CN205723481U - A kind of film magazine conveying arrangement - Google Patents
A kind of film magazine conveying arrangement Download PDFInfo
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- CN205723481U CN205723481U CN201620387241.0U CN201620387241U CN205723481U CN 205723481 U CN205723481 U CN 205723481U CN 201620387241 U CN201620387241 U CN 201620387241U CN 205723481 U CN205723481 U CN 205723481U
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- film magazine
- groove
- conveying arrangement
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- loading plate
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Abstract
This utility model provides a kind of film magazine conveying arrangement, described film magazine conveying arrangement includes intelligent carriage, be erected on described intelligent carriage bottom extension framework and be fixed on the film magazine bearing frame on the extension framework of described bottom, described film magazine bearing frame is separated into multilamellar, and every layer is provided with multiple film magazine loading plate；Wherein, described film magazine loading plate surface configuration has the first groove and is arranged at the second groove in described first groove, and described first groove is for the film magazine of carrying the first specification, and described second groove is for the film magazine of carrying the second specification.By the first groove and the second groove, it is achieved the film magazine of same film magazine loading plate two kinds of different sizes of carrying, so that film magazine conveying arrangement is suitable for the transport of the film magazine of two kinds of different sizes, improve transport productivity.Additionally, carried by intelligent carriage, it is not necessary to paving system track and manually participate in transport, it is achieved reduce cost of transportation while the automatic transportation of film magazine, time saving and energy saving.
Description
Technical field
This utility model relates to technical field of transportation, particularly to a kind of film magazine conveying arrangement.
Background technology
Along with the development of semiconductor technology, 300mm silicon chip will progressively replace 200mm silicon chip and become main flow,
The silicon box weight of every box-packed load silicon chip is also become about 8kg by original about 4kg, therefore, if still by people
The manual conveyance of power, not only can reduce efficiency, there is also the possibility of carrying personnel's personal injury.And traditional hands
Go-cart transport productivity is relatively low, takies labour relatively big, pollutes and also can increase the weight of therewith, and automaticity is the highest, turns
The defects such as curved radius is bigger, and semiconductor manufacturing is more and more harsh for the utilization rate requirement of Factory Building.
For solving the problems referred to above, at present in 300mm quasiconductor FAB factory, commonly used AMHS system,
I.e. use a plurality of track structure hanging on ceiling and the OHT waggon of traveling on track, travel to and fro between machine
Between platform and working area shelf, but, this induction system, it is necessary to be first to install in quasiconductor workshop building
AMHS system track, then process equipment is the most in place.And for most traditional semiconductor manufacturers, it is impossible to
Use AMHS system transport silicon box, and repacking cost is costly.
Summary of the invention
The purpose of this utility model is to provide a kind of film magazine conveying arrangement, to solve to use AMHS system to remove
Fortune film magazine needs first paving system track, relatively costly problem in quasiconductor Factory Building.
For solving above-mentioned technical problem, this utility model provides a kind of film magazine conveying arrangement, and described film magazine transports
Device includes: intelligent carriage, the bottom extension framework being erected on described intelligent carriage and be fixed on described
Film magazine bearing frame on the extension framework of bottom, described film magazine bearing frame is separated into multilamellar, and every layer is provided with
Multiple film magazine loading plates；
Wherein, described film magazine loading plate surface configuration has the first groove and be arranged in described first groove
Two grooves, described first groove is used for carrying second for the film magazine of carrying the first specification, described second groove
The film magazine of specification.
Optionally, in described film magazine conveying arrangement, in described second groove, it is provided with at least two spring
Positioning component.
Optionally, in described film magazine conveying arrangement, in described second groove, it is provided with four spring location
Assembly, four described spring positioning components are distributed on four angles of described second groove.
Optionally, in described film magazine conveying arrangement, in described first groove, it is provided with at least three pin
Positioning component.
Optionally, in described film magazine conveying arrangement, in described first groove, it is provided with three pin location
Assembly, three pin positioning components are triangle.
Optionally, in described film magazine conveying arrangement, described film magazine loading plate is additionally provided with at least three
Strain gauge, described strain gauge is the most on the same line.
Optionally, in described film magazine conveying arrangement, described film magazine loading plate is additionally provided with at least one
Photoelectric sensor.
Optionally, in described film magazine conveying arrangement, described film magazine bearing frame is provided with RFID sensing
Device, for detecting the number information of described film magazine.
Optionally, in described film magazine conveying arrangement, described RFID sensor includes two for identifying
Stating the antenna of the coding information of film magazine, a described antenna is arranged in the front side edge of described film magazine loading plate,
For detecting the film magazine of described first specification, antenna described in another root is arranged on described film magazine loading plate side
On film magazine bearing frame, for detecting the film magazine of described second specification.
Optionally, in described film magazine conveying arrangement, set between described intelligent carriage and described extension framework
There is multiple buffer unit.
Optionally, in described film magazine conveying arrangement, also include multiple avoidance sensor.
Optionally, in described film magazine conveying arrangement, described avoidance sensor include ultrasonic sensor,
Level is to sensor and vertical sensor, and described ultrasonic sensor is symmetricly set on described bottom extension framework
Front side edge and back side edge on, described level is symmetricly set on the left side of described bottom extension framework to sensor
On limit and right edge, described vertical sensor is symmetricly set on left side and the right side of described film magazine bearing frame
Bian Shang.
Optionally, in described film magazine conveying arrangement, described first specification is 12 cun of specifications, described second
Specification is 8 cun of specifications.
In film magazine conveying arrangement provided by the utility model, described film magazine conveying arrangement include intelligent carriage,
The bottom extension framework that is erected on described intelligent carriage and be fixed on the film magazine on the extension framework of described bottom
Bearing frame, described film magazine bearing frame is separated into multilamellar, and every layer is provided with multiple film magazine loading plate；Wherein,
Described film magazine loading plate surface configuration has the first groove and is arranged at the second groove in described first groove, institute
Stating the first groove for carrying the film magazine of the first specification, described second groove is for the film magazine of carrying the second specification.
By the first groove and the second groove, it is achieved the film magazine of same film magazine loading plate two kinds of different sizes of carrying, from
And make film magazine conveying arrangement be suitable for the transport of film magazine of two kinds of different sizes, improve transport productivity.Additionally,
Carried by intelligent carriage, it is not necessary to paving system track and manually participate in transport, it is achieved the automatic transportation of film magazine
While reduce cost of transportation, time saving and energy saving.
Accompanying drawing explanation
Fig. 1 is the structural representation of film magazine conveying arrangement in this utility model embodiment one；
Fig. 2 is the signal during film magazine of 12 cun of specifications of RFID sensor detection in this utility model embodiment one
Figure；
Fig. 3 a-3b is the structural representation of film magazine loading plate in this utility model embodiment one or two；
Showing when Fig. 4 a-4b is the film magazine of 8 cun of specifications of RFID sensor detection in this utility model embodiment two
It is intended to；
In figure: 1-intelligent carriage；2-film magazine bearing frame；20-film magazine loading plate；201-the first groove；211-
Spring positioning component；212-pin positioning component；202-the second groove；203-strain gauge；204-photoelectricity
Sensor；3-extension framework；4-film magazine；9-ultrasonic sensor；5-level is to sensor；The vertical sensing of 6-
Device；The antenna of 7-RFID sensor；8-label.
Detailed description of the invention
Make the most in detail below in conjunction with the drawings and specific embodiments film magazine conveying arrangement to the utility model proposes
Describe in detail bright.According to following explanation and claims, advantage of the present utility model and feature will be apparent from.Need
Illustrating, accompanying drawing all uses the form simplified very much and all uses non-ratio accurately, only in order to convenient,
Aid in illustrating the purpose of this utility model embodiment lucidly.
Embodiment one
Refer to Fig. 1 and Fig. 3 a, described film magazine conveying arrangement includes: intelligent carriage 1, be erected at described intelligence
Can bottom extension framework 3 on dolly 1 and be fixed on the film magazine bearing frame on described bottom extension framework 3
Frame 2, described film magazine bearing frame is separated into multilamellar, and every layer is provided with multiple film magazine loading plate 20；Wherein,
As shown in Figure 3 a, described film magazine loading plate 20 surface configuration has the first groove 201 and is arranged at described first
The second groove 202 in groove 201, described first groove 201 is for the film magazine 4 of carrying the first specification, institute
State the second groove 202 for carrying the film magazine 4 of the second specification.It is also preferred that the left described film magazine bearing frame 2 is divided
It is divided on multilamellar, every layer and is provided with film magazine loading plate 20 described at least two, improve the carrying of transport every time
Amount, improves work efficiency.
Owing to the structure of the first groove 201 and the second groove 202 is respectively according to the film magazine 4 and of the first specification
The structure design of the film magazine 4 of two specifications, utilize the sidewall of the first groove 201 and the second groove 202 to protect
Film magazine 4, in order to avoid film magazine 4 skids off from groove.Therefore, same film magazine loading plate 20 both can carry
The film magazine 4 of one specification, can carry again the film magazine 4 of the second specification, improve transport productivity.In the present embodiment,
Described first specification refers to that 12 cun of specifications, described second specification are 8 cun of specifications, certainly, it is possible to advise according to other
Lattice carry out the design of film magazine loading plate 20 upper groove structure, the most do not do and too much repeat.
Refer to Fig. 3 a-3b, in described second groove 202, be provided with at least two spring positioning component 211,
Described at least two spring positioning component 211 cooperates and positions the film magazine 4 of the second specification, recessed to improve second
Groove 202 carries the steadiness of the film magazine 4 of the second specification.Preferably, it is provided with four in described second groove
Spring positioning component 211, four described spring positioning components 211 are distributed in four of described second groove 202
On angle.
At least three pin positioning component 212, described at least three pin it is provided with in described first groove 201
Positioning component 212 cooperates and positions the film magazine 4 of the first specification, it is preferred that the number of pin positioning component 212
Amount is three, and three pin positioning components 212 are triangle.By pin positioning component 212 and film magazine 4
The groove para-position of bottom, it is achieved the location of the film magazine 4 of the first specification.
Refer to Fig. 3 b, described film magazine loading plate 20 is additionally provided with at least three strain gauge 203 and extremely
A few photoelectric sensor 204, described strain gauge the most on the same line, is used for the film magazine 4 of detection
Inclination conditions, described photoelectric sensor 204, for detecting the situation in place of film magazine 4, is put reducing film magazine 4
Put error rate.
Film magazine conveying arrangement in the present embodiment also includes: multiple avoidance sensors and to be arranged at described intelligence little
Multiple buffer units between car 1 and described extension framework 3, described extension framework 3 is to intelligent carriage 1
A peripheral extension, thus increase the load capacity of intelligent carriage 1, improve conevying efficiency；Owing to arranging
Buffer unit, reduces the vibration influence to film magazine bearing frame 2 when intelligent carriage 1 travels, it is to avoid sheet
The danger that box silicon chip is impaired.
Further, please continue to refer to Fig. 1, described avoidance sensor include ultrasonic sensor 9, level to
Sensor 5 and vertical sensor 6, described ultrasonic sensor 9 is symmetricly set on described bottom extension framework
Front side edge and back side edge on, described level is symmetricly set on the left side of described bottom extension framework to sensor
On limit and right edge, described vertical sensor is symmetricly set on left side and the right side of described film magazine bearing frame
Bian Shang, described ultrasonic sensor 9 is used for detecting described intelligent carriage 1 front and back presumptive area internal memory
Barrier, described horizontal direction sensor 5 is used for detecting described intelligent carriage 1 front and back level
Barrier present on direction, described vertical sensor 6 is used for detecting described intelligent carriage 1 vertical direction and deposits
Barrier, the detection range maximum of horizontal direction sensor 5 and described vertical sensor 6 is 270 °.
Preferably, the quantity of described horizontal direction sensor 5 is four, film magazine conveying arrangement advancing or when falling back,
If running into obstacle height to be less than 20mm, film magazine conveying arrangement is directly crossed over, and then selects if above 20mm
Select and detour, avoiding obstacles, thus improve operational safety performance and the stability of intelligent carriage 1.
Film magazine conveying arrangement of the present utility model is provided with the RFID of the film magazine of compatible detection 8 cun or 12 cun
Sensor, described RFID sensor is arranged on described film magazine bearing frame, when film magazine is placed on intelligent little
Time on car 1, for detecting the number information (i.e. id information) of described film magazine.Described RFID sensor includes
Two antennas being used for identifying the coding information of described film magazine, a described antenna is arranged on the carrying of described film magazine
In the front side edge of plate 20, for detecting the film magazine of described first specification, antenna described in another root is arranged on described
On the film magazine bearing frame of film magazine loading plate 20 side, for detecting the film magazine 4 of described second specification.Please join
Examining Fig. 2, when placing the film magazine of 12 cun of specifications on film magazine loading plate 20, label 8 is positioned at the rear side of film magazine,
The antenna 7 of described RFID sensor is arranged in the front side edge of described film magazine loading plate 20 with near film magazine
Lower limb, between antenna 7 and the label 8 of RFID sensor, horizontal range w1 controls within 0-10mm,
It is made to be entirely capable of sensing label 8.
Embodiment two
Refer to Fig. 4 a-4b, wherein, Fig. 4 a is the front view during film magazine of 8 cun of specifications of detection, and Fig. 4 b is
The top view of Fig. 4 a.When placing the film magazine of 8 cun of specifications on film magazine loading plate 20, label 8 is positioned at film magazine
Inside, now the antenna for the RFID sensor of the film magazine of test the second specification is arranged on the carrying of described film magazine
With the water of the right near film magazine, the antenna of RFID sensor and label 8 on the film magazine bearing frame of plate side
Flat distance w2 controls within 0-10mm, and short transverse distance h1 controls (to permit between 120-150mm
Permitted deviation 5mm), with film magazine rear horizontal range h1=40mm, deviation ± 3mm.
To sum up, in film magazine conveying arrangement provided by the utility model, described film magazine conveying arrangement includes intelligence
Can dolly, the bottom extension framework being erected on described intelligent carriage and be fixed on described bottom extension framework
On film magazine bearing frame, described film magazine bearing frame is separated into multilamellar, and every layer is provided with the carrying of multiple film magazine
Plate；Wherein, described film magazine loading plate surface configuration has the first groove and be arranged in described first groove
Two grooves, described first groove is used for carrying second for the film magazine of carrying the first specification, described second groove
The film magazine of specification.By the first groove and the second groove, it is achieved same film magazine loading plate carries two kinds of different rule
The film magazine of lattice, so that film magazine conveying arrangement is suitable for the transport of the film magazine of two kinds of different sizes, improves fortune
Defeated productivity.Additionally, carried by intelligent carriage, it is not necessary to paving system track and manually participate in transport, it is achieved
Cost of transportation is reduced while the automatic transportation of film magazine, time saving and energy saving.
In this specification, each embodiment uses the mode gone forward one by one to describe, and what each embodiment stressed is
With the difference of other embodiments, between each embodiment, identical similar portion sees mutually.
Foregoing description is only the description to this utility model preferred embodiment, not to this utility model scope
Any restriction, any change that the those of ordinary skill in this utility model field does according to the disclosure above content,
Modify, belong to the protection domain of claims.
Claims (13)
1. a film magazine conveying arrangement, it is characterised in that including: intelligent carriage, to be erected at described intelligence little
Bottom extension framework on car and be fixed on the film magazine bearing frame on the extension framework of described bottom, described
Box bearing frame is separated into multilamellar, and every layer is provided with multiple film magazine loading plate；
Wherein, described film magazine loading plate surface configuration has the first groove and be arranged in described first groove
Two grooves, described first groove is used for carrying second for the film magazine of carrying the first specification, described second groove
The film magazine of specification.
2. film magazine conveying arrangement as claimed in claim 1, it is characterised in that arrange in described second groove
There is at least two spring positioning component.
3. film magazine conveying arrangement as claimed in claim 2, it is characterised in that arrange in described second groove
Four spring positioning components, four described spring positioning components are had to be distributed on four angles of described second groove.
4. film magazine conveying arrangement as claimed in claim 1, it is characterised in that arrange in described first groove
There is at least three pin positioning component.
5. film magazine conveying arrangement as claimed in claim 4, it is characterised in that arrange in described first groove
Having three pin positioning components, three pin positioning components are triangle.
6. film magazine conveying arrangement as claimed in claim 1, it is characterised in that on described film magazine loading plate also
Being provided with at least three strain gauge, described strain gauge is the most on the same line.
7. film magazine conveying arrangement as claimed in claim 1, it is characterised in that on described film magazine loading plate also
It is provided with at least one photoelectric sensor.
8. film magazine conveying arrangement as claimed in claim 1, it is characterised in that on described film magazine bearing frame
It is provided with RFID sensor, for detecting the number information of described film magazine.
9. film magazine conveying arrangement as claimed in claim 8, it is characterised in that described RFID sensor bag
Including the antenna of two coding information for identifying described film magazine, a described antenna is arranged on described film magazine and holds
In the front side edge of support plate, for detecting the film magazine of described first specification, antenna described in another root is arranged on described
On the film magazine bearing frame of film magazine loading plate side, for detecting the film magazine of described second specification.
10. film magazine conveying arrangement as claimed in claim 1, it is characterised in that described intelligent carriage and institute
State and between extension framework, be provided with multiple buffer unit.
11. film magazine conveying arrangements as claimed in claim 1, it is characterised in that also include that multiple avoidance passes
Sensor.
12. film magazine conveying arrangements as claimed in claim 11, it is characterised in that described avoidance sensor bag
Include ultrasonic sensor, level is symmetricly set on to sensor and vertical sensor, described ultrasonic sensor
In the front side edge of described bottom extension framework and back side edge, described level is symmetricly set on the described end to sensor
On the left side of portion's extension framework and right edge, described vertical sensor is symmetricly set on described film magazine bearing frame
On the left side of frame and right edge.
The 13. film magazine conveying arrangements as according to any one of claim 1-12, it is characterised in that described
One specification is 12 cun of specifications, and described second specification is 8 cun of specifications.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620387241.0U CN205723481U (en) | 2016-04-29 | 2016-04-29 | A kind of film magazine conveying arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620387241.0U CN205723481U (en) | 2016-04-29 | 2016-04-29 | A kind of film magazine conveying arrangement |
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| Publication Number | Publication Date |
|---|---|
| CN205723481U true CN205723481U (en) | 2016-11-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620387241.0U Active CN205723481U (en) | 2016-04-29 | 2016-04-29 | A kind of film magazine conveying arrangement |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017186166A1 (en) * | 2016-04-29 | 2017-11-02 | 上海微电子装备（集团）股份有限公司 | Wafer box conveyor |
| CN108789423A (en) * | 2017-04-28 | 2018-11-13 | 上海微电子装备（集团）股份有限公司 | Film magazine transfer robot |
-
2016
- 2016-04-29 CN CN201620387241.0U patent/CN205723481U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017186166A1 (en) * | 2016-04-29 | 2017-11-02 | 上海微电子装备（集团）股份有限公司 | Wafer box conveyor |
| CN107331640A (en) * | 2016-04-29 | 2017-11-07 | 上海微电子装备（集团）股份有限公司 | A kind of film magazine conveying arrangement |
| US11107717B2 (en) | 2016-04-29 | 2021-08-31 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Wafer box conveyor |
| CN108789423A (en) * | 2017-04-28 | 2018-11-13 | 上海微电子装备（集团）股份有限公司 | Film magazine transfer robot |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder |