JP7403958B2 - Anisotropic conductive sheet - Google Patents

Anisotropic conductive sheet Download PDF

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JP7403958B2
JP7403958B2 JP2019042648A JP2019042648A JP7403958B2 JP 7403958 B2 JP7403958 B2 JP 7403958B2 JP 2019042648 A JP2019042648 A JP 2019042648A JP 2019042648 A JP2019042648 A JP 2019042648A JP 7403958 B2 JP7403958 B2 JP 7403958B2
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thickness direction
insulating layer
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JP2020145145A (en
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孝俊 坂倉
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Nitto Denko Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01—Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations

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Description

本発明は、異方導電性シートに関する。 The present invention relates to an anisotropically conductive sheet.

従来、貫通孔を有する絶縁層と、貫通孔に配置され、厚み方向両側に露出する異方導電部とを備える異方導電性シートが知られている（例えば、下記特許文献１参照。）。 BACKGROUND ART Conventionally, an anisotropic conductive sheet is known that includes an insulating layer having a through hole and an anisotropic conductive portion arranged in the through hole and exposed on both sides in the thickness direction (see, for example, Patent Document 1 below).

特許文献１の図１１で開示される異方導電性シートでは、異方導電部が、貫通孔内に配置される導体部と、導体部の厚み方向一方面に接触する第２めっき層とを備える。また、導体部は、平板状の中央部と、中央部の周端縁から、外側に向かうに従って厚み方向一方側に傾斜する傾斜部とを一体的に有する。傾斜部の外側部は、絶縁層に被覆されて固定されている。また、導体部の厚み方向一方面において、中央部、および、傾斜部の内側部が、第２めっき層に接触している。なお、第２めっき層は、ニッケルめっき層を含んでいる。 In the anisotropically conductive sheet disclosed in FIG. 11 of Patent Document 1, the anisotropically conductive part includes a conductor part disposed in the through hole and a second plating layer that contacts one surface in the thickness direction of the conductor part. Be prepared. Further, the conductor portion integrally includes a flat central portion and an inclined portion that slopes toward one side in the thickness direction from the peripheral edge of the central portion toward the outside. The outer part of the inclined part is covered and fixed with an insulating layer. Further, on one surface in the thickness direction of the conductor portion, the center portion and the inner portion of the inclined portion are in contact with the second plating layer. Note that the second plating layer includes a nickel plating layer.

特許文献１では、傾斜部の外側部が絶縁層に被覆されて固定されていることから、端子やプローブなどが厚み方向両側から異方導電部に対して加圧する場合でも、導体部が絶縁層から脱落することを抑制する。 In Patent Document 1, since the outer part of the inclined part is covered with an insulating layer and fixed, even when a terminal or a probe applies pressure to the anisotropically conductive part from both sides in the thickness direction, the conductor part does not cover the insulating layer. to prevent it from falling off.

ＷＯ２０１８／０６６５４１のパンフレットPamphlet of WO2018/066541

しかるに、異方導電性シートには、より一層優れた異方導電性が要求される。 However, anisotropic conductive sheets are required to have even better anisotropic conductivity.

しかし、特許文献１に記載される異方導電性シートでは、第２めっき層は、無電解めっきにより形成されることから、厚みを厚くするには限界があり、そのため、異方導電部の異方導電性を十分に向上させることができないという不具合がある。 However, in the anisotropically conductive sheet described in Patent Document 1, since the second plating layer is formed by electroless plating, there is a limit to how thick it can be. There is a problem that the directional conductivity cannot be sufficiently improved.

本発明は、異方導電部の絶縁層からの脱落を抑制できながら、異方導電性に優れる異方導電部を備える異方導電性シートを提供する。 The present invention provides an anisotropically conductive sheet that includes an anisotropically conductive portion that can suppress the anisotropically conductive portion from falling off from an insulating layer and has excellent anisotropically conductive properties.

本発明（１）は、厚み方向を貫通する貫通孔を有する絶縁層と、前記貫通孔に配置され、前記厚み方向に対向する一方面および他方面のそれぞれが前記厚み方向一方側および他方側のそれぞれに露出する異方導電部とを備え、前記貫通孔は、前記厚み方向他方側部分に区画される第１開口部、および、前記第１開口部に連通し、前記厚み方向一方側部分に区画される第２開口部を有し、前記絶縁層は、前記第２開口部の厚み方向他方側部分を区画する他方側周側面、および、前記他方側周側面の厚み方向一端縁から厚み方向に直交する面方向外側に延びる延出面を有し、前記異方導電部は、前記第１開口部に配置される第１導体部と、前記第２開口部に配置される第２導体部とを備え、前記第１導体部は、前記面方向に延びる略平板形状に形成され、前記第１導体部において、他方面が、前記厚み方向他方側に露出し、一方面の周端部が、前記絶縁層に接触し、一方面において前記周端部の内側に位置する内側部が、前記第２導体部に接触し、前記第２導体部は、前記他方側周側面に接触し、前記第２導体部において、前記他方面が、前記内側部および前記延出面に接触し、前記一方面が、前記厚み方向一方側に露出する、異方導電性シートを含む。 The present invention (1) provides an insulating layer having a through hole penetrating the thickness direction, and an insulating layer disposed in the through hole, one surface and the other surface facing each other in the thickness direction. an anisotropically conductive portion exposed in each of the through holes, and a first opening defined in the other side in the thickness direction; and a first opening defined in the other side in the thickness direction; The insulating layer has a second opening that is partitioned, and the insulating layer has a second opening that partitions the other side in the thickness direction of the second opening, and a second side that partitions the second opening in the thickness direction from one end edge of the other side in the thickness direction. The anisotropically conductive portion has an extending surface extending outward in a plane direction perpendicular to , and the anisotropically conductive portion includes a first conductor portion disposed in the first opening and a second conductor portion disposed in the second opening. The first conductor portion is formed in a substantially flat plate shape extending in the surface direction, the other surface of the first conductor portion is exposed to the other side in the thickness direction, and the peripheral end of the one surface is An inner part that contacts the insulating layer and is located inside the peripheral end part on one side contacts the second conductor part, and the second conductor part contacts the other peripheral side surface and The two-conductor portion includes an anisotropically conductive sheet in which the other surface contacts the inner portion and the extension surface, and the one surface is exposed on one side in the thickness direction.

この異方導電性シートでは、第１導体部は、略平板形状に形成されるので、十分な厚みを確保し易く、そのため、異方導電部の異方導電性を確実に向上させることができる。 In this anisotropically conductive sheet, since the first conductor part is formed into a substantially flat plate shape, it is easy to ensure a sufficient thickness, and therefore the anisotropic conductivity of the anisotropically conductive part can be reliably improved. .

また、第１導体部の周端部と、第２導体部において延出面に接触する部分とは、厚み方向において、絶縁層を挟んでいる。そのため、異方導電部の絶縁層からの脱落を抑制することができる。 Further, the peripheral end portion of the first conductor portion and the portion of the second conductor portion that contacts the extension surface sandwich an insulating layer between them in the thickness direction. Therefore, it is possible to suppress the anisotropic conductive portion from falling off from the insulating layer.

従って、この異方導電性シートは、異方導電部の絶縁層からの脱落の抑制と、異方導電部の優れた異方導電性とを両立することができる。 Therefore, this anisotropically conductive sheet can both suppress the anisotropically conductive portion from falling off from the insulating layer and have excellent anisotropically conductive property of the anisotropically conductive portion.

本発明（２）は、前記第１導体部の前記厚み方向他方面は、前記絶縁層の厚み方向他方面と面一である、（１）に記載の異方導電性シートを含む。 The present invention (2) includes the anisotropic conductive sheet according to (1), wherein the other surface in the thickness direction of the first conductor portion is flush with the other surface in the thickness direction of the insulating layer.

この異方導電性シートでは、第１導体部の厚み方向他方面は、絶縁層の厚み方向他方面と面一であるので、異方導電性シートの厚み方向他方面の平滑化を図ることができる。 In this anisotropic conductive sheet, the other surface in the thickness direction of the first conductor portion is flush with the other surface in the thickness direction of the insulating layer, so it is possible to smooth the other surface in the thickness direction of the anisotropic conductive sheet. can.

本発明の異方導電性シートは、異方導電部の絶縁層からの脱落の抑制と、異方導電部の優れた異方導電性とを両立することができる。 The anisotropically conductive sheet of the present invention can both suppress the anisotropically conductive portion from falling off from the insulating layer and provide excellent anisotropically conductive property of the anisotropically conductive portion.

図１は、本発明の異方導電性シートの一実施形態の平面図を示す。FIG. 1 shows a plan view of one embodiment of the anisotropically conductive sheet of the present invention. 図２は、本発明の異方導電性シートの一実施形態の断面図を示す。FIG. 2 shows a cross-sectional view of one embodiment of the anisotropically conductive sheet of the present invention. 図３Ａ～図３Ｆは、図２に示す異方導電性シートの製造工程図であり、図３Ａが、基材シートを準備する工程、図３Ｂが、第１導体部を配置する工程、図３Ｃが、第１絶縁層を配置する工程、図３Ｄが、第２導体部を配置する工程、図３Ｅが、第２絶縁層を配置する工程、図３Ｆが、基材シートを除去する工程を示す。3A to 3F are manufacturing process diagrams of the anisotropically conductive sheet shown in FIG. 2, in which FIG. 3A is a step of preparing a base sheet, FIG. 3B is a step of arranging a first conductor portion, and FIG. 3C is a process diagram of manufacturing the anisotropically conductive sheet shown in FIG. 3D shows the step of arranging the first insulating layer, FIG. 3D shows the step of arranging the second conductor part, FIG. 3E shows the step of arranging the second insulating layer, and FIG. 3F shows the step of removing the base sheet. . 図４は、図２に示す異方導電性シートの変形例（異方導電部が導体本体部および導体付属部を備える態様）の断面図を示す。FIG. 4 shows a cross-sectional view of a modified example of the anisotropically conductive sheet shown in FIG. 2 (a mode in which the anisotropically conductive part includes a conductor main body part and a conductor attachment part). 図５Ａ～図５は、図３Ａ～図３Ｆに示す異方導電性シートの製造工程図の変形例であり、図５Ａが、基材シートを準備する工程、図５Ｂが、第１絶縁層を配置する工程、図５Ｃが、第１導体部を配置する工程、図５Ｄが、第２絶縁層を配置する工程、図５Ｅが、第２導体部を配置する工程、図５Ｆが、第３絶縁層を配置する工程、図５Ｇが、基材シートを除去する工程を示す。5A to 5 are variations of the anisotropically conductive sheet manufacturing process diagrams shown in FIGS. 3A to 3F, in which FIG. 5A shows the process of preparing the base sheet, and FIG. 5B shows the process of preparing the first insulating layer. FIG. 5C is a step of arranging the first conductor, FIG. 5D is a step of arranging a second insulating layer, FIG. 5E is a step of arranging a second conductor, and FIG. 5F is a step of arranging a third insulating layer. FIG. 5G shows the step of placing the layers, and the step of removing the base sheet. 図６は、図２に示す異方導電性シートの変形例（周側面がテーパ面および縦面を含む態様）の断面図を示す。FIG. 6 shows a cross-sectional view of a modified example of the anisotropically conductive sheet shown in FIG. 2 (a mode in which the circumferential side surface includes a tapered surface and a vertical surface). 図７は、図２に示す異方導電性シートの変形例（周側面が縦面のみを含む態様）の断面図を示す。FIG. 7 shows a cross-sectional view of a modification of the anisotropically conductive sheet shown in FIG. 2 (a mode in which the circumferential side surface includes only a vertical surface). 図８は、図２に示す異方導電性シートの変形例（第１導体層の第１他方面が、絶縁層の絶縁第２面より、厚み方向他方側に位置する態様）の断面図を示す。FIG. 8 is a cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. show. 図９は、図６に示す異方導電性シートのさらなる変形例（周側面がテーパ面および縦面を含み、かつ、第１導体層の第１他方面が、絶縁層の絶縁第２面より、厚み方向他方側に位置する態様）の断面図を示す。FIG. 9 shows a further modification of the anisotropic conductive sheet shown in FIG. , an embodiment located on the other side in the thickness direction) is shown. 図１０は、図６に示す異方導電性シートのさらなる変形例（周側面が縦面のみを含み、かつ、第１導体層の第１他方面が、絶縁層の絶縁第２面より、厚み方向他方側に位置する態様）の断面図を示す。FIG. 10 shows a further modified example of the anisotropic conductive sheet shown in FIG. FIG. 図１１は、図２に示す異方導電性シートの変形例（第２導体部の周端部が露出する態様）の断面図を示す。FIG. 11 shows a cross-sectional view of a modified example of the anisotropic conductive sheet shown in FIG. 2 (a mode in which the peripheral end of the second conductor part is exposed).

＜一実施形態＞
本発明の異方導電性シートの一実施形態を図１～図２を参照して説明する。 <One embodiment>
An embodiment of the anisotropically conductive sheet of the present invention will be described with reference to FIGS. 1 and 2.

図１～図２に示すように、異方導電性シート１は、厚み方向に直交する面方向に延びる。異方導電性シート１は、厚み方向に互いに対向する一方面および他方面を有する。この異方導電性シート１は、次に説明する異方導電部３において厚み方向（異方）に導電性（電気伝導性）を有しており、後述する半導体素子やフレキシブルプリント配線板の導通検査に使用される検査用シートである。 As shown in FIGS. 1 and 2, the anisotropic conductive sheet 1 extends in a plane direction perpendicular to the thickness direction. The anisotropic conductive sheet 1 has one side and the other side facing each other in the thickness direction. This anisotropically conductive sheet 1 has conductivity (electrical conductivity) in the thickness direction (anisotropically) in the anisotropically conductive portion 3, which will be described next, and provides conductivity for semiconductor elements and flexible printed wiring boards, which will be described later. This is an inspection sheet used for inspection.

異方導電性シート１は、絶縁層２と、絶縁層２に配置される複数の異方導電部３とを備える。好ましくは、異方導電性シート１は、単数の絶縁層２と、複数の異方導電部３とのみを備える。 The anisotropic conductive sheet 1 includes an insulating layer 2 and a plurality of anisotropic conductive parts 3 arranged on the insulating layer 2. Preferably, the anisotropic conductive sheet 1 includes only a single insulating layer 2 and a plurality of anisotropic conductive parts 3.

絶縁層２は、面方向に延びるシート形状を有する。絶縁層２は、厚み方向一方面である絶縁第１面２１と、絶縁第１面２１と厚み方向他方側に対向する厚み方向他方面である絶縁第２面２２とを有する。 The insulating layer 2 has a sheet shape extending in the plane direction. The insulating layer 2 has a first insulating surface 21 that is one surface in the thickness direction, and a second insulating surface 22 that is the other surface in the thickness direction that faces the first insulating surface 21 and the other side in the thickness direction.

絶縁第１面２１は、異方導電性シート１の厚み方向一方面を形成する。 The insulating first surface 21 forms one surface of the anisotropically conductive sheet 1 in the thickness direction.

絶縁第２面２２は、異方導電性シート１の厚み方向他方面を形成する。 The second insulating surface 22 forms the other surface of the anisotropically conductive sheet 1 in the thickness direction.

また、絶縁層２には、複数の貫通孔６が形成されている。 Further, a plurality of through holes 6 are formed in the insulating layer 2 .

複数の貫通孔６は、複数の異方導電部３に対応して設けられる。つまり、複数の貫通孔６は、複数の異方導電部３と１対１対応で形成されている。複数の貫通孔６のそれぞれは、絶縁層２の厚み方向を貫通する。貫通孔６は、第１開口部６０および第２開口部７０を備える。 The plurality of through holes 6 are provided corresponding to the plurality of anisotropic conductive parts 3. That is, the plurality of through holes 6 are formed in one-to-one correspondence with the plurality of anisotropically conductive parts 3. Each of the plurality of through holes 6 penetrates the insulating layer 2 in the thickness direction. The through hole 6 includes a first opening 60 and a second opening 70.

第１開口部６０は、貫通孔６における厚み方向他方側部分（領域）に区画されている。第１開口部６０は、後述する第１導体部４に対応する形状を有する。具体的には、第１開口部６０は、断面視略矩形状を有する。第１開口部６０は、絶縁第２面２２から厚み方向一方側に向かって凹む形状を有する。具体的には、第１開口部６０は、絶縁層２における第１周側面６１および第１一方面６２によって、区画されている。 The first opening 60 is defined in the other side (region) of the through hole 6 in the thickness direction. The first opening 60 has a shape corresponding to the first conductor section 4 described later. Specifically, the first opening 60 has a substantially rectangular shape in cross-section. The first opening 60 has a shape that is recessed from the second insulating surface 22 toward one side in the thickness direction. Specifically, the first opening 60 is defined by a first circumferential side surface 61 and a first one side surface 62 of the insulating layer 2 .

第１周側面６１は、第１開口部６０の面方向外側面を区画する。第１周側面６１は、絶縁第２面２２から厚み方向一方側に延びる略筒形状（具体的には、円筒形状）を有する。 The first circumferential side surface 61 defines an outer side surface of the first opening 60 in the surface direction. The first circumferential side surface 61 has a substantially cylindrical shape (specifically, a cylindrical shape) extending from the second insulating surface 22 to one side in the thickness direction.

第１一方面６２は、第１開口部６０の厚み方向一方面を区画する。第１一方面６２は、第１周側面６１の厚み方向一端縁から面方向内側に向かって延びる。第１一方面６２は、底面視略円環（リング）形状を有する。なお、第１一方面６２の内側部分においては、第１開口部６０が第２開口部７０と連通する。第１一方面６２は、第１周側面６１と直交する。 The first surface 62 defines one surface of the first opening 60 in the thickness direction. The first one surface 62 extends from one end edge of the first circumferential side surface 61 in the thickness direction toward the inner side in the surface direction. The first one side 62 has a substantially annular (ring) shape when viewed from the bottom. Note that in the inner portion of the first surface 62, the first opening 60 communicates with the second opening 70. The first one side 62 is perpendicular to the first circumferential side 61 .

第２開口部７０は、第１開口部６０に連通しており、貫通孔６における厚み方向一方側部分（領域）に区画されている。つまり、第２開口部７０は、第１開口部６０の厚み方向一方側に位置する。第２開口部７０は、後述する第２導体部５に対応する形状を一部に含む。第２開口部７０は、絶縁層２の第２周側面８、延出面７および対向面３７によって、区画されている。 The second opening 70 communicates with the first opening 60 and is partitioned into one side (region) of the through hole 6 in the thickness direction. That is, the second opening 70 is located on one side of the first opening 60 in the thickness direction. The second opening 70 partially includes a shape corresponding to the second conductor section 5, which will be described later. The second opening 70 is defined by the second circumferential side 8 , the extending surface 7 and the opposing surface 37 of the insulating layer 2 .

第２周側面８は、厚み方向に延びる形状を有する。第２周側面８は、厚み方向に投影したときに、例えば、第１周側面６１の内側に配置されており、また、第１一方面６２に包含される。第２周側面８は、厚み方向に投影したときに、複数（具体的には、３つ）に分割されている。複数の第２周側面８は、面方向に投影したときに、連続する一方、例えば、厚み方向に投影したときに、互いに間隔を隔てて位置する。 The second circumferential side 8 has a shape extending in the thickness direction. The second circumferential side surface 8 is, for example, disposed inside the first circumferential side surface 61 when projected in the thickness direction, and is included in the first one side surface 62 . The second circumferential side surface 8 is divided into a plurality of parts (specifically, three parts) when projected in the thickness direction. The plurality of second circumferential side surfaces 8 are continuous when projected in the plane direction, but are spaced apart from each other when projected in the thickness direction, for example.

具体的には、第２周側面８は、他方側周側面の一例としての第３周側面４３、第４周側面４４および第５周側面４５を含む。第２周側面８は、好ましくは、第３周側面４３、第４周側面４４および第５周側面４５のみを含む。第３周側面４３は、第２開口部７０の厚み方向他方側部分を区画する。 Specifically, the second circumferential side 8 includes a third circumferential side 43, a fourth circumferential side 44, and a fifth circumferential side 45, which are examples of the other side circumferential side. The second circumferential side 8 preferably includes only the third circumferential side 43, the fourth circumferential side 44, and the fifth circumferential side 45. The third circumferential side 43 defines the other side of the second opening 70 in the thickness direction.

第３周側面４３は、第２周側面８における厚み方向他端部に位置する。第３周側面４３は、第１一方面６２の内端縁から厚み方向一方側に向かう形状を有する。第３周側面４３は、テーパ面９を含む。第３周側面４３は、好ましくは、テーパ面９のみを含む。 The third circumferential side surface 43 is located at the other end of the second circumferential side surface 8 in the thickness direction. The third circumferential side surface 43 has a shape extending from the inner edge of the first one side surface 62 toward one side in the thickness direction. The third circumferential side 43 includes a tapered surface 9. The third circumferential side surface 43 preferably includes only the tapered surface 9.

テーパ面９は、例えば、面方向に沿う断面積（正断面積）が、第１一方面６２の内端縁から厚み方向一方側に向かって次第に大きくなる略錐台形状（具体的には、略円錐台形状）を有する。つまり、テーパ面９は、厚み方向に沿う断面視において、厚み方向一方側に向かって、面方向において互いに対向する対向距離が次第に長くなる傾斜面である。 The tapered surface 9 has, for example, a substantially truncated cone shape (specifically, (approximately truncated cone shape). That is, the tapered surface 9 is an inclined surface in which the facing distance in the surface direction becomes gradually longer toward one side in the thickness direction in a cross-sectional view along the thickness direction.

テーパ面９と、第１一方面６２とのなす角度αは、例えば、鋭角であり、好ましくは、７５度以下、より好ましくは、６０度以下であり、また、例えば、１５度以上、好ましくは、３０度以上である。 The angle α between the tapered surface 9 and the first surface 62 is, for example, an acute angle, preferably 75 degrees or less, more preferably 60 degrees or less, and, for example, 15 degrees or more, preferably , 30 degrees or more.

第４周側面４４は、第２周側面８における厚み方向中間部に位置する。第４周側面４４は、厚み方向に投影したときに、第３周側面４３の外側に配置されており、より具体的には、第３周側面４３の外端縁（具体的には、テーパ面９の厚み方向一端縁）に対して面方向外側に間隔を隔てて配置されている。第４周側面４４は、厚み方向に延びる略筒形状（具体的には、円筒形状）を有する。第４周側面４４は、テーパ面９に対して、傾斜する。また、第４周側面４４は、断面視において、第１周側面６１に平行し、また、第１一方面６２に直交する。 The fourth circumferential side surface 44 is located at the middle part of the second circumferential side surface 8 in the thickness direction. The fourth circumferential side surface 44 is arranged on the outside of the third circumferential side surface 43 when projected in the thickness direction, and more specifically, the outer edge of the third circumferential side surface 43 (specifically, the tapered They are arranged at intervals on the outside in the surface direction with respect to one end edge in the thickness direction of the surface 9. The fourth circumferential side surface 44 has a substantially cylindrical shape (specifically, a cylindrical shape) extending in the thickness direction. The fourth circumferential side surface 44 is inclined with respect to the tapered surface 9. Further, the fourth circumferential side surface 44 is parallel to the first circumferential side surface 61 and perpendicular to the first one side surface 62 in cross-sectional view.

第５周側面４５は、第２周側面８における厚み方向一端部に位置する。第５周側面４５は、厚み方向に投影したときに、第３周側面４３および第４周側面４４の間に配置されており、具体的には、第３周側面４３および第４周側面４４と間隔が隔てられており、より具体的には、第３周側面４３の外端縁（具体的には、テーパ面９の厚み方向一端縁）と、第４周側面４４との間に位置する。第５周側面４５は、厚み方向に延びる略筒形状（具体的には、円筒形状）を有する。第５周側面４５は、断面視において、第４周側面４４に平行する。 The fifth circumferential side surface 45 is located at one end of the second circumferential side surface 8 in the thickness direction. The fifth circumferential side surface 45 is arranged between the third circumferential side surface 43 and the fourth circumferential side surface 44 when projected in the thickness direction, and specifically, the fifth circumferential side surface 45 is arranged between the third circumferential side surface 43 and the fourth circumferential side surface 44 More specifically, it is located between the outer edge of the third circumferential side 43 (specifically, one edge in the thickness direction of the tapered surface 9) and the fourth circumferential side 44. do. The fifth circumferential side 45 has a substantially cylindrical shape (specifically, a cylindrical shape) extending in the thickness direction. The fifth circumferential side surface 45 is parallel to the fourth circumferential side surface 44 in cross-sectional view.

延出面７は、第３周側面４３および第４周側面４４を面方向に連結する連結面である。具体的には、延出面７は、第３周側面４３の厚み方向一端縁（具体的には、テーパ面９の面方向外端縁）から、面方向外側に延び、第４周側面４４の厚み方向他端縁に至る形状を有する。延出面７は、平坦面である。延出面７は、平面視略円環（リング）形状を有する。延出面７は、厚み方向に投影したときに、例えば、第１一方面６２に包含される。延出面７は、断面視において、テーパ面９に傾斜し、第１周側面６１および第４周側面４４に直交し、また、第１一方面６２に平行する。 The extending surface 7 is a connecting surface that connects the third circumferential side surface 43 and the fourth circumferential side surface 44 in the plane direction. Specifically, the extending surface 7 extends outward in the surface direction from one end edge in the thickness direction of the third circumferential side surface 43 (specifically, the outer edge in the surface direction of the tapered surface 9), and extends outward in the surface direction from one edge in the thickness direction of the third circumferential side surface 43 It has a shape that extends to the other edge in the thickness direction. The extending surface 7 is a flat surface. The extending surface 7 has a substantially annular (ring) shape in plan view. For example, the extending surface 7 is included in the first one surface 62 when projected in the thickness direction. In cross-sectional view, the extending surface 7 is inclined toward the tapered surface 9, is perpendicular to the first circumferential side surface 61 and the fourth circumferential side surface 44, and is parallel to the first one side surface 62.

対向面３７は、延出面７の厚み方向一方側に間隔を隔てて対向配置されている。対向面３７は、第４周側面４４および第５周側面４５を連結しており、具体的には、第４周側面４４の厚み方向一端縁および第５周側面４５の厚み方向他端縁を連結する。対向面３７は、底面視略円環（リング）形状を有する。対向面３７は、断面視において、第１一方面６２および延出面７に平行し、第１周側面６１、第４周側面４４および第５周側面４５に直交し、テーパ面９に傾斜する。 The opposing surface 37 is disposed opposite to the extending surface 7 on one side in the thickness direction at an interval. The opposing surface 37 connects the fourth circumferential side surface 44 and the fifth circumferential side surface 45, and specifically connects one edge in the thickness direction of the fourth circumferential side surface 44 and the other edge in the thickness direction of the fifth circumferential side surface 45. Link. The opposing surface 37 has a substantially annular (ring) shape when viewed from the bottom. In cross-sectional view, the opposing surface 37 is parallel to the first one side 62 and the extension surface 7, perpendicular to the first circumferential side 61, the fourth circumferential side 44, and the fifth circumferential side 45, and inclined to the tapered surface 9.

絶縁層２は、第１一方面６２、第３周側面４３および延出面７によって仕切られる挟まれ部４０を有する。挟まれ部４０は、断面視略台形形状を含んでおり、略円環（リング）形状を有する。挟まれ部４０は、その内側端部において、断面視略鋭角三角形状の尖り部４６を含む。尖り部４６は、テーパ面９に対向する領域であって、厚み方向に投影したときに、第１一方面６２に重複するが、延出面７より内側にずれる。 The insulating layer 2 has a sandwiched portion 40 partitioned by a first side 62 , a third circumferential side 43 , and an extension surface 7 . The pinched portion 40 has a substantially trapezoidal cross-sectional shape, and has a substantially ring shape. The sandwiched portion 40 includes a pointed portion 46 having a substantially acute triangular cross-sectional shape at its inner end. The sharp portion 46 is a region facing the tapered surface 9, and when projected in the thickness direction, overlaps with the first one surface 62, but is shifted inward from the extending surface 7.

絶縁層２の材料として、例えば、ポリイミドなどの樹脂が挙げられる。 Examples of the material for the insulating layer 2 include resins such as polyimide.

絶縁層２の寸法は、その用途および応じて適宜設定される。絶縁層２の厚みは、例えば、５μｍ以上、例えば、１００μｍ以下である。 The dimensions of the insulating layer 2 are appropriately set depending on its use. The thickness of the insulating layer 2 is, for example, 5 μm or more and, for example, 100 μm or less.

第１開口部６０の面方向における最大長さＬ１は、断面視において面方向に対向する第１周側面６１間の最大距離であり、例えば、１μｍ以上、好ましくは、１０μｍ以上、より好ましくは、２０μｍ以上、さらに好ましくは、３０μｍ以上であり、また、例えば、１，０００μｍ以下である。また、第１開口部６０の開口断面積は、例えば、５０μｍ２以上、好ましくは、３００μｍ２以上、より好ましくは、７００μｍ２以上であり、また、例えば、８００，０００μｍ２以下である。 The maximum length L1 of the first opening 60 in the surface direction is the maximum distance between the first circumferential side surfaces 61 facing each other in the surface direction in a cross-sectional view, and is, for example, 1 μm or more, preferably 10 μm or more, more preferably, The thickness is 20 μm or more, more preferably 30 μm or more, and, for example, 1,000 μm or less. Further, the opening cross-sectional area of the first opening 60 is, for example, 50 μm 2 or more, preferably 300 μm 2 or more, more preferably 700 μm 2 or more, and, for example, 800,000 μm 2 or less.

第１開口部６０の深さ（厚み方向長さ）Ｔは、第１周側面６１の厚み方向長さであり、例えば、１μｍ以上、好ましくは、２μｍ以上、より好ましくは、３μｍ以上であり、また、例えば、２５μｍ以下、好ましくは、１８μｍ以下である。絶縁層２の厚みに対する第１開口部６０の深さの比は、例えば、０．１以上、好ましくは、０．２以上であり、また、例えば、０．９以下、好ましくは、０．８以下である。 The depth (thickness direction length) T of the first opening 60 is the thickness direction length of the first circumferential side surface 61, and is, for example, 1 μm or more, preferably 2 μm or more, more preferably 3 μm or more, Further, the thickness is, for example, 25 μm or less, preferably 18 μm or less. The ratio of the depth of the first opening 60 to the thickness of the insulating layer 2 is, for example, 0.1 or more, preferably 0.2 or more, and is, for example, 0.9 or less, preferably 0.8. It is as follows.

第３周側面４３の厚み方向長さ（テーパ面９の厚み方向長さに相当）Ｌ２は、例えば、２μｍ以上、好ましくは、５μｍ以上であり、また、例えば、４５μｍ以下、好ましくは、２５μｍ以下である。第３周側面４３の面方向長さ（テーパ面９の面方向長さに相当）Ｌ３は、例えば、２μｍ以上、好ましくは、５μｍ以上、好ましくは、１０μｍ以上であり、また、例えば、４５μｍ以下、好ましくは、２５μｍ以下である。 The length in the thickness direction of the third circumferential side 43 (corresponding to the length in the thickness direction of the tapered surface 9) L2 is, for example, 2 μm or more, preferably 5 μm or more, and, for example, 45 μm or less, preferably 25 μm or less. It is. The in-plane length L3 of the third circumferential side surface 43 (corresponding to the in-plane length of the tapered surface 9) is, for example, 2 μm or more, preferably 5 μm or more, preferably 10 μm or more, and, for example, 45 μm or less. , preferably 25 μm or less.

第４周側面４４の厚み方向長さは、後述する第２導体部５の厚みと同一である。 The length in the thickness direction of the fourth circumferential side surface 44 is the same as the thickness of the second conductor portion 5, which will be described later.

第５周側面４５の厚み方向長さは、例えば、２μｍ以上、好ましくは、５μｍ以上であり、また、例えば、４５μｍ以下、好ましくは、２５μｍ以下である。 The length in the thickness direction of the fifth circumferential side surface 45 is, for example, 2 μm or more, preferably 5 μm or more, and is, for example, 45 μm or less, preferably 25 μm or less.

延出面７の面方向長さ（延出長さ）Ｌ４は、例えば、３μｍ以上、好ましくは、７μｍ以上、より好ましくは、１５μｍ以上、さらに好ましくは、３０μｍ以上であり、また、例えば、１，０００μｍ以下、好ましくは、５００μｍ以下である。 The in-plane length (extension length) L4 of the extending surface 7 is, for example, 3 μm or more, preferably 7 μm or more, more preferably 15 μm or more, still more preferably 30 μm or more, and, for example, 1, 000 μm or less, preferably 500 μm or less.

第２開口部７０の深さ（厚み方向長さ）は、複数の第２周側面８の厚み方向長さの合計であり、つまり、第３周側面４３の厚み方向長さ、第４周側面４４の厚み方向長さ、および、第５周側面４５の厚み方向長さの合計である。第２開口部７０の深さ（厚み方向長さ）は、例えば、３μｍ以上、例えば、１００μｍ以下である。絶縁層２の厚みに対する第２開口部７０の深さの比は、例えば、０．１以上、好ましくは、０．２以上であり、また、例えば、０．９以下、好ましくは、０．８以下である。 The depth (length in the thickness direction) of the second opening 70 is the sum of the lengths in the thickness direction of the plurality of second circumferential sides 8, that is, the length in the thickness direction of the third circumferential side 43, the fourth circumferential side 44 and the length of the fifth circumferential side 45 in the thickness direction. The depth (thickness direction length) of the second opening 70 is, for example, 3 μm or more and, for example, 100 μm or less. The ratio of the depth of the second opening 70 to the thickness of the insulating layer 2 is, for example, 0.1 or more, preferably 0.2 or more, and is, for example, 0.9 or less, preferably 0.8. It is as follows.

絶縁層２の寸法が上記した範囲にあれば、異方導電部の異方導電性が向上する。 If the dimensions of the insulating layer 2 are within the above range, the anisotropic conductivity of the anisotropically conductive portion will be improved.

複数の異方導電部３のそれぞれは、複数の貫通孔６のそれぞれに配置されている。異方導電部３は、第１開口部６０と、第２開口部７０の一部とに充填されており、それらに対応する形状を有する。 Each of the plurality of anisotropic conductive parts 3 is arranged in each of the plurality of through holes 6. The anisotropic conductive portion 3 fills the first opening 60 and a portion of the second opening 70, and has a shape corresponding to the first opening 60 and a portion of the second opening 70.

異方導電部３は、第１開口部６０に配置される第１導体部４と、第２開口部７０に配置される第２導体部５とを備える。好ましくは、この異方導電部３は、第１導体部４および第２導体部５のみを備える。 The anisotropic conductive part 3 includes a first conductor part 4 arranged in a first opening 60 and a second conductor part 5 arranged in a second opening 70. Preferably, this anisotropic conductive section 3 includes only a first conductor section 4 and a second conductor section 5.

第１導体部４は、第１開口部６０の全部に充填されている。これにより、第１導体部４は、第１開口部６０と同一形状を有する。具体的には、第１導体部４は、面方向に延びる略平板形状を有する。第１導体部４は、厚み方向一方面である第１面３１と、第１面３１と厚み方向他方側に対向する他方面である第２面３２と、第１面３１の周端縁および第２面３２の周端縁を連結する第３面３３とを一体的に有する。 The first conductor portion 4 fills the entire first opening 60. Thereby, the first conductor portion 4 has the same shape as the first opening 60. Specifically, the first conductor portion 4 has a substantially flat plate shape extending in the plane direction. The first conductor portion 4 has a first surface 31 that is one surface in the thickness direction, a second surface 32 that is the other surface opposite to the first surface 31 and the other side in the thickness direction, and a peripheral edge of the first surface 31 and a second surface 32 that is the other surface opposite the first surface 31 in the thickness direction. It integrally has a third surface 33 that connects the peripheral edge of the second surface 32.

第１面３１は、面方向に沿う平坦面である。第１面３１は、周端部１２と、周端部１２の内側に位置する内側部１１とに区画される。 The first surface 31 is a flat surface along the surface direction. The first surface 31 is divided into a peripheral end portion 12 and an inner portion 11 located inside the peripheral end portion 12 .

周端部１２は、絶縁層２の第１一方面６２に面する。具体的には、周端部１２は、第１面３１において、第１一方面６２に接触する領域である。周端部１２は、平面視において、第１一方面６２と同一形状を有する。 The peripheral end portion 12 faces the first side 62 of the insulating layer 2 . Specifically, the peripheral end portion 12 is a region of the first surface 31 that contacts the first one surface 62 . The peripheral end portion 12 has the same shape as the first surface 62 in plan view.

内側部１１は、第１面３１において、周端部１２より内側に位置する領域である。内側部１１は、後述する第２導体部５に接触する。 The inner portion 11 is a region located inside the peripheral end portion 12 on the first surface 31 . The inner part 11 contacts the second conductor part 5, which will be described later.

第２面３２は、第１面３１に平行する平坦面である。第２面３２は、絶縁層２から露出する。第２面３２は、異方導電部３において厚み方向他方側に露出する厚み方向他方面の一例である。具体的には、第２面３２は、絶縁層２の絶縁第２面２２から、厚み方向他方側に向かって露出する。また、第２面３２は、絶縁第２面２２と面一である。第２面３２の外端縁は、絶縁第２面２２の内端縁と連続する。 The second surface 32 is a flat surface parallel to the first surface 31. The second surface 32 is exposed from the insulating layer 2. The second surface 32 is an example of the other surface in the thickness direction that is exposed on the other side in the thickness direction in the anisotropic conductive portion 3 . Specifically, the second surface 32 is exposed from the second insulating surface 22 of the insulating layer 2 toward the other side in the thickness direction. Further, the second surface 32 is flush with the insulating second surface 22. The outer edge of the second surface 32 is continuous with the inner edge of the insulating second surface 22.

第３面３３は、第１導体部４の側面（周側面）である。第３面３３は、第１周側面６１に接触する。第３面３３は、厚み方向に沿って延びており、断面視において、ストレート形状を有する。 The third surface 33 is a side surface (peripheral side surface) of the first conductor portion 4. The third surface 33 contacts the first circumferential side surface 61. The third surface 33 extends along the thickness direction and has a straight shape in cross-sectional view.

この第１導体部４では、第１面３１の周端部１２と、第３面３３とが、絶縁層２に接触する。なお、第１面３１の周端部１２は、挟まれ部４０と接触する。 In this first conductor portion 4 , the peripheral end portion 12 of the first surface 31 and the third surface 33 are in contact with the insulating layer 2 . Note that the peripheral end portion 12 of the first surface 31 contacts the sandwiched portion 40 .

一方、第２面３２の全面は、絶縁層２から露出している。 On the other hand, the entire second surface 32 is exposed from the insulating layer 2.

第２導体部５は、第２開口部７０に配置されている。具体的には、第２導体部５は、第２開口部７０の厚み方向他方側部分を充填している。第２導体部５は、厚み方向一方側に向かって開放される略ハット形状を有する。 The second conductor portion 5 is arranged in the second opening 70. Specifically, the second conductor portion 5 fills the other side of the second opening 70 in the thickness direction. The second conductor portion 5 has a substantially hat shape that is opened toward one side in the thickness direction.

第２導体部５は、略同一厚みで延びる形状を有しており、厚み方向一方面である第４面３４と、第４面３４と厚み方向他方側に対向する他方面である第５面３５と、第４面３４の周端縁および第５面３５の周端縁を連結する第６面３６とを一体的に有する。 The second conductor portion 5 has a shape extending with substantially the same thickness, and has a fourth surface 34 which is one surface in the thickness direction, and a fifth surface which is the other surface opposite to the fourth surface 34 and the other side in the thickness direction. 35, and a sixth surface 36 that connects the peripheral edge of the fourth surface 34 and the peripheral edge of the fifth surface 35.

第５面３５は、第１導体部４の内側部１１と、絶縁層２の第３周側面４３および延出面７とに接触する。第５面３５において、絶縁層２において第３周側面４３および延出面７に接触する部分は、挟まれ部４０を、第１導体部４の第１面３１の周端部１２とともに、厚み方向に挟む（サンドイッチ構造を形成する）。 The fifth surface 35 contacts the inner side 11 of the first conductor section 4 and the third peripheral side surface 43 and extension surface 7 of the insulating layer 2 . In the fifth surface 35 , the portion of the insulating layer 2 that contacts the third circumferential side surface 43 and the extension surface 7 includes the sandwiched portion 40 along with the circumferential end portion 12 of the first surface 31 of the first conductor portion 4 in the thickness direction. (to form a sandwich structure).

第４面３４の周端部は、絶縁層２の対向面３７に接触する。 A peripheral end of the fourth surface 34 contacts the opposing surface 37 of the insulating layer 2 .

一方、第４面３４において周端部の内側部分は、厚み方向一方側に露出しており、異方導電部３において厚み方向一方側に露出する厚み方向一方面の一例である。第４面３４は、第５面３５と面方向にわたって同一間隔（厚み方向距離）が隔てられている。 On the other hand, the inner portion of the peripheral end portion of the fourth surface 34 is exposed on one side in the thickness direction, and is an example of one surface in the thickness direction exposed on one side in the thickness direction in the anisotropic conductive portion 3 . The fourth surface 34 is separated from the fifth surface 35 by the same distance (thickness direction distance) in the surface direction.

第６面３６は、第４周側面４４に接触する。第６面３６は、厚み方向に沿って延びる略筒形状（具体的には、円筒形状）を有する。 The sixth surface 36 contacts the fourth circumferential side surface 44 . The sixth surface 36 has a substantially cylindrical shape (specifically, a cylindrical shape) extending along the thickness direction.

これにより、第２導体部５は、第１導体部４における第１面３１の内側部１１と、絶縁層２における第３周側面４３、延出面７、第４周側面４４および対向面３７とに接触する。 Thereby, the second conductor portion 5 is connected to the inner side 11 of the first surface 31 of the first conductor portion 4, the third circumferential side surface 43, the extension surface 7, the fourth circumferential side surface 44, and the opposing surface 37 of the insulating layer 2. come into contact with.

異方導電部３の材料は、特に限定されず、例えば、銅、クロム、ニッケル、金などの金属が挙げられる。これらは、単独使用または併用することができる。第１導体部４の材料として、好ましくは、銅が挙げられる。第２導体部５の材料として、好ましくは、ニッケル、金が挙げられる。なお、第１導体部４および第２導体部５のそれぞれは、厚み方向に複数の層が積層された積層体であってもよい。 The material of the anisotropic conductive part 3 is not particularly limited, and examples thereof include metals such as copper, chromium, nickel, and gold. These can be used alone or in combination. Preferably, the material of the first conductor portion 4 is copper. Preferable materials for the second conductor portion 5 include nickel and gold. Note that each of the first conductor part 4 and the second conductor part 5 may be a laminate in which a plurality of layers are laminated in the thickness direction.

異方導電部３の寸法は、その用途および応じて適宜設定される。異方導電部３の厚みは、内側部１１における第１導体部４の厚みＴと、内側部１１に面する第２導体部５の厚みとの合計として、例えば、５μｍ以上、好ましくは、１０μｍ以上であり、また、例えば、１００μｍ以下、好ましくは、５０μｍ以下である。第２面３２および第４面２３間の距離は、例えば、１０μｍ以上、好ましくは、２０μｍ以上であり、また、例えば、５００μｍ以下である。 The dimensions of the anisotropically conductive portion 3 are appropriately set depending on its use. The thickness of the anisotropically conductive part 3 is, for example, 5 μm or more, preferably 10 μm as the sum of the thickness T of the first conductor part 4 in the inner part 11 and the thickness of the second conductor part 5 facing the inner part 11. or more, and is, for example, 100 μm or less, preferably 50 μm or less. The distance between the second surface 32 and the fourth surface 23 is, for example, 10 μm or more, preferably 20 μm or more, and, for example, 500 μm or less.

第１導体部４の寸法は、第１開口部６０の寸法と同一の寸法を有する。第２面３２の面積（第１導体部４の底面積）は、第１開口部６０の開口断面積と同一である。なお、異方導電部３の厚みに対する第１導体部４の厚みＴの割合は、例えば、２０％以上、好ましくは、４０％以上であり、また、例えば、９０％以下、好ましくは、７０％以下である。 The dimensions of the first conductor portion 4 are the same as the dimensions of the first opening 60. The area of the second surface 32 (the bottom area of the first conductor portion 4) is the same as the opening cross-sectional area of the first opening 60. Note that the ratio of the thickness T of the first conductor part 4 to the thickness of the anisotropic conductive part 3 is, for example, 20% or more, preferably 40% or more, and, for example, 90% or less, preferably 70%. It is as follows.

第２導体部５の厚みは、例えば、２μｍ以上、好ましくは、３μｍ以上であり、また、例えば、２５μｍ以下、好ましくは、１８μｍ以下である。異方導電部３の厚みに対する第２導体部５の厚みの割合は、例えば、１０％以上、好ましくは、３０％以上であり、また、例えば、８０％以下、好ましくは、６０％以下である。第１導体部４の厚みＴに対する第２導体部５の厚みの比は、例えば、０．１以上、好ましくは、０．２以上であり、また、例えば、５以下、好ましくは、２以下である。 The thickness of the second conductor portion 5 is, for example, 2 μm or more, preferably 3 μm or more, and is, for example, 25 μm or less, preferably 18 μm or less. The ratio of the thickness of the second conductor part 5 to the thickness of the anisotropic conductive part 3 is, for example, 10% or more, preferably 30% or more, and is, for example, 80% or less, preferably 60% or less. . The ratio of the thickness of the second conductor portion 5 to the thickness T of the first conductor portion 4 is, for example, 0.1 or more, preferably 0.2 or more, and is, for example, 5 or less, preferably 2 or less. be.

異方導電部３の寸法が上記した範囲にあれば、異方導電部３の異方導電性が向上する。 If the dimensions of the anisotropically conductive portion 3 are within the above range, the anisotropic conductivity of the anisotropically conductive portion 3 will be improved.

次に、図３Ａ～図３Ｅを参照して、図１および図２に示す異方導電性シート１の製造方法を説明する。 Next, a method for manufacturing the anisotropically conductive sheet 1 shown in FIGS. 1 and 2 will be described with reference to FIGS. 3A to 3E.

まず、図３Ａに示すように、基材シート２０を準備する。 First, as shown in FIG. 3A, a base sheet 20 is prepared.

基材シート２０は、面方向に延びるシート形状を有する。基材シート２０は、例えば、ステンレスなどの金属からなる金属層（図示せず）と、金属層の厚み方向一方面に配置され、例えば、ポリイミドなどの樹脂からなる樹脂層とを備える。 The base sheet 20 has a sheet shape extending in the plane direction. The base sheet 20 includes a metal layer (not shown) made of metal such as stainless steel, and a resin layer made of resin such as polyimide, which is disposed on one side in the thickness direction of the metal layer.

次いで、図３Ｂに示すように、複数の第１導体部４（図１参照）を基材シート２０の厚み方向一方面に配置する。例えば、アディティブ法やサブトラクティブ法などのパターンニング法により、複数の第１導体部４を、基材シート２０の厚み方向一方面に、面方向に互いに間隔を隔てて形成する。 Next, as shown in FIG. 3B, a plurality of first conductor portions 4 (see FIG. 1) are arranged on one surface of the base sheet 20 in the thickness direction. For example, by a patterning method such as an additive method or a subtractive method, a plurality of first conductor portions 4 are formed on one surface of the base sheet 20 in the thickness direction at intervals from each other in the surface direction.

次いで、図３Ｃに示すように、第１絶縁層２３を、基材シート２０の厚み方向一方面に、複数の第１導体部４の内側部１１を露出するように、配置する。 Next, as shown in FIG. 3C, the first insulating layer 23 is placed on one surface of the base sheet 20 in the thickness direction so that the inner parts 11 of the plurality of first conductor parts 4 are exposed.

第１絶縁層２３は、絶縁層２（図２参照）の厚み方向他方側部分に相当する。第１絶縁層２３は、第１周側面６１、第１一方面６２、第３周側面４３および延出面７を形成する。 The first insulating layer 23 corresponds to the other side in the thickness direction of the insulating layer 2 (see FIG. 2). The first insulating layer 23 forms a first circumferential side surface 61 , a first one side surface 62 , a third circumferential side surface 43 , and an extension surface 7 .

第１絶縁層２３を形成するには、例えば、感光性の樹脂のワニスを、基材シート２０の一方面に、複数の第１導体部４の第１面３１および第３面３３を被覆するように塗布し、続いて、露光および現像により、複数の第３周側面４３を形成する。これにより、複数の内側部１１を露出する第１絶縁層２３を形成する。 To form the first insulating layer 23, for example, one surface of the base sheet 20 is coated with the first surface 31 and the third surface 33 of the plurality of first conductor sections 4 with a photosensitive resin varnish. Then, a plurality of third circumferential side surfaces 43 are formed by applying the coating as described above, followed by exposure and development. As a result, the first insulating layer 23 exposing the plurality of inner parts 11 is formed.

次いで、図３Ｄに示すように、第２導体部５を、第１絶縁層２３の第３周側面４３および延出面７と、第１導体部４の内側部１１とに配置する。 Next, as shown in FIG. 3D, the second conductor section 5 is placed on the third circumferential side surface 43 and the extension surface 7 of the first insulating layer 23, and on the inner side 11 of the first conductor section 4.

複数の第２導体部５を配置する方法としては、例えば、上記した金属を含有するめっき浴を用いるめっき、例えば、上記した金属からなる粒子を含有するペースト組成物の塗布などが挙げられ、好ましくは、めっき、より好ましくは、電解めっきが挙げられる。 Examples of the method for arranging the plurality of second conductor parts 5 include plating using a plating bath containing the above-mentioned metals, for example, application of a paste composition containing particles made of the above-mentioned metals, and the like. Examples include plating, more preferably electrolytic plating.

これにより、複数の第２導体部５のそれぞれを、複数の第１導体部４のそれぞれに対応するように、配置する。 Thereby, each of the plurality of second conductor parts 5 is arranged so as to correspond to each of the plurality of first conductor parts 4.

次いで、図３Ｅに示すように、第２絶縁層２４を、第１絶縁層２３の延出面７に、第２導体部５の第４面３４の周端部および第６面３６を接触するように、配置する。 Next, as shown in FIG. 3E, the second insulating layer 24 is placed so that the peripheral edge of the fourth surface 34 and the sixth surface 36 of the second conductor section 5 are in contact with the extended surface 7 of the first insulating layer 23. Place it in.

第２絶縁層２４は、絶縁層２（図２参照）の厚み方向一方側部分に相当する。第２絶縁層２４は、第４周側面４４、対向面３７および第５周側面４５を形成する。 The second insulating layer 24 corresponds to one side in the thickness direction of the insulating layer 2 (see FIG. 2). The second insulating layer 24 forms a fourth circumferential side surface 44, an opposing surface 37, and a fifth circumferential side surface 45.

第２絶縁層２４の形成方法は、第１絶縁層２３のそれと同様である。 The method of forming the second insulating layer 24 is the same as that of the first insulating layer 23.

第１絶縁層２３および第２絶縁層２４によって、第２開口部７０が形成される。 A second opening 70 is formed by the first insulating layer 23 and the second insulating layer 24 .

これによって、第１開口部６０および第２開口部７０を有する複数の貫通孔６を有し、第１絶縁層２３および第２絶縁層２４を備える絶縁層２が形成される。 As a result, the insulating layer 2 having the plurality of through holes 6 having the first opening 60 and the second opening 70 and including the first insulating layer 23 and the second insulating layer 24 is formed.

なお、第１絶縁層２３および第２絶縁層２４の境界は、図３Ｅに示すように、明確に観察されてもよく、また、図２に示すように、不明瞭であって、観察されなくてもよい。 Note that the boundary between the first insulating layer 23 and the second insulating layer 24 may be clearly observed as shown in FIG. 3E, or may be unclear and not observed as shown in FIG. It's okay.

これによって、絶縁層２と、複数の異方導電部３とを備える異方導電性シート１を、基材シート２０の厚み方向一方面に製造する。 As a result, an anisotropically conductive sheet 1 including an insulating layer 2 and a plurality of anisotropically conductive parts 3 is manufactured on one side of the base sheet 20 in the thickness direction.

その後、図３Ｆに示すように、基材シート２０を除去する。例えば、エッチングなどによって、金属層および樹脂層を、厚み方向他方側から順次除去する。 Thereafter, as shown in FIG. 3F, the base sheet 20 is removed. For example, the metal layer and the resin layer are sequentially removed from the other side in the thickness direction by etching or the like.

これにより、第２面３２および絶縁第２面２２が、厚み方向他方側に露出する。 As a result, the second surface 32 and the second insulating surface 22 are exposed on the other side in the thickness direction.

これによって、絶縁層２と複数の異方導電部３とを備える異方導電性シート１を製造する。 As a result, an anisotropically conductive sheet 1 including an insulating layer 2 and a plurality of anisotropically conductive parts 3 is manufactured.

次に、異方導電性シート１を用いて導通検査を実施する方法を、図３Ｅを参照して説明する。 Next, a method of conducting a continuity test using the anisotropic conductive sheet 1 will be described with reference to FIG. 3E.

まず、図３Ｆの仮想線で示すように、異方導電性シート１の厚み方向一方側に、複数の第１端子４１を配置する。併せて、異方導電性シート１の厚み方向他方側に、複数の第２端子４２を配置する。 First, as shown by the imaginary line in FIG. 3F, a plurality of first terminals 41 are arranged on one side of the anisotropic conductive sheet 1 in the thickness direction. In addition, a plurality of second terminals 42 are arranged on the other side of the anisotropic conductive sheet 1 in the thickness direction.

複数の第１端子４１としては、例えば、被検査用端子、具体的には、半導体素子の端子、フレキシブルプリント配線板の端子などが挙げられる。複数の第２端子４２としては、例えば、検査用端子などが挙げられ、具体的には、テスタープローブなどが挙げられる。 Examples of the plurality of first terminals 41 include terminals to be inspected, specifically, terminals of semiconductor elements, terminals of flexible printed wiring boards, and the like. Examples of the plurality of second terminals 42 include test terminals, and specifically, tester probes.

続いて、図３Ｆの実線で示すように、複数の第１端子４１のそれぞれの先端、および、複数の第２端子４２のそれぞれの先端を、異方導電部３の複数の第４面３４の内側部分のそれぞれ、および、複数の第２面３２のそれぞれに接触させる。その後、第２端子４２が備えられる検査装置（具体的には、テスター）の駆動に基づいて、第１端子４１が備えられる半導体素子やフレキシブルプリント配線板を導通検査する。 Subsequently, as shown by the solid line in FIG. 3F, the tips of each of the plurality of first terminals 41 and the tips of each of the plurality of second terminals 42 are connected to the plurality of fourth surfaces 34 of the anisotropic conductive section 3. Each of the inner portions and each of the plurality of second surfaces 32 are contacted. Thereafter, the semiconductor element or flexible printed wiring board provided with the first terminal 41 is tested for continuity based on driving of the testing device (specifically, a tester) provided with the second terminal 42 .

そして、この異方導電性シート１では、第１導体部４は、略平板形状に形成されるので、十分な厚みＴを確保し易く、そのため、異方導電部３の異方導電性を確実に向上させることができる。 In this anisotropically conductive sheet 1, since the first conductor part 4 is formed into a substantially flat plate shape, it is easy to ensure a sufficient thickness T, and therefore, the anisotropic conductivity of the anisotropically conductive part 3 is ensured. can be improved.

また、第１導体部４の周端部と、第２導体部５において延出面７に接触する部分とは、厚み方向において、絶縁層２の挟まれ部４０を挟んでいる。そのため、異方導電部３の絶縁層２からの脱落を抑制することができる。 Further, the peripheral end portion of the first conductor portion 4 and the portion of the second conductor portion 5 that contacts the extension surface 7 sandwich the sandwiched portion 40 of the insulating layer 2 in the thickness direction. Therefore, it is possible to suppress the anisotropically conductive portion 3 from falling off from the insulating layer 2 .

従って、この異方導電性シート１は、異方導電部３の絶縁層２からの脱落の抑制と、異方導電部３の優れた異方導電性とを両立することができる。 Therefore, this anisotropically conductive sheet 1 can both suppress the anisotropically conductive portion 3 from falling off from the insulating layer 2 and provide excellent anisotropically conductive property of the anisotropically conductive portion 3.

＜変形例＞
変形例において、一実施形態と同様の部材および工程については、同一の参照符号を付し、その詳細な説明を省略する。また、変形例は、特記する以外、一実施形態と同様の作用効果を奏することができる。さらに、一実施形態およびその変形例を適宜組み合わせることができる。 <Modified example>
In the modified example, the same reference numerals are given to the same members and steps as in the embodiment, and detailed description thereof will be omitted. Moreover, the modified example can have the same effects as the one embodiment except as otherwise specified. Furthermore, one embodiment and its modified examples can be combined as appropriate.

図４に示すように、第２導体部５は、導体付属部５２をさらに備えることができる。つまり、図４の変形例における第２導体部５は、導体本体部５１および導体付属部５２を備える。 As shown in FIG. 4, the second conductor section 5 can further include a conductor attachment section 52. That is, the second conductor section 5 in the modified example of FIG. 4 includes a conductor main body section 51 and a conductor attachment section 52.

図４の変形例における導体本体部５１は、一実施形態の第２導体部５に相当する。この変形例では、導体本体部５１は、第２導体部５の厚み方向他方側部分に相当する。 The conductor main body portion 51 in the modified example of FIG. 4 corresponds to the second conductor portion 5 of one embodiment. In this modification, the conductor body portion 51 corresponds to the other side portion of the second conductor portion 5 in the thickness direction.

導体補助部５２は、導体本体部５１の厚み方向一方面に配置されている。導体補助部５２は、第２導体部５の厚み方向一方側部分に相当する。導体補助部５２は、第５周側面４５に接触している。導体補助部５２の厚み方向一方面は、第２導体部５の第４面３４に相当する。導体補助部５２の厚みは、例えば、０．０１μｍ以上、また、１μｍ以下である。 The conductor auxiliary portion 52 is arranged on one surface of the conductor main body portion 51 in the thickness direction. The conductor auxiliary portion 52 corresponds to one side portion of the second conductor portion 5 in the thickness direction. The conductor auxiliary portion 52 is in contact with the fifth circumferential side surface 45 . One surface of the conductor auxiliary portion 52 in the thickness direction corresponds to the fourth surface 34 of the second conductor portion 5 . The thickness of the conductor auxiliary portion 52 is, for example, 0.01 μm or more and 1 μm or less.

また、この異方導電性シート１は、第３導体部４８をさらに備える。 Moreover, this anisotropic conductive sheet 1 further includes a third conductor portion 48 .

第３導体部４８は、第１導体部４の第２面３２と、第１導体部４の周囲（外側近傍）に位置する絶縁層２の絶縁第２面２２とに接触している。第３導体部４８は、底面視において、第１導体部４を包含しており、第１導体部４よりやや大きい寸法（面方向長さ）を有する。 The third conductor section 48 is in contact with the second surface 32 of the first conductor section 4 and the insulating second surface 22 of the insulating layer 2 located around the first conductor section 4 (near the outside). The third conductor part 48 includes the first conductor part 4 when viewed from the bottom, and has a slightly larger dimension (length in the plane direction) than the first conductor part 4.

第３導体部４８の材料および厚みは、導体補助部５２のそれらと同様である。 The material and thickness of the third conductor section 48 are the same as those of the conductor auxiliary section 52.

一実施形態の製造方法では、２つの絶縁層（第１絶縁層２３および第２絶縁層２４）から絶縁層２を形成しているが、例えば、図５Ａ～図５Ｇに示すように、３つの絶縁層（第３絶縁層２５、第４絶縁層２６および第５絶縁層２７）から絶縁層２を形成することもできる。 In the manufacturing method of one embodiment, the insulating layer 2 is formed from two insulating layers (the first insulating layer 23 and the second insulating layer 24), but for example, as shown in FIGS. 5A to 5G, three The insulating layer 2 can also be formed from insulating layers (the third insulating layer 25, the fourth insulating layer 26, and the fifth insulating layer 27).

この変形例では、図５Ａに示すように、まず、基材シート２０を準備し、次いで、図５Ｂに示すように、第３絶縁層２５を、基材シート２０の厚み方向一方面に配置する。第３絶縁層２５を、第１導体部４の逆パターンで、基材シート２０の厚み方向一方面に形成する。第３絶縁層２５は、絶縁層２（図２参照）における絶縁第２面２２および第１周側面６１を形成する。 In this modification, as shown in FIG. 5A, first, the base sheet 20 is prepared, and then, as shown in FIG. 5B, the third insulating layer 25 is arranged on one side in the thickness direction of the base sheet 20. . The third insulating layer 25 is formed on one surface of the base sheet 20 in the thickness direction in a pattern opposite to that of the first conductor portion 4 . The third insulating layer 25 forms the second insulating surface 22 and the first peripheral side surface 61 in the insulating layer 2 (see FIG. 2).

次いで、図５Ｃに示すように、第１導体部４を、基材シート２において第３絶縁層２５から露出する厚み方向一方面（露出面）に形成し、次いで、図５Ｄに示すように、第４絶縁層２６を、第３絶縁層２５および第１導体部４に対して配置する。 Next, as shown in FIG. 5C, the first conductor portion 4 is formed on one thickness direction surface (exposed surface) of the base sheet 2 exposed from the third insulating layer 25, and then, as shown in FIG. 5D, A fourth insulating layer 26 is arranged with respect to the third insulating layer 25 and the first conductor portion 4 .

第３絶縁層２５および第４絶縁層２６は、上記した変形例における第１絶縁層２３（図３Ｃ参照）に相当し、具体的には、第１絶縁層２３と同一の形状を有する。第４絶縁層２６は、第１一方面６２、第３周側面４３および延出面７を形成する。 The third insulating layer 25 and the fourth insulating layer 26 correspond to the first insulating layer 23 (see FIG. 3C) in the above-described modification, and specifically have the same shape as the first insulating layer 23. The fourth insulating layer 26 forms a first side 62 , a third circumferential side 43 , and an extension surface 7 .

次いで、図５Ｅに示すように、第２導体部５を形成し、続いて、図５Ｆに示すように、第５絶縁層２７を形成する。第５絶縁層２７は、上記した変形例における第２絶縁層２４（図３Ｅ参照）に相当し、具体的には、第２絶縁層２４と同一の形状を有する。第５絶縁層２７は、第４周側面４４、対向面３７および第５周側面４５を形成する。これにより、第３絶縁層２５、第４絶縁層２６および第５絶縁層２７からなる絶縁層２を形成する。 Next, as shown in FIG. 5E, the second conductor portion 5 is formed, and then, as shown in FIG. 5F, the fifth insulating layer 27 is formed. The fifth insulating layer 27 corresponds to the second insulating layer 24 (see FIG. 3E) in the above-described modification, and specifically has the same shape as the second insulating layer 24. The fifth insulating layer 27 forms a fourth circumferential side surface 44 , an opposing surface 37 , and a fifth circumferential side surface 45 . Thereby, the insulating layer 2 consisting of the third insulating layer 25, the fourth insulating layer 26, and the fifth insulating layer 27 is formed.

その後、図５Ｇに示すように、基材シート２０を除去する。 Thereafter, as shown in FIG. 5G, the base sheet 20 is removed.

図６に示すように、この変形例では、第３周側面４３は、テーパ面９と、縦面１０とを含む。 As shown in FIG. 6, in this modification, the third circumferential side 43 includes a tapered surface 9 and a vertical surface 10.

テーパ面９は、第３周側面４３における厚み方向他方側部分に相当する。 The tapered surface 9 corresponds to the other side portion of the third circumferential side surface 43 in the thickness direction.

縦面１０は、テーパ面９の厚み方向一方側に配置される。つまり、縦面１０は、第３周側面４３における厚み方向一方側部分に相当する。具体的には、縦面１０は、テーパ面９の厚み方向一端縁から、厚み方向一方側に延び、延出面７に連続する。縦面１０は、厚み方向に延びる略筒形状（具体的には、テーパ面９の錐台形状と軸線を共有する略円筒形状または略角筒形状）を有する。縦面１０は、断面視において、ストレート面である。具体的には、断面視において、面方向に対向する２つの縦面１０の対向距離は、同一である。 The vertical surface 10 is arranged on one side of the tapered surface 9 in the thickness direction. In other words, the vertical surface 10 corresponds to one side in the thickness direction of the third circumferential side surface 43. Specifically, the vertical surface 10 extends from one end edge of the tapered surface 9 in the thickness direction to one side in the thickness direction, and is continuous with the extending surface 7 . The vertical surface 10 has a substantially cylindrical shape (specifically, a substantially cylindrical shape or a substantially rectangular cylindrical shape that shares an axis with the truncated pyramid shape of the tapered surface 9) extending in the thickness direction. The vertical surface 10 is a straight surface when viewed in cross section. Specifically, in a cross-sectional view, the opposing distances between the two vertical surfaces 10 that face each other in the surface direction are the same.

一方、図７に示すように、この変形例では、第２周側面４３は、テーパ面９を含まず、縦面１０を含む。具体的には、第２周側面４３は、縦面１０のみを含む。 On the other hand, as shown in FIG. 7, in this modification, the second circumferential side surface 43 does not include the tapered surface 9 but includes the vertical surface 10. Specifically, the second circumferential side surface 43 includes only the vertical surface 10.

また、一実施形態では、第１導体部４の第２面３２は、絶縁層２の絶縁第２面２２と面一であったが、図８に示すように、絶縁層２の絶縁第２面２２より、厚み方向他方側に位置してもよい。 Further, in one embodiment, the second surface 32 of the first conductor section 4 was flush with the second insulating surface 22 of the insulating layer 2, but as shown in FIG. It may be located on the other side of the surface 22 in the thickness direction.

この変形例では、図８に示すように、第１導体部４は、その厚み方向他方側部分が、面方向に投影したときに、絶縁層２の絶縁第２面２２から厚み方向他方側に突出している。具体的には、第１導体部４の第３面３３は、その厚み方向一方側部分が絶縁層２に被覆される一方、その厚み方向他方側部分が絶縁層２から露出する。 In this modification, as shown in FIG. 8, the first conductor portion 4 has a portion on the other side in the thickness direction extending from the second insulating surface 22 of the insulating layer 2 on the other side in the thickness direction when projected in the plane direction. It stands out. Specifically, the third surface 33 of the first conductor portion 4 is covered with the insulating layer 2 at one side in the thickness direction, while the other side in the thickness direction is exposed from the insulating layer 2 .

なお、図８に示す変形例より、図２に示す一実施形態、図６および図７に示す変形例が、好適である。図２に示す一実施形態、図６および図７に示す変形例は、第２面３２が絶縁第２面２２と面一であるので、第２面３２が絶縁第２面２２より厚み方向一方側に突出する図８に示す変形例より、異方導電性シート１の厚み方向他方面の平滑化を図ることができる。 Note that the embodiment shown in FIG. 2 and the modifications shown in FIGS. 6 and 7 are more suitable than the modification shown in FIG. 8. In the embodiment shown in FIG. 2 and the modification shown in FIGS. 6 and 7, the second surface 32 is flush with the second insulating surface 22, so that the second surface 32 is on one side in the thickness direction from the second insulating surface 22. By using the modified example shown in FIG. 8 which projects to the side, the other surface in the thickness direction of the anisotropic conductive sheet 1 can be smoothed.

図９に示すように、第２周側面４３が、テーパ面９および縦面１０を含み、かつ、第２面３２が絶縁第２面２２より厚み方向一方側に突出することもできる。 As shown in FIG. 9, the second circumferential side surface 43 may include the tapered surface 9 and the vertical surface 10, and the second surface 32 may protrude from the insulating second surface 22 to one side in the thickness direction.

図１０に示すように、第２周側面４３が、テーパ面９を含まず、縦面１０のみを含み、かつ、第２面３２が絶縁第２面２２より厚み方向一方側に突出することもできる。 As shown in FIG. 10, the second circumferential side surface 43 may not include the tapered surface 9 but only the vertical surface 10, and the second surface 32 may protrude from the insulating second surface 22 to one side in the thickness direction. can.

さらには、図１１に示すように、第２導体部５の第４面３４の周端部が、厚み方向一方側に露出することもできる。 Furthermore, as shown in FIG. 11, the peripheral end of the fourth surface 34 of the second conductor portion 5 may be exposed on one side in the thickness direction.

第２導体部５の第６面３６は、絶縁層２の第４周側面４４と間隔が隔てられる。 The sixth surface 36 of the second conductor portion 5 is spaced apart from the fourth circumferential side surface 44 of the insulating layer 2 .

第２周側面８は、第５周側面４５を含まず、第３周側面４３および第４周側面４４のみを備える。第４周側面４４の厚み方向一端縁は、絶縁第１面２１に連続する。 The second circumferential side 8 does not include the fifth circumferential side 45 and includes only the third circumferential side 43 and the fourth circumferential side 44. One end edge of the fourth circumferential side surface 44 in the thickness direction is continuous with the first insulating surface 21 .

また、図６～図１１のそれぞれの変形例において、仮想線で示すように、導体補助部５２および／または第３導体部４８がさらに設けられてもよい。 Furthermore, in each of the modified examples of FIGS. 6 to 11, a conductor auxiliary portion 52 and/or a third conductor portion 48 may be further provided as shown by imaginary lines.

また、一実施形態では、第１導体部４は、平面視において、第２導体部５より大きいが、例えば、図示しないが、同一寸法またはそれより小さい寸法を有することができる。なお、この変形例でも、絶縁層２は、挟まれ部４０を有する。 Further, in one embodiment, the first conductor part 4 is larger than the second conductor part 5 in plan view, but for example, although not shown, the first conductor part 4 can have the same size or a smaller size. Note that in this modification as well, the insulating layer 2 has the sandwiched portion 40.

１ 異方導電性シート
２ 絶縁層
３ 異方導電部
４ 第１導体部
５ 第２導体部
６ 開口部
７ 延出面
８ 周側面
９ テーパ面
１１ 内側部分
１２ 周端部
２２ 絶縁第２面
３１ 第１面（第１導体層）
３２ 第２面（第１導体層）
４３ 第２周側面（周側面の一例）
1 Anisotropically conductive sheet 2 Insulating layer 3 Anisotropically conductive portion 4 First conductor portion 5 Second conductor portion 6 Opening portion 7 Extending surface 8 Circumferential surface 9 Tapered surface 11 Inner portion 12 Peripheral end portion 22 Insulating second surface 31 1 side (first conductor layer)
32 Second surface (first conductor layer)
43 Second circumferential side (an example of circumferential side)

Claims (2)

厚み方向を貫通する貫通孔を有する絶縁層と、
前記貫通孔に配置され、前記厚み方向に対向する一方面および他方面のそれぞれが前記厚み方向一方側および他方側のそれぞれに露出する異方導電部とを備え、
前記貫通孔は、前記厚み方向他方側部分に区画される第１開口部、および、前記第１開口部に連通し、前記厚み方向一方側部分に区画される第２開口部を有し、
前記絶縁層は、前記第２開口部の厚み方向他方側部分を区画する他方側周側面、および、前記他方側周側面の厚み方向一端縁から厚み方向に直交する面方向外側に延びる延出面を有し、
前記異方導電部は、前記第１開口部に配置される第１導体部と、前記第２開口部に配置される第２導体部とを備え、
前記第１導体部は、前記面方向に延びる略平板形状に形成され、
前記第１導体部において、
他方面が、前記厚み方向他方側に露出し、
一方面の周端部が、前記絶縁層に接触し、
一方面において前記周端部の内側に位置する内側部が、前記第２導体部に接触し、
前記第２導体部は、前記他方側周側面に接触し、
前記第２導体部において、
前記他方面が、前記内側部および前記延出面に接触し、
前記一方面が、前記厚み方向一方側に露出し、
前記第１導体部の前記一方面の前記周端部は、前記第１開口部の厚み方向他方側端縁から外側に延びるとともに、前記第１導体部は、前記絶縁層の前記第１開口部に埋め込まれ、
前記絶縁層には、前記第２導体部の他方面の周端部と、前記第１導体部の一方面の周端部とに挟まれる挟まれ部が形成されていることを特徴とする、異方導電性シート。 an insulating layer having a through hole passing through the thickness direction;
an anisotropic conductive portion disposed in the through-hole, one surface and the other surface facing each other in the thickness direction being exposed to each of the one side and the other side in the thickness direction,
The through hole has a first opening defined in the other side in the thickness direction, and a second opening communicating with the first opening and defined in the one side in the thickness direction,
The insulating layer has a second side circumferential side defining the other side of the second opening in the thickness direction, and an extending surface extending outward in a plane perpendicular to the thickness direction from one end edge of the second side circumferential side in the thickness direction. have,
The anisotropic conductive part includes a first conductor part arranged in the first opening and a second conductor part arranged in the second opening,
The first conductor portion is formed in a substantially flat plate shape extending in the surface direction,
In the first conductor part,
the other surface is exposed on the other side in the thickness direction,
a peripheral edge of one side contacts the insulating layer;
An inner part located inside the peripheral end part on one surface contacts the second conductor part,
The second conductor portion is in contact with the other side circumferential surface,
In the second conductor part,
the other surface contacts the inner part and the extending surface,
the one surface is exposed on one side in the thickness direction,
The peripheral end portion of the one surface of the first conductor portion extends outward from the other edge in the thickness direction of the first opening portion, and the first conductor portion extends from the first opening portion of the insulating layer. embedded in
The insulating layer is characterized in that a sandwiched portion is formed between a peripheral end of the other side of the second conductor and a peripheral end of one side of the first conductor. Anisotropic conductive sheet. 前記第１導体部の前記厚み方向他方面は、前記絶縁層の厚み方向他方面と面一であることを特徴とする、請求項１に記載の異方導電性シート。
The anisotropic conductive sheet according to claim 1, wherein the other surface of the first conductor portion in the thickness direction is flush with the other surface of the insulating layer in the thickness direction.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011249591A (en) 2010-05-27 2011-12-08 Kyocera Corp Wiring board and probe card using the same
WO2018066541A1 (en) 2016-10-06 2018-04-12 日東電工株式会社 Anisotropic conductive sheet
JP2018186061A (en) 2016-10-06 2018-11-22 日東電工株式会社 Anisotropic Conductive Sheet

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011249591A (en) 2010-05-27 2011-12-08 Kyocera Corp Wiring board and probe card using the same
WO2018066541A1 (en) 2016-10-06 2018-04-12 日東電工株式会社 Anisotropic conductive sheet
JP2018186061A (en) 2016-10-06 2018-11-22 日東電工株式会社 Anisotropic Conductive Sheet
JP2018186062A (en) 2016-10-06 2018-11-22 日東電工株式会社 Anisotropic Conductive Sheet

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