TWI621734B - 用於基板載入之方法與裝備 - Google Patents

用於基板載入之方法與裝備 Download PDF

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TWI621734B
TWI621734B TW102139329A TW102139329A TWI621734B TW I621734 B TWI621734 B TW I621734B TW 102139329 A TW102139329 A TW 102139329A TW 102139329 A TW102139329 A TW 102139329A TW I621734 B TWI621734 B TW I621734B
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凡諾 奇爾皮
朱哈娜 寇斯特摩
黎微明
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皮寇桑公司
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Abstract

一種裝備及方法用於將複數之基板載入一沉積反應器的一加載室中的一基板夾以於該基板夾中構成一垂直堆疊之水平定向基板，用於旋轉該基板夾以構成一水平堆疊之垂直定向基板，以及用於針對沉積降低該基板夾進入該沉積反應器之一反應室。

Description

用於基板載入之方法與裝備
本發明一般係有關於沉積反應器。更特定言之，本發明係有關於原子層沉積反應器，其中材料係藉由連續自飽和式表面反應而沉積在表面上。
原子層磊晶(ALE)方法係由Tuomo Suntola博士在1970年代早期發明。該方法的另一屬名係為原子層沉積(ALD)且現今用以替代ALE。ALD係基於連續導入至少二反應性先質物種至至少一基板的一特別化學沉積法。
藉由ALD的薄膜成長係為密集、無針孔且具有一致的厚度。例如，於一試驗中氧化鋁已藉由源自於三甲基鋁(CH3)3Al的熱ALD而成長，亦視為TMA，以及水係位在攝氏250-300度導致僅大約1%非均勻性涵蓋一基板晶圓。
具有各種方法用於載入一單一基板或整批基板進入一沉積反應器。現已觀察到的是假如基板以水平定向地載入位於一加載室的一基板夾，並接著為了沉積將該基板夾轉動並降低進入一反應室則能夠達成某些優點。
根據本發明之第一示範觀點，提供一方法其包含：將複數之基板載入位於一沉積反應器之一加載室中的 一基板夾以於該基板夾中構成一垂直堆疊之水平定向基板；以及旋轉該基板夾以構成一水平堆疊之垂直定向基板並為了沉積而降低該基板夾進入該沉積反應器的一反應室。
於某些示範具體實施例中，該方法包含藉由一裝載器一次一個地將基板移動通過一載入口進入該加載室。於某些示範具體實施例中，該等基板係由一移轉室(位在該沉積反應器之外)移動進入該(沉積反應器的)加載室。於某些示範具體實施例中，該等基板水平定向地行進通過一載入口。
水平定向基本上意指該基板表面的一法向量指向一垂直方向。相反地，垂直定向基本上意指該基板表面的一法向量指向一水平方向。
該等基板可為晶圓。該裝載器可為裝載員或載入裝置，諸如一裝載機器人。該裝載器可為一單一晶圓裝載器。例如，視應用而定，該載入口可簡單地為一開口，一艙蓋或門，或載入鎖(load lock)。於某些示範具體實施例中，一裝載器自一載入裝置拾起及返回站拾起一基板並將基板移轉(移動)進入該加載室。該移轉可經由一移轉室或是未通過一移轉室而進行。該裝載器可自一基板匣拾起該基板。在該基板匣中該等基板可為水平地定向。於某些示範具體實施例中，該方法包含藉由一設備前端模組將該等基板自一基板儲存托架載入該載入裝置拾起及返回站。該等基板首先可駐留在一經控制的環境中，諸如在一基板儲存 托架內，諸如FOUP或相似物，的一屏蔽氣體大氣環境下(例如，氮大氣環境)。該設備前端模組將該等基板載入該載入裝置拾起及返回站，將該等基板在經控制的環境下(屏蔽氣體大氣環境)。可交替地，該載入裝置拾起及返回站可為真空的。該移轉室以及該加載室可為真空的。該載入裝置拾起及返回站可包含位於一基板匣中呈水平定向的該等基板。如需要，該載入裝置拾起及返回站可為一匣至匣站其將基板由一匣移轉至另一匣，該載入裝置可較佳地由之一次拾起一基板。該載入裝置拾起及返回站可構成該移轉室的一部分。
於某些示範具體實施例中，方法包含：藉由一設備前端模組將該等基板自一基板儲存托架載入該載入裝置拾起及返回站；以及將該等基板一次一個地自該載入裝置拾起及返回站經由一移轉室載入該加載室。
於某些示範具體實施例中，該沉積反應器包含一介於該加載室與該反應室之間的閘。如此是為了在將該等基板載入該加載室期間減少該反應器之冷卻。該閘可為一閘閥。在將該等基板載入該加載室期間該閘可處於一閉合位置。一旦完成載入，該閘經開啟以容許該載入的整批基板降低進入該反應室。之後，該閘可閉合。該等具體實施例係特別地適合用於反應器其中該加載室係位在該反應室之頂部上。因此，於某些示範具體實施例中，方法包含：在該加載室與該反應室之間提供一閘，該加載室位在 該反應室之頂部上。
於某些示範具體實施例中，該反應室係由一真空室所圍繞。於該等具體實施例中，該閘位設在該真空室與該加載室之間可為合宜的。假若反應室加熱器係位設在該真空室中，該閘閉合由該真空室至該加載室的路徑(位在該真空室頂部)減少熱量由該真空室傳遞至該加載室。該閘可在將該等基板載入該加載室期間由該頂部閉合該真空室。
於某些示範具體實施例中，安排旋轉(或翻轉)以致旋轉係為如同搖擺般移動。於某些其他示範具體實施例中，該旋轉可為一轉動移動。因此，於某些示範具體實施例中，該方法包含藉由轉動移動旋轉該基板夾。於某些示範具體實施例中，該方法包含藉由一致動器(或於此及下文中更為一般地，一旋轉機構)由一側邊近接該基板夾，並藉由該致動器旋轉該基板夾。於某些示範具體實施例中，該基板夾包含一轉動中心。該致動器可經推動以接觸該轉動中心以及該基板夾可在該轉動中心相對於一轉動軸轉動。該轉動軸可藉由該致動器界定。於某些示範具體實施例中，該加載室提供一饋通部(feedthrough)穿過一加載室壁(例如，側壁)供致動器進入該加載室。在轉動該基板夾後，該致動器可經由相同的饋通部返回(移回)。例如，假若熱反射板或相似物與一反應室蓋一體成形，則該等熱反射板具有更多的空間通過。於某些示範具體實施例中，該基板夾係藉由一轉動機構由二相對的側邊近接。於該等具體實施例中該轉動機構可包含二相對的致動器及二轉動中心。
於某些其他示範具體實施例中，該旋轉可為藉由該旋轉構件所提供的自由移動。於某些示範具體實施例中，該旋轉係經組配以於該沉積反應器之該加載室內進行。
於某些示範具體實施例中，該旋轉係經安排以致位在一載入位置(亦即，該等基板係經載入的該位置中)的該基板夾係較位載該旋轉位置時(亦即，在該等基板構成該水平堆疊的位置)更接近到加載室門(或載入口)。易言之，於某些示範具體實施例中，一載入的基板夾係經旋轉距該加載室門更遠。
於某些示範具體實施例中，該方法包含藉由連續自飽和表面反應在該等基板表面上沉積材料。因此，於某些示範具體實施例中，方法包含：讓複數之基板暴露至該反應室中的時間分隔前導脈衝，以藉由連續自飽和表面反應在該等基板表面上沉積材料。
根據本發明的一第二示範觀點提供一裝備，其中一裝載器係經組配以將複數之基板載入位於一沉積反應器之一加載室中的一基板夾，以在該基板夾內構成一垂直堆疊之水平定向基板，裝備包含：一旋轉機構其經組配以旋轉該基板夾以構成一水平堆疊之垂直定向基板以及一升降機其經組配為了沉積將該基板夾降低進入該沉積反應器之一反應室。
於某些示範具體實施例中，該旋轉機構包含，例如，一旋轉部件，或一旋轉裝置。該旋轉機構及該升降機 可為一結合的構件或是分開的構件。該旋轉及降低可同時地進行或是一項接著一項進行。於某些示範具體實施例中，該裝載器係經組配以一次一個地移動基板通過一載入口進入該加載室。
於某些示範具體實施例中，該裝備包含：一閘其介於該加載室與該反應室之間，該加載室位在該反應室之頂部上。
於某些示範具體實施例中，該裝備包含：一設備前端模組其經組配以自一基板儲存托架將該等基板載入一載入裝置拾起及返回站；以及一載入裝置其經組配以將該等基板一次一個地自該載入裝置拾起及返回站經由一移轉室載入該加載室。
於某些示範具體實施例中，該旋轉機構係經組配以藉由轉動移動旋轉該基板夾。
於某些示範具體實施例中，該旋轉機構係經組配以由一側邊近接該基板夾，並旋轉該基板夾。
於某些示範具體實施例中，該裝備係經組配以旋轉一載入的基板托架距該加載室門更遠(與一載入位置比較於載入位置)。
於某些示範具體實施例中，該裝備包含複數之以一預定樣式彼此相對地位設的沉積反應器，以及該載入裝置係經組配以載入每一之沉積反應器。因此，能夠構成一反應器群組(cluster)系統。
本發明之不具約束力的示範觀點及具體實施例 已於前述說明。以上具體實施例係僅用以解釋可於本發明之應用中使用的所選定觀點或步驟。一些具體實施例可僅相關於本發明之某些示範觀點而提出。應察知的是相應的具體實施例亦可應用在其他的示範觀點。可構成任何該等具體實施例的適當結合。
20,190‧‧‧箭頭
101,401a,401b,401c,501‧‧‧載入口
102,502‧‧‧加載室
103‧‧‧反應室
104‧‧‧真空室
105‧‧‧排放管路
106‧‧‧進料管路
112‧‧‧反應室蓋
113‧‧‧真空室頂部凸緣
114‧‧‧反應室頂部凸緣
115‧‧‧真空室底部
120,520‧‧‧基板
121,321a,321b,321c,500‧‧‧基板夾
122a,122b,522b‧‧‧支撐件
131‧‧‧裝載器
132,432‧‧‧裝載臂
141‧‧‧提升機構
142‧‧‧提升桿
221‧‧‧基板夾側邊或側板
223‧‧‧吊架部件或板
224,524‧‧‧轉動中心
380a,380b,380c‧‧‧旋轉機構
400a,400b,400c‧‧‧沉積反應器
403‧‧‧基板儲存托架
404‧‧‧設備前端模組
405‧‧‧載入裝置拾起及返回站
431‧‧‧裝載機器人
450‧‧‧基板匣
460‧‧‧移轉室
521‧‧‧側板
523‧‧‧吊板
550‧‧‧致動器插銷
551‧‧‧饋通部
670‧‧‧閘
現將相關於伴隨的圖式，僅經由實例，說明本發明，其中：圖1顯示一示範具體實施例之一沉積反應器及一基板裝載器的一側視圖；圖2顯示一示範具體實施例之圖1之該沉積反應器於沉積期間的一側視圖；圖3A-3C顯示某些示範具體實施例之一沉積反應器中旋轉一基板夾的實例；圖4顯示示範具體實施例之一沉積反應器群組；圖5顯示一特定示範具體實施例的一基板夾之旋轉動作；以及圖6顯示又另一示範具體實施例的一沉積反應器的一側視圖。
於以下的說明中，使用原子層沉積(ALD)技術作為一實例。ALD成長機構之基本係為熟知此技藝人士所熟知的。如於此專利申請案之介紹部分所提及，ALD係基於連續引進至少二反應性先質物料至至少一基板的一特別 化學沉積方法。該至少一基板係暴露至於反應室中的時間分隔前導脈衝，以藉由連續自飽和表面反應將材料沉積在該等基板表面上。
一基本的ALD沉積循環係由四個連續步驟組成：脈衝A，沖洗A，脈衝B及沖洗B。脈衝A係由一第一前驅物蒸氣及另一前驅物蒸氣之脈衝B所組成。惰性氣體及真空泵係用於沖洗氣體反應副產品，以及在沖洗A及沖洗B期間源自於該反應空間的剩餘反應物分子。一沉積順序包含至少一沉積循環。重複沉積循環直至該沉積順序已產生所需厚度之一薄膜或塗層為止。沉積循環亦可更為複雜。例如，該等循環可包括三或更多由沖洗步驟分開的反應劑蒸氣脈衝。所有該等沉積循環構成一由邏輯單元或微處理器控制的定時沉積順序。
圖1顯示一示範具體實施例的一沉積反應器及一基板裝載器的側視圖。該沉積反應器包含一包覆一反應室103的真空室104。該真空室104在其之頂部側邊係由一真空室頂部凸緣113以及在底部側邊係由一真空室底部115加以限制。替代地位在該真空室104內側該反應室103在其之頂部側邊係藉由一反應室頂部凸緣114加以限制。在該反應室103之底部上係為一朝向一真空泵(未顯示)延伸的排放管路105。圖1亦顯示通過該真空室底部115的前驅物蒸氣進料管路106。
一加載室102係位在該反應室103上。位在加載室102之側邊上附裝至該加載室102的該沉積反應器包含一 載入口101用於藉由一裝載器131載入及卸載基板。於某些示範具體實施例中，該載入口101可為一閘閥，一載入鎖或簡單地為一門。當呈水平地定向時一基板適合通過該載入口101(但於此示範具體實施例中，非當呈垂直定向時)。
一提升機構141，一升降機，諸如一分度機構(indexing mechanism)，係附裝至該加載室102。於圖1中顯示的該實例中，該提升機構係附裝至該加載室102的頂部。於該加載室內，一基板夾121係附裝至該提升機構141。視應用而定，一反應室蓋112可附裝至該基板夾112及/或附裝至該提升起機構141。
該提升機構141控制該基板夾121之垂直位置。於一示範具體實施例中，如於圖1中顯示，該提升機構141包含一馬達，諸如一步進馬達，其如所需地向上及向下地移動一附裝或連接至該反應室蓋112及/或至該基板夾121的提升桿142。儘管由於圖式專用緣故而以均勻一致的閉合輪廓繪製，但該基板夾121盡可能為開啟的。
基板120係藉由該裝載器131經由該載入口101載入至該加載室102以及自該加載室卸載。該裝載器131可為一機器人。圖1所顯示該裝載器131包含一伸出的裝載臂132，該裝載器藉由該裝載臂握抓一基板120。該裝載器131使係呈水平定向的基板120移動通過該載入口101並進入該基板夾121。該基板夾121具有適合的支撐件122a及122b以固持該基板120。於此實例中，該等支撐件122a係位設在該基板夾121的底部(於此載入位置該底部係指向一 側邊)以及該等支撐件122b係位在該中間區域。該裝載器131接著自一儲藏區域或架子(未顯示)拾起下一個基板。該提升機構141降低該基板夾121至下一個基板的位置。該裝載器131移動該下一個經水平定向的基板120通過該載入口101進入該基板夾121，等等。
當所有基板已載入該基板夾121中時，已在該基板夾121內構成一垂直堆疊的水平定向基板。該基板夾121接著旋轉90度以構成一水平堆疊的垂直定向基板。並且，基板夾121藉由該提升機構141降低進入該反應室103。該等旋轉及下降步驟係由箭頭190圖解。
該完成的情況係顯示在圖2之最右的圖式中，其中顯示圖1之具有該提升機構141的該沉積反應器位在其之最低位置。於此位置該反應室103是自頂側利用降低的反應室蓋112密封，且可進行ALD加工。然而，應注意的是並不必要將該反應室蓋112附裝至該提升機構141，同時其他藉由一蓋將該反應室103閉合的方式係為可行的。再者，於一些示範具體實施例中，在ALD加工期間，該真空室104係由一蓋閉合以分開該真空室104與該加載室102。針對該目的一真空室蓋可如該反應室蓋112同樣地與該提升機構一體成形。
另一方面，圖2之最左的圖式顯示於一示範具體實施例中，由如箭頭20圖示的另一側邊方向的該基板夾121的一側視圖。此示範具體實施例圖解一實例其中該基板夾121可藉由環繞一轉動軸轉動而旋轉。吊架部件或板 223係附裝至該反應室蓋112。該等基板夾側邊或側板221係在轉動中心224之該點處連接至該等吊架部件或板223。該基板夾係可環繞由轉動中心224定義的該轉動軸轉動。
返回圖2之最右邊圖式，於ALD加工期間，前驅物蒸氣經由進料管路106自前驅物蒸氣源(未顯示)流入該反應室103。於目前的實例中，該等進料管路106經由佈置的通道通過進入該反應室蓋112。將氣體進料進入該反應室103係自該反應室103之頂部進行。於該反應室103內的該流向係於該等垂直定向基板(以及沿著該等基板表面)之間由上到下朝向該排放管路105。
將該基板夾121由一第一定向(具有垂直堆疊之水平定向基板)旋轉至一第二定向(具有水平堆疊之垂直定向基板)的方法可以複數可交替的方式進行。特定實例係顯示於圖3A-3C中。
圖3A顯示藉由轉動移動旋轉的一初步實例。於此實例中，一旋轉機構380a已附裝至該基板夾321a，於圖3A中位在該基板夾321a的一側邊或二側邊的中心處。該旋轉機構380a強制該基板夾321a環繞著一接點或相似的轉動中心(已於圖2的最左邊圖式中顯示一實例)轉動90度。
圖3B顯示藉由類似擺動的移動旋轉的一初步實例。於此實例中，一旋轉機構380b已附裝至該基板夾321b，在圖3B中接近該基板夾321b之一側邊或二側邊之該底部。該旋轉機構380b強制該基板夾321b藉由環繞由該旋轉機構380b界定的一軸之如同擺動移動以旋轉90度。該基 板夾321b之位置係由於該如同擺動的移動而於該水平方向上移動。此類型之具有如同擺動的移動的具體實施例非常適合於需要一載入距離為最小的一應用，因為於此類型的具體實施例中位於一載入位置的該基板夾係較位在該旋轉位置時更接近該載入口。然而，於其他具體實施例中，例如，藉由橫移移動方式移動該基板夾並接著如於圖3A中轉動可達到相同的效果。
於圖3A及3B中所顯示的具體實施例中，該旋轉機構可附裝至該提升機構141。
圖3C顯示藉由一旋轉機構支援的一自由移動而旋轉的一初步實例。於此實例中，一旋轉機構380c已附裝至該加載室102之壁。該旋轉機構380c具有一握抓部分，握抓該基板夾321c並將其旋轉90度。
於先前及進一步的示範具體實施例中，該等基板可為平板狀基板，諸如晶圓。該提升機構及該(等)旋轉機構可構成一結合的機構或可為分開的機構。該基板夾之該旋轉與下降動作可同時地或是一個接著一個地進行。
一裝載器可在一儲存區域或架處拾起一基板，例如，由一基板匣，並經由一移轉室將基板移轉進入該加載室，其中該裝載器至少部分地駐留位於該移轉室內。該移轉室及該加載室可為真空的。該儲存區域或架本身可駐留在該移轉室中或是與該移轉室連接。
於某些示範具體實施例中，該裝載器可為一裝載入員或是一載入裝置，諸如一裝載機器人。該裝載器可 為一單一晶圓裝載器。視該應用而定，該載入口至該加載室，例如，可簡單地為一開口，一艙口或門，或是一載入鎖。於某些示範具體實施例中，一裝載器自一載入裝置拾起及返回站拾起一基板並將基板移轉(移動)進入該加載室。該移轉可經由一移轉室或是未通過一移轉室而進行。該裝載器可自一基板匣拾起該基板。在該基板匣中該等基板可為水平地定向。於某些示範具體實施例中，該等基板藉由一設備前端模組自一基板儲存托架載入該載入裝置拾起及返回站。該等基板首先可駐留在一經控制的環境中，諸如在一基板儲存托架內，諸如FOUP或相似物，的一屏蔽氣體大氣環境下(例如，氮大氣環境)。該設備前端模組將該等基板卸載進入該載入裝置拾起及返回站，將該等基板保持在該經控制的環境下(屏蔽氣體大氣環境)。可交替地，該載入裝置拾起及返回站可為真空的。該移轉室以及該加載室可為真空的。於可交替的具體實施例中，該移轉室及該加載室可為處於屏蔽氣體的大氣環境下。該載入裝置拾起及返回站可包含位於一基板匣中呈水平定向的該等基板。如需要，該載入裝置拾起及返回站可為一匣至匣站，其將基板由一匣移轉至另一匣，該載入裝置可較佳地由之一次拾起一基板。該載入裝置拾起及返回站可構成該移轉室的一部分。
於某些示範具體實施例中，複數之以一預定樣式彼此相對地位設的沉積反應器構成一反應器群組(cluster)。該一群組係顯示在圖4中。於此實例中，該反應 器群組包含三個沉積反應器400a,400b及400c。該等沉積反應器係分別地由載入口401a,401b及401c連接至駐留在該中心區域的一移轉室460。一單一基板載器(或裝載機器人)431至少部分駐留在該移轉室460的一單一基板載器(或裝載機器人)431係經組配以載入每一沉積反應器400a-c。
在一受控制的環境下該基板首先駐留在一極潔淨的基板儲存托架403中。該基板儲存托架403置入於一將該等基板卸載進入一載入裝置拾起及返回站405的設備前端模組404，因此該等基板保持在一受控制的環境下未暴露至周圍空氣。於該載入裝置拾起及返回站405，在ALD加工後一載入裝置能夠一次一個地拾起該等基板用於將之載入及返回。視該應用而定，該設備前端模組404可同時地處理一或更多個基板儲存托架403。因此，該載入裝置拾起及返回站405可針對該載入裝置於每次包含一或更多個基板匣450用以作業。
圖4顯示位在該載入裝置拾起及返回站405處的二基板匣450。該等基板匣450圖解具有基板位在彼此之頂部上構成一垂直堆疊的基板匣。於一可交替的具體實施例中，位在該等匣中的該等基板可位在彼此旁邊構成一水平堆疊的垂直定向基板。
於一示範具體實施例中，該裝載器431包含一延伸的裝載臂432(往後及前延伸)藉由該臂該裝載器432握抓一基板。該裝載器431同樣地如與圖1有關地顯示將該基板移動通過該載入口401a進入該第一反應器400a之一基板 夾。同樣地進行其他沉積反應器400b-c之載入作業。假若該基板開始時不是水平地定向(於一可交替具體實施例中垂直地定向)，則在進入載入口401a之前該裝載器431將該基板旋轉成一水平位置。為了該目的，該裝載器431之該延伸臂432係為可轉動的。該裝載器431本身亦係為可轉動的。其亦能夠進行橫移移動。於一更進階的具體實施例中，一裝載器包含一接頭或相似物於該處一臂件能夠向下地旋轉因此該裝載器能夠，例如，由一基板匣之該頂部側(除了能夠將之由一側邊拾起之外)拾起基板。
於某些示範具體實施例中，該載入裝置拾起及返回站405，該移轉室460及該沉積反應器400a-c之加載室係處於真空。該系統可為一全自動系統。於一較不複雜的系統中，該載入口401a-c係實用作為載入鎖，以及該等基板係經手動地載入反應器400a-c之該等加載室。該移轉室460可加以省略，以及該等加載室會可如所需地被抽吸成真空。
圖5顯示一特定示範具體實施例之一加載室502內一基板夾500的旋轉。於此示範具體實施例中，基板520係經水平定向且經由載入口501被接收進入加載室502。該升降器(未顯示)升高或降低該基板夾500因此每一基板520可依次地被推至其之適當位置。同樣地如於圖1及2中所顯示該等基板520係由支撐件支撐在基板夾500中。該等支撐件522b(相當於圖1及2中的支撐件122b)係部分地顯示於圖5之左上方圖式中。
吊板523(其中之一者顯示於圖5中)係附裝至一 反應室蓋(未顯示)。該基板夾側板521(其中之一者顯示於圖5中)係於轉動中心524之該點處(其中之一者顯示於圖5中)連接至該等吊板523。該基板夾係可環繞著由轉動中心524界定的該轉動軸轉動的。一致動器插銷550係於一加載室壁之饋通部551之該點處經推動通過該加載室502之側壁。如於圖5之該右上方圖式中所圖解將該致動器插銷550的合適端塞推入位於轉動中心524中一對應的合適插座。一對應的插銷(未顯示)係經推入該基板夾500之該相對側邊的該轉動中心。該基板夾500係藉由旋轉一或二個該致動器插銷550而轉動，如藉由於圖5之該右下方圖式中該箭頭所圖示。圖5之該右下方圖式圖解該基板夾500已旋轉45度的位置，以及圖5之左下方圖式該位置中該基板夾500已旋轉90度以構成一水平堆疊之呈垂直定向的基板。
於該左上與左下圖式之間的放大圖片組中更為詳細地圖解一示範具體實施例中該旋轉動作。該放大圖片組以黑色顯示，具有插座的轉動中心524。該轉動中心524進一步包含間隔90度的二鰭狀件。該轉動中心524係位設於該吊板523之一孔中。於圖5之左上圖式中，該轉動中心524之該第一鰭狀件係位在該吊板孔的一側槽縫中將該基板夾500固定在其之初始位置。該孔係稍微大於該轉動中心524。於下一階段該反應室升降機(見圖1及2)相對於該基板夾側板521降低該等吊板523，由於該致動器插銷從該等邊推動所以維持在其之先前的垂直位置。這移動讓轉動中心524不受約束因此其能夠轉動。該等致動器插銷550現將 該基板夾旋轉90度。於最後階段，該反應室升降器相對於該等基板夾側板521升高該等吊板523，因此該轉動中心524之該第二鰭狀件移動進入側邊槽縫，藉此將該基板夾500固定進入該90度旋轉位置。
該致動器插銷可為氣動的。二個致動器插銷能夠支撐該基板夾，因此一致動器插銷支撐該基板夾位在一第一側邊上以及另一者位在相反側邊上。視應用而定該等致動器可設計成為另一形狀。於某些具體實施例中，該載入室壁之饋通部551係為一轉動饋通部。用於該轉動移動的軸承係配置在該加載室之外側上。
圖6顯示另一示範具體實施例之一沉積反應器的一側視圖。於此具體實施例中，該沉積反應器在該加載室102與反應室103之間包含一閘670。如此是為了減少於將該等基板載入駐留在該反應室103之頂部上的該加載室102期間該反應室103之冷卻。該閘670可為一閘閥。該閘670於該等基板載入該加載室102期間係為處於一閉合位置，如圖6之該較下方圖式所圖示。一旦完成該載入作業，該閘670即開啟(如圖6之該較上方圖式所圖示)以容許整批載入的基板降低進入該反應室103。除此之外，關於圖6中所顯示該具體實施例的結構及操作，可參考於圖1及圖2中所顯示之該具體實施例。
未限定該等申請專利範圍之範疇及解釋，以下列示本文所揭示之一或更多個示範具體實施例的某些技術效果：一技術效果係為一用於垂直流動沉積反應器的頂部 載入系統，其中該等基板可水平方向地載入。另一技術效果係為藉由翻動整個基板夾而消除對於各別地翻動每一基板的需求(特別地，假如該等基板係水平定向地儲存)。另一技術效果係為將一反應器群組中一載入距離減至最小。
已經由本發明之特定的應用與具體實施例之非限定的實例提供前述說明為發明人用於完成本發明之目前所考量的最佳模式之一完整且有益的說明。然而對於熟知此技藝之人士應該清楚的是本發明並未限定在以上提出的該等具體實施例之細節，而是其能夠使用等效的構件於其他的具體實施例中應用而未偏離本發明之該等特性。
再者，可使用本發明之該等以上揭示的具體實施例之一些特性，而未相對應地使用其他特性的情況下有所助益。就其本身而論，上述說明應視為僅是本發明之原理的說明，且未對其作限制。因此，本發明之範疇係僅由該等附加的申請專利範圍加以限制。

Claims (14)

  1. 一種用於基板載入之方法，其包含：將複數之基板載入位於一沉積反應器之一加載室中的一基板夾(substrate holder)以於該基板夾中構成一垂直堆疊之水平定向基板；以及旋轉該基板夾以構成一水平堆疊之垂直定向基板並降低該基板夾進入該沉積反應器的一反應室以供沉積，其中該加載室駐留在該反應室之頂部上。
  2. 如請求項1之方法，其中該載入作業包含：藉由一裝載器來一次一個地將基板移動通過一載入口並進入該加載室。
  3. 如請求項1或2之方法，其包含：提供一閘而其介於該加載室與該反應室之間。
  4. 如請求項1或2之方法，其包含：藉由一設備前端模組來將該等基板自一基板儲存托架載入一載入裝置拾起及返回站；以及一次一個地將該等基板自該載入裝置拾起及返回站經由一移轉室載入該加載室。
  5. 如請求項1或2之方法，其包含：藉由一轉動移動來旋轉該基板夾。
  6. 如請求項1或2之方法，其包含：藉由一致動器由一側邊近接該基板夾，並藉由該致動器旋轉該基板夾。
  7. 如請求項1或2之方法，其包含：讓複數之基板暴露至該反應室中的時間分隔前導脈衝，以藉由連續自飽和表面反應在該等基板表面上沉積材料。
  8. 一種用於基板載入之裝備，其中一裝載器，其係經組配以將複數之基板載入位於一沉積反應器之一加載室中的一基板夾，以在該基板夾內構成一垂直堆疊之水平定向基板，該裝備包含：一旋轉機構及一升降機，該旋轉機構係經組配以旋轉該基板夾以構成一水平堆疊之垂直定向基板，該升降機係經組配以將該基板夾降低進入該沉積反應器之一反應室以供沉積，其中該加載室駐留在該反應室之頂部上。
  9. 如請求項8之裝備，其中該裝載器係經組配以一次一個地移動基板通過一載入口並進入該加載室。
  10. 如請求項8或9之裝備，其包含：一閘，其介於該加載室與該反應室之間。
  11. 如請求項8或9之裝備，其包含：一設備前端模組，其係經組配以自一基板儲存托架將該等基板載入一載入裝置拾起及返回站；以及一載入裝置，其係經組配以將該等基板一次一個地自該載入裝置拾起及返回站經由一移轉室載入該加載室。
  12. 如請求項8或9之裝備，其中該旋轉機構係經組配以藉由一轉動移動來旋轉該基板夾。
  13. 如請求項8或9之裝備，其中該旋轉機構係經組配以由一側邊近接該基板夾，並旋轉該基板夾。
  14. 如請求項8或9之裝備，其中該裝備包含複數之以一預定樣式彼此相對地位設的沉積反應器，且該裝載器係經組配以裝載各個沉積反應器。
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