cup, so as to remove the alkaline component adhering to the draining cup.
- the process-liquid supplying mechanism has a cleaning-liquid supplying mechanism configured to supply a cleaning liquid to the substrate to be processed held on the substrate holding mechanism
- the cleaning mechanism is composed of the cleaning-liquid supplying mechanism, the draining pipe, and the blocking mechanism
- the control part causes the blocking mechanism to block the draining pipe to store a cleaning liquid in the draining pipe and the draining cup, so as to remove the alkaline
- the cleaning liquid can be supplied to the draining cup, so that the alkaline component adhering to the draining cup can be removed.
- the generation of marks on the substrate to be processed can be easily prevented by the inexpensive structure.
- the draining cup can be bathed with the cleaning liquid, the alkaline component adhering to the draining cup can be reliably cleaned and removed.
- the generation of marks on the substrate to be processed can be prevented with a high probability.
- the cleaning mechanism has a cleaning-liquid jetting mechanism configured to jet a cleaning liquid to the draining cup so as to remove the alkaline component adhering to the draining cup.
- the liquid processing apparatus further comprises: a gas introducing part disposed in the casing, the gas introducing part being configured to supply a gas to the substrate to be processed held by the substrate holding mechanism from above; and an exhaust cup positioned to surround the draining cup in the casing, the exhaust cup being configured to take thereinto a gas having passed through the substrate to be processed, and then to discharge the gas.
- a liquid processing method of the present invention is a liquid processing method using a liquid processing apparatus having a casing: a substrate holding mechanism disposed in the casing, the substrate holding mechanism being configured to hold a substrate to be processed; a process-liquid supplying mechanism configured to supply a process liquid to the substrate to be processed held by the substrate holding mechanism; a draining cup configured to cover the substrate to be processed held by the substrate holding mechanism in the casing from an outer peripheral side, the draining cup being configured to receive a process liquid that has been used for cleaning the substrate to be processed; and a draining pipe connected to the draining cup, the draining pipe being configured to discharge outside the process liquid having passed through the draining cup; the liquid processing method comprising: a holding step in which the substrate to be processed is held by the substrate holding mechanism; a rotating step in which the substrate to be processed held by the substrate holding mechanism is rotated by the rotating mechanism; and a process-liquid supplying step in which a process liquid is supplied by the process-liquid supplying mechanism to the substrate to be processed held by the substrate holding
- the alkaline component in the casing can be removed by the removing mechanism, or the invasion of an alkaline component into the casing can be prevented by the invasion preventing mechanism, before the substrate to be processed is dried. Therefore, the generation of marks on the substrate to be processed can be prevented.
- the removing step is performed, before the first chemical-liquid supplying step in which a hydrofluoric process liquid is supplied.
- the invasion preventing step prevents the invasion of an alkaline component into the casing, by increasing an air pressure in the casing.
- the removing step removes the alkaline component adhering to the draining cup, by supplying a cleaning liquid to the draining cup.
- the process-liquid supplying step includes, before the first chemical-liquid supplying step in which a hydrofluoric process liquid is supplied, a second chemical-liquid supplying step in which an alkaline process liquid is supplied; and the alkaline component adhering to the draining cup is removed by supplying a cleaning liquid to the draining cup, after the second chemical-liquid supplying step in which an alkaline process liquid is supplied, and before the first chemical-liquid supplying step in which a hydrofluoric process liquid is supplied.
- the cleaning liquid can be supplied to the draining cup, so that the alkaline component adhering to the draining cup can be removed.
- the generation of marks on the substrate to be processed can be easily prevented by the inexpensive structure.
- the draining cup can be bathed with the cleaning liquid, the alkaline component adhering to the draining cup can be reliably cleaned and removed.
- the generation of marks on the substrate to be processed can be prevented with a high probability.
- the cleaning step removes the alkaline component adhering to the draining cup, by jetting a cleaning liquid to the draining cup.
- a storage medium of the present invention is a storage medium storing a computer program executable by a computer to perform a liquid processing method, wherein the liquid processing method using a liquid processing apparatus having: a substrate holding mechanism being configured to hold a substrate to be processed; a process-liquid supplying mechanism configured to supply a process liquid to the substrate to be processed held by the substrate holding mechanism; a draining cup configured to cover the substrate to be processed held by the substrate holding mechanism from an outer peripheral side, the draining cup being configured to receive a process liquid that has been used for cleaning the substrate to be processed; a draining pipe connected to the draining cup, the draining pipe being configured to discharge outside the process liquid having passed through the draining cup; and a casing capable of accommodating at least the substrate holding mechanism and the draining cup; the liquid processing method comprising: a holding step in which the substrate to be processed is held by the substrate holding mechanism; a rotating step in which the substrate to be processed held by the substrate holding mechanism is rotated by the rotating mechanism; and a process-liquid supplying step in which
- the alkaline component in the casing can be removed by the removing mechanism, or the invasion of an alkaline component into the casing can be prevented by the invasion preventing mechanism, before the substrate to be processed is dried. Therefore, the generation of marks on the substrate to be processed can be prevented.
- the alkaline component in the casing can be removed, or the invasion of an alkaline component into the casing can be prevented, before the organic solvent is supplied to dry the substrate to be processed. Therefore, the generation of marks on the substrate to be processed can be prevented.
- FIG. 1 is an upper plan view of a liquid processing system including liquid processing apparatuses in a first embodiment of the present invention, the liquid processing system being seen from above.
- FIG. 2 is a longitudinal sectional view of the liquid processing apparatus in the first embodiment of the present invention.
- FIG. 3 is a schematic view showing a structure of a process-liquid supplying mechanism of the liquid processing apparatus in the first embodiment of the present invention.
- FIG. 4 is another longitudinal sectional view of the liquid processing apparatus, showing a section different from the section shown in FIG. 2 .
- FIG. 5 is a flowchart showing a part of steps included in a liquid processing method in the first embodiment of the present invention.
- FIG. 6 is a longitudinal sectional view of a liquid processing apparatus in a second embodiment of the present invention, showing the section corresponding to the section shown in FIG. 4 .
- FIG. 7 is a longitudinal sectional view of a liquid processing apparatus in a third embodiment of the present invention.
- FIGS. 1 to 5 show the first embodiment of the present invention.
- a liquid processing system includes: a stage 81 in which a carrier loaded from outside is placed, the carrier accommodating a semiconductor wafer W (hereinafter simply referred to also as “wafer W”) that is a substrate to be processed; a transfer arm 82 that takes out the wafer W accommodated in the carrier; a shelf unit 83 on which the wafer W taken out by the transfer arm 82 is placed; and a main arm 84 that receives the wafer W placed on the shelf unit 83 and conveys the wafer W into a liquid processing apparatus 11 .
- Incorporated in the liquid processing system are the plurality of liquid processing apparatuses (twelve in this embodiment).
- FIG. 1 is an upper plan view of the liquid processing system including the liquid processing apparatuses 1 in this embodiment, the liquid processing system being seen from above.
- the liquid processing apparatus 1 includes: a casing 5 ; a substrate holding mechanism 20 disposed in the casing 5 , the substrate holding mechanism 20 being configured to hold a wafer W; a process-liquid supplying mechanism 30 configured to supply a process liquid to the wafer W held by the substrate holding mechanism 20 ; a rotating cup 61 configured to cover the wafer W held by the substrate holding mechanism 20 in the casing 5 from an outer peripheral side, the rotating cup 61 being configured to be capable of rotating integrally with the substrate holding mechanism 20 ; and a rotating mechanism 70 configured to-integrally rotate the rotating cup 61 and the substrate holding mechanism 20 .
- FIG. 2 is a longitudinal sectional view of the liquid processing apparatus 1 in this embodiment.
- an annular draining cup 12 disposed in the casing 5 on an outer peripheral side of the rotating cup 61 .
- a draining pipe 13 Connected to the draining cup 12 is a draining pipe 13 configured to discharge outside the process liquid having passed through the draining cup 12 .
- an inlet/outlet port 5 a provided in a sidewall of the casing 5 is an inlet/outlet port 5 a through which a wafer W is loaded and unloaded.
- the substrate holding mechanism 20 includes: a discoid rotating plate 21 that is horizontally located; a holding member 22 disposed on a peripheral edge of the rotating plate 21 , the holding member 22 being configured to hold a wafer W; and a cylindrical rotating shaft 23 connected to a central part of a lower surface of the rotating plate 21 so as to be extended downward.
- a circular hole 21 a Formed in the central part of the rotating plate 21 is a circular hole 21 a that is communicated with a hole 23 a of the cylindrical rotating shaft 23 .
- an elevating member 25 capable of being moved in an up and down direction by an elevating mechanism 56 .
- FIG. 4 is another longitudinal sectional view of the liquid processing apparatus, showing a section different from the section shown in FIG. 2 .
- a rear-surface process-liquid supply path 26 through which a process liquid is supplied from a rear-surface (lower-surface) side of a wafer W.
- a wafer supporting table 27 is disposed on an upper end of the elevating member 25 .
- a wafer supporting pin 28 for-supporting a wafer W is disposed on an upper surface of the wafer supporting table 27 .
- the rotating shaft 23 is rotatably supported on a base plate 6 via a bearing member 29 .
- the rotating mechanism 70 includes a motor 71 having a motor shaft 71 a, and a belt 72 wound around the motor shaft 71 a and around a lower end of the rotating shaft 23 .
- a pulley 74 is disposed between the belt 72 and the motor shaft 71 a, and a pulley 73 is disposed between the belt 72 and the rotating shaft 23 .
- a gas introducing part 3 that introduces a gas from a fan filter unit (FFU) (not shown) of the liquid processing system via an inlet port 5 b.
- FFU fan filter unit
- the FFU is provided with a chemical filter for adsorbing an alkaline component, whereby an alkali atmosphere is prevented from entering the casing 5 from outside.
- annular exhaust cup 66 disposed on an outer peripheral side of the draining cup 12 is an annular exhaust cup 66 that takes thereinto a clean air, which has been supplied from the air introducing part 3 through a wafer W, and discharges the clean air.
- a slit-like ventilation hole 66 b is formed in a lower end of the draining cup 12 , whereby an air having passed through the exhaust cup 66 is guided to the exhaust pipe 67 (see, dotted arrow in FIG. 2 ).
- the process-liquid supplying mechanism 30 includes: a nozzle block 31 having nozzles 31 a and 31 b configured to supply a process liquid onto a surface of a wafer W held by the substrate holding mechanism 20 ; a nozzle arm 32 connected to the nozzle block 31 , the nozzle arm 32 being configured to move the nozzle block 31 along the surface of the wafer W held by the substrate holding mechanism 20 ; a nozzle swinging shaft 33 that is vertically extended downward from the nozzle arm 32 ; and a nozzle driving part 75 configured to drive the nozzle swinging shaft 33 .
- FIG. 3 is a schematic view showing the structure of the process-liquid supplying mechanism of the liquid processing apparatus 1 in this embodiment.
- the nozzle driving part 75 includes a motor 76 provided with a motor shaft 76 a, and a belt 77 wound around the motor shaft 76 a and around a lower end of the nozzle swinging shaft 33 .
- a pulley 79 is disposed between the belt 77 and the motor shaft 76 a, and a pulley 78 is disposed between the belt 77 and the nozzle swinging shaft 33 .
- a process-liquid flow path through which a process liquid passes As shown in FIG. 3 , inside the nozzle block 31 having the nozzles 31 a and 31 b, the nozzle arm 32 , and the nozzle swinging shaft 33 , which are disposed in the process-liquid supplying mechanism 30 , there are disposed a process-liquid flow path through which a process liquid passes, and a dry-solvent flow path 38 through which a dry solvent passes.
- the process-liquid flow path 35 and the dry-solvent flow path 38 are communicated with the process-liquid supplying part 40 .
- the process-liquid supplying part 40 includes: a DHF supply source 41 configured to supply a hydrofluoric chemical liquid such as diluted hydrofluoric acid (DHF); an SC1 supply source 42 configured to supply an alkaline chemical liquid such as ammonia peroxide mixture (SC1); a DIW supply source configured to supply a rinse liquid such as deionized water (DIW); and an IPA supply source 43 configured to supply a dry solvent such as IPA (isopropyl alcohol).
- a hydrofluoric chemical liquid such as diluted hydrofluoric acid (DHF)
- SC1 supply source 42 configured to supply an alkaline chemical liquid such as ammonia peroxide mixture (SC1)
- a DIW supply source configured to supply a rinse liquid such as deionized water (DIW)
- an IPA supply source 43 configured to supply a dry solvent such as IPA (isopropyl alcohol).
- IPA isopropyl alcohol
- the process-liquid flow path 35 is communicated with the DHF supply source 41 , the SC1 supply source 42 , and the DIW supply source 45 , via a first valve 46 , a second valve 47 , and a third valve 48 , respectively.
- the dry-solvent flow path 38 is communicated with the IPA supply source 43 via a fourth valve 49 .
- a first chemical-liquid supplying mechanism for supplying a hydrofluoric process liquid is composed of the nozzle block 31 having the nozzles 31 a and 31 b, the nozzle arm 32 , the nozzle swinging shaft 33 , the process-liquid flow path 35 , the nozzle driving part 75 (see, FIG. 2 ), the first valve 46 , and the DHF supply source 41 .
- a second chemical-liquid supplying mechanism for supplying an alkaline process liquid is composed of the nozzle block 31 having the nozzles 31 a and 31 b, the nozzle arm 32 , the nozzle swinging shaft 33 , the process-liquid flow path 35 , the nozzle driving part 75 (see, FIG. 2 ), the second valve 47 , and the SC1 supply source 42 .
- a drying-liquid supplying mechanism for supplying an IPA (organic solvent) for drying a wafer W is composed of the nozzle block 31 having the nozzles 31 a and 31 b, the nozzle arm 32 , the nozzle swinging shaft 33 , the dry-solvent flow path 38 , the nozzle driving part 75 (see, FIG. 2 ), the fourth valve 49 , and the IPA supply source 43 .
- a cleaning-liquid supplying mechanism for supplying deionized water (rinse liquid of chemical liquid) to a wafer W held on the substrate holding mechanism 20 is composed of the nozzle block 31 having the nozzles 31 a and 31 b, the nozzle arm 32 , the nozzle swinging shaft 33 , the process-liquid flow path 35 , the nozzle driving part 75 (see, FIG. 2 ), the third valve 48 , and the DIW supply source 45 .
- a mechanism that supplies a process liquid to the rear-surface process-liquid supply path 26 shown in FIGS. 2 and 4 has the same structure as that of the aforementioned process-liquid supplying mechanism 40 excluding that the mechanism is not equipped with the IPA supply source 43 .
- the draining pipe 13 has a blocking valve (blocking mechanism) 11 that stops flowing of a process liquid passing through the draining pipe 13 .
- a blocking valve blocking mechanism
- the draining pipe 13 can be blocked.
- a cleaning mechanism (removing mechanism) 10 that supplies deionized water D to the draining cup 12 is composed of the cleaning-liquid supplying mechanism, the draining pipe 13 , and the blocking valve 11 .
- a control part 50 is connected to the respective first valve 46 , the second valve 47 , the third valve 48 , the fourth valve 49 , and the blocking valve 11 , and the respective first chemical-liquid supplying mechanism, the drying-liquid supplying mechanism, and the blocking valve 11 are controlled by the control part 50 .
- an inner discharge pipe 68 that receives a process liquid (deionized water D in FIG. 4 ) leaked from a part between a wafer W and the substrate holding mechanism 20 , and discharges the process liquid outside.
- an outer discharge pipe 69 that receives a process liquid (deionized water D in FIG. 4 ) flowing into a space 66 a in which the exhaust cup 66 is disposed, and discharges the process liquid outside.
- a dry-gas supplying part 18 that supplies a dry gas such as air of a low humidity or N 2 .
- a wafer W held by the main arm 84 is loaded into the casing 5 of the liquid processing apparatus 1 via the inlet/outlet port 5 a. Then, the thus transferred wafer W is delivered to the wafer supporting pin 28 provided on the wafer supporting table 27 , with the elevating member 25 being elevated. Thereafter, the elevating member 25 is lowered, and the wafer W is chucked and held by the holding member 22 (holding step) (see, FIGS. 1 , 2 , and 4 ).
- the wafer W held by the substrate holding mechanism 20 is rotated integrally with the rotating cup 61 by the rotating mechanism 70 (rotating step) (see, FIGS. 2 and 4 ). Until a drying step, which is described below, is finished, the wafer W and the rotating cup 61 continue to be rotated.
- the rotating shaft 23 is rotated. Since the rotating cup 61 is integral with the substrate holding mechanism 20 , the rotation of the rotating shaft 23 can rotate the rotating cup 61 integrally with the substrate holding mechanism 20 .
- a process liquid is supplied to the wafer W held by the substrate holding mechanism 20 by the process-liquid supplying mechanism 30 (process-liquid supplying step) (see, FIGS. 2 to 4 ).
- process-liquid supplying step the following steps are performed. Before the process-liquid supplying step is started, all the valves 46 , 47 , 48 , and 49 are closed (see, FIG. 3 ).
- the second valve 47 is opened, so that ammonia peroxide mixture is supplied from the SC1 supply source 42 . Then, the ammonia peroxide mixture is supplied to the wafer W held by the substrate holding mechanism 20 through the nozzle 31 a (second chemical-liquid supplying step 91 ) (see, FIGS. 3 and 5 ).
- the second valve 47 is closed and the third valve 48 is opened, so that deionized water D is supplied from the DIW supply source 45 .
- the deionized water D is supplied to the wafer W through the nozzle 31 a (rinsing step 92 ) (see, FIGS. 3 to 5 ).
- the blocking valve 11 is closed based on a signal from the control part 50 (cleaning step 93 ) (see, FIGS. 2 to 5 ).
- the flow of the deionized water D passing through the draining pipe 13 can be stopped.
- the deionized water D is stored in the draining pipe 13 and the draining cup 12 to bathe the draining cup 12 .
- the deionized water D can be supplied to the draining cup 12 .
- an ammonia component (alkaline component) adhering to the draining cup 12 can be removed.
- the deionized water D is supplied to the draining cup 12 whereby the ammonia component adhering to the draining cup 12 can be removed (see, FIG. 4 ).
- the surface of a wafer W is processed by a hydrofluoric process liquid and thereafter exposed to an organic solvent, marks may be generated by the presence of only a slight amount of ammonia component in the casing 5 .
- such a generation of marks can be easily prevented by the inexpensive structure.
- the deionized water D is stored in the draining pipe 13 and the draining cup 12 , and the draining cup 12 can be bathed with the deionized water D (see, FIG. 4 ).
- the ammonia component adhering to the draining cup 12 can be reliably cleaned and removed, so that the generation of marks on a wafer W can be prevented with a high probability.
- the blocking valve 11 is opened based on a signal from the control part 50 ( FIGS. 2 and 4 ).
- the deionized water D filled in the draining cup 12 is removed from the draining cup 12 .
- the third valve 48 is closed and the first valve 46 is opened, so that diluted hydrofluoric acid is supplied from the DHF supply source 41 . Then, the diluted hydrofluoric acid is supplied the wafer W through the nozzle 31 a (first-chemical supplying step 95 ) (see, FIGS. 2 to 5 ).
- the first valve 46 is closed and the third valve 48 is opened, so that deionized water D is supplied from the DIW supply source 45 .
- the deionized water D is supplied to the wafer W by the substrate holding mechanism 20 through the nozzle 31 a (rinsing step 97 ) (see, FIGS. 2 to 5 ).
- the gas flowing into the casing 5 is switched from the clean air supplied from the FFU to a dry gas, such as air of low humidity or N 2 , which is supplied from the dry-gas supplying part 18 . Due to the supply of the dry gas into the casing 5 , humidity in the casing 5 can be reduced, whereby formation of watermarks on the wafer W can be prevented.
- a dry gas such as air of low humidity or N 2
- the third valve 48 is closed, and thereafter the fourth valve 49 is opened so that IPA for drying the wafer W is supplied to the wafer W through the nozzle 31 b (drying-liquid supplying step 98 ) (see, FIGS. 2 to 5 ).
- the nozzle swinging shaft 33 is driven by the nozzle driving part 75 , so that the nozzles 31 a and 31 b of the nozzle block 31 disposed on the nozzle arm 32 are swung about the nozzle swinging shaft 33 above the wafer W along the surface of the wafer W (see, FIGS. 1 and 2 ).
- the wafer W held by the substrate holding mechanism 20 is rotated at a speed higher than a speed of the drying-liquid supplying step 98 .
- the IPA adhering to the wafer W is spun off from the wafer W to thereby dry the wafer W (drying step).
- the rotating cup 61 is rotated integrally with the substrate holding mechanism 20 .
- a centrifugal force acts on the process liquid. Accordingly, the process liquid is resistant to be scattered outside to become mist.
- the processed wafer W is removed from the substrate holding mechanism 20 and is unloaded from the casing 5 to the outside via the inlet/outlet port 5 a (see, FIG. 2 ).
- the blocking valve 11 is closed to store the draining cup 12 with the deionized water D.
- the present invention is not limited thereto.
- the blocking valve 11 may be closed so as to supply the deionized water D to the draining cup 12 .
- the blocking valve 11 is closed and the cleaning step 93 is performed in the rinsing step 92 after the second chemical-liquid supplying step 91 in which the ammonia peroxide mixture is supplied.
- the ammonia component is taken as an example of the alkaline component.
- the ammonia component may be replaced with another alkaline component.
- a computer program executable by the computer 55 to perform the above liquid processing method and a storage medium 55 a storing such a computer program (see, FIG. 2 ).
- the computer 55 can communicate with the control part 50 .
- the one exhaust pipe 67 for discharging outside the clean air having passed through the exhaust cup 66 is connected to the exhaust cup 66 .
- a plurality of (e.g., two) exhaust pipes may be connected to the exhaust cup 66 .
- the ammonia component in the ammonia peroxide mixture which has been supplied from the second chemical-liquid supply step 91 , can be more reliably discharged from the casing 5 .
- the generation of marks on the wafer W can be more reliably prevented.
- the diluted hydrofluoric acid supplied fro the DHF supply source 41 and the ammonia peroxide mixture supplied from the SC1 supply source 42 are supplied to the wafer W by using the one nozzle arm 32 and the one nozzle block 31 having the nozzles 31 a and 31 b.
- the diluted hydrofluoric acid supplied from the DHF supply source 41 and the ammonia peroxide mixture supplied from the SC1 supply source 42 may be respectively supplied to the wafer W by using nozzle arms for exclusive use and nozzle blocks (including nozzles) for exclusive use.
- the DHF supply source 41 and the SC1 supply source 42 supply the process liquids to the wafer W by using the same nozzle arm 32 and the same nozzle block 31 (including nozzles 31 a and 31 b ).
- the ammonia component although it is very slight
- the ammonia component adheres to the wafer W in the steps following to the cleaning step 93 .
- the presence of only a slight amount of ammonia component may invite the generation of marks on the wafer W, the possibility that marks are generated on the wafer W by the ammonia component cannot be denied.
- a cleaning mechanism (removing mechanism) 10 that removes an alkaline component adhering to a draining cup 12 is constituted, in place of the cleaning-liquid supplying mechanism, the draining pipe 13 , and the blocking valve 11 , by a cleaning-liquid jetting mechanism 15 that jets deionized water (cleaning liquid) D to the draining cup 12 so as to remove the alkaline component adhering to the draining cup 12 .
- a cleaning-liquid jetting mechanism 15 jets deionized water (cleaning liquid) D to the draining cup 12 so as to remove the alkaline component adhering to the draining cup 12 .
- an annular exhaust cup 66 located on an outer peripheral side of the draining cup 12 is capable of being moved in an up and down direction (see, arrow A 2 in FIG. 6 ).
- Other structures of the second embodiment are substantially the same as those of the first embodiment shown in FIGS. 1 to 5 .
- the cleaning-liquid jetting mechanism 15 is positioned so as to be swingable in the up and down direction about a swinging shaft 16 in a casing 5 .
- the cleaning-liquid jetting mechanism 15 is provided with a jetting nozzle 17 that jets deionized water D toward the draining cup 12 .
- a control part 50 is connected to the cleaning-liquid jetting mechanism 15 , so that the cleaning-liquid jetting mechanism 15 is controlled by the control part 50 .
- the jetting nozzle 17 of the cleaning-liquid jetting mechanism 15 is located on an upper position.
- the exhaust cup 66 is also located on an upper position.
- the jetting nozzle 17 is swung about a swinging shaft 16 (see, arrow A 1 in FIG. 6 ), so as to be located on a lower position (position shown in FIG. 6 ). Then, based on a signal from the control part 50 , deionized water D is jetted toward the draining cup 12 from the jetting nozzle 17 located on the lower position, whereby the ammonia component (alkaline component) adhering to the draining cup 12 is removed (see, FIG. 6 ).
- the cleaning liquid is supplied to the draining cup 12 so that the ammonia component adhering to the draining cup 12 can be removed.
- the rinsing step 92 which is performed after the ammonia has been supplied is finished, and thereafter the jetting nozzle 17 is swung about the swinging shaft 16 to reach the upper position, based on a signal from a control part 50 .
- a first chemical-liquid supplying step 95 a rinsing step 97 , and a drying-liquid supplying step 98 are sequentially performed (see, FIG. 5 ).
- the cleaning mechanism (removing mechanism) 10 formed of the cleaning-liquid jetting mechanism 15 is used in place of the cleaning mechanism (removing mechanism) 10 shown in the first embodiment, the present invention is not limited thereto. It is possible to constitute the cleaning mechanism (removing mechanism) 10 by adding the cleaning-liquid jetting mechanism 15 to the first embodiment.
- a dry-gas supplying part 18 serves as a pressurizing mechanism (invasion preventing mechanism) that prevents invasion of an alkaline component into a casing 5 .
- an air pressure of a dry gas flowing into the casing 5 from the dry-gas supplying part 18 is increased to thereby prevent the invasion of an alkaline component into the casing 5 .
- Other structures of the third embodiment are substantially the same as those of the first embodiment shown in FIGS. 1 to 5 .
- a pressurizing mechanism 18 that prevents invasion of an alkaline component such as an ammonia component into the casing 5 by increasing an air pressure in the casing 5 .
- the pressurizing mechanism 18 is connected to a control part 50 , and is controlled based on a signal from the control part 50 .
- the air pressure in the casing 5 can be raised by the dry-gas supplying part 18 , whereby the invasion of an ammonia component which is present in an outside air (air in a clean room) into the casing 5 can be prevented.
- the wafer W is dried by an organic solvent after the wafer has been processed by a hydrofluoric process liquid, the generation of marks on the wafer W can be easily prevented.
- the step of preventing the invasion of an alkaline component into the casing 5 by increasing the air pressure in the casing 5 is continuously performed from a time point when a wafer W to be processed is placed on a substrate holding mechanism 20 in the casing 5 to a time point when the processed wafer W is unloaded from the casing 5 to the outside (see, FIG. 2 ).
- the dry-gas supplying part 18 functioning as the pressurizing mechanism (invasion preventing mechanism) in this embodiment does not have the SC1 supply source 42 that supplies ammonia peroxide mixture (SC1) that is an alkaline process liquid, and thus the dry-gas supplying part 18 is effective when no ammonia peroxide mixture (SC1) is supplied.
- the present invention is not limited thereto. As long as the invasion of an alkaline component into the casing 5 is prevented, any mechanism may be used as the invasion preventing mechanism.
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- General Physics & Mathematics (AREA)
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- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
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US13/591,877 US8371318B2 (en) | 2007-08-31 | 2012-08-22 | Liquid processing apparatus, liquid processing method, and storage medium |
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JP2007225868A JP4901650B2 (ja) | 2007-08-31 | 2007-08-31 | 液処理装置、液処理方法および記憶媒体 |
JP2007-225868 | 2007-08-31 |
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US13/591,877 Active US8371318B2 (en) | 2007-08-31 | 2012-08-22 | Liquid processing apparatus, liquid processing method, and storage medium |
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US (2) | US20090056764A1 (de) |
JP (1) | JP4901650B2 (de) |
KR (1) | KR101275965B1 (de) |
DE (1) | DE102008044754A1 (de) |
TW (1) | TWI392009B (de) |
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US20110114120A1 (en) * | 2007-12-10 | 2011-05-19 | Voha Nuch | Methods and apparatus for cleaning semiconductor wafers |
US20130034411A1 (en) * | 2010-05-11 | 2013-02-07 | Durr Ecoclean Gmbh | Process container |
US8545640B2 (en) | 2010-06-23 | 2013-10-01 | Tokyo Electron Limited | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus |
US20140000661A1 (en) * | 2012-07-02 | 2014-01-02 | Samsung Electronics Co., Ltd. | Single type apparatus for drying a substrate and single type system for cleaning a substrate including the same |
US20140053982A1 (en) * | 2012-08-23 | 2014-02-27 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
US8906165B2 (en) | 2010-06-17 | 2014-12-09 | Tokyo Electron Limited | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus |
KR20150078602A (ko) * | 2013-12-31 | 2015-07-08 | 세메스 주식회사 | 기판처리방법 |
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US20200391238A1 (en) * | 2019-06-11 | 2020-12-17 | Tokyo Electron Limited | Coating apparatus and coating method |
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US11752515B2 (en) * | 2019-06-11 | 2023-09-12 | Tokyo Electron Limited | Coating apparatus and coating method |
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Also Published As
Publication number | Publication date |
---|---|
US8371318B2 (en) | 2013-02-12 |
KR20090023076A (ko) | 2009-03-04 |
DE102008044754A1 (de) | 2009-03-05 |
KR101275965B1 (ko) | 2013-06-17 |
JP2009059895A (ja) | 2009-03-19 |
JP4901650B2 (ja) | 2012-03-21 |
US20120312332A1 (en) | 2012-12-13 |
TWI392009B (zh) | 2013-04-01 |
TW200919569A (en) | 2009-05-01 |
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