TWI666090B - Blade replacement mechanism, cutting apparatus and blade replacement method - Google Patents
Blade replacement mechanism, cutting apparatus and blade replacement method Download PDFInfo
- Publication number
- TWI666090B TWI666090B TW107121621A TW107121621A TWI666090B TW I666090 B TWI666090 B TW I666090B TW 107121621 A TW107121621 A TW 107121621A TW 107121621 A TW107121621 A TW 107121621A TW I666090 B TWI666090 B TW I666090B
- Authority
- TW
- Taiwan
- Prior art keywords
- blade
- suction
- adsorption
- replacement
- unit
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
- B26D7/2614—Means for mounting the cutting member
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
- B26D7/2614—Means for mounting the cutting member
- B26D7/2621—Means for mounting the cutting member for circular cutters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D35/00—Tools for shearing machines or shearing devices; Holders or chucks for shearing tools
- B23D35/002—Means for mounting the cutting members
- B23D35/004—Means for mounting the cutting members for circular cutting members
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Details Of Cutting Devices (AREA)
- Nonmetal Cutting Devices (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
本發明的刀片更換機構、切斷裝置及刀片更換方法能實現刀片的自動更換。刀片更換機構具備:第一吸附部(4),以吸附刀片(22)的方式構成;第二吸附部(5),位於第一吸附部(4)的內側,以與第一吸附部(4)的吸附相獨立地吸附凸緣或輪轂的方式構成;以及裝卸構件旋轉部(6),位於第二吸附部(5)的內側,以能使裝卸構件(24)旋轉的方式構成,所述裝卸構件(24)能對主軸(21)裝卸刀片(22)。The blade replacement mechanism, cutting device and blade replacement method of the invention can realize automatic blade replacement. The blade replacement mechanism includes a first suction section (4) configured to suction the blade (22), and a second suction section (5) located inside the first suction section (4) to communicate with the first suction section (4). ) The suction phase is configured to independently adsorb the flange or the hub; and the attachment / detachment member rotating portion (6) is located inside the second suction portion (5) and is configured to rotate the attachment / detachment member (24), as described above. The attaching and detaching member (24) can attach and detach the blade (22) to the main shaft (21).
Description
本發明是有關於一種刀片(blade)更換機構、切斷裝置以及刀片更換方法。The invention relates to a blade replacement mechanism, a cutting device, and a blade replacement method.
例如,日本專利特開2016-64450號公報(專利文獻1)中記載了一種無輪轂(hubless)切削刀片的更換系統。專利文獻1所記載的切削刀片的更換系統在與切削刀片的側面接觸的固定凸緣(flange)中設置貫穿孔,吸附固定凸緣並且穿過固定凸緣的貫穿孔而吸附切削刀片。For example, Japanese Patent Laid-Open No. 2016-64450 (Patent Document 1) describes a hubless cutting insert replacement system. The cutting insert replacement system described in Patent Document 1 has a through hole in a fixed flange that is in contact with the side surface of the cutting insert, sucks the fixed flange, and sucks the cutting insert through the through hole of the fixed flange.
然而,專利文獻1所記載的切削刀片更換系統中,關於如何裝卸用來將切削刀片及固定凸緣固定在主軸(spindle)上的固定螺帽的方面,既未作記載也未作啟示。因此,本領域技術人員無法根據專利文獻1的記載來實現刀片的自動更換。However, in the cutting insert replacement system described in Patent Document 1, there is neither description nor suggestion on how to attach and detach a fixed nut for fixing the cutting insert and a fixed flange to a spindle. Therefore, those skilled in the art cannot implement automatic blade replacement according to the description in Patent Document 1.
根據本文公開的實施形態,能提供一種刀片更換機構,此刀片更換機構具備:第一吸附部,以吸附刀片的方式構成;第二吸附部,位於第一吸附部的內側,以與第一吸附部的吸附相獨立地吸附凸緣或輪轂(hub)的方式構成;以及裝卸構件旋轉部,位於第二吸附部的內側,以能使裝卸構件旋轉的方式構成,所述裝卸構件能對主軸裝卸刀片。According to the embodiments disclosed herein, a blade replacement mechanism can be provided. The blade replacement mechanism includes: a first adsorption section configured to adsorb the blade; and a second adsorption section located inside the first adsorption section to communicate with the first adsorption section. The adsorption phase of the portion is configured to independently adsorb the flange or the hub; and the attachment / detachment member rotation portion is located inside the second adsorption portion and is configured to rotate the attachment / detachment member, and the attachment / detachment member can attach and detach the spindle blade.
根據本文公開的實施形態,能提供一種切斷裝置,此切斷裝置具備所述刀片更換機構、刀片以及主軸。According to the embodiment disclosed herein, it is possible to provide a cutting device including the blade replacement mechanism, a blade, and a spindle.
根據本文公開的實施形態,能提供一種刀片更換方法,此刀片更換方法使用刀片更換機構,此刀片更換機構具備:第一吸附部,以吸附刀片的方式構成;第二吸附部,位於第一吸附部的內側,以與第一吸附部的吸附相獨立地吸附凸緣或輪轂的方式構成;以及裝卸構件旋轉部,位於第二吸附部的內側,以能使裝卸構件旋轉的方式構成,所述裝卸構件能對主軸裝卸刀片;並且所述刀片更換方法包括以下工序:在利用第一吸附部吸附了刀片並且與第一吸附部的吸附相獨立地利用第二吸附部吸附了凸緣或輪轂的狀態下,利用裝卸構件旋轉部使裝卸構件旋轉,將裝卸構件從主軸卸下;使包含第一吸附部、第二吸附部以及裝卸構件旋轉部的吸附單元移動到收納部;解除第一吸附部的吸附而將刀片收納到收納部中;利用第一吸附部來吸附收納部中收納的更換用刀片;使吸附單元移動而使更換用刀片嵌入到主軸上;以及利用裝卸構件旋轉部使裝卸構件旋轉而將更換用刀片固定在主軸上。According to the embodiments disclosed herein, a blade replacement method can be provided. The blade replacement method uses a blade replacement mechanism. The blade replacement mechanism is provided with: a first suction section configured to suction the blade; and a second suction section located at the first suction. The inside of the part is configured to suck the flange or the hub independently of the suction of the first suction part; and the mounting member rotation part is located inside the second suction part and is configured to rotate the loading and unloading member, said The attaching and detaching member can attach and detach a blade to and from the main shaft; and the blade replacement method includes the following steps: when the blade is adsorbed by the first adsorption portion and the flange or the hub is adsorbed by the second adsorption portion independently of the adsorption of the first adsorption portion; In the state, the attaching and detaching member is rotated by the attaching and detaching member rotating portion, and the attaching and detaching member is removed from the main shaft; the adsorption unit including the first adsorption portion, the second adsorption portion, and the attaching and rotating member rotation portion is moved to the storage portion; The blade is stored in the storage section by the suction; the first suction section is used to suction the replacement knife stored in the storage section. ; The suction unit is moved so that the replacement blade fitted to the main shaft; and using the detachable unit detachably rotating member rotating member fixed to a replacement blade to the spindle.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.
以下,對實施形態進行說明。此外,用於說明實施形態的圖式中,相同參照符號表示相同部分或相應部分。Hereinafter, embodiments will be described. In the drawings for explaining the embodiments, the same reference numerals denote the same or corresponding parts.
圖1中示出作為本發明的切斷裝置的一例的實施形態的切斷裝置的示意性平面圖。如圖1所示那樣,實施形態的切斷裝置為通過將切斷物件物切斷而單片化成多個製品的裝置。實施形態的切斷裝置111分別具備基板供給模組A、基板切斷模組B以及檢查模組C作為構成要素。各構成要素(各模組A~模組C)分別相對於其他構成要素而能裝卸且能更換。FIG. 1 is a schematic plan view of a cutting device according to an embodiment as an example of the cutting device of the present invention. As shown in FIG. 1, the cutting device according to the embodiment is a device that is singulated into a plurality of products by cutting a cut object. The cutting device 111 according to the embodiment includes, as constituent elements, a substrate supply module A, a substrate cutting module B, and an inspection module C, respectively. Each component (each module A to module C) can be attached to and detached from other components, and can be replaced.
基板供給模組A例如具備:基板供給機構113,以供給相當於切斷對象物的一例的已密封基板112的方式構成;以及控制部CTL,以進行切斷裝置111的動作或控制等的方式構成。已密封基板112例如具備:印刷基板或包含引線框架(lead frame)等的基板(未圖示)、安裝在基板所具有的多個區域中的多個功能元件(半導體元件等晶片)(未圖示)、以及以統一覆蓋多個區域的方式形成的密封樹脂(未圖示)。已密封基板112為最終被切斷並單片化的切斷物件物。已密封基板112例如能由搬送機構(未圖示)等搬送到基板切斷模組B。The substrate supply module A includes, for example, a substrate supply mechanism 113 configured to supply a sealed substrate 112 corresponding to an example of a cutting target, and a control unit CTL to perform operations or control of the cutting device 111 and the like. Make up. The sealed substrate 112 includes, for example, a printed circuit board, a substrate (not shown) including a lead frame, and the like, and a plurality of functional elements (wafers such as semiconductor elements) mounted in a plurality of regions of the substrate (not shown) (Shown) and a sealing resin (not shown) formed so as to cover a plurality of areas uniformly. The sealed substrate 112 is a cut object that is finally cut and singulated. The sealed substrate 112 can be transferred to the substrate cutting module B by, for example, a transfer mechanism (not shown).
基板切斷模組B例如能具備:以設置已密封基板112的方式構成的切斷用平臺114、以使切斷用平臺114在Y方向上移動的方式構成的移動機構115、以使切斷用平臺114在θ方向上旋轉的方式構成的旋轉機構116、後述的主軸21、以及後述實施形態的刀片更換機構120。切斷用平臺114例如也可具備切斷用夾具(未圖示),在切斷用平臺114具備切斷用夾具的情況下,能在切斷用夾具上設置已密封基板112。The substrate cutting module B can include, for example, a cutting platform 114 configured to provide a sealed substrate 112, and a moving mechanism 115 configured to move the cutting platform 114 in the Y direction to cut the substrate. A rotation mechanism 116 configured to rotate the platform 114 in the θ direction, a spindle 21 described later, and a blade replacement mechanism 120 of the embodiment described later. The cutting platform 114 may include, for example, a cutting jig (not shown). When the cutting platform 114 includes a cutting jig, the sealed substrate 112 may be provided on the cutting jig.
圖1中,從便於說明的觀點而將實施形態的切斷裝置111示作具有一個主軸21的單主軸構成的切斷裝置。但是,實施形態的切斷裝置111當然不限定于單主軸構成的切斷裝置,例如也可設為後述那樣的具有兩個主軸的雙主軸構成的切斷裝置。In FIG. 1, the cutting device 111 according to the embodiment is shown as a cutting device having a single spindle having one spindle 21 from the viewpoint of ease of explanation. However, it is needless to say that the cutting device 111 of the embodiment is not limited to a cutting device having a single spindle configuration, and may be, for example, a cutting device having a dual spindle configuration including two spindles as described later.
主軸21例如能以能獨立地在X方向與Z方向上移動的方式構成。在主軸21的旋轉軸的頂端部,例如能安裝圓板狀的刀片22。刀片22例如能與相對於旋轉軸的軸方向(X方向)正交的面(包含Y軸及Z軸的面)平行而固定。另外,例如為了抑制由高速旋轉的刀片22所產生的摩擦熱,主軸21也可具備噴射切削水的切削水用噴嘴(未圖示)。另外,能一面使切斷用平臺114相對於主軸21而相對地移動一面將已密封基板112切斷。刀片22例如能以通過在包含Y軸及Z軸的面內旋轉而將已密封基板112切斷的方式構成。The main shaft 21 can be configured to be independently movable in the X direction and the Z direction, for example. A disk-shaped blade 22 can be attached to a distal end portion of a rotating shaft of the main shaft 21, for example. The blade 22 can be fixed in parallel with, for example, a plane (a plane including the Y axis and the Z axis) orthogonal to the axial direction (X direction) with respect to the rotation axis. Further, for example, in order to suppress frictional heat generated by the high-speed rotating blade 22, the spindle 21 may be provided with a cutting water nozzle (not shown) that sprays cutting water. In addition, the sealed substrate 112 can be cut while the cutting platform 114 is relatively moved relative to the main shaft 21. The blade 22 can be configured to cut the sealed substrate 112 by rotating in a plane including the Y-axis and the Z-axis, for example.
檢查模組C例如能具備檢查用平臺110以及托盤122。檢查用平臺110例如能以能設置已切斷基板121的方式構成,所述已切斷基板121為包含將已密封基板112切斷並經單片化而成的多個製品P的集合體。多個製品P例如能由檢查用的相機(未圖示)檢查而分選為良品與不良品。托盤122例如能以能收容被分選為良品的製品P的方式構成。The inspection module C can include, for example, an inspection platform 110 and a tray 122. The inspection platform 110 can be configured, for example, so that a cut substrate 121 can be provided, and the cut substrate 121 is an assembly including a plurality of products P obtained by cutting and singulating the sealed substrate 112. The plurality of products P can be sorted into a good product and a defective product by, for example, inspection by an inspection camera (not shown). The tray 122 can be configured, for example, so as to be able to accommodate products P that have been sorted into good products.
圖2中示出實施形態的刀片更換機構中所用的吸附臂的一例的示意性立體圖。吸附臂1具備吸附單元2以及安裝在吸附單元2上的臂部3。吸附單元2是安裝在臂部3的一端。FIG. 2 is a schematic perspective view showing an example of a suction arm used in the blade changing mechanism of the embodiment. The suction arm 1 includes a suction unit 2 and an arm portion 3 attached to the suction unit 2. The suction unit 2 is attached to one end of the arm portion 3.
圖3中示出從其他角度觀察圖2所示的吸附臂1時的示意性立體圖。吸附單元2具備圓筒狀的第一吸附部4、圓筒狀的第二吸附部5以及環狀的裝卸構件旋轉部6。圖2中,裝卸構件旋轉部6、第二吸附部5以及第一吸附部4是以如下方式示出:從吸附單元2的吸附側(遠處側)到吸附單元2的臂部3側(近處側),以第一吸附部4、第二吸附部5及裝卸構件旋轉部6的順序看到各自的遠處側的表面。此外,在吸附單元2的說明中,近處側是指臂部3側,遠處側是指吸附單元2的吸附側。FIG. 3 is a schematic perspective view when the suction arm 1 shown in FIG. 2 is viewed from another angle. The adsorption unit 2 includes a first cylindrical adsorption section 4, a second cylindrical adsorption section 5, and an annular attachment / detachment member rotating section 6. In FIG. 2, the attachment / detachment member rotating portion 6, the second suction portion 5, and the first suction portion 4 are shown as follows: from the suction side (distant side) of the suction unit 2 to the arm portion 3 side of the suction unit 2 ( Proximity side), and see the respective distal side surfaces in the order of the first suction part 4, the second suction part 5, and the attachment / detachment member rotation part 6. In the description of the adsorption unit 2, the near side refers to the arm portion 3 side, and the far side refers to the adsorption side of the adsorption unit 2.
圖4中示出圖2及圖3所示的吸附單元2的示意性平面圖。第二吸附部5位於第一吸附部4的內側,裝卸構件旋轉部6位於第二吸附部5的內側。第一吸附部4具備以吸附後述刀片的方式構成的多個第一吸附口4x、以及與多個第一吸附口4x連通的環狀的第一吸附槽4y。第二吸附部5具備以吸附後述凸緣或輪轂的方式構成的多個第二吸附口5x、以及與多個第二吸附口5x連通的環狀的第二吸附槽5y。裝卸構件旋轉部6具備彼此空開間隔而配置成環狀的多個突出部6a。裝卸構件旋轉部6是以能旋轉的方式構成,例如能向圖4的箭頭方向旋轉,但裝卸構件旋轉部6的旋轉方向當然並無特別限定。FIG. 4 is a schematic plan view of the adsorption unit 2 shown in FIGS. 2 and 3. The second suction part 5 is located inside the first suction part 4, and the attachment / detachment member rotation part 6 is located inside the second suction part 5. The first suction unit 4 includes a plurality of first suction ports 4x configured to suction a blade described later, and a ring-shaped first suction tank 4y communicating with the plurality of first suction ports 4x. The second suction unit 5 includes a plurality of second suction ports 5x configured to suction a flange or a hub described later, and a ring-shaped second suction tank 5y that communicates with the plurality of second suction ports 5x. The attaching / detaching member rotating portion 6 includes a plurality of protruding portions 6 a arranged in a ring shape at intervals from each other. The attachment / detachment member rotation portion 6 is configured to be rotatable, and can be rotated, for example, in the arrow direction of FIG. 4. However, the rotation direction of the attachment / detachment member rotation portion 6 is of course not particularly limited.
圖5中示出圖2~圖4所示的吸附單元2的示意性截面圖。第一吸附部4為中空,中空的第二吸附部5位於第一吸附部4的中空內側。在第一吸附部4的包圍中空的外壁中設有氣體流路14,此氣體流路14是以經由第一吸附口4x而與第一吸附槽4y連通並抽吸後述刀片的方式構成。氣體流路14連接於與第一吸附口4x連通的氣體流路4z。第一吸附部4具備從第一吸附部4的近處側的外壁的一部分向內側突出的突出部4a。突出部4a在突出部4a的近處側具備突出部近處面4b。第一吸附部4具備第一吸附部遠處面4c作為第一吸附部4的遠處側的表面。FIG. 5 is a schematic cross-sectional view of the adsorption unit 2 shown in FIGS. 2 to 4. The first adsorption part 4 is hollow, and the hollow second adsorption part 5 is located inside the hollow of the first adsorption part 4. A gas flow path 14 is provided in the outer wall surrounding the hollow of the first suction section 4. The gas flow path 14 is configured to communicate with the first suction tank 4 y through the first suction port 4 x and suck a blade described later. The gas flow path 14 is connected to a gas flow path 4z communicating with the first adsorption port 4x. The first suction portion 4 includes a protruding portion 4 a protruding inward from a part of the outer wall on the near side of the first suction portion 4. The protruding portion 4a includes a protruding portion near surface 4b on the near side of the protruding portion 4a. The first adsorption section 4 includes a first adsorption section distal surface 4 c as a surface on the distal side of the first adsorption section 4.
在第二吸附部5的包圍中空的外壁中設有氣體流路13,此氣體流路13是以經由第二吸附口5x而與第二吸附槽5y連通並吸附凸緣或輪轂的方式構成。在氣體流路13的一端,安裝有以抽吸氣體流路13中的氣體的方式構成的氣體抽吸口12。在氣體流路13的另一端,連接有與第二吸附口5x連通的氣體流路5z。第二吸附部5在第二吸附部5的近處側的端部具備向內側伸出的鉤狀部5a。鉤狀部5a具備鉤狀部遠處面5b作為遠處側的表面,並且具備鉤狀部近處面5c作為近處側的表面。第二吸附部5具備第二吸附部遠處面5d作為第二吸附部5的遠處側的表面。A gas flow path 13 is provided in the outer wall surrounding the hollow of the second adsorption section 5. The gas flow path 13 is configured to communicate with the second adsorption tank 5 y through the second adsorption port 5 x and adsorb the flange or the hub. A gas suction port 12 configured to suck the gas in the gas flow path 13 is attached to one end of the gas flow path 13. A gas flow path 5z communicating with the second adsorption port 5x is connected to the other end of the gas flow path 13. The second suction portion 5 includes a hook-like portion 5 a protruding inward at an end portion on the near side of the second suction portion 5. The hook-shaped portion 5 a includes a hook-shaped portion distal surface 5 b as a surface on the far side, and includes a hook-shaped portion near surface 5 c as a near-side surface. The second suction section 5 includes a second suction section distal surface 5 d as a surface on the far side of the second suction section 5.
第二吸附部5也為中空,裝卸構件旋轉部6位於第二吸附部5的中空內側。裝卸構件旋轉部6的突出部6a為裝卸構件旋轉部6朝向遠處側而局部地突出的構件。在裝卸構件旋轉部6的近處側安裝有能旋轉的旋轉驅動構件9。通過旋轉驅動構件9以軸10為中心而旋轉,裝卸構件旋轉部6也能旋轉。裝卸構件旋轉部6的遠處側的一部分較旋轉驅動構件9而更向外側伸出。裝卸構件旋轉部6的向外側伸出的部分具備旋轉部近處面6b作為近處側的表面。旋轉驅動構件9的近處側也局部地向外側伸出。旋轉驅動構件9的向外側伸出的部分具備近處側伸出部遠處面9a作為遠處側的表面。The second suction section 5 is also hollow, and the attachment / detachment member rotating section 6 is located inside the hollow of the second suction section 5. The protruding portion 6 a of the attaching / detaching member rotating portion 6 is a member which partially protrudes toward the far side from the attaching / detaching member rotating portion 6. A rotation drive member 9 is attached to the proximal side of the attachment / detachment member rotation portion 6. When the rotation driving member 9 rotates around the shaft 10, the attachment / detachment member rotation portion 6 can also rotate. A part of the distal side of the attachment / detachment member rotating portion 6 protrudes more outward than the rotation driving member 9. A portion of the attaching / detaching member rotating portion 6 protruding outward includes a rotating portion near surface 6 b as a near surface. The proximal side of the rotation driving member 9 also partially protrudes to the outside. A portion of the rotation drive member 9 that protrudes to the outside includes a distal surface 9 a of the proximal-side protruding portion as a distal-side surface.
筒狀的套管(sleeve)15位於將裝卸構件旋轉部6、旋轉驅動構件9及軸10的周圍包圍的位置。套管15具備以能收容裝卸構件旋轉部6的方式構成的收容部15a、以及以支持收容部15a的方式構成的支援部15b。收容部15a較支持部15b而更向外側伸出。收容部15a具備收容部近處面15c作為近處側的表面。收容部近處面15c與鉤狀部遠處面5b相向。支持部15b具備支持部遠處面15d作為遠處側的表面。A cylindrical sleeve 15 is located at a position that surrounds the periphery of the attachment / detachment member rotating portion 6, the rotation driving member 9, and the shaft 10. The sleeve 15 includes a storage portion 15 a configured to accommodate the attachment member rotating portion 6, and a support portion 15 b configured to support the storage portion 15 a. The accommodating portion 15a protrudes more outward than the supporting portion 15b. The accommodating portion 15a includes a accommodating portion near surface 15c as a surface on the near side. The accommodating section near surface 15c faces the hook-shaped section distant surface 5b. The support portion 15b includes a distant surface 15d of the support portion as a surface on the far side.
在套管15的近處側,安裝有以能將吸附單元2與臂部3連結的方式構成的連結部11。連結部11是通過將連結部11的遠處側的突出部11a嵌入到套管15的近處側的中空而安裝在套管15上。連結部11具備與鉤狀部近處面5c相向的連結部內側近處面11b、以及與突出部近處面4b相向的連結部外側近處面11c。連結部外側近處面11c位於較連結部內側近處面11b更靠近處且外側。A connection portion 11 configured to connect the suction unit 2 and the arm portion 3 is attached to the proximal side of the sleeve 15. The connecting portion 11 is mounted on the cannula 15 by fitting the distal portion 11 a of the connecting portion 11 into the hollow on the near side of the cannula 15. The connecting portion 11 includes a connecting portion inner near surface 11b facing the hooked portion near surface 5c, and a connecting portion outer near surface 11c facing the protruding portion near surface 4b. The connecting portion outer-side near surface 11c is located closer to the outside than the connecting portion inner-side near surface 11b.
第一彈簧16位於在旋轉部近處面6b與近處側伸出部遠處面9a之間將旋轉驅動構件9的周圍包圍的位置。第一彈簧16能通過旋轉部近處面6b與近處側伸出部遠處面9a之間的距離變化而伸縮。The first spring 16 is located at a position that surrounds the periphery of the rotation driving member 9 between the rotating portion near surface 6b and the near-side protruding portion distant surface 9a. The first spring 16 is capable of expanding and contracting due to a change in the distance between the rotating portion near surface 6b and the near-side protruding portion distant surface 9a.
第二彈簧8位於在鉤狀部近處面5c與連結部內側近處面11b之間將支持部15b的周圍包圍的位置。第二彈簧8能通過鉤狀部近處面5c與連結部內側近處面11b之間的距離變化而伸縮。The second spring 8 is located at a position that surrounds the periphery of the support portion 15b between the hook-like portion near surface 5c and the connecting portion inner-side near surface 11b. The second spring 8 can expand and contract due to a change in the distance between the hook-like portion near surface 5c and the connecting portion inner-side near surface 11b.
第三彈簧7位於在突出部近處面4b與連結部外側近處面11c之間將第二彈簧8的周圍包圍的位置。第三彈簧7能通過突出部近處面4b與連結部外側近處面11c之間的距離變化而伸縮。The third spring 7 is located at a position that surrounds the periphery of the second spring 8 between the protruding portion near surface 4b and the connecting portion outside near surface 11c. The third spring 7 can expand and contract due to a change in the distance between the protruding portion near surface 4b and the connecting portion outside near surface 11c.
以下,對使用具備所述吸附臂的實施形態的刀片更換機構的實施形態的刀片更換方法進行說明。本實施形態中,對刀片22為不具有輪轂的無輪轂刀片的情況進行說明,但本實施形態不限定於無輪轂刀片,當然也能應用於刀片22具有輪轂的帶輪轂刀片。Hereinafter, a blade replacement method of an embodiment using the blade replacement mechanism of the embodiment including the suction arm will be described. In this embodiment, the case where the blade 22 is a hubless blade without a hub will be described. However, this embodiment is not limited to a hubless blade, and it can of course be applied to a hub blade with a blade 22 having a hub.
首先,如圖6的示意性截面圖所示那樣,使吸附單元2靠近已使用過的刀片22。此處,成為更換對象的已使用過的刀片22是被夾入到主軸21的近處側凸緣20與遠處側凸緣23之間。而且,利用例如螺帽等裝卸構件24將遠處側凸緣23緊固在近處側凸緣20上,由此將刀片22固定在主軸21的近處側凸緣20與遠處側凸緣23之間。此外,所謂近處側凸緣20的近處側是指相對於主軸21的近處側,所謂遠處側凸緣23的遠處側是指相對於主軸21的遠處側。First, as shown in the schematic cross-sectional view of FIG. 6, the adsorption unit 2 is brought close to the used blade 22. Here, the used blade 22 to be replaced is sandwiched between the proximal flange 20 and the distal flange 23 of the main shaft 21. Further, the distal flange 23 is fastened to the proximal flange 20 by a mounting member 24 such as a nut, so that the blade 22 is fixed to the proximal flange 20 and the distal flange of the spindle 21. Between 23. The near side of the near-side flange 20 is a near side with respect to the main shaft 21, and the far side of the far-side flange 23 is a far side with respect to the main shaft 21.
接下來,如圖7的示意性截面圖所示那樣,使吸附單元2進一步朝遠處側(主軸21側)移動,直到第一吸附部4的第一吸附部遠處面4c與刀片22的近處側(臂部3側)的表面接觸。Next, as shown in the schematic cross-sectional view of FIG. 7, the adsorption unit 2 is further moved toward the far side (the main shaft 21 side) until the first adsorption unit distal surface 4 c of the first adsorption unit 4 and the blade 22 The surface on the near side (the arm part 3 side) is in contact.
然後,如圖8的示意性截面圖所示那樣,使臂部3向遠處側(主軸21側)移動,以使吸附單元2進一步向遠處側(主軸21側)移動。此時,雖然第一吸附部4因刀片22而從遠處側(主軸21側)向近處側(臂部3側)受力,但第三彈簧7與突出部近處面4b接觸並收縮,因此第一吸附部4的移動得到抑制,對刀片22的過度負載得到抑制。然後,在第一吸附部4的移動得到抑制的狀態下,第二吸附部5向遠處側(主軸21側)移動,第二吸附部5的遠處側的第二吸附部遠處面5d與遠處側凸緣23接觸。Then, as shown in the schematic sectional view of FIG. 8, the arm portion 3 is moved to the far side (the main shaft 21 side), so that the adsorption unit 2 is further moved to the far side (the main shaft 21 side). At this time, although the first suction portion 4 is urged by the blade 22 from the far side (the main shaft 21 side) to the near side (the arm portion 3 side), the third spring 7 contacts and contracts with the protruding portion near surface 4b. Therefore, the movement of the first suction portion 4 is suppressed, and an excessive load on the blade 22 is suppressed. Then, in a state where the movement of the first suction section 4 is suppressed, the second suction section 5 moves to the far side (the main shaft 21 side), and the second suction section remote surface 5d on the far side of the second suction section 5 It is in contact with the distal-side flange 23.
在第二吸附部5的第二吸附部遠處面5d與遠處側凸緣23接觸後,裝卸構件旋轉部6的突出部6a未嵌入到裝卸構件24的貫穿孔24a中的情況下,第一彈簧16收縮,裝卸構件旋轉部6向箭頭31的方向朝近處側(臂部3側)移動。此時,雖然第二吸附部5因遠處側凸緣23而從遠處側(主軸21側)向近處側(臂部3側)受力,但第二彈簧8與鉤狀部近處面5c接觸並收縮,因此第二吸附部5的移動得到抑制。After the second suction portion distal surface 5d of the second suction portion 5 comes into contact with the remote-side flange 23, when the protruding portion 6a of the attachment member rotation portion 6 is not fitted into the through hole 24a of the attachment member 24, the first A spring 16 contracts, and the attaching / detaching member rotating portion 6 moves in the direction of the arrow 31 toward the near side (the arm portion 3 side). At this time, although the second suction portion 5 is urged from the far side (the main shaft 21 side) to the near side (the arm portion 3 side) by the far side flange 23, the second spring 8 is near the hook portion. Since the surface 5c contacts and contracts, the movement of the second suction part 5 is suppressed.
然後,如圖9的示意性截面圖所示那樣,在裝卸構件旋轉部6的突出部6a未嵌入到裝卸構件24的貫穿孔24a中的情況下,使裝卸構件旋轉部6例如向箭頭32的方向旋轉。通過裝卸構件旋轉部6的旋轉,當裝卸構件旋轉部6的突出部6a到達裝卸構件24的貫穿孔24a的位置時第一彈簧16伸長,突出部6a嵌入到貫穿孔24a中。Then, as shown in the schematic cross-sectional view of FIG. 9, when the protruding portion 6 a of the attaching / detaching member rotating portion 6 is not fitted into the through hole 24 a of the attaching / detaching member 24, the attaching / detaching member rotating portion 6 is, for example, toward the arrow 32. Direction rotation. By the rotation of the attaching / detaching member rotating portion 6, when the protruding portion 6 a of the attaching / detaching member rotating portion 6 reaches the position of the through hole 24 a of the attaching / detaching member 24, the first spring 16 is extended, and the protruding portion 6 a is embedded in the through hole 24 a.
接著,通過裝卸構件旋轉部6旋轉而使裝卸構件24旋轉。由此,解除由裝卸構件24所致的遠處側凸緣23對近處側凸緣20的緊固。然後,第一吸附部4吸附刀片22,第二吸附部5吸附遠處側凸緣23。此後,使吸附單元2向近處側(臂部3側)移動,由此例如像圖10的示意性截面圖所示那樣,將刀片22及遠處側凸緣23與裝卸構件24一起從主軸21卸下。Next, the attachment / detachment member 24 is rotated by the rotation of the attachment / detachment member rotating portion 6. As a result, the fastening of the distal flange 23 to the proximal flange 20 by the attachment / detachment member 24 is released. Then, the first suction section 4 suctions the blade 22 and the second suction section 5 suctions the distal flange 23. Thereafter, by moving the suction unit 2 to the near side (the arm portion 3 side), for example, as shown in the schematic cross-sectional view of FIG. 10, the blade 22 and the distal flange 23 are removed from the main shaft together with the attaching and detaching member 24. 21Remove.
然後,使吸附單元2從圖11及圖12的示意性立體圖所示的能裝卸刀片22的第一動作位置,移動到圖13的示意性立體圖所示的能從收納部51取出及收納更換用刀片的第二動作位置。此外,圖11及圖12表示吸附單元2位於第一動作位置的狀態的一例的實施形態的切斷裝置的示意性立體圖,圖13表示吸附單元2位於第二動作位置的狀態的一例的實施形態的切斷裝置的示意性立體圖。Then, the adsorption unit 2 is moved from the first operation position of the removable blade 22 shown in the schematic perspective views of FIGS. 11 and 12 to the storage unit 51 for removal and storage replacement shown in the schematic perspective view of FIG. 13. The second action position of the blade. 11 and 12 are schematic perspective views of a cutting device according to an embodiment of the state where the adsorption unit 2 is located at the first operating position, and FIG. 13 is an embodiment of an example of the state where the adsorption unit 2 is located at the second operating position. Schematic perspective view of the cutting device.
圖11~圖13所示的實施形態的切斷裝置在與主軸21相向的位置具備第二主軸25。例如像圖14及圖15的示意性立體圖所示那樣,實施形態的刀片更換機構的吸附單元2不僅能裝卸主軸21的刀片22,而且也能裝卸第二主軸25的刀片22。此外,圖14及圖15表示吸附單元2位於第一動作位置時的另一例的實施形態的切斷裝置的示意性立體圖。The cutting device of the embodiment shown in FIGS. 11 to 13 includes a second spindle 25 at a position facing the spindle 21. For example, as shown in the schematic perspective views of FIGS. 14 and 15, the suction unit 2 of the blade replacement mechanism of the embodiment can attach and detach not only the blade 22 of the main shaft 21 but also the blade 22 of the second main shaft 25. 14 and 15 are schematic perspective views of a cutting device according to another embodiment of the present invention when the suction unit 2 is located at the first operation position.
如圖11~圖15的示意性立體圖所示那樣,實施形態的刀片更換機構具備移動機構40,此移動機構40具備第一滑動機構41及第二滑動機構42。例如像圖16及圖17的示意性立體圖所示那樣,第一滑動機構41能通過箭頭61、箭頭62所示的Y方向上的滑動而移動吸附單元2。吸附單元2在Y方向上的移動例如能用於使吸附單元2移動到第一動作位置及移動到第二動作位置等。As shown in the schematic perspective views of FIGS. 11 to 15, the blade changing mechanism according to the embodiment includes a moving mechanism 40, and the moving mechanism 40 includes a first sliding mechanism 41 and a second sliding mechanism 42. For example, as shown in the schematic perspective views of FIGS. 16 and 17, the first sliding mechanism 41 can move the adsorption unit 2 by sliding in the Y direction indicated by the arrows 61 and 62. The movement of the adsorption unit 2 in the Y direction can be used to move the adsorption unit 2 to the first operation position and the second operation position, for example.
例如像圖18及圖19的示意性立體圖所示那樣,第二滑動機構42能通過箭頭71、箭頭72所示的Z方向上的滑動而移動吸附單元2。吸附單元2在Z方向上的移動例如能用於用來從第一動作位置移動到第二動作位置的一個步驟及用來從第二動作位置移動到第一動作位置的一個步驟等。此外,圖18及圖19的箭頭71、箭頭72所示的Z方向與圖16及圖17的箭頭61、箭頭62所示的Y方向交叉。For example, as shown in the schematic perspective views of FIGS. 18 and 19, the second sliding mechanism 42 can move the adsorption unit 2 by sliding in the Z direction indicated by the arrows 71 and 72. The movement of the adsorption unit 2 in the Z direction can be used for, for example, a step for moving from the first operation position to the second operation position and a step for moving from the second operation position to the first operation position. Note that the Z directions shown by arrows 71 and 72 in FIGS. 18 and 19 intersect the Y directions shown by arrows 61 and 62 in FIGS. 16 and 17.
實施形態的刀片更換機構具備圖20及圖21的示意性立體圖所示的第一旋轉機構43、以及圖22及圖23的示意性立體圖所示的第二旋轉機構44。The blade replacement mechanism according to the embodiment includes a first rotation mechanism 43 shown in the schematic perspective views of FIGS. 20 and 21, and a second rotation mechanism 44 shown in the schematic perspective views of FIGS. 22 and 23.
例如像圖20及圖21所示那樣,第一旋轉機構43是以能使吸附單元2在第一假想面82內在箭頭81所示的X-θ方向上旋轉的方式構成。吸附單元2在X-θ方向上的旋轉例如能用於用來從第一動作位置移動到第二動作位置的一個步驟及用來從第二動作位置移動到第一動作位置的一個步驟等。For example, as shown in FIGS. 20 and 21, the first rotation mechanism 43 is configured to rotate the adsorption unit 2 in the X-θ direction indicated by the arrow 81 in the first virtual surface 82. The rotation of the suction unit 2 in the X-θ direction can be used for, for example, a step for moving from the first operation position to the second operation position, and a step for moving from the second operation position to the first operation position.
例如像圖22及圖23所示那樣,第二旋轉機構44是以能使吸附單元2在第二假想面93內在箭頭91、箭頭92所示的Y-θ方向上旋轉的方式構成。吸附單元2在Y-θ方向上的旋轉例如能用於使吸附單元2從主軸21移動到第二主軸25及使吸附單元2從第二主軸25移動到主軸21等。此外,第二假想面93為與第一假想面82不同的假想面,第一假想面82與第二假想面93彼此交叉。For example, as shown in FIG. 22 and FIG. 23, the second rotation mechanism 44 is configured so that the adsorption unit 2 can be rotated in the Y-θ direction indicated by the arrows 91 and 92 in the second imaginary plane 93. The rotation of the adsorption unit 2 in the Y-θ direction can be used, for example, to move the adsorption unit 2 from the main shaft 21 to the second main shaft 25 and to move the adsorption unit 2 from the second main shaft 25 to the main shaft 21. The second imaginary plane 93 is a imaginary plane different from the first imaginary plane 82, and the first imaginary plane 82 and the second imaginary plane 93 cross each other.
圖24中示出實施形態的刀片更換機構的收納部51的示意性立體圖。收納部51從最上段到最下段依次具備第一刀片盒53a、第二刀片盒53b以及第三刀片盒53c。另外,收納部51具備第一刀片按壓構件54a、第二刀片按壓構件54b以及第三刀片按壓構件54c。第一刀片按壓構件54a、第二刀片按壓構件54b以及第三刀片按壓構件54c是以分別在各刀片盒的周圍按壓第一刀片盒53a、第二刀片盒53b以及第三刀片盒53c中收納的刀片的方式構成。由此,能抑制刀片從刀片盒掉落。FIG. 24 is a schematic perspective view of the accommodating portion 51 of the blade changing mechanism according to the embodiment. The storage unit 51 includes a first blade cassette 53a, a second blade cassette 53b, and a third blade cassette 53c in this order from the uppermost stage to the lowermost stage. The storage unit 51 includes a first blade pressing member 54a, a second blade pressing member 54b, and a third blade pressing member 54c. The first blade pressing member 54a, the second blade pressing member 54b, and the third blade pressing member 54c are housed in the first blade case 53a, the second blade case 53b, and the third blade case 53c, respectively, to press around the respective blade cases. The way the blade is constituted. This makes it possible to suppress the blade from falling out of the blade case.
實施形態的刀片更換機構的吸附單元2如所述那樣將已使用過的刀片從主軸21或第二主軸25卸下後,與吸附單元2上吸附的已使用過的刀片一起移動到圖13所示的第二動作位置。此時,例如像圖25的示意性立體圖所示那樣,第一刀片按壓構件54a、第二刀片按壓構件54b以及第三刀片按壓構件54c的至少一個向上豎起而解除刀片的按壓。As described above, the suction unit 2 of the blade changing mechanism removes the used blade from the main shaft 21 or the second main shaft 25 as described above, and then moves it to the position shown in FIG. 13 together with the used blade held on the suction unit 2. Shown in the second action position. At this time, for example, as shown in the schematic perspective view of FIG. 25, at least one of the first blade pressing member 54 a, the second blade pressing member 54 b, and the third blade pressing member 54 c stands up to release the pressing of the blade.
接下來,吸附有已使用過的刀片的吸附單元2接近未收容刀片的空的刀片盒,將已使用過的刀片的中央的開口部嵌入到空的刀片盒中。然後,吸附單元2僅停止第一吸附部4對已使用過的刀片的吸附,並從所述刀片盒離開。由此,能將已使用過的刀片收納到空的刀片盒中。Next, the suction unit 2 holding the used blade approaches an empty blade case in which no blade is accommodated, and inserts the center opening of the used blade into the empty blade case. Then, the adsorption unit 2 stops the adsorption of the used blade by the first adsorption portion 4 only, and leaves the blade case. Thereby, the used blade can be stored in an empty blade case.
然後,吸附單元2移動到收納有更換用刀片的其他刀片盒。接下來,按壓更換用刀片的刀片按壓構件向上豎起而解除更換用刀片的按壓。此後,使吸附單元2接近更換用刀片,使吸附單元2的第一吸附部4的第一吸附部遠處面4c與更換用刀片的表面接觸。接下來,經過第一吸附部4的氣體流路13從氣體抽吸口12進行抽吸,由此使更換用刀片吸附於第一吸附部遠處面4c。Then, the suction unit 2 moves to another blade cassette in which the replacement blade is stored. Next, the blade pressing member that presses the replacement blade is raised upward to release the pressing of the replacement blade. After that, the suction unit 2 is brought close to the replacement blade, and the first suction portion distal surface 4c of the first suction portion 4 of the suction unit 2 is brought into contact with the surface of the replacement blade. Next, suction is performed from the gas suction port 12 through the gas flow path 13 of the first suction section 4, so that the replacement blade is suctioned onto the far surface 4c of the first suction section.
使吸附有更換用刀片的吸附單元2從圖13所示的第二動作位置移動到圖11及圖12所示的第一動作位置。然後,如圖10所示那樣,通過使吸附單元2向遠處側移動而使吸附單元2接近主軸21。The adsorption unit 2 to which the replacement blade is adsorbed is moved from the second operation position shown in FIG. 13 to the first operation position shown in FIGS. 11 and 12. Then, as shown in FIG. 10, the adsorption unit 2 is moved closer to the main shaft 21 by moving the adsorption unit 2 to the far side.
接著,如圖9所示那樣,使吸附單元2進一步向遠處側(主軸21側)移動。由此,遠處側凸緣23與主軸21的近處側凸緣20接觸,將更換用刀片22夾入到近處側凸緣20與遠處側凸緣23之間。然後,通過使裝卸構件旋轉部6向與箭頭32的方向相反的方向旋轉而使裝卸構件24旋轉,利用裝卸構件24將遠處側凸緣23緊固於近處側凸緣20。由此,能將更換用刀片22固定在近處側凸緣20與遠處側凸緣23之間。此後,停止第一吸附部4對更換用刀片22的吸附,並且停止第二吸附部5對遠處側凸緣23的吸附。Next, as shown in FIG. 9, the adsorption unit 2 is further moved to the far side (the main shaft 21 side). As a result, the distal flange 23 comes into contact with the proximal flange 20 of the main shaft 21, and the replacement blade 22 is sandwiched between the proximal flange 20 and the distal flange 23. Then, the attachment / detachment member rotating portion 6 is rotated in a direction opposite to the direction of the arrow 32 to rotate the attachment / detachment member 24, and the distal flange 23 is fastened to the proximal flange 20 by the attachment / detachment member 24. Accordingly, the replacement blade 22 can be fixed between the proximal flange 20 and the distal flange 23. Thereafter, the suction of the replacement blade 22 by the first suction section 4 is stopped, and the suction of the distal flange 23 by the second suction section 5 is stopped.
接下來,如圖6所示那樣,使吸附單元2向近處側(臂部3側)移動,使吸附單元2離開主軸21。由此,完成更換用刀片22對主軸21的安裝。Next, as shown in FIG. 6, the adsorption unit 2 is moved to the near side (the arm portion 3 side), and the adsorption unit 2 is separated from the main shaft 21. Thereby, the attachment of the replacement blade 22 to the main shaft 21 is completed.
如以上那樣,實施形態中能實現刀片22的自動更換。As described above, the blade 22 can be automatically replaced in the embodiment.
圖26中示出實施形態的刀片更換機構中所用的檢測部100的示意性平面圖。實施形態中,檢測部100具備雷射感測器101以及電機103。檢測部100是以通過電機103的驅動能使雷射感測器101向箭頭102方向移動的方式構成。FIG. 26 is a schematic plan view of the detection unit 100 used in the blade replacement mechanism of the embodiment. In the embodiment, the detection unit 100 includes a laser sensor 101 and a motor 103. The detection unit 100 is configured such that the laser sensor 101 can be moved in the direction of the arrow 102 by the drive of the motor 103.
圖27中示出利用檢測部100來檢測刀片22的磨損及破損的至少一者的方法的一例的流程圖。首先,在步驟1(S1)中進行位置調整雷射遮光率A的測定。S1例如能如以下那樣進行。FIG. 27 is a flowchart illustrating an example of a method of detecting at least one of abrasion and breakage of the blade 22 by the detection unit 100. First, in step 1 (S1), the position adjustment laser light shielding rate A is measured. S1 can be performed as follows, for example.
首先,進行雷射感測器101的位置調整。此處,對雷射感測器101例如進行位置調整,以使切斷開始前的刀片22的刀尖位於雷射的出射部(未圖示)與雷射的偵測部(未圖示)之間。然後,在雷射感測器101的位置經調整的狀態下從雷射感測器101的出射部出射雷射並利用偵測部進行偵測。然後,測定此狀態下的雷射的遮光率(位置調整雷射遮光率A)。位置調整雷射遮光率A為所述雷射感測器101的位置調整後且切斷開始前的狀態下,雷射的偵測部所偵測的雷射的偵測量相對於雷射的出射量的比率。由於存在雷射向偵測部的入射被切斷開始前的刀片22的刀尖遮擋的傾向,因此位置調整雷射遮光率A能變高。First, the position of the laser sensor 101 is adjusted. Here, for example, the position of the laser sensor 101 is adjusted so that the cutting edge of the blade 22 before the cutting is started is located at a laser emitting portion (not shown) and a laser detecting portion (not shown). between. Then, in a state where the position of the laser sensor 101 is adjusted, the laser is emitted from the emitting portion of the laser sensor 101 and detected by the detecting portion. Then, the light-shielding rate of the laser in this state (position-adjusted laser light-shielding rate A) was measured. The position adjustment laser shading rate A is the state of the laser sensor 101 after the position of the laser sensor 101 is adjusted and before the cutting is started. The detection amount of the laser detected by the laser detection unit is relative to that of the laser. Emission ratio. Since the incidence of the laser beam on the detection unit is blocked by the cutting edge of the blade 22 before the start of cutting, the position adjustment laser light shielding rate A can be increased.
然後,在步驟2(S2)中進行磨損或破損檢測雷射遮光率A'的測定。S2例如能如以下那樣進行。Then, in step 2 (S2), the measurement of the abrasion or damage detection laser light shielding rate A 'is performed. S2 can be performed as follows, for example.
首先,通過使主軸21旋轉而使刀片22旋轉。然後,利用旋轉的刀片22將切斷物件物切斷。接下來,在正利用旋轉的刀片22將切斷物件物切斷的狀態下,從雷射感測器101的出射部出射雷射並利用偵測部進行偵測。然後,測定此狀態下的雷射的遮光率(磨損或破損檢測雷射遮光率A')。在因切斷而刀片22磨損或破損的情況下,與切斷開始前相比,雷射向偵測部的入射不易被刀片22的刀尖遮擋,因此磨損或破損檢測雷射遮光率A'能變得低於位置調整雷射遮光率A。First, the blade 22 is rotated by rotating the main shaft 21. Then, the cutting object is cut by the rotating blade 22. Next, while the cutting object is being cut by the rotating blade 22, the laser is emitted from the emitting portion of the laser sensor 101 and detected by the detecting portion. Then, the light shielding rate of the laser in this state (abrasion or damage detection laser shielding rate A ') was measured. In the case where the blade 22 is worn or damaged due to cutting, the incidence of the laser light on the detection portion is less likely to be blocked by the blade edge of the blade 22 than before the cutting is started. Can become lower than position adjustment laser shading ratio A.
然後,在步驟3(S3)中將S1中測定的雷射的遮光率A與S2中測定的雷射的遮光率A'進行對比。此時,在雷射的遮光率A與雷射的遮光率A'相等的情況下,不停止利用刀片22的旋轉將切斷物件物切斷,再次回到S2而進行磨損或破損檢測雷射遮光率A'的測定。Then, in step 3 (S3), the light shielding rate A of the laser measured in S1 is compared with the light shielding rate A 'of the laser measured in S2. At this time, when the light shielding rate A of the laser is equal to the light shielding rate A ′ of the laser, the cutting object is not cut by stopping the rotation of the blade 22, and the laser is returned to S2 to perform the wear or damage detection laser. Measurement of light shielding rate A '.
另一方面,若S3中判斷雷射的遮光率A與雷射的遮光率A'不相等,則在步驟4(S4)中使刀片22停止旋轉並實施所述刀片22的自動更換。On the other hand, if it is determined in S3 that the light-shielding rate A of the laser is not equal to the light-shielding rate A ′ of the laser, the blade 22 is stopped from rotating in step 4 (S4) and the blade 22 is automatically replaced.
如所述那樣,在實施形態的刀片更換機構具備以能檢測刀片22的磨損及破損的至少一者的方式構成的檢測部100的情況下,能在檢測到刀片22的磨損及破損的至少一者後使刀片22的旋轉所致的切斷自動停止,進行實施形態的刀片22的自動更換。由此能實現刀片22的更換的進一步自動化。As described above, when the blade replacement mechanism of the embodiment includes the detection unit 100 configured to detect at least one of the wear and tear of the blade 22, at least one of the wear and damage of the blade 22 can be detected. After that, the cutting by the rotation of the blade 22 is automatically stopped, and the blade 22 of the embodiment is automatically replaced. This enables further automation of the blade 22 replacement.
如以上那樣對實施形態進行了說明,但也從最初開始便預計將所述各實施形態的構成適當組合。Although the embodiments have been described as above, it is expected that the configurations of the respective embodiments will be appropriately combined from the beginning.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.
1‧‧‧吸附臂1‧‧‧ Adsorption arm
2‧‧‧吸附單元2‧‧‧ Adsorption unit
3‧‧‧臂部3‧‧‧ arm
4‧‧‧第一吸附部4‧‧‧The first adsorption section
4a‧‧‧突出部4a‧‧‧ protrusion
4b‧‧‧突出部近處面4b‧‧‧ near the protrusion
4c‧‧‧第一吸附部遠處面4c‧‧‧Distant surface of the first adsorption section
4x‧‧‧第一吸附口4x‧‧‧first suction port
4y‧‧‧第一吸附槽4y‧‧‧The first adsorption tank
4z、5z、13、14‧‧‧氣體流路4z, 5z, 13, 14‧‧‧ gas flow path
5‧‧‧第二吸附部5‧‧‧Second adsorption section
5a‧‧‧鉤狀部5a‧‧‧ Hook
5b‧‧‧鉤狀部遠處面5b‧‧‧ Distant surface of hook
5c‧‧‧鉤狀部近處面5c‧‧‧ near surface of hook
5d‧‧‧第二吸附部遠處面5d‧‧‧Distant surface of the second adsorption section
5x‧‧‧第二吸附口5x‧‧‧Second suction port
5y‧‧‧第二吸附槽5y‧‧‧Second adsorption tank
6‧‧‧裝卸構件旋轉部6‧‧‧ Rotating part of loading and unloading member
6a‧‧‧突出部6a‧‧‧ protrusion
6b‧‧‧旋轉部近處面6b‧‧‧ Near surface of rotating part
7‧‧‧第三彈簧7‧‧‧ third spring
8‧‧‧第二彈簧8‧‧‧ second spring
9‧‧‧旋轉驅動構件9‧‧‧ Rotary drive member
9a‧‧‧近處側伸出部遠處面9a‧‧‧proximal side
10‧‧‧軸10‧‧‧ axis
11‧‧‧連結部11‧‧‧ Connection Department
11a‧‧‧突出部11a‧‧‧ protrusion
11b‧‧‧連結部內側近處面11b‧‧‧Inner side of the connecting part
11c‧‧‧連結部外側近處面11c‧‧‧Outside of the connecting part
12‧‧‧氣體抽吸口12‧‧‧Gas suction port
15‧‧‧套管15‧‧‧ Casing
15a‧‧‧收容部15a‧‧‧Containment Department
15b‧‧‧支持部15b‧‧‧Support Department
15c‧‧‧收容部近處面15c‧‧‧ Close to Containment Department
15d‧‧‧支持部遠處面15d‧‧‧Far from the support department
16‧‧‧第一彈簧16‧‧‧first spring
20‧‧‧近處側凸緣20‧‧‧ near side flange
21‧‧‧主軸21‧‧‧ Spindle
22‧‧‧刀片22‧‧‧ Blade
23‧‧‧遠處側凸緣23‧‧‧distant side flange
24‧‧‧裝卸構件24‧‧‧ Loading and unloading components
24a‧‧‧貫穿孔24a‧‧‧through hole
25‧‧‧第二主軸25‧‧‧Second Spindle
31、32、61、62、71、72、81、91、92、102‧‧‧箭頭31, 32, 61, 62, 71, 72, 81, 91, 92, 102‧‧‧ arrows
40‧‧‧移動機構40‧‧‧ mobile agency
41‧‧‧第一滑動機構41‧‧‧first sliding mechanism
42‧‧‧第二滑動機構42‧‧‧Second sliding mechanism
43‧‧‧第一旋轉機構43‧‧‧first rotation mechanism
44‧‧‧第二旋轉機構44‧‧‧Second rotation mechanism
51‧‧‧收納部51‧‧‧Storage
53a‧‧‧第一刀片盒53a‧‧‧The first blade box
53b‧‧‧第二刀片盒53b‧‧‧Second Blade Box
53c‧‧‧第三刀片盒53c‧‧‧Third Blade Box
54a‧‧‧第一刀片按壓構件54a‧‧‧First blade pressing member
54b‧‧‧第二刀片按壓構件54b‧‧‧Second blade pressing member
54c‧‧‧第三刀片按壓構件54c‧‧‧Third blade pressing member
82‧‧‧第一假想面82‧‧‧The first imaginary noodle
93‧‧‧第二假想面93‧‧‧Second imaginary noodle
100‧‧‧檢測部100‧‧‧Testing Department
101‧‧‧雷射感測器101‧‧‧laser sensor
103‧‧‧電機103‧‧‧Motor
110‧‧‧檢查用平臺110‧‧‧ Inspection platform
111‧‧‧切斷裝置111‧‧‧ cutting device
112‧‧‧已密封基板112‧‧‧Sealed substrate
113‧‧‧基板供給機構113‧‧‧ substrate supply mechanism
114‧‧‧切斷用平臺114‧‧‧cutting platform
115‧‧‧移動機構115‧‧‧ Mobile agency
116‧‧‧旋轉機構116‧‧‧Rotating mechanism
120‧‧‧刀片更換機構120‧‧‧Blade replacement mechanism
121‧‧‧已切斷基板121‧‧‧ has cut off the substrate
122‧‧‧托盤122‧‧‧Tray
A‧‧‧基板供給模組A‧‧‧ substrate supply module
B‧‧‧基板切斷模組B‧‧‧ substrate cutting module
C‧‧‧檢查模組C‧‧‧Check Module
CTL‧‧‧控制部CTL‧‧‧Control Department
P‧‧‧製品P‧‧‧ products
S1~S4‧‧‧步驟Steps S1 ~ S4‧‧‧‧
圖1為實施形態的切斷裝置的示意性平面圖。 圖2為實施形態的刀片更換機構中所用的吸附臂的一例的示意性立體圖。 圖3為從其他角度觀察圖2所示的吸附臂時的示意性立體圖。 圖4為圖2及圖3所示的吸附單元的示意性平面圖。 圖5為圖2~圖4所示的吸附單元的示意性截面圖。 圖6為對實施形態的刀片更換方法的一部分工序進行圖解的示意性截面圖。 圖7為對實施形態的刀片更換方法的工序的一部分進行圖解的示意性截面圖。 圖8為對實施形態的刀片更換方法的工序的一部分進行圖解的示意性截面圖。 圖9為對實施形態的刀片更換方法的工序的一部分進行圖解的示意性截面圖。 圖10為對實施形態的刀片更換方法的工序的一部分進行圖解的示意性截面圖。 圖11為吸附單元位於第一動作位置的狀態的一例的實施形態的切斷裝置的示意性立體圖。 圖12為從其他角度觀察圖11所示的切斷裝置時的示意性立體圖。 圖13為吸附單元位於第二動作位置的狀態的一例的實施形態的切斷裝置的示意性立體圖。 圖14為吸附單元位於第一動作位置的狀態的另一例的實施形態的切斷裝置的示意性立體圖。 圖15為從其他角度觀察圖14所示的切斷裝置時的示意性立體圖。 圖16為對利用實施形態的第一滑動機構使吸附單元在Y方向上移動的一例進行圖解的示意性立體圖。 圖17為對利用實施形態的第一滑動機構使吸附單元在Y方向上移動的另一例進行圖解的示意性立體圖。 圖18為對利用實施形態的第二滑動機構使吸附單元在Z方向上移動的一例進行圖解的示意性立體圖。 圖19為對利用實施形態的第二滑動機構使吸附單元在Z方向上移動的另一例進行圖解的示意性立體圖。 圖20為對利用實施形態的第一旋轉機構使吸附單元在X-θ方向上旋轉的一例進行圖解的示意性立體圖。 圖21為對利用實施形態的第一旋轉機構使吸附單元在X-θ方向上旋轉的另一例進行圖解的示意性立體圖。 圖22為對利用實施形態的第二旋轉機構使吸附單元在Y-θ方向上旋轉的一例進行圖解的示意性立體圖。 圖23為對利用實施形態的第二旋轉機構使吸附單元在Y-θ方向上旋轉的另一例進行圖解的示意性立體圖。 圖24為實施形態的收納部的示意性立體圖。 圖25為實施形態的刀片按壓構件豎起時的圖24所示的收納部的示意性立體圖。 圖26為實施形態的檢測部的示意性平面圖。 圖27為利用實施形態的檢測部來檢測刀片的磨損及破損的至少一者的方法的一例的流程圖。FIG. 1 is a schematic plan view of a cutting device according to an embodiment. FIG. 2 is a schematic perspective view of an example of a suction arm used in the blade replacement mechanism of the embodiment. FIG. 3 is a schematic perspective view when the suction arm shown in FIG. 2 is viewed from another angle. FIG. 4 is a schematic plan view of the adsorption unit shown in FIGS. 2 and 3. FIG. 5 is a schematic cross-sectional view of the adsorption unit shown in FIGS. 2 to 4. FIG. 6 is a schematic cross-sectional view illustrating a part of the steps of the blade replacement method according to the embodiment. FIG. 7 is a schematic cross-sectional view illustrating a part of the steps of the blade replacement method according to the embodiment. FIG. 8 is a schematic cross-sectional view illustrating a part of the steps of the blade replacement method according to the embodiment. FIG. 9 is a schematic cross-sectional view illustrating a part of the steps of the blade replacement method according to the embodiment. FIG. 10 is a schematic cross-sectional view illustrating a part of the steps of the blade replacement method according to the embodiment. 11 is a schematic perspective view of a cutting device according to an embodiment of an example of a state where the suction unit is located at the first operation position. FIG. 12 is a schematic perspective view when the cutting device shown in FIG. 11 is viewed from another angle. FIG. 13 is a schematic perspective view of a cutting device according to an embodiment of an example of a state where the suction unit is located at the second operation position. FIG. 14 is a schematic perspective view of a cutting device according to another embodiment of the state in which the suction unit is located at the first operation position. FIG. 15 is a schematic perspective view when the cutting device shown in FIG. 14 is viewed from another angle. FIG. 16 is a schematic perspective view illustrating an example of moving the adsorption unit in the Y direction by the first sliding mechanism of the embodiment. FIG. 17 is a schematic perspective view illustrating another example of moving the adsorption unit in the Y direction by the first sliding mechanism of the embodiment. 18 is a schematic perspective view illustrating an example of moving the adsorption unit in the Z direction by the second sliding mechanism of the embodiment. 19 is a schematic perspective view illustrating another example of moving the adsorption unit in the Z direction by the second sliding mechanism according to the embodiment. FIG. 20 is a schematic perspective view illustrating an example of rotating the adsorption unit in the X-θ direction by the first rotation mechanism of the embodiment. 21 is a schematic perspective view illustrating another example of rotating the adsorption unit in the X-θ direction by the first rotation mechanism of the embodiment. FIG. 22 is a schematic perspective view illustrating an example of rotating the adsorption unit in the Y-θ direction by the second rotation mechanism of the embodiment. FIG. 23 is a schematic perspective view illustrating another example of rotating the adsorption unit in the Y-θ direction by the second rotation mechanism of the embodiment. FIG. 24 is a schematic perspective view of a storage portion according to the embodiment. FIG. 25 is a schematic perspective view of the storage portion shown in FIG. 24 when the blade pressing member according to the embodiment is raised. Fig. 26 is a schematic plan view of a detection unit according to the embodiment. FIG. 27 is a flowchart of an example of a method of detecting at least one of abrasion and breakage of the blade by the detection unit of the embodiment.
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017-124214 | 2017-06-26 | ||
JP2017124214A JP6560714B2 (en) | 2017-06-26 | 2017-06-26 | Blade replacement mechanism, cutting device, and blade replacement method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201904718A TW201904718A (en) | 2019-02-01 |
TWI666090B true TWI666090B (en) | 2019-07-21 |
Family
ID=64823068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW107121621A TWI666090B (en) | 2017-06-26 | 2018-06-25 | Blade replacement mechanism, cutting apparatus and blade replacement method |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6560714B2 (en) |
KR (1) | KR102125232B1 (en) |
CN (1) | CN109109071B (en) |
SG (1) | SG10201805421VA (en) |
TW (1) | TWI666090B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI783300B (en) * | 2019-11-25 | 2022-11-11 | 日商Towa股份有限公司 | Blade replacement apparatus and cutting system |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7229093B2 (en) * | 2019-05-13 | 2023-02-27 | 株式会社ディスコ | Blade attachment/detachment auxiliary device |
JP7098581B2 (en) * | 2019-07-29 | 2022-07-11 | Towa株式会社 | Blade replacement mechanism, cutting device, and manufacturing method of cut products |
JP7248557B2 (en) | 2019-10-24 | 2023-03-29 | Towa株式会社 | Blade changing device, cutting device, and method for manufacturing cut product |
CN111070296B (en) * | 2020-02-26 | 2020-08-25 | 永康雪纺自动化设备有限公司 | Automatic blade replacing device for cutting wheel |
KR102246541B1 (en) * | 2020-09-28 | 2021-04-30 | (주)네온테크 | Hybrid blade change module and blade auto supplying method using the same |
CN112318602B (en) * | 2020-10-20 | 2022-06-07 | 耿莉 | Automatic tool changing device for pathological slicing knife |
JP2022148902A (en) | 2021-03-24 | 2022-10-06 | Towa株式会社 | Processing device, and production method of processed product |
CN114147871B (en) * | 2021-11-30 | 2024-06-14 | 湖北省华建石材股份有限公司 | Replacing device for tower type circular saw and working method |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1987001642A1 (en) * | 1985-09-17 | 1987-03-26 | Salje Ernst | Tool-changing device for grinding operations |
EP0424815A1 (en) * | 1989-10-23 | 1991-05-02 | Z. BAVELLONI S.p.A. | Automatic engraving machine, particularly for engraving the faces of plate-like elements in general and of glass plates in particular |
JPH04164565A (en) * | 1990-10-29 | 1992-06-10 | Toshiba Corp | Automatic change device for grinding wheel |
WO1994025220A1 (en) * | 1991-11-07 | 1994-11-10 | The United States Of America | Grinding apparatus |
JPH06326186A (en) * | 1994-02-04 | 1994-11-25 | Disco Abrasive Syst Ltd | Auto-changer for blade |
JP2904414B1 (en) * | 1998-05-22 | 1999-06-14 | 株式会社東京精密 | Automatic blade replacement system |
JP2016144838A (en) * | 2015-02-06 | 2016-08-12 | 株式会社ディスコ | Position adjustment jig and position adjustment method |
TW201634185A (en) * | 2015-02-06 | 2016-10-01 | Disco Corp | Cutting apparatus |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5014892B2 (en) * | 2007-06-25 | 2012-08-29 | 株式会社ディスコ | Blade replacement tool |
US7495759B1 (en) * | 2007-10-23 | 2009-02-24 | Asm Assembly Automation Ltd. | Damage and wear detection for rotary cutting blades |
JP5346702B2 (en) * | 2009-06-15 | 2013-11-20 | 株式会社ディスコ | Mounting tool set and annular blade mounting method |
JP5216075B2 (en) * | 2010-12-22 | 2013-06-19 | Towa株式会社 | Blade attachment / detachment device |
JP5723837B2 (en) * | 2012-07-18 | 2015-05-27 | Towa株式会社 | Blade attachment / detachment device |
JP6423209B2 (en) * | 2014-09-08 | 2018-11-14 | Dmg森精機株式会社 | Machine Tools |
JP6333141B2 (en) * | 2014-09-22 | 2018-05-30 | 株式会社ディスコ | Cutting blade replacement system |
JP6421658B2 (en) * | 2015-03-13 | 2018-11-14 | 株式会社東京精密 | Blade automatic changer and blade automatic change method |
JP6430329B2 (en) * | 2015-05-13 | 2018-11-28 | Towa株式会社 | Cutting apparatus and cutting method |
-
2017
- 2017-06-26 JP JP2017124214A patent/JP6560714B2/en active Active
-
2018
- 2018-06-22 KR KR1020180072070A patent/KR102125232B1/en active IP Right Grant
- 2018-06-25 SG SG10201805421VA patent/SG10201805421VA/en unknown
- 2018-06-25 CN CN201810660079.9A patent/CN109109071B/en active Active
- 2018-06-25 TW TW107121621A patent/TWI666090B/en active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1987001642A1 (en) * | 1985-09-17 | 1987-03-26 | Salje Ernst | Tool-changing device for grinding operations |
EP0424815A1 (en) * | 1989-10-23 | 1991-05-02 | Z. BAVELLONI S.p.A. | Automatic engraving machine, particularly for engraving the faces of plate-like elements in general and of glass plates in particular |
JPH04164565A (en) * | 1990-10-29 | 1992-06-10 | Toshiba Corp | Automatic change device for grinding wheel |
WO1994025220A1 (en) * | 1991-11-07 | 1994-11-10 | The United States Of America | Grinding apparatus |
JPH06326186A (en) * | 1994-02-04 | 1994-11-25 | Disco Abrasive Syst Ltd | Auto-changer for blade |
JP2904414B1 (en) * | 1998-05-22 | 1999-06-14 | 株式会社東京精密 | Automatic blade replacement system |
JP2016144838A (en) * | 2015-02-06 | 2016-08-12 | 株式会社ディスコ | Position adjustment jig and position adjustment method |
TW201634185A (en) * | 2015-02-06 | 2016-10-01 | Disco Corp | Cutting apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI783300B (en) * | 2019-11-25 | 2022-11-11 | 日商Towa股份有限公司 | Blade replacement apparatus and cutting system |
Also Published As
Publication number | Publication date |
---|---|
SG10201805421VA (en) | 2019-01-30 |
CN109109071A (en) | 2019-01-01 |
TW201904718A (en) | 2019-02-01 |
JP6560714B2 (en) | 2019-08-14 |
KR20190001547A (en) | 2019-01-04 |
KR102125232B1 (en) | 2020-06-22 |
JP2019005857A (en) | 2019-01-17 |
CN109109071B (en) | 2020-12-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI666090B (en) | Blade replacement mechanism, cutting apparatus and blade replacement method | |
JP7126749B2 (en) | cutting equipment | |
US9381673B2 (en) | Cutting apparatus having blade cover | |
JP5324231B2 (en) | Semiconductor wafer alignment system | |
TWI716523B (en) | Work clamp mechanism | |
JP6230934B2 (en) | Cutting equipment | |
TWI742239B (en) | Flange mechanism | |
TW201932241A (en) | Flange replacing mechanism, cutting device, flange replacing and cut product manufacturing method by which automatic replacement of flanges is made possible | |
JP6397270B2 (en) | Cutting equipment | |
JP6050626B2 (en) | Chuck table mechanism of cutting equipment | |
CN112705774B (en) | Blade replacement device, cutting device, and method for manufacturing cut object | |
JP5673929B2 (en) | Spinner cleaning apparatus and spinner cleaning method | |
JP7143020B2 (en) | processing equipment | |
JP6847512B2 (en) | Cutting equipment and cutting method | |
JP2009111344A (en) | Spin processor | |
JP5875316B2 (en) | Processing equipment | |
TWI772593B (en) | Processing device and installation method of processing mechanism | |
JP5570891B2 (en) | Grinding equipment | |
JP5914206B2 (en) | Sheet pasting device | |
JP2014136238A (en) | Laser beam machining device |