TWI554626B - Oxide sputtering target and protective film for optical recording medium - Google Patents
Oxide sputtering target and protective film for optical recording medium Download PDFInfo
- Publication number
- TWI554626B TWI554626B TW101146867A TW101146867A TWI554626B TW I554626 B TWI554626 B TW I554626B TW 101146867 A TW101146867 A TW 101146867A TW 101146867 A TW101146867 A TW 101146867A TW I554626 B TWI554626 B TW I554626B
- Authority
- TW
- Taiwan
- Prior art keywords
- sputtering target
- film
- protective film
- recording medium
- optical recording
- Prior art date
Links
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- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011276541A JP2013127090A (ja) | 2011-12-17 | 2011-12-17 | 酸化物スパッタリングターゲット及び光記録媒体用保護膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201341559A TW201341559A (zh) | 2013-10-16 |
TWI554626B true TWI554626B (zh) | 2016-10-21 |
Family
ID=48777776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101146867A TWI554626B (zh) | 2011-12-17 | 2012-12-12 | Oxide sputtering target and protective film for optical recording medium |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2013127090A (ja) |
TW (1) | TWI554626B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6280319B2 (ja) | 2012-10-30 | 2018-02-14 | 株式会社デンソーテン | レーダ装置、および、信号処理方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1959442A1 (en) * | 2005-12-02 | 2008-08-20 | Matsushita Electric Industrial Co., Ltd. | Optical information recording medium, recording/reproducing method thereof and recording/reproducing apparatus |
-
2011
- 2011-12-17 JP JP2011276541A patent/JP2013127090A/ja active Pending
-
2012
- 2012-12-12 TW TW101146867A patent/TWI554626B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1959442A1 (en) * | 2005-12-02 | 2008-08-20 | Matsushita Electric Industrial Co., Ltd. | Optical information recording medium, recording/reproducing method thereof and recording/reproducing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP2013127090A (ja) | 2013-06-27 |
TW201341559A (zh) | 2013-10-16 |
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