1281183 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種場發射裝置，尤其涉及一種場發射陰極。 【先前技#?】 請參閱第-圖，傳統之型場發射裝置6通常包括一平面型之陰極6〇 及-個與其補之陽極64，兩者之間設桃緣之阻隱63。陰極6Q通常包1291183 IX. Description of the Invention: [Technical Field] The present invention relates to a field emission device, and more particularly to a field emission cathode. [Previous Technique #?] Referring to Figure-FIG., the conventional field emission device 6 generally includes a planar cathode 6 〇 and a complementary anode 64 with a peach edge 63 therebetween. Cathode 6Q usually packs
括一由導電薄膜或導電板形成之平板型基底61及分佈於其上之多個電子發 射端62 〇 X 例如，2001年5月30日公開之第00130372.4號中國大陸發明專利申請 揭示了一種具有類似結構之採用垂直排列之奈米碳管之場發射顯示裝置及 其製造方法。 、 另’業界還有_種三極型場發射裝置，主要係在上述二極型場發射裝置 6基礎上’在陰極60及陽極64之間增設一柵極。 請參閱第二圖，2001年3月7日公開之第00121140.4號中國大陸發明 專利申請揭示了一種利用奈米碳管之場發射顯示裝置7。在該場發射顯示裝 置7中，一個用作陰極之第一金屬膜71形成一個下基底7〇上，一個絕緣膜 模板72及一個第一金屬膜棋板73形成在該第一金屬膜71上，其中絕緣膜 模板72及第一金屬膜模板73均具有多個細孔（未標示）以便暴露該第一金 屬膜71。一種液態導電高聚合物膜74形成在該細孔内。用作發射器頂端之 奈米碳管75垂直排列在該聚合物膜74上。該第二金屬膜模板73上安裝有 間隔器76，附著有透明電極78及螢光材料77之上基底安裝在該間隔器76 上。 " 惟，由於上述場發射裝置之陰極均採用由導電薄膜或導電薄板形成之平 板型基底，電子發射體形成於該基底上，各電子發射體個體之間間隔緊密， 無法分開，使得各電子發射體之間之電場屏蔽效應增加，從而降低了整個場 發射裝置之發射性能。 有鑑於此，提供一種具有相互分開之電子發射體之場發射陰極及應用該 陰極之場發射裝置實為必要。 【發明内容】 1281183 本發明要解決ϋ綱題赌供—麟發糖極，其轩發射體個 體之間相互分開。 本lx月要解决之苐一技術問題係提供一種應用上述場發射陰極之場於 射裝置。 爲解決第一技術問題，本發明提供一種場發射陰極，包括若干電子發射 體及用於承載該若干電子發射體之導電承載體。其中，該導絲載體係二個 由多個導電承載柱形成之網狀結構，該若干電子發射體分別形成於各個 承載柱之表面。 所述之若干電子發射體最好分別基本垂直於其所在之導電承載柱表面。 所述之導電承載涵導韻騎誠，如滅K纖誠有機導電纖維。 所述之導電承載柱可爲圓柱形或稜柱形。 、 爲解決第二^術問題，本發明提供一種場發射裝置，包括上述之場發射 陰極及與其相對之一電子引出極。 x 所述之電子引出極可爲一陽極。 所述之電刊ϋ極可爲-彳麻。此外，場發職置可進—步包括―餘 該電子引出極背離該場發射陰極一側並與該電子引出極相對之陽極。 所轉之場發射裝置可進一步包括一位於該場發射陰極背離該電子引出 極一側並與該場發射陰極相對之背栅極。 相對於習知技術，本發明將場發射陰極中用於承載電子發射體之導電承 載體没计成網狀結構，由多個導電承載柱交織而成，電子發射體形成於該導 電承載柱之表面。由於導電承載柱技面係一個凸曲面，所以各個電子發射 體個體之_互分開，它們之間之電子屏蔽效應降低，因而使得整個陰極之 場發射電壓降低。滅之，在；或球型場發射裝置中，作爲電子^極 之陽極或栅極在較低之電壓下就可以從電子發射體中激發出電子，並得到所 需之電流。從而使得這種場發射陰極整體之發射性能得到改善，並可以應用 於更多之領域。 ~ 並且，如果在該場發射陰極背離電子引出極（陽極或拇極）之一側另加 一個背栅極’則可以進一步降低電子引出極之工作^^壓，由此進一步改盖其 整體性能。 ° 1281183 【實施方式】 下面將結合附圖對本發明作進一步之詳 請參閱第三圖，本個提供之—種^_4發雜置8，吨括 射陰極80、-與其相對之陽極84及置於該兩者之間之用於支撐 = 壁83。並且由該場發射陰極80、阻隔壁8 、、隔 間被抽成真空狀態。 神《4 —者所形成之内部空 請-併參閱第三圖至第五圖，本發明之主要特點在於場發射_〇。宜 包括-導電承載龍及形成與其上之若干電子發射㈣。其中，^ 載體81係-働多個導電承載柱（未標示）形成之網狀結構，該若干: 發射體81分別形成於各個導電承載柱之表面。A flat-type substrate 61 formed of a conductive film or a conductive plate, and a plurality of electron-emitting ends 62 〇X distributed thereon, for example, the Chinese Patent Application No. 00130372.4, published on May 30, 2001, discloses a A similarly structured field emission display device using vertically arranged carbon nanotubes and a method of manufacturing the same. In the industry, there is also a type of three-pole field emission device, mainly based on the above-described two-pole field emission device 6, and a gate is added between the cathode 60 and the anode 64. Referring to the second figure, the Chinese Patent Application No. 00121140.4, published on Mar. 7, 2001, discloses a field emission display device 7 using a carbon nanotube. In the field emission display device 7, a first metal film 71 serving as a cathode is formed on a lower substrate 7A, and an insulating film template 72 and a first metal film board 73 are formed on the first metal film 71. The insulating film template 72 and the first metal film template 73 each have a plurality of fine holes (not labeled) to expose the first metal film 71. A liquid conductive high polymer film 74 is formed in the pores. A carbon nanotube 75 serving as a top end of the emitter is vertically aligned on the polymer film 74. A spacer 76 is attached to the second metal film template 73, and a substrate on which the transparent electrode 78 and the fluorescent material 77 are attached is mounted on the spacer 76. " However, since the cathode of the field emission device adopts a flat substrate formed of a conductive film or a conductive thin plate, an electron emitter is formed on the substrate, and the electron emitters are closely spaced apart from each other, so that the electrons are separated The electric field shielding effect between the emitters is increased, thereby reducing the emission performance of the entire field emission device. In view of the above, it is necessary to provide a field emission cathode having electron emitters separated from each other and a field emission device using the cathode. SUMMARY OF THE INVENTION 1281183 The present invention is to solve the problem of ϋ 赌 供 麟 麟 麟 麟 麟 麟 麟 麟 麟 麟 麟 麟 麟 麟 麟 麟 。 。 。 。 。 。 One of the technical problems to be solved in this lx month is to provide a field emission device using the above field emission cathode. In order to solve the first technical problem, the present invention provides a field emission cathode comprising a plurality of electron emitters and a conductive carrier for carrying the plurality of electron emitters. Wherein, the guide wire carrier is two mesh structures formed by a plurality of conductive carrying columns, and the plurality of electron emitters are respectively formed on the surface of each of the supporting columns. Preferably, the plurality of electron emitters are substantially perpendicular to the surface of the conductive carrier post on which they are located. The conductive bearing culvert is guided by the rhyme, such as the K-fiber organic conductive fiber. The conductive carrying column can be cylindrical or prismatic. In order to solve the second problem, the present invention provides a field emission device comprising the above field emission cathode and an electron extraction electrode opposite thereto. x The electron extraction pole can be an anode. The electric magazine can be - ramie. In addition, the field-issuing operation may include the remaining anode of the electron-extracting electrode facing away from the cathode side of the field and opposite the electron-extracting electrode. The field emission device to be transferred may further include a back gate located on a side of the field emission cathode facing away from the electron collector and opposite to the field emission cathode. Compared with the prior art, the present invention adopts a conductive carrier for carrying an electron emitter in a field emission cathode, which is not counted as a network structure, and is formed by interweaving a plurality of conductive bearing columns, and an electron emitter is formed on the conductive bearing column. surface. Since the conductive bearing column technology is a convex curved surface, the individual electron emitters are separated from each other, and the electron shielding effect between them is lowered, so that the field emission voltage of the entire cathode is lowered. Alternatively, in a spherical field emission device, electrons can be excited from the electron emitter at a lower voltage as an anode or a gate of the electron electrode, and the required current can be obtained. Thereby, the overall emission performance of the field emission cathode is improved, and it can be applied to more fields. ~ Also, if the emitter of the field is separated from the side of the electron extraction electrode (anode or thumb) and a back gate is added, the operation of the electron extraction electrode can be further reduced, thereby further modifying the overall performance. . ° 1281183 [Embodiment] Hereinafter, the present invention will be further described in detail with reference to the accompanying drawings, and the present invention provides a singularity of 8 ton, a cathode of the cathode 80, and an anode 84 opposite thereto. Between the two is used to support = wall 83. Further, the field emission cathode 80, the barrier wall 8, and the partition are evacuated. The internal space formed by God "4" - and referring to the third to fifth figures, the main feature of the present invention is field emission _ 〇. It is preferred to include - a conductive load bearing dragon and a plurality of electron emitters formed thereon (four). Wherein, the carrier 81 is a mesh structure formed by a plurality of conductive carrying columns (not shown), and the plurality of emitters 81 are respectively formed on the surface of each of the conductive carrying columns.
在本實施僧，該導電承載柱爲圓柱形之金屬絲，其直徑最好在幾微米 到幾絲之間。該導電承載體81即解個金屬絲交織而成之—金屬絲網。 當然，還可顧其他導電纖維作爲導電承載柱織成網狀之導電承載體81，如 碳纖維、有機導電纖維等。另外，絲網之密度可根據實際需要加以設定。 電子發射體82 Μ米碳管，可通過直接生長或沈積、枯附等方式形成 於導電承載柱表面。並且，其最好穌垂直於其所在之導電承載柱表面。由 於圓柱中之導電承載柱之表面係一個凸曲面，所以各個電子發射體犯個體 之間相互分開，使其電子屏蔽效應降低。In this embodiment, the conductive carrier column is a cylindrical wire having a diameter of preferably between a few micrometers and a few filaments. The conductive carrier 81 is a wire mesh formed by interlacing a metal wire. Of course, other conductive fibers can also be considered as the conductive support members 81 woven into the mesh, such as carbon fibers, organic conductive fibers, and the like. In addition, the density of the screen can be set according to actual needs. The electron emitter 82 is a carbon nanotube which can be formed on the surface of the conductive bearing column by direct growth or deposition, deposition or the like. Moreover, it is preferably perpendicular to the surface of the conductive carrying column on which it is located. Since the surface of the conductive carrying column in the cylinder is a convex curved surface, the individual electron emitters are separated from each other, and the electron shielding effect is lowered.
另’電子發射體82還可選用其他奈米微尖結構，包括金屬尖、非金屬 尖、化合物尖及一維奈米材料，例如鎢尖、鉬尖、矽尖、金剛石尖、氧化辞 尖等。其中一維奈米材料包括各種奈米級之管狀結構、棒狀結構及線狀結 構，如矽線、鉬線等。 在製作過程中，可先將導電承載柱織成網狀之導電承載體81，再於其上 形成電子發射體82。同樣，也可先於導電承載柱表面形成電子發射體82， 再將其織成網狀之導電承載體81。 奈米碳管之製造可採用本領域已知之各種方法，如化學氣相沈積法、電 狐放電法等。范守善等在1999年1月22曰出版之第283卷《Science》所 發表之“奈米碳管自取向規則陣列及其場發射性質” （Self-oriented Regular Arrays of Carbon Nanotubes and Their Field Emission 8 1281183In addition, the electron emitter 82 can also be selected from other nano microtip structures, including metal tips, non-metal tips, compound tips and one-dimensional nano materials, such as tungsten tips, molybdenum tips, tips, diamond tips, oxidized tips, etc. . Among them, the one-dimensional nano-material includes various nano-scale tubular structures, rod-like structures and linear structures such as ruthenium wires and molybdenum wires. In the manufacturing process, the conductive carrier column is first woven into a mesh-shaped conductive carrier 81, and an electron emitter 82 is formed thereon. Similarly, the electron emitter 82 may be formed on the surface of the conductive carrier, and then woven into a mesh-shaped conductive carrier 81. The carbon nanotubes can be produced by various methods known in the art, such as chemical vapor deposition, electric arc discharge, and the like. Fan Shoushan et al., "Self-oriented Regular Arrays of Carbon Nanotubes and Their Field Emission 8 1281183", published in the 283rd issue of Science, published on January 22, 1999.
Properties)論文中也揭示了奈米碳管陣列之生長方法，可參照實施，在此 不再贅述。 請參閱第六圖’本發明提供之一種場發射陰極裝置9，包括一場發射陰 極90、一與其相對之栅極94及位於該兩者之間之阻隔壁93。另外，在該場 發射陰極90背離該栅極94之一側還設有一背柵極96，其同樣與該場發射陰 極90相對，兩者之間設有一絕緣層95。 與前一實施例相類似地，該場發射陰極9〇包括一導電承載體91及形成 與其上之若干電子發射體92。其中，該導電承載體91係一個由多個導電承 載柱（未標示）形成之網狀結構，該若干電子發射體92分別形成於各個導 電承載柱之表面。 同時，栅極94相應於電子發射體92之位置開有細孔942供電子通過。 工作時，柵極94、陰極90、背栅極96之電位依次降低，這樣，背柵極 96可起到降低柵極94工作電壓之作用。 應指出的是，該場發射陰極裝置9作爲一陰極電子源，可根據需要與相 應之陽極裝置組合應用於場發射發光裝置、場發射掃描電鏡、場發射顯示器 等没備中。其中，該陽極裝置應設置於該柵極94背離該場發射陰極9〇 一側 並與該挪極94相對。 本領域普通技術人員應明白，除圓柱形以外，導電承載柱還可爲其他表 面爲曲面之柱體，如稜柱形。場發射裝置8中也可類似地於場發射陰極8〇 背離陽極84之一側設置一背栅極，不必限於該具體實施例。 本發明將場發射陰極中用於承載電子發射體之導電承載體設計成網狀 結構，由多個導電承載柱交織而成，電子發射體形成於該導電承載柱之表 面。由於導電承載柱之表面係一個凸曲面，所以各個電子發射體個體之間相 互分開，它們之間之電子屏蔽效應降低，因而使得整個陰極之場發射電壓降 低。相應地，在二^或三極型場發射裝置中，作爲電子引出極之陽極或桃極 在較低之電壓下就可以從電子發射體中激發出電子，並得到所需之電流。從 而使得這種場發射陰極整體之發射性能得到改善，並可以應用於更多之領 域0 並且’如果在該場發射陰極背離電子引出極（陽極或柵極）之一側另加 1281183 -個背栅極’則可以進-步降低電子引出極之工作電壓，由此進 整體性能。 綜上所述，本發明確已符合發明專利要件，爰依法提出專利申請。惟， 以上所述者僅為本發明之較佳實施例，舉凡熟悉本發明技藝之人士，於援依 本案發明精神所作之等效修飾或變化，皆應包含於以下之申請專利 【圖式簡單說明】 第一圖係傳統之二極型場發射裝置之結構示意圖； 第二圖係習知技術之第匪21140.4號中國大陸發明專利申請揭示之場發射 顯示裝置之結構示意圖； 第三圖係本發明之二極型場發射裝置之結構示意圖； 第四圖係第三圖中導電承載體之掃描電子顯微鏡(Scanning Elec她The method of growing the carbon nanotube array is also disclosed in the paper, and can be referred to the implementation, and will not be described herein. Referring to the sixth figure, a field emission cathode device 9 provided by the present invention includes a field emission cathode 90, a gate electrode 94 opposite thereto, and a barrier wall 93 between the two. In addition, a back gate 96 is disposed on the side of the field emission cathode 90 facing away from the gate 94, which is also opposite the field emission cathode 90, with an insulating layer 95 therebetween. Similarly to the previous embodiment, the field emission cathode 9 includes a conductive carrier 91 and a plurality of electron emitters 92 formed thereon. The conductive carrier 91 is a mesh structure formed by a plurality of conductive load carriers (not shown), and the plurality of electron emitters 92 are respectively formed on the surfaces of the respective conductive load-bearing columns. At the same time, the gate 94 is provided with a fine hole 942 for electron passage through corresponding to the position of the electron emitter 92. During operation, the potentials of the gate 94, the cathode 90, and the back gate 96 are sequentially lowered, so that the back gate 96 can function to lower the operating voltage of the gate 94. It should be noted that the field emission cathode device 9 serves as a cathode electron source and can be applied to a field emission illuminating device, a field emission scanning electron microscope, a field emission display, etc. in combination with a corresponding anode device as needed. Wherein, the anode device should be disposed on the side of the gate 94 facing away from the field emission cathode 9? and opposite the counter electrode 94. It will be understood by those skilled in the art that in addition to the cylindrical shape, the conductive load-bearing column may be other cylinders having a curved surface, such as a prismatic shape. Similarly, in the field emission device 8, a back gate may be disposed on the side of the field emission cathode 8 from the side of the anode 84, and is not necessarily limited to this specific embodiment. The present invention designs a conductive carrier for carrying an electron emitter in a field emission cathode into a mesh structure, which is formed by interlacing a plurality of conductive carrier columns, and an electron emitter is formed on a surface of the conductive carrier column. Since the surface of the conductive carrying column is a convex curved surface, the individual electron emitters are separated from each other, and the electron shielding effect between them is lowered, thereby lowering the field emission voltage of the entire cathode. Accordingly, in a two- or three-pole type field emission device, an anode or a peach pole as an electron extraction electrode can excite electrons from an electron emitter at a lower voltage and obtain a desired current. Thereby, the overall emission performance of the field emission cathode is improved, and can be applied to more fields 0 and 'if the emission cathode of the field is away from one side of the electron extraction pole (anode or gate) plus 1281183 - one back The gate' can further reduce the operating voltage of the electron-extracting electrode, thereby achieving overall performance. In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and those skilled in the art of the present invention should be equivalent to the following modifications and variations in the spirit of the invention. The first picture is a schematic diagram of the structure of a conventional two-pole field emission device; the second picture is a schematic diagram of the structure of a field emission display device disclosed in the Chinese Patent Application No. 21140.4 of the prior art; Schematic diagram of the invention of the two-pole field emission device; the fourth picture is the scanning electron microscope of the conductive carrier in the third figure (Scanning Elec
Microscopy, SEM)照片； 第五圖係第三圖中導電承載體上生長有奈米碳管之SEM照片； 第六圖係本發明之場發射陰極裝置之結構示意圖。 【主要元件符號說明】 型場發射裳置 8 場發射陰極裝置 9 陰極， 80,90 導電承載體 81，91 電子發射體 82,92 阻隔壁 83,93 陽極 84 拇極 94 絕緣層 95 背栅極 96 細孔 942Photograph of Microscopy, SEM); Fig. 5 is a SEM photograph of a carbon nanotube grown on a conductive carrier in the third figure; and Figure 6 is a schematic view showing the structure of the field emission cathode device of the present invention. [Main component symbol description] Field emission device 8 field emission cathode device 9 cathode, 80, 90 conductive carrier 81, 91 electron emitter 82, 92 barrier wall 83, 93 anode 84 thumb electrode 94 insulation layer 95 back gate 96 fine holes 942