SE9500729L - Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan - Google Patents

Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan

Info

Publication number
SE9500729L
SE9500729L SE9500729A SE9500729A SE9500729L SE 9500729 L SE9500729 L SE 9500729L SE 9500729 A SE9500729 A SE 9500729A SE 9500729 A SE9500729 A SE 9500729A SE 9500729 L SE9500729 L SE 9500729L
Authority
SE
Sweden
Prior art keywords
semiconductor substrate
monocrystalline
cantilever beam
monocrystalline semiconductor
making
Prior art date
Application number
SE9500729A
Other languages
English (en)
Other versions
SE9500729D0 (sv
Inventor
Gert Andersson
Original Assignee
Gert Andersson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gert Andersson filed Critical Gert Andersson
Priority to SE9500729A priority Critical patent/SE9500729L/sv
Publication of SE9500729D0 publication Critical patent/SE9500729D0/sv
Priority to US08/460,488 priority patent/US5723790A/en
Priority to JP8526196A priority patent/JPH11502614A/ja
Priority to AU48939/96A priority patent/AU4893996A/en
Priority to EP96905100A priority patent/EP0812424A1/en
Priority to PCT/SE1996/000249 priority patent/WO1996027135A1/en
Publication of SE9500729L publication Critical patent/SE9500729L/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
SE9500729A 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan SE9500729L (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9500729A SE9500729L (sv) 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
US08/460,488 US5723790A (en) 1995-02-27 1995-06-02 Monocrystalline accelerometer and angular rate sensor and methods for making and using same
JP8526196A JPH11502614A (ja) 1995-02-27 1996-02-26 単結晶材料における角速度を測定するための装置
AU48939/96A AU4893996A (en) 1995-02-27 1996-02-26 A device for the measurement of angular rate in monocrystalline material
EP96905100A EP0812424A1 (en) 1995-02-27 1996-02-26 A device for the measurement of angular rate in monocrystalline material
PCT/SE1996/000249 WO1996027135A1 (en) 1995-02-27 1996-02-26 A device for the measurement of angular rate in monocrystalline material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9500729A SE9500729L (sv) 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan

Publications (2)

Publication Number Publication Date
SE9500729D0 SE9500729D0 (sv) 1995-02-27
SE9500729L true SE9500729L (sv) 1996-08-28

Family

ID=20397388

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9500729A SE9500729L (sv) 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan

Country Status (6)

Country Link
US (1) US5723790A (sv)
EP (1) EP0812424A1 (sv)
JP (1) JPH11502614A (sv)
AU (1) AU4893996A (sv)
SE (1) SE9500729L (sv)
WO (1) WO1996027135A1 (sv)

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Also Published As

Publication number Publication date
SE9500729D0 (sv) 1995-02-27
AU4893996A (en) 1996-09-18
EP0812424A1 (en) 1997-12-17
JPH11502614A (ja) 1999-03-02
US5723790A (en) 1998-03-03
WO1996027135A1 (en) 1996-09-06

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