1295660 16094twf.doc/i 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種運送台車，且特別是有關於一種 裝載晶圓的運送車。 【先前技術】 在半導體產業中，由晶圓廠所生產的8忖、12忖晶圓 (wafer)上，可配置上百個積體電路所構成的微晶片，且 這些晶片在封裝廠進行封裝作業之後，可應用在電子產品 與通訊產品上，成為高科技產業中關鍵的零組件之一。由 於晶圓的主要原料為容易脆化的石夕化物、石申化鎵等，因此 微晶片在未封裝保護之前，尤其在運送的過程中，必須 ，選擇晶IB運送的方式及運送的工具，才能確保晶圓保^ 亓.答〇 -叙而吕，在運送的過程中，操作人員係將多個 二t fr日個_的晶舟’而晶舟内具 夕數個晶圓插槽（slot)，以防止晶圓 ^ 面=等情形。除此之外，到達封裝廠之後，晶 运台車送在生產線進行封裝作業。 運 ”的是，習知所選用的運送工 之台車，除了有方便接作人g 疋叙用途 特殊的防震、避震系統等，操^ 把手以外’並無 車的底板上，因而當台車被拉將晶舟放置於台 直接傳到晶舟上，造成 f 輪胎的震動报容易 曰®之如展率過高。此外，若不小 • 1295660 16094twf.doc/g 心台車脫離操作人員手中，此時亦無輔助的煞車系統停止 台車’容易造成撞車或翻車而損壞晶圓。 【發明内容】 本啦明的目的就是在提供一種裝載晶圓之運送車，其 配置有避震系統，以避免晶圓在運送過程中造成損壞。 本發明的另一目的是提供一種裝載晶圓之運送車，其 配置有煞車系統，以避免晶圓在運送過程中造成損壞。 本發明的再一目的是提供一種裝載晶圓之運送車，其 配置有限速系統，以避免晶圓在運送過程中造成損壞。 本發明提出一種裝載晶圓之運送車，包括一底板、一 ΪΪ、一活動把手、多數個車輪、一置晶室以及至少一避 ，器二其中，底板具有一上表面以及一下表面，而框架固 定於該底板之上表面，且活動把手配置於該框架上。此外， 車輪配置於底板之下表面，而置晶室位於框架中，用以放 f至少一晶舟，該晶舟内可存放多數個晶圓。另外，避震 裔配置於置晶室之底部，且該置晶室藉由避震器而平置於 该底板之上表面。 依本發明的較佳實施例所述，避震器例如選自彈 簧、阻尼器以及吸震墊其中之一。 依照本發明的較佳實施例所述，運送車更可包括至少 懸吊為’配置於置晶室的頂部，且該置晶室藉由懸吊器 =吊至框*。其巾，该懸吊器例如選自彈簧以及阻尼器 中之一。 依照本發明的較佳實施例所述，運送車更可包括一煞 1295660 16094twf.doc/g 車器 s己置於這些車輪的鄰側’該煞車器藉由活 =控而作動，以使賴車器接觸車輪，相 的。其中，該活動把手適於受力而下壓，並藉由 一煞車線而連接至煞車器。 連杯或 依照本發明的較佳實施例所述，運送車更可包括一 =起上’該限速器藉由感測這些車輪的轉‘ =? 作動’並以一連桿或-煞車線連接至 本發明因採用避震系統以使晶圓在運送的m 降低晶圓因車輪震動而造成破片之可能性。此外^ 配煞車祕及/或限速純之獅，使觀車的操控: 順、穩定。因此，本發明之裝載晶_運$: 在運送過程中的損壞率。 降低曰曰固 為讓本發明之上述和其他目的、舰和伽能更明顯 a日Ϊ ’下謂舉較佳實關，並配合所關式，作詳細說 明如下。 【實施方式】 〔第一實施例〕 一 f1繪示本發明第一實施例之一種裝載晶圓之運送車 的不意圖。此裝载晶圓之運送車100具有一車體部分，其 係由底板1丨〇以及一框架120等剛性材質所組裝而成 的。其中，底板110具有一上表面112以及一下表面114， 而框架120部分顯示於圖1中，其由多個桿件122、124、 126或頂板128横登相連成一四方立體結構，且桿件122、 1295660 16094twf.doc/g 124可固定於於底板110上，以構成一整體。此外，置晶 至130配置於框架120中，而置晶室13〇可以是具有獨立 開口的密閉空間或開放空間，其内部例如具有一夾層 132，以方便操作人員放置一個或多個晶舟1〇，而晶舟内 可放置多數個晶圓（未繪示）。 另外，多數個車輪140配置於底板11〇之下表面114， =把手150固定於框架12〇上，且把手15〇的位置以方便 _ 知作人員推拉的高度為宜。在本實施例中，把手150可為 一活動把手，或具有連動結構之手煞車（未繪示），這些 辅助功能將於第二實施例中一併說明。 值得注意的是，一個或多個避震器16〇可配置於置晶 室130之底部，以使置晶室13〇藉由避震器16〇而平置於 底板110之上表面112。其中，避震器16〇不限定其種類 為何，只要能吸收外來的震動波即可。在本實施例中，可 選用的避震$ 16G例如是麼縮彈簧、阻尼器或避震墊等 等，特別是阻尼值較高的彈簧或阻尼器、或是具有低回彈 • 性之避震墊或吸震材質為宜，以避免產生共振。 同樣，請參考圖1，在適當的辅助避震下，可加穿一 個或多個懸吊器Π0於置晶室130之頂部，以使置晶室m 藉由懸吊器170而懸吊於框架120上。在未實施例中，可 選用的懸吊H 170例如是拉伸彈篑、阻尼器等等，特別是 阻尼值較高的彈簧或阻尼器為宜。 由上述的說明可知，本發明第一實施例藉由加裝避震 器160及/或懸吊器170等避震系統於置晶冑13〇之底部與 1295660 16094twf.doc/g 頂4以使a曰圓在運送的過程中，能降低晶圓因車輪⑽ 震動而造成破片之可能性。此外，車體之底板、框架以及 置晶室的材質可為剛性材質，例如是金屬。除此之外，任 何可作為車體之材質均為實現本發明之範圍，故不因此而 限制本發明。 〔第二實施例〕 —圖2、、、3示本發明第二貫施例之—種裝載晶圓之運送車 • ’而圖3纟會示圖2之裝載晶圓之運送車的作動示 思圖。此裝載晶圓之運送車100除了具有第一實施例之底 板110、框架120、置晶室130、車輪14〇、把手15〇以及 ，震器160及/或懸吊器17〇之外，更可包括一煞車器⑽， 其配置於底板110上，且位於車輪14〇之鄰側。其中，敦 車15 180可藉由手動或電控的方式使其致能，使得行進中 的車輪140文到煞車$⑽之摩擦力接觸而停止。 如圖2所示，當使用者未握持把手150時，把手150 ❺位置始終保持在鎖_車的位置上，即煞車H 180與車 輪140相互接觸而產生煞車的效果。因此，當運送車卿 經過斜面或不小心脫離操作人員手中時，此運送車廟不 .會繼續前進’而是緩慢地由煞車H 180控制而停止。接著， 士圖3所示，當操作人員推動運送車1⑻時，只要將把手 150下壓即可解除煞車。其中，把手—例如藉由一連桿 或-煞車線m而連接至煞車器18〇，以使煞車器⑽脫 離車輪140而解除煞車。 由此可知，本發明第二實施例藉由加裝煞車系統於車 9 1295660 16094twf.doc/g 亚藉由雜把手MG之操控而作動，以使煞車器180 接觸或脫離車輪140，制煞車或解除煞車之目的。 〔第三實施例〕 圖4緣示本發明第三實施例之一種裝載晶圓之運送車 的不意圖’關5㈣圖4之限速系統的作動示意圖。此 裝載晶圓之運送車1GG _具有第—實施例之底板11〇、 框架120、置晶室13〇、車輪14〇、把手15〇以及避震器16〇 及/或懸吊态170等構件，且更包括一限速器19〇，其配置 ，底板11〇上，而限速器190可藉由感測車輪14〇的轉速 是否超過一預設值而作動，以使煞車器18〇接觸車輪14〇 而產生煞車的效果。 如圖4所示’當操作人貝握持把手，推動運送車 100以一速度前進時，若速度未超過限速器19〇的預設值 時，限速器190可保持煞車器180在解除煞車的位置。接 著，如圖5所示，當操作人員推動運送車1〇〇的速度太快 時，限速器190可藉由訊號回饋得知車輪14〇的轉速超過 其預設值時，再以一連桿或一煞車線192連接至煞車器 180，以使煞車器180作動來缓慢地降低車速，直到低於限 速益190的預設值為止。 由此可知，本發明第三實施例藉由加裝限速系統於車 體上，以偵測車輪140的轉速是否超過一預定值，達到減 速的目的。當然’此限速系統亦可利用齒輪比方式來減速， 或以普利盤離心原理來減速，以避免車速過快而震動，或 造成撞車或翻車而損壞晶圓。 1295660 16094twf.doc/g 綜上所述，本發明之裝載晶圓之運送車具有下列優 r占： (1)採用避震系統以使晶圓在運送的過程中，能降低晶圓 因車輪震動而造成破片之可能性，以保持晶圓^二 整。 (2)除了避震系統之外，更可搭配煞車系統及/或限速系 統之輔助，使運送車的操控更為平順、穩定。因此，BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a transport trolley, and more particularly to a transport cart for loading wafers. [Prior Art] In the semiconductor industry, on the 8 忖 and 12 忖 wafers produced by the fab, hundreds of integrated circuits can be configured, and these chips are packaged at the packaging factory. After the operation, it can be applied to electronic products and communication products, and become one of the key components in the high-tech industry. Since the main raw material of the wafer is easy-brittle, such as Shixia, Shishenhua, etc., the microchip must be selected before the package is protected, especially during transportation, and the method of transporting the IB and the tools to be transported must be selected. In order to ensure the wafer protection, 〇 〇 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙 叙Slot) to prevent wafer surface = etc. In addition, after arriving at the packaging factory, the crystal transport trolley is sent to the production line for packaging operations. It is said that the trolleys of the selected transporters are not only convenient for the use of the shock absorbers, shock absorbers, etc., but also the handles are not on the floor of the car, so when the trolley is Pulling the boat on the table and directly transferring it to the boat, causing the vibration of the tire to be easily 曰. If it is not small, the 1295660 16094twf.doc/g heart car is out of the hands of the operator. At the same time, there is no auxiliary brake system to stop the trolley. It is easy to cause a collision or rollover to damage the wafer. [Invention] The purpose of the present invention is to provide a wafer loading vehicle equipped with a suspension system to avoid crystals. The circle causes damage during transportation. Another object of the present invention is to provide a wafer loading cart equipped with a brake system to prevent damage of the wafer during transportation. A further object of the present invention is to provide a wafer A wafer loading cart equipped with a limited speed system to avoid damage to the wafer during transportation. The present invention provides a wafer loading cart including a bottom plate and a stack a movable handle, a plurality of wheels, a crystal chamber, and at least one, wherein the bottom plate has an upper surface and a lower surface, and the frame is fixed on the upper surface of the bottom plate, and the movable handle is disposed on the frame In addition, the wheel is disposed on the lower surface of the bottom plate, and the crystal chamber is located in the frame for placing at least one wafer boat, and the wafer boat can store a plurality of wafers. In addition, the shock absorber is disposed in the crystal chamber. The bottom portion, and the crystal chamber is laid flat on the upper surface of the bottom plate by a shock absorber. According to a preferred embodiment of the invention, the shock absorber is, for example, selected from one of a spring, a damper and a shock absorbing pad. According to a preferred embodiment of the present invention, the transport vehicle may further include at least a suspension suspended at the top of the crystal chamber, and the crystal chamber is suspended from the frame by a hanger. The hanger is for example selected from one of a spring and a damper. According to a preferred embodiment of the invention, the transport vehicle may further comprise a 1295660 16094 twf.doc/g vehicle s placed on the adjacent side of the wheel. The brakes are actuated by live control to make the vehicle Contacting the wheel, the phase, wherein the movable handle is adapted to be pressed down by force and connected to the brake by a brake line. The cup or the preferred embodiment of the invention may further include A = speed up by sensing the turn of these wheels '=? Acting' and connecting to the present invention with a connecting rod or - brake line to reduce the crystal in the transport m by using a suspension system The possibility of fragmentation caused by the vibration of the wheel. In addition, the lion with the car and/or the speed limit pure lion makes the handling of the car: smooth and stable. Therefore, the loading crystal of the present invention is: during the transportation process. The damage rate is reduced. In order to make the above and other objects, ship and gamma energy of the present invention more obvious, the following is a better example, and the following is described in detail. [First Embodiment] An f1 shows a schematic of a wafer loading cart according to a first embodiment of the present invention. The wafer loading cart 100 has a body portion which is assembled from a rigid material such as a bottom plate 1 and a frame 120. The bottom plate 110 has an upper surface 112 and a lower surface 114, and the frame 120 is partially shown in FIG. 1, which is connected by a plurality of rods 122, 124, 126 or a top plate 128 to form a square structure, and the rod 122 1295660 16094twf.doc/g 124 can be fixed on the bottom plate 110 to form a whole. In addition, the crystallized to 130 is disposed in the frame 120, and the crystallizing chamber 13A may be a closed space or an open space having an independent opening, and the inside thereof has, for example, a sandwich 132 for the operator to place one or more wafer boats 1 〇, and a number of wafers (not shown) can be placed in the boat. In addition, a plurality of wheels 140 are disposed on the lower surface 114 of the bottom plate 11 , and the handle 150 is fixed to the frame 12 , and the position of the handle 15 为 is preferably convenient for the height of the push and pull of the person. In the present embodiment, the handle 150 can be a movable handle or a handcart (not shown) having a linkage structure, and these auxiliary functions will be described together in the second embodiment. It should be noted that one or more of the shock absorbers 16A may be disposed at the bottom of the crystallizing chamber 130 such that the crystallizing chamber 13 is laid flat on the upper surface 112 of the bottom plate 110 by the shock absorber 16〇. Among them, the shock absorber 16 is not limited to its type, as long as it can absorb external shock waves. In this embodiment, the optional shock absorber $16G is, for example, a shrink spring, a damper or a shock absorber pad, etc., in particular, a spring or damper having a high damping value, or a low rebound/slip avoidance. A shock pad or shock absorbing material is preferred to avoid resonance. Similarly, referring to FIG. 1, under appropriate auxiliary suspension, one or more hangers Π0 may be applied to the top of the crystallizing chamber 130 to suspend the crystal chamber m by the hanger 170. On the frame 120. In the non-embodiment, the optional suspension H 170 is, for example, a tensile magazine, a damper or the like, particularly a spring or damper having a high damping value. As can be seen from the above description, the first embodiment of the present invention is provided with a suspension system such as a shock absorber 160 and/or a suspension 170 at the bottom of the crystal cassette 13〇 and 1295660 16094twf.doc/g top 4 to make The a circle can reduce the possibility of fragmentation of the wafer due to vibration of the wheel (10) during transportation. In addition, the bottom plate, the frame and the crystal chamber of the vehicle body may be made of a rigid material such as metal. In addition, any material that can be used as a vehicle body is within the scope of the present invention, and thus the present invention is not limited thereby. [Second Embodiment] - Figs. 2, 3, and 3 show a carriage of a wafer loaded with a wafer according to a second embodiment of the present invention, and Fig. 3 is a diagram showing the operation of the carriage of the wafer loaded with the wafer of Fig. 2. Thinking. The wafer loading cart 100 has the bottom plate 110, the frame 120, the crystal chamber 130, the wheel 14 〇, the handle 15 〇, the damper 160 and/or the hanger 17 第一 of the first embodiment. A brake (10) can be included that is disposed on the base plate 110 and is located adjacent the wheel 14〇. Among them, the car 15 180 can be enabled by manual or electronic control, so that the traveling wheel 140 stops to contact the frictional force of the brake car (10). As shown in Fig. 2, when the user does not hold the handle 150, the position of the handle 150 始终 is always maintained at the position of the lock_vehicle, that is, the brake H 180 and the wheel 140 are in contact with each other to produce a braking effect. Therefore, when the transporter goes through the slope or accidentally leaves the operator's hand, the transporter's temple will not continue. Instead, it will be slowly stopped by the brake H180. Next, as shown in Fig. 3, when the operator pushes the transport vehicle 1 (8), the brake can be released by pressing the handle 150 down. Here, the handle is connected to the brake 18 例如, for example, by a link or a brake line m, so that the brake (10) is disengaged from the wheel 140 to release the brake. It can be seen that the second embodiment of the present invention is actuated by the operation of the miscellaneous handle MG by attaching the brake system to the vehicle 9 1295660 16094twf.doc/g, so that the brake device 180 contacts or disengages from the wheel 140, and the brake device or Lift the purpose of braking. [THIRD EMBODIMENT] Fig. 4 is a schematic view showing the operation of a speed-limiting system of Fig. 4, which is not intended to be used for a wafer-loaded transport vehicle according to a third embodiment of the present invention. The wafer loading cart 1GG has the bottom plate 11 of the first embodiment, the frame 120, the crystal chamber 13A, the wheel 14〇, the handle 15〇, and the shock absorber 16〇 and/or the suspended state 170. And further comprising a speed limiter 19〇 configured to be mounted on the bottom plate 11 and the speed limiter 190 can be actuated by sensing whether the rotational speed of the wheel 14〇 exceeds a predetermined value to contact the brake device 18〇 The wheel 14 turns and the brake effect is produced. As shown in FIG. 4, when the operator holds the handle and pushes the transport vehicle 100 to advance at a speed, if the speed does not exceed the preset value of the speed limiter 19〇, the speed limiter 190 can keep the brake device 180 released. The location of the brakes. Then, as shown in FIG. 5, when the operator pushes the speed of the transport vehicle 1 太 too fast, the speed limiter 190 can learn by the signal feedback that the speed of the wheel 14 超过 exceeds its preset value, and then A lever or brake line 192 is coupled to the brake 180 to cause the brake 180 to actuate to slowly reduce the vehicle speed until a predetermined value below the speed limit 190 is reached. It can be seen that the third embodiment of the present invention achieves the purpose of deceleration by installing a speed limiting system on the vehicle body to detect whether the rotational speed of the wheel 140 exceeds a predetermined value. Of course, this speed limit system can also use the gear ratio method to decelerate, or use the principle of centrifugal disc to reduce the speed to avoid the speed of the vehicle to vibrate too fast, or to cause damage or damage caused by a crash or rollover. 1295660 16094twf.doc/g In summary, the wafer carrier truck of the present invention has the following advantages: (1) The suspension system is used to reduce the wafer vibration due to the wheel during the transportation process. And the possibility of fragmentation to keep the wafers two. (2) In addition to the suspension system, it can be matched with the brake system and/or the speed limit system to make the handling of the truck more smooth and stable. therefore,
本發明之装載晶圓的運送車能降低晶圓在運送過程 中的損壞率，以保持晶圓的完整。 〇)本發明之魏車亦可應时鍊其他胃碎物，其效果 如上所述，且操作方便。 p 2 ΐ發明已以較佳實施例揭露如上，财並非用t 二任何熟習此技藝者，在不脫離本發明之精參 =1;作些許之更動與潤舞，因此本發明之俩 ，圍虽視後附之申請專利範圍所界定者為準。 【圖式簡單說明】The wafer loading cart of the present invention can reduce the damage rate of the wafer during transportation to maintain the integrity of the wafer. 〇) The Wei-car of the present invention can also be used to chain other stomach debris, the effect of which is as described above, and is convenient to operate. The p 2 ΐ invention has been disclosed in the preferred embodiment as above, and it is not necessary to use any of the skilled artisans, without departing from the essence of the present invention; a little change and a dance, so the two sides of the present invention This is subject to the definition of the scope of the patent application attached. [Simple description of the map]
的示本發實關之—種輯晶圓之運送車 的示本發明第二實施例之—種裝載晶圓之運送車 圓之運送車 ^4二2之裝载晶圓之運送車的作動示意圖。 的示㈣第三實施例之—種裝載晶 圖 圖5緣示圖4之限速系統的作動示意 11 i29m.-/g 【主要元件符號說明】 1 〇:晶舟 100 :裝載晶圓之運送車 110 :底板 112 :上表面 114 :下表面 120 :框架 122、124、126、128 ·•桿件 ⑩ 130 :置晶室 132 :夾層 140 :車輪 150 :把手 * 160 :避震器 170 :懸吊器 180 :煞車器 182 :煞車線 • 19〇 :限速器 192 :煞車線 12The present invention is a demonstration of a carrier of a wafer carrier. The second embodiment of the present invention is a loading carriage for a wafer carrier. schematic diagram. (4) The third embodiment is a loading crystal diagram. FIG. 5 shows the operation of the speed limiting system of FIG. 11 i29m.-/g [Major component symbol description] 1 〇: Crystal boat 100: Loading wafer loading Car 110: bottom plate 112: upper surface 114: lower surface 120: frame 122, 124, 126, 128 • bar 10 130: crystal chamber 132: interlayer 140: wheel 150: handle * 160: shock absorber 170: suspended Hanger 180: Brake 182: Brake line • 19〇: Speed limiter 192: Brake line 12