TW490805B - Method of forming a metal wiring in a semiconductor device - Google Patents

Method of forming a metal wiring in a semiconductor device Download PDF

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Publication number
TW490805B
TW490805B TW090114706A TW90114706A TW490805B TW 490805 B TW490805 B TW 490805B TW 090114706 A TW090114706 A TW 090114706A TW 90114706 A TW90114706 A TW 90114706A TW 490805 B TW490805 B TW 490805B
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Taiwan
Prior art keywords
forming
layer
semiconductor device
copper
metal wire
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TW090114706A
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English (en)
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Sung-Gyu Pyo
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Hynix Semiconductor Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H01L21/76844—Bottomless liners
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
    • H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
    • H01L21/76876—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for deposition from the gas phase, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76814—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Description

490805 五 '發明説明（1 ) 明技術領域 本發明係關於一種半導體元件中 。說的更明確一點，本發明係關於 屬導線之形成方法，藉由此方法可 並且可藉由一層擴散阻隔膜來避免 增加，在製程技術中將形成一層化 著使用一種銅先質，使超細結構的 來塡充。 前行技藝之敘沭 隨著半導體元件整合層次的提高 低，近來有許多硏究嚐試使用銅金 其比傳統鋁線的電阻値約低了 40% 度。然而，銅的缺點在於其在用來 隔離層的二氧化矽中之擴散速度較 矽中擴散而移動之銅原子損害了半 和電容器，從而提高了漏電流，因 散，必須使用一層擴散阻隔膜。然 構中，當銅導線形成時，擴散阻隔 的底部，其作用在於提高銅導線中 如果沒有適當選擇具有低電阻之阻 阻的效應將會相當大，並且可能會 擴散屏障層薄膜之選擇比率的差異 和侵蝕（e r 〇 s i ο η)等現象。 此外，基於下世代電子元件之快 金屬導線，之形成方法 一種半導體元件中金 以選擇性的塡充銅， 銅導線中通孔電阻的 學促進劑層，並且接 嵌入式圖樣得以用銅 ’其信號轉換速度降 屬導線來傳遞電流， 。銅具有良好的導電 做爲半導體元件中之 快。當藉由在二氧化 導體元件中的電晶體 此，爲了避免銅的擴 而，在雙層嵌入式結 膜係存在於通孔接觸 的通孔電阻。因此， 隔屏障層金屬，則電 在CMP製程中因爲 而引起凹陷（dishing) 速高性能及微型化的 490805 五、發明説明（2 ) 需求’目前的趨勢係使用C V D來形成銅導線之方法。 然而，使用C V D法來塡充銅會有沈積速度慢及成本昂 貴等問題。近來，銅導線塡充的新興趨勢係使用化學促 進之化學氣相沈積（CECVD)法。然而，這種方法的問題 在於必須將化學促進劑均勻的噴灑，並且必須施用一種 選擇性塡充法，藉此可將化學促進劑分佈於特定的位置 上0 發明槪述 因此，本發明的目的之一係提供一種半導體元件中金 屬導線之形成方法，其可藉由在嵌入式圖樣側壁上形成 一層間隔層的形式的擴散阻隔膜而避免通孔電阻的增加 ，並且利用化學促進劑的選擇性反應特性，藉著在嵌入 式圖樣中選擇性的形成化學促進層的方式，以銅先質來 選擇性部分塡充嵌入式圖樣。 爲了達到上述目的，依照本發明所提出之半導體元件 中金屬導線的形成方法，其特徵在於包括以下步驟：提 供一個基板，其中在較低金屬層上形成一層由第一、第 二和第三隔離膜所構成的內層隔離膜；在該內層隔離膜 上形成一層由槽溝和通孔所構成嵌入式圖樣；在該槽溝 和通孔的側壁上形成一擴散阻隔膜間隔層；在構成槽溝 底部的第二隔離膜上及構成通孔底部的較低金屬層上選 擇性的形成一種化學促進劑層；藉由化學氣相沈積法形 成一層銅；並且進行氫氣還原鍛燒及化學機械硏磨程序 ，以形成銅金屬導線。 -4- 490805 五 '發明説明（3 ) 附圖簡述 以下將搭配附圖，針對前述的觀點及本發，明的其它特 色做進一步的描述，其中 桌1 A〜1 C圖係用來依序說明本發明半導體元件中金屬 導線之形成方法的剖面圖。 較佳實施例之詳細敘述 以下將藉由參考附圖所示的一個較佳實施例對本發明 做更詳細的描述。 首先爹考弟1A〜1C圖’本發明之半導體兀件中金屬導 線的形成方法將會有詳細的說明。 現在先參考第1A圖，在半導體基板1〇(其中用來形成 半導體元件的各種組份皆已形成）上，依序連續形成第 一內層隔離膜20，較低金屬層30和第二內層隔離膜40 。第二內層隔離膜40係由第一隔離膜40a、第二隔離膜 40b和第三隔離膜40c所構成。其中，第二隔離膜40b 是由氮化物材料所製成，並且係用來做爲防蝕刻膜，以 避免在第二內層隔離膜40之嵌入式圖樣的形成過程中 ，第一隔離膜40a在形成槽溝時被蝕刻。接著，就在第 二內層隔離膜40中形成了由槽溝和通孔所構成的嵌入 式圖樣，然後再進行淸潔程序，以去除殘留在嵌入式圖. 樣所曝露出較低金屬層30表面上的氧化物層。接下來 ，在包括曝露之較低金屬層30的第二內層隔離膜40之 上形成一層厚度爲5 0〜5 00A的擴散阻隔膜，然後再經過 毯覆式餓刻（blanket etch)製程，而使得只有在嵌入式圖 490805 五、發明説明（4 ) 樣的側壁上留有擴散阻隔膜，因而形成了擴散阻隔膜間 隔層5 0。 ， 第一和第三隔離膜4 0 a和4 0 c係由具有低介電常數的 氧化物材料所構成，而第二隔離膜40b則是由氮化物材 料所構成。在第二內層隔離膜40中所形成的槽溝和通 孔係在雙重嵌入式圖樣中形成。如果較低金屬層30是 由鎢、鋁等金屬所製成時，可使用RF電漿來進行淸潔 程序；如果較低金屬層30是由銅所製成，則可使用反應 淸潔法。擴散阻隔膜可使用以下至少一種化合物來形成： 離子化的PVD氮化鈦、CVD氮化鈦、MOCVD氮化鈦、 離子化的PVD鉅、離子化的PVD氮化鉅、CVD鉬、 C V D氮化鉅、C V D氮化鎢、C V D氮化鈦鋁、C V D氮化 鈦矽和CVD氮化鉬矽。擴散阻隔膜被製成間隔層形態 的理由是：如果擴散阻隔膜的形成範圍包括較低金屬層 3 0的表面時，會因爲擴散阻隔膜的電阻組份而增加通孔 電阻。 換言之，擴散阻隔膜間隔層50不只是因爲它覆蓋了 嵌入式圖樣中的第一和第三隔離膜40a和40c而避免銅 原子向外擴散，同時方可降低通孔電阻，因爲較低金屬 層30的表面曝露出來了。擴散阻隔膜間隔層50可爲一 種非導體，如氮化矽（SiN)薄膜或者是氧氮化矽（SiON)薄 膜，而它並不存在於通孔的底部。 參考第1 B圖’化學促進劑層60係在整個結構上形成 ，包括較低金屬層3 0。化學促進劑層6 0具有選擇性反 -6- 490805 五、發明説明（5 ) 應的特性，它很少與氧化物材料反應，並且與氮化物材 料及金屬之反應情況良好。因此，化學促進’劑層60不 會在氧化物材料所構成的第三隔離膜40c上形成，只會 在氮化物材料所構成的第二隔離膜40b上和較低金屬層 3〇上形成，如圖所示。 化學促進劑層60的形成厚度爲50〜500A。用來形成 化學促進劑層的觸媒可包括下列化合物之一：含碘之液 態化合物，如 CH;I、C2H5I、CD3I、CH2h 等；Hhfacl/2H2〇 、Hhfac、TMVS、純碘、含碘氣體和水蒸氣；並且其係 在-2 0〜3 00°C的溫度下進行1〜600秒。觸媒亦可包括液態 的氟、氯、溴、碘、祕，和氣態的氟、氯、溴、碘、孤， 這些是週期表中的第七族元素。 參考第1C圖，使用hfac系列所有先質中的至少一種 ，如（hfac)CuVTMOS 系歹[J 、（hfac)CuDMB 系歹【J 、 (hfac)CuTMVS系列等，藉由金屬有機化學氣相沈積法 (M0CVD)在含有嵌入式圖樣之第二內層隔離膜40上形 成一層銅，使得銅得以塡充嵌入式圖樣。當化學促進劑 層60在第二隔離膜40b和較低金屬層30之上形成時， 銅沈積於嵌入式圖樣中的速度比銅沈積於第三隔離膜 4 0c的速度要快的多。因此，可達到銅選擇性沈積於嵌 入式圖樣的效果。上述的選擇性沈積方法可在所有具有 直接液體射出（DLI)蒸發器、控制蒸發混合機（CEM)、銳 孔結構和噴霧結構的沈積設備中進行。之後進行氫氣還 原鍛燒製程’並且以化學機械硏磨（C Μ P)的方式棧去除 -7- 490805 五、發明説明（6 ) 沈積於第三隔離膜40c之上的銅層，因而形成了銅導線 7〇。雖然銅層可在第三隔離膜40c之上形成’，但卻會受 到化學促進劑層60的影響而加速。因此，在第三隔離 膜40c上沈積的銅層厚度非常薄，可藉由CMP製程輕易 的去除。 在上述實施例中，銅係被解釋成用來做爲形成金屬導 線的材料。然而，値得注意的是也可使用其它金屬，如 鋁或鎢，來替代。 如上所述，本發明以間隔層的形態形成了一層擴散阻 隔膜、選擇性的在嵌入式圖樣中形成化學促進劑層，並 且接著沈積銅以形成導線。因此，本發明在降低通孔電 阻以及改善元件之操作速度和可靠度方面具有相當優異 的效果。 前文中已藉由特殊實施例並配合特殊的應用對本發明 做了 一番描述。對於在本技藝領域中具有一般技能及接 受本發明學說者，將可對相關範疇內的其它變異及應用 能有所了解。 因此’藉由申請專利範圍意欲涵蓋任何及所有在本發 明範疇內之此類相關的應用、修改和實施例。 符號說明 1 0…基板 20…第一內層隔離膜 3 0…較低金屬層 40…第二內層隔離膜 490805 五、發明説明（7 ) 4〇a…第一隔離膜 40b…第二隔離膜 40c…第三隔離膜 50···擴散阻隔膜間隔層 60···化學促進劑層 70··.銅導線

Claims (1)

  1. 490805 六、申請專利範圍 1. 一種半導體元件中金屬導線之形成方法’包括以下步 驟： ， 提供一'個基板，其中在較低金屬層上形成 層由第 一、第二和第三隔離膜所構成的內層隔離膜； 在該內層隔離膜上形成一層由槽溝和通孔所構成 的嵌入式圖樣； 在該槽溝和通孔的側壁上形成一擴散阻隔膜間隔 層； 在構成該槽溝底部的該第二隔離膜上及構成該通 孔底部的該較低金屬層上，選擇性的形成一種化學促 進劑層； 藉由化學氣相沈積法形成一銅層；以及 進行氫氣還原鍛燒和化學機械硏磨法，以形成銅金 屬導線。 2. 如申請專利範圍第1項之半導體元件中金屬導線之形 成方法，其中如果該較低金屬層係由鎢和鋁所製成’ 在該嵌入式圖樣形成之後以RF電漿來進行淸潔程序。 3. 如申請專利範圍第1項之半導體元件中金屬導線之形 成方法，其中如果該較低金屬層係由銅所製成，在該 嵌入式圖樣形成之後以反應淸潔法來進行淸潔程序。 4. 申請專利範圍第1項之半導體元件中金屬導線之形成 方法，其中該擴散阻隔間隔層係藉由在包括該嵌入式 圖樣的整個結構上形成厚度爲5 0〜5 0 0 A之擴散薄膜’ 並且接著進行毯覆式蝕刻方法而形成。 -10- 490805 六、申請專利範圍 5. 如申請專利範圍第丨項之半導體元件中金屬導線之形 成方法’其中該擴散阻隔膜間隔層係使用至少一種離 子化的PVD氮化鈦、CVD氮化鈦、MOCVD氮化鈦、 離子化的PVD鉅、離子化的pvd氮化鉅、CVD鉬、 CVD氮化钽、CVD氮化鎢、CVD氮化鈦鋁、CVD氮化 鈦矽和CVD氮化鉬矽所形成。 6. 如申請專利範圍第1項之半導體元件中金屬導線之形 成方法，其中該擴散阻隔膜間隔層係使用SiN或SiON 所形成。 7. 如申請專利範圍第1項之半導體元件中金屬導線之形 成方法，其中該化學促進劑層之厚度爲50〜500A，且 係在-20〜300°C的溫度下，處理含碘之液態化合物、 Hhfacl/2H2〇、Hhfac、TMVS、純碘、含碘氣體和水蒸 氣其中一種的觸媒1〜600秒而形成。 8. 如申請專利範圍第7項之半導體元件中金屬導線之形 成方法，其中該種含碘液態化合物爲CH;I、C2H5l'CD;I 、CH2I2其中的一種。 9. 如申請專利範圍第1項之半導體元件中金屬導線之形 成方法，其中該化學促進劑層之厚度爲50〜5 00A，且 係在-20〜300°C的溫度下，處理液態之氟、氯、溴、碘 和犯其中一種的觸媒1〜600秒而形成。 1 0 ·如申請專利範圍第1項之半導體元件中金屬導線之 形成方法，其中該化學促進劑層之厚度爲50〜500A， 且係在-20〜300°C的溫度下，處理氣態之氟、氯、溴、 -11 - 490805 六、申請專利範圍 碘和好i其中一種的觸媒1〜600秒而形成。 Π .如申請專利範圍第1項之半導體元件中金屬導線之 形成方法，其中該銅層係使用所有hfac先質中的任何 —種，如（hfac)CuVTMOS 系列、（hfac)CuDMB 系列、 (hfac)CuTMVS系列之化合物，以金屬有機化學沈積法 在沈積裝置中形成。 12
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KR100566905B1 (ko) * 1998-09-11 2006-07-03 에이에스엠지니텍코리아 주식회사 표면 촉매를 이용한 화학 증착방법_
US6177347B1 (en) * 1999-07-02 2001-01-23 Taiwan Semiconductor Manufacturing Company In-situ cleaning process for Cu metallization
US6040243A (en) * 1999-09-20 2000-03-21 Chartered Semiconductor Manufacturing Ltd. Method to form copper damascene interconnects using a reverse barrier metal scheme to eliminate copper diffusion
US6323121B1 (en) * 2000-05-12 2001-11-27 Taiwan Semiconductor Manufacturing Company Fully dry post-via-etch cleaning method for a damascene process

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KR100403454B1 (ko) 2003-11-01
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US20020006727A1 (en) 2002-01-17
US6723645B2 (en) 2004-04-20
KR20010114051A (ko) 2001-12-29

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