KR970050345U - Wafer-mounted boat for chemical vapor deposition equipment - Google Patents
Wafer-mounted boat for chemical vapor deposition equipmentInfo
- Publication number
- KR970050345U KR970050345U KR2019960000078U KR19960000078U KR970050345U KR 970050345 U KR970050345 U KR 970050345U KR 2019960000078 U KR2019960000078 U KR 2019960000078U KR 19960000078 U KR19960000078 U KR 19960000078U KR 970050345 U KR970050345 U KR 970050345U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- vapor deposition
- chemical vapor
- deposition equipment
- mounted boat
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67306—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960000078U KR0140827Y1 (en) | 1996-01-06 | 1996-01-06 | Wafer boat of cvd |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960000078U KR0140827Y1 (en) | 1996-01-06 | 1996-01-06 | Wafer boat of cvd |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970050345U true KR970050345U (en) | 1997-08-12 |
KR0140827Y1 KR0140827Y1 (en) | 1999-04-15 |
Family
ID=19449016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960000078U KR0140827Y1 (en) | 1996-01-06 | 1996-01-06 | Wafer boat of cvd |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0140827Y1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100410982B1 (en) * | 2001-01-18 | 2003-12-18 | 삼성전자주식회사 | Boat for Semiconductor Manufacturing Apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6156121A (en) * | 1996-12-19 | 2000-12-05 | Tokyo Electron Limited | Wafer boat and film formation method |
-
1996
- 1996-01-06 KR KR2019960000078U patent/KR0140827Y1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100410982B1 (en) * | 2001-01-18 | 2003-12-18 | 삼성전자주식회사 | Boat for Semiconductor Manufacturing Apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR0140827Y1 (en) | 1999-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
N231 | Notification of change of applicant | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20080909 Year of fee payment: 11 |
|
LAPS | Lapse due to unpaid annual fee |