KR960006306U - Low Pressure Chemical Vapor Deposition Equipment - Google Patents

Low Pressure Chemical Vapor Deposition Equipment

Info

Publication number
KR960006306U
KR960006306U KR2019940017352U KR19940017352U KR960006306U KR 960006306 U KR960006306 U KR 960006306U KR 2019940017352 U KR2019940017352 U KR 2019940017352U KR 19940017352 U KR19940017352 U KR 19940017352U KR 960006306 U KR960006306 U KR 960006306U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
deposition equipment
Prior art date
Application number
KR2019940017352U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940017352U priority Critical patent/KR960006306U/en
Publication of KR960006306U publication Critical patent/KR960006306U/en

Links

KR2019940017352U 1994-07-13 1994-07-13 Low Pressure Chemical Vapor Deposition Equipment KR960006306U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940017352U KR960006306U (en) 1994-07-13 1994-07-13 Low Pressure Chemical Vapor Deposition Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940017352U KR960006306U (en) 1994-07-13 1994-07-13 Low Pressure Chemical Vapor Deposition Equipment

Publications (1)

Publication Number Publication Date
KR960006306U true KR960006306U (en) 1996-02-17

Family

ID=60665917

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940017352U KR960006306U (en) 1994-07-13 1994-07-13 Low Pressure Chemical Vapor Deposition Equipment

Country Status (1)

Country Link
KR (1) KR960006306U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application