TWI281734B - Wafer level chip-scale package and manufacturing method thereof - Google Patents

Wafer level chip-scale package and manufacturing method thereof Download PDF

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Publication number
TWI281734B
TWI281734B TW090131218A TW90131218A TWI281734B TW I281734 B TWI281734 B TW I281734B TW 090131218 A TW090131218 A TW 090131218A TW 90131218 A TW90131218 A TW 90131218A TW I281734 B TWI281734 B TW I281734B
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TW
Taiwan
Prior art keywords
wafer
wiring
size package
conductive layer
opening
Prior art date
Application number
TW090131218A
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English (en)
Inventor
Hyung-Gil Baik
Original Assignee
Hynix Semiconductor Inc
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Publication date
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Publication of TWI281734B publication Critical patent/TWI281734B/zh

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

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128剛 1. 10 ip A7 B7 五、發明説明（1 ) 發明的技術領域 本發明係與封裝（package)以及其製造方法相關，更具體而 言，係與在晶圓狀態下，製造晶圓級晶圓尺寸封裝(wafer level chip scale package)，以及其製造方法相關。 先前技術 如同一般廣為人知，將由晶圓的薄膜成長技法所製造的晶片 (chip)，自晶圓切斷（sawing)分離之後，將所分離的晶片以屏 蔽（shield)或模塑以防止外部的濕氣或不純物質；尚且，將設置 有為與外部電路接續之引線之封裝型態予以商品化。 於該封裝中，以大部分空間由晶片佔據之規模，而將其模塑 化之晶圓尺寸的封裝本身，作為單一的微型元件（micro device) 而加以商品化，而在提高電路基板上之安裝密度、應用特定型 積體電路（ASIC : Application Specific 1C)等之各種積體電路 方面十分有用。 圖1係為顯TF先前的晶圓級晶圓尺寸封裝之剖面圖。 先前的晶圓級晶圓尺寸封裝，如圖1所示般，係由下列各項所 構成·形成多數晶片勢之晶圓狀態的半導體晶片100、在半導體 晶片100上與晶片墊102接續，且在延長的一部上具有球形地（圖 中未顯示）之金屬配線、在金屬配線的一部上所形成的 UBM(under-bump metallurgy)、為自夕卜部環境保護上述產物 之絕緣體、以及固定在球形地之上的導電性球。 該先前之晶圓級晶圓尺寸封裝的製造方法，如圖1所示一般， 首先在晶圓狀態之半導體晶片100上，將氧化矽以化學氣相蒸發 -4- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 五、發明説明（2 ) 後，使晶片墊102露出且予以圖案蚀刻，形成第1絕緣膜106。 晶圓狀態的半導體晶片1〇〇，則形成晶片墊102以及形成在晶片 墊之間的保護膜104。 其後，在第1絕緣膜106上，將鈦（Ti)、或是釩（V)等之金屬藉 由丨賤射（sputtering)法蒸發之後，使晶片塾102露出，並圖案姓 刻而形成第1配線1 0 8。 其次，為使第1絕緣膜106之安裝的一部分露出，而加以圖案 蝕刻以形成第2絕緣膜110。 接著，在第2絕緣膜110上，將鈦（Ti)、或是釩（V)等之金屬藉 由濺射法蒸發後，將露出的第2絕緣膜部位覆蓋般地，選擇性的 蝕刻以形成第2配線112。於此之際，第2配線112藉由第1配線 108，與晶片墊102作電氣接觸，並成為其後固定導電性球之球 形地。 其次，將導電性球120固定於第2配線112之後，將導電性球 120安裝於基板140上，以完成封裝製造。 發明所欲解決之問題 惟於上述般的先前之技術中，將導電性球安裝於基板的情況 下’基板的熱膨服係數約為1 8 p p m ’而半導體晶片的熱膨腺係 數約為3〜4 ppm之故，由於上述熱膨脹係數之差，使得在與導 電性球相接的基板以及晶圓之介面上，會產生破裂的問題。 又，在先前的技術上，隨著2次之為使第1、第2配線形成之金 屬濺射步騾，也會產生使封裝製造程序複雜化的問題。 -5- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) I2817M4 t A7 B7 r jt- 五、發明説明（3 ) 從而，本發明之目的，係為解決上述以前技術的問題點，提 供一種晶圓級晶圓尺寸封裝以及其製造方法，其可以縮短為形 成配線之金屬濺射工程數，而使封裝製造單純化。 又，本發明之其他目的則在於提供一種晶圓級晶圓尺寸封裝 以及其製造方法，其可以藉由防止破裂之發生，而提高製品的 信賴性。 解決問題之手段 為達成上述目的，本發明之晶圓級晶圓尺寸封裝，其特徵為 具備下列各項：形成多數晶片墊的晶圓狀態之半導體晶片、為 使上述半導體晶片上之上述晶片墊露出而設置的開口部、在延 長的一部上具有球形地而形成的配線、介於上述半導體晶片與 上述配線之間的粘著層、使上述晶片墊與上述配線作電氣接觸 般，填充、覆蓋上述開口部之導電層、為使上述球形地露出， 覆蓋上述配線以及導電層的模塑體、固定於上述球形地的導電 性球、以及安裝有上述導電性球的基板。 又，為達成上述目的，本發明之晶圓級晶圓尺寸封裝，其特 徵為具備下列各項：形成多數晶片墊的晶圓狀態之半導體晶 片、為使上述半導體晶片上之上述晶片墊露出而設置的開口 部、在延長的一部上形成具有球形地的配線、介於上述半導體 晶片與上述配線之間的粘著層、為使上述晶片墊與上述配線作 電氣接觸，而形成填充、覆蓋開口部之導電層、為使上述球形 地露出，覆蓋上述配線以及導電層的模塑體、安裝有上述球形 地的基板、以及介於上述球形地與上述基板之間的焊料膠。 為達成上述目的，本發明之晶圓級晶圓尺寸封裝之製造方 -6 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 1281 1281
A7 B7 五、發明説明（4 ) 法，其特徵為具備下列各項：提供形成多數晶片墊的晶圓狀態 之半導體晶片的步騾、使粘著層介於上述半導體晶片之上，且 使上述晶片墊露出般地設置開口部、形成具有半蝕刻球形地之 配線的步騾、為使上述晶片墊與上述配線作電氣接觸，而形成 填充、覆蓋開口部之導電層之步騾、為使上述球形地露出而形 成覆蓋上述配線以及導電層的模塑體之步騾、在上述球形地之 上塗抹焊料膠並使導電性球固定之步騾、以及將上述導電型球 安裝於基板上之步騾。 又，為達成上述目的，本發明之晶圓級晶圓尺寸封裝之製造 方法，其特徵為具備下列各項：提供形成多數晶片墊的晶圓狀 態之半導體晶片的步騾、使粘著層介於上述半導體晶片之上， 形成具有使上述晶片墊露出所設置之開口部的配線之步騾、將 上述開口部予以半蝕刻，並形成球形地的步騾、為使上述晶片 墊與上述配線作電氣接觸，而形成填充、覆蓋開口部之導電層 之步騾、為使上述球形地露出而形成覆蓋上述配線以及導電層 的模塑體之步騾、使焊料膠介於基板上，將上述球形地安裝之 步騾、以及將上述球形地安裝於基板上之步騾。 發明之實施型態 其次，與本發明相關之晶圓級晶圓尺寸封裝及其製造方法， 其實施型態的具體實例，一面參照圖式，一面說明。 圖2係為本發明之第1實施例之晶圓級晶圓尺寸封裝的剖面 圖，圖3〜圖9係為說明第1實施例之晶圓級晶圓尺寸封裝的製造 程序的剖面圖。 本發明之第1實施例之晶圓級晶圓尺寸封裝，如圖2所示一 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 1281 探4 A7
發明説明
\ .rlL 般’係由下列各項所構成：形成多數晶片塾2()2之晶圓狀態的半 導體晶片200、在半導體晶片2〇〇之上，使晶片墊2〇2露出所形 成的粘著層206、在粘著層2〇6上，為使晶片墊2〇2露出所設置 的開口部214、在延長的一部上具有球形地21〇所形成的配線 209、為使晶片墊202與配線209作電氣接觸，而填充、覆蓋開 口部214的導電層216、使球形地2 10露出般，覆蓋配線209以及 導電層216的模塑體230、以及固定在球形地21〇上的導電性球 220。 於此，配線209如圖10以及圖11所示一般，則成為接續下列 各項的接績配線212 :露出晶片墊2〇2的開口部214、使開口部 214成為環狀包圍著的金屬環（metal dng)2〇3、在延長的一部 上形成球形地210、金屬環2〇3、以及球形地21〇。 圖3至圖9係為說明本發明之第丨實施例之晶圓級晶圓尺寸封裝 之製造程序的剖面圖。 具有上述構造之本發明第1實施例之晶圓級晶圓尺寸封裝的製 造万法’如圖3所示一般，將在晶圓狀態之半導體晶片200上， 使晶片墊202露出而圖案化的粘著層2〇6，以低溫的熱壓著方式 黏附此時，在枯著層206上，則利用多硫亞氨（p〇iyimide)系 列的樹脂。 又’在晶圓狀態之半導體晶片200上，則形成覆蓋在多數晶片 墊202以及晶片墊2〇2之間的部分之絕緣層204。 其次，在粘著層206上，則黏附銅（Cu)金屬膜208。 接著’如圖4以及圖1〇所示一般，將銅（Cu)金屬膜2〇8選擇式 地蚀刻’形成使晶片墊202露出的開口部214。 -8- 本紙張尺度適财@ ®家榡準(CNS) A4規格(21〇 X 297公釐） 1281 A7 B7
-晋換頁 92. L 10 n /1 B 五、發明説明（6 ) 由於粘著層206係以低溫壓著方式而形成，因此形成配線用之 Cu金屬膜208不會受到因為熱而收縮等之影響。 其後，如圖5所示一般，將Cu金屬膜選擇性的半蝕刻（half etching)以形成配線209。 在上述配線209中，如圖11所示一般，經過以後之程序而形成 固定導電性球的球形地210、包圍晶片墊202的金屬環203、金 屬環203與球形地210接續的金屬配線212各自圖案化。 接著，如圖6所示一般，利用焊料注入裝置250，在開口部 214上擠壓焊料以形成焊料層214。 其後，如圖7所示一般，使焊料層2 14再流動，並形成接績晶 片墊202與配線209的導電層216。 其次如圖8所示，如覆蓋住包含配線209以及導電層216的成 品物般，將液狀封止材加以旋轉覆蓋後，使球形地210露出加以 圖案蝕刻，而形成模塑體230。模塑體230在球形地2 10與其相 鄰之球形地之間的部分（包含配線209以及導電層2 16的部分）， 具有平坦的形狀。 其次，在球形地210上固定焊料球等的導電性球220之後，如 圖9所示，將導電性球220安裝在基板240上，便完成封裝製 造。 此時，在基板240與導電性球220之間，具備有電鍍層238。 圖12係為本發明之第2實施例的晶圓級晶圓尺寸封裝的剖面 圖。 本發明之第2實施例的晶圓級晶圓尺寸封裝，如圖12所示，係 由下列各項所構成：形成多數晶片墊302的晶圓狀態之半導體晶 -9- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 1281734 ， / 〇，， i . V- A7 一———.............. …、 B7 五、發明説明（7 ) 片3 00、在半導體晶片300上露出晶片墊302而形成的粘著層 306、在粘著層306上為露出晶片墊3 02所設置之開口部314、在 延長的一部上為具有球形地3 10而形成的配線309、為使晶片墊 3 02與配線309作電氣接觸，填充、覆蓋開口部3 14之導電層 3 16、為使球形地3 10露出而覆蓋配線309以及導電層316，並具 有在球形地3 10與球形地之間的部分（覆蓋住球形地間的配線3 09 以及導電層316之空間）膨脹之凸面形狀的模塑體330、固定在球 形地310之導電性球320、以及介於基板340與導電性球320之間 的電鍍層33 8。 具有上述構造的本發明之第2實施例之晶圓級晶圓尺寸封裝的 製造方法，在將模塑體330旋轉覆蓋後，除下列各項以外，係與 本發明之第1實施例相同：在球形地310與球形地之間的部分（覆 蓋在球形地間的配線309以及導電層3 16的空間），形成具有凸面 形狀、以及使焊料膠338介於基板340與導電性球320之間。 上述模塑體則依下列之處理順序加以進行而形成：在球形地 3 10與球形地之間的部分（覆蓋住球形地間的配線3 09以及導電層 3 16之空間），具有凸面形狀將模塑物質加以旋轉覆蓋與打點處 理。 又，於基板340與導電性球320之間藉由焊料膠33 8之存在， 不僅可以強化基板340與導電性球320之間的粘著力，亦可以調 節封裝的厚度。 圖1 3係為本發明之第3實施例中的晶圓級晶圓尺寸封裝的剖面 圖。 本發明之第3實施例中的晶圓級晶圓尺寸封裝，如圖13所示， -10- 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐)
B7 五、發明説明（8 ) 係由下列各項所構成：形成多數晶片墊4〇2的晶圓狀態之半導體 晶片400、在半導體晶片4〇〇上露出晶片墊4〇2而形成的粘著層 406、在粘著層406上為露出晶片塾4〇2所設置之開口部4 14、在 延長的一部上為具有球形地41〇而形成的配線4〇9、為使晶片墊 402與配線409作電氣接觸，填充、覆蓋開口部414之導電層 416、為使球形地41〇露出而覆蓋配線4〇9以及導電層416之模塑 體430、固定球形地41〇的基板44〇、以及介於球形地41〇與基板 440之間的焊料膠438。 ，具有上述構成的本發明之第3實施例的晶圓級晶圓尺寸封裝之 製造方法，在不使用導電性球之情況下，將球形地41〇直接安裝 在基板440上，除了將焊料膠438介於球形地41〇與基板之間 外，其餘係與本發明之第丨與第2之實施例相同。又球形地41〇亦 已經電鍍處理。 發明之功效 如上述般，本發明係利用在基板上藉由粘著層黏附著形成配 線^之Cu金屬膜，使控制配線的厚度變得容易；無須別的濺射 工私，可使封裝的製造程序單純化，又使粘著層的厚度加厚， 可以確保烊料接缝的信賴性。 又，本發明由於係以低溫壓著方式形成粘著層，因此可以防 止配線用Cu金屬膜因為熱而收縮的現狀。 又，於本發明中，由於使焊料膠介於基板與導電性球之間， 了以使Cu金屬膜形成十分地厚，因此可以防止發生破裂。 接著，於本發明中，藉由以焊料射出方式形成與晶片墊接續 的導電層，可以確保高的電氣特性。 -11 - 本感«咖巾i^^(CNS) A4規格(21〇X297公董) -- 五、發明説明（9 ) 圈面之簡單說明 圖1係為顯示先前的晶圓級晶圓尺寸封裝之剖面圖。 圖2係為本發明之第1實施例之晶圓級晶圓尺寸封裝之剖面 圖。 圖3係為說明本發明之第1實施例之晶圓級晶圓尺寸封裝之製 造程序的剖面圖。 圖4係為說明本發明之第1實施例之晶圓級晶圓尺寸封裝之製 造程序的剖面圖。 圖5係為說明本發明之第1實施例之晶圓級晶圓尺寸封裝之製 造程序的剖面圖。 圖6係為說明本發明之第1實施例之晶圓級晶圓尺寸封裝之製 造程序的剖面圖。 圖7係為說明本發明之第1實施例之晶圓級晶圓尺寸封裝之製 造程序的剖面圖。 圖8係為說明本發明之第1實施例之晶圓級晶圓尺寸封裝之製 造程序的剖面圖。 圖9係為說明本發明之第1實施例之晶圓級晶圓尺寸封裝之製 造程序的剖面圖。 圖10係為顯示本發明之第1實施例的配線製作過程之斜面圖。 圖11係為顯示本發明之第1實施例的配線製作過程之斜面圖。 圖12係為本發明之第2實施例之晶圓級晶圓尺寸封裝之剖面 圖。 -12- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐）
A7 B7 五、發明説明（10 ) 圖13係為本發明之第2實施例之晶圓級晶圓尺寸封裝之剖面 圖。 符號說明 200、300、400半導體晶片 202、302、402 晶片塾 203 金屬環 204、304、404 絕緣層 206 ' 306、406 粘著層 裝 208 銅（Cu)金屬膜 209、309 ' 409 配線 210、3 10、4 10 球形地 212 接續配線
214、314、414 開口部 215 焊料 216、316、416 導電層 220、320、420導電性球 230、330、430模塑體 240、340、440 基板 250 焊料注入裝置 238 電鍍層 33 8、438 焊料膠 -13- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)

Claims (1)

  1. 128 1^^^131218號專利申請案 中文申請專利範圍替換本(9 6年1月） 六、申請專利範園 1. 一種晶圓級晶圓尺寸封裝，其特徵為：包含一晶圓狀態半導 體晶片，其具有複數個晶片墊； 開口，其用以曝露該半導體晶片上的晶片墊； 一配線，在其延長部分上具有球形地； 一粘著層，其介於該半導體晶片與該配線之間；一導電 層，其用以填充與覆蓋該等開口，以將該等晶片墊電性連接 該配線； 一模塑體，其用以覆蓋該配線及該導電層以曝露該等球形 地； 導電球，其被固定在該等球形地上；及 一基板，其具有該等導電性球。 2. 如申請專利範圍第1項之晶圓級晶圓尺寸封裝，其中上述配線 係作為包圍上述開口部之金屬環之用，以及成為使上述金屬 環與上述球形地接續的接續配線。 3. 如申請專利範圍第1項之晶圓級晶圓尺寸封裝，其中上述導電 層的材質係為焊料。 4. 如申請專利範圍第1項之晶圓級晶圓尺寸封裝，其中尚且在上 述基板與上述導電性球之間具備有電鍍層。 5. 如申請專利範圍第1項之晶圓級晶圓尺寸封裝，其中尚且在上 述基板與上述導電性球之間具備有焊料膠。 6. —種晶圓級晶圓尺寸封裝，其特徵為：包含形成複數個晶片 塾之晶圓狀態的半導體晶片； 為使上述半導體晶片上之上述晶片墊露出所設置的開口 部、及在延長的一部上具有球形地而形成的配線； 75484-960117.DOC -1 - 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐) 1281734 美· n/j A BCD ·:, Ί:* i 六、申請專利範圍 介於上述半導體晶片與上述配線之間的粘著層； 上述晶片墊與上述配線作電氣接觸而填充、覆蓋上述開口 部的導電層； 為使上述球形地露出而覆蓋上述配線及導電層的模塑體； 安裝上述導電性球的基板；及 介於上述球形地與上述基板之間的焊料膠。 7. 如申請專利範圍第6項之晶圓級晶圓尺寸封裝，其中上述配線 係作為包圍上述開口部之金屬環之用，以及成為使上述金屬 環與上述球形地接續的接續配線。 8. —種製造晶圓級晶圓尺寸封裝之方法，其特徵為：包含提供 形成多數晶片塾之晶圓狀態的半導體晶片步驟； 形成具有被半蝕刻之球形地及用以曝露該等晶片墊之開口 的配線之步驟，其中該步騾使該粘著層介於該配線與該半導 體晶片之間； 為使上述晶片墊與上述配線作電氣接觸，而形成填充、覆 蓋上述開口部的導電層之步驟； 為使上述球形地露出，而形成覆蓋上述配線以及導電層的 模塑體之步驟； 於上述球形地上塗抹焊料膠並使導電性球固定之步驟；及 將上述導電性球安裝在基板上的步驟。 9. 如申請專利範圍第8項之製造晶圓級晶圓尺寸封裝之方法，其 中尚且具有下列各步驟：在上述球形地形成之時，包圍上述 開口部的金屬環、將上述金屬環與上述球形地接續的接續配 線的形成步驟I。 75484-960117.DOC -2- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐） 1281734 1正替換頁 年月’ ^曰 ABCD 六、申請專利範圍 10·如申請專利範圍第8項之製造晶圓級晶圓尺寸封裝之方法，其 中上述導電層係在上述開口部上以射出焊料方式擠壓形成。 11.如申請專利範圍第8項之製造晶圓級晶圓尺寸封裝之方法，其 中上述模塑體係以旋轉覆蓋方式而形成。 12·如申請專利範圍第8項之製造晶圓級晶圓尺寸封裝之方法，其 中上述模塑體，係將覆蓋上述球形地間的上述配線以及導電 層之空間，以及將模塑物質依照旋轉覆蓋以及打點處理的順 序實施，並且形出凸面。 13. —種製造晶圓級晶圓尺寸封裝之方法，其特徵為：包含提供 形成多數晶片塾之晶圓狀態的半導體晶片步驟； 形成具有用以曝露上述晶片的開口部之配線之步驟，其中 該步驟使該粘著層介於該配線與該半導體晶片之間； 將上述開口部被半蝕刻，並形成球形地步驟； 為使上述晶片墊與上述配線作電氣接觸，而形成填充、.覆 蓋開口部之導電層之步驟； 為使上述球形地露出，而形成覆蓋上述配線以及導電層的 模塑體之步驟； 使焊料膠介於基板間，並安裝上述球形地的步驟；及 將上述球形地安裝在基板上的步驟。 14. 如申請專利範圍第13項之製造晶圓級晶圓尺寸封裝之方法， 其中上述導電層係在上述開口部上，以射出焊料方式擠壓而 形成。 15. 如申請專利範圍第13項之製造晶圓級晶圓尺寸封裝之方法， 其中上述模塑體，係將覆蓋上述球形地間的上述配線以及導 75484-960117.DOC -3- 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐）
    8 8 8 8 A BCD 1281734 六、申請專利範圍 電層之空間，以及將模塑物質以旋轉覆蓋方式處理，而形成 平面狀。 75484-960117.DOC 本紙張尺度適用中國國家標準(CNS) A4規格(210 χ 297公釐）
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