TWI256856B - EL display device and methods for manufacturing the same - Google Patents

EL display device and methods for manufacturing the same

Info

Publication number
TWI256856B
TWI256856B TW094114990A TW94114990A TWI256856B TW I256856 B TWI256856 B TW I256856B TW 094114990 A TW094114990 A TW 094114990A TW 94114990 A TW94114990 A TW 94114990A TW I256856 B TWI256856 B TW I256856B
Authority
TW
Taiwan
Prior art keywords
substrate
display device
manufacturing
methods
same
Prior art date
Application number
TW094114990A
Other languages
English (en)
Other versions
TW200601871A (en
Inventor
Koji Murayama
Takatoshi Tsujimura
Original Assignee
Chi Mei Optoelectronics Corp
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chi Mei Optoelectronics Corp, Kyocera Corp filed Critical Chi Mei Optoelectronics Corp
Publication of TW200601871A publication Critical patent/TW200601871A/zh
Application granted granted Critical
Publication of TWI256856B publication Critical patent/TWI256856B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
TW094114990A 2004-06-21 2005-05-10 EL display device and methods for manufacturing the same TWI256856B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004182107A JP4734508B2 (ja) 2004-06-21 2004-06-21 Ｅｌディスプレイおよびその製造方法

Publications (2)

Publication Number Publication Date
TW200601871A TW200601871A (en) 2006-01-01
TWI256856B true TWI256856B (en) 2006-06-11

Family

ID=35479922

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094114990A TWI256856B (en) 2004-06-21 2005-05-10 EL display device and methods for manufacturing the same

Country Status (4)

Country Link
US (1) US7432650B2 (zh)
JP (1) JP4734508B2 (zh)
CN (1) CN100401552C (zh)
TW (1) TWI256856B (zh)

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JP4917833B2 (ja) * 2005-06-29 2012-04-18 エルジー ディスプレイ カンパニー リミテッド 有機ｅｌディスプレイ及びその製造方法
CN100444715C (zh) * 2006-02-09 2008-12-17 友达光电股份有限公司 用于显示元件的全彩工艺的屏蔽
CN101290905B (zh) * 2007-04-19 2013-02-27 奇美电子股份有限公司 显示面板及其导线制作方法
WO2009057689A1 (ja) * 2007-10-30 2009-05-07 Kyocera Corporation 画像表示装置の製造方法および画像表示装置
JP5677785B2 (ja) 2009-08-27 2015-02-25 三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ． 薄膜蒸着装置及びこれを利用した有機発光表示装置の製造方法
KR101084184B1 (ko) 2010-01-11 2011-11-17 삼성모바일디스플레이주식회사 박막 증착 장치
KR101156441B1 (ko) * 2010-03-11 2012-06-18 삼성모바일디스플레이주식회사 박막 증착 장치
KR101223723B1 (ko) 2010-07-07 2013-01-18 삼성디스플레이 주식회사 박막 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조방법 및 이에 따라 제조된 유기 발광 디스플레이 장치
KR101723506B1 (ko) 2010-10-22 2017-04-19 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR101760897B1 (ko) 2011-01-12 2017-07-25 삼성디스플레이 주식회사 증착원 및 이를 구비하는 유기막 증착 장치
KR101852517B1 (ko) 2011-05-25 2018-04-27 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법
KR20130004830A (ko) 2011-07-04 2013-01-14 삼성디스플레이 주식회사 유기층 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
TWI470849B (zh) * 2012-01-20 2015-01-21 Ind Tech Res Inst 發光元件
KR102081284B1 (ko) 2013-04-18 2020-02-26 삼성디스플레이 주식회사 증착장치, 이를 이용한 유기발광 디스플레이 장치 제조 방법 및 유기발광 디스플레이 장치
CN105118846B (zh) * 2015-07-28 2020-06-23 广东聚华印刷显示技术有限公司 一种印刷型发光二极管显示器件及其制作方法
CN106119779A (zh) * 2016-07-15 2016-11-16 信利（惠州）智能显示有限公司 一种oled有机薄膜成膜方法
CN106206990B (zh) * 2016-08-29 2018-05-08 昆山国显光电有限公司 Oled器件及制作方法、蒸镀基板制作方法
CN110335893B (zh) * 2019-07-22 2022-11-11 京东方科技集团股份有限公司 显示面板、封装盖板及其制造方法

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JP2565562B2 (ja) * 1989-03-18 1996-12-18 株式会社日立製作所 電子写真感光体とその製法並びにそれを用いた電子写真法及び電子写真装置
JP3926314B2 (ja) * 1995-03-13 2007-06-06 パイオニア株式会社 有機エレクトロルミネッセンスディスプレイパネルとその製造方法
JPH11173995A (ja) * 1997-12-12 1999-07-02 Matsushita Electric Ind Co Ltd 検査装置及び検査方法
KR100660384B1 (ko) * 1998-03-17 2006-12-21 세이코 엡슨 가부시키가이샤 표시장치의 제조방법
US6214631B1 (en) * 1998-10-30 2001-04-10 The Trustees Of Princeton University Method for patterning light emitting devices incorporating a movable mask
JP2000215513A (ja) * 1999-01-21 2000-08-04 Mitsubishi Chemicals Corp 光記録媒体及び光記録装置
JP2001185352A (ja) * 1999-12-27 2001-07-06 Sharp Corp 有機ｅｌ表示装置の発光層の形成方法
JP4474708B2 (ja) * 1999-12-27 2010-06-09 凸版印刷株式会社 有機エレクトロルミネセンス表示素子用基板およびそれを用いた有機エレクトロルミネセンス表示素子
TWI226205B (en) * 2000-03-27 2005-01-01 Semiconductor Energy Lab Self-light emitting device and method of manufacturing the same
JP2002075638A (ja) * 2000-08-29 2002-03-15 Nec Corp マスク蒸着方法及び蒸着装置
US6980272B1 (en) * 2000-11-21 2005-12-27 Sarnoff Corporation Electrode structure which supports self alignment of liquid deposition of materials
JP3825971B2 (ja) * 2000-12-25 2006-09-27 株式会社ボンマーク 印刷用メタルマスク
JP2003082042A (ja) * 2001-09-07 2003-03-19 Jsr Corp 隔壁形成用感放射線性樹脂組成物、隔壁、および表示素子。
US20030048074A1 (en) * 2001-09-12 2003-03-13 Jui-Ming Ni Method for packaging organic electroluminescent components with polymer passivation layer and structure thereof
JP2003133070A (ja) * 2001-10-30 2003-05-09 Seiko Epson Corp 積層膜の製造方法、電気光学装置、電気光学装置の製造方法、有機エレクトロルミネッセンス装置の製造方法、及び電子機器
JP2003257636A (ja) * 2002-03-01 2003-09-12 Seiko Epson Corp マスクおよびパターン形成方法、デバイスの製造装置およびデバイスの製造方法並びにデバイス
JP3481232B2 (ja) * 2002-03-05 2003-12-22 三洋電機株式会社 有機エレクトロルミネッセンスパネルの製造方法
KR100838065B1 (ko) * 2002-05-31 2008-06-16 삼성에스디아이 주식회사 박막증착기용 고정장치와 이를 이용한 고정방법
US20040051444A1 (en) * 2002-09-17 2004-03-18 General Electric Company Articles having raised features and methods for making the same
US7902747B2 (en) * 2003-10-21 2011-03-08 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device having a thin insulating film made of nitrogen and silicon and an electrode made of conductive transparent oxide and silicon dioxide
JP4225238B2 (ja) * 2004-04-21 2009-02-18 セイコーエプソン株式会社 有機ｅｌ装置の製造方法及び有機ｅｌ装置並びに電子機器

Also Published As

Publication number Publication date
JP4734508B2 (ja) 2011-07-27
JP2006004850A (ja) 2006-01-05
US7432650B2 (en) 2008-10-07
CN1713790A (zh) 2005-12-28
US20050280356A1 (en) 2005-12-22
CN100401552C (zh) 2008-07-09
TW200601871A (en) 2006-01-01

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees