TWI319838B - Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties - Google Patents

Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties

Info

Publication number
TWI319838B
TWI319838B TW92127924A TW92127924A TWI319838B TW I319838 B TWI319838 B TW I319838B TW 92127924 A TW92127924 A TW 92127924A TW 92127924 A TW92127924 A TW 92127924A TW I319838 B TWI319838 B TW I319838B
Authority
TW
Taiwan
Prior art keywords
bottom anti
reflective coatings
small core
core molecules
epoxy moieties
Prior art date
Application number
TW92127924A
Other languages
English (en)
Other versions
TW200422768A (en
Inventor
Charles J Neef
Mandar Bhave
Michelle Fowler
Michelle Windsor
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of TW200422768A publication Critical patent/TW200422768A/zh
Application granted granted Critical
Publication of TWI319838B publication Critical patent/TWI319838B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B69/00—Dyes not provided for by a single group of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31511—Of epoxy ether
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31511—Of epoxy ether
    • Y10T428/31515—As intermediate layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Paints Or Removers (AREA)
TW92127924A 2002-10-08 2003-10-08 Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties TWI319838B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41721402P 2002-10-08 2002-10-08
US10/679,521 US7323289B2 (en) 2002-10-08 2003-10-06 Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties

Publications (2)

Publication Number Publication Date
TW200422768A TW200422768A (en) 2004-11-01
TWI319838B true TWI319838B (en) 2010-01-21

Family

ID=32096187

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92127924A TWI319838B (en) 2002-10-08 2003-10-08 Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties

Country Status (8)

Country Link
US (1) US7323289B2 (zh)
EP (1) EP1573785B1 (zh)
JP (1) JP4559228B2 (zh)
KR (1) KR101027606B1 (zh)
CN (1) CN1739063B (zh)
AU (1) AU2003282554A1 (zh)
TW (1) TWI319838B (zh)
WO (1) WO2004034435A2 (zh)

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WO2005032512A2 (en) * 2003-10-02 2005-04-14 Trustees Of Stevens Institute Of Technology Capsules of multilayered neutral polymer films associated by hydrogen bonding
WO2006040918A1 (ja) * 2004-10-12 2006-04-20 Nissan Chemical Industries, Ltd. 含窒素芳香環構造を含むリソグラフィー用反射防止膜形成組成物
US20060198868A1 (en) * 2005-01-05 2006-09-07 Dewitt David M Biodegradable coating compositions comprising blends
US20060147491A1 (en) * 2005-01-05 2006-07-06 Dewitt David M Biodegradable coating compositions including multiple layers
EP1939688A4 (en) * 2005-09-27 2010-06-02 Nissan Chemical Ind Ltd COMPOSITION FOR THE FORMATION OF ANTIREFLECTIVE FILM, COMPRISING A PRODUCT OF THE REACTION BETWEEN AN ISOCYANURIC ACID COMPOUND AND A BENZOIC ACID COMPOUND
CN103838086B (zh) * 2005-09-27 2017-10-20 日产化学工业株式会社 含有异氰脲酸化合物与苯甲酸化合物的反应生成物的形成防反射膜的组合物
JP5041175B2 (ja) * 2006-06-19 2012-10-03 日産化学工業株式会社 水酸基含有縮合系樹脂を含有するレジスト下層膜形成組成物
CN101821677B (zh) * 2007-10-31 2012-07-04 日产化学工业株式会社 形成抗蚀剂下层膜的组合物和采用该形成抗蚀剂下层膜的组合物形成抗蚀剂图案的方法
US20090253080A1 (en) * 2008-04-02 2009-10-08 Dammel Ralph R Photoresist Image-Forming Process Using Double Patterning
US20090253081A1 (en) * 2008-04-02 2009-10-08 David Abdallah Process for Shrinking Dimensions Between Photoresist Pattern Comprising a Pattern Hardening Step
KR100894218B1 (ko) * 2008-04-11 2009-04-22 금호석유화학 주식회사 흡광제 및 이를 포함하는 유기 반사 방지막 조성물
US20100040838A1 (en) * 2008-08-15 2010-02-18 Abdallah David J Hardmask Process for Forming a Reverse Tone Image
JP5282917B2 (ja) * 2008-11-12 2013-09-04 日産化学工業株式会社 レジスト下層膜形成組成物及びそれを用いたパターニング方法
JP6129472B2 (ja) * 2009-01-16 2017-05-17 フジフィルム・エレクトロニック・マテリアルズ・ユーエスエイ・インコーポレイテッドＦｕｊｉＦｉｌｍ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＵＳＡ， Ｉｎｃ． 半導体基板コーティングのための非ポリマーバインダー
US8084186B2 (en) * 2009-02-10 2011-12-27 Az Electronic Materials Usa Corp. Hardmask process for forming a reverse tone image using polysilazane
TW201202856A (en) * 2010-03-31 2012-01-16 Jsr Corp Composition for forming resist underlayer film and pattern forming method
EP2805347B1 (en) * 2012-01-19 2018-03-07 Brewer Science, Inc. Nonpolymeric antireflection compositions containing adamantyl groups
JP6449145B2 (ja) 2012-04-23 2019-01-09 ブルーワー サイエンス アイ エヌ シー． 感光性、現像液可溶性の底面反射防止膜材料
JP6196194B2 (ja) * 2014-08-19 2017-09-13 信越化学工業株式会社 紫外線吸収剤、レジスト下層膜形成用組成物、及びパターン形成方法
CN107406713B (zh) * 2015-04-03 2021-05-25 日产化学工业株式会社 具有光交联基的高低差基板被覆用组合物
US20200201183A1 (en) 2016-07-15 2020-06-25 Nissan Chemical Corporation Resist underlayer film forming composition containing compound having hydantoin ring
US11972948B2 (en) 2018-06-13 2024-04-30 Brewer Science, Inc. Adhesion layers for EUV lithography
KR102665285B1 (ko) * 2020-06-12 2024-05-13 닛산 가가쿠 가부시키가이샤 디올구조를 포함하는 레지스트 하층막 형성용 조성물

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Also Published As

Publication number Publication date
WO2004034435A3 (en) 2005-07-28
WO2004034435A2 (en) 2004-04-22
CN1739063A (zh) 2006-02-22
TW200422768A (en) 2004-11-01
JP2006502448A (ja) 2006-01-19
KR101027606B1 (ko) 2011-04-06
JP4559228B2 (ja) 2010-10-06
US7323289B2 (en) 2008-01-29
EP1573785B1 (en) 2013-02-13
US20040110089A1 (en) 2004-06-10
AU2003282554A8 (en) 2004-05-04
EP1573785A4 (en) 2010-11-10
EP1573785A2 (en) 2005-09-14
CN1739063B (zh) 2011-12-07
KR20050062606A (ko) 2005-06-23
AU2003282554A1 (en) 2004-05-04

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