TWI637455B - 用於片盒夾持的機械手及自動片盒搬運裝置 - Google Patents

用於片盒夾持的機械手及自動片盒搬運裝置 Download PDF

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TWI637455B
TWI637455B TW106114272A TW106114272A TWI637455B TW I637455 B TWI637455 B TW I637455B TW 106114272 A TW106114272 A TW 106114272A TW 106114272 A TW106114272 A TW 106114272A TW I637455 B TWI637455 B TW I637455B
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cassette
end effector
manipulator
flange
holding
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TW201742180A (zh
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許琦欣
杜榮
李玲雨
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上海微電子裝備（集團）股份有限公司
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    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
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    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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Abstract

一種用於片盒夾持的機械手及自動片盒搬運裝置，該用於片盒夾持的機械手包括機械臂、設置於該機械臂的末端的末端執行器以及設置於該末端執行器上的視覺定位元件。本發明藉由視覺定位元件定位該片盒的法蘭位置以實現對片盒的識別，即依據片盒本身特徵進行識別，無需額外黏貼標記，提高測量精度及抓取片盒的精準度；另一方面，末端執行器利用末端執行器上與該片盒頂部的法蘭相適配的凹面夾持片盒頂部的法蘭實現對片盒的搬運。

Description

用於片盒夾持的機械手及自動片盒搬運裝置
本發明有關於機械技術領域，特別有關於一種用於片盒夾持的機械手及自動片盒搬運裝置。
21世紀以來，自動化物流系統已經在工業領域得到廣泛應用，在IC行業前道技藝FAB廠產線中，特別是12吋產線中，已經普遍採用自動物料搬送系統(AMHS)，具體包括Stocker、OHT或AGV等。例如首先藉由MES系統調度AMHS，直接將矽片片盒從Stocker直接搬送到各機台的介面上，然後命令機台進行自動化生產，改變之前完全靠人工運輸的低效率模式，大大提升先進IC技藝產線的自動化水準，有效地節約人力成本，提高產品產出，增加客戶價值。
目前，世界範圍內主要在前道技藝12吋半導體產線中已經採用OHT系統進行物料管理，但對於許多後道封裝產線來說也面臨物料自動化系統更新的問題，而且12吋產品越來越占主導地位，滿載的片盒重量約為7.5Kg，對於操作工來說較吃力，且有一定的風險；同時，勞動力在未來會嚴重短缺且勞動力成本越來越高，因此片盒運輸機器人的需求量將會越來越大；此外，由於封裝廠的規模和利潤，無法支援諸如前道半導體產線的OHT系統投資，因此，研發一種便利、經濟的自動片盒搬送方案和設備成為當 務之急。
在全球範圍內，一些電子廠和半導體廠房已經在用AGV小車代替人工搬運，藉由在產線上配置搬運機器人，節省大量的體力勞動。但這種自動物料搬送系統產品的不足為：都是主要針對8吋片盒，不能滿足12吋片盒的運輸需求。
通常12吋片盒搬運設備只能攜帶一盒片盒，效率較低。此外該片盒搬運設備的片盒抓取方式不能適應從一般性的貨架上抓取片盒的功能。其原因在於12吋片盒搬運設備的機械臂的臂長通常比較長，需要較大的搬運空間，而一般為了盡可能提高貨架儲存量，節省FAB內的空間，貨架可能會做到3層，層間高度不超過450mm。這對於12吋片盒自動搬運設備而言，留給機械臂的空間非常有限。
為實現自動片盒搬運裝置可以準確的搬運片盒，於片盒位置的識別起到至關重要作用。現有的解決方式大致為兩種，其中一種，針對OHT系統而言，OHT設備從Stocker內直接裝載片盒，藉由軌道直接到達機台的負載介面上方，藉由伸縮繩索將片盒放置到機台上，由於這一過程是一個結構化的狀況，片盒在stocker中的位置藉由stocker的機械臂對各儲存位置進行示教，OHT設備與片盒之間的位置關係藉由軌道和機械定位保證，OHT設備將片盒放置到機台上時，其餘負載介面的位置關係同樣藉由軌道和機台佈局保證。
另一種方式，使用光電探測器探測貨架上固定黏貼標記的方法，藉由標記識別進行片盒定位。該方案受制於兩點：1.標記在長期使用過程中破損，影響測量精度，導致無法準確 抓取片盒；2.標記必須與放置片盒的定位板存在一定精度關係，增加貨架製造的成本。
本發明的目的在於提供一種用於片盒夾持的機械手及自動片盒搬運裝置，以解決現有技術中自動片盒搬運裝置存在的不足。
為解決上述技術問題，本發明提供一種用於片盒夾持的機械手，該用於片盒夾持的機械手包括：機械臂、設置於該機械臂的末端的末端執行器以及設置於該末端執行器上的視覺定位元件；其中，該視覺定位元件用於定位該片盒頂部的法蘭位置；該末端執行器包括一與該片盒頂部的法蘭相適配的凹面，根據該片盒頂部的法蘭位置，該末端執行器藉由該凹面夾持片盒頂部的法蘭。
可選的，在所述的用於片盒夾持的機械手中，該視覺定位元件包括：水平定位結構和垂直定位結構，該水平定位結構用於捕捉該片盒表面的水平方向上的特徵，該垂直定位結構用於捕捉該片盒表面的垂直方向上的特徵，根據該片盒表面的水平方向上的特徵及該片盒表面的垂直方向上的特徵定位該片盒的法蘭位置。
可選的，在所述的用於片盒夾持的機械手中，該水平定位結構包括第一相機，該第一相機的鏡頭垂直朝向該末端執行器的任意一側的側壁。
可選的，在所述的用於片盒夾持的機械手中，該垂直 定位結構包括第二相機及反射鏡，該第二相機和該反射鏡均設置於該末端執行器的一側的側壁上。
可選的，在所述的用於片盒夾持的機械手中，該末端執行器為兩側帶有支撐板的C字形半封閉結構。
可選的，在所述的用於片盒夾持的機械手中，該末端執行器還包括設置於該凹面前端的凸台，用於防止片盒滑落。
可選的，在所述的用於片盒夾持的機械手中，該凹面上至少設有一個在位感測器，用於感知該凹面是否夾持片盒。
可選的，在所述的用於片盒夾持的機械手中，還包括設置於該末端執行器上的聲納感測器，用於對片盒搬運行程進行安全檢測。
可選的，在所述的用於片盒夾持的機械手中，該凹面上至少設有兩個定位銷，該等定位銷與該法蘭的切口對應。
可選的，在所述的用於片盒夾持的機械手中，該末端執行器與該機械臂的末端呈倒L形。
可選的，在所述的用於片盒夾持的機械手中，該末端執行器可繞該機械臂的末端進行360度旋轉運動。
可選的，在所述的用於片盒夾持的機械手中，該機械臂具有6個自由度。
本發明還提供一種自動片盒搬運裝置，該自動片盒搬運裝置包括：自動導航小車、架設在該自動導航小車上的運載框架及設置於該運載框架上用於片盒夾持的機械手。
可選的，在所述的自動片盒搬運裝置中，還包括設置於該運載框架上的片盒放置機構，該機械手相對該片盒放置機構設 置於該運載框架的一角。
在本發明所提供的用於片盒夾持的機械手及自動片盒搬運裝置中，該用於片盒夾持的機械手包括機械臂、設置於該機械臂的末端的末端執行器以及設置於該末端執行器上的視覺定位元件。本發明藉由視覺定位元件定位該片盒的法蘭位置以實現對片盒的識別，即依據片盒本身特徵進行識別，無需額外黏貼標記，提高測量精度及抓取片盒的精準度；另一方面，末端執行器利用末端執行器上與該片盒頂部的法蘭相適配的凹面夾持片盒頂部的法蘭實現對片盒的搬運；此外，在凹面夾持法蘭的同時，凹面上的定位銷與法蘭的切口對位實現片盒的自定心，進一步提高片盒定位的精準度。
1‧‧‧機械臂
2‧‧‧末端執行器
5‧‧‧運載框架
20‧‧‧支撐板
21‧‧‧凹面
22‧‧‧凸台
23‧‧‧在位感測器
24‧‧‧聲納感測器
25‧‧‧定位銷
30‧‧‧水平定位結構
31‧‧‧垂直定位結構
40‧‧‧法蘭
300‧‧‧第一相機
310‧‧‧第二相機
311‧‧‧反射鏡
圖1是本發明一實施例中自動片盒搬運裝置的結構示意圖；圖2是本發明一實施例中末端執行器的結構示意圖；圖3是本發明一實施例中末端執行器的凹面夾持片盒頂部的法蘭的結構示意圖；圖4是本發明一實施例中在位感測器的結構示意圖。
以下結合附圖和具體實施例對本發明提出的用於片盒夾持的機械手及自動片盒搬運裝置作進一步詳細說明。根據下面說明和請求項，本發明的優點和特徵將更清楚。需說明的是，附圖均採用非常簡化的形式且均使用非精準的比例，僅用以方便、清晰地輔助說明本發明實施例的目的。
請參考圖1，其為本發明的自動片盒搬運裝置的結構示意圖，如圖1所示，所述的自動片盒搬運裝置包括：自動導航小車、架設在該自動導航小車上的運載框架5、設置於該運載框架5上的用於片盒夾持的機械手以及設置於該運載框架5上的片盒放置機構；該機械手相對該片盒放置機構設置於該運載框架5的一角。較佳的，該片盒放置機構數量為兩個，呈上下層分佈。
請參考圖2、3，本實施例中，該機械手主要包括：機械臂1、設置於該機械臂1的末端的末端執行器2以及設置於該末端執行器2上的視覺定位元件；其中，該視覺定位元件用於定位該片盒頂部的法蘭40(屬於片盒本身特徵)位置；該末端執行器2包括一與該片盒頂部的法蘭40相適配的凹面21，根據測得的該片盒的法蘭40的位置，該末端執行器2藉由該凹面21夾持片盒頂部的法蘭40。藉由視覺定位元件定位該片盒頂部的法蘭40位置以實現對片盒的識別，由於片盒都有固定的規格，在獲取片盒頂部的法蘭40的位置後即可獲知片盒放置位置上承載的片盒的位置，無需額外黏貼標記，提高測量精度及抓取片盒的精準度。接著，藉由末端執行器2對片盒進行搬運，主要藉由末端執行器2上的凹面21夾持片盒頂部的法蘭40實現對片盒的搬運，由此可見，片盒頂部的法蘭40不僅具有識別的標定作用，還有配合末端執行器2搬運片盒的作用。
請參考圖1及圖3，機械手搬運片盒的具體工作流程為：在抓取片盒時，末端執行器2從片盒頂部的法蘭40與片盒主體之間的空間伸入至一定位置後，垂直向上將片盒托起；在放置片盒時，將片盒放在自動片盒搬運裝置上的片盒放置位置上後，末端 執行器2沿垂直向下方向運動與片盒脫離後抽出。較佳機械手的機械臂1為6自由度的機械臂1，該末端執行器2可繞該機械臂1的末端進行360度旋轉運動，末端執行器2在工作時與機械臂1的末端關節呈倒L形，具體來說，伸入貨架時，機械臂1最後一個關節位於末端執行器2下方，以最大程度上節省末端執行器2的伸入對於片盒擺放位置(如貨架、片盒放置機構等)每層高度空間的佔用，同時降低對機械臂1末端的力矩。
本實施例中，該凹面21上至少設有兩個定位銷25，該等定位銷25與該法蘭40的切口對位，該法蘭40的切口為三角形或圓柱形，相應的，該等定位銷25的位置需與片盒頂部的法蘭40的切口相配合且形狀相吻合，該等定位銷25的橫截面不侷限為三角形或圓柱形，只要定位銷25能夠容置於法蘭40的切口中，且定位銷25的中心與切口的幾何中心重合即可。利用法蘭40自身具有的切口與設置於凹面21上的定位銷25對位，實現對抓取後的片盒的自定心，從而進一步提高片盒定位的精準度。使片盒在末端執行器2上的位置在精密可控範圍，便於片盒能夠被準確放置到搬運車上。
如圖3所示，該末端執行器採用被動式無源方式，該末端執行器2為兩側帶有支撐板20的C字形半封閉結構，利用C字形半封閉結構可具有類似「斜拉橋」拉鎖的功能。如圖2所示，該視覺定位元件包括：水平定位結構30及垂直定位結構31，該水平定位結構30用於捕捉該片盒表面的水平方向上的特徵，該垂直定位結構用於捕捉該片盒表面的垂直方向上的特徵，根據該片盒表面的水平方向上的特徵及該片盒表面的垂直方向上的特徵定位該 片盒的法蘭40位置，即確定法蘭40的空間具體位置，以便後續末端執行器2準確執行夾持搬運工作。
其中，該水平定位結構30包括第一相機300，該第一相機300設置於該末端執行器2的中間，第一相機300的鏡頭垂直朝向末端執行器2上的任意一側支撐板20；該垂直定位結構31包括第二相機310及反射鏡311，該第二相機310和該反射鏡311均設置於該末端執行器2的一側支撐板20的側壁上，且安裝在第一相機300的鏡頭朝向的支撐板20相對一側的支撐板20上。以實現最大程度上降低第二相機310與待測片盒頂部的法蘭40之間的間距，便於末端執行器2進入片盒擺放位置後對片盒頂部的法蘭40進行測量。
該末端執行器2還包括凸台22及至少一個在位感測器23，該凸台22設置於該凹面21的前端，以避免機械手突然斷電時，出現片盒滑落的危險；該凹面21上至少設置有一個在位感測器23，較佳的在位感測器23設置於該凹面21上與該法蘭40接觸的區域上，用於感知該凹面21是否夾持片盒。較佳地，該在位感測器23包括一個機械開關結構，當片盒自定心後，片盒觸發機械開關結構，從而產生在位信號，該機械開關結構具體請參考圖4。
較佳的，本實施例中的機械手還包括設置於該末端執行器2上的聲納感測器24，安裝在末端執行器2上的任意一側支撐板20上，作為搬運執行過程中的安全檢測感測器，一旦聲納臨界值範圍內有物體被探測到，則機械臂1立即停止作業。
在該運載框架5的兩側還設置有垂直雷射感測器，以實現對自動片盒搬運裝置在高度方向上的障礙探測。
基於上述自動片盒搬運裝置從貨架中抓取片盒的工作流程，主要包括：針對貨架不同層設置不同的停車位置；先藉由第一相機300對法蘭40的側面進行水平測量，藉由法蘭40的切口側面特徵獲取片盒的X、Y、Z、Rx，再將第二相機310帶入到法蘭40的切口位置上方，藉由切口的俯視特徵獲取片盒的X、Y、Rz；從片盒頂部的法蘭40下方伸入末端執行器進行抓取。
本發明還提供一種使用上述自動片盒搬運裝置的片盒搬運系統，該片盒搬運系統的工作過程如下：
1)遠程調度：片盒搬運系統的控制端下發出片盒搬運任務，包含：片盒ID、起始點、目的地等訊息。調度伺服器根據全廠區內自動片盒搬運裝置的位置及空閒情況，進行最優化調度，確定具體執行任務的自動片盒搬運裝置，並發送片盒ID和起始點到該自動片盒搬運裝置的自動導航小車，該步驟執行後，自動片盒搬運裝置已經完全清楚將要執行的任務資訊。
2)移動至目標位置：自動片盒搬運裝置的自動導航小車為每一輛執行搬運任務的搬運裝置規劃最優路徑，在行進間遇到障礙物時，進行自主避障繞行，自動片盒搬運裝置根據所選擇的工位位置以及片盒位置，計算出需要到達的地圖座標，抵達目標點後，自動導航小車調整朝向至設定的方向，將機械臂一側靠近目標位置(貨架或機台)，開始準備執行搬運任務。
3)片盒搬運：片盒搬運任務分為從貨架/機台上取片盒，或將片盒放置到貨架/機台上，提取片盒的操作如下：
a)自動搬運裝置運動到機台的裝載介面/貨架，若貨架為三層 結構，由於片盒在貨架三層不同的高度，以下簡稱高、中、低層，抓取片盒時，可採用將自動片盒搬運裝置停靠位置不同的策略，以合理的提高自動片盒搬運裝置搬運的穩定性。如：當片盒在上層時，自動片盒搬運裝置停靠在距離貨架100mm的距離左右，以盡可能的接近貨架，縮短機械手的運動距離和抓取力矩，減小傾翻的可能，此時片盒在機械手的安裝平面上方，機械手具有較大的運動空間，藉由規劃機械手的運動軌跡，使其不會同自動導航小車碰撞或干涉。當片盒在下層時，自動片盒搬運裝置停靠在距離貨架400mm的距離左右，距離貨架較遠，此時片盒靠近機械手的安裝平面，機械手的運動空間較小，需規劃機械手的運動軌跡避免同自動導航小車碰撞或干涉。當片盒在中層時，根據片盒在上層方案和片盒在下層方案的策略折衷考慮設計。
b)將末端執行器上的第一相機300側轉向貨架，使聲納感測器24和第一相機300的鏡頭面對片盒。利用第一相機300測量片盒頂部的法蘭40距離第一相機300的X方向距離X，具體為藉由測量鏡頭的放大倍率，第一相機300的鏡頭焦距f，可轉換得到X，。
c)法蘭40距離第一相機300的Y方向距離可藉由從圖像中檢測法蘭40上切口的位置，來進行切口定位。識別切口的方法可以為基於輪廓或灰度的範本匹配演算法、基於角點及其描述符的匹配、基於直線檢測的演算法等。
d)根據法蘭40距離第一相機300的X方向距離和Y方向距離 使用Hough變換或類似的直線測量演算法，計算法蘭40相對於第一相機300的Z方向距離及Rx旋轉。
e)機械手根據所測量到的片盒頂部的法蘭40相對於第一相機300的X,Y,Z,Rx等姿態，將第二相機310帶到片盒頂部的法蘭40的切口的正上方。
f)藉由圖形匹配的方法測量法蘭40上兩個以上切口，再結合法蘭40本身的名義尺寸，可以計算出法蘭40相對於第二相機310的X，Y，Rz位置。
g)根據求得的法蘭40相對於第二相機310的X，Y，Rz位置移動末端執行器2，使之***法蘭40底部，法蘭40的切口與末端執行器2上定位銷25配合，之後末端執行器2將片盒托起並自定心，同時觸發片盒在位感測器23的機械開關結構，自動片盒搬運裝置的控制器接收片盒在位信號。
h)自動片盒搬運裝置的控制器控制機械臂1按一定軌跡將末端執行器2上的片盒放置到其自身的片盒放置機構上，該軌跡應不超過自動導航小車的寬度方向的空間投影範圍。放置片盒至片盒放置機構上片盒放置位置時，機械手放慢速度下降，直至放置到位。
i)片盒到位後，RFID感測器讀取片盒資訊，並記錄整個片盒的搬運資料，將片盒搬運資料回饋至片盒搬運系統。
j)根據定義的任務序列執行下一項任務。
4)放置片盒。將片盒放置在貨架上的操作步驟如下：
a)自動搬運裝置運動到位，該步驟與提取片盒的步驟a)相同。
b)將末端執行器的視覺定位元件側轉向貨架(面向片盒的Facial Datum Plane)。
c)機械臂將視覺定位元件帶到機台的裝載介面/貨架片盒固定板上方，捕捉機台的裝載介面/貨架片盒固定板上的特徵點(如標準機台的裝載介面上的定位銷)，確定其中心位置，用來與自動片盒搬運裝置上片盒的輪廓或固定片盒的定位銷中心進行配合，使片盒定位。
d)根據機台的裝載介面/貨架片盒固定板的特徵點在視覺定位元件下的位置，換算視覺定位元件距離特徵點中心的x,y,z，Rz向距離，進而求得機械臂的末端執行器相對於放置位置的偏差。
e)根據已知的片盒放置位置，將末端執行器***片盒頂部的法蘭40的底部，並將片盒托起，機械臂方可帶動片盒上升，即可以與片盒的定位銷脫離(做x-y向運動)。
f)根據求得的距離，機械臂隨後按一定軌跡將片盒放置到機台的裝載介面或貨架片盒放置板上，該軌跡不超過底座的空間投影範圍。
g)在底座的兩側裝有側向聲納，在進行搬運時，聲納開啟，當有感知到移動物件接近時，機械臂減速，以防傷人，並發出警報，提醒人員遠離操作現場。
h)放置片盒至機台的裝載介面/貨架片盒放置機構上方時，機械手放慢速度下降，直至放置穩定。
i)片盒搬運完成後，並記錄整個片盒的搬運資料。
j)將片盒搬運資料回饋至片盒搬運系統。
k)根據定義的任務序列執行下一項任務。
綜上，在本發明所提供的用於片盒夾持的機械手中，該用於片盒夾持的機械手包括機械臂、設置於該機械臂的末端的末 端執行器以及設置於該末端執行器上的視覺定位元件。本發明藉由視覺定位元件定位該片盒頂部的法蘭位置以實現對片盒的識別，即依據片盒本身特徵進行識別，無需額外黏貼標記，提高測量精度及抓取片盒的精準度；另一方面，末端執行器利用末端執行器上與該片盒頂部的法蘭相適配的凹面夾持片盒頂部的法蘭實現對片盒的搬運；此外，在凹面夾持法蘭的同時，凹面上的定位銷與法蘭的切口對位實現片盒的自定心，進一步提高片盒定位的精準度。
上述描述僅是對本發明較佳實施例的描述，並非對本發明範圍的任何限定，本發明領域的普通技術人員根據上述揭示內容做的任何變更、修飾，均屬於請求項書的保護範圍。

Claims (13)

  1. 一種用於片盒夾持的機械手，其包括：一機械臂；設置於該機械臂的末端的一末端執行器以及設置於該末端執行器上的一視覺定位元件；其中，該視覺定位元件用於定位該片盒頂部的一法蘭位置；該末端執行器包括一與該片盒頂部的該法蘭相適配的一凹面，根據該片盒頂部的該法蘭位置，該末端執行器藉由該凹面夾持該片盒頂部的該法蘭，其中，該視覺定位元件包括：一水平定位結構和一垂直定位結構，該水平定位結構用於捕捉該片盒表面的水平方向上的特徵，該垂直定位結構用於捕捉該片盒表面的垂直方向上的特徵，根據該片盒表面的水平方向上的特徵及該片盒表面的垂直方向上的特徵定位該片盒頂部的該法蘭位置。
  2. 如請求項1之用於片盒夾持的機械手，其中，該水平定位結構包括一第一相機，該第一相機的鏡頭垂直朝向該末端執行器的任意一側的側壁。
  3. 如請求項1之用於片盒夾持的機械手，其中，該垂直定位結構包括一第二相機及一反射鏡，該第二相機和該反射鏡均設置於該末端執行器的一側的側壁上。
  4. 如請求項1之用於片盒夾持的機械手，其中，該末端執行器為兩側帶有一支撐板的C字形半封閉結構。
  5. 如請求項1之用於片盒夾持的機械手，其中，該末端執行器還包括設置於該凹面前端的一凸台，用於防止該片盒滑落。
  6. 如請求項1之用於片盒夾持的機械手，其中，該凹面上至少設有一個在位感測器，用於感知該凹面是否夾持該片盒。
  7. 如請求項1之用於片盒夾持的機械手，其中，還包括設置於該末端執行器上的一聲納感測器，用於對該片盒搬運行程進行安全檢測。
  8. 如請求項1之用於片盒夾持的機械手，其中，該凹面上至少設有兩個定位銷，該等定位銷與該法蘭的切口對應。
  9. 如請求項1之用於片盒夾持的機械手，其中，該末端執行器與該機械臂的末端呈倒L形。
  10. 如請求項1之用於片盒夾持的機械手，其中，該末端執行器可繞該機械臂的末端進行360度旋轉運動。
  11. 如請求項1之用於片盒夾持的機械手，其中，該機械臂具有6個自由度。
  12. 一種自動片盒搬運裝置，其包括：一自動導航小車、架設在該自動導航小車上的一運載框架及設置於該運載框架上如請求項1-11中任一項的用於片盒夾持的機械手。
  13. 如請求項12之自動片盒搬運裝置，其中，還包括設置於該運載框架上的一片盒放置機構，該機械手相對該片盒放置機構設置於該運載框架的一角。
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