SG11201809548YA - Wafer box conveyor - Google Patents

Wafer box conveyor

Info

Publication number
SG11201809548YA
SG11201809548YA SG11201809548YA SG11201809548YA SG11201809548YA SG 11201809548Y A SG11201809548Y A SG 11201809548YA SG 11201809548Y A SG11201809548Y A SG 11201809548YA SG 11201809548Y A SG11201809548Y A SG 11201809548YA SG 11201809548Y A SG11201809548Y A SG 11201809548YA
Authority
SG
Singapore
Prior art keywords
wafer box
groove
wafer
transport
boxes
Prior art date
Application number
SG11201809548YA
Inventor
Lingyu Li
Qixin Xu
Original Assignee
Shanghai Micro Electronics Equipment Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Group Co Ltd filed Critical Shanghai Micro Electronics Equipment Group Co Ltd
Publication of SG11201809548YA publication Critical patent/SG11201809548YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/93—Sonar systems specially adapted for specific applications for anti-collision purposes
    • G01S15/931—Sonar systems specially adapted for specific applications for anti-collision purposes of land vehicles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Acoustics & Sound (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

TITLE: WAFER BOX CONVEYOR Provided is a wafer box conveyor, comprising an intelligent vehicle, a bottom extension frame erected on the intelligent vehicle, and a wafer box bearing frame fixed onto the bottom extension frame. The wafer box bearing frame is divided into multiple layers, and each layer is equipped with a plurality of wafer box bearing plates. The wafer box bearing plate surface is provided with a first groove and a second groove disposed in the first groove. The first groove is used to bear a wafer box in a first gauge. The second groove is used to bear a wafer box in a second gauge. With the first groove and the second groove, the same wafer box bearing plate bearing the wafer boxes of two different gauges is achieved so that the wafer box conveyor is suitable for the transport of wafer boxes of two different gauges, thereby improving the yield of transport. In addition, by means of the transport of the intelligent vehicle, laying a rail system and manual work involved in the transport are unnecessary, and the transportation cost is reduced while the automatic transportation of the wafer boxes is achieved, thereby saving time and labour, Figure a. 11
SG11201809548YA 2016-04-29 2017-04-28 Wafer box conveyor SG11201809548YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201610285760.0A CN107331640A (en) 2016-04-29 2016-04-29 A kind of film magazine conveying arrangement
PCT/CN2017/082408 WO2017186166A1 (en) 2016-04-29 2017-04-28 Wafer box conveyor

Publications (1)

Publication Number Publication Date
SG11201809548YA true SG11201809548YA (en) 2018-11-29

Family

ID=60160701

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201809548YA SG11201809548YA (en) 2016-04-29 2017-04-28 Wafer box conveyor

Country Status (7)

Country Link
US (1) US11107717B2 (en)
JP (1) JP2019515497A (en)
KR (1) KR102090566B1 (en)
CN (1) CN107331640A (en)
SG (1) SG11201809548YA (en)
TW (1) TWI642609B (en)
WO (1) WO2017186166A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11211266B2 (en) * 2016-09-21 2021-12-28 Texas Instruments Incorporated Universal load port for ultraviolet radiation semiconductor wafer processing machine
US11222802B1 (en) * 2020-06-26 2022-01-11 Taiwan Semiconductor Manufacturing Company Limited Multiple semiconductor die container load port
US20220037178A1 (en) * 2020-07-31 2022-02-03 Taiwan Semiconductor Manufacturing Company Limited Semiconductor storage apparatus with integrated sorter
KR20220164857A (en) * 2021-06-04 2022-12-14 로체 시스템즈(주) Transportion system for a cassette and method of auto teaching a position of the cassete
US20230326776A1 (en) * 2022-04-08 2023-10-12 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer transfer system and a method for transporting wafers

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DE19613386A1 (en) 1996-04-03 1997-10-09 Fiat Om Carrelli Elevatori Industrial truck, which can be operated either manually or automatically
JPH11222121A (en) * 1997-07-10 1999-08-17 Shinko Electric Co Ltd Automatic guided vehicle
JP3037281B2 (en) * 1998-09-25 2000-04-24 山口日本電気株式会社 Receiving stand for transport device and self-propelled transport device
JP3665516B2 (en) * 1999-08-30 2005-06-29 東京エレクトロン株式会社 Mounting device
WO2003026002A1 (en) * 2001-09-18 2003-03-27 Murata Kikai Kabushiki Kaisha Automatic guided vehicle
US20030059289A1 (en) * 2001-09-25 2003-03-27 Intel Corporation Wafer cassette transport cart with self correcting fault alignment block and method
TWI256372B (en) * 2001-12-27 2006-06-11 Tokyo Electron Ltd Carrier system of polishing processing body and conveying method of polishing processing body
JP4234934B2 (en) * 2002-02-15 2009-03-04 東京エレクトロン株式会社 Automated guided vehicle system
KR20040021985A (en) * 2002-09-06 2004-03-11 엘지.필립스 엘시디 주식회사 Structure for sensing of cassette loading in Automatically Guided Vehichle
JP4474922B2 (en) 2004-01-07 2010-06-09 シンフォニアテクノロジー株式会社 Load port device
JP2005327927A (en) * 2004-05-14 2005-11-24 Shin Etsu Handotai Co Ltd Conveying container of semiconductor wafer and conveying method
JP2006108145A (en) * 2004-09-30 2006-04-20 Seiko Epson Corp Wafer cassette and wafer position indicator
CN1757578A (en) * 2004-10-09 2006-04-12 宝晶科技股份有限公司 Storage box for transporting chip box
TWI295660B (en) * 2005-03-29 2008-04-11 Advanced Semiconductor Eng Truck for carrying wafers
TWI274033B (en) * 2005-05-20 2007-02-21 Task Technology Inc Device to prevent cartridge from deformation with an identification coding by radio frequency
KR20070066492A (en) * 2005-12-22 2007-06-27 엘지.필립스 엘시디 주식회사 Cassette transfer vehicle
US20080030341A1 (en) * 2006-08-02 2008-02-07 Taiwan Semiconductor Manufacturing Co., Ltd. Electronic rack and material management systems utilizing the same
TWI538084B (en) * 2010-09-17 2016-06-11 昕芙旎雅股份有限公司 Cassette adapter
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CN205723481U (en) * 2016-04-29 2016-11-23 上海微电子装备有限公司 A kind of film magazine conveying arrangement

Also Published As

Publication number Publication date
US20190206709A1 (en) 2019-07-04
US11107717B2 (en) 2021-08-31
WO2017186166A1 (en) 2017-11-02
KR20180135062A (en) 2018-12-19
TWI642609B (en) 2018-12-01
JP2019515497A (en) 2019-06-06
TW201741216A (en) 2017-12-01
CN107331640A (en) 2017-11-07
KR102090566B1 (en) 2020-03-18

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