KR880013246A - 반도체 장치 - Google Patents
반도체 장치 Download PDFInfo
- Publication number
- KR880013246A KR880013246A KR1019880004590A KR880004590A KR880013246A KR 880013246 A KR880013246 A KR 880013246A KR 1019880004590 A KR1019880004590 A KR 1019880004590A KR 880004590 A KR880004590 A KR 880004590A KR 880013246 A KR880013246 A KR 880013246A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- metal base
- hole
- wiring
- gallium arsenide
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/147—Semiconductor insulating substrates
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H01L2924/10329—Gallium arsenide [GaAs]
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- H01L2924/1517—Multilayer substrate
- H01L2924/15172—Fan-out arrangement of the internal vias
- H01L2924/15173—Fan-out arrangement of the internal vias in a single layer of the multilayer substrate
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Wire Bonding (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도 및 제 2 도는 본 발명에 관한 반도체장치의 실시예를 표시한 사시도, 제 3 도는 제 2 도에서의 중앙 단면도.
Claims (5)
- 방열용의 금속베이스와, 이 금속 베이스상에 고착되고, 적어도 표면에 배선이 형성되는 동시에 중앙부에 구멍부가 형성된 실리콘 배선판과, 상기 구멍부에 감입되어 상기 금속메이스에 고착되는 동시에, 상기 실리콘 기판표면의 배선과 와이어로 접속된 화합물 반도체칩을 구비한 장치.
- 제 1 항에 있어서, 상기 화합물 반도체가 갈륨비소인 반도체 장치.
- 제 2 항에 있어서, 상기 금속베이스가 갈륨비소와 근사한 열팽창계수를 가진 것인 반도체 장치.
- 제 3 항에 있어서, 상기 금속베이스가 구리 텅스텐합금으로 형성되어 있는 반도체 장치.
- 제 1 항에 있어서, 상기 구멍부의 측벽이 수평면에 대하여 54.7°의 각도로 이루는 결정방위(111)면인 것을 특징으로 하는 반도체 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62105263A JPS63271944A (ja) | 1987-04-28 | 1987-04-28 | 半導体装置 |
JP62-105263 | 1987-04-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880013246A true KR880013246A (ko) | 1988-11-30 |
KR910002812B1 KR910002812B1 (ko) | 1991-05-04 |
Family
ID=14402770
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880004590A KR910002812B1 (ko) | 1987-04-28 | 1988-04-22 | 반도체장치 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5157479A (ko) |
EP (1) | EP0292725B1 (ko) |
JP (1) | JPS63271944A (ko) |
KR (1) | KR910002812B1 (ko) |
CA (1) | CA1307053C (ko) |
DE (1) | DE3888017T2 (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998015981A1 (fr) * | 1996-10-10 | 1998-04-16 | Samsung Electronics Co., Ltd. | Circuit integre hybride et a frequence micro-ondes |
FR2794571B1 (fr) * | 1999-06-03 | 2003-07-04 | Possehl Electronic France Sa | Dispositif dissipateur de chaleur pour composants electroniques |
AU2000268504A1 (en) * | 2000-08-04 | 2002-02-18 | Possehl Electronic France S.A. | Heat dissipating device for electronic components |
JP4806803B2 (ja) * | 2003-10-21 | 2011-11-02 | Dowaメタルテック株式会社 | 金属−セラミックス接合基板およびその製造方法 |
US6933443B2 (en) * | 2004-01-28 | 2005-08-23 | Infineon Technologies North America Corp. | Method for bonding ceramic to copper, without creating a bow in the copper |
US20070080458A1 (en) * | 2005-10-11 | 2007-04-12 | Tsuyoshi Ogawa | Hybrid module and method of manufacturing the same |
US9704809B2 (en) * | 2013-03-05 | 2017-07-11 | Maxim Integrated Products, Inc. | Fan-out and heterogeneous packaging of electronic components |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5229272A (en) * | 1975-08-29 | 1977-03-04 | Fujitsu Ltd | Method of forming radiation ray detecting device |
US4246595A (en) * | 1977-03-08 | 1981-01-20 | Matsushita Electric Industrial Co., Ltd. | Electronics circuit device and method of making the same |
JPS5423388A (en) * | 1977-07-22 | 1979-02-21 | Hitachi Ltd | Semiconductor integrated-circuit device and its manufacture |
JPS57112056A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Semiconductor device |
JPS58143556A (ja) * | 1982-02-22 | 1983-08-26 | Fujitsu Ltd | 高密度集積回路用パツケ−ジ |
JPS59107554A (ja) * | 1982-12-13 | 1984-06-21 | Hitachi Ltd | 半導体モジユ−ル |
JPS59151443A (ja) * | 1983-02-17 | 1984-08-29 | Fujitsu Ltd | 半導体装置 |
US4630172A (en) * | 1983-03-09 | 1986-12-16 | Printed Circuits International | Semiconductor chip carrier package with a heat sink |
JPS6022345A (ja) * | 1983-07-19 | 1985-02-04 | Toyota Central Res & Dev Lab Inc | 半導体装置 |
JPS60167358A (ja) * | 1984-02-09 | 1985-08-30 | Sumitomo Electric Ind Ltd | 半導体素子塔載用回路基板 |
US4692791A (en) * | 1984-07-13 | 1987-09-08 | Texas Instruments Incorporated | Monolithic IMPATT with stripline leads |
JPS6174354A (ja) * | 1984-09-19 | 1986-04-16 | Sumitomo Electric Ind Ltd | 高周波デバイス用パツケ−ジ |
US4866501A (en) * | 1985-12-16 | 1989-09-12 | American Telephone And Telegraph Company At&T Bell Laboratories | Wafer scale integration |
-
1987
- 1987-04-28 JP JP62105263A patent/JPS63271944A/ja active Pending
-
1988
- 1988-04-22 KR KR1019880004590A patent/KR910002812B1/ko not_active IP Right Cessation
- 1988-04-26 CA CA 565145 patent/CA1307053C/en not_active Expired - Fee Related
- 1988-04-28 EP EP19880106826 patent/EP0292725B1/en not_active Expired - Lifetime
- 1988-04-28 DE DE3888017T patent/DE3888017T2/de not_active Expired - Fee Related
-
1990
- 1990-06-08 US US07/536,079 patent/US5157479A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA1307053C (en) | 1992-09-01 |
EP0292725B1 (en) | 1994-03-02 |
JPS63271944A (ja) | 1988-11-09 |
US5157479A (en) | 1992-10-20 |
EP0292725A2 (en) | 1988-11-30 |
DE3888017D1 (de) | 1994-04-07 |
DE3888017T2 (de) | 1994-07-21 |
KR910002812B1 (ko) | 1991-05-04 |
EP0292725A3 (en) | 1990-05-16 |
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