KR970050345U - Wafer-mounted boat for chemical vapor deposition equipment - Google Patents

Wafer-mounted boat for chemical vapor deposition equipment

Info

Publication number
KR970050345U
KR970050345U KR2019960000078U KR19960000078U KR970050345U KR 970050345 U KR970050345 U KR 970050345U KR 2019960000078 U KR2019960000078 U KR 2019960000078U KR 19960000078 U KR19960000078 U KR 19960000078U KR 970050345 U KR970050345 U KR 970050345U
Authority
KR
South Korea
Prior art keywords
wafer
vapor deposition
chemical vapor
deposition equipment
mounted boat
Prior art date
Application number
KR2019960000078U
Other languages
Korean (ko)
Other versions
KR0140827Y1 (en
Inventor
황철주
Original Assignee
주성엔지니어링주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주성엔지니어링주식회사 filed Critical 주성엔지니어링주식회사
Priority to KR2019960000078U priority Critical patent/KR0140827Y1/en
Publication of KR970050345U publication Critical patent/KR970050345U/en
Application granted granted Critical
Publication of KR0140827Y1 publication Critical patent/KR0140827Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67306—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019960000078U 1996-01-06 1996-01-06 Wafer boat of cvd KR0140827Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960000078U KR0140827Y1 (en) 1996-01-06 1996-01-06 Wafer boat of cvd

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960000078U KR0140827Y1 (en) 1996-01-06 1996-01-06 Wafer boat of cvd

Publications (2)

Publication Number Publication Date
KR970050345U true KR970050345U (en) 1997-08-12
KR0140827Y1 KR0140827Y1 (en) 1999-04-15

Family

ID=19449016

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960000078U KR0140827Y1 (en) 1996-01-06 1996-01-06 Wafer boat of cvd

Country Status (1)

Country Link
KR (1) KR0140827Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100410982B1 (en) * 2001-01-18 2003-12-18 삼성전자주식회사 Boat for Semiconductor Manufacturing Apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6156121A (en) * 1996-12-19 2000-12-05 Tokyo Electron Limited Wafer boat and film formation method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100410982B1 (en) * 2001-01-18 2003-12-18 삼성전자주식회사 Boat for Semiconductor Manufacturing Apparatus

Also Published As

Publication number Publication date
KR0140827Y1 (en) 1999-04-15

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Legal Events

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N231 Notification of change of applicant
E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20080909

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee