KR970067667A - Polymer removal method - Google Patents
Polymer removal method Download PDFInfo
- Publication number
- KR970067667A KR970067667A KR1019960006898A KR19960006898A KR970067667A KR 970067667 A KR970067667 A KR 970067667A KR 1019960006898 A KR1019960006898 A KR 1019960006898A KR 19960006898 A KR19960006898 A KR 19960006898A KR 970067667 A KR970067667 A KR 970067667A
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- based polymer
- polymer
- removal method
- polymer removal
- eliminating
- Prior art date
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Abstract
본 발명은 반도체 제조공정중의 프리실리콘 식각시 그 측벽에 형성되는 C1계 폴리머를 제거하는 방법에 관한 것으로, C1계 폴리머를 CF계 폴리머로 변환시킨 다음 폴리즈마에 의해 상기 CF계 폴리머를 제거하는 것을 특징으로 하는 폴리머 제거방법을 제거함으로써 종래의 BOE를 사용한 다단계의 복잡한 세척공정을 생략할 수 있도록 하여 공정의 단순화를 기할 수 있도록 한다.The present invention relates to a method for removing a C1-based polymer formed on a sidewall thereof during a pre-silicon etching process in a semiconductor manufacturing process, wherein the CF-based polymer is converted into a CF-based polymer and then the CF- The present invention can simplify the process by eliminating the multilevel complicated washing process using the conventional BOE by eliminating the polymer removing process.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제1도는 본 발명에 의한 폴리머 제거공정을 도시한 순서도.FIG. 1 is a flow chart showing a polymer removing process according to the present invention. FIG.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960006898A KR970067667A (en) | 1996-03-14 | 1996-03-14 | Polymer removal method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960006898A KR970067667A (en) | 1996-03-14 | 1996-03-14 | Polymer removal method |
Publications (1)
Publication Number | Publication Date |
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KR970067667A true KR970067667A (en) | 1997-10-13 |
Family
ID=66215927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960006898A KR970067667A (en) | 1996-03-14 | 1996-03-14 | Polymer removal method |
Country Status (1)
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KR (1) | KR970067667A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101324544B1 (en) * | 2006-01-20 | 2013-11-01 | 몰레큘러 임프린츠 인코퍼레이티드 | Patterning substrates employing multiple chucks |
-
1996
- 1996-03-14 KR KR1019960006898A patent/KR970067667A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101324544B1 (en) * | 2006-01-20 | 2013-11-01 | 몰레큘러 임프린츠 인코퍼레이티드 | Patterning substrates employing multiple chucks |
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