TWI801309B - transfer device - Google Patents
transfer device Download PDFInfo
- Publication number
- TWI801309B TWI801309B TW111131169A TW111131169A TWI801309B TW I801309 B TWI801309 B TW I801309B TW 111131169 A TW111131169 A TW 111131169A TW 111131169 A TW111131169 A TW 111131169A TW I801309 B TWI801309 B TW I801309B
- Authority
- TW
- Taiwan
- Prior art keywords
- transfer device
- transfer
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/57—Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Microwave Amplifiers (AREA)
- Paper (AREA)
- Massaging Devices (AREA)
- Seal Device For Vehicle (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018116692 | 2018-06-20 | ||
JP2018-116692 | 2018-06-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202301723A TW202301723A (en) | 2023-01-01 |
TWI801309B true TWI801309B (en) | 2023-05-01 |
Family
ID=68983359
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW112145274A TW202412360A (en) | 2018-06-20 | 2018-06-27 | Lift device and method for using same |
TW112111310A TWI827492B (en) | 2018-06-20 | 2018-06-27 | Transfer method and photomask |
TW111119187A TWI784911B (en) | 2018-06-20 | 2018-06-27 | transfer device |
TW111131169A TWI801309B (en) | 2018-06-20 | 2018-06-27 | transfer device |
TW107122157A TWI768072B (en) | 2018-06-20 | 2018-06-27 | Transfer device, method of use and method of adjustment |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW112145274A TW202412360A (en) | 2018-06-20 | 2018-06-27 | Lift device and method for using same |
TW112111310A TWI827492B (en) | 2018-06-20 | 2018-06-27 | Transfer method and photomask |
TW111119187A TWI784911B (en) | 2018-06-20 | 2018-06-27 | transfer device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW107122157A TWI768072B (en) | 2018-06-20 | 2018-06-27 | Transfer device, method of use and method of adjustment |
Country Status (3)
Country | Link |
---|---|
CN (2) | CN112272966B (en) |
TW (5) | TW202412360A (en) |
WO (1) | WO2019244362A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7255000B2 (en) * | 2021-07-20 | 2023-04-10 | 信越化学工業株式会社 | Defect removal method, lift method, photomask and lift system |
JP7111916B1 (en) * | 2021-07-20 | 2022-08-02 | 信越化学工業株式会社 | Retransfer method and lift method |
CN113782650A (en) * | 2021-09-07 | 2021-12-10 | 苏州奕格飞半导体技术有限公司 | Wafer laser stripping device and method |
JP7490848B2 (en) | 2022-06-15 | 2024-05-27 | 信越化学工業株式会社 | Laser processing method, photomask and laser processing system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200400630A (en) * | 2002-04-25 | 2004-01-01 | Seiko Epson Corp | Manufacturing method and manufacturing apparatus of electronic device |
TW201528338A (en) * | 2013-11-19 | 2015-07-16 | 柔芬新拿科技公司 | Method and apparatus for forward deposition onto a substrate by burst ultrafast laser pulse energy transfer |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW448487B (en) * | 1997-11-22 | 2001-08-01 | Nippon Kogaku Kk | Exposure apparatus, exposure method and manufacturing method of device |
JP3511359B2 (en) * | 1998-02-27 | 2004-03-29 | 三菱電機株式会社 | Laser processing equipment |
US20030162108A1 (en) * | 2002-01-30 | 2003-08-28 | Eastman Kodak Company | Using spacer elements to make electroluminscent display devices |
KR101945638B1 (en) * | 2004-02-04 | 2019-02-07 | 가부시키가이샤 니콘 | Exposure apparatus, exposure method, and device producing method |
KR100635579B1 (en) * | 2004-12-20 | 2006-10-17 | 삼성에스디아이 주식회사 | laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus and fabrication method of OLED using the apparatus |
KR100793359B1 (en) * | 2006-05-03 | 2008-01-11 | 삼성에스디아이 주식회사 | Laser irridation apparatus, laser induced thermal imaging apparatus comprising the apparatus and fabrication method of OLED array substrate using the apparatus |
JP2009199856A (en) * | 2008-02-21 | 2009-09-03 | Sony Corp | Organic thin film manufacturing device and method |
KR101584827B1 (en) * | 2008-03-07 | 2016-01-13 | 가부시키가이샤 니콘 | Moving device and exposure device |
KR20100062595A (en) * | 2008-12-02 | 2010-06-10 | 엘지디스플레이 주식회사 | Laser induced thermal imaging apparatus and fabricating method of oled |
JP2013020768A (en) * | 2011-07-08 | 2013-01-31 | Ulvac Japan Ltd | Laser transfer device |
KR101340617B1 (en) * | 2011-12-30 | 2013-12-11 | 엘아이지에이디피 주식회사 | Tray for donor film |
KR102001226B1 (en) * | 2012-11-12 | 2019-07-25 | 삼성디스플레이 주식회사 | Laser induced thermal imaging apparatus and laser induced thermal imaging method |
KR20140133741A (en) * | 2013-05-10 | 2014-11-20 | 삼성디스플레이 주식회사 | Liti mask and laser irradiation device including thereof |
CN113399816B (en) * | 2016-09-30 | 2023-05-16 | 康宁股份有限公司 | Apparatus and method for laser machining transparent workpieces using non-axisymmetric beam spots |
-
2018
- 2018-06-26 WO PCT/JP2018/024113 patent/WO2019244362A1/en active Application Filing
- 2018-06-26 CN CN201880094255.5A patent/CN112272966B/en active Active
- 2018-06-26 CN CN202410036703.3A patent/CN117715492A/en active Pending
- 2018-06-27 TW TW112145274A patent/TW202412360A/en unknown
- 2018-06-27 TW TW112111310A patent/TWI827492B/en active
- 2018-06-27 TW TW111119187A patent/TWI784911B/en active
- 2018-06-27 TW TW111131169A patent/TWI801309B/en active
- 2018-06-27 TW TW107122157A patent/TWI768072B/en active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200400630A (en) * | 2002-04-25 | 2004-01-01 | Seiko Epson Corp | Manufacturing method and manufacturing apparatus of electronic device |
TW201528338A (en) * | 2013-11-19 | 2015-07-16 | 柔芬新拿科技公司 | Method and apparatus for forward deposition onto a substrate by burst ultrafast laser pulse energy transfer |
Also Published As
Publication number | Publication date |
---|---|
TWI768072B (en) | 2022-06-21 |
TW202234729A (en) | 2022-09-01 |
CN112272966B (en) | 2024-02-02 |
TW202301723A (en) | 2023-01-01 |
CN112272966A (en) | 2021-01-26 |
TWI784911B (en) | 2022-11-21 |
TW202329505A (en) | 2023-07-16 |
CN117715492A (en) | 2024-03-15 |
TW202002358A (en) | 2020-01-01 |
TWI827492B (en) | 2023-12-21 |
WO2019244362A1 (en) | 2019-12-26 |
TW202412360A (en) | 2024-03-16 |
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