TW201834315A - Anisotropic conductive sheet - Google Patents

Abstract

An anisotropic conductive sheet for electrically connecting a testing device and a device to be tested, the anisotropic conductive sheet being equipped with an anisotropic conductive part, wherein the anisotropic conductive part is provided with an insulating layer having an opening that passes therethrough in the thickness direction, and also provided with a connecting part positioned in the opening. Furthermore, the insulating layer covers part of one surface of the connecting part in the thickness direction, and also covers a perpendicular-direction lateral surface thereof which is perpendicular to the thickness direction.

Description

各向異性導電性片材Anisotropic conductive sheet

本發明係關於一種各向異性導電性片材，詳細而言係關於一種用以將被檢查裝置與檢查裝置相互電性連接之各向異性導電性片材。The present invention relates to an anisotropic conductive sheet, and in particular to an anisotropic conductive sheet for electrically connecting an inspection device and an inspection device with each other.

自先前以來，於將半導體元件安裝於電路基板前，對半導體元件或電路基板之各者實施是否正常地發揮功能之功能檢查(導通檢查)。於功能檢查中，必須使半導體元件或電路基板等被檢查裝置之端子電性連接於探針測試機等檢查裝置，因此使用有各向異性導電性片材(連接器)。具體而言，藉由以被檢查裝置及檢查裝置夾著各向異性導電性片材，使各向異性導電性片材之一側之連接部與被檢查裝置之端子接觸，使另一側之連接部與檢查裝置之探針端子接觸，而將該等確實地電性連接。 作為此種各向異性導電性片材，例如已知有專利文獻1之複合導電性片材。專利文獻1之複合導電性片材具有：絕緣性片材，其形成有複數個貫通孔；及剛性導體，其以填充於貫通孔之各者，進而自絕緣性片材之兩面之各者突出之方式配置。 [先前技術文獻] [專利文獻] 專利文獻1：日本專利特開2007-220534號公報Before this, before mounting a semiconductor element on a circuit board, a function check (continuity check) was performed on each of the semiconductor element or the circuit board whether or not it functions normally. In the functional inspection, it is necessary to electrically connect the terminals of the inspected device such as a semiconductor element or a circuit board to an inspection device such as a probe tester. Therefore, an anisotropic conductive sheet (connector) is used. Specifically, an anisotropic conductive sheet is sandwiched between the device under inspection and the inspection device, so that the connection portion on one side of the anisotropic conductive sheet is brought into contact with the terminal of the device under inspection, and the other side The connecting portion is in contact with the probe terminal of the inspection device, and these are electrically connected reliably. As such an anisotropic conductive sheet, for example, a composite conductive sheet of Patent Document 1 is known. The composite conductive sheet of Patent Document 1 includes an insulating sheet having a plurality of through holes formed therein, and a rigid conductor which is filled with each of the through holes and further protrudes from each of both sides of the insulating sheet. Way configuration. [Prior Art Literature] [Patent Literature] Patent Literature 1: Japanese Patent Laid-Open No. 2007-220534

[發明所欲解決之問題] 且說，各向異性導電性片材於功能檢查中由被檢查對象及檢查對象自兩側進行加壓。尤其若被檢查裝置存在翹曲或變形，則有被檢查裝置之一部分不與各向異性導電性片材接觸之虞，因此為了確實地進行接觸而有增強加壓之情形。 而且，各向異性導電性片材由於被反覆再利用，故而因加壓而導致對各向異性導電性片材之連接部施加之損傷變大，其結果為，產生連接部變形或脫落之不良情況。 根據專利文獻1之複合導電性片材，剛性導體不會自絕緣片材脫落而容易操作。 然而，於專利文獻1之複合導電性片材中，對因反覆加壓所引起之脫落之耐久性亦不充分，要求進一步之改良。 因此，本發明之課題在於提供一種耐久性優異之各向異性導電性片材。 [解決問題之技術手段] 本發明[1]具備一種各向異性導電性片材，其係用以將被檢查裝置與檢查裝置相互電性連接者，具備各向異性導電部，上述各向異性導電部具備具有於厚度方向上貫通之開口部之絕緣層、及配置於上述開口部之連接部，且上述絕緣層被覆上述連接部之厚度方向一面之一部分及與上述厚度方向正交之正交方向側面。 根據此種各向異性導電性片材，由於絕緣層被覆連接部之厚度方向一面之一部分及正交方向側面，故而連接部由絕緣層固定。因此，於被檢查裝置之檢查時，即便連接部由被檢查裝置及檢查裝置自厚度方向兩側朝向內側加壓，亦可抑制連接部之脫落。其結果為，耐久性優異。 本發明[2]具備如[1]所記載之各向異性導電性片材，其中上述絕緣層具備：第1絕緣部，其露出厚度方向另一面；及第2絕緣部，其配置於上述第1絕緣部之厚度方向一側，露出厚度方向一面；且上述第2絕緣部被覆上述連接部之上述厚度方向一面之一部分及上述正交方向側面。 根據此種各向異性導電性片材，配置於第1絕緣部之厚度方向一側之第2絕緣部被覆連接部之厚度方向一面之一部分及正交方向側面。因此，連接部由第1絕緣部及第2絕緣部固定，自厚度方向兩側被固定。因此，可更確實地抑制連接部之脫落。 本發明[3]包含如[2]所記載之各向異性導電性片材，其中上述第1絕緣部具有第1開口部，上述第2絕緣部具有與上述第1開口部連通之第2開口部，上述連接部具備：第1導體部，其填充於第1開口部；第2導體部，其於厚度方向上與上述第1導體部相連，填充於第2開口部；及第3導體部，其於與厚度方向正交之正交方向上與上述第2導體部相連，填充於第2開口部；且上述第2絕緣部被覆上述連接部中之上述第3導體部之上述厚度方向一面及上述正交方向側面。 根據此種各向異性導電性片材，第1導體部、第2導體部及第3導體部相連，第3導體部之厚度方向一面及正交方向側面由第2絕緣部被覆，因此第3導體部由第2絕緣部固定。因此，於被檢查裝置之檢查時，即便連接部(具體而言，第1導體部及第2導體部)由被檢查裝置及檢查裝置自厚度方向兩側朝向內側加壓，亦可抑制連接部之脫落。進而，可使被檢查裝置及檢查裝置與連接部(具體而言，第1導體部及第2導體部)確實地接觸。該等之結果為，可確實地進行被檢查裝置之檢查並且各向異性導電性片材之耐久性優異。 本發明[4]包含如[3]所記載之各向異性導電性片材，其中上述第1開口部具有開口截面積自上述厚度方向一側朝向厚度方向另一側變小之錐形形狀。 根據此種各向異性導電性片材，由於第1開口部之開口截面積隨著朝向厚度方向另一側而變小，故而第1導體部不易自第1開口部朝向厚度方向另一側脫落。因此，耐久性更進一步優異。 本發明[5]包含如[3]或[4]所記載之各向異性導電性片材，其中上述第2導體部之厚度方向一面位於較上述第2絕緣部之厚度方向一面更靠厚度方向另一側。 根據此種各向異性導電性片材，第2導體部由於完全收容於第2絕緣部之內部，故而不易自第2絕緣部脫落。因此，耐久性更進一步優異。 本發明[6]包含如[3]至[5]中任一項所記載之各向異性導電性片材，其中上述各向異性導電部於側剖視圖中，關於在厚度方向上通過上述第1開口部之上述正交方向中心點之軸而對稱。 根據此種各向異性導電性片材，第1導體部之正交方向中心點與第2導體部之正交方向中心點於正交方向上位於同一位置。因此，於檢查被檢查裝置之端子及與其對應之檢查裝置之探針時，容易調整相互之位置。 本發明[7]包含如[3]至[6]中任一項所記載之各向異性導電性片材，其中上述第2絕緣部被覆上述連接部之厚度方向一面之正交方向長度為3 μm以上。 根據此種各向異性導電性片材，由於第2絕緣部更確實地固定連接部，故而耐久性更進一步優異。 本發明[8]包含如[3]至[7]中任一項所記載之各向異性導電性片材，其中上述各向異性導電部配置有複數個，於相互鄰接之各向異性導電部中，一各向異性導電部之第1開口部之正交方向中心點與鄰接於上述一各向異性導電部之另一各向異性導電部之第1開口部之正交方向中心點的距離為30 μm以上且200 μm以下。 根據此種各向異性導電性片材，由於鄰接之第1開口部之正交方向中心距離(連接部間間距)較小，故而可進行更微細化之被檢查裝置之檢查。 本發明[9]包含如[3]至[8]中任一項所記載之各向異性導電性片材，其中上述連接部進而具備設置於上述第1導體部之厚度方向另一側之第1凸塊及配置於上述第2導體部之厚度方向一側之第2凸塊。 根據此種各向異性導電性片材，藉由使第1凸塊及第2凸塊與被檢查裝置及檢查裝置接觸，可實施檢查。因此，可進行更簡易之檢查。 本發明[10]包含如[1]至[9]中任一項所記載之各向異性導電性片材，其中上述連接部於厚度方向一面及厚度方向另一面進而具備Au層或NiAu層。 根據此種各向異性導電性片材，由於可抑制連接部之氧化，故而耐久性更進一步優異。 本發明[11]包含如[1]至[10]中任一項所記載之各向異性導電性片材，其中上述連接部係由金屬形成。 根據此種各向異性導電性片材，由於導電性優異，故而可提高檢查感度或縮小連接部間間距。 本發明[12]包含如[1]至[11]中任一項所記載之各向異性導電性片材，其厚度為100 μm以下。 根據此種各向異性導電性片材，由於容易在厚度方向上可撓，故而可容易地追隨被檢查裝置之形狀或翹曲。因此，可進行更低壓下之檢查。 本發明[13]包含如[1]至[12]中任一項所記載之各向異性導電性片材，其進而具備配置於上述各向異性導電部之厚度方向一側及厚度方向另一側之至少任一側之彈性層，且上述彈性層具備具有於厚度方向上貫通之第3開口部之絕緣性彈性部、及填充於上述第3開口部且含有導電性粒子及樹脂之導電性彈性部。 根據此種各向異性導電性片材，即便於被檢查裝置之複數個端子之高度等產生不均之情形時，亦可於將被檢查裝置按壓至各向異性導電性片材時，對應於該等端子之高度而使彈性層壓縮或變形。其結果為，即便於複數個端子之高度不均勻之情形時，亦可確實地進行檢查。 又，彈性層吸收來自被檢查裝置之過度之壓力，並且避免連接部與被檢查裝置之直接接觸。因此，耐久性更進一步優異。 本發明[14]包含如[1]至[12]中任一項之各向異性導電性片材，其中於上述連接部之厚度方向一面形成有第1凹部，進而具備填充於上述第1凹部且含有導電性粒子及樹脂之導電性彈性部。 根據此種各向異性導電性片材，由於在第1凹部填充有導電性彈性部，故而即便於被檢查裝置之複數個端子之高度等產生不均之情形時，亦可於將被檢查裝置按壓至各向異性導電性片材時，對應於該等端子之高度而使導電性彈性部壓縮或變形。其結果為，於複數個端子之高度不均勻之情形時，可確實地進行檢查。 又，導電性彈性部吸收來自被檢查裝置之過度之壓力並且避免連接部與被檢查裝置之直接接觸。因此，耐久性更進一步優異。 本發明[15]具備如[14]所記載之各向異性導電性片材，其中上述導電性彈性部之體積比率相對於形成於上述各向異性導電部之厚度方向一面之第2凹部之體積為20%以上且200%以下。 根據此種各向異性導電性片材，即便於被檢查裝置等具備之複數個端子之高度不均勻之情形時，亦可更確實地進行檢查。又，由於導電性彈性部可確實地緩和對各向異性導電部之壓力或衝擊，故而耐久性更進一步優異。 [發明之效果] 根據本發明之各向異性導電性片材，即便反覆使用，亦可抑制連接部之脫落，因此耐久性優異。[Problems to be Solved by the Invention] The anisotropic conductive sheet is pressurized from both sides by the object to be inspected and the object to be inspected during the function inspection. In particular, if the inspected device is warped or deformed, a part of the inspected device may not come into contact with the anisotropic conductive sheet. Therefore, in order to ensure the contact, pressure may be increased. In addition, since the anisotropic conductive sheet is repeatedly reused, damage to the connection portion of the anisotropic conductive sheet due to pressure is increased, and as a result, the connection portion is deformed or detached. Happening. According to the composite conductive sheet of Patent Document 1, the rigid conductor is easy to handle without falling off from the insulating sheet. However, the composite conductive sheet of Patent Document 1 has insufficient durability against peeling due to repeated pressure, and further improvement is required. Therefore, an object of the present invention is to provide an anisotropic conductive sheet excellent in durability. [Technical means for solving the problem] The present invention [1] includes an anisotropic conductive sheet, which is used to electrically connect the device under inspection and the inspection device with each other, and includes an anisotropic conductive portion, and the above anisotropy The conductive portion includes an insulating layer having an opening portion penetrating in the thickness direction, and a connecting portion disposed in the opening portion, and the insulating layer covers a portion of one surface in the thickness direction of the connecting portion and orthogonal to the thickness direction. Direction side. According to such an anisotropic conductive sheet, since the insulating layer covers a part of the thickness direction surface of the connection portion and the side surface in the orthogonal direction, the connection portion is fixed by the insulation layer. Therefore, during the inspection of the inspected device, even if the connection portion is pressurized from both sides of the thickness direction toward the inside by the inspected device and the inspection device, the connection portion can be prevented from falling off. As a result, durability is excellent. The present invention [2] includes the anisotropic conductive sheet according to [1], wherein the insulating layer includes: a first insulating portion that exposes the other surface in the thickness direction; and a second insulating portion that is disposed in the first 1 The thickness direction side of the insulating portion exposes one surface in the thickness direction; and the second insulating portion covers a portion of the thickness direction surface of the connection portion and the orthogonal side surface. According to such an anisotropic conductive sheet, the second insulating portion covers one portion of the thickness direction surface of the first insulating portion in the thickness direction side and the orthogonal direction side surface. Therefore, the connection portion is fixed by the first insulating portion and the second insulating portion, and is fixed from both sides in the thickness direction. Therefore, the connection portion can be more reliably prevented from falling off. The present invention [3] includes the anisotropic conductive sheet according to [2], wherein the first insulating portion has a first opening portion, and the second insulating portion has a second opening communicating with the first opening portion. The connection portion includes a first conductor portion filled in the first opening portion, a second conductor portion connected to the first conductor portion in the thickness direction and filled in the second opening portion, and a third conductor portion. , Which is connected to the second conductor portion in an orthogonal direction orthogonal to the thickness direction and fills the second opening portion; and the second insulation portion covers the thickness direction surface of the third conductor portion of the connection portion. And the above-mentioned orthogonal sides. According to such an anisotropic conductive sheet, the first conductor portion, the second conductor portion, and the third conductor portion are connected, and the thickness direction surface and the orthogonal direction side surface of the third conductor portion are covered by the second insulating portion. The conductor portion is fixed by the second insulating portion. Therefore, even when the connection portion (specifically, the first conductor portion and the second conductor portion) is pressurized from both sides of the thickness direction toward the inside by the inspection device and the inspection device during the inspection of the inspection device, the connection portion can be suppressed. Of shedding. Furthermore, the device under inspection and the inspection device can be reliably brought into contact with the connection portion (specifically, the first conductor portion and the second conductor portion). As a result, the inspection of the inspected device can be performed reliably, and the durability of the anisotropic conductive sheet is excellent. The present invention [4] includes the anisotropic conductive sheet according to [3], wherein the first opening portion has a tapered shape in which an opening cross-sectional area becomes smaller from one side in the thickness direction toward the other side in the thickness direction. According to such an anisotropic conductive sheet, since the opening cross-sectional area of the first opening portion decreases toward the other side in the thickness direction, it is difficult for the first conductor portion to fall off from the first opening portion toward the other side in the thickness direction. . Therefore, durability is further excellent. The present invention [5] includes the anisotropic conductive sheet according to [3] or [4], wherein a thickness direction side of the second conductor portion is located in a thickness direction more than a thickness direction side of the second insulation portion. The other side. According to such an anisotropic conductive sheet, since the second conductor portion is completely housed inside the second insulating portion, it is difficult to fall off from the second insulating portion. Therefore, durability is further excellent. The present invention [6] includes the anisotropic conductive sheet according to any one of [3] to [5], in which the anisotropic conductive portion passes through the first section in a thickness direction in a side sectional view. The axis of the above-mentioned orthogonal direction center point of the opening is symmetrical. According to such an anisotropic conductive sheet, the center point in the orthogonal direction of the first conductor portion and the center point in the orthogonal direction of the second conductor portion are located at the same position in the orthogonal direction. Therefore, it is easy to adjust the mutual positions when inspecting the terminals of the device under inspection and the probes of the corresponding inspection devices. The present invention [7] includes the anisotropic conductive sheet according to any one of [3] to [6], wherein the orthogonal direction length of the second insulating portion covering the thickness direction of the connecting portion is 3 μm or more. According to such an anisotropic conductive sheet, since the second insulating portion fixes the connection portion more reliably, the durability is further improved. The present invention [8] includes the anisotropic conductive sheet according to any one of [3] to [7], in which the anisotropic conductive portion is provided with a plurality of anisotropic conductive portions adjacent to each other. , The distance between the center point in the orthogonal direction of the first opening portion of an anisotropic conductive portion and the center point in the orthogonal direction of the first opening portion of another anisotropic conductive portion adjacent to the anisotropic conductive portion It is 30 μm or more and 200 μm or less. According to such an anisotropic conductive sheet, since the center distance in the orthogonal direction (pitch between the connecting portions) of the adjacent first openings is small, inspection of the inspected device can be performed in a more refined manner. The present invention [9] includes the anisotropic conductive sheet according to any one of [3] to [8], wherein the connection portion further includes a first portion provided on the other side in the thickness direction of the first conductor portion. 1 bump and a second bump arranged on one side in the thickness direction of the second conductor portion. According to such an anisotropic conductive sheet, inspection can be performed by bringing the first bump and the second bump into contact with the device under inspection and the inspection device. Therefore, a simpler inspection can be performed. The present invention [10] includes the anisotropic conductive sheet according to any one of [1] to [9], wherein the connection portion further includes an Au layer or a NiAu layer on one side in the thickness direction and the other side in the thickness direction. According to such an anisotropic conductive sheet, since the oxidation of the connection portion can be suppressed, the durability is further excellent. The present invention [11] includes the anisotropic conductive sheet according to any one of [1] to [10], wherein the connection portion is formed of a metal. According to such an anisotropic conductive sheet, since the conductivity is excellent, the inspection sensitivity can be improved or the distance between the connection portions can be reduced. The present invention [12] includes the anisotropic conductive sheet according to any one of [1] to [11], and has a thickness of 100 μm or less. According to such an anisotropic conductive sheet, since it is easy to be flexible in the thickness direction, it is possible to easily follow the shape or warpage of the device under inspection. Therefore, inspections at lower pressures can be performed. The present invention [13] includes the anisotropic conductive sheet according to any one of [1] to [12], and further includes a thickness direction side and another thickness direction side of the anisotropic conductive portion. An elastic layer on at least one of the sides, and the elastic layer includes an insulating elastic portion having a third opening portion penetrating in the thickness direction, and a conductive property filled in the third opening portion and containing conductive particles and resin Elastic section. According to such an anisotropic conductive sheet, even when unevenness occurs in the height of a plurality of terminals of the device under inspection, it is possible to correspond to when the device under inspection is pressed against the anisotropic conductive sheet The height of these terminals compresses or deforms the elastic layer. As a result, even when the heights of the plurality of terminals are uneven, the inspection can be surely performed. In addition, the elastic layer absorbs excessive pressure from the device under inspection and prevents direct contact between the connection portion and the device under inspection. Therefore, durability is further excellent. The present invention [14] includes the anisotropic conductive sheet according to any one of [1] to [12], in which a first recessed portion is formed on one side of a thickness direction of the connection portion, and further includes filling the first recessed portion. It also contains conductive particles and a conductive elastic portion of a resin. According to such an anisotropic conductive sheet, since the first recessed portion is filled with a conductive elastic portion, even when the height of a plurality of terminals of the device under test is uneven, the device under test can be used. When the anisotropic conductive sheet is pressed, the conductive elastic portion is compressed or deformed in accordance with the height of the terminals. As a result, when the heights of the plurality of terminals are uneven, the inspection can be surely performed. In addition, the conductive elastic portion absorbs excessive pressure from the device under inspection and prevents direct contact between the connection portion and the device under inspection. Therefore, durability is further excellent. The present invention [15] is provided with the anisotropic conductive sheet according to [14], wherein the volume ratio of the conductive elastic portion to the volume of the second recessed portion formed on one side of the thickness direction of the anisotropic conductive portion is It is 20% or more and 200% or less. According to such an anisotropic conductive sheet, even when the heights of a plurality of terminals provided in an inspection device or the like are uneven, inspection can be performed more reliably. In addition, since the conductive elastic portion can surely relax the pressure or impact on the anisotropic conductive portion, the durability is further improved. [Effects of the Invention] The anisotropic conductive sheet according to the present invention is excellent in durability because it can prevent the connection portion from falling off even if it is used repeatedly.

於圖1中，紙面上下方向為前後方向(第1方向)，且紙面下側為前側(第1方向一側)，紙面上側為後側(第1方向另一側)。又，紙面左右方向為左右方向(第2方向)，且紙面左側為左側(第2方向一側)，紙面右側為右側(第2方向另一側)。又，紙面紙厚方向為上下方向(厚度方向、第3方向)，且紙面近前側為上側(厚度方向一側、第3方向一側)，紙面裏側為下側(厚度方向另一側、第3方向另一側)。具體而言，依據各圖之方向箭頭。 ＜第1實施形態＞ 參照圖1～圖3，對作為本發明之各向異性導電性片材之第1實施形態之各向異性導電性片材1進行說明。 如圖1所示，各向異性導電性片材1具有於面方向(前後方向及左右方向)上延伸之俯視大致矩形之平板形狀。各向異性導電性片材1具備複數個各向異性導電部2。 複數個各向異性導電部2以於前後方向及左右方向上整齊排列之方式鄰接配置於各向異性導電性片材1之俯視大致中央部。具體而言，各向異性導電性片材1除周端部以外，僅由複數個各向異性導電部2所形成。換言之，各向異性導電性片材1係由相連之複數個各向異性導電部2形成。 如圖2所示，複數個各向異性導電部2分別具備絕緣層50及作為連接部之金屬連接部5。絕緣層50具有將絕緣層50於上下方向(厚度方向)上貫通之開口部(後述之基底開口部6及蓋開口部7)。金屬連接部50配置於絕緣層50之開口部，金屬連接部5之上表面(厚度方向一面)之一部分(周端面)及周側面係由絕緣層50被覆。 具體而言，絕緣層50具備作為第1絕緣部之基底絕緣層3及作為第2絕緣部之覆蓋絕緣層4。 基底絕緣層3具有俯視大致矩形狀之平板形狀，配置於各向異性導電部2之下側。基底絕緣層3之下表面(厚度方向另一面)露出。基底絕緣層3具備作為第1開口部之基底開口部6。 基底開口部6於上下方向上貫通基底絕緣層3，形成為俯視大致圓形狀。基底開口部6具有開口截面積隨著朝向下側而變小之錐形形狀。即，基底開口部6朝向下側縮小直徑。 基底絕緣層3係由例如聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、丙烯酸系樹脂、聚醚樹脂、腈樹脂、聚醚碸樹脂、聚對苯二甲酸乙二酯樹脂、聚萘二甲酸乙二酯樹脂、聚氯乙烯樹脂等合成樹脂所形成，較佳為由聚醯亞胺樹脂所形成。 基底開口部6之下端之開口之直徑L1例如為5 μm以上，較佳為15 μm以上，又，例如為100 μm以下，較佳為50 μm以下。 基底絕緣層3之下表面與基底開口部6之斜面(傾斜面)所成之角度(傾斜角θ)例如為30°以上，較佳為45°以上，又，例如為80°以下，較佳為65°以下。若傾斜角θ為上述範圍，則耐久性更進一步優異。又，可使連接部間間距(後述)更微細化。 基底絕緣層3之厚度(上下方向長度)T1例如為3 μm以上，較佳為5 μm以上，又，例如為30 μm以下，較佳為18 μm以下。 覆蓋絕緣層4具有俯視大致矩形狀之平板形狀，配置於基底絕緣層3之上側。即，覆蓋絕緣層4以其下表面與基底絕緣層3之上表面接觸之方式配置於基底絕緣層3之上表面。覆蓋絕緣層4之上表面露出。 覆蓋絕緣層4具備作為第2開口部之蓋開口部7。蓋開口部7於上下方向上貫通覆蓋絕緣層4，形成為俯視大致圓形狀。 蓋開口部7具備區劃出蓋開口部7之上側之上側蓋開口部8及區劃出蓋開口部7之下側之下側蓋開口部9。 上側蓋開口部8形成為俯視大致圓形狀，且形成為俯視大致圓形且側剖視大致矩形狀。即，上側蓋開口部8形成為大致圓柱狀。 下側蓋開口部9形成為俯視大致圓形且側剖視大致矩形狀。即，下側蓋開口部9形成為大致圓柱狀。下側蓋開口部9於下側與上側蓋開口部8連通，於下側與基底開口部6連通。 下側蓋開口部9之上端之開口大於上側蓋開口部8之下端之開口，下側蓋開口部9之下端之開口大於上側蓋開口部8之上端及下端之開口、以及基底開口部6之上端之開口。下側蓋開口部9之上下方向長度長於上側蓋開口部8之上下方向長度。 覆蓋絕緣層4係由與上文關於基底絕緣層3敍述之上述合成樹脂相同之合成樹脂所形成，較佳為由聚醯亞胺樹脂所形成。 上側蓋開口部8之上端或下端之開口之直徑L2例如為5 μm以上，較佳為15 μm以上，又，例如為100 μm以下，較佳為50 μm以下。上側蓋開口部8之上下方向長度T3例如為1 μm以上，較佳為3 μm以上，又，例如為20 μm以下，較佳為10 μm以下。 下側蓋開口部9之上端或下端之開口之直徑(即，金屬導體部10之直徑)L3例如為15 μm以上，較佳為21 μm以上，又，例如為190 μm以下，較佳為180 μm以下，更佳為70 μm以下，進而較佳為56 μm以下。下側蓋開口部9之上下方向長度T4例如為2 μm以上，較佳為3 μm以上，又，例如為25 μm以下，較佳為18 μm以下。 覆蓋絕緣層4之厚度T2例如為3 μm以上，較佳為6 μm以上，又，例如為45 μm以下，較佳為28 μm以下。 金屬連接部5配置於基底開口部6及蓋開口部7。金屬連接部5具備金屬導體部10、凸塊部11及鍍覆層12。 金屬導體部10配置於基底開口部6及蓋開口部7之內部。金屬導體部10具備第1導體部13、第2導體部14及第3導體部15。 第1導體部13配置於基底開口部6之內部。即，第1導體部13填充於基底開口部6。具體而言，第1導體部13以埋設於基底開口部6之整體之方式填充於基底開口部6。第1導體部13以與基底開口部6之外形相同之方式形成，第1導體部13之下表面與基底絕緣層3之下表面為同一平面。 第2導體部14配置於第1導體部13之上側，且配置於蓋開口部7之內部。即，第2導體部14填充於蓋開口部7。具體而言，第2導體部14以埋設於下側蓋開口部9之俯視大致中央部之方式填充於蓋開口部7，另一方面，未填充於上側蓋開口部8。 第2導體部14形成為大致圓柱狀，其俯視外形與第1導體部13之上表面之俯視外形、即基底開口部6之上端之開口之俯視外形一致。又，第2導體部14之上下方向長度與下側蓋開口部9之上下方向長度一致。 第2導體部14以第2導體部14之下端緣與第1導體部13之上端緣相連之方式於上下方向上與第1導體部13一體地相連。 第3導體部15配置於第2導體部14之周側方，且配置於蓋開口部7之內部。即，第3導體部15填充於蓋開口部7。具體而言，第3導體部15以埋設於下側蓋開口部9之俯視外周緣之方式填充於蓋開口部7，另一方面，未填充於上側蓋開口部8。又，第3導體部15以與第2導體部14一起埋設於下側蓋開口部7之整體之方式填充於蓋開口部7。 第3導體部15形成為俯視大致圓環形狀且側剖視大致矩形狀。第3導體部15以第3導體部15之內周緣與第2導體部14之周緣相連之方式於徑向(前後方向及左右方向)上與第2導體部14一體地相連。第3導體部15之內周緣於俯視時與基底開口部6之上端之開口一致，第3導體部15之外周緣於俯視時與下側蓋開口部9一致。又，第3導體部15之下表面與基底絕緣層3之上表面接觸。 於金屬導體部10中，覆蓋絕緣層4被覆金屬導體部10之上表面(厚度方向一面)及周側面(徑向側面、正交方向側面)。具體而言，覆蓋絕緣層4被覆第3導體部15之上表面之全部、及第3導體部15之外周側面之全部。又，基底絕緣層3被覆第3導體部15之下表面(厚度方向另一面)之整面及第1導體部13之周側面(斜面)之整面。 覆蓋絕緣層4被覆金屬導體部10之上表面之徑向長度(正交方向長度)L4例如為1 μm以上，較佳為3 μm以上，又，例如為20 μm以下，較佳為10 μm以下。若上述長度L4為上述範圍，則覆蓋絕緣層4可更確實地固定第2導體部14及第3導體部15，因此耐久性更進一步優異。 基底絕緣層3被覆第3導體部15之下表面之徑向長度(即，第3導體部15之徑向長度)L5例如為1 μm以上，較佳為5 μm以上，又，例如為50 μm以下，較佳為15 μm以下。若上述長度L5為上述範圍，則基底絕緣層3可更確實地支持第3導體部15，因此耐久性更進一步優異。 作為金屬導體部10之材料，例如可列舉銅、銀、金、鎳或含有其等之合金等金屬材料，較佳可列舉銅。 凸塊部(突起部)11具備第1凸塊16及第2凸塊17。 第1凸塊16配置於金屬連接部5之下側。具體而言，第1凸塊16以被覆第1導體部13之下表面之整面及基底絕緣層3之下表面之一部分之方式配置於第1導體部13及基底絕緣層3之下側。藉此，第1凸塊16堵住基底開口部6之下端，保護第1導體部13之下表面。 第1凸塊16之下表面以呈向下側凸起之剖面圓弧狀突出之方式形成，第1凸塊16之上表面以成為平坦之方式形成。 第2凸塊17配置於金屬連接部5之上側。具體而言，第2凸塊17以被覆第2導體部14之上表面全部之方式配置於第2導體部14及覆蓋絕緣層4之上側。藉此，第2凸塊17堵住蓋開口部7之上端，保護第2導體部14之上表面。 第2凸塊17之上表面以呈向上側凸起之剖面圓弧狀突出之方式形成，第2凸塊17之下表面以成為平坦之方式形成。 作為凸塊部11之材料，例如可列舉銅、銀、金、鎳或含有其等之合金、焊料等金屬材料。 鍍覆層12具備第1鍍覆層18及第2鍍覆層19。 第1鍍覆層18配置於第1凸塊16。具體而言，第1鍍覆層18以被覆第1凸塊16之下表面整面之方式配置於第1凸塊16之下側。 第2鍍覆層19配置於第2凸塊17。具體而言，第2鍍覆層19以被覆第2凸塊17之上表面整面之方式配置於第2凸塊17之上側。 第1鍍覆層18及第2鍍覆層19分別可為單層，亦可為2層以上之複層。 作為鍍覆層12，例如可列舉Au層(單層之情形)、NiAu層(2層之情形)等。藉此，由於可抑制金屬連接部5之氧化，故而耐久性更進一步優異。 鍍覆層12之厚度(每一單層)分別例如為0.01 μm以上，較佳為0.05 μm以上，又，例如為70 μm以下，較佳為50 μm以下，更佳為12 μm以下，進而較佳為8 μm以下。 各向異性導電部2於側剖視圖中，關於在上下方向上通過基底開口部6之徑向之中心點之軸(圖2所示之假想線)而對稱。換言之，各向異性導電部2於側剖視圖中左右對稱。 一各向異性導電部2之基底開口部6之正交方向中心點與鄰接之另一各向異性導電部2之基底開口部6之徑向中心點的距離L6(連接部間間距)例如為30 μm以上，較佳為40 μm以上，又，例如為200 μm以下，較佳為80 μm以下，更佳為60 μm以下。若連接部間間距L6為上述範圍內，則金屬連接部5間彼此之間隔充分小，因此可進行更微細化之被檢查裝置20之檢查。 各向異性導電性片材1之厚度T5、即自各向異性導電部2之最上端至最下端為止之上下方向長度例如為100 μm以下，較佳為50 μm以下，更佳為40 μm以下，又，例如為10 μm以上。若各向異性導電性片材1之厚度為上述上限以下，則容易於上下方向上可撓，因此可容易地追隨被檢查裝置之形狀或翹曲。因此，可進行更低壓下之檢查。 該各向異性導電性片材1例如可藉由依序實施如下步驟而獲得：形成具有基底開口部6之基底絕緣層3之基底形成步驟、形成金屬連接部5之連接部形成步驟、形成具有蓋開口部7之覆蓋絕緣層4之蓋形成步驟、形成凸塊部11之凸塊形成步驟、及形成鍍覆層12之鍍覆步驟。 於基底形成步驟中，例如塗佈感光性清漆並加以乾燥後，以具有基底開口部6之圖案進行曝光及顯影。其後，視需要實施加熱硬化。 於金屬部形成步驟中，例如藉由加成法、減成法等公知之形成配線之圖案化法，形成金屬連接部5。 於蓋形成步驟中，例如塗佈感光性清漆並加以乾燥後，以具有蓋開口部7之圖案進行曝光及顯影。其後，視需要實施加熱硬化。 作為凸塊形成步驟，例如可列舉電解鍍覆法、無電解鍍覆法、配置焊料球之方法、焊料膏印刷法、射注法(injection method)等公知之方法。 作為鍍覆步驟，例如可列舉電解鍍覆法、無電解鍍覆法等公知之鍍覆方法。 而且，該各向異性導電性片材1係用以將被檢查裝置20與檢查裝置21相互電性連接。 具體而言，準備具備複數個端子22之被檢查裝置20及具備複數個檢查探針23之檢查裝置21。作為被檢查裝置20，可列舉半導體元件、印刷電路基板等。作為檢查裝置21，可列舉探針測試機、印刷基板檢查裝置等公知或市售之檢查裝置。 繼而，如圖3所示，使被檢查裝置20之端子22與金屬連接部5之上表面、即第2凸塊17之上表面接觸，另一方面，使檢查裝置21之檢查探針23與金屬連接部5之下表面、即第1凸塊16之下表面接觸。 其後，可藉由檢查裝置21之作動，對被檢查裝置20實施導通檢查等功能檢查。 再者，各向異性導電性片材1係不包含被檢查裝置20及檢查裝置21，各向異性導電性片材1本身以單個零件流通，於產業上可利用之器件。 而且，該各向異性導電性片材1具備複數個各向異性導電部2，複數個各向異性導電部2之各者具備具有基底開口部6之基底絕緣層3、具有蓋開口部7且配置於基底絕緣層3之上側之覆蓋絕緣層4、及金屬連接部5。又，金屬連接部5具備：第1導體部13，其填充於基底開口部6；第2導體部14，其與第1導體部13之上側相連，填充於蓋開口部7；及第3導體部15，其於徑向上與第2導體部14相連，填充於蓋開口部7。又，覆蓋絕緣層4被覆第3導體部15之上表面及外周側面。 因此，第1導體部13、第2導體部14及第3導體部15相連，第3導體部15之上表面及外周側面由覆蓋絕緣層4被覆。因此，第3導體部15由覆蓋絕緣層4固定。於被檢查裝置20之檢查時，即便第1導體部13及第2導體部14由被檢查裝置20及檢查裝置21自上下方向兩側朝向內側加壓，亦可抑制金屬連接部5之脫落。其結果為，耐久性優異。 又，該各向異性導電性片材1可藉由公知之形成微細配線等之圖案化方法形成金屬連接部5(第1導體部13、第2導體部14、第3導體部15)，因此可使連接部間間距L6變小。因此，可檢查更微細之被檢查裝置20。 又，基底開口部6具有開口截面積隨著自上側朝向下側而變小之錐形形狀。 因此，第1導體部13不易自基底開口部6向下側脫落。因此，耐久性更進一步優異。 又，第2導體部14之上表面位於較覆蓋絕緣層4之上表面更靠下側。 因此，第2導體部14由於完全收容於覆蓋絕緣層4之內部，故而不易自覆蓋絕緣層4脫落。因此，耐久性更進一步優異。 又，各向異性導電部2於側剖視圖中關於在上下方向上通過基底開口部6之徑向中心點之軸而對稱。 因此，第1導體部13之徑向中心點與第2導體部14之徑向中心點於徑向上位於同一位置。因此，於檢查被檢查裝置20之端子22及與其對應之檢查裝置21之檢查探針23時，容易調整相互之位置。 又，金屬連接部5進而具備設置於第1導體部13之下側之第1凸塊16及配置於第2導體部14之上側之第2凸塊17。 因此，藉由使第1凸塊16及第2凸塊17與被檢查裝置20及檢查裝置21接觸，可實施檢查。因此，可進行更簡易之檢查。 又，金屬連接部5係由金屬形成。即，金屬導體部10、凸塊部11及鍍覆層12係由金屬形成。 因此，由於導電性優異，故而可提高檢查感度或縮小連接部間間距。 ＜第1實施形態之變化例＞ 參照圖4～圖9，對各向異性導電性片材1之第1實施形態之變化例進行說明。再者，於變化例中，對與上述圖2等所示之實施形態相同之構件標註相同之符號，並省略其說明。 (1)於圖2所示之實施形態中，基底開口部6形成為開口截面積隨著自上側朝向下側而變小之錐形形狀，但例如亦可如圖4所示，基底開口部6形成為於上下方向上開口截面積均勻之圓柱形狀。 即，於圖4所示之實施形態中，基底開口部6形成為俯視大致圓形狀且側剖視大致矩形狀。 於圖4所示之各向異性導電性片材1中，亦可發揮與圖2所示之一實施形態相同之作用效果。就金屬導體部10更不易脫落、耐久性優異之觀點而言，較佳可列舉圖2所示之一實施形態。 (2)於圖2所示之實施形態中，第1導體部13以埋設於基底開口部6之整體之方式填充於基底開口部6，但例如亦可如圖5所示，第1導體部13以僅埋設於基底開口部6之一部分之方式填充於基底開口部6。 即，於圖5所示之實施形態中，第1導體部13之下表面位於較基底絕緣層3之下表面更靠上側。 於圖5所示之各向異性導電性片材1中，亦可發揮與圖2所示之一實施形態相同之作用效果。就金屬導體部10更不易脫落、耐久性優異之觀點而言，較佳可列舉圖2所示之一實施形態。 (3)於圖2所示之實施形態中，金屬導體部10之上表面平坦，但例如亦可如圖6所示，於金屬導體部10之上表面形成有金屬導體凹部30。 即，於圖6所示之實施形態中，第2導體部14於其上表面具有朝向下側凹陷之金屬導體凹部30。金屬導體凹部30之底面為大致俯視大致矩形狀，以成為平坦之方式形成。 於圖6所示之各向異性導電性片材1中，亦可發揮與圖2所示之一實施形態相同之作用效果。 (4)於圖6所示之實施形態中，基底開口部6形成為開口截面積隨著自上側朝向下側而變小之錐形形狀，但例如亦可如圖7所示，基底開口部6形成為開口截面積隨著自上側朝向下側而變小，於其上下方向中途，開口截面積隨著自下側朝向上側而變小之錐形形狀。 即，於圖7所示之實施形態中，基底開口部6具備：上側基底開口部31，其形成為開口截面積隨著自上側朝向下側而變小之錐形形狀；及下側基底開口部32，其形成為開口截面積隨著自上側朝向下側而變大之錐形形狀。 於圖7所示之實施形態中，基底開口部6之開口截面積最小之部位之開口之直徑L7例如為3 μm以上，較佳為10 μm以上，更佳為15 μm以上，又，例如為100 μm以下，較佳為50 μm以下。 又，於圖7所示之實施形態中，亦可如假想線所示，基底絕緣層3具備具有上側基底開口部31之上側基底絕緣部及具有下側基底開口部32之下側基底絕緣部。 於圖7所示之各向異性導電性片材1中，亦可發揮與圖2或圖6所示之一實施形態相同之作用效果。 (5)於圖2所示之實施形態中，上側蓋開口部8形成為側剖視大致矩形狀，但例如亦可如圖8所示，上側蓋開口部8形成為開口截面積隨著朝向下側而變小之錐形形狀。即，上側蓋開口部8、上側蓋開口部8朝向下側縮小直徑。 於圖8所示之各向異性導電性片材1中，亦可發揮與圖2所示之一實施形態相同之作用效果。 (6)於圖2、圖4～圖8所示之實施形態中，金屬連接部5之最下部或最上部於側視時較基底絕緣層3之下表面或覆蓋絕緣層4之上表面更突出，但例如亦可如圖9所示，金屬連接部5之下表面或上表面於側視時與基底絕緣層3之下表面或覆蓋絕緣層4之上表面設為同一平面。 即，於圖9所示之實施形態中，第1凸塊16及第1鍍覆層18填充於基底開口部6，第1鍍覆層18之下表面與基底絕緣層3之下表面成為同一平面。又，第2凸塊17及第2鍍覆層19填充於蓋開口部7，第2鍍覆層19之上表面與覆蓋絕緣層4之上表面成為同一平面。 於圖9所示之各向異性導電性片材1中，亦可發揮與圖2、圖4～圖8所示之一實施形態相同之作用效果。就利用凸塊之對被檢查裝置20及檢查裝置21之接觸(導通)之容易性而言，較佳可列舉圖2、圖4～圖8所示之實施形態。 (7)於圖2、圖4～圖9所示之實施形態中，金屬連接部5具備凸塊部11，但例如亦可如圖10～圖16所示，金屬連接部5不具備凸塊部11。 於圖10～圖16所示之實施形態中，於鍍覆層12中，第1鍍覆層18及第2鍍覆層19分別包含2層。 即，第1鍍覆層18具備配置於金屬導體部10之下表面之第1內側鍍覆層18a及配置於第1內側鍍覆層18a之下表面之第1外側鍍覆層18b。第2鍍覆層19具備配置於金屬導體部10之上表面之第2內側鍍覆層19a及配置於第2內側鍍覆層19a之上表面之第2外側鍍覆層19b。 作為各鍍覆層(18a、18b、19a、19b)，例如可列舉Au層、Ni層等。較佳為第1內側鍍覆層18a及第2內側鍍覆層19a為Ni層，第1外側鍍覆層18b及第2外側鍍覆層19b為Au層。藉此，可提高Au層與複數個端子22之導通性，並且抑制Au層與金屬導體部10之擴散。因此，由於可更進一步長期地抑制金屬導體部10之氧化，故而耐久性更進一步優異。 各鍍覆層(18a、18b、19a、19b)之厚度分別例如為0.01 μm以上，較佳為0.05 μm以上，又，例如為70 μm以下，較佳為50 μm以下，更佳為12 μm以下，進而較佳為8 μm以下。 該等中，尤其於圖11～圖16所示之實施形態中，於金屬連接部5之上表面形成有作為第1凹部之金屬連接凹部35。即，金屬連接部5於其上表面具有朝向下側凹陷之金屬連接凹部35。金屬連接凹部35之底面為大致俯視大致矩形狀，以成為平坦之方式形成。 藉此，於各向異性導電部2之上表面形成有作為第2凹部之片材凹部36。片材凹部36包含金屬連接凹部35，進而包含與金屬連接凹部35之上側連通之覆蓋絕緣層4之開口部。 金屬連接凹部35之底面之直徑L8例如為3 μm以上，較佳為5 μm以上，又，例如為80 μm以下，較佳為40 μm以下。 金屬連接凹部35之深度(上下方向長度)D1例如為3 μm以上，較佳為5 μm以上，又，例如為30 μm以下，較佳為20 μm以下。 片材凹部36之深度D2例如為5 μm以上，較佳為8 μm以上，又，例如為60 μm以下，較佳為40 μm以下。 尤其於圖12～13所示之實施形態中，基底開口部6形成為開口截面積隨著自上側朝向下側而變小，於其上下方向中途，開口截面積隨著自下側朝向上側而變小之錐形形狀。 即，於圖12～13所示之實施形態中，如參照圖7所示，基底開口部6具備：上側基底開口部31，其形成為開口截面積隨著自上側朝向下側而變小之錐形形狀；及下側基底開口部32，其形成為開口截面積隨著自上側朝向下側而變大之錐形形狀。即，基底開口部6具有複數個(2個)錐形形狀。 於各向異性導電部2之下表面形成有下側片材凹部37，下側片材凹部37之深度D3與片材凹部36之深度D2相同。 於圖12所示之實施形態中，上側蓋開口部8形成為開口截面積均勻之圓柱形狀，於圖13所示之實施形態中，上側蓋開口部8形成為開口截面積隨著自下側朝向上側而變大之錐形形狀。 尤其於圖14～圖15所示之實施形態中，覆蓋絕緣層4被覆第2導體部14及第3導體部15。具體而言，覆蓋絕緣層4將第2導體部14之上表面之周端部(傾斜面)、第3導體部15之上表面、及第3導體部15之外周側面整體地被覆。 於圖14所示之實施形態中，基底開口部6形成為開口截面積隨著自上側朝向下側而變小之錐形形狀，於圖15所示之實施形態中，基底開口部6形成為於上下方向上開口截面積均勻之圓柱形狀。 尤其，於圖16所示之實施形態中，第1導體部13以埋設於基底開口部6之一部分(下部)之方式填充於基底開口部6。具體而言，第1導體部13之中央部之上表面位於較基底絕緣層3之上表面更靠下側，另一方面，第1導體部13之下表面與基底絕緣層3之下表面為同一平面。第2導體部14形成為內部為空腔之大致圓筒狀。 於圖10～圖16所示之各向異性導電性片材1中，亦可發揮與圖2、圖4～圖8所示之一實施形態相同之作用效果。就利用凸塊之對被檢查裝置20及檢查裝置21之接觸(導通)之容易性而言，較佳可列舉圖2、圖4～圖8所示之實施形態。 (8)於圖2、圖4～圖16所示之實施形態中，金屬連接部5具備凸塊部11及鍍覆層12之至少一者，但例如雖未圖示，金屬連接部5亦可不具備凸塊部11及鍍覆層12之兩者。 即，金屬連接部5亦可包含金屬導體部10。 於該各向異性導電性片材1中，亦可發揮與圖2、圖4～圖16所示之一實施形態相同之作用效果。就對被檢查裝置20及檢查裝置21之接觸(導通)之容易性、及耐久性之觀點而言，較佳可列舉圖2、圖4～圖16所示之實施形態。 (9)於圖2、圖4～圖16所示之實施形態中，雖未圖示出基底絕緣層3與覆蓋絕緣層4之邊界，但例如於基底絕緣層3及覆蓋絕緣層4由相互相同種類之材料(例如聚醯亞胺樹脂)形成之情形時，不存在基底絕緣層3(第1絕緣部)與覆蓋絕緣層4(第2絕緣部)之邊界，而一體地形成基底絕緣層3及覆蓋絕緣層4。關於圖7等所示之基底絕緣層3內部之邊界(虛線)亦相同。再者，該情況關於後述之圖17～圖24所示之第2～第3實施形態及其變化例亦相同。 ＜第2實施形態＞ 參照圖17，對作為本發明之各向異性導電性片材之第2實施形態之各向異性導電性片材1進行說明。再者，於第2實施形態中，對與第1實施形態相同之構件標註相同之符號，並省略其說明。 如圖17所示，第2實施形態之各向異性導電性片材1具備複數個各向異性導電部2及配置於複數個各向異性導電部2之上側之第1彈性層40。 第1彈性層40具有於面方向上延伸之俯視大致矩形之平板形狀。第1彈性層40具備絕緣性彈性部41及複數個導電性彈性部42。 絕緣性彈性部41具有於面方向上延伸之俯視大致矩形之平板形狀。絕緣性彈性部41以於面方向上跨越複數個各向異性導電部2之方式配置於複數個各向異性導電部2上。具體而言，絕緣性彈性部41以其下表面與金屬連接部5之上表面(第2鍍覆層19之上表面)及覆蓋絕緣層4之上表面接觸之方式配置。 絕緣性彈性部41具備複數個作為第3開口部之彈性層開口部43。 複數個彈性層開口部43係對應於複數個各向異性導電部2之金屬連接部5而形成。即，複數個彈性層開口部43係以與複數個金屬連接部5一對一對應且於前後方向及左右方向上整齊排列之方式鄰接配置，於上下方向上投影時，彈性層開口部43包含於金屬連接部5。彈性層開口部43於上下方向上貫通第1彈性層40，形成為俯視大致圓形狀之圓筒形狀。 絕緣性彈性部41之硬度例如為25 Hs以上，較佳為35 Hs以上，又，例如為65 Hs以下，較佳為55 Hs以下。藉由將絕緣性彈性部41之硬度設為上述範圍內，第1彈性層40可對應於複數個端子22而更柔軟地變形。 硬度例如可依據JIS K 6253所記載之方法而進行測定。 絕緣性彈性部41例如由橡膠等彈性材料形成。作為橡膠，例如可列舉天然橡膠、聚丁二烯橡膠、聚異戊二烯橡膠、氯丁二烯橡膠、苯乙烯-丁二烯共聚物橡膠、丙烯腈-丁二烯共聚物橡膠、苯乙烯-丁二烯-二烯嵌段共聚物橡膠、苯乙烯-異戊二烯嵌段共聚物等共軛二烯系橡膠及該等之氫化物、例如胺基甲酸酯橡膠、聚酯系橡膠、表氯醇橡膠、聚矽氧橡膠、乙烯-丙烯共聚物橡膠、乙烯-丙烯-二烯共聚物橡膠等。 導電性彈性部42配置於彈性層開口部43內。即，導電性彈性部42填充於彈性層開口部43。導電性彈性部42以其下表面與金屬連接部5之上表面之大致中央部接觸之方式配置。導電性彈性部42之下表面以沿著金屬連接部5之上表面且於上側成為凸狀之方式形成。又，導電性彈性部42之上表面以與絕緣性彈性部41之上表面成為同一平面之方式形成。 導電性彈性部42之硬度例如為30 Hs以上，較佳為40 Hs以上，又，例如為70 Hs以下，較佳為60 Hs以下。藉由將導電性彈性部42之硬度設為上述範圍內，第1彈性層40可對應於複數個端子22而更柔軟地變形。 導電性彈性部42係由含有導電性粒子44及樹脂之導電性樹脂組合物形成。 作為導電性粒子44之材料，例如可列舉鐵、鈷、鎳、金、銀、銅、鈀、銠及該等之合金等金屬等。 導電性粒子44亦可為作為上述金屬之金屬粒子。又，導電性粒子例如亦可為具備作為芯材之非導電性粒子(聚合物粒子、玻璃珠等)及位於該芯材表面之作為上述金屬之殼部的芯殼型粒子。 導電性粒子44之平均粒徑例如為1 μm以上且10 μm以下。 作為樹脂，例如可列舉形成絕緣性彈性部41之彈性材料、形成基底絕緣層3之樹脂等，較佳可列舉橡膠。 導電性彈性部42之直徑(即，彈性層開口部43之直徑)L9例如為30 μm以上，較佳為40 μm以上，又，例如為200 μm以下，較佳為100 μm以下。 第1彈性層40之厚度T6(自絕緣性彈性部41之最下表面至最上表面之上下方向長度)例如為50 μm以上，較佳為100 μm以上，又，例如為2000 μm以下，較佳為1000 μm以下。 第2實施形態之各向異性導電性片材1例如可藉由經由熱壓接或接著劑將第1彈性層40壓接至第1實施形態之各向異性導電性片材1之上表面而製造。又，例如亦可藉由塗佈法等於第1實施形態之各向異性導電性片材1之上表面形成具有彈性層開口部43之絕緣性彈性部41，繼而對彈性層開口部43填充導電性彈性部42。 第2實施形態之各向異性導電性片材1亦可發揮與第1實施形態之各向異性導電性片材1相同之作用效果。 又，於第2實施形態中，各向異性導電性片材1於各向異性導電部2之上側具備具有絕緣性彈性部41及導電性彈性部42之第1彈性層40。因此，即便於被檢查裝置20之複數個端子22之高度(上下方向位置)產生不均之情形時，亦可於將被檢查裝置20按壓至各向異性導電性片材1時，對應於該等端子22之各者之高度而使絕緣性彈性部41及複數個導電性彈性部42壓縮或變形。即，厚度局部地變化。尤其可對應於第1彈性層40之厚度而變化，例如於第1彈性層40之厚度為1000 μm以上之情形時，可使數百μm之厚度變化。其結果為，即便於複數個端子22之高度過度地不均勻之情形時，亦可確實地進行檢查。 又，絕緣性彈性部41及導電性彈性部42吸收來自被檢查裝置20之過度之壓力，並且導電性彈性部42避免金屬連接部5與端子22之直接接觸。因此，耐久性更進一步優異。 ＜第2實施形態之變化例＞ 參照圖18，對各向異性導電性片材1之第2實施形態之變化例進行說明。再者，於變化例中，對與上述圖17所示之實施形態相同之構件標註相同之符號，並省略其說明。 於圖17所示之實施形態中，彈性層僅配置於各向異性導電部2之上側，但例如亦可如圖18所示，彈性層配置於各向異性導電部2之上側及下側。即，圖18所示之各向異性導電性片材1具備複數個各向異性導電部2、配置於複數個各向異性導電部2之上側之第1彈性層40、及配置於複數個各向異性導電部之下側之第2彈性層45。 第2彈性層45具有於面方向上延伸之俯視大致矩形之平板形狀，具備絕緣性彈性部41及複數個導電性彈性部42。第2彈性層45中之絕緣性彈性部41及導電性彈性部42除了配置之位置以外，與第1彈性層40中之絕緣性彈性部41及導電性彈性部42相同。 第2彈性層45中之絕緣性彈性部41以於面方向上跨越複數個各向異性導電部2之方式配置於複數個各向異性導電部2下。具體而言，絕緣性彈性部41以其上表面與金屬連接部5之下表面(第1鍍覆層18之下表面)及覆蓋絕緣層4之下表面接觸之方式配置。又，絕緣性彈性部41具備複數個彈性層開口部43。 第2彈性層45中之導電性彈性部42配置於彈性層開口部43內。即，導電性彈性部42填充於彈性層開口部43。導電性彈性部42以其上表面與金屬連接部5之下表面之大致中央部接觸之方式配置。導電性彈性部42之上表面以沿著金屬連接部5之下表面且成為凹狀之方式形成。又，導電性彈性部42之下表面以與絕緣性彈性部41之下表面成為同一平面之方式形成。 於圖18所示之各向異性導電性片材1中，亦可發揮與圖17所示之一實施形態相同之作用效果。 尤其，圖18所示之各向異性導電性片材1於各向異性導電部2之下側進而具備第2彈性層45。因此，即便於檢查裝置21之複數個檢查探針23之高度產生不均之情形時，亦可於將檢查裝置21按壓至各向異性導電性片材時，對應於該等檢查探針23之各者之高度而使絕緣性彈性部41及複數個導電性彈性部42於上下方向上壓縮。尤其，厚度可對應於第2彈性層45之厚度T6而變化，例如於第2彈性層45之厚度為1000 μm以上之情形時，可壓縮數百μm之厚度。其結果為，即便於檢查探針23之高度不均勻之情形時，亦可確實地進行檢查。 又，第2彈性層45之絕緣性彈性部41及導電性彈性部42吸收來自檢查裝置21之過度之壓力，並且導電性彈性部42避免金屬連接部5與檢查探針23之直接接觸。因此，耐久性更進一步優異。 又，於圖17及圖18所示之實施形態中，第1彈性層40及第2彈性層45之導電性彈性部42以與金屬連接部5一對一對應之方式配置，但例如雖未圖示，亦可於第1彈性層40及第2彈性層45之各者中，複數個導電性彈性部42以對應於1個金屬連接部5之方式配置。即，於1個金屬連接部5之上表面配置有複數個導電性彈性部42，另一方面，於1個金屬連接部5之下表面配置有複數個導電性彈性部42。 ＜第3實施形態＞ 參照圖19～圖24，對作為本發明之各向異性導電性片材之第3實施形態之一實施形態之各向異性導電性片材1進行說明。再者，於第3實施形態中，對與第1實施形態及第2實施形態相同之構件標註相同之符號，並省略其說明。 如圖19～圖24所示，第3實施形態之各向異性導電性片材1具備複數個各向異性導電部2及配置於複數個各向異性導電部2之上側之複數個導電性彈性部42。具體而言，圖19所示之實施形態係圖11所示之各向異性導電性片材1進而具備導電性彈性部42之實施形態，圖20所示之實施形態係圖12所示之各向異性導電性片材1進而具備導電性彈性部42之實施形態，圖21所示之實施形態係圖13所示之各向異性導電性片材1進而具備導電性彈性部42之形態，圖22所示之實施形態係圖14所示之各向異性導電性片材1進而具備導電性彈性部42之實施形態，圖23所示之實施形態係圖15所示之各向異性導電性片材1進而具備導電性彈性部42之實施形態，圖24所示之實施形態係圖16所示之各向異性導電性片材1進而具備導電性彈性部42之實施形態。 於複數個各向異性導電部2中，金屬連接部5分別具備金屬導體部10及鍍覆層12(第1鍍覆層18及第2鍍覆層19)，第1鍍覆層18及第2鍍覆層19為2層構成。即，第1鍍覆層18具備第1內側鍍覆層18a及第1外側鍍覆層18b，第2鍍覆層19具備第2內側鍍覆層19a及第2外側鍍覆層19b。 又，於各向異性導電部2之上表面形成有片材凹部36，於片材凹部36中，於金屬連接部5之上表面形成有金屬連接凹部35。 於第3實施形態中，導電性彈性部42配置於片材凹部36(進而金屬連接凹部35)內。即，導電性彈性部42填充於片材凹部36(進而金屬連接凹部35)內。導電性彈性部42之上表面以與覆蓋絕緣層4之上表面成為同一平面之方式形成。 導電性彈性部42之厚度例如為1 μm以上，較佳為2 μm以上，又，例如為120 μm以下，較佳為90 μm以下。 導電性彈性部42之硬度例如為30 Hs以上，較佳為40 Hs以上，又，例如為70 Hs以下，較佳為60 Hs以下。藉由將導電性彈性部42之硬度設為上述範圍內，導電性彈性部42可對應於複數個端子22而更柔軟地變形。 第3實施形態之各向異性導電性片材1例如可藉由於第1實施形態之各向異性導電性片材1之上表面整面塗佈含有導電性粒子44及樹脂之組合物，繼而利用刮漿板摩擦各向異性導電性片材1之上表面，使組合物移動至片材凹部36而製造。具體而言，可參照日本專利特開2015-26584號公報所記載之製造方法。 第3實施形態之各向異性導電性片材1亦可發揮與第1實施形態之各向異性導電性片材1相同之作用效果。 又，於第3實施形態中，於金屬連接凹部35填充有導電性彈性部42。因此，即便於被檢查裝置20之複數個端子22之高度產生不均之情形時，亦可於將被檢查裝置20按壓至各向異性導電性片材1時，對應於該等端子22之各者之高度而使導電性彈性部42於上下方向上壓縮。尤其，導電性彈性部42對應於其厚度而被壓縮，例如可壓縮數μm之厚度。 其結果為，即便於複數個端子22之高度不均勻之情形時，亦可確實地進行檢查。 又，導電性彈性部42吸收來自被檢查裝置20之壓力，並且避免金屬連接部5與端子22之直接接觸。因此，耐久性更進一步優異。 又，於圖19～圖24所示之實施形態中，導電性彈性部42以其上表面與覆蓋絕緣層4之上表面成為同一平面之方式形成。即，導電性彈性部42以其體積比率相對於片材凹部36之體積成為100%之方式填充。但是，例如雖未圖示，但導電性彈性部42亦可以其上表面成為較覆蓋絕緣層4之上表面更上側或下側之方式形成。於此種情形時，導電性彈性部42之體積比率相對於片材凹部36之體積，例如為20%以上，較佳為50%以上，又，例如為200%以下，較佳為150%以下。 若導電性彈性部42之體積比率為上述範圍內，則即便於被檢查裝置20之複數個端子22之高度不均勻之情形時，亦可確實地進行檢查。又，由於導電性彈性部42可確實地緩和對各向異性導電部2之壓力或衝擊，故而耐久性更進一步優異。 [實施例] 以下例示實施例及比較例，進而具體地說明本發明。再者，本發明並不受任何實施例及比較例限定。以下之記載中使用之調配比率(含有比率)、物性值、參數等具體之數值可替代為上述「用以實施發明之形態」中所記載之與其等對應之調配比率(含有比率)、物性值、參數等相應記載之上限值(定義為「以下」、「未達」之數值)或下限值(定義為「以上」、「超過」之數值)。 實施例1 製作圖1及圖2所示之各向異性導電性片材。 其中，各向異性導電部2以前後方向上100行、左右方向上100行整齊排列地配置，其數量合計10,000個。使用聚醯亞胺樹脂作為基底絕緣層及覆蓋絕緣層之材料，使用銅作為金屬導體部之材料，使用Ni作為凸塊部之材料，使用Au作為鍍覆材料。 又，於圖2中，將L1設為20 μm，將L2設為30 μm，將L3設為40 μm，將L4設為5 μm，將L5設為5 μm，將傾斜角θ設為60°，將連接部間間距L6設為50 μm。 實施例2 於圖2中，將L2變更為36 μm，將L4變更為2 μm，除此以外，以與實施例1相同之方式製造各向異性導電性片材。 實施例3 於圖2中，將L1變更為30 μm，將L5變更為5 μm，將傾斜角θ變更為30°，除此以外，以與實施例1相同之方式製造各向異性導電性片材。此時，為了使鄰接之2個各向異性導電部(金屬導體部10)之距離為與實施例1相同之程度，將連接部間間距L6設為80 μm。 實施例4 製造圖4所示之各向異性導電性片材。即，於基底開口部6中，未設為側剖視大致錐形形狀，而形成為圓柱狀，除此以外，以與實施例1相同之方式製造各向異性導電性片材。又，將L1設為30 μm，將L5設為5 μm。 比較例1 除未形成覆蓋絕緣層以外，以與實施例1相同之方式製造各向異性導電性片材(參照圖25)。 比較例2 將覆蓋絕緣層形成至與金屬連接部5之上表面成為同一平面之高度，除此以外，以與實施例1相同之方式製造各向異性導電性片材(參照假想線所示之圖25)。 (耐久性試驗) 以對各向異性導電部2施加30 g之荷重之方式，將樣品用測定對象重複按壓至各向異性導電部之上表面(第2鍍覆層)。 於實施例1之各向異性導電性片材中，即便將按壓重複50,000次，一個各向異性導電部亦未脫落。 於實施例3之各向異性導電性片材中，於將按壓重複10,000～50,000次之情形時，至少一個各向異性導電部脫落。 於實施例2及4之各向異性導電性片材中，於將按壓重複1,000～10,000次之情形時，至少一個各向異性導電部脫落。 於比較例1～2之各向異性導電部之各向異性導電部中，於按壓次數為1,000次以下之情形時，至少一個各向異性導電部脫落。 (導電性試驗) 將電阻測定計之探針抵接於各向異性導電部之上表面及下表面之各者，測定電阻值。其結果為，可知各實施例及各比較例之電阻值均為1×10^-4 Ω以下，導電性優異。 再者，上述發明係作為本發明例示之實施形態而提出，但其僅為例示，並非限定性地解釋。由該技術領域之業者明確之本發明之變化例包含於後述申請專利範圍內。 [產業上之可利用性] 本發明之各向異性導電性膜可應用於各種工業製品，例如適宜用於對半導體元件或電路基板之導通檢查等。In FIG. 1, the upper and lower directions on the paper surface are the front-back direction (first direction), the lower side on the paper surface is the front side (the first direction side), and the upper side on the paper surface is the rear side (the other side in the first direction). The left-right direction of the paper surface is the left-right direction (second direction), the left side of the paper surface is the left side (the second direction side), and the right side of the paper surface is the right side (the other side of the second direction). The paper thickness direction is the vertical direction (thickness direction, third direction), the front side of the paper surface is the upper side (thickness direction side, the third direction side), and the back side of the paper surface is the lower side (the other side in the thickness direction, the third direction). 3 directions on the other side). Specifically, according to the direction arrow of each figure. <First Embodiment> An anisotropic conductive sheet 1 as a first embodiment of the anisotropic conductive sheet of the present invention will be described with reference to Figs. 1 to 3. As shown in FIG. 1, the anisotropic conductive sheet 1 has a substantially rectangular flat plate shape in plan view extending in a planar direction (front-rear direction and left-right direction). The anisotropic conductive sheet 1 includes a plurality of anisotropic conductive portions 2. The plurality of anisotropic conductive portions 2 are arranged adjacent to each other at a substantially central portion in a plan view of the anisotropic conductive sheet 1 so as to be aligned in the front-rear direction and the left-right direction. Specifically, the anisotropic conductive sheet 1 is formed of only a plurality of anisotropic conductive portions 2 except for the peripheral end portion. In other words, the anisotropic conductive sheet 1 is formed of a plurality of anisotropic conductive portions 2 connected to each other. As shown in FIG. 2, the plurality of anisotropic conductive portions 2 each include an insulating layer 50 and a metal connection portion 5 as a connection portion. The insulating layer 50 has openings (a base opening portion 6 and a lid opening portion 7 to be described later) that penetrate the insulating layer 50 in the vertical direction (thickness direction). The metal connection portion 50 is disposed at an opening portion of the insulating layer 50. A portion (peripheral end surface) and a peripheral side surface of the upper surface (one surface in the thickness direction) of the metal connection portion 5 are covered with the insulating layer 50. Specifically, the insulating layer 50 includes a base insulating layer 3 as a first insulating portion and a cover insulating layer 4 as a second insulating portion. The base insulating layer 3 has a flat plate shape that is substantially rectangular in a plan view, and is disposed below the anisotropic conductive portion 2. The lower surface (the other surface in the thickness direction) of the base insulating layer 3 is exposed. The base insulating layer 3 includes a base opening 6 as a first opening. The base opening portion 6 penetrates the base insulating layer 3 in the vertical direction and is formed into a substantially circular shape in plan view. The base opening portion 6 has a tapered shape in which the opening cross-sectional area decreases as it goes downward. That is, the base opening portion 6 is reduced in diameter toward the lower side. The base insulating layer 3 is composed of, for example, polyimide resin, polyimide resin, acrylic resin, polyether resin, nitrile resin, polyether resin, polyethylene terephthalate resin, and polynaphthalene. It is preferably made of a synthetic resin such as ethylene formate resin and polyvinyl chloride resin, and is preferably made of polyimide resin. The diameter L1 of the opening at the lower end of the base opening portion 6 is, for example, 5 μm or more, preferably 15 μm or more, and, for example, 100 μm or less, and preferably 50 μm or less. The angle (inclination angle θ) formed by the lower surface of the base insulating layer 3 and the inclined surface (inclined surface) of the base opening 6 is, for example, 30 ° or more, preferably 45 ° or more, and, for example, 80 ° or less, preferably It is 65 ° or less. When the inclination angle θ is in the above range, the durability is further excellent. In addition, the distance between connecting portions (to be described later) can be made finer. The thickness (length in the vertical direction) T1 of the base insulating layer 3 is, for example, 3 μm or more, preferably 5 μm or more, and, for example, 30 μm or less, and preferably 18 μm or less. The cover insulating layer 4 has a flat plate shape that is substantially rectangular in plan view, and is disposed on the upper side of the base insulating layer 3. That is, the cover insulating layer 4 is arranged on the upper surface of the base insulating layer 3 so that the lower surface thereof contacts the upper surface of the base insulating layer 3. The upper surface of the cover insulating layer 4 is exposed. The cover insulating layer 4 includes a cover opening 7 as a second opening. The cover opening portion 7 penetrates the cover insulating layer 4 in the vertical direction and is formed into a substantially circular shape in plan view. The lid opening portion 7 includes a lid opening portion 8 that partitions the upper side of the lid opening portion 7, and a lid opening portion 9 that partitions the lower side of the lid opening portion 7. The upper cover opening portion 8 is formed in a substantially circular shape in plan view, and is formed in a substantially circular shape in plan view and a substantially rectangular shape in side view. That is, the upper cover opening portion 8 is formed in a substantially cylindrical shape. The lower cover opening portion 9 is formed in a substantially circular shape in a plan view and a substantially rectangular shape in a side view. That is, the lower cover opening portion 9 is formed in a substantially cylindrical shape. The lower cover opening 9 communicates with the upper cover opening 8 on the lower side and communicates with the base opening 6 on the lower side. The opening at the upper end of the lower cover opening 9 is larger than the opening at the lower end of the upper cover opening 9, and the opening at the lower end of the lower cover opening 9 is larger than the openings at the upper and lower ends of the upper cover opening 8 and the base opening 6. Opening at the top. The length in the up-down direction of the lower cover opening portion 9 is longer than the length in the up-down direction of the upper cover opening portion 8. The cover insulating layer 4 is formed of the same synthetic resin as the above-mentioned synthetic resin described above with respect to the base insulating layer 3, and is preferably formed of polyimide resin. The diameter L2 of the opening at the upper end or the lower end of the upper cover opening portion 8 is, for example, 5 μm or more, preferably 15 μm or more, and, for example, 100 μm or less, and preferably 50 μm or less. The length T3 in the up-down direction of the upper cover opening 8 is, for example, 1 μm or more, preferably 3 μm or more, and, for example, 20 μm or less, and preferably 10 μm or less. The diameter of the opening at the upper end or lower end of the lower cover opening portion 9 (that is, the diameter of the metal conductor portion 10) L3 is, for example, 15 μm or more, preferably 21 μm or more, and, for example, 190 μm or less, and preferably 180 μm or less, more preferably 70 μm or less, and even more preferably 56 μm or less. The length T4 in the up-down direction of the lower cover opening portion 9 is, for example, 2 μm or more, preferably 3 μm or more, and, for example, 25 μm or less, and preferably 18 μm or less. The thickness T2 of the cover insulating layer 4 is, for example, 3 μm or more, preferably 6 μm or more, and, for example, 45 μm or less, and preferably 28 μm or less. The metal connection portion 5 is disposed on the base opening portion 6 and the lid opening portion 7. The metal connection portion 5 includes a metal conductor portion 10, a bump portion 11, and a plating layer 12. The metal conductor portion 10 is disposed inside the base opening portion 6 and the lid opening portion 7. The metal conductor portion 10 includes a first conductor portion 13, a second conductor portion 14, and a third conductor portion 15. The first conductor portion 13 is disposed inside the base opening portion 6. That is, the first conductor portion 13 is filled in the base opening portion 6. Specifically, the first conductor portion 13 is filled in the base opening portion 6 so as to be buried in the entire base opening portion 6. The first conductor portion 13 is formed in the same manner as the outer shape of the base opening portion 6, and the lower surface of the first conductor portion 13 is the same plane as the lower surface of the base insulating layer 3. The second conductor portion 14 is arranged on the upper side of the first conductor portion 13 and is arranged inside the cover opening portion 7. That is, the second conductor portion 14 is filled in the lid opening portion 7. Specifically, the second conductor portion 14 is filled in the cover opening portion 7 so as to be buried in a substantially central portion in plan view of the lower cover opening portion 9, and is not filled in the upper cover opening portion 8. The second conductor portion 14 is formed in a substantially columnar shape, and its planar shape matches the planar shape of the upper surface of the first conductor portion 13, that is, the planar shape of the opening at the upper end of the base opening portion 6. The length of the second conductor portion 14 in the up-down direction matches the length of the lower cover opening portion 9 in the up-down direction. The second conductor portion 14 is integrally connected to the first conductor portion 13 in the vertical direction so that the lower end edge of the second conductor portion 14 is connected to the upper end edge of the first conductor portion 13. The third conductor portion 15 is disposed on the peripheral side of the second conductor portion 14 and is disposed inside the cover opening portion 7. That is, the third conductor portion 15 is filled in the lid opening portion 7. Specifically, the third conductor portion 15 is filled in the cover opening portion 7 so as to be buried in a plan outer periphery of the lower cover opening portion 9, but is not filled in the upper cover opening portion 8. The third conductor portion 15 is filled in the lid opening portion 7 so as to be buried in the entire lower lid opening portion 7 together with the second conductor portion 14. The third conductor portion 15 is formed into a generally annular shape in plan view and a substantially rectangular shape in side view. The third conductor portion 15 is integrally connected to the second conductor portion 14 in a radial direction (front-rear direction and left-right direction) such that an inner peripheral edge of the third conductor portion 15 is connected to a peripheral edge of the second conductor portion 14. The inner peripheral edge of the third conductor portion 15 coincides with the opening at the upper end of the base opening portion 6 in a plan view, and the outer peripheral edge of the third conductor portion 15 coincides with the lower cover opening portion 9 in a plan view. The lower surface of the third conductor portion 15 is in contact with the upper surface of the base insulating layer 3. In the metal conductor portion 10, the covering insulating layer 4 covers the upper surface (one surface in the thickness direction) and the peripheral side surfaces (radial side surfaces, orthogonal side surfaces) of the metal conductor portion 10. Specifically, the covering insulating layer 4 covers the entire upper surface of the third conductor portion 15 and the entire outer peripheral side surface of the third conductor portion 15. In addition, the base insulating layer 3 covers the entire surface of the lower surface (the other surface in the thickness direction) of the third conductor portion 15 and the entire surface of the peripheral side surface (inclined surface) of the first conductor portion 13. The radial length (orthogonal length) L4 of the upper surface of the covering insulating layer 4 covering the metal conductor portion 10 is, for example, 1 μm or more, preferably 3 μm or more, and, for example, 20 μm or less, and preferably 10 μm or less. . When the length L4 is within the above range, the covering insulating layer 4 can more reliably fix the second conductor portion 14 and the third conductor portion 15, and therefore, the durability is further excellent. The radial length of the bottom insulating layer 3 covering the lower surface of the third conductor portion 15 (that is, the radial length of the third conductor portion 15) L5 is, for example, 1 μm or more, preferably 5 μm or more, and, for example, 50 μm Hereinafter, it is preferably 15 μm or less. When the length L5 is within the above range, the base insulating layer 3 can more surely support the third conductor portion 15, and therefore, the durability is further excellent. Examples of the material of the metal conductor portion 10 include metal materials such as copper, silver, gold, nickel, and alloys containing them, and copper is preferred. The bump portion (projection portion) 11 includes a first bump 16 and a second bump 17. The first bump 16 is disposed below the metal connecting portion 5. Specifically, the first bump 16 is disposed on the lower side of the first conductor portion 13 and the base insulating layer 3 so as to cover the entire surface of the lower surface of the first conductor portion 13 and a portion of the lower surface of the base insulating layer 3. Thereby, the first bump 16 blocks the lower end of the base opening portion 6 and protects the lower surface of the first conductor portion 13. The lower surface of the first bump 16 is formed so as to protrude in an arc shape in a cross section protruding downward, and the upper surface of the first bump 16 is formed so as to be flat. The second bump 17 is arranged on the upper side of the metal connecting portion 5. Specifically, the second bump 17 is disposed on the upper side of the second conductor portion 14 and the cover insulating layer 4 so as to cover the entire upper surface of the second conductor portion 14. Thereby, the second bump 17 blocks the upper end of the cover opening portion 7 and protects the upper surface of the second conductor portion 14. The upper surface of the second bump 17 is formed so as to protrude in an arc shape in a cross section protruding upward, and the lower surface of the second bump 17 is formed so as to be flat. Examples of the material of the bump portion 11 include metal materials such as copper, silver, gold, nickel, an alloy containing the same, and solder. The plating layer 12 includes a first plating layer 18 and a second plating layer 19. The first plating layer 18 is disposed on the first bump 16. Specifically, the first plating layer 18 is disposed on the lower side of the first bump 16 so as to cover the entire lower surface of the first bump 16. The second plating layer 19 is disposed on the second bump 17. Specifically, the second plating layer 19 is disposed on the upper side of the second bump 17 so as to cover the entire upper surface of the second bump 17. Each of the first plating layer 18 and the second plating layer 19 may be a single layer, or may be a multiple layer of two or more layers. Examples of the plating layer 12 include an Au layer (in the case of a single layer) and a NiAu layer (in the case of two layers). Thereby, since the oxidation of the metal connection part 5 can be suppressed, durability is further excellent. The thickness (each single layer) of the plating layer 12 is, for example, 0. 01 μm or more, preferably 0. 05 μm or more, for example, 70 μm or less, preferably 50 μm or less, more preferably 12 μm or less, and even more preferably 8 μm or less. The anisotropic conductive portion 2 is symmetrical in a side cross-sectional view with respect to an axis (an imaginary line shown in FIG. 2) that passes through a radial center point of the base opening portion 6 in the vertical direction. In other words, the anisotropic conductive portion 2 is bilaterally symmetric in a side sectional view. The distance L6 (the distance between the connecting portions) between the center point in the orthogonal direction of the base opening portion 6 of one anisotropic conductive portion 2 and the radial center point of the base opening portion 6 of the other anisotropic conductive portion 2 is, for example, 30 μm or more, preferably 40 μm or more, and, for example, 200 μm or less, preferably 80 μm or less, and more preferably 60 μm or less. If the distance L6 between the connecting portions is within the above range, the interval between the metal connecting portions 5 is sufficiently small, so that the inspection of the inspected device 20 can be performed in a more refined manner. The thickness T5 of the anisotropic conductive sheet 1, that is, the length from the uppermost end to the lowermost end of the anisotropic conductive portion 2 is, for example, 100 μm or less, preferably 50 μm or less, and more preferably 40 μm or less. It is, for example, 10 μm or more. When the thickness of the anisotropically conductive sheet 1 is equal to or less than the above-mentioned upper limit, it is easy to be flexible in the vertical direction, and therefore it is easy to follow the shape or warpage of the device under inspection. Therefore, inspections at lower pressures can be performed. The anisotropic conductive sheet 1 can be obtained, for example, by sequentially performing the following steps: a substrate forming step of forming a base insulating layer 3 having a base opening portion 6, a connection portion forming step of forming a metal connecting portion 5, and a cover having a cover. A cover forming step for covering the insulating layer 4 of the opening portion 7, a bump forming step for forming the bump portion 11, and a plating step for forming the plating layer 12. In the substrate formation step, for example, a photosensitive varnish is applied and dried, and then exposed and developed in a pattern having a substrate opening 6. Thereafter, heat curing is performed if necessary. In the metal portion forming step, the metal connection portion 5 is formed by, for example, a well-known patterning method of forming a wiring such as an addition method or a subtractive method. In the cap forming step, for example, after the photosensitive varnish is applied and dried, exposure and development are performed in a pattern having a cap opening 7. Thereafter, heat curing is performed if necessary. Examples of the bump formation step include known methods such as an electrolytic plating method, an electroless plating method, a method of arranging solder balls, a solder paste printing method, and an injection method. Examples of the plating step include known plating methods such as an electrolytic plating method and an electroless plating method. The anisotropic conductive sheet 1 is used to electrically connect the device to be inspected 20 and the inspection device 21 to each other. Specifically, an inspection device 20 including a plurality of terminals 22 and an inspection device 21 including a plurality of inspection probes 23 are prepared. Examples of the device to be inspected 20 include a semiconductor element, a printed circuit board, and the like. Examples of the inspection device 21 include known or commercially available inspection devices such as a probe tester and a printed circuit board inspection device. Next, as shown in FIG. 3, the terminal 22 of the device under inspection 20 is brought into contact with the upper surface of the metal connection part 5, that is, the upper surface of the second bump 17, and the inspection probe 23 of the inspection device 21 is contacted with The lower surface of the metal connection portion 5, that is, the lower surface of the first bump 16 is in contact. Thereafter, a function test such as a continuity test can be performed on the device under test 20 by the operation of the test device 21. The anisotropically conductive sheet 1 does not include the device to be inspected 20 and the inspection device 21, and the anisotropically conductive sheet 1 itself circulates as a single component and is an industrially usable device. The anisotropic conductive sheet 1 includes a plurality of anisotropic conductive portions 2, each of the plurality of anisotropic conductive portions 2 includes a base insulating layer 3 having a base opening portion 6, a lid opening portion 7 and The cover insulating layer 4 and the metal connection portion 5 are disposed on the upper side of the base insulating layer 3. The metal connection portion 5 includes a first conductor portion 13 filled in the base opening portion 6, a second conductor portion 14 connected to the upper side of the first conductor portion 13 and filled in the lid opening portion 7, and a third conductor. The portion 15 is connected to the second conductor portion 14 in the radial direction and fills the lid opening portion 7. The covering insulating layer 4 covers the upper surface and the outer peripheral side surface of the third conductor portion 15. Therefore, the first conductor portion 13, the second conductor portion 14, and the third conductor portion 15 are connected to each other, and the upper surface and the outer peripheral side surface of the third conductor portion 15 are covered with the cover insulating layer 4. Therefore, the third conductor portion 15 is fixed by the cover insulating layer 4. During the inspection of the device to be inspected 20, even if the first conductor portion 13 and the second conductor portion 14 are pressurized inward from both sides in the vertical direction by the device to be inspected 20 and the inspection device 21, the metal connection portion 5 can be prevented from falling off. As a result, durability is excellent. The anisotropic conductive sheet 1 can form the metal connection portion 5 (the first conductor portion 13, the second conductor portion 14, and the third conductor portion 15) by a known patterning method such as forming a fine wiring. Therefore, The distance L6 between the connecting portions can be reduced. Therefore, it is possible to inspect the finer inspection target device 20. Further, the base opening portion 6 has a tapered shape in which the opening cross-sectional area decreases as it goes from the upper side to the lower side. Therefore, the first conductor portion 13 does not easily fall off from the base opening portion 6 toward the lower side. Therefore, durability is further excellent. The upper surface of the second conductor portion 14 is located lower than the upper surface of the insulating layer 4. Therefore, since the second conductor portion 14 is completely housed inside the covering insulating layer 4, it is difficult to fall off the covering insulating layer 4. Therefore, durability is further excellent. In addition, the anisotropic conductive portion 2 is symmetrical with respect to an axis passing through a radial center point of the base opening portion 6 in the vertical direction in a side sectional view. Therefore, the radial center point of the first conductor portion 13 and the radial center point of the second conductor portion 14 are located at the same position in the radial direction. Therefore, when inspecting the terminals 22 of the inspection device 20 and the inspection probes 23 of the inspection device 21 corresponding thereto, it is easy to adjust the mutual positions. The metal connecting portion 5 further includes a first bump 16 provided on the lower side of the first conductor portion 13 and a second bump 17 provided on the upper side of the second conductor portion 14. Therefore, the inspection can be performed by bringing the first bump 16 and the second bump 17 into contact with the device under inspection 20 and the inspection device 21. Therefore, a simpler inspection can be performed. The metal connecting portion 5 is formed of a metal. That is, the metal conductor portion 10, the bump portion 11, and the plating layer 12 are formed of metal. Therefore, since the electrical conductivity is excellent, the inspection sensitivity can be improved or the distance between the connecting portions can be reduced. <Modification Example of First Embodiment> A modification example of the first embodiment of the anisotropic conductive sheet 1 will be described with reference to FIGS. 4 to 9. In addition, in the modification, the same components as those in the embodiment shown in FIG. 2 and the like are denoted by the same reference numerals, and descriptions thereof are omitted. (1) In the embodiment shown in FIG. 2, the base opening portion 6 is formed in a tapered shape whose opening cross-sectional area decreases as it goes from the upper side to the lower side. However, for example, as shown in FIG. 4, the base opening portion may also be formed. 6 is formed in a cylindrical shape with a uniform opening cross-sectional area in the vertical direction. That is, in the embodiment shown in FIG. 4, the base opening portion 6 is formed into a substantially circular shape in a plan view and a substantially rectangular shape in a side view. In the anisotropically conductive sheet 1 shown in FIG. 4, the same effect as that of the embodiment shown in FIG. 2 can also be exhibited. From the viewpoint that the metal conductor portion 10 is less likely to fall off and has excellent durability, an embodiment shown in FIG. 2 is preferable. (2) In the embodiment shown in FIG. 2, the first conductor portion 13 is filled in the base opening portion 6 so as to be buried in the entirety of the base opening portion 6. However, for example, as shown in FIG. 5, the first conductor portion 13 may be filled. 13 is filled in the base opening portion 6 so as to be buried in only a part of the base opening portion 6. That is, in the embodiment shown in FIG. 5, the lower surface of the first conductor portion 13 is located on the upper side than the lower surface of the base insulating layer 3. In the anisotropically conductive sheet 1 shown in FIG. 5, the same effect as that of the embodiment shown in FIG. 2 can also be exhibited. From the viewpoint that the metal conductor portion 10 is less likely to fall off and has excellent durability, an embodiment shown in FIG. 2 is preferable. (3) In the embodiment shown in FIG. 2, the upper surface of the metal conductor portion 10 is flat. For example, as shown in FIG. 6, a metal conductor recessed portion 30 may be formed on the upper surface of the metal conductor portion 10. That is, in the embodiment shown in FIG. 6, the second conductor portion 14 has a metal conductor recessed portion 30 recessed toward the lower side on its upper surface. The bottom surface of the metal conductor recessed portion 30 is substantially rectangular in a plan view, and is formed so as to be flat. In the anisotropically conductive sheet 1 shown in FIG. 6, the same effect as that of the embodiment shown in FIG. 2 can also be exhibited. (4) In the embodiment shown in FIG. 6, the base opening portion 6 is formed in a tapered shape whose opening cross-sectional area decreases as it goes from the upper side to the lower side. For example, as shown in FIG. 7, the base opening portion 6 is formed in a tapered shape in which the cross-sectional area of the opening becomes smaller as it goes from the upper side to the lower side, and in the middle of the vertical direction, the cross-sectional area of the opening becomes smaller as it goes from the lower side to the upper side. That is, in the embodiment shown in FIG. 7, the base opening portion 6 includes: an upper base opening portion 31 formed in a tapered shape whose opening cross-sectional area decreases as it goes from the upper side to the lower side; and the lower base opening The portion 32 is formed in a tapered shape in which the opening cross-sectional area increases as it goes from the upper side to the lower side. In the embodiment shown in FIG. 7, the diameter L7 of the opening at the portion where the opening cross-sectional area of the base opening portion 6 is the smallest is, for example, 3 μm or more, preferably 10 μm or more, and more preferably 15 μm or more. 100 μm or less, preferably 50 μm or less. In the embodiment shown in FIG. 7, the base insulating layer 3 may include an upper base insulating portion having an upper base opening portion 31 and a lower base insulating portion having a lower base opening portion 32 as shown by an imaginary line. . In the anisotropically conductive sheet 1 shown in FIG. 7, the same effect as that of the embodiment shown in FIG. 2 or FIG. 6 can be exhibited. (5) In the embodiment shown in FIG. 2, the upper cover opening portion 8 is formed in a substantially rectangular shape in side cross-section, but for example, as shown in FIG. 8, the upper cover opening portion 8 may be formed so that the opening cross-sectional area varies with the direction. A tapered shape that becomes smaller on the lower side. That is, the upper cover opening portion 8 and the upper cover opening portion 8 are reduced in diameter toward the lower side. In the anisotropic conductive sheet 1 shown in FIG. 8, the same effect as that of the embodiment shown in FIG. 2 can be exhibited. (6) In the embodiments shown in FIG. 2, FIG. 4 to FIG. 8, the lower part or the upper part of the metal connection part 5 is more than the lower surface of the base insulating layer 3 or the upper surface of the insulating layer 4 when viewed from the side. Protruded, for example, as shown in FIG. 9, the lower surface or upper surface of the metal connecting portion 5 may be the same plane as the lower surface of the base insulating layer 3 or the upper surface of the cover insulating layer 4 when viewed from the side. That is, in the embodiment shown in FIG. 9, the first bump 16 and the first plating layer 18 are filled in the base opening portion 6, and the lower surface of the first plating layer 18 and the lower surface of the base insulating layer 3 are the same. flat. In addition, the second bump 17 and the second plating layer 19 are filled in the lid opening portion 7, and the upper surface of the second plating layer 19 and the upper surface of the covering insulating layer 4 are in the same plane. In the anisotropically conductive sheet 1 shown in FIG. 9, the same effects as those of the embodiment shown in FIGS. 2, 4 to 8 can be exhibited. In terms of the ease of contact (conduction) of the bumps to the inspection device 20 and the inspection device 21, the embodiments shown in Figs. 2, 4 to 8 are preferably mentioned. (7) In the embodiments shown in FIG. 2, FIG. 4 to FIG. 9, the metal connecting portion 5 includes the bump portion 11, but, for example, as shown in FIG. 10 to FIG. 16, the metal connecting portion 5 may not include the bump. Department 11. In the embodiment shown in FIGS. 10 to 16, in the plating layer 12, the first plating layer 18 and the second plating layer 19 each include two layers. That is, the first plating layer 18 includes a first inner plating layer 18 a arranged on the lower surface of the metal conductor portion 10 and a first outer plating layer 18 b arranged on the lower surface of the first inner plating layer 18 a. The second plating layer 19 includes a second inner plating layer 19a disposed on the upper surface of the metal conductor portion 10 and a second outer plating layer 19b disposed on the upper surface of the second inner plating layer 19a. Examples of the plating layers (18a, 18b, 19a, 19b) include Au layers, Ni layers, and the like. Preferably, the first inner plating layer 18a and the second inner plating layer 19a are Ni layers, and the first outer plating layer 18b and the second outer plating layer 19b are Au layers. Thereby, the conductivity between the Au layer and the plurality of terminals 22 can be improved, and the diffusion between the Au layer and the metal conductor portion 10 can be suppressed. Therefore, since the oxidation of the metal conductor portion 10 can be suppressed for a longer period of time, durability is further improved. The thickness of each plating layer (18a, 18b, 19a, 19b) is, for example, 0. 01 μm or more, preferably 0. 05 μm or more, for example, 70 μm or less, preferably 50 μm or less, more preferably 12 μm or less, and even more preferably 8 μm or less. Among these, particularly in the embodiment shown in FIGS. 11 to 16, a metal connection recessed portion 35 as a first recessed portion is formed on the upper surface of the metal connection portion 5. That is, the metal connection portion 5 has a metal connection recessed portion 35 recessed toward the lower side on its upper surface. The bottom surface of the metal connection recessed portion 35 has a substantially rectangular shape in a plan view, and is formed so as to be flat. Thereby, a sheet recessed portion 36 as a second recessed portion is formed on the upper surface of the anisotropic conductive portion 2. The sheet recessed portion 36 includes the metal connection recessed portion 35, and further includes an opening portion of the cover insulating layer 4 which communicates with the upper side of the metal connection recessed portion 35. The diameter L8 of the bottom surface of the metal connection recess 35 is, for example, 3 μm or more, preferably 5 μm or more, and, for example, 80 μm or less, and preferably 40 μm or less. The depth (length in the vertical direction) D1 of the metal connection recess 35 is, for example, 3 μm or more, preferably 5 μm or more, and, for example, 30 μm or less, and preferably 20 μm or less. The depth D2 of the sheet recess 36 is, for example, 5 μm or more, preferably 8 μm or more, and, for example, 60 μm or less, and preferably 40 μm or less. In particular, in the embodiment shown in FIGS. 12 to 13, the base opening portion 6 is formed so that the opening cross-sectional area decreases as it goes from the upper side to the lower side. Reduced cone shape. That is, in the embodiments shown in FIGS. 12 to 13, as shown in FIG. 7, the base opening portion 6 includes an upper base opening portion 31 formed so that the opening cross-sectional area becomes smaller as it goes from the upper side to the lower side. A tapered shape; and a lower base opening portion 32 formed in a tapered shape in which the opening cross-sectional area increases as it goes from the upper side to the lower side. That is, the base opening portion 6 has a plurality of (two) tapered shapes. A lower sheet recessed portion 37 is formed on the lower surface of the anisotropic conductive portion 2. The depth D3 of the lower sheet recessed portion 37 is the same as the depth D2 of the sheet recessed portion 36. In the embodiment shown in FIG. 12, the upper cover opening portion 8 is formed in a cylindrical shape with a uniform opening cross-sectional area. In the embodiment shown in FIG. 13, the upper cover opening portion 8 is formed in such a manner that the opening cross-sectional area increases from the lower side. A tapered shape that becomes larger toward the upper side. In particular, in the embodiment shown in FIGS. 14 to 15, the covering insulating layer 4 covers the second conductor portion 14 and the third conductor portion 15. Specifically, the covering insulating layer 4 integrally covers the peripheral end portion (inclined surface) of the upper surface of the second conductor portion 14, the upper surface of the third conductor portion 15, and the outer peripheral side surface of the third conductor portion 15. In the embodiment shown in FIG. 14, the base opening portion 6 is formed in a tapered shape whose opening cross-sectional area decreases as it goes from the upper side to the lower side. In the embodiment shown in FIG. 15, the base opening portion 6 is formed as A cylindrical shape with a uniform cross-sectional area in the vertical direction. In particular, in the embodiment shown in FIG. 16, the first conductor portion 13 is filled in the base opening portion 6 so as to be buried in a portion (lower portion) of the base opening portion 6. Specifically, the upper surface of the central portion of the first conductor portion 13 is located lower than the upper surface of the base insulating layer 3. On the other hand, the lower surface of the first conductor portion 13 and the lower surface of the base insulating layer 3 are same plane. The second conductor portion 14 is formed in a substantially cylindrical shape with a cavity inside. In the anisotropically conductive sheet 1 shown in FIGS. 10 to 16, the same effects as those of the embodiment shown in FIGS. 2, 4 to 8 can also be exhibited. In terms of the ease of contact (conduction) of the bumps to the inspection device 20 and the inspection device 21, the embodiments shown in Figs. 2, 4 to 8 are preferably mentioned. (8) In the embodiments shown in FIG. 2, FIG. 4 to FIG. 16, the metal connecting portion 5 includes at least one of the bump portion 11 and the plating layer 12, but the metal connecting portion 5 is also not shown, for example. Both of the bump portion 11 and the plating layer 12 may not be provided. That is, the metal connection portion 5 may include the metal conductor portion 10. This anisotropic conductive sheet 1 can also exhibit the same effects as those of the embodiment shown in FIGS. 2, 4 to 16. From the viewpoints of the ease of contact (conduction) and durability of the inspected device 20 and the inspected device 21, the embodiments shown in Figs. 2, 4 to 16 are preferable. (9) In the embodiments shown in FIGS. 2, 4 to 16, although the boundary between the base insulating layer 3 and the cover insulating layer 4 is not shown, for example, the base insulating layer 3 and the cover insulating layer 4 are mutually When the same kind of material (such as polyimide resin) is formed, there is no boundary between the base insulating layer 3 (the first insulating portion) and the cover insulating layer 4 (the second insulating portion), and the base insulating layer is integrally formed. 3 和 covering insulation layer 4. The same applies to the boundary (dashed line) inside the base insulating layer 3 shown in FIG. 7 and the like. In this case, the same applies to the second to third embodiments and their modifications shown in FIGS. 17 to 24 described later. <Second Embodiment> An anisotropic conductive sheet 1 as a second embodiment of the anisotropic conductive sheet of the present invention will be described with reference to FIG. 17. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted. As shown in FIG. 17, the anisotropic conductive sheet 1 according to the second embodiment includes a plurality of anisotropic conductive portions 2 and a first elastic layer 40 disposed on an upper side of the plurality of anisotropic conductive portions 2. The first elastic layer 40 has a flat plate shape that is substantially rectangular in plan view and extends in the plane direction. The first elastic layer 40 includes an insulating elastic portion 41 and a plurality of conductive elastic portions 42. The insulating elastic portion 41 has a flat plate shape that is substantially rectangular in plan view and extends in the plane direction. The insulating elastic portion 41 is disposed on the plurality of anisotropic conductive portions 2 so as to span the plurality of anisotropic conductive portions 2 in the plane direction. Specifically, the insulating elastic portion 41 is arranged such that the lower surface thereof is in contact with the upper surface of the metal connecting portion 5 (the upper surface of the second plating layer 19) and the upper surface of the insulating layer 4. The insulating elastic portion 41 includes a plurality of elastic layer openings 43 as a third opening. The plurality of elastic layer openings 43 are formed corresponding to the metal connection portions 5 of the plurality of anisotropic conductive portions 2. That is, the plurality of elastic layer openings 43 are arranged adjacent to each other in a one-to-one correspondence with the plurality of metal connecting portions 5 and are arranged neatly in the front-back direction and the left-right direction.于 金属 连接 部 5。 Metal connection portion 5. The elastic layer opening 43 penetrates the first elastic layer 40 in the vertical direction, and is formed in a cylindrical shape having a substantially circular shape in plan view. The hardness of the insulating elastic portion 41 is, for example, 25 Hs or more, preferably 35 Hs or more, and, for example, 65 Hs or less, and preferably 55 Hs or less. By setting the hardness of the insulating elastic portion 41 to be within the above range, the first elastic layer 40 can be more flexibly deformed corresponding to the plurality of terminals 22. Hardness can be measured according to the method described in JIS K 6253, for example. The insulating elastic portion 41 is formed of, for example, an elastic material such as rubber. Examples of the rubber include natural rubber, polybutadiene rubber, polyisoprene rubber, chloroprene rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, and styrene -Conjugated diene rubbers such as butadiene-diene block copolymer rubber, styrene-isoprene block copolymer, and hydrides thereof, such as urethane rubber, polyester rubber , Epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, etc. The conductive elastic portion 42 is disposed in the elastic layer opening portion 43. That is, the conductive elastic portion 42 is filled in the elastic layer opening portion 43. The conductive elastic portion 42 is arranged such that the lower surface thereof contacts the substantially central portion of the upper surface of the metal connection portion 5. The lower surface of the conductive elastic portion 42 is formed so as to be convex on the upper side along the upper surface of the metal connection portion 5. The upper surface of the conductive elastic portion 42 is formed so as to be the same plane as the upper surface of the insulating elastic portion 41. The hardness of the conductive elastic portion 42 is, for example, 30 Hs or more, preferably 40 Hs or more, and, for example, 70 Hs or less, and preferably 60 Hs or less. By setting the hardness of the conductive elastic portion 42 to be within the above range, the first elastic layer 40 can be more flexibly deformed in accordance with the plurality of terminals 22. The conductive elastic portion 42 is formed of a conductive resin composition containing conductive particles 44 and a resin. Examples of the material of the conductive particles 44 include metals such as iron, cobalt, nickel, gold, silver, copper, palladium, rhodium, and alloys thereof. The conductive particles 44 may be metal particles as the above-mentioned metal. The conductive particles may be, for example, core-shell particles including non-conductive particles (polymer particles, glass beads, and the like) as a core material and a shell portion of the metal on the surface of the core material. The average particle diameter of the conductive particles 44 is, for example, 1 μm or more and 10 μm or less. Examples of the resin include an elastic material forming the insulating elastic portion 41 and a resin forming the base insulating layer 3, and rubber is preferably used. The diameter L9 of the conductive elastic portion 42 (that is, the diameter of the elastic layer opening portion 43) L9 is, for example, 30 μm or more, preferably 40 μm or more, and, for example, 200 μm or less, and preferably 100 μm or less. The thickness T6 of the first elastic layer 40 (the length from the lowermost surface to the uppermost surface in the up-down direction of the insulating elastic portion 41) is, for example, 50 μm or more, preferably 100 μm or more, and, for example, 2000 μm or less, preferably It is 1000 μm or less. The anisotropic conductive sheet 1 according to the second embodiment can be, for example, pressure-bonded to the upper surface of the anisotropic conductive sheet 1 according to the first embodiment by thermal compression bonding or an adhesive. Manufacturing. Alternatively, for example, an insulating elastic portion 41 having an elastic layer opening portion 43 may be formed on the upper surface of the anisotropic conductive sheet 1 equal to the first embodiment by a coating method, and the elastic layer opening portion 43 may be filled with conductive material. Sexual elastic section 42. The anisotropic conductive sheet 1 according to the second embodiment can also exert the same effects as the anisotropic conductive sheet 1 according to the first embodiment. In the second embodiment, the anisotropic conductive sheet 1 includes a first elastic layer 40 having an insulating elastic portion 41 and a conductive elastic portion 42 on the upper side of the anisotropic conductive portion 2. Therefore, even when the heights (up-down positions) of the plurality of terminals 22 of the inspected device 20 are uneven, the inspected device 20 can be pressed when the anisotropic conductive sheet 1 is pressed. The insulation elastic portion 41 and the plurality of conductive elastic portions 42 are compressed or deformed by the height of each of the terminals 22. That is, the thickness varies locally. In particular, the thickness can be changed according to the thickness of the first elastic layer 40. For example, when the thickness of the first elastic layer 40 is 1000 μm or more, the thickness can be changed to several hundreds μm. As a result, even when the height of the plurality of terminals 22 is excessively uneven, the inspection can be surely performed. In addition, the insulating elastic portion 41 and the conductive elastic portion 42 absorb excessive pressure from the device 20 to be inspected, and the conductive elastic portion 42 prevents direct contact between the metal connection portion 5 and the terminal 22. Therefore, durability is further excellent. <Modification Example of Second Embodiment> A modification example of the second embodiment of the anisotropic conductive sheet 1 will be described with reference to FIG. 18. In addition, in the modification, the same components as those in the embodiment shown in FIG. 17 described above are denoted by the same reference numerals, and descriptions thereof are omitted. In the embodiment shown in FIG. 17, the elastic layer is disposed only on the upper side of the anisotropic conductive portion 2. For example, as shown in FIG. 18, the elastic layer may be disposed on the upper side and the lower side of the anisotropic conductive portion 2. That is, the anisotropic conductive sheet 1 shown in FIG. 18 includes a plurality of anisotropic conductive portions 2, a first elastic layer 40 disposed on an upper side of the plurality of anisotropic conductive portions 2, and a plurality of each. The second elastic layer 45 on the lower side of the anisotropic conductive portion. The second elastic layer 45 has a substantially rectangular flat plate shape in plan view extending in the plane direction, and includes an insulating elastic portion 41 and a plurality of conductive elastic portions 42. The insulating elastic portion 41 and the conductive elastic portion 42 in the second elastic layer 45 are the same as the insulating elastic portion 41 and the conductive elastic portion 42 in the first elastic layer 40 except for the positions where they are arranged. The insulating elastic portion 41 in the second elastic layer 45 is disposed under the plurality of anisotropic conductive portions 2 so as to span the plurality of anisotropic conductive portions 2 in the plane direction. Specifically, the insulating elastic portion 41 is disposed such that the upper surface thereof is in contact with the lower surface of the metal connection portion 5 (the lower surface of the first plating layer 18) and the lower surface of the cover insulating layer 4. The insulating elastic portion 41 includes a plurality of elastic layer openings 43. The conductive elastic portion 42 in the second elastic layer 45 is disposed in the elastic layer opening portion 43. That is, the conductive elastic portion 42 is filled in the elastic layer opening portion 43. The conductive elastic portion 42 is arranged such that the upper surface thereof is in contact with a substantially central portion of the lower surface of the metal connection portion 5. The upper surface of the conductive elastic portion 42 is formed so as to be concave along the lower surface of the metal connection portion 5. The lower surface of the conductive elastic portion 42 is formed so as to be the same plane as the lower surface of the insulating elastic portion 41. In the anisotropically conductive sheet 1 shown in FIG. 18, the same effect as that of the embodiment shown in FIG. 17 can be exhibited. In particular, the anisotropic conductive sheet 1 shown in FIG. 18 further includes a second elastic layer 45 on the lower side of the anisotropic conductive portion 2. Therefore, even when the heights of the plurality of inspection probes 23 of the inspection device 21 are uneven, when the inspection device 21 is pressed against the anisotropic conductive sheet, the inspection probes 21 can be corresponding to those of the inspection probes 23. The height of each of them compresses the insulating elastic portion 41 and the plurality of conductive elastic portions 42 in the vertical direction. In particular, the thickness may be changed according to the thickness T6 of the second elastic layer 45. For example, when the thickness of the second elastic layer 45 is 1000 μm or more, the thickness can be compressed by several hundreds μm. As a result, even when the height of the inspection probe 23 is uneven, the inspection can be performed reliably. In addition, the insulating elastic portion 41 and the conductive elastic portion 42 of the second elastic layer 45 absorb excessive pressure from the inspection device 21, and the conductive elastic portion 42 prevents direct contact between the metal connecting portion 5 and the inspection probe 23. Therefore, durability is further excellent. In the embodiment shown in FIGS. 17 and 18, the conductive elastic portions 42 of the first elastic layer 40 and the second elastic layer 45 are arranged in a one-to-one correspondence with the metal connecting portion 5. As shown in the figure, in each of the first elastic layer 40 and the second elastic layer 45, a plurality of conductive elastic portions 42 may be arranged so as to correspond to one metal connection portion 5. That is, a plurality of conductive elastic portions 42 are arranged on the upper surface of one metal connection portion 5, while a plurality of conductive elastic portions 42 are arranged on the lower surface of one metal connection portion 5. <Third Embodiment> An anisotropic conductive sheet 1 as an embodiment of the third embodiment of the anisotropic conductive sheet of the present invention will be described with reference to FIGS. 19 to 24. In the third embodiment, the same components as those in the first embodiment and the second embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted. As shown in FIGS. 19 to 24, the anisotropic conductive sheet 1 according to the third embodiment includes a plurality of anisotropic conductive portions 2 and a plurality of conductive elastic bodies arranged on the upper side of the plurality of anisotropic conductive portions 2.部 42. 42. Specifically, the embodiment shown in FIG. 19 is an embodiment in which the anisotropic conductive sheet 1 shown in FIG. 11 further includes a conductive elastic portion 42, and the embodiment shown in FIG. 20 is each shown in FIG. 12. An embodiment in which the anisotropic conductive sheet 1 further includes a conductive elastic portion 42. The embodiment shown in FIG. 21 is an embodiment in which the anisotropic conductive sheet 1 shown in FIG. 13 further includes a conductive elastic portion 42. The embodiment shown in FIG. 22 is an embodiment in which the anisotropic conductive sheet 1 shown in FIG. 14 further includes a conductive elastic portion 42, and the embodiment shown in FIG. 23 is an anisotropic conductive sheet shown in FIG. 15. The material 1 further includes an embodiment of the conductive elastic portion 42. The embodiment shown in FIG. 24 is an embodiment in which the anisotropic conductive sheet 1 shown in FIG. 16 further includes the conductive elastic portion 42. Among the plurality of anisotropic conductive portions 2, the metal connection portion 5 includes a metal conductor portion 10 and a plating layer 12 (a first plating layer 18 and a second plating layer 19), a first plating layer 18, and a first The two plating layers 19 are composed of two layers. That is, the first plating layer 18 includes a first inner plating layer 18a and a first outer plating layer 18b, and the second plating layer 19 includes a second inner plating layer 19a and a second outer plating layer 19b. Further, a sheet recessed portion 36 is formed on the upper surface of the anisotropic conductive portion 2, and a metal connection recessed portion 35 is formed on the upper surface of the metal connection portion 5 in the sheet recessed portion 36. In the third embodiment, the conductive elastic portion 42 is disposed in the sheet recessed portion 36 (and further the metal connection recessed portion 35). That is, the conductive elastic portion 42 is filled in the sheet recessed portion 36 (and further the metal connection recessed portion 35). The upper surface of the conductive elastic portion 42 is formed so as to be the same plane as the upper surface of the cover insulating layer 4. The thickness of the conductive elastic portion 42 is, for example, 1 μm or more, preferably 2 μm or more, and, for example, 120 μm or less, and preferably 90 μm or less. The hardness of the conductive elastic portion 42 is, for example, 30 Hs or more, preferably 40 Hs or more, and, for example, 70 Hs or less, and preferably 60 Hs or less. By setting the hardness of the conductive elastic portion 42 to be within the above range, the conductive elastic portion 42 can be more flexibly deformed corresponding to the plurality of terminals 22. The anisotropic conductive sheet 1 according to the third embodiment can be used by coating the entire surface of the anisotropic conductive sheet 1 according to the first embodiment with a composition containing conductive particles 44 and a resin, for example. The doctor blade rubs the upper surface of the anisotropically conductive sheet 1 and moves the composition to the sheet recessed portion 36 to manufacture it. Specifically, the manufacturing method described in Japanese Patent Laid-Open No. 2015-26584 can be referred to. The anisotropic conductive sheet 1 according to the third embodiment can also exhibit the same function and effect as the anisotropic conductive sheet 1 according to the first embodiment. In the third embodiment, the metal connection recessed portion 35 is filled with a conductive elastic portion 42. Therefore, even when the heights of the plurality of terminals 22 of the device 20 to be inspected are uneven, it is possible to correspond to each of the terminals 22 when the device 20 to be inspected is pressed to the anisotropic conductive sheet 1. This height compresses the conductive elastic portion 42 in the vertical direction. In particular, the conductive elastic portion 42 is compressed according to its thickness, for example, it can be compressed by a thickness of several μm. As a result, even when the heights of the plurality of terminals 22 are not uniform, the inspection can be surely performed. In addition, the conductive elastic portion 42 absorbs pressure from the device under test 20 and prevents direct contact between the metal connecting portion 5 and the terminal 22. Therefore, durability is further excellent. In the embodiment shown in FIGS. 19 to 24, the conductive elastic portion 42 is formed so that the upper surface thereof is the same plane as the upper surface of the insulating cover layer 4. That is, the conductive elastic portion 42 is filled so that its volume ratio becomes 100% with respect to the volume of the sheet recessed portion 36. However, although not shown, for example, the conductive elastic portion 42 may be formed such that the upper surface thereof is higher or lower than the upper surface of the insulating layer 4. In this case, the volume ratio of the conductive elastic portion 42 to the volume of the sheet recessed portion 36 is, for example, 20% or more, preferably 50% or more, and, for example, 200% or less, and preferably 150% or less. . If the volume ratio of the conductive elastic portion 42 is within the above range, even when the heights of the plurality of terminals 22 of the device 20 to be inspected are uneven, the inspection can be performed reliably. In addition, since the conductive elastic portion 42 can surely relax the pressure or impact on the anisotropic conductive portion 2, the durability is further excellent. [Examples] Examples and comparative examples are exemplified below to further specifically describe the present invention. The present invention is not limited to any Examples and Comparative Examples. Specific numerical values such as the blending ratio (content ratio), physical property values, and parameters used in the following description can be replaced with the corresponding blending ratio (content ratio) and physical property values described in the "Forms for Implementing the Invention" described above. , Parameters, and other corresponding records of the upper limit (defined as "below", "not reached" value) or the lower limit (defined as "above", "exceeded" value). Example 1 An anisotropic conductive sheet as shown in FIGS. 1 and 2 was produced. Among them, 100 lines of the anisotropic conductive portion 2 are arranged neatly in the front-back direction and 100 lines in the left-right direction, and the total number thereof is 10,000. Polyimide resin was used as the material of the base insulating layer and the cover insulating layer, copper was used as the material of the metal conductor portion, Ni was used as the material of the bump portion, and Au was used as the plating material. In FIG. 2, L1 is set to 20 μm, L2 is set to 30 μm, L3 is set to 40 μm, L4 is set to 5 μm, L5 is set to 5 μm, and the inclination angle θ is set to 60 °. , Set the distance L6 between the connecting parts to 50 μm. Example 2 An anisotropic conductive sheet was produced in the same manner as in Example 1 except that L2 was changed to 36 μm and L4 was changed to 2 μm in FIG. 2. Example 3 An anisotropic conductive sheet was manufactured in the same manner as in Example 1 except that L1 was changed to 30 μm, L5 was changed to 5 μm, and the inclination angle θ was changed to 30 °. material. At this time, in order to make the distance between two adjacent anisotropic conductive portions (metal conductor portions 10) to be the same as in Example 1, the distance L6 between the connection portions was set to 80 μm. Example 4 An anisotropic conductive sheet shown in FIG. 4 was produced. That is, an anisotropic conductive sheet was produced in the same manner as in Example 1 except that the base opening portion 6 was formed into a cylindrical shape instead of a substantially tapered shape in a side cross-section. In addition, L1 was set to 30 μm, and L5 was set to 5 μm. Comparative Example 1 An anisotropic conductive sheet was produced in the same manner as in Example 1 except that the cover insulating layer was not formed (see FIG. 25). Comparative Example 2 An anisotropic conductive sheet was manufactured in the same manner as in Example 1 except that the covering insulating layer was formed to the same level as the upper surface of the metal connecting portion 5 (refer to the imaginary line) Figure 25). (Durability test) The sample was repeatedly pressed against the upper surface of the anisotropic conductive portion (second plating layer) by applying a load of 30 g to the anisotropic conductive portion 2. In the anisotropic conductive sheet of Example 1, even if the pressing was repeated 50,000 times, one anisotropic conductive portion did not fall off. In the anisotropically conductive sheet of Example 3, when the pressing was repeated 10,000 to 50,000 times, at least one anisotropically conductive portion fell off. In the anisotropically conductive sheets of Examples 2 and 4, when the pressing was repeated 1,000 to 10,000 times, at least one anisotropically conductive portion fell off. In the anisotropic conductive portion of the anisotropic conductive portion of Comparative Examples 1 and 2, at least one anisotropic conductive portion fell off when the number of times of pressing was 1,000 times or less. (Conductivity test) The resistance of the probe of the resistance meter was contacted to each of the upper surface and the lower surface of the anisotropic conductive portion, and the resistance value was measured. As a result, it was found that the resistance values of the respective examples and comparative examples were 1 × 10. ^-4 Below Ω, it has excellent conductivity. The above invention is proposed as an exemplary embodiment of the present invention, but it is merely an example and is not to be construed in a limiting sense. Modifications of the present invention, which are made clear by those skilled in the art, are included in the scope of patent application described later. [Industrial Applicability] The anisotropic conductive film of the present invention can be applied to various industrial products. For example, the anisotropic conductive film is suitable for conducting inspection of semiconductor elements or circuit boards.

1‧‧‧各向異性導電性片材1‧‧‧ Anisotropic conductive sheet

2‧‧‧各向異性導電部2‧‧‧ Anisotropic conductive part

3‧‧‧基底絕緣層3‧‧‧ base insulating layer

4‧‧‧覆蓋絕緣層4‧‧‧ covered with insulation

5‧‧‧金屬連接部5‧‧‧ metal connection

6‧‧‧基底開口部6‧‧‧ base opening

7‧‧‧蓋開口部7‧‧‧ cover opening

8‧‧‧上側蓋開口部8‧‧‧ Upper side cover opening

9‧‧‧下側蓋開口部9‧‧‧ lower side cover opening

10‧‧‧金屬導體部10‧‧‧Metal Conductor

11‧‧‧凸塊部11‧‧‧ bump

12‧‧‧鍍覆層12‧‧‧Plating

13‧‧‧第1導體部13‧‧‧ the first conductor

14‧‧‧第2導體部14‧‧‧ 2nd conductor section

15‧‧‧第3導體部15‧‧‧ the third conductor

16‧‧‧第1凸塊16‧‧‧ 1st bump

17‧‧‧第2凸塊17‧‧‧ 2nd bump

18‧‧‧第1鍍覆層18‧‧‧The first plating layer

18a‧‧‧第1內側鍍覆層18a‧‧‧The first inner plating layer

18b‧‧‧第1外側鍍覆層18b‧‧‧The first outer plating

19‧‧‧第2鍍覆層19‧‧‧ 2nd plating

19a‧‧‧第2內側鍍覆層19a‧‧‧Second inner plating

19b‧‧‧第2外側鍍覆層19b‧‧‧ 2nd outer plating

20‧‧‧被檢查裝置20‧‧‧Inspected device

21‧‧‧檢查裝置21‧‧‧Inspection device

22‧‧‧端子22‧‧‧terminal

23‧‧‧檢查探針23‧‧‧ Inspection Probe

30‧‧‧金屬導體凹部30‧‧‧ metal conductor recess

31‧‧‧上側基底開口部31‧‧‧upper base opening

32‧‧‧下側基底開口部32‧‧‧ lower base opening

35‧‧‧金屬連接凹部35‧‧‧ metal connection recess

36‧‧‧片材凹部36‧‧‧ Sheet recess

37‧‧‧下側片材凹部37‧‧‧ Lower sheet recess

40‧‧‧第1彈性層40‧‧‧ the first elastic layer

41‧‧‧絕緣性彈性部41‧‧‧Insulating elastic part

42‧‧‧導電性彈性部42‧‧‧Conductive elastic part

43‧‧‧彈性層開口部43‧‧‧ Elastic layer opening

44‧‧‧導電性粒子44‧‧‧ conductive particles

45‧‧‧第2彈性層45‧‧‧The second elastic layer

50‧‧‧絕緣層50‧‧‧ Insulation

D1‧‧‧深度D1‧‧‧ Depth

D2‧‧‧深度D2‧‧‧ Depth

D3‧‧‧深度D3‧‧‧ Depth

L1‧‧‧直徑L1‧‧‧ diameter

L2‧‧‧直徑L2‧‧‧ diameter

L3‧‧‧直徑L3‧‧‧ diameter

L4‧‧‧徑向長度L4‧‧‧ radial length

L5‧‧‧徑向長度L5‧‧‧Radial length

L6‧‧‧連接部間間距L6‧‧‧Inter-part distance

L7‧‧‧直徑L7‧‧‧ diameter

L8‧‧‧直徑L8‧‧‧ diameter

L9‧‧‧直徑L9‧‧‧ diameter

T1‧‧‧厚度T1‧‧‧thickness

T2‧‧‧厚度T2‧‧‧thickness

T3‧‧‧上下方向長度T3‧‧‧length in vertical direction

T4‧‧‧上下方向長度T4‧‧‧length in vertical direction

T5‧‧‧厚度T5‧‧‧thickness

T6‧‧‧厚度T6‧‧‧thickness

θ‧‧‧傾斜角θ‧‧‧ tilt angle

圖1表示本發明之各向異性導電性片材之第1實施形態之一實施形態之俯視圖。 圖2表示圖1之A-A線之局部放大側剖視圖。 圖3表示使用圖1所示之各向異性導電性片材時之側剖視圖。 圖4表示圖1所示之各向異性導電性片材之變化例(基底開口部為圓柱形狀之形態)之側剖視圖。 圖5表示圖1所示之各向異性導電性片材之變化例(第1導體部填充基底開口部之一部分之形態)之側剖視圖。 圖6表示圖1所示之各向異性導電性片材之變化例(於金屬導體部之上表面形成有凹部之形態)之側剖視圖。 圖7表示圖6所示之各向異性導電性片材之變化例(基底開口部具有上側基底開口部及下側基底開口部之形態)之側剖視圖。 圖8表示圖1所示之各向異性導電性片材之變化例(上側蓋開口部形成為錐形形狀之形態)之側剖視圖。 圖9表示圖1所示之各向異性導電性片材之變化例(金屬連接部之下表面及上表面分別與基底絕緣層之下表面及覆蓋絕緣層之上表面為同一平面之形態)之側剖視圖。 圖10表示圖1所示之各向異性導電性片材之變化例(鍍覆層具有2層之形態)之側剖視圖。 圖11表示圖1所示之各向異性導電性片材之變化例(鍍覆層具有2層，形成有金屬連接凹部之形態)之側剖視圖。 圖12表示圖1所示之各向異性導電性片材之變化例(鍍覆層具有2層，基底開口部具有2個錐形形狀之形態)之側剖視圖。 圖13表示圖1所示之各向異性導電性片材之變化例(鍍覆層具有2層，基底開口部具有2個錐形形狀，上側蓋開口部具有錐形形狀之形態)之側剖視圖。 圖14表示圖1所示之各向異性導電性片材之變化例(鍍覆層具有2層，第2導體部由覆蓋絕緣層被覆之形態)之側剖視圖。 圖15表示圖1所示之各向異性導電性片材之變化例(鍍覆層具有2層，第2導體部由覆蓋絕緣層被覆，基底開口部具有圓柱形狀之形態)之側剖視圖。 圖16表示圖1所示之各向異性導電性片材之變化例(鍍覆層具有2層，第2導體部為圓筒形狀之形態)之側剖視圖。 圖17表示本發明之各向異性導電性片材之第2實施形態之一實施形態之側剖視圖。 圖18表示圖17所示之各向異性導電性片材之變化例(具備第2彈性層之實施形態)之側剖視圖。 圖19表示本發明之各向異性導電性片材之第3實施形態之一實施形態之側剖視圖。 圖20表示圖19所示之各向異性導電性片材之變化例(基底開口部具有2個錐形形狀之形態)之側剖視圖。 圖21表示圖19所示之各向異性導電性片材之變化例(基底開口部具有2個錐形形狀，上側蓋開口部具有錐形形狀之形態)之側剖視圖。 圖22表示圖19所示之各向異性導電性片材之變化例(第2導體部由覆蓋絕緣層被覆之形態)之側剖視圖。 圖23表示圖19所示之各向異性導電性片材之變化例(第2導體部由覆蓋絕緣層被覆，基底開口部具有圓柱形狀之形態)之側剖視圖。 圖24表示圖19所示之各向異性導電性片材之變化例(第2導體部為圓筒形狀之形態)之側剖視圖。 圖25表示實施例及比較例中使用之各向異性導電性片材之比較例。FIG. 1 is a plan view showing an embodiment of the first embodiment of the anisotropic conductive sheet of the present invention. Fig. 2 is a partially enlarged side sectional view taken along the line A-A in Fig. 1. FIG. 3 is a side cross-sectional view when the anisotropic conductive sheet shown in FIG. 1 is used. FIG. 4 is a side cross-sectional view showing a modification example of the anisotropic conductive sheet shown in FIG. 1 (a form in which the base opening portion has a cylindrical shape). FIG. 5 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 1 (a form in which a first conductor portion fills a portion of a base opening portion). FIG. 6 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 1 (a form in which a recessed portion is formed on the upper surface of the metal conductor portion). FIG. 7 is a side cross-sectional view showing a modification example of the anisotropically conductive sheet shown in FIG. 6 (the base opening portion has an upper base opening portion and a lower base opening portion). FIG. 8 is a side cross-sectional view showing a modification example of the anisotropically conductive sheet shown in FIG. 1 (the upper cover opening portion is formed in a tapered shape). FIG. 9 shows a modification example of the anisotropic conductive sheet shown in FIG. 1 (a form in which the lower surface and the upper surface of the metal connecting portion are the same plane as the lower surface of the base insulating layer and the upper surface of the covering insulating layer, respectively) Side sectional view. FIG. 10 is a side cross-sectional view showing a modified example of the anisotropically conductive sheet shown in FIG. 1 (a plated layer having two layers). FIG. 11 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 1 (a plated layer has two layers and a metal connection recess is formed). FIG. 12 is a side cross-sectional view showing a modified example of the anisotropically conductive sheet shown in FIG. 1 (a plated layer having two layers and a base opening portion having two tapered shapes). FIG. 13 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 1 (the plating layer has two layers, the base opening portion has two tapered shapes, and the upper cover opening portion has a tapered shape). . FIG. 14 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 1 (the plating layer has two layers and the second conductor portion is covered with a covering insulating layer). FIG. 15 shows a side cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 1 (the plating layer has two layers, the second conductor portion is covered with a covering insulating layer, and the base opening portion has a cylindrical shape). FIG. 16 is a side cross-sectional view showing a modified example of the anisotropically conductive sheet shown in FIG. 1 (the plating layer has two layers and the second conductor portion has a cylindrical shape). FIG. 17 is a side cross-sectional view showing an embodiment of the second embodiment of the anisotropic conductive sheet of the present invention. FIG. 18 is a side cross-sectional view showing a modified example (an embodiment including a second elastic layer) of the anisotropic conductive sheet shown in FIG. 17. FIG. 19 is a side cross-sectional view showing an embodiment of a third embodiment of the anisotropic conductive sheet of the present invention. FIG. 20 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 19 (a form in which the base opening portion has two tapered shapes). FIG. 21 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 19 (the base opening portion has two tapered shapes and the upper cover opening portion has a tapered shape). FIG. 22 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 19 (a form in which the second conductor portion is covered with a covering insulating layer). FIG. 23 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 19 (the second conductor portion is covered with a covering insulating layer and the base opening portion has a cylindrical shape). FIG. 24 is a side cross-sectional view showing a modified example of the anisotropic conductive sheet shown in FIG. 19 (the second conductor portion has a cylindrical shape). FIG. 25 shows a comparative example of an anisotropic conductive sheet used in Examples and Comparative Examples.

Claims (15)

一種各向異性導電性片材，其特徵在於：其係用以將被檢查裝置與檢查裝置相互電性連接者， 具備各向異性導電部， 上述各向異性導電部具備： 絕緣層，其具有於厚度方向上貫通之開口部；及 連接部，其配置於上述開口部；且 上述絕緣層被覆上述連接部之厚度方向一面之一部分及與上述厚度方向正交之正交方向側面。An anisotropic conductive sheet is characterized in that it is used for electrically connecting an inspection device and an inspection device to each other, and includes an anisotropic conductive portion, and the anisotropic conductive portion includes: an insulating layer having An opening portion penetrating in the thickness direction; and a connecting portion disposed at the opening portion; and the insulating layer covers a portion of a thickness direction surface of the connecting portion and a side surface in an orthogonal direction orthogonal to the thickness direction. 如請求項1之各向異性導電性片材，其中上述絕緣層具備： 第1絕緣部，其露出厚度方向另一面；及 第2絕緣部，其配置於上述第1絕緣部之厚度方向一側，露出厚度方向一面；且 上述第2絕緣部被覆上述連接部之上述厚度方向一面之一部分及上述正交方向側面。The anisotropic conductive sheet according to claim 1, wherein the insulating layer includes: a first insulating portion that exposes the other side in the thickness direction; and a second insulating portion that is disposed on one side in the thickness direction of the first insulating portion. A surface in the thickness direction is exposed; and the second insulating portion covers a portion of the thickness direction surface of the connection portion and the side surface in the orthogonal direction. 如請求項2之各向異性導電性片材，其中上述第1絕緣部具有第1開口部， 上述第2絕緣部具有與上述第1開口部連通之第2開口部， 上述連接部具備： 第1導體部，其填充於第1開口部； 第2導體部，其於厚度方向上與上述第1導體部相連，填充於第2開口部；及 第3導體部，其於與厚度方向正交之正交方向上與上述第2導體部相連，填充於第2開口部；且 上述第2絕緣部被覆上述連接部中之上述第3導體部之上述厚度方向一面及上述正交方向側面。For example, in the anisotropic conductive sheet of claim 2, the first insulating portion has a first opening portion, the second insulating portion has a second opening portion communicating with the first opening portion, and the connecting portion includes: 1 conductor portion filled in the first opening portion; second conductor portion connected to the first conductor portion in the thickness direction and filled in the second opening portion; and a third conductor portion orthogonal to the thickness direction The orthogonal direction is connected to the second conductor portion and is filled in the second opening portion; and the second insulating portion covers the thickness direction surface and the orthogonal direction side surface of the third conductor portion of the connection portion. 如請求項3之各向異性導電性片材，其中上述第1開口部具有開口截面積隨著自上述厚度方向一側朝向厚度方向另一側而變小之錐形形狀。In the anisotropic conductive sheet according to claim 3, the first opening portion has a tapered shape in which an opening cross-sectional area becomes smaller as it goes from one side in the thickness direction to the other side in the thickness direction. 如請求項3之各向異性導電性片材，其中上述第2導體部之厚度方向一面位於較上述第2絕緣部之厚度方向一面更靠厚度方向另一側。In the anisotropic conductive sheet according to claim 3, the thickness direction of the second conductor portion is located on the other side in the thickness direction than the thickness direction of the second insulation portion. 如請求項3之各向異性導電性片材，其中上述各向異性導電部於側剖視圖中，關於在厚度方向上通過上述第1開口部之正交方向中心點之軸而對稱。The anisotropic conductive sheet according to claim 3, wherein the anisotropic conductive portion is symmetrical with respect to an axis passing through a center point in an orthogonal direction of the first opening portion in a thickness direction in a side sectional view. 如請求項3之各向異性導電性片材，其中上述第2絕緣部被覆上述連接部之厚度方向一面之正交方向長度為3 μm以上。For example, in the anisotropic conductive sheet according to claim 3, an orthogonal direction length of the second insulating portion covering the thickness direction of the connection portion is 3 μm or more. 如請求項3之各向異性導電性片材，其中上述各向異性導電部配置有複數個， 於相互鄰接之各向異性導電部中，一各向異性導電部之第1開口部之正交方向中心點與鄰接於上述一各向異性導電部之另一各向異性導電部之第1開口部之正交方向中心點的距離為30 μm以上且200 μm以下。For example, the anisotropic conductive sheet of claim 3, wherein the anisotropic conductive portion is provided in a plurality, and among the adjacent anisotropic conductive portions, an orthogonality of the first opening portion of the anisotropic conductive portion is orthogonal. The distance between the center point of the direction and the center point of the orthogonal direction of the first opening portion of the other anisotropic conductive portion adjacent to the anisotropic conductive portion is 30 μm or more and 200 μm or less. 如請求項3之各向異性導電性片材，其中上述連接部進而具備設置於上述第1導體部之厚度方向另一側之第1凸塊、及配置於上述第2導體部之厚度方向一側之第2凸塊。For example, the anisotropic conductive sheet according to claim 3, wherein the connection portion further includes a first bump provided on the other side in the thickness direction of the first conductor portion, and a first direction disposed in the thickness direction of the second conductor portion. The second bump on the side. 如請求項1之各向異性導電性片材，其中上述連接部於厚度方向一面及厚度方向另一面進而具備Au層或NiAu層。The anisotropic conductive sheet according to claim 1, wherein the connection portion further includes an Au layer or a NiAu layer on one side in the thickness direction and the other side in the thickness direction. 如請求項1之各向異性導電性片材，其中上述連接部係由金屬形成。The anisotropic conductive sheet according to claim 1, wherein the connection portion is formed of a metal. 如請求項1之各向異性導電性片材，其厚度為100 μm以下。The thickness of the anisotropic conductive sheet according to claim 1 is 100 μm or less. 如請求項1之各向異性導電性片材，其進而具備彈性層，該彈性層配置於上述各向異性導電部之厚度方向一側及厚度方向另一側之至少任一側， 上述彈性層具備： 絕緣性彈性部，其具有於厚度方向上貫通之第3開口部；及 導電性彈性部，其填充於上述第3開口部，且含有導電性粒子及樹脂。For example, the anisotropic conductive sheet of claim 1 further includes an elastic layer, and the elastic layer is disposed on at least one of a thickness direction side and a thickness direction side of the anisotropic conductive portion, and the elastic layer. It includes: an insulating elastic portion having a third opening portion penetrating in the thickness direction; and a conductive elastic portion filled in the third opening portion and containing conductive particles and a resin. 如請求項1之各向異性導電性片材，其中於上述連接部之厚度方向一面形成有第1凹部，且 進而具備填充於上述第1凹部且含有導電性粒子及樹脂之導電性彈性部。The anisotropic conductive sheet according to claim 1, wherein the first recessed portion is formed on one side in the thickness direction of the connection portion, and further includes a conductive elastic portion filled in the first recessed portion and containing conductive particles and a resin. 如請求項14之各向異性導電性片材，其中上述導電性彈性部之體積比率相對於形成於上述各向異性導電部之厚度方向一面之第2凹部之體積為20%以上且200%以下。For example, the anisotropic conductive sheet according to claim 14, wherein the volume ratio of the conductive elastic portion is 20% or more and 200% or less with respect to the volume of the second recessed portion formed on one side of the thickness direction of the anisotropic conductive portion. .