KR920015577A - 반도체장치 - Google Patents
반도체장치 Download PDFInfo
- Publication number
- KR920015577A KR920015577A KR1019910024101A KR910024101A KR920015577A KR 920015577 A KR920015577 A KR 920015577A KR 1019910024101 A KR1019910024101 A KR 1019910024101A KR 910024101 A KR910024101 A KR 910024101A KR 920015577 A KR920015577 A KR 920015577A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor
- semiconductor layer
- layer
- conductive
- carrier concentration
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims 34
- 239000000758 substrate Substances 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Thin Film Transistor (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 제1실시예를 나타낸 측단면도, 제2도는 제1도의 트렌치깊이와 온저항의 관계를 설명하기 위해 나타낸 도면, 제3도는 제1도의 기판농도와 온저항의 관계를 설명하기 위해 나타낸 도면, 제4도는 제1도의 기판농도와 내압의 관계를 설명하기 위해 나타낸 도면, 제5도는 제1도의 매입층의 농도와 전계강도의 관계를 설명하기 위해 나타낸 도면, 제6도는 본 발명에 따른 제2실시예를 나타낸 것으로, 본 발명을 IGBT에 적용한 경우를 나타낸 측단면도, 제8도는 본 발명에 따른 제4실시예를 나타낸 것으로, 본 발명을 IPD에 적용한 경우를 나타낸 측단면도이다.
Claims (8)
- 제1도전형의 반도체기판(11;52)과, 이 반도체기판(11;52)상에 설치된 동일 도전형의 제1반도체층(12), 이 제1반도체층(12)층에 설치된 적어도 1개의 트렌치부 (16), 이 트렌치부(16)의 내부에 설치된 게이트전극(20) 및, 상기 트렌치부(16)의 밑부분과 상기 반도체기판(11;52)과의 상호간에 설치된 매립층(17)을 구비하여 구성된 것을 특징으로 하는 반도체장치.
- 제1항에 있어서, 상기 매립층(17)의 불순물 캐리어농도가 상기 반도체기판 (11;52)중의 불순물 캐리어농도 보다 낮고, 상기 제1반도체층(12)중의 불순물 캐리어농도보다 높은 것을 특징으로 하는 반도체장치.
- 제1항에 있어서, 상기 제1반도체층(12)내부에는 상기 트렌치부(16)의 주위에 위치해서 채널영역을 구성하는 제2도전층의 제2반도체층(13)과, 이 제2반도체층 (13)상에 형성되어 소오스영역을 구성하는 제1도전형의 제3반도체층(14)이 설치되어 있는 것을 특징으로 하는 반도체장치.
- 제1항에 있어서, 상기 제1반도체층(12)내부에는 절연영역(54)이 설치되고, 이 절연영역(54)을 개재해서 소신호회로영역(55)이 설치되어 있는 것을 특징으로 하는 반도체장치.
- 제1도전형의 반도체기판(31;41)과, 이 반도체기판(31;41)상에 설치된 제2도전형의 제1반도체층(12), 이 제1반도체층(12)에 설치된 적어도 1개의 트렌치부 (16), 이 트렌치부(16)의 내부에 설치된 게이트전극(20) 및, 상기 트렌치부(16)의 밑부분과 상기 반도체기판(31;41)과의 상호간에 설치된 매립층(17)을 구비하여 구성된 것을 특징으로 하는 반도체장치.
- 제5항에 있어서, 상기 반도체기판(31;41)과 제1반도체층(12)간에는 이 제1반도체층(12)과 동일 도전형의 제2반도체층(32)이 설치되고, 상기 매립층(17)은 상기 제2반도체층(32)에 접하여 설치되어 있는 것을 특징으로 하는 반도체장치.
- 제5항 또는 제6항중의 어느 한 항에 있어서, 상기 매립층(17)의 불순물 캐리어농도가 상기 제1반도체층(12)중의 불순물 캐리어농도보다 낮고, 상기 제2반도체층(32)중의 불순물 캐리어농도보다 높은 것을 특징으로 하는 반도체장치.
- 제5항에 있어서, 상기 제1반도체층(12)의 내부에는 상기트렌치부(16)의 주위에 위치해서 채널영역을 형성하는 제1도전형의 제3반도체층(13)과, 이 제3반도체층 (13)상에 형성된 제2도전형의 제4반도체층(14)이 설치되어 있는 것을 특징으로 하는 반도체장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP91-001083 | 1991-01-09 | ||
JP3001083A JP2635828B2 (ja) | 1991-01-09 | 1991-01-09 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920015577A true KR920015577A (ko) | 1992-08-27 |
KR960011939B1 KR960011939B1 (ko) | 1996-09-04 |
Family
ID=11491609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910024101A KR960011939B1 (ko) | 1991-01-09 | 1991-12-24 | 반도체장치 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0494597B1 (ko) |
JP (1) | JP2635828B2 (ko) |
KR (1) | KR960011939B1 (ko) |
DE (1) | DE69215389T2 (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100521994B1 (ko) * | 1996-12-27 | 2005-12-21 | 페어차일드코리아반도체 주식회사 | 트렌치게이트형모스트랜지스터및그제조방법 |
KR100518506B1 (ko) * | 1998-02-06 | 2006-04-21 | 페어차일드코리아반도체 주식회사 | 트랜치 게이트형 전력용 모스 소자 및 그 제조방법 |
KR100850689B1 (ko) * | 2000-06-16 | 2008-08-07 | 제네럴 세미컨덕터, 인코포레이티드 | 파워 mosfet 및 이러한 파워 mosfet을 제조하는 방법 |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5349224A (en) * | 1993-06-30 | 1994-09-20 | Purdue Research Foundation | Integrable MOS and IGBT devices having trench gate structure |
US5323040A (en) * | 1993-09-27 | 1994-06-21 | North Carolina State University At Raleigh | Silicon carbide field effect device |
JPH07235672A (ja) | 1994-02-21 | 1995-09-05 | Mitsubishi Electric Corp | 絶縁ゲート型半導体装置およびその製造方法 |
US5597765A (en) * | 1995-01-10 | 1997-01-28 | Siliconix Incorporated | Method for making termination structure for power MOSFET |
US5637898A (en) * | 1995-12-22 | 1997-06-10 | North Carolina State University | Vertical field effect transistors having improved breakdown voltage capability and low on-state resistance |
US6426260B1 (en) * | 1997-12-02 | 2002-07-30 | Magepower Semiconductor Corp. | Switching speed improvement in DMO by implanting lightly doped region under gate |
US6011280A (en) * | 1998-06-26 | 2000-01-04 | Delco Electronics Corporation | IGBT power device with improved resistance to reverse power pulses |
GB0005650D0 (en) * | 2000-03-10 | 2000-05-03 | Koninkl Philips Electronics Nv | Field-effect semiconductor devices |
US6657254B2 (en) * | 2001-11-21 | 2003-12-02 | General Semiconductor, Inc. | Trench MOSFET device with improved on-resistance |
EP1671374B1 (en) | 2003-10-08 | 2018-05-09 | Toyota Jidosha Kabushiki Kaisha | Insulated gate type semiconductor device and manufacturing method thereof |
US8093621B2 (en) | 2008-12-23 | 2012-01-10 | Power Integrations, Inc. | VTS insulated gate bipolar transistor |
US7871882B2 (en) * | 2008-12-20 | 2011-01-18 | Power Integrations, Inc. | Method of fabricating a deep trench insulated gate bipolar transistor |
US20100155831A1 (en) * | 2008-12-20 | 2010-06-24 | Power Integrations, Inc. | Deep trench insulated gate bipolar transistor |
JP6284314B2 (ja) | 2012-08-21 | 2018-02-28 | ローム株式会社 | 半導体装置 |
JP6190206B2 (ja) * | 2012-08-21 | 2017-08-30 | ローム株式会社 | 半導体装置 |
CN111986994A (zh) * | 2020-08-17 | 2020-11-24 | 江苏东海半导体科技有限公司 | Igbt制作方法及igbt半导体结构 |
CN113745339B (zh) * | 2021-09-07 | 2022-08-19 | 无锡新洁能股份有限公司 | 高可靠性功率半导体器件及其制作方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658267A (en) * | 1979-10-17 | 1981-05-21 | Nippon Telegr & Teleph Corp <Ntt> | Insulated gate type field-effect transistor |
JPS59193064A (ja) * | 1983-04-15 | 1984-11-01 | Matsushita Electric Works Ltd | 高耐圧縦型トランジスタ装置 |
JPS61148815A (ja) * | 1984-12-24 | 1986-07-07 | Hitachi Ltd | 半導体集積回路装置及びその製造方法 |
JPS61171162A (ja) * | 1985-01-25 | 1986-08-01 | Matsushita Electric Works Ltd | バイポーラmis・fetの製造方法 |
JPH01111348A (ja) * | 1987-10-24 | 1989-04-28 | Nec Corp | 単結晶シリコン島領域を有する半導体装置及びその製造方法 |
US4893160A (en) * | 1987-11-13 | 1990-01-09 | Siliconix Incorporated | Method for increasing the performance of trenched devices and the resulting structure |
-
1991
- 1991-01-09 JP JP3001083A patent/JP2635828B2/ja not_active Expired - Lifetime
- 1991-12-24 KR KR1019910024101A patent/KR960011939B1/ko not_active IP Right Cessation
-
1992
- 1992-01-02 EP EP92100027A patent/EP0494597B1/en not_active Expired - Lifetime
- 1992-01-02 DE DE69215389T patent/DE69215389T2/de not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100521994B1 (ko) * | 1996-12-27 | 2005-12-21 | 페어차일드코리아반도체 주식회사 | 트렌치게이트형모스트랜지스터및그제조방법 |
KR100518506B1 (ko) * | 1998-02-06 | 2006-04-21 | 페어차일드코리아반도체 주식회사 | 트랜치 게이트형 전력용 모스 소자 및 그 제조방법 |
KR100850689B1 (ko) * | 2000-06-16 | 2008-08-07 | 제네럴 세미컨덕터, 인코포레이티드 | 파워 mosfet 및 이러한 파워 mosfet을 제조하는 방법 |
Also Published As
Publication number | Publication date |
---|---|
DE69215389T2 (de) | 1997-04-24 |
EP0494597A1 (en) | 1992-07-15 |
EP0494597B1 (en) | 1996-11-27 |
JPH04251983A (ja) | 1992-09-08 |
DE69215389D1 (de) | 1997-01-09 |
JP2635828B2 (ja) | 1997-07-30 |
KR960011939B1 (ko) | 1996-09-04 |
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