TWI352056B - - Google Patents

Download PDF

Info

Publication number
TWI352056B
TWI352056B TW096114041A TW96114041A TWI352056B TW I352056 B TWI352056 B TW I352056B TW 096114041 A TW096114041 A TW 096114041A TW 96114041 A TW96114041 A TW 96114041A TW I352056 B TWI352056 B TW I352056B
Authority
TW
Taiwan
Prior art keywords
plate
porous film
surface plate
thin plate
air
Prior art date
Application number
TW096114041A
Other languages
English (en)
Chinese (zh)
Other versions
TW200811021A (en
Inventor
Noriyuki Nagura
Ryomyo Hamanaka
Setsuji Yumiba
Noriyuki Toriyama
Tsutomu Oguri
Tsutomu Makino
Joji Fukuda
Harumichi Hirose
Original Assignee
Nihon Sekkei Kogyo Co Ltd
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Sekkei Kogyo Co Ltd, Shibaura Mechatronics Corp filed Critical Nihon Sekkei Kogyo Co Ltd
Publication of TW200811021A publication Critical patent/TW200811021A/zh
Application granted granted Critical
Publication of TWI352056B publication Critical patent/TWI352056B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW096114041A 2006-08-08 2007-04-20 Air table for transferring sheet material, and apparatus for transferring the sheet material TW200811021A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006215557A JP4629007B2 (ja) 2006-08-08 2006-08-08 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

Publications (2)

Publication Number Publication Date
TW200811021A TW200811021A (en) 2008-03-01
TWI352056B true TWI352056B (ja) 2011-11-11

Family

ID=39084012

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096114041A TW200811021A (en) 2006-08-08 2007-04-20 Air table for transferring sheet material, and apparatus for transferring the sheet material

Country Status (4)

Country Link
JP (1) JP4629007B2 (ja)
KR (1) KR100831135B1 (ja)
CN (1) CN101121466B (ja)
TW (1) TW200811021A (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8047354B2 (en) 2008-09-26 2011-11-01 Corning Incorporated Liquid-ejecting bearings for transport of glass sheets
JP5123842B2 (ja) * 2008-12-26 2013-01-23 Ｃｋｄ株式会社 非接触支持装置
TWI472467B (zh) * 2009-04-23 2015-02-11 Corning Inc 玻璃片運送之液體射出軸承
JP6043123B2 (ja) * 2012-08-22 2016-12-14 オイレス工業株式会社 非接触支持装置及び塗布装置
JP6173173B2 (ja) * 2013-11-11 2017-08-02 株式会社ディスコ 切削装置
EP3918421B1 (en) * 2019-12-26 2024-05-15 Nanjing ZongAn Semiconductor Equipment Ltd Tool architecture for wafer geometry measurement in semiconductor industry

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02158152A (ja) * 1988-12-09 1990-06-18 Rohm Co Ltd ペレット収納整列用治具
JPH0680227A (ja) * 1992-08-31 1994-03-22 Taiyo Yuden Co Ltd 物品搬送ベルト
JP3718014B2 (ja) * 1996-11-01 2005-11-16 東レエンジニアリング株式会社 板状物搬送装置及び非接触搬送ライン
JPH11268831A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2003063643A (ja) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk 薄板の搬送方法及び装置
JP2003321119A (ja) 2002-05-07 2003-11-11 Mineya Mori プレートとフラットパネルの間の相対的高圧力域によってフラットパネルを浮上させる浮上機器
JP4313080B2 (ja) 2003-04-02 2009-08-12 第一施設工業株式会社 非接触浮上ユニット
JP2004307152A (ja) * 2003-04-08 2004-11-04 Daiichi Shisetsu Kogyo Kk 起倒可能な非接触搬送装置
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP4217963B2 (ja) * 2003-07-08 2009-02-04 株式会社ダイフク 板状体搬送装置
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
KR200346820Y1 (ko) 2004-01-06 2004-04-06 김태원 다공질 플라스틱(porous plastic)을 공기분사부로 이용한부상이송장치
JP2005340399A (ja) * 2004-05-26 2005-12-08 Hitachi Zosen Corp ガラス基板の作業台装置
JP2006049493A (ja) * 2004-08-03 2006-02-16 Dainippon Screen Mfg Co Ltd 基板搬送モジュールならびにそれを用いた基板搬送装置および基板搬送方法
JP4414856B2 (ja) * 2004-09-30 2010-02-10 大日本スクリーン製造株式会社 基板保管装置
JP2006179653A (ja) * 2004-12-22 2006-07-06 Murata Mach Ltd 枚葉搬送用トレイおよび搬送システム
CN1810608A (zh) * 2005-01-26 2006-08-02 三发机电有限公司 基底传送设备

Also Published As

Publication number Publication date
TW200811021A (en) 2008-03-01
KR20080013693A (ko) 2008-02-13
JP4629007B2 (ja) 2011-02-09
CN101121466B (zh) 2012-01-04
KR100831135B1 (ko) 2008-05-20
CN101121466A (zh) 2008-02-13
JP2008041989A (ja) 2008-02-21

Similar Documents

Publication Publication Date Title
JP4896148B2 (ja) 薄板状材料搬送装置
TWI352056B (ja)
KR100900381B1 (ko) 박판 형상 재료 반송 장치와 방법
US7931755B2 (en) Method for removing deposit from substrate and method for drying substrate, as well as apparatus for removing deposit from substrate and apparatus for drying substrate using these methods
US7908885B2 (en) Non-contact porous air bearing and glass flattening device
TWI385115B (zh) A pneumatic table for conveying a sheet-like material, and a sheet-like material transport device
JP5047545B2 (ja) 浮上搬送ユニット
JP5430430B2 (ja) ステージクリーナ、描画装置及び基板処理装置
JP2008007319A5 (ja)
JP2009073660A (ja) エア浮上搬送装置の空気吹出し構造体及び空気吹出しユニット、ならびにエア浮上搬送装置
JP2009073646A (ja) 浮上方法及び浮上ユニット
JP2003063643A (ja) 薄板の搬送方法及び装置
JP2006264804A (ja) 大型フラットパネルの浮上ユニット及びこれを用いた非接触搬送装置
TWI483883B (zh) Handling device
JP5764575B2 (ja) 通気性搬送用テーブル
JP4229670B2 (ja) 薄板状材の搬送方法及び装置
TW200929424A (en) Workpiece support apparatus
JP4171293B2 (ja) 薄板状材の搬送方法及び装置
JP2009149389A (ja) 浮上ユニット及びそれを有する装置
KR20210049447A (ko) 기판 지지 기구와 이를 이용한 기판 이송 방법
JP2012101897A (ja) 搬送装置
TW201350412A (zh) 搬運裝置
KR101021729B1 (ko) 기판 보관용 스토커
JP2009032984A (ja) 浮上搬送ユニット
JP2004179580A (ja) 板状部材の搬送装置