KR950015828A - 이중 주입 후방 확산된 금속산화물 반도체 장치 및 그 형성 방법 - Google Patents
이중 주입 후방 확산된 금속산화물 반도체 장치 및 그 형성 방법 Download PDFInfo
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- KR950015828A KR950015828A KR1019940029237A KR19940029237A KR950015828A KR 950015828 A KR950015828 A KR 950015828A KR 1019940029237 A KR1019940029237 A KR 1019940029237A KR 19940029237 A KR19940029237 A KR 19940029237A KR 950015828 A KR950015828 A KR 950015828A
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- 239000004065 semiconductor Substances 0.000 title claims abstract 15
- 238000002347 injection Methods 0.000 title claims abstract 10
- 239000007924 injection Substances 0.000 title claims abstract 10
- 238000000034 method Methods 0.000 title claims 4
- 238000009792 diffusion process Methods 0.000 title 1
- 229910044991 metal oxide Inorganic materials 0.000 title 1
- 150000004706 metal oxides Chemical class 0.000 title 1
- 239000000463 material Substances 0.000 claims abstract 14
- 239000000758 substrate Substances 0.000 claims abstract 11
- 238000002513 implantation Methods 0.000 claims 3
- 239000007943 implant Substances 0.000 claims 2
- 230000005684 electric field Effects 0.000 abstract 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66659—Lateral single gate silicon transistors with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1041—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface
- H01L29/1045—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface the doping structure being parallel to the channel length, e.g. DMOS like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1083—Substrate region of field-effect devices of field-effect transistors with insulated gate with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
NM0S트랜지스터는 n+ 유형의 반도체 물질로 형성된 드레인과 소스를 갖는다. p형 반도체 물질로 이루어진 기판영역은 소스와 드레인 사이에 위치한다. 게이트 영역은 기판영역 위에 또한 소스 영역과 드레인 영역 사이에 배치된다. 제1 주입 영역은 소스영역과 게이트 영역에 인접하여 배치된다. 제1 주입 영역은 제1 도핑 농도를 갖는 P 형의 반도체 물질로 이루어진다. 제2 주입 영역은 제1 주입 영역과 기판사이에 배치된다. 제2 주입 영역은 제2 도핑 농도를 갖는 P 형의 반도체 물질로 이루어진다. 채널 도핑 모양의 제1 및 제2 주입 영역은 장치 트랜스콘덕턴스를 최대화하기 위해 적절한 내부 전계를 얻도록 고쳐만들어지는 반면에, 동시에 장치 임계 전압과 펀치 쓰루 특성을 제어한다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명을 설명하는데 유용한 그래프.
Claims (6)
- 제1 유형의 반도체 물질을 갖는 소스 영역 (14)과; 제2 유형의 반도체 물질을 갖는 기판 영역 (16)과; 상기 소스 영역에 인접하여 위치하고, 제1 도핑 농도를 갖는 상기 제2 유형의 반도체 물질을 구비한 제1 주입영역(32) 및 상기 제1주입 영역과 상기 기판사이에 위치하고, 제2 도핑농도를 갖는 제2 유형의 반도체 물질을 구비한 제2 주입 영역을 포함하는 M0S 트랜지스터.
- 제1항에 있어서, 상기 기판 영역에 위치한 상기 제1 유형의 반도체 물질을 구비한 드레인영역 (20)을 더 포함하는 MOS 트랜지스터.
- 제2항에 있어서, 상기 기판 영역 (16)위에 위치하고 상기 소스 영역 (14)과 상기 드레인영역 (20) 사이에 위치한 게이트 영역 (3)을 더 포함하는 MOS 트랜지스터.
- 제1 유형의 반도체 물질을 구비한 소소 영역 (14)을 제공하는 단계와, 제2 유형의 반도체 물질을 구비한 기판영역 (16)을 제공하는 단계와, 제1 도핑 농도를 갖는 제2 유형의 반도체 물질을 구비하는 제1 주입 영역으로 상기 소스 영역에 인접한 제1 주입 영역 (32)을 배치하는 단계 및 제2 도핑 농도를 갖는 상기 제2 유형의 반도체 물질을 구비하는 제2주입 영역으로 상기 제1 주입 영역과 상기 기판사이에 제2 주입 영역(34)을 배치하는 단계를 포함하는 MOS 트랜지스터 형성방법.
- 제4항에 있어서, 상기 기판 영역상에 상기 제1 유형의 반도체 물질을 구비한 드레인 영역(20)을 배치하는 단계를 더 포함하는 M0S 트랜지스터 형성방법.
- 제5항에 있어서, 상기 기판 영역 위에 위치하고 상기 소소 영역과 상기 드레인 영역 사이에 위치하는 단계를 더 포함하는 MOS 트랜지스터 형성방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/153,503 US5371394A (en) | 1993-11-15 | 1993-11-15 | Double implanted laterally diffused MOS device and method thereof |
US153.503 | 1993-11-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950015828A true KR950015828A (ko) | 1995-06-17 |
Family
ID=22547476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940029237A KR950015828A (ko) | 1993-11-15 | 1994-11-09 | 이중 주입 후방 확산된 금속산화물 반도체 장치 및 그 형성 방법 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5371394A (ko) |
EP (1) | EP0653795B1 (ko) |
JP (1) | JPH07183501A (ko) |
KR (1) | KR950015828A (ko) |
CN (1) | CN1036816C (ko) |
DE (1) | DE69419871T2 (ko) |
SG (1) | SG50467A1 (ko) |
Families Citing this family (52)
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-
1993
- 1993-11-15 US US08/153,503 patent/US5371394A/en not_active Expired - Lifetime
-
1994
- 1994-11-07 DE DE69419871T patent/DE69419871T2/de not_active Expired - Lifetime
- 1994-11-07 SG SG1996002125A patent/SG50467A1/en unknown
- 1994-11-07 EP EP94117497A patent/EP0653795B1/en not_active Expired - Lifetime
- 1994-11-09 KR KR1019940029237A patent/KR950015828A/ko not_active Application Discontinuation
- 1994-11-10 CN CN94117619A patent/CN1036816C/zh not_active Expired - Lifetime
- 1994-11-11 JP JP6301678A patent/JPH07183501A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0653795A2 (en) | 1995-05-17 |
DE69419871D1 (de) | 1999-09-09 |
EP0653795A3 (en) | 1996-01-31 |
DE69419871T2 (de) | 2000-03-16 |
JPH07183501A (ja) | 1995-07-21 |
CN1036816C (zh) | 1997-12-24 |
US5371394A (en) | 1994-12-06 |
EP0653795B1 (en) | 1999-08-04 |
SG50467A1 (en) | 1998-07-20 |
CN1106573A (zh) | 1995-08-09 |
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A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |