KR960013664A - 잉크제트프린터용인자헤드 및 그 제조방법 - Google Patents
잉크제트프린터용인자헤드 및 그 제조방법 Download PDFInfo
- Publication number
- KR960013664A KR960013664A KR1019950036554A KR19950036554A KR960013664A KR 960013664 A KR960013664 A KR 960013664A KR 1019950036554 A KR1019950036554 A KR 1019950036554A KR 19950036554 A KR19950036554 A KR 19950036554A KR 960013664 A KR960013664 A KR 960013664A
- Authority
- KR
- South Korea
- Prior art keywords
- jet printer
- printing head
- ink jet
- diaphragm
- ink
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract 10
- 229910052719 titanium Inorganic materials 0.000 claims abstract 10
- 239000010936 titanium Substances 0.000 claims abstract 10
- 238000005304 joining Methods 0.000 claims abstract 2
- 239000010410 layer Substances 0.000 claims 10
- 239000010409 thin film Substances 0.000 claims 5
- 239000011247 coating layer Substances 0.000 claims 3
- 239000003513 alkali Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 238000001027 hydrothermal synthesis Methods 0.000 claims 2
- 229920003002 synthetic resin Polymers 0.000 claims 2
- 239000000057 synthetic resin Substances 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
1.청구범위에 기재된 발명이 속한 기술분야
본 발명은 잉크제트프린터용 인자헤드의 구조 및 그 제조방법에 관한 것이다.
2.발명이 해결하려고 하는 기술적과제
본발명은 각각의 압전소자(4)에의 부착위치의 정밀도와 고접착강도를 갖고 안정된 인자품질을 갖는 잉크제트프린터용 인자헤드 및 그 인자헤드의 제조방법을 제공하는데 있다.
3.발병의 해결방법의 요지
잉크를 충전한 가압실(202)과 티탄으로된 유연한판으로 형성된 진동판(3)을 포함하는 가압실(202)과; 가입실(202)과 연통되는 잉크노즐과; 가압실(202)의 진도판(3)의 외부에 화학적으로 결합돈 PZT층을 포함하는 압전부재(4)와; 압전부재(4)는 잉크노즐로 부터 잉크를 분출시키기 위해 진동판(3)을 가압실(202)로 변형시키도록 전기적으로 활성화되어 있는 구성으로 한 것을 특징으로 하는 잉크제트프린터용 인자헤드이다.
4.발명의 중요한 용도
본 발명은 잉크제트프린터용 이자헤드의 관한 것이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 제1도의 Ⅱ-Ⅱ선에 따른 단면도.
Claims (16)
- 잉크를 충전한 가압실(202)과, 티탄으로된 유연한판으로 형성된 진동판(3)을 포함하는 가압실(202)과; 가압실(202)과 연통되는 잉크노즐과; 가압실(202)의 진동판(3)의 외부에 화학적으로 결합된 PZT층을 포함하는 압전부재(4)와; 압전부재(4)는 잉크노즐로 부터 잉크를 분출시키기 위해 진동판(3)을 가압실(202)로 변형 시키도록 전기적으로 활성화되어 있는 구성으로 한 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제1항에 있어서, 진동판(3)이 티탄판으로형성되어 있는 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제2항에 있어서, PZT층이 수열합성법에 의해 진동판(3)의 외부표면에 PZT의 결정을 석출시키므로서 형성된 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제2항에 있어서, 진동판(3)의 외부표면이 압전부재(4)가 형성된 영역을 제외하고 피복층으로 형성된 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제1항에 있어서, 진동판(3)의 외부표면이 티탄박막(15)이 형성된 유연한 판어로 구성되어 있고 PZT층이 티탄박막(15)에 화학적어로 결합되어 있는 것을 특징으로 하는 잉크제트 프린터용 인자헤드.
- 제5항에 있어서,유연한판이 티탄박막(15)의 도전층으로 형성되어 있는 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제5항에 있어서, 유연한 판이 내알칼리성유리가판(14)인 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제5항에 있어서 유연한 판이 합성수지한인 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제5항에 있어서 진동판(3)의 외부표면이 압전부재(4)가 형성되 영역을 제외하고 피복층으로 형성된 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제1항에 있어서 진동판(3)이 티탄박막(15)의 독립적인 전극으로 형성되고 압전부재(4)에 전력을 공급하기 위한 도체로 형성된 유연한판으로 구성되고 PZT층이 독립된 전극에 화학적으로 결합된 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제10항에 있어서 유연한판이 내알칼리성 유리기관 (14)인 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제10항에 있어서, 유연한판이 합성수지한인 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 제10항에 있어서 진동판(3)의 외부표면이 압전부재(4)가 형성된 영역을 제외하고 피복층으로 형성되어 있는 것을 특징으로 하는 잉크제트프린터용 인자헤드.
- 특정영역을 제외하고 티탄을 갖는 유연한 부재의 외부표면에 감광성레지스트층을 형성하고 PZT층을 형성하기 위해 수열합성법으로 특정영역에 PZT결정을 석출시키고 PZT층을 전기적으로 구동시키기 위해 PZT층상에 전극을 형성하고, 인자헤드(1)를 제조하기 위해 가압실(202)용 오목한보와 잉크노즐용 오목한부에 형성된 기판(2)에 PZT층을 갖는 유연한 부재를 결합하는 공정으로 구성되어 있는 것을 특징으로 하는 잉크제트 프린터용 인자헤드의 제조방법.
- 제14항에 있어서 유연한 부재가 티탄판인것을 특징으로 하는 잉크제트 프린터용 인자헤드의 제조방법.
- 제14항에 있어서 유연한 부재가 티탄박막(15)의 외부표면에 형성된 유연한 판인 것을 특징으로 하는 잉크제트프린터용 인자헤드의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6262817A JPH08118662A (ja) | 1994-10-26 | 1994-10-26 | インクジェットプリンタ用印字ヘッド及びその製造方法 |
JP94-262817 | 1994-10-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960013664A true KR960013664A (ko) | 1996-05-22 |
Family
ID=17381033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950036554A KR960013664A (ko) | 1994-10-26 | 1995-10-23 | 잉크제트프린터용인자헤드 및 그 제조방법 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0709200A1 (ko) |
JP (1) | JPH08118662A (ko) |
KR (1) | KR960013664A (ko) |
CN (1) | CN1131092A (ko) |
TW (1) | TW275663B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100537151B1 (ko) * | 2004-01-16 | 2005-12-16 | 도신 고교 가부시키가이샤 | 평판스크린 날염장치 |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3316853B2 (ja) * | 1995-07-14 | 2002-08-19 | セイコーエプソン株式会社 | 積層型インクジェット記録ヘッド及びその製造方法並びにこの記録ヘッドを備えたプリンタ |
EP1199173B1 (en) | 1996-10-29 | 2009-04-29 | Panasonic Corporation | Ink jet recording apparatus and its manufacturing method |
DE69839540D1 (de) * | 1997-06-20 | 2008-07-10 | Seiko Epson Corp | Piezoelektrisches Schichtelement, Verfahren zum Herstellen und Tintenstrahldruckkopf |
JP3682684B2 (ja) | 1997-10-20 | 2005-08-10 | セイコーエプソン株式会社 | 圧電体薄膜素子の製造方法 |
JP3141840B2 (ja) * | 1998-04-02 | 2001-03-07 | 日本電気株式会社 | インクジェットプリントヘッドの製造方法 |
JP3267937B2 (ja) * | 1998-09-04 | 2002-03-25 | 松下電器産業株式会社 | インクジェットヘッド |
US7288420B1 (en) | 1999-06-04 | 2007-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing an electro-optical device |
CN1314246A (zh) * | 2000-03-21 | 2001-09-26 | 日本电气株式会社 | 喷墨头及其制造方法 |
US7232202B2 (en) | 2001-12-11 | 2007-06-19 | Ricoh Company, Ltd. | Drop discharge head and method of producing the same |
JP2003276192A (ja) * | 2002-03-22 | 2003-09-30 | Ricoh Co Ltd | 液滴吐出ヘッド及びその製造方法並びにインクジェット記録装置 |
US7204586B2 (en) * | 2001-12-18 | 2007-04-17 | Dimatix, Inc. | Ink jet printing module |
US7052117B2 (en) * | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
JP3555682B2 (ja) * | 2002-07-09 | 2004-08-18 | セイコーエプソン株式会社 | 液体吐出ヘッド |
JP3971279B2 (ja) * | 2002-09-20 | 2007-09-05 | キヤノン株式会社 | 圧電体素子の製造方法 |
JP4193684B2 (ja) * | 2003-12-08 | 2008-12-10 | ブラザー工業株式会社 | インクジェットヘッドの製造方法 |
US7568783B2 (en) * | 2004-01-29 | 2009-08-04 | Brother Kogyo Kabushiki Kaisha | Inkjet head |
US8491076B2 (en) | 2004-03-15 | 2013-07-23 | Fujifilm Dimatix, Inc. | Fluid droplet ejection devices and methods |
US7281778B2 (en) | 2004-03-15 | 2007-10-16 | Fujifilm Dimatix, Inc. | High frequency droplet ejection device and method |
CN101094770B (zh) | 2004-12-30 | 2010-04-14 | 富士胶卷迪马蒂克斯股份有限公司 | 喷墨打印 |
US7988247B2 (en) | 2007-01-11 | 2011-08-02 | Fujifilm Dimatix, Inc. | Ejection of drops having variable drop size from an ink jet printer |
US20080259134A1 (en) * | 2007-04-20 | 2008-10-23 | Hewlett-Packard Development Company Lp | Print head laminate |
JP5563354B2 (ja) * | 2010-04-01 | 2014-07-30 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP6241591B2 (ja) * | 2013-03-22 | 2017-12-06 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
US11666861B2 (en) | 2020-08-19 | 2023-06-06 | Ralph J. Mancini | Method and system for pre-purification of a feed gas stream |
JPWO2022168439A1 (ko) * | 2021-02-03 | 2022-08-11 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3946398A (en) * | 1970-06-29 | 1976-03-23 | Silonics, Inc. | Method and apparatus for recording with writing fluids and drop projection means therefor |
JPH02217254A (ja) * | 1989-02-17 | 1990-08-30 | Ricoh Co Ltd | インクジェットヘッド及びその製造方法 |
US5265315A (en) * | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
JPH05169654A (ja) * | 1991-12-20 | 1993-07-09 | Seiko Epson Corp | インクジェット記録ヘッド及びその製造方法 |
-
1994
- 1994-10-26 JP JP6262817A patent/JPH08118662A/ja active Pending
-
1995
- 1995-10-20 TW TW084111094A patent/TW275663B/zh active
- 1995-10-23 KR KR1019950036554A patent/KR960013664A/ko not_active Application Discontinuation
- 1995-10-25 EP EP95116823A patent/EP0709200A1/en not_active Withdrawn
- 1995-10-26 CN CN95118228A patent/CN1131092A/zh active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100537151B1 (ko) * | 2004-01-16 | 2005-12-16 | 도신 고교 가부시키가이샤 | 평판스크린 날염장치 |
Also Published As
Publication number | Publication date |
---|---|
JPH08118662A (ja) | 1996-05-14 |
CN1131092A (zh) | 1996-09-18 |
EP0709200A1 (en) | 1996-05-01 |
TW275663B (ko) | 1996-05-11 |
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