TWI753656B - 樹脂成形裝置及樹脂成形品的製造方法 - Google Patents
樹脂成形裝置及樹脂成形品的製造方法 Download PDFInfo
- Publication number
- TWI753656B TWI753656B TW109140126A TW109140126A TWI753656B TW I753656 B TWI753656 B TW I753656B TW 109140126 A TW109140126 A TW 109140126A TW 109140126 A TW109140126 A TW 109140126A TW I753656 B TWI753656 B TW I753656B
- Authority
- TW
- Taiwan
- Prior art keywords
- resin
- release film
- film
- die
- cavity
- Prior art date
Links
- 239000011347 resin Substances 0.000 title claims abstract description 185
- 229920005989 resin Polymers 0.000 title claims abstract description 185
- 238000000465 moulding Methods 0.000 title claims abstract description 97
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 77
- 230000002093 peripheral effect Effects 0.000 claims abstract description 19
- 238000007599 discharging Methods 0.000 claims abstract 2
- 238000001179 sorption measurement Methods 0.000 claims description 35
- 239000012528 membrane Substances 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 description 52
- 235000012431 wafers Nutrition 0.000 description 16
- 239000007789 gas Substances 0.000 description 14
- 238000005520 cutting process Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 238000003860 storage Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000000748 compression moulding Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/44—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/12—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels
- B29C33/14—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels against the mould wall
- B29C33/18—Moulds or cores; Details thereof or accessories therefor with incorporated means for positioning inserts, e.g. labels against the mould wall using vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/68—Release sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/34—Feeding the material to the mould or the compression means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C2043/3205—Particular pressure exerting means for making definite articles
- B29C2043/3222—Particular pressure exerting means for making definite articles pressurized gas, e.g. air
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C2043/3602—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C2043/3602—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
- B29C2043/3605—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020006406A JP7417429B2 (ja) | 2020-01-17 | 2020-01-17 | 樹脂成形装置、樹脂成形品の製造方法 |
JP2020-006406 | 2020-01-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202129779A TW202129779A (zh) | 2021-08-01 |
TWI753656B true TWI753656B (zh) | 2022-01-21 |
Family
ID=76809874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW109140126A TWI753656B (zh) | 2020-01-17 | 2020-11-17 | 樹脂成形裝置及樹脂成形品的製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7417429B2 (ja) |
KR (1) | KR102361912B1 (ja) |
CN (1) | CN113134924B (ja) |
TW (1) | TWI753656B (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017196752A (ja) * | 2016-04-25 | 2017-11-02 | Towa株式会社 | 樹脂成形装置、樹脂成形方法、樹脂成形品の製造方法及び製品の製造方法 |
JP2018167459A (ja) * | 2017-03-29 | 2018-11-01 | Towa株式会社 | 成形型、樹脂成形装置、樹脂成形方法、及び樹脂成形品の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4262468B2 (ja) | 2002-10-30 | 2009-05-13 | アピックヤマダ株式会社 | 樹脂モールド方法、樹脂モールド装置およびこれに用いる支持治具 |
JP5576197B2 (ja) * | 2010-07-08 | 2014-08-20 | Towa株式会社 | 電子部品の圧縮成形方法及び成形装置 |
JP6169516B2 (ja) | 2014-03-31 | 2017-07-26 | Towa株式会社 | 樹脂成形装置及び樹脂成形方法 |
JP6430143B2 (ja) * | 2014-04-30 | 2018-11-28 | Towa株式会社 | 樹脂成形装置及び樹脂成形方法並びに成形製品の製造方法 |
JP6310773B2 (ja) * | 2014-05-22 | 2018-04-11 | Towa株式会社 | 樹脂成形装置及び樹脂成形方法 |
JP6298719B2 (ja) * | 2014-06-09 | 2018-03-20 | Towa株式会社 | 樹脂封止装置及び樹脂封止方法 |
JP6672103B2 (ja) * | 2016-08-01 | 2020-03-25 | Towa株式会社 | 樹脂成形装置及び樹脂成形品製造方法 |
JP6423399B2 (ja) * | 2016-09-27 | 2018-11-14 | アピックヤマダ株式会社 | 樹脂成形方法、フィルム搬送装置および樹脂成形装置 |
JP6804409B2 (ja) * | 2017-08-04 | 2020-12-23 | Towa株式会社 | 樹脂成形装置及び樹脂成形品製造方法 |
JP6854784B2 (ja) * | 2018-01-15 | 2021-04-07 | Towa株式会社 | 樹脂成形装置及び樹脂成形品製造方法 |
-
2020
- 2020-01-17 JP JP2020006406A patent/JP7417429B2/ja active Active
- 2020-11-10 CN CN202011245436.9A patent/CN113134924B/zh active Active
- 2020-11-17 TW TW109140126A patent/TWI753656B/zh active
- 2020-11-25 KR KR1020200159537A patent/KR102361912B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017196752A (ja) * | 2016-04-25 | 2017-11-02 | Towa株式会社 | 樹脂成形装置、樹脂成形方法、樹脂成形品の製造方法及び製品の製造方法 |
JP2018167459A (ja) * | 2017-03-29 | 2018-11-01 | Towa株式会社 | 成形型、樹脂成形装置、樹脂成形方法、及び樹脂成形品の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN113134924B (zh) | 2023-04-07 |
KR20210093149A (ko) | 2021-07-27 |
CN113134924A (zh) | 2021-07-20 |
JP7417429B2 (ja) | 2024-01-18 |
JP2021112864A (ja) | 2021-08-05 |
TW202129779A (zh) | 2021-08-01 |
KR102361912B1 (ko) | 2022-02-14 |
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