TWI519803B - Circuit pattern inspection device - Google Patents

Circuit pattern inspection device Download PDF

Info

Publication number: TWI519803B
Authority: TW; Taiwan
Prior art keywords: signal; inspection; electric field; electrode; arc extinguishing
Prior art date: 2013-01-08

Application number

TW103100490A

Other languages

English (en)

Chinese (zh)

Other versions

TW201435373A (zh

Inventor

Hiroshi Hamori

Original Assignee

Oht Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2013-01-08

Filing date

2014-01-07

Publication date

2016-02-01

2014-01-07 Application filed by Oht Inc filed Critical Oht Inc

2014-09-16 Publication of TW201435373A publication Critical patent/TW201435373A/zh

2016-02-01 Application granted granted Critical

2016-02-01 Publication of TWI519803B publication Critical patent/TWI519803B/zh

Links

238000007689 inspection Methods 0.000 title claims description 175
230000005684 electric field Effects 0.000 claims description 85
239000004020 conductor Substances 0.000 claims description 80
238000009826 distribution Methods 0.000 claims description 71
238000001514 detection method Methods 0.000 claims description 32
239000000758 substrate Substances 0.000 claims description 21
230000001629 suppression Effects 0.000 claims description 20
230000007547 defect Effects 0.000 claims description 14
238000012360 testing method Methods 0.000 claims description 5
239000002131 composite material Substances 0.000 claims description 4
238000012545 processing Methods 0.000 description 8
230000002950 deficient Effects 0.000 description 6
238000000034 method Methods 0.000 description 6
230000010363 phase shift Effects 0.000 description 5
230000008878 coupling Effects 0.000 description 4
238000010168 coupling process Methods 0.000 description 4
238000005859 coupling reaction Methods 0.000 description 4
239000011521 glass Substances 0.000 description 4
230000008033 biological extinction Effects 0.000 description 3
239000004973 liquid crystal related substance Substances 0.000 description 3
239000000523 sample Substances 0.000 description 3
238000013461 design Methods 0.000 description 2
238000010586 diagram Methods 0.000 description 2
238000004519 manufacturing process Methods 0.000 description 2
238000005070 sampling Methods 0.000 description 2
230000002194 synthesizing effect Effects 0.000 description 2
230000003321 amplification Effects 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
238000004891 communication Methods 0.000 description 1
239000000470 constituent Substances 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
230000005611 electricity Effects 0.000 description 1
230000008030 elimination Effects 0.000 description 1
238000003379 elimination reaction Methods 0.000 description 1
238000009499 grossing Methods 0.000 description 1
239000012212 insulator Substances 0.000 description 1
239000000463 material Substances 0.000 description 1
239000000178 monomer Substances 0.000 description 1
238000003199 nucleic acid amplification method Methods 0.000 description 1
238000002360 preparation method Methods 0.000 description 1
238000000926 separation method Methods 0.000 description 1
238000003786 synthesis reaction Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/14—Circuits therefor, e.g. for generating test voltages, sensing circuits
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Testing Electric Properties And Detecting Electric Faults (AREA)

TW103100490A 2013-01-08 2014-01-07 Circuit pattern inspection device TWI519803B (zh)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2013001265A JP5417651B1 (ja)	2013-01-08	2013-01-08	回路パターン検査装置

Publications (2)

Publication Number	Publication Date
TW201435373A TW201435373A (zh)	2014-09-16
TWI519803B true TWI519803B (zh)	2016-02-01

Family

ID=50287167

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW103100490A TWI519803B (zh)	2013-01-08	2014-01-07	Circuit pattern inspection device

Country Status (4)

Country	Link
JP (1)	JP5417651B1 (ja)
KR (1)	KR101533187B1 (ja)
CN (1)	CN103913667B (ja)
TW (1)	TWI519803B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6202452B1 (ja) *	2016-06-01	2017-09-27	オー・エイチ・ティー株式会社	非接触型基板検査装置及びその検査方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN1265232C (zh) *	2000-12-01	2006-07-19	凸版印刷株式会社	电路图形检测装置和电路图形检测方法
JP4450143B2 (ja) *	2001-05-24	2010-04-14	オー・エイチ・ティー株式会社	回路パターン検査装置並びに回路パターン検査方法及び記録媒体
JP3760908B2 (ja) *	2002-10-30	2006-03-29	株式会社日立製作所	狭指向性電磁界アンテナプローブおよびこれを用いた電磁界測定装置、電流分布探査装置または電気的配線診断装置
JP4246987B2 (ja) *	2002-11-27	2009-04-02	日本電産リード株式会社	基板検査装置および基板検査方法
TWI247904B (en) *	2002-11-30	2006-01-21	Oht Inc	Circuit pattern inspection device and circuit pattern inspection method
CN1720458B (zh) *	2002-11-30	2010-06-23	Oht株式会社	电路图案检查装置及电路图案检查方法
JP2007309691A (ja) *	2006-05-16	2007-11-29	Nidec-Read Corp	基板検査装置及び基板検査方法
JP4291843B2 (ja) *	2006-10-19	2009-07-08	株式会社東京カソード研究所	パターン検査装置
KR101021427B1 (ko) *	2008-09-29	2011-03-15	마이크로 인스펙션 주식회사	회로기판의 검사장치
JP4644745B2 (ja) *	2009-08-04	2011-03-02	オー・エイチ・ティー株式会社	回路パターン検査装置
JP5305111B2 (ja) *	2011-01-21	2013-10-02	オー・エイチ・ティー株式会社	回路パターン検査装置
JP5432213B2 (ja) *	2011-05-20	2014-03-05	株式会社ユニオンアロー・テクノロジー	パターン検査装置

2013
- 2013-01-08 JP JP2013001265A patent/JP5417651B1/ja not_active Expired - Fee Related
2014
- 2014-01-03 KR KR1020140000643A patent/KR101533187B1/ko active IP Right Grant
- 2014-01-07 TW TW103100490A patent/TWI519803B/zh not_active IP Right Cessation
- 2014-01-08 CN CN201410056938.5A patent/CN103913667B/zh not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP2014134398A (ja)	2014-07-24
CN103913667B (zh)	2016-08-17
TW201435373A (zh)	2014-09-16
KR20140090096A (ko)	2014-07-16
KR101533187B1 (ko)	2015-07-01
JP5417651B1 (ja)	2014-02-19
CN103913667A (zh)	2014-07-09

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Legal Events

Date	Code	Title	Description
2023-11-01	MM4A	Annulment or lapse of patent due to non-payment of fees