TWI801309B - transfer device - Google Patents

transfer device Download PDF

Info

Publication number
TWI801309B
TWI801309B TW111131169A TW111131169A TWI801309B TW I801309 B TWI801309 B TW I801309B TW 111131169 A TW111131169 A TW 111131169A TW 111131169 A TW111131169 A TW 111131169A TW I801309 B TWI801309 B TW I801309B
Authority
TW
Taiwan
Prior art keywords
transfer device
transfer
Prior art date
Application number
TW111131169A
Other languages
Chinese (zh)
Other versions
TW202301723A (en
Inventor
山岡裕
仲田悟基
小澤周作
Original Assignee
日商信越化學工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商信越化學工業股份有限公司 filed Critical 日商信越化學工業股份有限公司
Publication of TW202301723A publication Critical patent/TW202301723A/en
Application granted granted Critical
Publication of TWI801309B publication Critical patent/TWI801309B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • B23K26/57Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Microwave Amplifiers (AREA)
  • Paper (AREA)
  • Massaging Devices (AREA)
  • Seal Device For Vehicle (AREA)
TW111131169A 2018-06-20 2018-06-27 transfer device TWI801309B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018116692 2018-06-20
JP2018-116692 2018-06-20

Publications (2)

Publication Number Publication Date
TW202301723A TW202301723A (en) 2023-01-01
TWI801309B true TWI801309B (en) 2023-05-01

Family

ID=68983359

Family Applications (5)

Application Number Title Priority Date Filing Date
TW112145274A TW202412360A (en) 2018-06-20 2018-06-27 Lift device and method for using same
TW112111310A TWI827492B (en) 2018-06-20 2018-06-27 Transfer method and photomask
TW111119187A TWI784911B (en) 2018-06-20 2018-06-27 transfer device
TW111131169A TWI801309B (en) 2018-06-20 2018-06-27 transfer device
TW107122157A TWI768072B (en) 2018-06-20 2018-06-27 Transfer device, method of use and method of adjustment

Family Applications Before (3)

Application Number Title Priority Date Filing Date
TW112145274A TW202412360A (en) 2018-06-20 2018-06-27 Lift device and method for using same
TW112111310A TWI827492B (en) 2018-06-20 2018-06-27 Transfer method and photomask
TW111119187A TWI784911B (en) 2018-06-20 2018-06-27 transfer device

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW107122157A TWI768072B (en) 2018-06-20 2018-06-27 Transfer device, method of use and method of adjustment

Country Status (3)

Country Link
CN (2) CN112272966B (en)
TW (5) TW202412360A (en)
WO (1) WO2019244362A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7255000B2 (en) * 2021-07-20 2023-04-10 信越化学工業株式会社 Defect removal method, lift method, photomask and lift system
JP7111916B1 (en) * 2021-07-20 2022-08-02 信越化学工業株式会社 Retransfer method and lift method
CN113782650A (en) * 2021-09-07 2021-12-10 苏州奕格飞半导体技术有限公司 Wafer laser stripping device and method
JP7490848B2 (en) 2022-06-15 2024-05-27 信越化学工業株式会社 Laser processing method, photomask and laser processing system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200400630A (en) * 2002-04-25 2004-01-01 Seiko Epson Corp Manufacturing method and manufacturing apparatus of electronic device
TW201528338A (en) * 2013-11-19 2015-07-16 柔芬新拿科技公司 Method and apparatus for forward deposition onto a substrate by burst ultrafast laser pulse energy transfer

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
TW448487B (en) * 1997-11-22 2001-08-01 Nippon Kogaku Kk Exposure apparatus, exposure method and manufacturing method of device
JP3511359B2 (en) * 1998-02-27 2004-03-29 三菱電機株式会社 Laser processing equipment
US20030162108A1 (en) * 2002-01-30 2003-08-28 Eastman Kodak Company Using spacer elements to make electroluminscent display devices
KR101945638B1 (en) * 2004-02-04 2019-02-07 가부시키가이샤 니콘 Exposure apparatus, exposure method, and device producing method
KR100635579B1 (en) * 2004-12-20 2006-10-17 삼성에스디아이 주식회사 laser induced thermal imaging apparatus, laser induced thermal imaging method using the apparatus and fabrication method of OLED using the apparatus
KR100793359B1 (en) * 2006-05-03 2008-01-11 삼성에스디아이 주식회사 Laser irridation apparatus, laser induced thermal imaging apparatus comprising the apparatus and fabrication method of OLED array substrate using the apparatus
JP2009199856A (en) * 2008-02-21 2009-09-03 Sony Corp Organic thin film manufacturing device and method
KR101584827B1 (en) * 2008-03-07 2016-01-13 가부시키가이샤 니콘 Moving device and exposure device
KR20100062595A (en) * 2008-12-02 2010-06-10 엘지디스플레이 주식회사 Laser induced thermal imaging apparatus and fabricating method of oled
JP2013020768A (en) * 2011-07-08 2013-01-31 Ulvac Japan Ltd Laser transfer device
KR101340617B1 (en) * 2011-12-30 2013-12-11 엘아이지에이디피 주식회사 Tray for donor film
KR102001226B1 (en) * 2012-11-12 2019-07-25 삼성디스플레이 주식회사 Laser induced thermal imaging apparatus and laser induced thermal imaging method
KR20140133741A (en) * 2013-05-10 2014-11-20 삼성디스플레이 주식회사 Liti mask and laser irradiation device including thereof
CN113399816B (en) * 2016-09-30 2023-05-16 康宁股份有限公司 Apparatus and method for laser machining transparent workpieces using non-axisymmetric beam spots

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200400630A (en) * 2002-04-25 2004-01-01 Seiko Epson Corp Manufacturing method and manufacturing apparatus of electronic device
TW201528338A (en) * 2013-11-19 2015-07-16 柔芬新拿科技公司 Method and apparatus for forward deposition onto a substrate by burst ultrafast laser pulse energy transfer

Also Published As

Publication number Publication date
TWI768072B (en) 2022-06-21
TW202234729A (en) 2022-09-01
CN112272966B (en) 2024-02-02
TW202301723A (en) 2023-01-01
CN112272966A (en) 2021-01-26
TWI784911B (en) 2022-11-21
TW202329505A (en) 2023-07-16
CN117715492A (en) 2024-03-15
TW202002358A (en) 2020-01-01
TWI827492B (en) 2023-12-21
WO2019244362A1 (en) 2019-12-26
TW202412360A (en) 2024-03-16

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