TWI488725B - Cutting method and wire sawing by wire saw - Google Patents
Cutting method and wire sawing by wire saw Download PDFInfo
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Description
本發明係有關於利用線鋸切斷半導體晶錠(ingot)等之方法及線鋸。The present invention relates to a method of cutting a semiconductor ingot or the like using a wire saw and a wire saw.
近年來，例如作為由半導體晶錠等工件一次切出複數個薄片(晶圓)之手段已知線鋸(wire saw)。該線鋸係具備線送出線軸(bobbin)、複數個導引滾輪(guide roller)、及線捲取線軸，從上述線鋸送出線軸拉出之切斷用線捲繞於上述各導引滾輪之周圍之後被回收於線捲取線軸。該切斷用線藉由上述兩線軸及導引滾輪之旋轉沿該線之長度方向被高速驅動。在此驅動過程中，沿著大致垂直於在特定之導引滾輪彼此之間排列的複數根線之方向切斷搬送由上述半導體晶錠等構成的工件，從而由工件同時切斷出複數個薄片。In recent years, for example, a wire saw has been known as a means for cutting a plurality of sheets (wafers) at a time from a workpiece such as a semiconductor ingot. The wire saw has a wire feed bobbin, a plurality of guide rollers, and a wire take-up spool, and the cutting wire pulled out from the wire saw wire spool is wound around the guide rollers. After being around, it is recycled to the wire take-up spool. The cutting wire is driven at a high speed along the longitudinal direction of the wire by the rotation of the two bobbins and the guide roller. In this driving process, the workpiece composed of the semiconductor ingot or the like is cut and conveyed in a direction substantially perpendicular to a plurality of lines arranged between the specific guide rollers, thereby simultaneously cutting a plurality of sheets from the workpiece. .
在如上所述的線鋸中，為進行穩定之工件切斷，需向上述線賦予一定以上之張力，然而，該張力越高則施加於線捲取線軸之機械性的負擔變大。亦即，線捲取線軸所捲取的線之張力越高，則該線易於陷入該線捲取線軸之外周面，縮短該線軸之壽命之可能性變高。又，在上述線上被固接有固定砥粒的情況下，於上述線捲取線軸上，線彼此之間壓接之力變高，因此，存在該砥粒易於脫落的問題。In the wire saw as described above, it is necessary to apply a certain amount of tension to the wire in order to perform stable workpiece cutting. However, the higher the tension, the greater the mechanical load imposed on the wire take-up spool. That is, the higher the tension of the wire taken up by the wire take-up bobbin, the wire tends to fall into the outer peripheral surface of the wire take-up spool, and the possibility of shortening the life of the spool is high. Further, when the fixed granules are fixed to the wire, the force of the pressure contact between the wires on the wire take-up bobbin becomes high, so that the ruthenium particles are liable to fall off.
作為解消此種問題之手段，可考慮利用上述的張力調整裝置，使捲取側之線張力低於送出側之線張力。然而，在該線鋸中，作為驅動上述線之驅動方式採用使該線沿前進方向(從線送出線軸朝向線捲取線軸之方向)與後退方向(從線捲取線軸朝向線送出線軸之方向)交替移動的往復驅動方式較多，用此種往復驅動方式運行線鋸的情況下，若進行如上所述之張力調節，則有可能加工效率顯著下降。As means for solving such a problem, it is conceivable to use the above-described tension adjusting device so that the thread tension on the winding side is lower than the thread tension on the sending side. However, in the wire saw, as the driving method for driving the wire, the wire is oriented in the advancing direction (the direction from the wire feeding bobbin toward the wire winding bobbin) and the retreating direction (the direction from the wire take-up bobbin toward the wire feeding bobbin) There are many reciprocating driving methods that alternately move. When the wire saw is operated by such a reciprocating driving method, if the tension adjustment as described above is performed, the machining efficiency may be remarkably lowered.
亦即，在上述往復驅動方式中，若突然使線之驅動方向逆轉，則會發生較強的衝擊，實際上，需使該線一旦減速而停止，從其停止狀態開始朝向逆方向的驅動，並逐漸加速至目標速度之操作，此種驅動方向之反轉需要時間。還有，需要在使上述線之驅動方向逆轉之際，將至此為止降低張力的捲取側之線張力提高，反之，將賦予高張力的送出側之線張力降低，而且，若突然進行此種張力之變動，有可能會發生線之斷線等，因此，該線張力之增減也需要一定程度地花費時間而緩慢進行。因此，除了上述線之驅動方向之反轉之外，伴隨該反轉的張力之增減也需要時間。In other words, in the above-described reciprocating driving method, if the driving direction of the wire is suddenly reversed, a strong impact is generated. Actually, the wire needs to be stopped when decelerating, and the driving from the stopped state to the reverse direction is performed. And gradually accelerate to the operation of the target speed, this reversal of the driving direction takes time. Further, when the driving direction of the wire is reversed, the wire tension on the winding side where the tension is reduced until now is increased, and the wire tension on the feeding side to which the high tension is applied is lowered, and if such a sudden change occurs. The tension may change, and the line may be broken or the like. Therefore, the increase and decrease of the tension of the line also takes a certain amount of time and proceeds slowly. Therefore, in addition to the inversion of the driving direction of the above-described line, it takes time to increase or decrease the tension accompanying the inversion.
為此，下述專利文獻1中提出了在用於使上述線之驅動方向逆轉之線驅動速度之減速過程中，將至此為止降低張力的捲取側的線之張力提高，並且，將賦予高張力的送出側的線之張力降低，從而削減時間浪費的方法。For this reason, in the following Patent Document 1, it is proposed that in the deceleration process of the linear drive speed for reversing the driving direction of the wire, the tension of the wire on the winding side that has been reduced until now is increased, and the weight is increased. The method of reducing the time wasted by reducing the tension of the line on the delivery side of the tension.
然而，在該方法中，在線驅動速度之減速過程中，由於進行提高捲取側的線之張力的同時降低送出側的線之張力的調節，因此，藉由該調節而張力降低的線部分進入導引滾輪之間的區域亦即切斷工件之區域，由此，有可能對該工件之加工精度造成壞影向。However, in this method, during the deceleration of the linear driving speed, since the tension of the wire on the winding side is increased while the tension of the wire on the feeding side is lowered, the line portion in which the tension is lowered by the adjustment is entered. The area between the guide rollers, that is, the area where the workpiece is cut, may cause a bad influence on the machining accuracy of the workpiece.
專利文獻1：日本專利公開公報特開2007－276054號Patent Document 1: Japanese Patent Laid-Open Publication No. 2007-276054
本發明之目的係提供一種能夠有效地削減使線鋸之線之驅動方向逆轉之時因線之張力之調節而造成的時間浪費，並且能夠防止起因於其張力調節的工件之加工精度降低的技術。作為用於達到該目的之手段，本發明係提供一種利用從線送出裝置送出之切斷用線捲繞於複數個導引滾輪之周圍並被線捲取裝置捲取之線鋸，藉由一邊使其導引滾輪彼此之間排列之複數根線向軸方向驅動，一邊藉由使工件與這些線進行相對移動而切斷搬送，從而切斷該工件的方法。該方法包括以下步驟：前進驅動切斷步驟，進行上述工件之切斷，在該前進驅動切斷步驟中，從上述線送出裝置送出上述線並藉由上述線捲取裝置捲取該線，並且藉由向從上述線送出裝置送出之線的張力按壓送出側張力賦予構件以將該線調節為接近於第1目標張力，且向藉由上述線捲取裝置被捲取的線的張力按壓捲取側張力賦予構件以將該線調節為接近於比上述第1目標張力更低的第2目標張力；後退驅動切斷步驟，進行上述工件之切斷，在該後退驅動切斷步驟中，藉由上述線捲取裝置捲取之上述線反過來從該線捲取裝置送出並藉由上述線送出裝置捲取該線，並且向從上述線捲取裝置送出之線按壓上述捲取側張力賦予構件以將該線之張力調節為接近於比上述第2目標張力更高的第3目標張力，且向藉由線送出裝置捲取之線按壓上述送出側張力賦予構件以將該線之張力調節為接近於比上述第1目標張力及上述第3目標張力更低的第4目標張力；第1切換步驟，在上述前進驅動切斷步驟之後使上述線之驅動速度減速，進而使其驅動方向逆轉後使該線之驅動速度加速，並轉移到上述後退驅動切斷步驟；第2切換步驟，在上述後退驅動切斷步驟之後使上述線之驅動速度減速，在使其驅動方向逆轉後使該線之驅動速度加速，並轉移到上述前進驅動切斷步驟；其中，上述前進驅動切斷步驟、上述第1切換步驟、上述後退驅動切斷步驟、及上述第2切換步驟依次反復被執行，在上述第1切換步驟，在上述線之驅動速度的減速過程中藉由上述捲取側張力賦予構件進行上述線之張力調節，將上述線捲取裝置側的線之目標張力從上述第2目標張力提高至上述第3目標張力，且在該線之驅動速度之減速完成之後藉由上述送出側張力賦予構件進行上述線之張力調節，將上述線送出裝置側的線之目標張力從上述第1目標張力降低至上述第4目標張力。An object of the present invention is to provide a technique capable of effectively reducing the time waste caused by the adjustment of the tension of the wire when the driving direction of the wire of the wire saw is reversed, and preventing the machining accuracy of the workpiece due to the tension adjustment from being lowered. . As a means for achieving the object, the present invention provides a wire saw which is wound around a plurality of guide rollers by a wire for ejecting from a wire feeding device and is taken up by a wire winding device by one side. A method of cutting the workpiece by cutting a plurality of wires arranged between the guide rollers in the axial direction and cutting the conveyance by moving the workpiece relative to the wires. The method includes the following steps: a forward drive cutting step of cutting the workpiece, and in the forward drive cutting step, the wire is fed from the wire feeding device and the wire is taken up by the wire winding device, and The delivery-side tension applying member is pressed against the tension sent from the wire feeding device to adjust the wire to be close to the first target tension, and the tension is pressed to the wire wound by the wire winding device. The take-up tension applying member adjusts the line to be close to a second target tension lower than the first target tension; the reverse drive cutting step performs cutting of the workpiece, and in the reverse drive cutting step, borrows The wire wound by the wire winding device is reversely fed from the wire winding device, and the wire is taken up by the wire feeding device, and the winding side tension is applied to the wire fed from the wire winding device. The member adjusts the tension of the wire to be close to the third target tension higher than the second target tension, and presses the delivery-side tension applying member to the wire wound by the wire feeding device. The tension of the line is adjusted to be close to a fourth target tension lower than the first target tension and the third target tension; and in the first switching step, the driving speed of the line is decelerated after the forward drive cutting step, and further Reversing the driving direction, accelerating the driving speed of the line, and shifting to the reverse drive cutting step; and in the second switching step, decelerating the driving speed of the line after the reverse drive cutting step, and driving the direction After the reverse rotation, the driving speed of the line is accelerated, and the process proceeds to the forward drive cutting step. The forward drive cutting step, the first switching step, the backward drive cutting step, and the second switching step are sequentially repeated. In the first switching step, the tension tension adjustment member performs the tension adjustment of the wire by the winding side tension applying member during the deceleration of the driving speed of the wire, and the target tension of the wire on the wire winding device side is from the above The second target tension is increased to the third target tension, and after the deceleration of the driving speed of the line is completed, the above-mentioned sending side tension is given Means for adjusting the tension of the wire, the wire feeding means to the side line of the target tension decrease from the first to the fourth target tension target tension.
又，本發明所有關之工件切斷方法，也可以代替在上述第1切換步驟之目標張力之轉移，或者在上述第1切換步驟之目標張力之轉移之上，而在第2切換步驟，藉由上述捲取側張力賦予構件進行上述線之張力調節，將上述線捲取裝置側的線之目標張力從上述第3目標張力降低至上述第2目標張力，並且，藉由上述送出側張力賦予構件進行上述線之張力調節，將上述線送出裝置側的線之目標張力從上述第4目標張力提高至上述第1目標張力。Further, in the second switching step, the workpiece cutting method according to the present invention may be replaced by the target tension in the first switching step or the target tension in the first switching step. The winding-side tension applying member adjusts the tension of the wire, and lowers the target tension of the wire on the wire winding device side from the third target tension to the second target tension, and the tension is given by the sending-side tension The member adjusts the tension of the wire to increase the target tension of the wire on the wire feeding device side from the fourth target tension to the first target tension.
又，本發明係提供一種利用切斷用線在複數處同時切斷工件之線鋸。該線鋸包括：複數個導引滾輪，其被配設為旋轉中心軸相互平行，上述線被捲繞於其周圍；線送出裝置，其用於將上述線送出至上述導引滾輪；線捲取裝置，其用於從上述導引滾輪捲取上述線；切斷搬送裝置，藉由使張設於上述導引滾輪中特定導引滾輪之間的複數根線與工件相對移動，從而向該線切斷搬送該工件而切斷該工件；線驅動控制裝置，其控制上述線送出裝置及線捲取裝置之作動，從而以前進驅動切斷步驟、第1切換步驟、後退驅動切斷步驟、及第2切換步驟之順序反復執行，其中，上述前進驅動切斷步驟一邊從上述線送出裝置送出上述線並藉由上述線捲取裝置捲取該線，一邊進行上述工件之切斷；上述後退驅動切斷步驟一邊將藉由上述線捲取裝置捲取之上述線反過來從該線捲取裝置送出且藉由上述線送出裝置捲取該線，一邊進行上述工件之切斷；上述第1切換步驟在上述前進驅動切斷步驟之後使上述線之驅動速度減速，而且使其驅動方向逆轉之後使該線之驅動速度加速，並轉移到上述後退驅動切斷步驟；上述第2切換步驟在上述後退驅動切斷步驟之後使上述線之驅動速度減速，在使其驅動方向逆轉之後使該線之驅動速度加速，並轉移到上述前進驅動切斷步驟；送出側張力操作裝置，其包含在上述線送出裝置與上述各導引滾輪之間的區域被按壓於上述線之送出側張力賦予構件，藉由改變其按壓力，使該線之張力變化；捲取側張力操作裝置，其包含在上述線捲取裝置與上述各導引滾輪之間的區域被按壓於上述線之捲取側張力賦予構件，藉由改變其按壓力，使該線之張力變化；張力控制裝置，其使上述各張力操作裝置作動，以使在上述前進驅動切斷步驟使從上述線送出裝置送出的線之張力接近於第1目標張力且使藉由上述線捲取裝置捲取的線之張力接近於比第1目標張力低的第2目標張力，在上述後退驅動切斷步驟使從上述線捲取裝置送出的線之張力接近於比上述第2目標張力高的第3目標張力且使藉由上述線送出裝置捲取的線之張力接近於比上述第1目標張力及上述第3目標張力低的第4目標張力，其中，該張力控制裝置使上述各張力操作裝置作動，使得在上述第1切換步驟，在上述線之驅動速度之減速過程中進行上述線之調節以將上述線捲取裝置側的線之目標張力從上述第2目標張力提高至上述第3目標張力，且在該線之驅動速度之減速完成後進行上述線之張力調節以將上述線送出裝置側的線之目標張力從上述第1目標張力降低至上述第4目標張力。Further, the present invention provides a wire saw that simultaneously cuts a workpiece at a plurality of points by using a cutting wire. The wire saw includes: a plurality of guide rollers arranged to be parallel to each other, the line is wound around the line; a wire feeding device for feeding the wire to the guiding roller; a picking device for taking up the thread from the guiding roller; and cutting the conveying device, by moving a plurality of wires stretched between the specific guiding rollers of the guiding roller and the workpiece relative to each other The wire is cut and transported to cut the workpiece, and the wire drive control device controls the operation of the wire feeding device and the wire winding device to advance the cutting step, the first switching step, and the reverse driving cutting step. And repeating the second switching step of performing the cutting of the workpiece while the line is being fed by the wire winding device while the wire is being fed by the wire winding device; The driving cutting step performs the workpiece while the wire wound by the wire winding device is reversely fed from the wire winding device and the wire is taken up by the wire feeding device The first switching step decelerates the driving speed of the line after the forward driving cutting step, and after the driving direction is reversed, accelerates the driving speed of the line, and shifts to the reverse drive cutting step; The second switching step decelerates the driving speed of the line after the reverse drive cutting step, accelerates the driving speed of the line after reversing the driving direction, and shifts to the forward driving cutting step; the sending side tension operating device The region between the wire feeding device and the guide rollers is pressed against the wire-side sending-side tension applying member, and the tension of the wire is changed by changing the pressing force; the take-up side tension operating device And the region between the wire winding device and the guide roller is pressed against the winding side tension applying member of the wire, and the tension of the wire is changed by changing the pressing force; the tension control device The respective tension operating devices are actuated to cause the tension of the wire sent from the wire feeding device in the forward drive cutting step The tension of the wire wound by the wire winding device is close to the second target tension lower than the first target tension, and is sent from the wire winding device in the reverse drive cutting step. The tension of the line is close to the third target tension higher than the second target tension, and the tension of the wire wound by the wire feeding device is close to the fourth lower than the first target tension and the third target tension. a target tension, wherein the tension control device activates each of the tension operating devices to adjust the line to cancel the line on the line winding device during the deceleration of the driving speed of the line in the first switching step The target tension is increased from the second target tension to the third target tension, and after the deceleration of the driving speed of the line is completed, the tension adjustment of the line is performed to set the target tension of the line on the line sending device side from the first The target tension is lowered to the fourth target tension described above.
又，在本發明所有關之線鋸中，也可以是，代替上述第1切換步驟之目標張力之轉移，或者在上述第1切換步驟之目標張力之轉移之上，上述張力控制裝置使上述各張力操作裝置作動，使得在上述第2切換步驟，進行上述線之張力調節，將上述線捲取裝置側的線之目標張力從上述第3目標張力降低至上述第2目標張力，且進行上述線之張力調節，將上述線送出裝置側的線之目標張力從上述第4目標張力提高至上述第1目標張力。Further, in the wire saw according to the present invention, the tension control device may be configured to replace the target tension in the first switching step or the target tension in the first switching step. The tension operating device is actuated to perform the tension adjustment of the wire in the second switching step, and the target tension of the wire on the wire winding device side is lowered from the third target tension to the second target tension, and the line is performed. The tension adjustment adjusts the target tension of the line on the line feeding device side from the fourth target tension to the first target tension.
參照第1圖至第5圖，說明本發明之較佳實施例。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to Figures 1 through 5, a preferred embodiment of the present invention will be described.
第1圖所示之線鋸，具備一對線送出一捲取裝置10A、10B，在其間配置的四個導引滾輪24A、24B、26A、26B。這些導引滾輪中，導引滾輪24A、24B被配設於彼此相同高度位置上，導引滾輪26A、26B分別被配設於導引滾輪24A、24B之下方之位置。The wire saw shown in Fig. 1 is provided with a pair of wires to feed a take-up device 10A, 10B, and four guide rollers 24A, 24B, 26A, and 26B disposed therebetween. Among these guide rollers, the guide rollers 24A, 24B are disposed at the same height position, and the guide rollers 26A, 26B are disposed at positions below the guide rollers 24A, 24B, respectively.
在上述線送出一捲取裝置10A與導引滾輪24A、24B、26A、26B之間，從接近線送出裝置10A一側開始依次設有固定滑輪12A、14A、16A，送出側張力操作裝置18A，及固定滑輪22A，上述送出側張力操作裝置18A包含作為送出側張力賦予構件之可動滑輪20A。同樣，在上述線送出一捲取裝置10B與導引滾輪24A、24B、26A、26B之間，從接近線捲取裝置10B側開始依次設有固定滑輪12B、14B、16B，捲取側張力操作裝置18B，及固定滑輪22B，上述捲取側張力操作裝置18B包含作為捲取側張力賦予構件之可動滑輪20B。Between the wire take-up device 10A and the guide rollers 24A, 24B, 26A, and 26B, fixed pulleys 12A, 14A, and 16A and a delivery side tension operating device 18A are provided in this order from the side of the line feeding device 10A. The fixed pulley 22A includes the movable sheave 20A as the delivery-side tension applying member. Similarly, between the above-described wire feeding take-up device 10B and the guide rollers 24A, 24B, 26A, and 26B, fixed pulleys 12B, 14B, and 16B are provided in order from the side of the wire take-up device 10B, and the winding side tension operation is performed. The device 18B and the fixed sheave 22B, and the take-up side tension operating device 18B includes a movable sheave 20B as a take-up side tension applying member.
各線送出一捲取裝置10A、10B具備切斷用線W被捲繞的線軸9A、9B，及驅動其之線軸驅動馬達11A、11B。從線送出裝置10A之線軸9A送出之線W以固定滑輪12A、14A、16A，張力操作裝置18A之可動滑輪20A，及固定滑輪22A之順序掛上，進而被複數次捲繞於導引滾輪24A、24B、26B、26A之外側之後，以固定滑輪22B，張力操作裝置18B之可動滑輪20B，固定滑輪16B、14B、12B之順序掛上，並被線捲取裝置10B之線軸9B捲取，且藉由兩張力操作裝置18A、18B賦予線W以適當之張力。又，該線鋸具備滾輪驅動馬達25，該馬達25與導引滾輪24A、24B、26B、26A中特定之導引滾輪(圖例中為導引滾輪26A)之旋轉軸連接，而驅動該旋轉軸。Each of the wire take-up reels 10A and 10B includes bobbins 9A and 9B on which the cutting wire W is wound, and bobbin drive motors 11A and 11B that drive the bobbins. The wire W sent from the bobbin 9A of the wire feeding device 10A is hung in the order of the fixed sheaves 12A, 14A, 16A, the movable sheave 20A of the tension operating device 18A, and the fixed sheave 22A, and is wound around the guide roller 24A in plural times. After the outer sides of 24B, 26B, and 26A, the fixed sheave 22B, the movable sheave 20B of the tension operating device 18B, and the fixed sheaves 16B, 14B, and 12B are hung up, and are taken up by the bobbin 9B of the wire winding device 10B, and The wire W is given an appropriate tension by the two tension operating devices 18A, 18B. Further, the wire saw is provided with a roller drive motor 25 that is coupled to a rotating shaft of a specific guide roller (in the illustrated example, the guide roller 26A) of the guide rollers 24A, 24B, 26B, and 26A to drive the rotary shaft. .
在該線鋸中，藉由各線軸驅動馬達11A、11B之線軸9A、9B之旋轉驅動方向及藉由滾輪驅動馬達25之導引滾輪26A之旋轉驅動方向以正反切換。據此，線W之驅動狀態在該線W從線軸9A送出而被線軸9B捲取之狀態與線W從線軸9B送出而被線軸9A捲取之狀態之間切換。In the wire saw, the rotational driving directions of the bobbins 9A, 9B of the respective bobbin driving motors 11A, 11B and the rotational driving directions of the guiding rollers 26A of the roller driving motor 25 are switched forward and backward. As a result, the driving state of the wire W is switched between the state in which the wire W is fed from the bobbin 9A and taken up by the bobbin 9B, and the state in which the wire W is taken out from the bobbin 9B and taken up by the bobbin 9A.
亦即，在該實施例所有關之線鋸中，於上述的四個導引滾輪中之導引滾輪24A、24B之間，線W以複數根排列之狀態被張設，且這些沿其長度方向(軸方向)被往復驅動。但是，在本發明中，不對上述導引滾輪之具體個數進行限定，在兩個以上之範圍可自由設定。That is, in the wire saw of the embodiment, between the guide rollers 24A, 24B among the above four guide rollers, the wires W are arranged in a plurality of states, and these are along the length thereof. The direction (axial direction) is driven back and forth. However, in the present invention, the specific number of the guide rollers is not limited, and can be freely set in two or more ranges.
在上述導引滾輪24A、24B之間張設的線W之上方設有使圓柱狀工件(例如半導體晶錠)28移動之工件搬送裝置30。該工件搬送裝置30具備保持上述工件28之工件保持部32、及工件搬送馬達34。工件保持部32保持上述工件28之方向被設定為基於其結晶軸可獲得所目的之結晶方位之方向。工件搬送馬達34與圖式省略之滾珠螺桿(ball screw)聯動，使上述工件保持部與工件28一體地上升(亦即切斷搬送)。該實施例所有關之工件搬送馬達34採用伺服馬達，兼作為檢測工件28之切斷搬送位置之搬送位置檢測手段。A workpiece transfer device 30 for moving a cylindrical workpiece (for example, a semiconductor ingot) 28 is provided above the line W stretched between the guide rollers 24A and 24B. The workpiece transport device 30 includes a workpiece holding portion 32 that holds the workpiece 28 and a workpiece transport motor 34. The direction in which the workpiece holding portion 32 holds the workpiece 28 is set to a direction in which the intended crystal orientation can be obtained based on the crystal axis. The workpiece conveyance motor 34 is interlocked with a ball screw (not shown) to integrally raise the workpiece holding portion and the workpiece 28 (that is, to cut and convey). The workpiece conveyance motor 34 according to this embodiment employs a servo motor and also serves as a conveyance position detecting means for detecting the cutting conveyance position of the workpiece 28.
於上述導引滾輪24A、24B之間張設的線W之上方，在工件28之左右兩側之位置設有研磨漿(slurry)供給裝置36A、36B。這些研磨漿供給裝置36A、36B針對高速驅動的各線W，同時供給被混合砥粒之加工液(研磨漿)，並使其附著於線W之表面。Above the line W stretched between the guide rollers 24A and 24B, slurry supply devices 36A and 36B are provided at positions on the left and right sides of the workpiece 28. These slurry supply devices 36A and 36B simultaneously supply the machining liquid (polishing slurry) to be mixed with the swarf particles for each line W that is driven at a high speed, and attach it to the surface of the wire W.
從而，在該線鋸中，於導引滾輪24A、24B之間張設之複數根線W沿其長度方向被同時高速驅動，且一邊從研磨漿供給裝置36A、36B向這些線W供給加工液，一邊工件28被切斷搬送至這些線W之下方，從而由該工件28一次同時切出複數個晶圓。Therefore, in the wire saw, the plurality of wires W stretched between the guide rollers 24A and 24B are simultaneously driven at high speed along the longitudinal direction thereof, and the machining fluid is supplied to the wires W from the slurry supply devices 36A and 36B. When the workpiece 28 is cut and conveyed below the line W, the workpiece 28 is simultaneously cut out of a plurality of wafers at a time.
接著，基於第2圖及第3圖說明上述張力操作裝置18A、18B之構造。此外，由於兩張力操作裝置18A、18B之構成彼此相同，因此，在這裡以張力操作裝置18A為例說明。Next, the structure of the above-described tension operating devices 18A and 18B will be described based on FIGS. 2 and 3 . Further, since the configurations of the two tension operating devices 18A, 18B are identical to each other, the tension operating device 18A will be described here as an example.
上述可動滑輪20A被配設於固定滑輪16A、22A彼此之間，各滑輪16A、20A、22A被配設成使線長藉由該可動滑輪20A之上下移動而變化。具體而言，若可動滑輪20A下降則線長增大，若可動滑輪20A上升則線長減小。The movable sheave 20A is disposed between the fixed sheaves 16A and 22A, and each of the sheaves 16A, 20A, and 22A is disposed such that the linear length changes by the upper and lower movement of the movable sheave 20A. Specifically, when the movable sheave 20A is lowered, the wire length is increased, and when the movable sheave 20A is raised, the wire length is decreased.
張力操作裝置18A具備可旋轉地支撐上述固定滑輪22A之支撐構件38及被安裝於該支撐構件38之張力檢測器40。該張力檢測器40檢測被施加於上述支撐構件38之荷重，進而檢測上述線W之張力。該張力檢測器40可利用將荷重元(load cell)、差動變壓器、及彈簧組合的結構等。The tension operating device 18A includes a support member 38 that rotatably supports the fixed sheave 22A and a tension detector 40 that is attached to the support member 38. The tension detector 40 detects the load applied to the support member 38, and detects the tension of the wire W. The tension detector 40 can utilize a structure in which a load cell, a differential transformer, and a spring are combined.
上述可動滑輪20A被安裝於槓桿(lever)44之前端，使得以與線W之軸方向垂直之旋轉軸42為中心可旋轉。在該槓桿44之基端被固定有旋轉中心軸46，該旋轉中心軸46被支撐於固定側板48。具體而言，在上述固定側板48被固定有搖動汽缸(cylinder)50，上述旋轉中心軸46連接於該搖動汽缸50。該搖動汽缸50藉由使上述槓桿44及可動滑輪20A以上述旋轉中心軸46為中心並與該旋轉中心軸46一體地旋轉而將該可動滑輪20A按壓於上述線W，從而向該線W賦予張力，並且藉由其按壓力之增減使上述張力變化。The movable sheave 20A is attached to the front end of the lever 44 so as to be rotatable about the rotation shaft 42 perpendicular to the axial direction of the wire W. A rotation center shaft 46 is fixed to the base end of the lever 44, and the rotation center shaft 46 is supported by the fixed side plate 48. Specifically, a rocking cylinder 50 is fixed to the fixed side plate 48, and the rotating center shaft 46 is connected to the rocking cylinder 50. The rocking cylinder 50 presses the movable sheave 20A against the wire W by centering the lever 44 and the movable sheave 20A about the rotation center axis 46 so as to rotate integrally with the rotation center shaft 46, thereby imparting the line W to the line W. Tension, and the above tension is varied by the increase or decrease of its pressing force.
在上述旋轉中心軸46上連接有編碼器52。該編碼器(encoder)52檢測上述旋轉中心軸46之旋轉角度位置、換言之可動滑輪20A之位置。An encoder 52 is connected to the above-described rotation center shaft 46. The encoder 52 detects the rotational angular position of the central axis of rotation 46, in other words, the position of the movable sheave 20A.
在該線鋸中具備如第4圖所示之控制器60。該控制器60係具備作為張力控制裝置之機能，具備張力調節部62、速度調節部64、及目標張力設定部66。The wire saw is provided with a controller 60 as shown in Fig. 4. The controller 60 is provided with a function as a tension control device, and includes a tension adjusting unit 62, a speed adjusting unit 64, and a target tension setting unit 66.
張力調節部62向驅動搖動汽缸50之空氣壓伺服電路54輸出電氣訊號，調節該搖動汽缸50之驅動進而調節線張力，以使藉由線送出側及線捲取側之各個張力檢測器40檢測出的線張力保持為藉由目標張力設定部66設定之目標張力T。具體而言，例如在上述線送出一捲取裝置10A側之檢測張力高於上述目標張力T之情況下，降低搖動汽缸50之驅動力，使與該搖動汽缸50連接的槓桿44朝上旋轉，從而使被支撐於該槓桿44之可動滑輪20A施加於上述線W之按壓力降低。反之，在上述檢測張力低於上述目標張力T之情況下，提高上述搖動汽缸50之驅動力使上述槓桿44朝下旋轉，從而沿第2圖所示之逆時針方向旋轉，使上述可動滑輪20A施加於上述線W之按壓力提高。The tension adjusting unit 62 outputs an electric signal to the air pressure servo circuit 54 that drives the rocking cylinder 50, adjusts the driving of the rocking cylinder 50, and adjusts the wire tension so that the respective tension detectors 40 are detected by the wire feeding side and the wire winding side. The outgoing thread tension is maintained at the target tension T set by the target tension setting unit 66. Specifically, for example, when the detected tension on the side of the wire feeding and unwinding device 10A is higher than the target tension T, the driving force of the rocking cylinder 50 is lowered, and the lever 44 connected to the rocking cylinder 50 is rotated upward. Thereby, the pressing force applied to the wire W by the movable sheave 20A supported by the lever 44 is lowered. On the other hand, when the detected tension is lower than the target tension T, the driving force of the swing cylinder 50 is increased to rotate the lever 44 downward, thereby rotating in the counterclockwise direction shown in FIG. 2, so that the movable pulley 20A is rotated. The pressing force applied to the above-mentioned line W is increased.
上述速度調節部64用於調節藉由上述線軸驅動馬達11A、11B之線軸驅動之方向及驅動速度，以使作為驅動線W並切斷工件28之步驟，依次反復執行後面詳述之前進驅動切斷步驟、第1切換步驟、後退驅動切斷步驟、及第2切換步驟。The speed adjusting unit 64 is configured to adjust the direction of driving the bobbin of the bobbin driving motors 11A and 11B and the driving speed so as to cut the workpiece 28 as the driving line W, and sequentially repeat the steps of the driving in advance. The breaking step, the first switching step, the reverse drive cutting step, and the second switching step.
在上述前進驅動切斷步驟，上述線W從上述線送出裝置10A送出且被上述線捲取裝置10B捲取，並進行上述工件28之切斷。反之，在上述後退驅動切斷步驟，被上述線捲取裝置10B捲取之線W從該線捲取裝置10B送出且被上述線送出裝置10A捲取，並進行上述工件之切斷。In the forward drive cutting step, the wire W is fed from the wire feeding device 10A and taken up by the wire winding device 10B, and the workpiece 28 is cut. On the other hand, in the reverse drive cutting step, the wire W taken up by the wire winding device 10B is sent out from the wire winding device 10B and taken up by the wire feeding device 10A, and the workpiece is cut.
在上述第1切換步驟，於上述前進驅動切斷步驟之後上述線W之驅動速度被減速，進而其驅動方向被逆轉之後該線之驅動速度被加速。據此轉移到下一個後退驅動切斷步驟。另一方面，在上述第2切換步驟，於上述後退驅動切斷步驟之後上述線之驅動速度被減速，其驅動方向被逆轉之後該線之驅動速度被加速，據此轉移到下一個上述前進驅動切斷步驟。In the first switching step, the driving speed of the line W is decelerated after the forward drive cutting step, and the driving speed of the line is accelerated after the driving direction is reversed. According to this, transfer to the next reverse drive cut-off step. On the other hand, in the second switching step, after the reverse drive cutting step, the driving speed of the line is decelerated, and the driving speed of the line is accelerated after the driving direction is reversed, thereby shifting to the next forward driving. Cut off the steps.
該實施例所有關之速度調節部64具備向線軸驅動馬達11A、11B分別輸出控制訊號而微調節兩線軸9A、9B之旋轉速度之機能，以使利用編碼器52檢測出的可動滑輪20A、20B之位置接近於預先被設定之基準位置(在這裡，如第2圖之實線所示，為槓桿44呈水平之位置)。例如，在從線軸9A送出線W且被線軸9B捲取之狀態下，當檢測出送出側之可動滑輪20A位於比基準位置更靠下方之位置時，為使可動滑輪20A上昇，使成為線送出裝置之側的線軸9A之旋轉速度減小，反之，當檢測出可動滑輪20A位於比基準位置更靠上方之位置時，為使可動滑輪20A下降，使成為線捲取裝置之側的線軸9A之旋轉速度增大。另一方面，當檢測出線捲取側之可動滑輪20B位於比基準位置更靠下方之位置時，為使可動滑輪20B上昇，使成為線捲取裝置之側的線軸9B之旋轉速度增大，反之，當檢測出可動滑輪20B位於比基準位置更靠上方之位置時，為使可動滑輪20B下降，使成為線捲取裝置之側的線軸9B之旋轉速度減小。The speed adjusting unit 64 according to this embodiment has a function of outputting a control signal to the spool drive motors 11A and 11B and finely adjusting the rotational speeds of the two spools 9A and 9B so that the movable pulleys 20A and 20B detected by the encoder 52 are used. The position is close to the previously set reference position (here, as shown by the solid line in Fig. 2, the lever 44 is horizontal). For example, when the wire W is fed from the bobbin 9A and is wound up by the bobbin 9B, when the movable sheave 20A on the delivery side is detected to be located below the reference position, the movable sheave 20A is raised to be sent out. The rotation speed of the bobbin 9A on the side of the apparatus is decreased. On the other hand, when it is detected that the movable sheave 20A is located above the reference position, the bobbin 9A which is the side of the cord winding device is lowered in order to lower the movable sheave 20A. The rotation speed increases. On the other hand, when it is detected that the movable sheave 20B on the wire take-up side is located below the reference position, the rotational speed of the bobbin 9B which is the side of the wire winding device is increased in order to raise the movable sheave 20B. On the other hand, when it is detected that the movable sheave 20B is located above the reference position, in order to lower the movable sheave 20B, the rotational speed of the bobbin 9B which is the side of the wire winding device is reduced.
目標張力設定部66，如上所述，係設定線W之目標張力T並輸入至張力調節部62，並且具有根據上述各步驟使目標張力T如第5圖最下段所示變化之特徵。具體如下所述。As described above, the target tension setting unit 66 sets the target tension T of the line W and inputs it to the tension adjusting unit 62, and has a feature that the target tension T is changed as shown in the lowermost stage of Fig. 5 in accordance with the above-described respective steps. The details are as follows.
1.前進驅動切斷步驟：在該步驟，目標張力設定部66將上述線送出裝置10A側之目標張力T固定為第1目標張力T1，將上述線捲取裝置10B側之目標張力T固定為比上述第1目標張力T1低的第2目標張力T2。1. Forward drive cutting step: In this step, the target tension setting unit 66 fixes the target tension T on the line feeding device 10A side to the first target tension T1, and fixes the target tension T on the line winding device 10B side to The second target tension T2 is lower than the first target tension T1.
2.第1切換步驟：在該步驟，目標張力設定部66將上述線捲取裝置10B側之目標張力T從上述第2目標張力T2逐漸提高至比該第2目標張力T2高的第3目標張力T3。反至，將上述線送出裝置10A側之目標張力T從上述第1目標張力T1逐漸降低至比該第1目標張力T1及上述第3目標張力T3低的第4目標張力T4。2. First switching step: In this step, the target tension setting unit 66 gradually increases the target tension T on the line winding device 10B side from the second target tension T2 to a third target higher than the second target tension T2. Tension T3. On the contrary, the target tension T on the side of the wire feeding device 10A is gradually decreased from the first target tension T1 to the fourth target tension T4 which is lower than the first target tension T1 and the third target tension T3.
進一步，作為該線鋸之特徵，上述目標張力設定部66，如第5圖之最上段及最下段所示，與上述線W之驅動速度之減速及加速時刻(timing)同步地使上述目標張力T提高及降低。具體而言，與上述線驅動速度之減速之開始大致同時，開始提高上述線捲取裝置10B側之目標張力T，並與該減速之完成大致同時達到上述第3目標張力T3(＞T2)。接著，與上述線驅動速度之減速完成後(與該完成大致同時)開始降低上述線送出裝置10A側之目標張力T，並與向後退側之加速完成大致同時達到上述第4目標張力T4(＜T1)。Further, as a feature of the wire saw, the target tension setting unit 66 causes the target tension to be synchronized with the deceleration of the driving speed of the line W and the timing of the acceleration as shown in the uppermost and lowermost portions of the fifth figure. T increases and decreases. Specifically, at the same time as the start of the deceleration of the line drive speed, the target tension T on the side of the wire winding device 10B is started to increase, and the third target tension T3 (>T2) is reached substantially simultaneously with the completion of the deceleration. Then, after the deceleration of the line driving speed is completed (at substantially the same time as the completion), the target tension T on the line feeding device 10A side is lowered, and the fourth target tension T4 is reached substantially simultaneously with the completion of the acceleration to the retreating side (< T1).
3.後退驅動切斷步驟：在該步驟，目標張力設定部66將上述線捲取裝置10B側之目標張力T固定為上述第3目標張力T3，將上述線送出裝置10A之目標張力T固定為上述第4目標張力T4。3. The reverse drive cutting step: in this step, the target tension setting unit 66 fixes the target tension T on the side of the wire winding device 10B to the third target tension T3, and fixes the target tension T of the wire feeding device 10A to The fourth target tension T4 described above.
4.第2切換步驟：在該步驟，目標張力設定部66將上述線送出裝置10A側之目標張力T逐漸從上述第4目標張力T4提高至上述第1目標張力T1。反之，將上述線捲取裝置10B側之目標張力T逐漸從上述第3目標張力T3降低至上述第2目標張力T2。4. Second switching step: In this step, the target tension setting unit 66 gradually increases the target tension T on the line feeding device 10A side from the fourth target tension T4 to the first target tension T1. On the other hand, the target tension T on the side of the wire winding device 10B is gradually lowered from the third target tension T3 to the second target tension T2.
進一步，作為該線鋸之特徵，上述目標張力設定部66，與上述第1切換步驟同樣，如第5圖之最上段及最下段所示，與上述線W之驅動速度之減速及加速時刻同步地使上述目標張力T提高及降低。具體而言，與上述線驅動速度之減速之開始大致同時，開始提高上述線送出裝置10A側之目標張力T，並與該減速之完成大致同時復歸到上述第1目標張力T1(＞T4)。接著，與上述線驅動速度之減速完成後(與該完成大致同時)開始降低上述線捲取裝置10B側之目標張力T，並與向後退側之加速完成大致同時復歸到上述第2目標張力T2(＜T3)。Further, as a feature of the wire saw, the target tension setting unit 66 is synchronized with the deceleration and acceleration timing of the driving speed of the line W as shown in the uppermost stage and the lowermost stage of the fifth drawing, similarly to the first switching step. The target tension T is raised and lowered. Specifically, at the same time as the start of the deceleration of the line driving speed, the target tension T on the line feeding device 10A side is started to be increased, and the first target tension T1 (>T4) is returned substantially simultaneously with the completion of the deceleration. Then, after the deceleration of the line driving speed is completed (at substantially the same time as the completion), the target tension T on the side of the wire winding device 10B is started to be lowered, and the acceleration to the retreating side is completed substantially simultaneously to the second target tension T2. (<T3).
從而，總結上述各步驟與目標張力之間的關係，如下表所示。Thus, the relationship between the above steps and the target tension is summarized, as shown in the following table.
另外，關於上述各目標張力T1至T4之具體數值可適宜設定。在該實施例中，上述第1目標張力T1及上述第3目標張力T3分別被設定為25(N)，上述第2目標張力T2及上述第4目標張力T4分別被設定為13(N)。又，上述各切換步驟之目標張力T之轉移速度被設定為使該轉移與該切換步驟之線驅動速度之減速結束時點(亦即線W之停止時點)大致一致。Further, specific values of the above-described respective target tensions T1 to T4 can be appropriately set. In this embodiment, the first target tension T1 and the third target tension T3 are set to 25 (N), respectively, and the second target tension T2 and the fourth target tension T4 are set to 13 (N), respectively. Further, the transition speed of the target tension T in each of the above-described switching steps is set such that the transition substantially coincides with the point at which the deceleration of the line drive speed of the switching step ends (that is, the point at which the line W is stopped).
下面，參照第5圖之時序圖表(time chart)說明上述各步驟之線鋸之動作之詳細內容以及線驅動速度和線張力之控制內容。Next, the details of the operation of the wire saw and the control contents of the wire drive speed and the wire tension will be described with reference to the time chart of Fig. 5.
1.前進驅動切斷步驟1. Forward drive cut-off step
在該步驟，線送出裝置10A之線軸9A沿送出方向被旋轉驅動，線捲取裝置10B之線軸9B沿捲取方向被驅動，從而線W從上述線軸9A送出並被上述線軸9B捲取。如上伴隨線W之前進驅動，工件28被切斷搬送，據此，進行該工件28之切斷。At this step, the bobbin 9A of the wire feeding device 10A is rotationally driven in the feeding direction, and the bobbin 9B of the wire winding device 10B is driven in the winding direction, so that the wire W is fed from the bobbin 9A and taken up by the bobbin 9B. As described above, the workpiece 28 is cut and conveyed in association with the advancement of the line W, whereby the cutting of the workpiece 28 is performed.
此時，目標張力設定部66將線送出裝置10A側之線W之目標張力T設定為第1目標張力T1(例如25N)，將線捲取裝置10B側之線W之目標張力T設定為第2目標張力T2(例如13N)。接受該目標張力T之設定，張力調節部62調節各搖動汽缸50之驅動力，以使線送出裝置10A側之張力檢測器40之檢測張力及線捲取裝置10B側之張力檢測器40之檢測張力分別接近於上述第1目標張力T1及上述第2目標張力T2。At this time, the target tension setting unit 66 sets the target tension T of the line W on the line feeding device 10A side to the first target tension T1 (for example, 25 N), and sets the target tension T of the line W on the line winding device 10B side to the first. 2 target tension T2 (for example, 13N). Upon receiving the setting of the target tension T, the tension adjusting unit 62 adjusts the driving force of each of the swing cylinders 50 so that the tension of the tension detector 40 on the line feeding device 10A side and the tension detector 40 on the side of the wire winding device 10B are detected. The tension is close to the first target tension T1 and the second target tension T2, respectively.
另一方面，設於張力操作裝置18A的編碼器52之檢測訊號(亦即，可動滑輪20A之位置檢測訊號)被讀入至速度調節部64。該速度調節部64比較上述可動滑輪20A之檢測位置與預先被設定之基準位置，當前者高於後者時，為了使可動滑輪20A降低，使作為線送出線軸之線軸9A之旋轉速度增大。反之，當前者低於後者時，為了使可動滑輪20A上昇，使作為線送出側線軸之線軸9A之旋轉速度減小。藉由如上之控制，在穩定狀態下，可動滑輪20A大致保持於基準位置，來確保其移動餘裕。On the other hand, the detection signal of the encoder 52 provided in the tension operating device 18A (that is, the position detecting signal of the movable pulley 20A) is read into the speed adjusting portion 64. The speed adjusting unit 64 compares the detected position of the movable sheave 20A with the reference position set in advance, and when the present is higher than the latter, the rotational speed of the bobbin 9A as the wire feed bobbin is increased in order to lower the movable sheave 20A. On the other hand, when the current one is lower than the latter, in order to raise the movable sheave 20A, the rotational speed of the bobbin 9A which is a wire feed side bobbin is reduced. By the above control, in the steady state, the movable sheave 20A is held substantially at the reference position to secure the movement margin.
藉由以上之控制，線送出裝置10A側之線張力大致保持為上述第1目標張力T1，據此，於導引滾輪24A、24B之間確保工件28之良好的切斷所必要的線張力。另一方面，線捲取裝置10B側之線張力被抑制為大致上述第2目標張力T2，因此，於該線捲取裝置10B之線軸9B之線W之陷入被緩和，施加於該裝置10B之機械性負擔減輕。By the above control, the thread tension on the wire feeding device 10A side is maintained substantially at the first target tension T1, whereby the thread tension necessary for the good cutting of the workpiece 28 is ensured between the guide rollers 24A and 24B. On the other hand, since the thread tension on the side of the wire winding device 10B is suppressed to be substantially the second target tension T2, the line W of the bobbin 9B of the wire winding device 10B is immersed and applied to the device 10B. The mechanical burden is reduced.
2.第1切換步驟2. The first switching step
於上述前進驅動切斷步驟執行預先被設定之第1線長(例如300m)之後，轉移到第1切換步驟。在該步驟，首先，上述線W之驅動逐漸被減速(前進減速)。並且，其速度成為0的時點，亦即，於前進減速結束之時點，將線W之驅動方向相反地逐漸加速(後退加速)，轉移到下一個後退驅動切斷步驟。亦即，線W之驅動從前進驅動緩緩地切換至後退驅動。After the first forward line cutting step is performed to execute the first line length (for example, 300 m) set in advance, the process proceeds to the first switching step. At this step, first, the drive of the above-described line W is gradually decelerated (forward deceleration). Further, when the speed is zero, that is, at the time when the forward deceleration is completed, the driving direction of the line W is gradually accelerated (reverse acceleration), and the process proceeds to the next reverse drive cutting step. That is, the drive of the line W is gradually switched from the forward drive to the reverse drive.
此時，作為該線鋸之特徵，目標張力設定部66進行如第5圖之最下段所示之目標張力之變更。具體而言，與上述線W之減速大致同時，將線捲取裝置10B側之目標張力T從至此為止的第2目標張力T2開始提高，並於上述的前進減速結束為止使其達到第3目標張力T3(在該實施例中為25N)。進一步，從該前進減速結束之時點開始，將線送出裝置10A側之目標張力T從至此為止的第1目標張力T1開始降低，至後退加速結束為止，使其達到第4目標張力T4(例如13N)。伴隨於此，實際的線張力也分別增減，當後退驅動開始之時，線捲取裝置10B側之線張力提高至大致25N，進而，當後退加速結束之時，線送出裝置10A側之線張力降低至大致13N。At this time, as a feature of the wire saw, the target tension setting unit 66 changes the target tension as shown in the lowermost stage of FIG. Specifically, the target tension T on the side of the wire winding device 10B is increased from the second target tension T2 so far, and the third target is reached until the above-described forward deceleration is completed. Tension T3 (25N in this embodiment). Further, from the point of time when the forward deceleration is completed, the target tension T on the line feeding device 10A side is lowered from the first target tension T1 until now, and the fourth target tension T4 is reached until the reverse acceleration is completed (for example, 13N). ). In response to this, the actual line tension is also increased or decreased. When the retracting drive is started, the line tension on the side of the wire winding device 10B is increased to approximately 25 N, and further, when the reverse acceleration is completed, the line on the line feeding device 10A side is reached. The tension is reduced to approximately 13N.
3．後退驅動切斷步驟3. Back drive cutoff step
在該步驟，線捲取裝置10B之線軸9B沿送出方向被旋轉驅動，線送出裝置10A之線軸9A沿捲取方向被驅動，據此，線W從上述線軸9B送出並被上述線軸9A捲取。此時，關於張力控制，由於已經完全轉移至將線捲取裝置10B側之線張力接近於第3目標張力T3，且將線送出裝置10A側之線張力接近於第4目標張力T4之控制，因此，與上述前進驅動切斷步驟同樣，於導引滾輪24A、24B之間確保工件28之良好的切斷所必要之線張力(≒25N)，並且，抑制成為捲取側的線送出裝置10A側之線張力(≒13N)，可減輕該裝置10A之強度負擔。At this step, the bobbin 9B of the wire winding device 10B is rotationally driven in the feeding direction, and the bobbin 9A of the wire feeding device 10A is driven in the winding direction, whereby the wire W is fed from the bobbin 9B and taken up by the bobbin 9A. . At this time, regarding the tension control, since the thread tension on the side of the wire winding device 10B is completely approached to the third target tension T3, and the thread tension on the wire feeding device 10A side is close to the fourth target tension T4, Therefore, similarly to the above-described forward drive cutting step, the wire tension (≒25N) necessary for the good cutting of the workpiece 28 is ensured between the guide rollers 24A and 24B, and the wire feeding device 10A that is the winding side is suppressed. The line tension of the side (≒13N) can reduce the strength burden of the device 10A.
4．第2切換步驟4. Second switching step
於上述後退驅動切斷步驟被執行比上述第1線長短的第2線長(例如100m)之後轉移到第2切換步驟。在該步驟，也首先為上述線W之驅動逐漸被減速(後退減速)， 其速度成為0之時點亦即後退減速結束之時點，線W之驅動方向被逆轉且逐漸加速(前進加速)，轉移到上述前進驅動切斷步驟。亦即，線W之驅動從後退驅動緩緩切換為前進驅動。When the reverse drive cutting step is performed longer than the second line length (for example, 100 m) shorter than the first line length, the process proceeds to the second switching step. In this step, first, the driving of the above-mentioned line W is gradually decelerated (reverse deceleration), When the speed becomes 0, that is, the point at which the reverse deceleration ends, the driving direction of the line W is reversed and gradually accelerated (advance acceleration), and the shift is made to the forward drive cutting step. That is, the drive of the line W is gradually switched from the reverse drive to the forward drive.
此時，上述目標張力設定部66也進行如第5圖之最下段所示之張力變更。具體而言，與上述線W之減速大致同時，將上述線送出裝置10A側之目標張力T從至此為止的第4目標張力T4開始提高，並與該減速之完成大致同時復歸到上述第1目標張力T1。進一步，從上述後退減速結束之時點開始，將上述線捲取裝置10B側之目標張力T從至此為止的第3目標張力T3開始降低，並至該前進加速結束為止使該線捲取裝置10B側之目標張力T復歸到第2目標張力T2。伴隨於此，實際的線張力也分別復歸，當在下一個前進驅動切斷步驟重新開始前進驅動之時，線送出裝置10A側之線張力提高至大致25N，反之，線捲取裝置10B側之線張力降低至大致13N。At this time, the target tension setting unit 66 also changes the tension as shown in the lowermost stage of Fig. 5. Specifically, the target tension T on the line feeding device 10A side is increased from the fourth target tension T4 up to the above, and the first target is returned to the first target substantially simultaneously with the completion of the deceleration. Tension T1. Further, from the point of time when the reverse deceleration is completed, the target tension T on the side of the wire winding device 10B is lowered from the third target tension T3 until now, and the line winding device 10B is brought to the end of the forward acceleration. The target tension T is returned to the second target tension T2. Along with this, the actual line tension is also reverted, and when the next forward drive cutting step is restarted, the line tension on the line feeding device 10A side is increased to approximately 25 N, and conversely, the line winding device 10B side is on the line. The tension is reduced to approximately 13N.
如上所述，根據該裝置，雖然採用反復線W之前進-後退之往復驅動方式，但有效利用分別被設於線送出裝置10A側及線捲取裝置10B側之張力調整用之張力操作裝置18A、18B，在確保穩定之切斷所必要的線張力的情況下只降低捲取側之線張力，能夠減輕該捲取側之線軸(前進時為線軸9B，後退時為線軸9A)之強度負擔。而且，於線反轉之第1切換步驟及第2切換步驟之間進行其張力之切換，因此，可防止起因於該張力之切換的時間浪費。As described above, according to the device, the reciprocating driving method in which the line W is advanced and retracted is used, but the tension operating device 18A for tension adjustment provided on the side of the wire feeding device 10A and the wire winding device 10B is effectively utilized. In addition, when the thread tension necessary for the stable cutting is ensured, only the thread tension on the winding side is lowered, and the strength burden of the bobbin on the winding side (the bobbin 9B in the forward direction and the bobbin 9A in the backward movement) can be reduced. . Further, since the tension is switched between the first switching step and the second switching step of the line reversal, it is possible to prevent waste of time due to the switching of the tension.
進一步，在該線鋸中，上述第1切換步驟之線送出裝置10A側之線目標張力之降低、及上述第2切換步驟之線捲取裝置10B側之線目標張力之降低分別於線驅動速度之減速完成之後開始，因此，可避免起因於該目標張力之降低而工件28之加工精度降低之情況。Further, in the wire saw, the decrease in the line target tension on the line feeding device 10A side in the first switching step and the decrease in the line target tension on the line winding device 10B side in the second switching step are respectively at the line driving speed. Since the deceleration is completed, it is possible to avoid a decrease in the machining accuracy of the workpiece 28 due to a decrease in the target tension.
例如，如第5圖之中段所示之比較例，當上述第1切換步驟之線送出裝置10A側之線目標張力之降低、及上述第2切換步驟之線捲取裝置10B側之線目標張力之降低分別與線驅動速度之減速開始大致同時開始的情況下，換言之，當該線目標張力之降低於第5圖所示之減速期間A1、A2內分別進行的情況下，藉由其目標張力之降低而實際張力之降低的線W之部分，有可能會進入第1圖所示之捲繞於導引滾輪24A、24B、26B、26A之區域，亦即進入於直接參與工件28之切斷的區域，該情況會給工件28之加工精度帶來壞影響。然而，如第5圖之最下段所示，於上述減速期間A1、A2分別結束之後，上述第1切換步驟之線送出裝置10A側之線目標張力之降低、及上述第2切換步驟之線捲取裝置10B側之線目標張力之降低開始，據此，能夠確實地防止起因於該目標張力之降低的實際張力降低之線W之部分進入到上述的參與切斷區域的情況，可防止起因於此的工件加工精度之降低。For example, in the comparative example shown in the middle of the fifth drawing, the line target tension on the line feeding device 10A side in the first switching step is reduced, and the line target tension on the line winding device 10B side in the second switching step is When the lowering starts at substantially the same time as the start of the deceleration of the line driving speed, in other words, when the lowering of the line target tension is performed in the deceleration periods A1 and A2 shown in FIG. 5, by the target tension The portion of the line W which is lowered and the actual tension is lowered may enter the area of the guide roller 24A, 24B, 26B, 26A shown in Fig. 1, that is, the direct participation in the cutting of the workpiece 28. This area will have a bad influence on the machining accuracy of the workpiece 28. However, as shown in the lowermost stage of Fig. 5, after the deceleration periods A1 and A2 are respectively completed, the line target tension on the line feeding device 10A side in the first switching step is lowered, and the second switching step is performed. The reduction of the line target tension on the side of the pick-up device 10B is started, whereby it is possible to reliably prevent the portion of the line W which is caused by the decrease in the target tension from entering the above-mentioned participating cut-off region, thereby preventing the cause of This reduces the machining accuracy of the workpiece.
此外，在第5圖之最下段之所示例中，與上述各切換步驟中之減速期間A1、A2之開始同時地分別開始低張力側之目標張力之提高，上述減速期間A1、A2之結束之後目標張力之降低分別被開始，但關於其時點也可賦予時間差。例如，如第6圖之最下段所示，可以遲於上述各減速期間A1、A2之開始時點而開始目標張力之提高，也可以遲於上述各減速期間A1、A2之結束時點而開始目標張力之降低。要緊的是，目標張力之切換與各切換步驟同步進行，且目標張力之降低於線驅動速度之減速結束之後(包含與結束同時之情況)開始並於向相反方向之線驅動速度之加速結束為止完成即可。Further, in the example shown in the lowermost stage of Fig. 5, the target tension on the low tension side is started simultaneously with the start of the deceleration periods A1 and A2 in the respective switching steps, and after the end of the deceleration periods A1 and A2 The decrease in the target tension is started separately, but the time difference can also be given to the time point. For example, as shown in the lowermost stage of Fig. 6, the target tension may be started later than the start point of each of the deceleration periods A1 and A2, or the target tension may be started later than the end of each of the deceleration periods A1 and A2. Reduced. It is important that the switching of the target tension is performed in synchronization with each switching step, and the decrease in the target tension starts after the end of the deceleration of the line driving speed (including the case at the same time as the end) and ends when the acceleration of the line driving speed in the opposite direction ends. Finish it.
又，在上述的實施例中，第1切換步驟與第2切換步驟雙方作為張力切換期間而被利用，但是，也可以採用其中任一個切換步驟作為該一個張力切換期間利用，而另一個切換期間與該另一個切換步驟錯開之方式。在該方式中，由於可消除該一個張力切換期間之時間浪費，相應地可提高作業效率。Further, in the above-described embodiment, both the first switching step and the second switching step are used as the tension switching period. However, any one of the switching steps may be used as the one tension switching period, and the other switching period may be utilized. The way to stagger the other switching step. In this manner, since the time waste during the one tension switching can be eliminated, the work efficiency can be improved accordingly.
此外，本發明例如也可採用如下之方式。‧在本發明中，第1目標張力T1與第3目標張力T3也可以不相等，同樣，第2目標張力T2與第4目標張力T4也可以不相等。這些目標張力可在滿足上述目標張力T2、T4分別低於目標張力T1、T3之條件的範圍內適宜設定。Further, the present invention can also adopt, for example, the following manner. In the present invention, the first target tension T1 and the third target tension T3 may not be equal. Similarly, the second target tension T2 and the fourth target tension T4 may not be equal. These target tensions can be appropriately set within a range that satisfies the conditions that the target tensions T2 and T4 are lower than the target tensions T1 and T3, respectively.
‧在本發明中，張力控制之具體構成不特別限定。例如，只要充分確保上述可動滑輪20A、20B之可動範圍，則可省略藉由速度調節部64之線驅動速度之微調節。又，也可於工件切斷初期進行暫時提高線張力(參與工件28之切斷的線部分之張力)之控制。In the present invention, the specific configuration of the tension control is not particularly limited. For example, as long as the movable range of the movable sheaves 20A, 20B is sufficiently ensured, the fine adjustment of the linear drive speed by the speed adjusting portion 64 can be omitted. Further, it is also possible to temporarily control the wire tension (the tension of the wire portion participating in the cutting of the workpiece 28) at the initial stage of the workpiece cutting.
‧各張力操作裝置18A、18B之具體構造也可適宜變更。例如，上述可動滑輪20A、20B也可採用一邊藉由軌道等導引，一邊藉由送出螺桿機構、齒條與小齒輪機構(Rack and Pinion Mechanism)等直線變位之構成。又，在利用上述槓桿44之情況下，使該槓桿44搖動之手段也不限於上述搖動汽缸50，例如也可利用伺服馬達。‧ The specific structure of each of the tension operating devices 18A and 18B can be appropriately changed. For example, the movable sheaves 20A and 20B may be configured to be linearly displaced by a screw mechanism, a rack and a pinion mechanism (Rack and Pinion Mechanism) while being guided by a rail or the like. Further, in the case of using the above-described lever 44, the means for swinging the lever 44 is not limited to the above-described rocking cylinder 50, and for example, a servo motor may be used.
如上所述，本發明係提供一種能夠有效地削減使線鋸之線之驅動方向逆轉時因線之張力之調節而造成的時間浪費，並且能夠防止起因於其張力調節的工件之加工精度降低的技術。具體而言，本發明係提供一種利用從線送出裝置送出之切斷用線捲繞於複數個導引滾輪之周圍並被線捲取裝置捲取之線鋸，藉由一邊使其導引滾輪彼此之間排列之複數根線向軸方向驅動，一邊藉由使工件與這些線進行相對移動而切斷搬送，從而切斷該工件的方法。該方法包括以下步驟：前進驅動切斷步驟，進行上述工件之切斷，在該前進驅動切斷步驟中，從上述線送出裝置送出上述線並藉由上述線捲取裝置捲取該線，並且藉由向從上述線送出裝置送出之線的張力按壓送出側張力賦予構件以將該線調節為接近於第1目標張力，且向藉由上述線捲取裝置被捲取的線的張力按壓捲取側張力賦予構件以將該線調節為接近於比上述第1目標張力更低的第2目標張力；後退驅動切斷步驟，進行上述工件之切斷，在該後退驅動切斷步驟中，藉由上述線捲取裝置捲取之上述線反過來從該線捲取裝置送出並藉由上述線送出裝置捲取該線，並且向從上述線捲取裝置送出之線按壓上述捲取側張力賦予構件以將該線之張力調節為接近於比上述第2目標張力更高的第3目標張力，且向藉由線送出裝置捲取之線按壓上述送出側張力賦予構件以將該線之張力調節為接近於比上述第1目標張力及上述第3目標張力更低的第4目標張力；第1切換步驟，在上述前進驅動切斷步驟之後使上述線之驅動速度減速，進而使其驅動方向逆轉後使該線之驅動速度加速，並轉移到上述後退驅動切斷步驟；第2切換步驟，在上述後退驅動切斷步驟之後使上述線之驅動速度減速，在使其驅動方向逆轉後使該線之驅動速度加速，並轉移到上述前進驅動切斷步驟；其中，上述前進驅動切斷步驟、上述第1切換步驟、上述後退驅動切斷步驟、及上述第2切換步驟依次反復被執行，在上述第1切換步驟，在上述線之驅動速度的減速過程中藉由上述捲取側張力賦予構件進行上述線之張力調節，將上述線捲取裝置側的線之目標張力從上述第2目標張力提高至上述第3目標張力，且在該線之驅動速度之減速完成之後藉由上述送出側張力賦予構件進行上述線之張力調節，將上述線送出裝置側的線之目標張力從上述第1目標張力降低至上述第4目標張力。As described above, the present invention provides a time waste caused by the adjustment of the tension of the wire when the driving direction of the wire of the wire saw is reversed, and the machining accuracy of the workpiece due to the tension adjustment can be prevented from being lowered. technology. More specifically, the present invention provides a wire saw which is wound around a plurality of guide rollers by a wire for ejecting from a wire feeding device and which is taken up by a wire winding device, by which the guide roller is guided A method in which a plurality of rows arranged between each other are driven in the axial direction and the workpiece is cut and transported by relatively moving the workpiece and the wires, thereby cutting the workpiece. The method includes the following steps: a forward drive cutting step of cutting the workpiece, and in the forward drive cutting step, the wire is fed from the wire feeding device and the wire is taken up by the wire winding device, and The delivery-side tension applying member is pressed against the tension sent from the wire feeding device to adjust the wire to be close to the first target tension, and the tension is pressed to the wire wound by the wire winding device. The take-up tension applying member adjusts the line to be close to a second target tension lower than the first target tension; the reverse drive cutting step performs cutting of the workpiece, and in the reverse drive cutting step, borrows The wire wound by the wire winding device is reversely fed from the wire winding device, and the wire is taken up by the wire feeding device, and the winding side tension is applied to the wire fed from the wire winding device. The member adjusts the tension of the wire to be close to the third target tension higher than the second target tension, and presses the delivery-side tension applying member to the wire wound by the wire feeding device. The tension of the line is adjusted to be close to a fourth target tension lower than the first target tension and the third target tension; and in the first switching step, the driving speed of the line is decelerated after the forward drive cutting step, and further Reversing the driving direction, accelerating the driving speed of the line, and shifting to the reverse drive cutting step; and in the second switching step, decelerating the driving speed of the line after the reverse drive cutting step, and driving the direction After the reverse rotation, the driving speed of the line is accelerated, and the process proceeds to the forward drive cutting step. The forward drive cutting step, the first switching step, the backward drive cutting step, and the second switching step are sequentially repeated. In the first switching step, the tension tension adjustment member performs the tension adjustment of the wire by the winding side tension applying member during the deceleration of the driving speed of the wire, and the target tension of the wire on the wire winding device side is from the above The second target tension is increased to the third target tension, and after the deceleration of the driving speed of the line is completed, the above-mentioned sending side tension is given Means for adjusting the tension of the wire, the wire feeding means to the side line of the target tension decrease from the first to the fourth target tension target tension.
根據該方法，在上述第1切換步驟之線驅動方向之反轉之際，可利用該第1切換步驟之線減速以及之後的加速所需之時間切換線張力，因此，沒有為了該張力切換所發生的時間浪費。並且，將線張力從第1目標張力降低至第4目標張力之調節於上述線減速完成之後進行，因此，可防止因該調節而張力降低之線部分進入導引滾輪間的切斷加工區域，可防止起因於此的工件加工之加工精度降低。According to this method, when the line driving direction of the first switching step is reversed, the line tension can be switched by the line required for the first switching step and the time required for the subsequent acceleration. Therefore, the tension is not switched for the tension. A waste of time. Further, since the adjustment of the line tension from the first target tension to the fourth target tension is performed after the line deceleration is completed, it is possible to prevent the line portion whose tension is lowered by the adjustment from entering the cutting processing area between the guide rollers. It can prevent the processing accuracy of the workpiece processing caused by this from being lowered.
又，本發明所有關之工件切斷方法，也可以代替在上述第1切換步驟之張力之轉移，或者在上述第1切換步驟之目標張力之轉移之上，在第2切換步驟，藉由上述捲取側張力賦予構件進行上述線之張力調節，將上述線捲取裝置側的線之目標張力從上述第3目標張力降低至上述第2目標張力，並且，藉由上述送出側張力賦予構件進行上述線之張力調節，將上述線送出裝置側的線之目標張力從上述第4目標張力提高至上述第1目標張力。據此，可削除起因於上述線張力之切換之時間浪費。在該第2切換步驟，也在上述線之驅動速度之減速過程中進行將線之目標張力從上述第4目標張力提高至上述第1目標張力之張力調節，且在其線之驅動速度之減速完成之後進行將線之目標張力從上述第3目標張力降低至上述第2目標張力之控制，據此，可防止因該調節而張力降低之線部分進入導引滾輪間的切斷加工區域，可防止起因於此的工件加工之加工精度降低。Further, in the second switching step, the workpiece cutting method according to the present invention may be replaced by the shift of the tension in the first switching step or the shift of the target tension in the first switching step. The take-up side tension applying member adjusts the tension of the wire, and lowers the target tension of the wire on the wire winding device side from the third target tension to the second target tension, and the delivery side tension applying member The tension adjustment of the line increases the target tension of the line on the line feeding device side from the fourth target tension to the first target tension. According to this, the time waste due to the switching of the above-described wire tension can be eliminated. In the second switching step, the target tension of the line is increased from the fourth target tension to the tension adjustment of the first target tension during the deceleration of the driving speed of the line, and the driving speed of the line is decelerated. After the completion, the control of lowering the target tension of the wire from the third target tension to the second target tension is performed, whereby the line portion where the tension is lowered by the adjustment can be prevented from entering the cutting processing region between the guide rollers. The machining accuracy of the workpiece machining caused by this is prevented from being lowered.
作為用於在上述各步驟調節線張力之操作，較為理想的是，包含檢測上述線之實際張力之操作、和將上述各張力賦予構件按壓於上述線之指定部位，以使該檢測出的張力接近於目標張力之操作。As an operation for adjusting the thread tension in each of the above steps, it is preferable to include an operation of detecting the actual tension of the wire and pressing the tension applying member to a predetermined portion of the line to cause the detected tension Operation close to the target tension.
又，本發明係提供一種利用切斷用線在複數處同時切斷工件之線鋸。該線鋸包括：複數個導引滾輪，其被配設為旋轉中心軸相互平行，上述線被捲繞於其周圍；線送出裝置，其用於將上述線送出至上述導引滾輪；線捲取裝置，其用於從上述導引滾輪捲取上述線；切斷搬送裝置，藉由使張設於上述導引滾輪中特定導引滾輪之間的複數根線與工件相對移動，從而向該線切斷搬送該工件而切斷該工件；線驅動控制裝置，其控制上述線送出裝置及線捲取裝置之作動，從而以前進驅動切斷步驟、第1切換步驟、後退驅動切斷步驟、及第2切換步驟之順序反復執行，其中，上述前進驅動切斷步驟一邊從上述線送出裝置送出上述線並藉由上述線捲取裝置捲取該線，一邊進行上述工件之切斷；上述後退驅動切斷步驟一邊將藉由上述線捲取裝置捲取之上述線反過來從該線捲取裝置送出且藉由上述線送出裝置捲取該線，一邊進行上述工件之切斷；上述第1切換步驟在上述前進驅動切斷步驟之後使上述線之驅動速度減速，而且使其驅動方向逆轉之後使該線之驅動速度加速，並轉移到上述後退驅動切斷步驟；上述第2切換步驟在上述後退驅動切斷步驟之後使上述線之驅動速度減速，在使其驅動方向逆轉之後使該線之驅動速度加速，並轉移到上述前進驅動切斷步驟；送出側張力操作裝置，其包含在上述線送出裝置與上述各導引滾輪之間的區域被按壓於上述線之送出側張力賦予構件，藉由改變其按壓力，使該線之張力變化；捲取側張力操作裝置，其包含在上述線捲取裝置與上述各導引滾輪之間的區域被按壓於上述線之捲取側張力賦予構件，藉由改變其按壓力，使該線之張力變化；張力控制裝置，其使上述各張力操作裝置作動，以使在上述前進驅動切斷步驟使從上述線送出裝置送出的線之張力接近於第1目標張力且使藉由上述線捲取裝置捲取的線之張力接近於比第1目標張力低的第2目標張力，在上述後退驅動切斷步驟使從上述線捲取裝置送出的線之張力接近於比上述第2目標張力高的第3目標張力且使藉由上述線送出裝置捲取的線之張力接近於比上述第1目標張力及上述第3目標張力低的第4目標張力，其中，該張力控制裝置使上述各張力操作裝置作動，使得在上述第1切換步驟，在上述線之驅動速度之減速過程中進行上述線之調節以將上述線捲取裝置側的線之目標張力從上述第2目標張力提高至上述第3目標張力，且在該線之驅動速度之減速完成後進行上述線之張力調節以將上述線送出裝置側的線之目標張力從上述第1目標張力降低至上述第4目標張力。Further, the present invention provides a wire saw that simultaneously cuts a workpiece at a plurality of points by using a cutting wire. The wire saw includes: a plurality of guide rollers arranged to be parallel to each other, the line is wound around the line; a wire feeding device for feeding the wire to the guiding roller; a picking device for taking up the thread from the guiding roller; and cutting the conveying device, by moving a plurality of wires stretched between the specific guiding rollers of the guiding roller and the workpiece relative to each other The wire is cut and transported to cut the workpiece, and the wire drive control device controls the operation of the wire feeding device and the wire winding device to advance the cutting step, the first switching step, and the reverse driving cutting step. And repeating the second switching step of performing the cutting of the workpiece while the line is being fed by the wire winding device while the wire is being fed by the wire winding device; The driving cutting step performs the workpiece while the wire wound by the wire winding device is reversely fed from the wire winding device and the wire is taken up by the wire feeding device The first switching step decelerates the driving speed of the line after the forward driving cutting step, and after the driving direction is reversed, accelerates the driving speed of the line, and shifts to the reverse drive cutting step; The second switching step decelerates the driving speed of the line after the reverse drive cutting step, accelerates the driving speed of the line after reversing the driving direction, and shifts to the forward driving cutting step; the sending side tension operating device The region between the wire feeding device and the guide rollers is pressed against the wire-side sending-side tension applying member, and the tension of the wire is changed by changing the pressing force; the take-up side tension operating device And the region between the wire winding device and the guide roller is pressed against the winding side tension applying member of the wire, and the tension of the wire is changed by changing the pressing force; the tension control device The respective tension operating devices are actuated to cause the tension of the wire sent from the wire feeding device in the forward drive cutting step The tension of the wire wound by the wire winding device is close to the second target tension lower than the first target tension, and is sent from the wire winding device in the reverse drive cutting step. The tension of the line is close to the third target tension higher than the second target tension, and the tension of the wire wound by the wire feeding device is close to the fourth lower than the first target tension and the third target tension. a target tension, wherein the tension control device activates each of the tension operating devices to adjust the line to cancel the line on the line winding device during the deceleration of the driving speed of the line in the first switching step The target tension is increased from the second target tension to the third target tension, and after the deceleration of the driving speed of the line is completed, the tension adjustment of the line is performed to set the target tension of the line on the line sending device side from the first The target tension is lowered to the fourth target tension described above.
又，在本發明所有關之線鋸中，也可以是，代替上述第1切換步驟之目標張力之轉移，或者在上述第1切換步驟之目標張力之轉移之上，上述張力控制裝置使上述各張力操作裝置作動，使得在上述第2切換步驟，進行上述線之張力調節，將上述線捲取裝置側的線之目標張力從上述第3目標張力降低至上述第2目標張力，且進行上述線之張力調節，將上述線送出裝置側的線之目標張力從上述第4目標張力提高至上述第1目標張力。在該線鋸中也可削除起因於上述線張力之切換之時間浪費，並且在該第2切換步驟，藉由在上述線之驅動速度之減速過程中進行將線之目標張力從上述第4目標張力提高至上述第1目標張力之張力調節，且在其線之驅動速度之減速完成之後進行將線之目標張力從上述第3目標張力降低至上述第2目標張力之控制，可防止因該調節而張力降低之線部分進入導引滾輪間的切斷加工區域，可防止起因於此的工件加工之加工精度降低。Further, in the wire saw according to the present invention, the tension control device may be configured to replace the target tension in the first switching step or the target tension in the first switching step. The tension operating device is actuated to perform the tension adjustment of the wire in the second switching step, and the target tension of the wire on the wire winding device side is lowered from the third target tension to the second target tension, and the line is performed. The tension adjustment adjusts the target tension of the line on the line feeding device side from the fourth target tension to the first target tension. In the wire saw, the time waste caused by the switching of the wire tension can be removed, and in the second switching step, the target tension of the line is performed from the fourth target by the deceleration of the driving speed of the wire. The tension is increased to the tension adjustment of the first target tension, and after the deceleration of the driving speed of the line is completed, the control of lowering the target tension of the line from the third target tension to the second target tension is prevented, thereby preventing the adjustment. The line portion of the tension reduction enters the cutting processing region between the guide rollers, and the machining accuracy of the workpiece machining caused thereby is prevented from being lowered.
作為上述張力控制裝置，較為理想的是，包含：張力檢測器，在從上述線送出裝置至導引滾輪之區域以及從導引滾輪至上述線捲取裝置之區域檢測線之張力；目標張力設定部，根據上述各步驟，設定上述線之目標張力；張力調節部，使上述張力操作裝置作動，以使從上述各區域檢測出的張力接近於藉由上述目標張力設定部設定之目標張力。Preferably, the tension control device includes: a tension detector that detects a tension of a line from a region of the wire feeding device to the guide roller and a region from the guide roller to the wire winding device; and a target tension setting And the tension adjusting unit activates the tension operating device such that the tension detected from each of the regions is close to the target tension set by the target tension setting unit.
亦即，根據本發明，有效利用藉由將張力賦予構件按壓於線而操作該線之張力的裝置，可在有效地只降低捲取側之線張力的情況下，以時間浪費少的有效率的運行來切斷工件，並且，可防止起因於該張力調節之工件加工精度降低。That is, according to the present invention, it is possible to effectively utilize the device for operating the tension of the wire by pressing the tension applying member against the wire, and it is possible to effectively reduce the thread tension on the winding side, and waste less time. The operation is to cut off the workpiece, and the machining accuracy of the workpiece due to the tension adjustment can be prevented from being lowered.
W．．．線W. . . line
10A、10B．．．線送出-捲取裝置10A, 10B. . . Wire delivery-winding device
24A、24B．．．導引滾輪24A, 24B. . . Guide roller
26A、26B．．．導引滾輪26A, 26B. . . Guide roller
12A、14A、16A．．．固定滑輪12A, 14A, 16A. . . Fixed pulley
12B、14B、16B．．．固定滑輪12B, 14B, 16B. . . Fixed pulley
18A、18B．．．送出側張力操作裝置18A, 18B. . . Delivery side tension operating device
9A、9B．．．線軸9A, 9B. . . Spool
11A、11B．．．線軸驅動馬達11A, 11B. . . Spool drive motor
20A、20B．．．可動滑輪20A, 20B. . . Movable pulley
25．．．線驅動馬達25. . . Line drive motor
28．．．工件28. . . Workpiece
30．．．工件搬送裝置30. . . Workpiece conveying device
32．．．工件保持部32. . . Workpiece holding unit
34．．．工件搬送馬達34. . . Workpiece transport motor
36A、36B．．．研磨漿供給裝置36A, 36B. . . Slurry supply device
40．．．張力檢測器40. . . Tension detector
44．．．槓桿44. . . lever
46．．．旋轉中心軸46. . . Rotation center axis
50．．．搖動汽缸50. . . Shaking cylinder
52．．．編碼器52. . . Encoder
第1圖係表示本發明之實施例所有關的線鋸之整體結構圖。Fig. 1 is a view showing the entire configuration of a wire saw according to an embodiment of the present invention.
第2圖係表示設於上述線鋸之張力操作裝置之正視圖。Fig. 2 is a front elevational view showing the tension operating device provided in the wire saw.
第3圖係表示上述張力操作裝置之俯視圖。Fig. 3 is a plan view showing the above tension operating device.
第4圖係表示裝備於上述線鋸之控制器之機能構成之方塊圖。Fig. 4 is a block diagram showing the functional configuration of a controller equipped with the above-described wire saw.
第5圖係表示上述線鋸之線驅動速度及線目標張力之時間變化之曲線圖。Fig. 5 is a graph showing the time change of the line driving speed and the line target tension of the wire saw.
第6圖係表示上述線驅動速度及上述線目標張力之時間變化之變形例之曲線圖。Fig. 6 is a graph showing a modification of the above-described line driving speed and the temporal change of the line target tension.
W．．．線W. . . line
9A、9B．．．線軸9A, 9B. . . Spool
10A、10B．．．線送出-捲取裝置10A, 10B. . . Wire delivery-winding device
11A、11B．．．線軸驅動馬達11A, 11B. . . Spool drive motor
12A、14A、16A．．．固定滑輪12A, 14A, 16A. . . Fixed pulley
12B、14B、16B．．．固定滑輪12B, 14B, 16B. . . Fixed pulley
18A、18B．．．張力操作裝置18A, 18B. . . Tension operating device
20A、20B．．．可動滑輪20A, 20B. . . Movable pulley
22A、22B．．．固定滑輪22A, 22B. . . Fixed pulley
24A、24B．．．導引滾輪24A, 24B. . . Guide roller
25．．．線驅動馬達25. . . Line drive motor
26A、26B．．．導引滾輪26A, 26B. . . Guide roller
28．．．工件28. . . Workpiece
30．．．工件搬送裝置30. . . Workpiece conveying device
36A、36B．．．研磨漿供給裝置36A, 36B. . . Slurry supply device
32．．．工件保持部32. . . Workpiece holding unit
34．．．工件搬送馬達34. . . Workpiece transport motor
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| TW099104314A TWI488725B (en) | 2010-02-11 | 2010-02-11 | Cutting method and wire sawing by wire saw |
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| TW099104314A TWI488725B (en) | 2010-02-11 | 2010-02-11 | Cutting method and wire sawing by wire saw |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3398704A1 (en) | 2017-04-28 | 2018-11-07 | AUO Crystal Corporation | Wire supplying and receiving device for a wire saw, ingot slicing wire saw including the same, and method of slicing ingot |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5994766B2 (en) * | 2013-11-21 | 2016-09-21 | 信越半導体株式会社 | Work cutting method |
| TWI564133B (en) * | 2014-06-23 | 2017-01-01 | 綠能科技股份有限公司 | Broken wire processing device and broken wire processing method |
| WO2018012313A1 (en) * | 2016-07-13 | 2018-01-18 | 信越半導体株式会社 | Wire saw device and method for cutting workpiece |
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|---|---|---|---|---|
| JPH0475862A (en) * | 1990-07-18 | 1992-03-10 | Otaru Seisakusho:Kk | Multiwire type cutting device |
| JP2002254287A (en) * | 2001-02-27 | 2002-09-10 | Nippei Toyama Corp | Wire feed method and apparatus for wire saw |
| TW200642796A (en) * | 2005-04-25 | 2006-12-16 | Nippei Toyama Corp | Manufacturing method for semiconductor wafers, slicing method for slicing work and wire saw used for the same |
| JP2007276054A (en) * | 2006-04-06 | 2007-10-25 | Toyo Advanced Technologies Co Ltd | Work cutting method by wire saw, and wire saw |
| TW200903613A (en) * | 2007-03-06 | 2009-01-16 | Shinetsu Handotai Kk | Cutting method and wire saw device |
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|---|---|---|---|---|
| JPH0475862A (en) * | 1990-07-18 | 1992-03-10 | Otaru Seisakusho:Kk | Multiwire type cutting device |
| JP2002254287A (en) * | 2001-02-27 | 2002-09-10 | Nippei Toyama Corp | Wire feed method and apparatus for wire saw |
| TW200642796A (en) * | 2005-04-25 | 2006-12-16 | Nippei Toyama Corp | Manufacturing method for semiconductor wafers, slicing method for slicing work and wire saw used for the same |
| JP2007276054A (en) * | 2006-04-06 | 2007-10-25 | Toyo Advanced Technologies Co Ltd | Work cutting method by wire saw, and wire saw |
| TW200903613A (en) * | 2007-03-06 | 2009-01-16 | Shinetsu Handotai Kk | Cutting method and wire saw device |
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| EP3398704A1 (en) | 2017-04-28 | 2018-11-07 | AUO Crystal Corporation | Wire supplying and receiving device for a wire saw, ingot slicing wire saw including the same, and method of slicing ingot |
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| TW201127578A (en) | 2011-08-16 |
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